High-precision adjustable slit for vacuum environment

Abstract

The invention provides a high-precision adjustable slit for a vacuum environment, which is used for solving the problem that most existing optical slits cannot be applied to the vacuum environment due to structural limitation. Or the technical problems that an existing optical slit capable of being applied to the vacuum environment cannot meet the requirements for high vacuum sealing and reliable vacuum degree and is low in adjusting precision are solved. According to the high-precision adjustable slit for the vacuum environment, the slit is formed by the left slit piece and the right slit piece, and opening and closing of the slit are achieved in cooperation with the design of the steel ball, the transmission shifting piece, the transmission shaft, the transmission block, the spring, the adjusting mechanism and the transmission rod; meanwhile, the adjusting end of the bottom of the adjusting part abuts against or is fixedly connected to the top end of the transmission rod, the bottom of the transmission rod penetrates through the main body and then abuts against the steel ball, a highly airtight cavity structure is formed in combination with the design of the telescopic corrugated pipe, a foundation is provided for achieving high vacuum and ultrahigh vacuum, the slit can be easily connected into a vacuum system, and the vacuum degree is improved. And external high-precision adjustment can be realized.

Description

Technical Field

[0001] The invention relates to an optical slit, in particular to a high-precision adjustable slit used in a vacuum environment. Background Art

[0002] Optical slits are commonly used components in optical experiments and instruments. Their core function is to restrict and regulate the spatial distribution of light. Through their narrow opening (typically on the order of micrometers to millimeters in width), they filter incoming light, allowing only light from a specific region to pass through. This controls the spatial size of the beam, reduces stray light interference, and improves the stability of the optical path. When a point or extended light source illuminates an optical slit, the outgoing light can be approximated as a "line source," with an unrestricted length and an extremely narrow width. This provides the required incident light source shape for subsequent optical systems such as gratings and prisms.

[0003] In optical systems such as synchrotron radiation devices, space optical simulation experiments, and attosecond large-scale scientific device spectral measurements, the high airtightness design needs to ensure that there is no gas exchange inside and outside the vacuum chamber during the adjustment process to avoid a decrease in vacuum degree, especially in ultra-high vacuum systems, where the vacuum degree needs to be maintained at 10 -7 Below Pa, even the slightest leak or outgassing will cause the experiment to fail. Optical slits are used in ultraviolet and X-ray spectral measurements to optimize spectral resolution by adjusting the slit width. For example, in vacuum ultraviolet spectrometers, the slit width is adjusted from 10μm to 100μm to balance resolution and light intensity. They are also used in optical testing to simulate the vacuum environment of space, for simulating the beam shape of astronomical light sources. Placed at the object point of a grating, the spectral resolution can be adjusted by adjusting the slit width. However, in all these applications, the optical slit must remain in a vacuum to prevent air absorption.

[0004] Currently, most existing optical slits cannot be used in vacuum environments due to structural limitations. Chinese Patent Publication No. CN111276386A discloses an adjustable slit device for debugging a time-of-flight mass analyzer. While this optical slit can be used in vacuum environments, it suffers from two issues: First, the seal is provided by a bowl-shaped sealing ring, which is a dynamic vacuum seal and cannot achieve a reliable high-vacuum seal; second, the fine-tuning mechanism cannot be adjusted in vacuum conditions, resulting in low adjustment accuracy. Summary of the Invention

[0005] The purpose of the present invention is to solve the technical problems that most existing optical slits cannot be used in vacuum environments due to structural limitations, or that existing optical slits that can be used in vacuum environments cannot achieve reliable high vacuum sealing and have low adjustment accuracy under vacuum conditions, and to provide a high-precision adjustable slit for use in vacuum environments.

