Circularly polarized waveguide device, preparation method and application

Abstract

The embodiment of the invention discloses a circular polarization waveguide device, a preparation method and application. The preparation method comprises the following steps: alternately depositing two or more materials with different refractive indexes on a substrate to form a reflector substrate with a periodic multilayer film structure; assembling a light-emitting gain medium on the reflector substrate to obtain a light-emitting layer; metal chiral nano-particles are deposited on the light-emitting layer to serve as a coupling incident end of circularly polarized light conduction, and achiral metal nano-particles are deposited on the light-emitting layer to serve as a coupling emergent end of circularly polarized light conduction. According to the invention, the light-emitting layer is arranged between the chiral plasmon particles and the emitter substrate surface guide mode, and the achiral nanoparticles are used as coupling output ends, so that remote directional transmission of optical signals and enhancement of coupling efficiency are realized without an additional waveguide structure.

Description

Technical Field

[0001] The present invention belongs to the technical field of optoelectronic devices, and in particular relates to a circularly polarized waveguide device, a preparation method and an application thereof. Background Art

[0002] With the continuous development of optoelectronics and integrated photonic devices, the generation and manipulation of circularly polarized light has shown broad application potential in fields such as three-dimensional displays, quantum communications, chiral molecular recognition, and spin photonics. Circularly polarized luminescence (CPL) refers to the emission of light signals with a specific chiral circular polarization state, which enables the encoding and transmission of optical spin information. However, existing CPL materials generally suffer from low luminescence efficiency, insufficient circular polarization, and limited directional control capabilities, making them inadequate for high-performance optoelectronic devices. Circularly polarized waveguides, as key structures for efficient transmission and integration of circularly polarized light, have garnered significant attention in recent years. These waveguides hold significant value in enabling on-chip spin state manipulation, polarization-multiplexed communications, and the construction of topological photonic devices. Plasmonic waveguides and traditional dielectric waveguides are two important types of transmission structures. Plasmonic waveguides rely on surface plasmons at the metal-dielectric interface to achieve strong, localized subwavelength-scale light field transmission, making them suitable for high-density integration and sensing applications. However, high metal absorption losses limit transmission distances. In contrast, dielectric waveguides achieve low-loss optical transmission through total internal reflection, making them suitable for large-scale integration and long-distance communications. Both types of waveguides have their own advantages, but achieving low-loss, high-efficiency optical transmission while maintaining polarization remains a key issue in current research and practical applications.

[0003] Distributed Bragg reflectors (DBRs) are structures that achieve high reflectivity and high Q-factor through periodic refractive index modulation in optical waveguides or photonic crystals. They can support planar waveguide modes or surface Bragg modes. These structures not only achieve narrowband filtering and high reflectivity but also effectively couple near-field excited light to surface guided modes for low-loss propagation. They are widely used in integrated photonic devices, beam shaping, and enhancing light-matter interactions. However, DBRs have limited polarization control capabilities, particularly incapable of achieving circularly polarized output and transmission.

[0004] Existing research often optimizes plasmon and DBR structures independently, lacking an integrated device design that organically combines chiral plasmon near-field enhancement with DBR surface guided modes. The key technical challenge remains to overcome the challenges of integrating chiral nanoparticles with DBRs to achieve efficient chirality-selective excitation of photoluminescence and couple it to the DBR surface guided modes for directional propagation. Summary of the Invention

[0005] One object of the present invention is to address the shortcomings of the existing technology and provide a method for preparing a circularly polarized waveguide device. This method precisely places quantum dots between chiral plasmon particles and the guided mode on the surface of the emitter substrate, and uses achiral nanoparticles as the coupling output end, thereby achieving long-range directional transmission of optical signals and enhancing coupling efficiency without the need for an external waveguide structure.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solutions: A method for preparing a circularly polarized waveguide device comprises the following steps: Step 1: Alternately depositing two or more materials with different refractive indices on a substrate to form a reflector substrate with a periodic multilayer film structure; Step 2: assembling the luminescent gain medium on the reflector substrate to obtain a luminescent layer; Step 3: depositing metal chiral nanoparticles on the light-emitting layer as the coupling incident end of circularly polarized light conduction, and depositing achiral metal nanoparticles on the light-emitting layer as the coupling output end of circularly polarized light conduction.

[0007] Furthermore, in step 1, the refractive index difference between the two materials of adjacent film layers is 0.2-1.

