Two-dimensional large-angle fast reflecting mirror device based on sheet-shaped flexible support

Abstract

The invention discloses a two-dimensional large-angle fast reflecting mirror device based on a sheet-shaped flexible support, a flexible support assembly comprises a flexible connecting sheet of a hollow structure and a flexible connecting rod, one side of the flexible connecting sheet is fixedly connected with a reflecting mirror assembly, and the other side of the flexible connecting sheet is fixedly connected with a base; the axial direction of the flexible connecting rod is perpendicular to the plane where the flexible connecting piece is located and penetrates through the center of the flexible connecting piece, one end of the flexible connecting rod is fixedly connected with the center of one side of the reflector assembly, and the other end of the flexible connecting rod is fixedly connected with the center of one side of the reflector assembly. The electromagnetic driving assembly penetrates through the flexible connecting piece and then is fixedly connected with the reflector assembly and the base. The sensor assembly is fixedly arranged at the central position of the base and is spaced from the reflector assembly by a first preset distance. Through the collaborative design of a flexible connecting piece-flexible connecting rod composite supporting structure and an obliquely-arranged moving magnet type electromagnetic driving assembly, the two-dimensional large-angle deflection capacity of the magnitude of + / -10 degrees is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of fast reflection mirrors, and in particular to a two-dimensional large-angle fast reflection mirror device based on a sheet-like flexible support. Background Art

[0002] As the core actuator of precision optical systems, fast-control mirrors (FRMs) drive reflective mirrors to achieve rapid, high-frequency deflection of light beams, playing an irreplaceable role in modern optical engineering. With advantages such as compact structure, fast dynamic response, and high positioning accuracy, they are widely used in space laser communications, adaptive optics correction for astronomical telescopes, high-precision laser processing, and aerial imaging systems. Traditional FRMs are typically driven by moving coil motors, but wire drag on moving parts can reduce system reliability, and thermal deformation of the mirror caused by coil heating can directly affect optical performance.

[0003] The recently developed moving-magnetic fast-reflection mirror technology effectively solves the problem of wire interference by combining a fixed coil with a movable magnetic steel structure, while also reducing the effects of heat conduction on the mirror surface. Such devices typically combine flexible supports with eddy-current sensors to achieve micro-radian angular resolution and high-speed reset capabilities. However, existing moving-magnetic fast-reflection mirrors face significant limitations in achieving large-angle two-dimensional deflection: Due to the magnetic circuit structure and mechanical interference, their maximum deflection angle is typically less than ±5°, making it difficult to meet the requirements of cutting-edge applications such as wide-field scanning and large-scale tracking.

[0004] Specifically, the parallel arrangement of permanent magnets and coils in traditional moving-magnet designs results in a dramatic change in the magnetic gap during deflection. This not only increases magnetic field losses and reduces drive efficiency, but also poses the risk of mechanical collision between the magnets and coils at larger angles. Furthermore, the supporting structure commonly utilizes cross-shaped flexible hinges or ball bearings. The former suffers from multi-axis coupling interference, while the latter, due to friction and gaps, leads to bandwidth limitations, shortened lifespans, and low-temperature failure, further restricting the ability to increase the deflection angle. Summary of the Invention

[0005] The purpose of the embodiment of the present invention is to provide a two-dimensional large-angle fast reflection mirror device based on sheet-like flexible support, which achieves a two-dimensional large-angle deflection capability of the order of ±10° by adopting a "flexible connecting sheet-flexible connecting rod" composite support structure and a coordinated design of a tilted dynamic magnetic electromagnetic drive component.

[0006] To solve the above technical problems, an embodiment of the present invention provides a two-dimensional large-angle fast reflector device based on a sheet-shaped flexible support, comprising: a reflector assembly, an electromagnetic drive assembly, a flexible support assembly, a sensor assembly and a base;

[0007] The flexible support assembly includes: a flexible connecting piece with a hollow structure and a flexible connecting rod, one side of the flexible connecting piece is fixedly connected to the reflector assembly, the other side of the flexible connecting piece is fixedly connected to the base, the axial direction of the flexible connecting rod is perpendicular to the plane where the flexible connecting piece is located and passes through the center position of the flexible connecting piece, one end of the flexible connecting rod is fixedly connected to the center position of one side of the reflector assembly, and the other end of the flexible connecting rod is fixedly connected to the center position of one side of the reflector assembly;

[0008] The electromagnetic drive assembly passes through the flexible connecting piece and is fixedly connected to the reflector assembly and the base respectively;

[0009] The sensor component is fixed at the center of the base and is spaced apart from the reflector component by a first preset distance.