[0006] In order to achieve the above object, the technical solution provided by the present invention is as follows: A high-precision adjustable slit for use in a vacuum environment, which is special in that it includes a slit body, an adjustment mechanism, and a transmission rod; the slit body includes a main body, a fixing plate, a right slit structure, a steel ball, a transmission paddle, a transmission shaft, a transmission block, a left slit piece, a spring, a sealing cover, and an adjustment cylinder connected directly above the main body; The main body is a hollow cylindrical structure, the fixing plate is connected to the inner side wall of one end of the main body, and the cover is covered on the other end of the main body and is detachably connected to the fixing plate; a light-through hole is respectively provided at the center position of the fixing plate and the cover, and a first limit block is provided on the inner side surface of the fixing plate, which is located on the left side of the light-through hole, and a second limit block and a third limit block are respectively connected to the upper and lower ends of the first limit block vertically to the right; the inner side walls of the first limit block, the second limit block and the third limit block are all flat, and the outer side walls are all connected to the inner side wall of the main body, and the right end face of the second limit block is flat, which is used to form a limit surface; The right slit structure includes a guide block and a right slit sheet connected to the lower end of the guide block; the upper portion of the left side surface of the guide block is set as an inclined surface inclined to the upper right, a V-shaped groove is provided on the inclined surface, and the lower portion of the left side surface is used to abut against the limiting surface; the steel ball is located between the limiting surface and the V-shaped groove; at least one first guide post is provided on the side of the guide block facing the fixed plate, and a transversely extending strip limiting groove is provided on the fixed plate at a position corresponding to the first guide post, and the first guide post is slidably arranged in the strip limiting groove; a second guide post is provided on the right side of the guide block and extends away from the fixed plate; At least two limiting posts are provided on the inner side of the fixed plate at a position below the light-through hole; the transmission block is located between the upper end surface of the third limiting block and the lower end surfaces of the at least two limiting posts, and is clearance-matched with both of them; the transmission paddle is a strip-shaped structure, and its two ends are respectively provided with strip holes extending along its length direction; a third guide post is provided at one end of the transmission block, and the second guide post and the third guide post are respectively slidably arranged in the two strip holes, and the transmission shaft passes through the transmission paddle and is fixed to the fixed plate; The left slit piece is fixedly connected to the other end of the transmission block, and a slit is formed between the right end surface of the left slit piece and the left end surface of the right slit piece; one end of the spring is embedded in the countersunk hole on the left end surface of the transmission block, and the other end abuts against the inner side wall of the first limit block; The adjusting cylinder is a hollow structure with a closed top; the adjusting mechanism includes an adjusting part and a telescopic bellows, the main body of the adjusting part is fixed on the adjusting cylinder, and its bottom adjusting end is abutted or fixedly connected to the top of the transmission rod, and the bottom of the transmission rod abuts against the steel ball after passing through the main body; the telescopic bellows is sleeved on the upper part of the transmission rod, and one end is vacuum welded on the top outer circle of the transmission rod, and the other end is vacuum welded on the bottom inner circle of the adjusting cylinder.

[0007] Furthermore, the second guide post and the third guide post are at the same distance from the transmission shaft when the slit is closed.

[0008] Furthermore, the angle between the inclined plane and the horizontal direction is 45°.

[0009] Furthermore, the end faces at both ends of the main body are respectively configured as CF knife-edge flange structure, ISO-K structure, ISO-F structure or KF structure.

[0010] Furthermore, the end faces at both ends of the main body are respectively configured as CF knife-edge flange structures; when the CF knife-edge flange structure is connected to an external vacuum system, a copper gasket is used for sealing.

[0011] Furthermore, the adjustment mechanism further includes a clamping cover mounted on the top end of the adjustment cylinder; The adjusting member is a micrometer; The main body of the micrometer is fixed on the clamping cover, and the bottom of the moving rod of the micrometer is abutted against or fixedly connected to the top of the transmission rod.

[0012] Furthermore, the number of the first guide pillars is two; The number of the strip-shaped limiting grooves is two; The number of the limiting columns is two.

[0013] Furthermore, the fixing plate, the adjusting cylinder and the main body are an integrated structure.

[0014] Furthermore, a transmission shaft through hole is opened in the middle of the transmission paddle, and a transmission shaft fixing hole is opened on the fixing plate at a position corresponding to the transmission shaft through hole; The transmission shaft passes through the transmission shaft through hole of the transmission paddle and is fixedly connected to the transmission shaft fixing hole.