[0008] Furthermore, the high refractive index material in the reflector substrate is 、ZnS、 or One or more of the following, the low refractive index material is a polymer, 、 or One or more of .

[0009] Furthermore, the number of film layers of the reflector substrate in step 1 is 10-20 layers, and the thickness of each film layer is / ,in, is the central wavelength, is the refractive index of the film material.

[0010] Furthermore, the luminescent gain medium is one or more of quantum dots, dye molecules, two-dimensional materials, and rare earth materials.

[0011] Furthermore, the metal chiral nanoparticles are one or more chiral nanoparticle structures based on gold, silver or copper.

[0012] Another object of the present invention is to provide a circularly polarized waveguide device obtained according to the above-mentioned method for preparing the circularly polarized waveguide device.

[0013] Furthermore, the circularly polarized waveguide device includes an emitter substrate layer, a light-emitting layer deposited on the emitter substrate layer, and a coupling input end and a coupling output end deposited on the light-emitting layer; Wherein, the emitter base layer is a base having a periodic multilayer film structure on its surface; The light-emitting layer is obtained by depositing a light-emitting gain medium on an emitter substrate.

[0014] Furthermore, the central wavelength range of the reflection spectrum of the reflector substrate is 400 nm-800 nm, and the emission wavelength of the light-emitting layer is smaller than the central wavelength of the reflection spectrum of the reflector substrate.

[0015] The present invention also provides an application of the circularly polarized waveguide device described above, wherein the circularly polarized waveguide device is applied to photonic chip integration, optical logic operation, chiral optical detection, and on-chip nano-optical communication systems.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention boasts a simple preparation method. Through conventional thin-film deposition, light-emitting layer self-assembly (waveguide etching), and nanoparticle self-assembly processes, it achieves CMOS / III-V hybrid integration compatibility. The device fabricated by this method precisely places quantum dots between chiral plasmon particles and DBR surface guided modes. By leveraging chiral plasmon near-field enhancement and the DBR's high-reflection / low-loss surface Bragg modes, and using achiral nanoparticles as coupling output terminals, it achieves long-range directional transmission of optical signals and enhanced coupling efficiency without the need for an external waveguide structure.

[0017] 2. The chiral plasmon particles of the present invention provide a local field enhancement greater than 10 times, significantly improving the excitation efficiency of the light-emitting layer; 3. The device prepared by the present invention excites the local superchiral field of the corresponding chiral nanoparticles, thereby obtaining high-contrast circularly polarized light emission; 4. The present invention precisely matches the luminous frequency of the light-emitting layer with the Bragg guided mode on the DBR surface to achieve high emission coupling; 5. The surface Bragg mode of the device prepared by the present invention has low propagation loss at the DBR interface, which facilitates long-distance transmission and integration on chip; In summary, the present invention provides a new approach to the design and application of circularly polarized nano-light sources and waveguide devices, significantly improving the intensity, chiral selectivity and on-chip propagation performance of quantum dot photoluminescence, and offering a new technical path for monolithic polarization demodulation, optical logic operations, chiral optical sensing and integrated photonic quantum devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1Flow chart for preparing a circularly polarized waveguide device according to Example 1 of the present invention; wherein: 1. silicon dioxide medium; 2. tantalum pentoxide medium; 3. quantum dots (QDs) with an emission wavelength of 525 nm; 4. chiral nanoparticles.