[0010] Furthermore, the reflector assembly includes a reflector and a mirror holder that are fixedly connected;

[0011] The flexible connecting piece includes a base ring and a plurality of mirror support connecting pieces;

[0012] The base ring is an annular sheet structure, and the base ring is fixedly connected to the base;

[0013] The mirror support connecting piece is a sheet-like structure, and a plurality of the mirror support connecting pieces are fixedly connected to the reflector assembly respectively;

[0014] Each of the mirror support connecting pieces is fixedly connected to the inner wall of the base ring via a base ring connecting piece.

[0015] Furthermore, the flexible connecting piece includes four mirror support connecting pieces;

[0016] The four mirror support connectors are evenly arranged at circumferential positions of the base ring, and the connection line between two mirror support connectors that are opposite to each other is perpendicular to the connection line between the other two mirror support connectors that are opposite to each other.

[0017] Furthermore, the base ring connecting piece is an arc-shaped sheet structure, and the arc shape of the base ring connecting piece corresponds to the arc shape of the inner wall of the base ring.

[0018] Furthermore, a first through hole is provided at the center of the mirror holder;

[0019] The flexible connecting rod is a cylindrical structure;

[0020] The flexible connecting rod passes through the first through hole and is fixedly connected to the center position of one side of the reflector;

[0021] The side wall of the corresponding position where the flexible connecting rod passes through the first through hole is spaced apart from the edge of the first through hole by a preset distance.

[0022] Furthermore, the materials of the flexible connecting piece and the flexible connecting rod include: beryllium copper alloy, stainless steel, titanium alloy or nickel-titanium shape memory alloy.

[0023] Furthermore, the electromagnetic drive assembly includes four electromagnetic drive units, each of which includes a coil and a permanent magnet in the same axial direction;

[0024] One end of the permanent magnet is fixedly connected to the reflector assembly, and the other end is located inside the coil;

[0025] One end of the coil away from the permanent magnet is fixedly connected to the base;

[0026] The axial directions of the coil and the permanent magnet are located in the same plane as the axial direction of the reflector assembly, and the included angle is a preset angle value;

[0027] The axial distance between the end of the coil close to the base and the reflector assembly is smaller than the axial distance between the end of the coil away from the base and the reflector assembly.

[0028] Furthermore, the permanent magnet is conical, and the top of the cone is located inside the coil.

[0029] Furthermore, the preset angle value is 10°.

[0030] Furthermore, the sensor assembly is disposed at the center of the base and is spaced apart from the reflector assembly by a second preset distance;

[0031] A second through hole corresponding to the flexible connecting rod is provided at the center of the sensor assembly;

[0032] The flexible connecting rod passes through the second through hole and is fixedly connected to the reflector assembly and the base respectively.

[0033] The above technical solutions of the embodiments of the present invention have the following beneficial technical effects:

[0034] 1. A composite support design of flexible connecting plates and flexible connecting rods significantly improves deflection stability and mirror positioning accuracy. When the mirror deflects, the flexible structure generates a self-resetting force, effectively suppressing overshoot in closed-loop control. Compared to the friction, clearance, and low-temperature seizure defects of traditional bearings, this design achieves frictionless, zero-clearance motion, with repeatable positioning accuracy reaching micro-radians, and no lubrication is required. This extends the service life in vacuum / low-temperature environments and completely eliminates the constraints of mechanical loss on system reliability.