[0015] Furthermore, it also includes three first screws and one second screw; The cover is provided with four screw countersunk holes, one of which is arranged corresponding to the transmission shaft; threaded blind holes are respectively provided on the fixing plate at positions corresponding to the other three screw countersunk holes; and an internal thread is provided on the end of the transmission shaft facing the cover; One end of the three first screws passes through the three screw countersunk holes and is threadedly connected to the corresponding threaded blind holes; one end of the second screw passes through the corresponding screw countersunk holes and is connected to the internal thread of the end of the transmission shaft.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention provides a high-precision adjustable slit for a vacuum environment. A slit is formed by a left slit sheet and a right slit sheet, and the opening and closing of the slit is realized by cooperating with the design of a steel ball, a transmission paddle, a transmission shaft, a transmission block, a spring, an adjustment mechanism and a transmission rod. At the same time, the main body of the adjustment member is fixed on the adjustment cylinder, and the bottom adjustment end thereof abuts or is fixedly connected to the top of the transmission rod. The bottom of the transmission rod passes through the main body and abuts against the steel ball. Combined with the design of a telescopic bellows, a highly airtight chamber structure is formed, which provides a basis for achieving high vacuum and ultra-high vacuum, so that the slit can be easily connected to the vacuum system and can realize external high-precision adjustment. The structure and process are simple and reliable, and the adjustment accuracy is high.

[0017] 2. The present invention provides a high-precision adjustable slit for use in a vacuum environment. The distances between the second guide post and the third guide post and the transmission shaft are equal, which can ensure that the left slit and the right slit move in opposite directions at the same speed, ensuring the opening and closing accuracy of the slit.

[0018] 3. The present invention provides a high-precision adjustable slit for use in a vacuum environment, wherein the angle between the V-shaped groove and the horizontal direction is 45°, which facilitates the conversion of the driving force of the downward movement of the steel ball into the horizontal rightward driving force of the guide block.

[0019] 4. The present invention provides a high-precision adjustable slit for use in a vacuum environment. The front and rear end surfaces of the main body are respectively configured as CF knife-edge flange structures for connection to a vacuum system to ensure 10 -8 Pa ultra-high vacuum operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic structural diagram of an embodiment of a high-precision adjustable slit for use in a vacuum environment according to the present invention (the cover is not shown); Figure 2 This is a schematic structural diagram of one side of a fixed plate in an embodiment of the present invention; Figure 3 This is a schematic structural diagram of one side of the cover in an embodiment of the present invention; Figure 4 Schematic diagram of the structure of the main body and the fixing plate in an embodiment of the present invention; Figure 5 A schematic structural diagram of a right slit structure from one viewing angle in an embodiment of the present invention; Figure 6 2 is a schematic structural diagram of the right slit structure from another perspective in an embodiment of the present invention; Figure 7 It is a longitudinal cross-sectional view of an embodiment of the present invention.

[0021] The specific drawings are as follows: 0-transmission rod; 1-main body; 2-fixed plate, 21-light hole, 22-limiting column, 23-first limiting block, 24-second limiting block, 25-third limiting block, 26-limiting surface, 27-strip limiting groove, 28-transmission shaft fixing hole; 3-right slit structure, 31-guide block, 311-first guide column, 312-second guide column, 32-right slit; 4-steel ball; 5-transmission paddle, 51-strip hole, 52-transmission shaft through hole; 6-transmission shaft; 7-transmission block, 71-third guide column; 8-left slit; 9-spring; 10-adjusting cylinder; 11-adjusting part; 12-telescopic bellows; 13-clamping cover; 14-sealing cover, 141-screw countersunk hole. DETAILED DESCRIPTION

[0022] In order to make the advantages and features of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0023] like Figure 1 The figure shows a high-precision adjustable slit for use in a vacuum environment, comprising a slit body and an adjustment mechanism. The slit body is placed in a vacuum environment and comprises a hollow cylindrical body 1, a fixing plate 2 disposed within the body 1, a right slit structure 3, a steel ball 4, a transmission paddle 5, a transmission shaft 6, a transmission block 7, a left slit 8, a spring 9, a cover 14, and an adjustment cylinder 10 integrally connected directly above the side wall of the body 1.