[0019] Figure 2 A scanning electron microscope image of the distributed Bragg reflector substrate provided in Example 1 of the present invention; Figure 3 Scanning electron microscope images of left-handed and right-handed gold nanoparticles provided in Example 1 of the present invention; Figure 4 The scattering spectrum and circular difference scattering spectrum of the gold nanoparticles on the distributed Bragg reflector substrate provided in Example 1 of the present invention, wherein (a) is the scattering spectrum of left-handed nanoparticles, including left-handed scattering components and right-handed scattering components; (b) is the scattering spectrum of right-handed nanoparticles; and (c) is the circular difference scattering spectrum of left-handed and right-handed nanoparticles; Figure 5 Dark-field optical imaging of left-handed and right-handed gold nanoparticles on a distributed Bragg reflector provided in Example 1 of the present invention; Figure 6 Photoluminescence test results of the circularly polarized nano-light source of the circularly polarized waveguide device provided in Example 1 of the present invention, wherein (a) is the fluorescence spectrum of achiral gold nanoparticles enhancing quantum dots, (b) is the fluorescence spectrum of left-handed nanoparticles enhancing quantum dots, (c) is the fluorescence spectrum of right-handed nanoparticles enhancing quantum dots, and (d) is the asymmetry factor spectrum of achiral, left-handed, and right-handed particle-enhanced quantum dots. Figure 7 A flow chart for preparing a circularly polarized waveguide device according to embodiment 2 of the present invention; Figure 8 Mode distribution of surface waves propagating through a distributed Bragg reflector provided in Example 2 of the present invention. (a) is a microscopic image of a broadband pulsed laser propagating at the interface between a substrate and air; (b) is a spectrum of propagation modes in the 450 nm to 600 nm band. Figure 9 Comparative experimental results of surface waves propagating on a silica substrate provided in Example 2 of the present invention, wherein (a) is a dark-field microscopic image of gold nanoparticles on the silica surface illuminated by a halogen lamp, (b) is a microscopic image of gold nanoparticles on the silica surface illuminated by a halogen lamp and a laser light source, and (c) is a microscopic image of gold nanoparticles on the silica surface illuminated by a laser light source. Figure 10The fluorescence spectra and surface wave propagation spectra of quantum dots on a silica substrate provided in Example 2 of the present invention, as well as their corresponding luminescence asymmetry factors, wherein (a) is the fluorescence spectrum of left-handed particles enhancing quantum dot luminescence, (b) is the fluorescence spectrum of right-handed particles enhancing quantum dot luminescence, (c) is the fluorescence spectrum of left-handed particles enhancing quantum dot luminescence propagation on the surface, and (d) are the asymmetry factor spectra of left-handed and right-handed particles enhancing quantum dot in situ luminescence and propagation on the silica surface; Figure 11 The circularly polarized waveguide device and optical imaging thereof provided in embodiment 2 of the present invention; Figure 12 The test results of the circularly polarized waveguide device provided in Example 2 of the present invention, wherein (a) is the fluorescence spectrum of the left-handed particle-enhanced quantum dots in situ luminescence, (b) is the fluorescence spectrum of the right-handed particle-enhanced quantum dots in situ luminescence, (c) is the fluorescence spectrum of the left-handed particle-enhanced quantum dots at 33 μm, (d) is the fluorescence spectrum of the right-handed particle-enhanced quantum dots at 33 μm, (e) is the fluorescence spectrum of the left-handed particle-enhanced quantum dots at 53 μm, (f) is the fluorescence spectrum of the right-handed particle-enhanced quantum dots at 53 μm, (g) is the fluorescence spectrum of the left-handed particle-enhanced quantum dots at 63 μm, (h) is the fluorescence spectrum of the right-handed particle-enhanced quantum dots at 63 μm, (i) is the fluorescence spectrum of the left-handed particle-enhanced quantum dots at 88 μm, (j) is the fluorescence spectrum of the right-handed particle-enhanced quantum dots at 88 μm, and (k) is the fluorescence spectrum of the left-handed particle-enhanced quantum dots at 97 The fluorescence spectrum of the quantum dots at 97 μm is enhanced by the right-handed particles, (l) is the fluorescence spectrum of the quantum dots at 97 μm is enhanced by the right-handed particles, (m) is the fluorescence spectrum of the quantum dots at 115 μm is enhanced by the left-handed particles, and (n) is the fluorescence spectrum of the quantum dots at 115 μm is enhanced by the right-handed particles. Figure 13 The relationship between the intensity and chiral asymmetry of the circularly polarized waveguide device and the transmission distance provided in Example 2 of the present invention; DETAILED DESCRIPTION The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0020] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0021] The present invention will be further described below with reference to specific examples, but they are not intended to limit the present invention.

[0022] The embodiment of the present invention discloses a method for preparing a circularly polarized waveguide device, comprising the following steps: A reflector substrate having a periodic multilayer film structure is formed by alternately depositing two or more materials with different refractive indices on a substrate; In this step, when different refractive index materials are periodically deposited on the substrate, one of the materials between adjacent film layers is a high refractive index material and the other is a low refractive index material, wherein the high refractive index material is 、ZnS、 or One or more of the following, the low refractive index material is a polymer, 、 or In order to ensure a moderate reflectivity at the interface to form effective Bragg interference and avoid excessive interface stress leading to film peeling, the refractive index difference between the two materials of adjacent layers is 0.2-1. In order to strike a balance between obtaining sufficient reflectivity and controlling costs, and based on the phase matching principle, the optical path difference of the reflected light from adjacent interfaces is / 2 to achieve maximum reflection efficiency, the number of film layers on the reflector substrate is 10-20 layers, and the thickness of each film is / ,in, is the central wavelength, is the refractive index of the film material. In the actual fabrication process, the reflection wavelength can be adjusted by adjusting the thickness of the periodic film layer. The reflective spectrum of the reflector substrate with a periodic multilayer film structure fabricated using the above method has a central wavelength range of 400 nm to 800 nm.