[0035] 2. The integrated layout of the moving magnetic drive assembly and the eddy current sensor at the bottom significantly compresses the axial space of the device, creating an ultra-large deflection range of ±10° for the reflector. The innovative collaborative design of a 10° tilted coil and a conical permanent magnet eliminates cable drag interference while dynamically creating an avoidance space using the magnet taper and coil inclination angle to ensure a safe gap is maintained at the maximum deflection angle, completely eliminating the risk of magnetic circuit collision. The magnetic gap distribution is simultaneously optimized to improve driving force efficiency and ensure torque linear output and motion accuracy under large-angle deflection conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 1 is a schematic diagram of the overall structure of a two-dimensional large-angle fast reflection mirror device based on a sheet-shaped flexible support provided by an embodiment of the present invention;

[0037] Figure 2 This is a schematic side cross-sectional view of the overall structure of a two-dimensional large-angle rapid reflection mirror device based on a sheet-like flexible support according to the present invention;

[0038] Figure 3 It is a schematic diagram of a flexible connecting piece in a two-dimensional large-angle fast reflector device based on a sheet-shaped flexible support according to the present invention;

[0039] Figure 4 This is a schematic diagram of the bottom of the mirror support in the two-dimensional large-angle fast reflecting mirror device based on sheet-shaped flexible support of the present invention;

[0040] Figure 5 This is a schematic front cross-sectional view of the base in the two-dimensional large-angle fast reflector device based on sheet-shaped flexible support of the present invention;

[0041] Figure 6 Schematic diagram of the sensor assembly in the two-dimensional large-angle fast reflector device based on sheet-shaped flexible support of the present invention;

[0042] Figure 7 This is a block diagram of the input and output relationship of the two-dimensional large-angle fast reflection mirror device based on sheet-shaped flexible support of the present invention.

[0043] Reference numerals:

[0044] 1. Reflector lens; 2. Mirror support; 3. Flexible connecting piece; 4. Flexible connecting rod; 5. Permanent magnet; 6. Coil; 7. Sensor assembly; 8. Base; 9. Communication cable; 10. Circuit board; 11. Bottom cover; 12. Eddy current sensor probe; 13. FPC communication cable; 14. Eddy current sensor circuit board; 15. Base ring (15); 16. Mirror support connector (16); 17. Base ring connecting piece. DETAILED DESCRIPTION

[0045] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present invention. In addition, in the following description, descriptions of well-known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present invention.

[0046] Please refer to Figure 1 、 Figure 2 and Figure 3 An embodiment of the present invention provides a two-dimensional, large-angle, rapid reflector device based on a sheet-like flexible support, comprising: a reflector assembly, an electromagnetic drive assembly, a flexible support assembly, a sensor assembly 7, and a base 8. The flexible support assembly comprises: a hollow flexible connecting sheet 3 and a flexible connecting rod 4. One side of the flexible connecting sheet 3 is fixedly connected to the reflector assembly, and the other side of the flexible connecting sheet 3 is fixedly connected to the base 8. The flexible connecting rod 4 is axially perpendicular to the plane of the flexible connecting sheet 3 and passes through the center of the flexible connecting sheet 3. One end of the flexible connecting rod 4 is fixedly connected to the center of one side of the reflector assembly, and the other end of the flexible connecting rod 4 is fixedly connected to the center of one side of the reflector assembly. The electromagnetic drive assembly passes through the flexible connecting sheet 3 and is fixedly connected to the reflector assembly and the base 8 respectively. The sensor assembly 7 is fixedly arranged at the center of the base 8 and is spaced a first preset distance from the reflector assembly.

[0047] The above-mentioned fast reflector device achieves motion decoupling and precision leap through a composite flexible support system. The flexible connecting piece 3 adopts a thin sheet structure, and its inner and outer circles are screwed to fix the mirror holder 2 and the base 8 respectively, giving the reflector elastic freedom in the X / Y direction. The self-resetting force generated during deflection effectively suppresses closed-loop overshoot; the flexible connecting rod 4 with a diameter of 0.25mm that runs through the center of the mirror holder 2, the sensor and the base 8 axially constrains the Z degree of freedom, eliminating the risk of mirror tilt, and replacing traditional mechanical bearings with elastic deformation to achieve frictionless and zero-gap motion, completely solving the low-temperature jamming and life bottlenecks.

[0048] Specifically, the reflector assembly is arranged on the top of the flexible support assembly for reflecting the light beam; the flexible support assembly is arranged at the center position between the reflector assembly and the base 8; the dynamic magnetic electromagnetic drive assembly is distributed around the center position of the base 8 and is used to drive the reflector assembly to deflect at a set angle; the sensor assembly 7 is arranged between the reflector assembly and the base 8 and maintains a first preset distance from the center position of the reflector assembly, for measuring the angular deflection of the reflector assembly.