[0024] like Figure 2-Figure 4 As shown, the fixing plate 2 is integrally connected circumferentially to the inner side wall of one end of the main body 1, and a light hole 21 is provided at its center. The cover 14 is used to cover the other end of the main body 1 and is detachably connected to the fixing plate 2. The cover 14 also has a light hole 21 at its center. A limit plate is provided on the inner side surface of the fixing plate 2. The limit plate includes a first limit block 23 located to the left of the light hole 21, a second limit block 24 connected to the upper end of the first limit block 23 to the right, and a third limit block 25 connected to the lower end of the first limit block 23 to the right. The semi-enclosed structure formed by the outer side walls of the first limit block 23, the second limit block 24, and the third limit block 25 is adapted to the inner side wall of the corresponding position of the main body 1 and is all connected to the inner side wall of the corresponding position of the main body 1. The inner side walls of the first limit block 23, the second limit block 24, and the third limit block 25 are all flat. The right end face of the second limit block 24 is flat and is used to form a limit surface 26.

[0025] like Figure 5 、 Figure 6As shown, the right slit structure 3 includes a guide block 31 and a right slit plate 32 connected to the lower end of the guide block 31. The upper left side of the guide block 31 is configured as an inclined surface inclined to the upper right, with a V-shaped groove formed on the inclined surface. The lower left side is configured to abut against the limiting surface 26. Preferably, in this embodiment, the angle between the inclined surface and the horizontal direction is 45°. The steel ball 4 is disposed between the limiting surface 26 and the V-shaped groove of the inclined surface. It makes contact with the V-shaped groove at two points, which is used to move the steel ball 4 up and down along the limiting surface 26. The limiting surface 26 cooperates with the V-shaped groove of the inclined surface to limit the displacement of the steel ball 4 in the left and right directions. At the same time, the V-shaped groove of the inclined surface is also used to limit the displacement of the steel ball 4 in the front and back directions. The right slit structure 3 converts the driving force of the downward movement of the steel ball 4 into a horizontal rightward driving force for the guide block 31, while also providing a rotational driving force for the transmission paddle 5.

[0026] Two first guide posts 311 are arranged side by side, one above the other, on the side of the guide block 31 facing the fixed plate 2. Laterally extending strip-shaped limit slots 27 are provided on the fixed plate 2 at positions corresponding to the two first guide posts 311. The two first guide posts 311 are slidably disposed within the corresponding strip-shaped limit slots 27, and are used to guide and limit the guide block 31 when the steel ball 4 squeezes the guide block 31 to move rightward, thereby achieving horizontal rightward movement. For ease of processing, the first guide posts 311 in this embodiment are cylindrical. In other embodiments of the present invention, if the first guide posts 311 are designed as strip-shaped guide posts, a single guide post can be provided to achieve the guiding and limiting function of the guide block 31.

[0027] Two limit posts 22 are provided on the inner side surface of the fixed plate 2 at the lower side of the light-through hole 21; the transmission block 7 is located between the upper end surface of the third limit block 25 and the lower end surfaces of the two limit posts 22, and is clearance-matched with both of them, so that the transmission block 7 can realize horizontal displacement in the left and right directions between the third limit block 25 and the limit posts 22.

[0028] The transmission paddle 5 is a strip-shaped structure with two axially extending slots 51 at each end. A drive shaft through hole 52 is defined in its center. A drive shaft fixing hole 28 is defined on the fixed plate 2 at a position corresponding to the drive shaft through hole 52. The drive shaft fixing hole 28 is threaded, and one end of the drive shaft 6 is externally threaded. The externally threaded end of the drive shaft 6 passes through the drive shaft through hole 52 of the transmission paddle 5 and is threadedly connected to the drive shaft fixing hole 28. This secures the center of the transmission paddle 5 to the fixed plate 2 via the drive shaft 6, allowing the transmission paddle 5 to rotate about the drive shaft 6. A second guide post 312 is provided on the right side of the guide block 31, extending away from the fixed plate 2. A third guide post 71 is provided on one end of the transmission block 7. The second and third guide posts 312 and 71 are slidably positioned within the two strip holes 51, respectively. When the slits are closed, the second and third guide posts 312 and 71 are positioned at equal distances from the drive shaft 6, ensuring that the left and right slits 8 and 32 move in opposite directions and at the same speed.