[0023] Assembling quantum dots or dye molecules on a reflector substrate to obtain a light-emitting layer; In this step, quantum dots can be CdSe core-shell quantum dots coated with oleic acid (OA) or trioctylphosphine oxide (TOPO) ligands, or organic dye molecules with a luminescence wavelength of around 520 nm. These are self-assembled to form a light-emitting layer. The emission wavelength of the light-emitting layer should be approximately 200 nm less than the central reflection wavelength of the DBR.

[0024] Metal chiral nanoparticles are deposited on the light-emitting layer as the coupling incident end of circularly polarized light conduction, and non-chiral metal nanoparticles are deposited on the light-emitting layer as the coupling output end of circularly polarized light conduction.

[0025] In this step, chiral metal nanoparticles are evenly applied to the light-emitting layer by spin coating, thereby forming a nanoparticle film with chiral optical properties. This film serves as the coupling input for circularly polarized light transmission. The chiral metal nanoparticles can be one or more of gold, silver, or copper-based chiral nanoparticle structures.

[0026] A laser is used as an excitation light source to in situ excite CdSe quantum dots preassembled in the nanogap between chiral micro-nanoparticles and a reflector substrate. The stimulated emission of the quantum dots produces a strong fluorescence scattering signal, forming a stable circularly polarized nanolight source. Subsequently, a suspension of achiral spherical gold nanoparticles is evenly applied to the surface of the light-emitting layer by spin coating within a radiation range of approximately 80 μm from the luminescent region. This constructs an array of micro-nano spherical particles, which serve as a nano-optical antenna to achieve directional coupling output of the light signal emitted by the quantum dots. This enables long-range directional transmission of the light signal and enhances coupling efficiency without the need for an external waveguide structure. A circularly polarized waveguide device is prepared using the above method.

[0027] The synthesis of these chiral nanoparticles and the peak position of the quantum dot emission can be optimized based on actual needs. For example, the anisotropic growth of chiral plasmonic nanoparticles can be controlled by adjusting the synthesis temperature, pH value, surfactant type, and the use of templates. The peak position of the quantum dot emission can be optimized by controlling quantum dot size, adjusting the core-shell structure components, and modifying the surface ligands. The circularly polarized waveguide device prepared above can achieve highly directional and efficient optical signal output at the micro-nanoscale, making it suitable for integrated photonic devices, chiral optical detection, and on-chip nano-optical communication systems.

[0028] In order to better illustrate the present invention, specific examples are given below.

[0029] Example 1 See also Figure 1 As shown, Example 1 provides a method for preparing a nano-light source based on synergistic enhancement of chiral plasmon nanoparticles and distributed Bragg reflectors, which specifically includes the following steps: 1) Preparation of distributed Bragg reflector substrate The pre-treated high-flatness single crystal silicon substrate was placed in a Veeco ion beam sputtering system, and 12 pairs of high refractive index tantalum pentoxide ( ) and low refractive index silica ( ) films to form an alternating stacked structure. Layer 2 thickness is 88nm, Layer 1 is 127nm thick. Ion-assisted deposition improves film density and interface quality, resulting in a distributed Bragg reflector (DBR) with a reflectivity exceeding 99.95% at 750nm and excellent surface flatness. Figure 2 The cross-sectional scanning electron microscope morphology of the distributed Bragg reflector substrate is presented. The characterization results show that the DBR film presents a highly ordered periodic stacking structure, and the flatness and layer thickness uniformity reach extremely high levels, fully confirming the reliability of the preparation process.

[0030] 2) Preparation of CdSe quantum dot monolayer film A clean, hydrophilic, high-reflectivity distributed Bragg reflector (DBR) substrate was placed in a polytetrafluoroethylene container. 600 μL of acetonitrile was added as the bottom solvent. Then, 2 μL of a 1.6 μM, oil-soluble CdSe quantum dot n-hexane solution with a luminescence peak at 525 nm and a particle size of approximately 8 nm was slowly added, allowing the dots to float at the liquid-liquid interface above the acetonitrile. The solution was allowed to stand at room temperature for several minutes to allow the quantum dots to spontaneously assemble into a monolayer at the interface. The DBR substrate was then slowly removed, and the monolayer CdSe quantum dot film was evenly transferred to the substrate surface, forming a highly uniform and complete quantum dot monolayer film.