[0049] For further information, please refer to Figure 4, the reflector assembly includes a reflector and a mirror holder 2 that are fixedly connected. The reflector assembly includes a reflector lens 1 and a mirror holder 2, the reflector lens 1 is fixed on the mirror holder 2, and the reflector lens 1 moves with the mirror holder 2. The side surfaces between the reflector lens 1 and the mirror holder 2 can be fixed with, but not limited to, epoxy resin glue, polyurethane glue, acrylate glue, organic silicone glue and the like. Preferably, in this embodiment, the side surfaces between the reflector lens 1 and the mirror holder 2 are glued all around with silicone glue. The caliber of the reflector lens 1 is 40mm±0.05mm. The thickness of the lens can be selected from 1.8mm, 2mm, 2.2mm and the like, and the typical thickness is 1.8mm±0.05mm. The lens base material can be any reflector material such as fused quartz, K9, aluminum, and fused quartz is typically used. The reflector lens 1 is silver-coated.

[0050] The flexible support assembly consists of a flexible connecting piece 3 and a flexible connecting rod 4. The flexible connecting piece 3 is positioned between the base 8 and the reflector assembly. Its top end is secured to the mirror holder 2 via four hexagon socket head screws with a diameter of 1.6mm and a threaded portion of 3mm. Its bottom end is secured to the base 8 via four hexagon socket head screws with a diameter of 1.6mm and a threaded portion of 5mm. The flexible connecting piece 3 is curved and provides support around the mirror, providing freedom in the X / Y working directions while limiting freedom in non-working directions.

[0051] The mirror holder 2 is connected to the flexible connecting piece 3 via four hexagon socket head screws, which are secured with thread glue. The mirror holder 2 can be made of, but is not limited to, aluminum alloys such as AL6061-T6, titanium alloys such as Ti-6Al-4V, beryllium aluminum alloys (such as AlBeMet), carbon fiber composites (CFRP), and Invar (e.g., Fe-Ni 36%). Preferably, the mirror holder 2 is made of aluminum alloys such as AL6061-T6.

[0052] Preferably, the flexible connecting sheet 3 used in this embodiment has a thickness of 0.15 mm and an appearance as follows: Figure 4 As shown, the connection holes are divided into two circles: the outer circle of holes is used to connect to the base 8, and the inner circle of holes is used to connect to the mirror holder 2. The inner and outer circles of connection holes are connected by four curved structures. The flexible connecting rod 4 has a diameter of 0.25 mm and passes through the through hole of the sensor assembly 7, the mirror holder 2, and the center through hole of the base 8.

[0053] In one embodiment, Figure 3 As shown, the flexible connecting piece 3 includes a base ring 15 and a plurality of mirror support connecting pieces 16; the base ring 15 is an annular sheet structure, and the base ring 15 is fixedly connected to the base 8; the mirror support connecting piece 16 is a sheet structure, and the plurality of mirror support connecting pieces (16) are respectively fixedly connected to the reflector assembly; each mirror support connecting piece (16) is fixedly connected to the inner wall of the base ring 15 through a base ring connecting piece 17.

[0054] Preferably, the flexible connecting piece 3 includes four mirror support connectors 16 ; the four mirror support connectors 16 are evenly arranged at circumferential positions of the base ring 15 , and the connection line between two oppositely arranged mirror support connectors 16 is perpendicular to the connection line between the other two oppositely arranged mirror support connectors 16 .

[0055] The flexible connecting piece 3 achieves motion decoupling and stress optimization through the split structure of the base ring 15 and the mirror support connector 16. The annular base ring 15 is fixed to the base 8 to provide overall support rigidity. Four curved mirror support connectors 16 symmetrically connect the mirror support 2 in a radial pattern. Each connector is integrally formed with the inner wall of the base ring 15 through a thin, tapered curvature sheet. This structure absorbs deformation energy during X / Y deflection through the elastic bending of the curved sheets, generating uniform linear restoring torque in all four directions. This eliminates the interaxial coupling interference of traditional cross hinges and prevents fatigue fracture caused by stress concentration. The split layout also reduces thermal expansion tolerance, maintaining mirror surface stability throughout the operating temperature range and extending the service life of the integrated flexible support.

[0056] Furthermore, the base ring connecting piece 17 is an arc-shaped sheet structure, and the arc shape of the base ring connecting piece 17 corresponds to the arc shape of the inner wall of the base ring 15 .

[0057] Furthermore, if Figure 4 As shown, a first through hole is provided at the center position of the mirror holder 2; the flexible connecting rod 4 is a cylindrical structure; the flexible connecting rod 4 passes through the first through hole and is fixedly connected to the center position of one side of the reflector; the side wall of the corresponding position where the flexible connecting rod 4 passes through the first through hole is spaced a preset distance from the edge of the first through hole.

[0058] Optionally, the materials of the flexible connecting piece 3 and the flexible connecting rod 4 include: beryllium copper alloy, stainless steel, titanium alloy or nickel-titanium shape memory alloy.

[0059] The flexible connecting piece 3 and the flexible connecting rod 4 may be made of, but not limited to, beryllium copper alloy such as BeCu, C17200, stainless steel such as 17-4PH, 304, 316, titanium alloy such as Ti-6Al-4V, Grade 5, nickel-titanium shape memory alloy Nitinol, NiTi, etc. Preferably, 304 stainless steel is used in this embodiment.

[0060] In an embodiment of the present invention, the electromagnetic drive assembly includes four electromagnetic drive units, each of which includes a coil 6 and a permanent magnet 5 with the same axial direction; one end of the permanent magnet 5 is fixedly connected to the reflector assembly, and the other end is located inside the coil 6; the end of the coil 6 away from the permanent magnet 5 is fixedly connected to the base 8; the axial directions of the coil 6 and the permanent magnet 5 are located in the same plane as the axial direction of the reflector assembly, and the angle between them is a preset angle value; the distance between the end of the coil 6 close to the base 8 and the axial direction of the reflector assembly is less than the distance between the end of the coil 6 away from the base 8 and the axial direction of the reflector assembly. Optionally, the preset angle value is 10°. Furthermore, the permanent magnet 5 is conical, and the top of the cone is located inside the coil 6.

[0061] The innovative spatial configuration of the dynamic magnetic drive assembly breaks through deflection angle limitations. Coil 6 is fixed to the mounting slot of base 8 at a 10° outward angle, while the conical permanent magnet 5 is glued to the bottom of mirror holder 2 at a corresponding 10° inward angle, creating a "V"-shaped adaptive magnetic gap. During deflection, the magnet taper and the inclination of coil 6 dynamically coordinate to maintain a 0.2mm safety gap at a maximum deflection angle of ±10°, preventing magnetic circuit collisions. The optimized magnetic gap distribution improves driving force efficiency by 35%, ensuring linear torque output over a wide range of angles. The integrated bottom layout also reduces axial space by 40%, freeing up margins for mirror motion.

[0062] In one embodiment, the electromagnetic drive assembly includes four permanent magnets 5 and four coils 6. The four coils 6 are embedded in a base 8 and positioned around the flexible support assembly. The permanent magnets 5 are positioned one-to-one within the coils 6, and the permanent magnets 5 are connected to the bottom of the mirror holder 2. Each drive assembly is symmetrically arranged around the center axis of the reflector assembly, ensuring balanced forces in all directions during deflection of the reflector assembly and high precision.

[0063] The coil 6 is fixed to the base 8 at a certain angle, i.e., tilted in the direction of the base 8 extending outward. The permanent magnets 5 are arranged one-to-one within the coil 6. This arrangement can reduce the loss of the magnetic field in the air when the motor drives the reflector assembly to deflect, thereby improving the motor drive efficiency and achieving a larger deflection angle.

[0064] The material of the coil 6 can be, but is not limited to, conductive materials such as copper, aluminum, iron, silver, and gold. Preferably, copper enameled wire is used as the material of the coil 6 in this embodiment.

[0065] Preferably, in this embodiment, the frame of each coil 6 is tilted outwards at an angle of 10° to the vertical direction and is bonded to the side wall of the base 8 by injecting epoxy resin.

[0066] The bottom part of the permanent magnet 5 close to the coil 6 and the base 8 is conical, or a combination of conical and arc-shaped. At the same time, the permanent magnet 5 is also fixed on the mirror holder 2 at a certain angle inward like the coil 6. The purpose is to ensure that the diameter of the bottom of the permanent magnet 5 gradually decreases, so as to ensure that when the reflector assembly is driven to deflect, the bottom of the permanent magnet 5 is prevented from contacting the inner wall of the coil 6, which affects the deflection angle and accuracy of the reflector assembly.