[0031] 3) Chemical synthesis of metal chiral nanoparticles and device preparation After thoroughly mixing 4.25 mL of deionized water, 100 μL of a 10 mM chloroauric acid solution, and 120 μL of a 0.10 M ascorbic acid solution, 10 μL of a 0.1 mM L- or D-cysteine ​​solution was added. The mixture was mixed thoroughly and allowed to stand in a 30°C water bath for 2 hours to induce the formation of chiral gold nanoparticles. After the reaction was complete, the unreacted product was removed by centrifugation at 4000 rpm for 5 minutes, and the nanoparticle precipitate was collected. Finally, the precipitate was resuspended and applied to the target substrate using spin coating (4000 rpm for 60 seconds), forming a uniformly distributed chiral gold nanoparticle film 4 exhibiting chiral optical properties. Figure 3 Scanning electron microscopy morphology and Figure 4 The chiral scattering spectral characterization synergistically confirmed that the chemically synthesized chiral gold nanoparticles have good uniformity, and the circular difference scattering spectral signal clearly shows a symmetrical distribution, which fully demonstrates that they have distinct chiral characteristics and excellent structural stability.

[0032] 4) Testing of nano-light sources A 457 nm, 10 μW laser was used to excite the CdSe quantum dots sandwiched in the nano-gap of the chiral micro-nanoparticles / DBR high reflective substrate. After being excited, the quantum dots emitted a strong fluorescence scattering signal at a wavelength of about 525 nm, forming a stable circularly polarized nano-light source. Figure 5 and 6 As shown, the nanoparticles are located above the DBR substrate and the single-layer quantum dot. The quantum dot emission peak is at 525nm, and the chiral asymmetry factor is approximately 0.9. Subsequently, within the approximately 80μm radiation range of this luminescent region, a suspension of spherical achiral gold nanoparticles with a diameter of 80 nanometers is evenly coated on the target substrate surface by spin coating at a speed of 4000rpm for 60 seconds. This creates an array of micro-nano spherical particles that serve as a nano-optical antenna, achieving directional coupling output of the light signal emitted by the quantum dots.

[0033] Example 2 See also Figure 7 As shown, a method for preparing a circularly polarized waveguide device based on synergistic enhancement of chiral plasmon nanoparticles and distributed Bragg reflectors is provided, which specifically includes the following steps: 1) Distributed Bragg reflector (DBR) substrate preparation In a Veeco ion beam sputtering system, 12 pairs of ions were deposited sequentially on a pre-treated single crystal silicon substrate under high vacuum conditions. (88 nm) / The team used an ion-assisted technique to enhance the film density, ultimately achieving a DBR substrate with a reflectivity of >99.95% at 750 nm and a highly flat surface. Figure 8 It shows that the optical waveguide on the DBR substrate has the strongest propagation efficiency at 525 nm. Figure 9 and 10 As shown, the silica substrate does not have the ability to guide light.

[0034] 2) Preparation of CdSe quantum dot monolayer film A hydrophilized DBR substrate was placed in a polytetrafluoroethylene container, 600 μL of acetonitrile was added, and then 2 μL of a 1.6 μM n-hexane solution of CdSe quantum dots (luminescence peak at 525 nm, particle size approximately 8 nm) was dripped onto the liquid surface. After standing at room temperature, the quantum dots self-assembled into a monolayer at the liquid-liquid interface. The DBR substrate was then slowly removed and the quantum dot film was transferred to the surface, forming a highly uniform and complete monolayer film.

[0035] 3) Synthesis of chiral gold nanoparticles and film construction Chiral nanoparticles were synthesized by mixing 4.25 mL of deionized water, 100 μL of 10 mM chloroauric acid, and 120 μL of 0.10 M ascorbic acid. The mixture was then added with 10 μL of 0.1 mM L- / D-cysteine ​​and incubated in a 30°C water bath for 2 hours. After purification by centrifugation at 4000 rpm for 5 minutes, the pellet was resuspended and spin-coated (4000 rpm for 60 seconds) onto the target substrate, forming a uniform, chiral, optically active gold nanoparticle film.