[0067] The material of the permanent magnet 5 can be but is not limited to aluminum nickel cobalt, iron chromium cobalt, ferrite, samarium cobalt, neodymium iron boron and other magnetic materials. Preferably, neodymium iron boron is used as the material of the permanent magnet 5 in this embodiment.

[0068] Preferably, in this embodiment, each permanent magnet 5 is tilted inward at an angle of 10° from the vertical, and is bonded to the bottom of the mirror holder 2 using epoxy resin, securing it within a corresponding groove in the bottom of the mirror holder 2. When the permanent magnet 5 is positioned within the corresponding groove in the coil 6 frame, it does not contact the coil 6 frame within the allowable deflection range.

[0069] Base 8 is provided with mounting slots corresponding to the moving-magnet electromagnetic drive assembly. These slots are tilted, their shape and angle corresponding to those of coil 6. This arrangement ensures that coil 6 and the mounting slots on base 8 fit snugly, making the voice coil motor more stable during installation and operation, improving its output efficiency and enabling faster and more precise deflection of the reflector assembly. Furthermore, the tilt of the electromagnetic drive assembly coil 6 causes it to shrink near the bottom of base 8, further saving space and achieving a more compact structure. Furthermore, a bottom cover 11 is provided at the bottom of base 8.

[0070] Please note that, please refer to Figure 5 The coil 6 is fixed in the mounting groove of the base 8 by gluing it to the side wall of the base 8 through epoxy resin injection. The bottom of the base 8 is a rounded rectangle with a length of 59 mm, a width of 20 mm, and a chamfer of 4 mm. A pair of mounting holes are provided on each of the left and right sides of the bottom of the base 8. Each pair of mounting holes has two mounting holes with a hole diameter of 3.5 mm. The distance between the centers of a pair of mounting holes is 12 mm, and the center distance between the left and right pairs of mounting holes is 52 mm. The distance from the center of the mounting hole to the short side of the bottom of the base 8 is 3.5 mm, and the distance to the long side of the bottom of the base 8 is 4 mm. The mirror direction is defined as the front direction. An elliptical pin with a long axis length of 4 mm and a short axis length of 3 mm is provided on the right side of the bottom of the base 8, and a circular pin with a diameter of 3 mm is provided on the left. The distance between the center lines of the two pins is 38 mm, and the distance from the short side of the bottom is 5.5 mm. They are arranged in symmetrical positions on the two center lines of the bottom.

[0071] The above-mentioned electromagnetic drive component is controlled by the host computer through the communication cable 9, which is connected to the circuit board. The circuit board 10 then transmits the current to the coil 6 of the moving magnet electromagnetic drive component, and the coil 6 drives the permanent magnet 5 to drive the mirror deflection.

[0072] For further information, please refer to Figure 6 The sensor assembly 7 is positioned at the center of the base 8 and spaced a second predetermined distance from the reflector assembly. A second through-hole corresponding to the flexible connecting rod 4 is provided at the center of the sensor assembly 7. The flexible connecting rod 4 passes through the second through-hole and is fixedly connected to the reflector assembly and the base 8, respectively. By providing the second through-hole at the center of the sensor assembly 7, the flexible connecting rod 4 passes through the through-hole of the sensor assembly 7, the mirror holder 2, and the center through-hole of the base 8. The top end of the flexible connecting rod 4 is connected to the bottom of the reflector lens 1, and the bottom end is connected to the base 8, both of which are secured using epoxy glue. The provision of the flexible connecting rod 4 limits the Z-direction freedom of the quick-reflector mirror, preventing the reflector assembly from popping out.

[0073] The eddy current sensor probe 12 in the sensor assembly 7 uses an existing 4-in-1 probe. Two pairs of sensor probes are provided in the sensor assembly 7, and each pair of sensor probes is symmetrically arranged around the center axis of the reflector assembly. In a preferred embodiment, the sensor assembly 7 is provided with four sensor probes, and the four sensor probes are symmetrically arranged in pairs around the center axis of the reflector assembly. The four sensor probes can measure the four azimuth deflections of the reflector assembly. It should be noted that the number of sensors is not limited here, and the number of sensors can be increased on this basis as long as the deflection of the reflector assembly can be measured and feedback can be provided.

[0074] Specifically, the sensor assembly 7 includes an eddy current sensor probe 12, an FPC communication cable 13, and an eddy current sensor circuit board 14. The sensor assembly 7 is fixed to the center of the base 8 by gluing epoxy resin into the glue injection groove on the back of the base 8. Preferably, the sensor assembly 7 is fixed to the center of the base 8 using an auxiliary pin on the base 8 to fix the sensor position and a cross-slot pan head screw with a diameter of 1.6mm and a nominal length of 5mm. The eddy current sensor probe 12 is connected to the eddy current sensor circuit board 14 and connected to the circuit board 10 via the FPC communication cable 13. There are two FPC communication cables 13, which transmit the signals of two pairs of eddy current sensor probes 12 respectively.

[0075] Sensor assembly 7 achieves microradian-level detection through a symmetrical differential architecture. Four eddy current probes are symmetrically positioned, two by two, directly beneath the reflector. The probe axes coincide with the center of rotation, eliminating cosine errors in measurement. Differential processing of the symmetrical probe signals suppresses common-mode interference, such as thermal drift. Combined with the positioning accuracy of the flexible support, this creates a highly stable closed-loop control system.

[0076] In addition, please refer to Figure 7The sensor assembly 7 and the coil 6 of the moving-magnetic electromagnetic drive assembly are both connected to the circuit board 10 by welding, enabling the acquisition of measurement data from the sensor assembly 7 and the control of the moving-magnetic electromagnetic drive assembly. In this embodiment, the circuit board 10 has functions such as differential output, signal amplification, and noise filtering. Through the above configuration, the sensor in the entire system cooperates with the circuit board 10 to obtain the deflection information of the reflector assembly and convert it into an electrical signal. Then, through the communication cable 9, the rotation angle information of the fast-reflecting mirror is measured and directly fed back to the user as an analog signal.

[0077] The embodiments of the present invention are intended to protect a two-dimensional large-angle fast reflector device based on a sheet-like flexible support, which has the following effects:

[0078] 1. A composite support design of flexible connecting plates and flexible connecting rods significantly improves deflection stability and mirror positioning accuracy. When the mirror deflects, the flexible structure generates a self-resetting force, effectively suppressing overshoot in closed-loop control. Compared to the friction, clearance, and low-temperature seizure defects of traditional bearings, this design achieves frictionless, zero-clearance motion, with repeatable positioning accuracy reaching micro-radians, and no lubrication is required. This extends the service life in vacuum / low-temperature environments and completely eliminates the constraints of mechanical loss on system reliability.

[0079] 2. The integrated layout of the moving magnetic drive assembly and the eddy current sensor at the bottom significantly compresses the axial space of the device, creating an ultra-large deflection range of ±10° for the reflector. The innovative collaborative design of a 10° tilted coil and a conical permanent magnet eliminates cable drag interference while dynamically creating an avoidance space using the magnet taper and coil inclination angle to ensure a safe gap is maintained at the maximum deflection angle, completely eliminating the risk of magnetic circuit collision. The magnetic gap distribution is simultaneously optimized to improve driving force efficiency and ensure torque linear output and motion accuracy under large-angle deflection conditions.

[0080] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit it. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in the field should understand that the specific implementation methods of the present invention can still be modified or replaced by equivalents. Any modification or equivalent replacement that does not depart from the spirit and scope of the present invention should be covered by the scope of protection of the claims of the present invention.

Claims

1. A two-dimensional large-angle fast reflector device based on sheet-shaped flexible support, characterized in that: include: A reflector assembly, an electromagnetic drive assembly, a flexible support assembly, a sensor assembly (7) and a base (8); The flexible support assembly comprises: a flexible connecting piece (3) with a hollow structure and a flexible connecting rod (4), one side of the flexible connecting piece (3) is fixedly connected to the reflector assembly, the other side of the flexible connecting piece (3) is fixedly connected to the base (8), the axial direction of the flexible connecting rod (4) is perpendicular to the plane where the flexible connecting piece (3) is located and passes through the center position of the flexible connecting piece (3), one end of the flexible connecting rod (4) is fixedly connected to the center position of one side of the reflector assembly, and the other end of the flexible connecting rod (4) is fixedly connected to the center position of one side of the reflector assembly; The electromagnetic drive component passes through the flexible connecting piece (3) and is fixedly connected to the reflector component and the base (8) respectively; The sensor assembly (7) is fixed at the center of the base (8) and is spaced apart from the reflector assembly by a first preset distance.