[0036] 4) Testing of optical waveguide devices A 457 nm, 10 μW laser was used to excite CdSe quantum dots located in the nanogaps of the chiral micro-nanoparticles / DBR highly reflective substrate, and a micro-nano spherical particle array optical antenna was constructed within its radiation range of approximately 80 μm. The chiral structure was used to directionally control the fluorescence field, realizing waveguide-free directional long-distance transmission of quantum dot optical signals and significantly enhancing the coupling efficiency.

[0037] Then the circular polarization waveguide performance of nanoparticles and Bragg reflectors was tested, e.g. Figure 11 As shown in the figure, the results show that the fluorescence propagates up to 60 μm on the surface of the DBR substrate. Furthermore, the chiral fluorescence signals with different propagation distances are collected using left-handed and right-handed circular polarizers, as shown in the figure. Figure 12 As shown in the figure, the fluorescence emitted in situ from the left-handed particle and the right-handed particle propagates at 17 μm, 29 μm, 42 μm, 60 μm, 72 μm, and 115 μm. The left-handed component of the fluorescence signal propagating from the left-handed particle is stronger than the right-handed component, and the right-handed component of the fluorescence signal propagating from the right-handed particle is stronger than the left-handed component, indicating that the circularly polarized waveguide device has good stability. Figure 13 As shown, the intensity of the fluorescence signal is the largest at the excitation position and continues to decay with increasing distance. When the propagation distance is 60 μm, the signal intensity is reduced to 1 / e of the initial position, and its luminescence asymmetry is significantly reduced compared with the original 0.9, and the absolute value of the luminescence asymmetry remains at around 0.5 and does not change with the propagation distance.

[0038] The above are only preferred embodiments of the present invention and do not limit the implementation mode and protection scope of the present invention. For those skilled in the art, it should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the contents of the present invention specification should be included in the protection scope of the present invention.

Claims

1. A method for preparing a circularly polarized waveguide device, characterized in that: The following steps are involved: Step 1: Alternately depositing two or more materials with different refractive indices on a substrate to form a reflector substrate with a periodic multilayer film structure; Step 2: assembling the luminescent gain medium on the reflector substrate to obtain a luminescent layer; Step 3: depositing metal chiral nanoparticles on the light-emitting layer as the coupling incident end of circularly polarized light conduction, and depositing achiral metal nanoparticles on the light-emitting layer as the coupling output end of circularly polarized light conduction.

2. The method for preparing a circularly polarized waveguide device according to claim 1, wherein: In step 1, the refractive index difference between the two materials of adjacent film layers in step 1 is 0.2-1.

3. The method for identifying the configuration of a chiral molecule according to claim 2, wherein: The high refractive index material in the reflector substrate is 、ZnS、 or One or more of the following, the low refractive index material is a polymer, 、 or One or more of .

4. The method for preparing a circularly polarized waveguide device according to claim 1, wherein: In step 1, the number of film layers of the reflector substrate is 10-20 layers, and the thickness of each film layer is / ,in, is the central wavelength, is the refractive index of the film material.

5. The method for preparing a circularly polarized waveguide device according to claim 1, wherein: The luminescent gain medium is one or more of quantum dots, dye molecules, two-dimensional materials, and rare earth materials.

6. The method for preparing a circularly polarized waveguide device according to claim 1, wherein: The metal chiral nanoparticles are one or more chiral nanoparticle structures based on gold, silver or copper.

7. A circularly polarized waveguide device obtained by the method for preparing a circularly polarized waveguide device according to any one of claims 1 to 6.

8. The circularly polarized waveguide device according to claim 7, wherein: The circularly polarized waveguide device includes an emitter substrate layer, a light-emitting layer deposited on the emitter substrate layer, and a coupling input end and a coupling output end deposited on the light-emitting layer; Wherein, the emitter base layer is a base having a periodic multilayer film structure on its surface; The light-emitting layer is obtained by depositing a light-emitting gain medium on an emitter substrate.

9. The circularly polarized waveguide device according to claim 7, wherein: The central wavelength range of the reflection spectrum of the reflector substrate is 400 nm-800 nm, and the emission wavelength of the light-emitting layer is smaller than the central wavelength of the reflection spectrum of the reflector substrate.

10. An application of the circularly polarized waveguide device according to any one of claims 7 to 9, characterized in that: The circularly polarized waveguide device is used in photonic chip integration, optical logic operations, chiral optical detection, and on-chip nano-optical communication systems.

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