2. The two-dimensional large-angle fast reflection mirror device based on sheet-shaped flexible support according to claim 1, characterized in that: The reflector assembly comprises a reflector and a mirror holder (2) that are fixedly connected; The flexible connecting piece (3) comprises a base ring (15) and a plurality of mirror support connecting pieces (16); The base ring (15) is an annular sheet structure, and the base ring (15) is fixedly connected to the base (8); The mirror support connecting piece (16) is a sheet-like structure, and a plurality of the mirror support connecting pieces (16) are respectively fixedly connected to the reflector assembly; Each of the mirror support connecting pieces (16) is fixedly connected to the inner wall of the base ring (15) via a base ring connecting piece (17).

3. The two-dimensional large-angle fast reflection mirror device based on sheet-shaped flexible support according to claim 2, characterized in that: The flexible connecting piece (3) includes four mirror support connecting pieces (16); The four mirror support connecting members (16) are evenly arranged at circumferential positions of the base ring (15), and the connection line of two mirror support connecting members (16) arranged opposite to each other is perpendicular to the connection line of the other two mirror support connecting members (16) arranged opposite to each other.

4. The two-dimensional large-angle fast reflection mirror device based on sheet-shaped flexible support according to claim 2, characterized in that: The base ring connecting piece (17) is an arc-shaped sheet structure, and the arc shape of the base ring connecting piece (17) corresponds to the arc shape of the inner wall of the base ring (15).

5. The two-dimensional large-angle fast reflection mirror device based on sheet-shaped flexible support according to claim 4, characterized in that: A first through hole is provided at the center of the mirror holder (2); The flexible connecting rod (4) is a cylindrical structure; The flexible connecting rod (4) passes through the first through hole and is fixedly connected to the center position of one side of the reflector; The side wall of the corresponding position where the flexible connecting rod (4) passes through the first through hole is spaced a preset distance from the edge of the first through hole.

6. The two-dimensional large-angle fast reflection mirror device based on sheet-shaped flexible support according to claim 5, characterized in that: The materials of the flexible connecting piece (3) and the flexible connecting rod (4) include: beryllium copper alloy, stainless steel, titanium alloy or nickel-titanium shape memory alloy.

7. The two-dimensional large-angle fast reflection mirror device based on sheet-shaped flexible support according to claim 1, characterized in that: The electromagnetic drive assembly includes four electromagnetic drive units, each of which includes a coil (6) and a permanent magnet (5) with the same axial direction; One end of the permanent magnet (5) is fixedly connected to the reflector assembly, and the other end is located inside the coil (6); One end of the coil (6) away from the permanent magnet (5) is fixedly connected to the base (8); The axial directions of the coil (6) and the permanent magnet (5) are located in the same plane as the axial direction of the reflector assembly, and the included angle is a preset angle value; The axial distance between the end of the coil (6) close to the base (8) and the reflector assembly is smaller than the axial distance between the end of the coil (6) away from the base (8) and the reflector assembly.

8. The two-dimensional large-angle rapid reflection mirror device based on sheet-shaped flexible support according to claim 7, characterized in that: The permanent magnet (5) is conical, and the top of the cone is located inside the coil (6).

9. The two-dimensional large-angle rapid reflection mirror device based on sheet-shaped flexible support according to claim 7, characterized in that: The preset angle value is 10°.

10. The two-dimensional large-angle fast reflection mirror device based on sheet-shaped flexible support according to any one of claims 1 to 9, characterized in that: The sensor assembly (7) is arranged at the center of the base (8) and is spaced apart from the reflector assembly by a second preset distance; A second through hole corresponding to the flexible connecting rod (4) is provided at the center of the sensor assembly (7); The flexible connecting rod (4) passes through the second through hole and is fixedly connected to the reflector assembly and the base (8) respectively.

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