[0029] The left slit 8 is fixed to the other end of the transmission block 7, forming a slit between its right end and the left end of the right slit 32. One end of a spring 9 is embedded in a countersunk hole in the left end of the transmission block 7, while the other end abuts the inner wall of the first stopper 23. Its rightward spring force not only provides the driving force to close the slit, but also serves to compensate for gaps during machining, thereby meeting the requirements for reliable, high-precision optical adjustment.

[0030] In order to connect and fix the cover 14 to the fixing plate 2, three first screws and one second screw are further provided in this embodiment; four screw countersunk holes 141 are provided on the cover 14, and one screw countersunk hole 141 is provided corresponding to the transmission shaft 6; threaded blind holes are provided at positions corresponding to the other three screw countersunk holes 141 on the fixing plate 2; an internal thread is provided at the end of the transmission shaft 6 facing the cover 14; one end of the three first screws passes through the three screw countersunk holes 141 and is threadedly connected to the corresponding threaded blind holes, and one end of the second screw passes through the corresponding screw countersunk hole 141 and is connected to the internal thread at the end of the transmission shaft 6.

[0031] like Figure 7 As shown, the adjustment mechanism is disposed outside the vacuum environment and includes an adjustment member 11, a telescopic bellows 12, and a clamping cover 13. The adjustment mechanism can be a manual adjustment mechanism or an electric adjustment mechanism. In this embodiment, a manual adjustment mechanism is used. The adjustment member 11 is preferably a micrometer. The adjustment accuracy of the micrometer screw is such that the adjustment accuracy is 1 μm. When the micrometer rotates 1 grid, the slit opens (closes) by 10 μm. In other embodiments of the present invention, the adjustment member 11 can also be other types of existing adjustment members.

[0032] The adjusting cylinder 10 is a hollow annular structure, and the clamping cover 13 is fixedly mounted on the top of the adjusting cylinder 10 by screws, so that the adjusting cylinder 10 forms a hollow annular structure with a closed top. The main body of the micrometer is fixed on the clamping cover 13, and the transmission rod 0 is a T-shaped structure. The bottom of the moving rod of the micrometer is fixedly connected to the top of the transmission rod 0. The bottom of the transmission rod 0 passes through the main body 1 and abuts against the steel ball 4. When the screw of the micrometer is rotated, the moving rod at the bottom of the screw will axially expand and contract, thereby causing the transmission rod 0 to move down or up. The downward or upward movement of the transmission rod 0 then causes the steel ball 4 to move down or up, thereby causing the guide block 31 to move horizontally to the right or left. In other embodiments of the present invention, the bottom of the moving rod of the micrometer can also abut against the top of the transmission rod 0, which is not limited here.

[0033] The telescopic bellows 12 is sleeved on the upper part of the transmission rod 0, one end of which is vacuum welded on the top outer circle of the transmission rod 0, and the other end is vacuum welded on the bottom inner circle of the adjustment cylinder 10, forming a highly airtight chamber structure, which provides a basis for achieving high vacuum and ultra-high vacuum.

[0034] The end faces of the main body 1 are respectively provided with CF blade flange structures for connection to the vacuum system to ensure 10 - 8 The Pa ultra-high vacuum operation allows for convenient, quick, and high-precision control of the opening and closing of the internal right and left slits 32 and 8 via an external micrometer adjustment mechanism. The CF knife-edge flange structures on both ends of the main body 1 are further sealed with copper washers when connected to the external vacuum system. No other mounted sealing components are required. In other embodiments of the present invention, the end faces of the main body 1 can also be configured with ISO-K, ISO-F, or KF structures, without limitation.

[0035] The working principle of the high-precision adjustable slit for vacuum environment of the present invention is as follows: (1) Horizontal rightward movement of the right slit 32: Rotate the screw of the micrometer clockwise, and the moving rod at the bottom of the screw extends downward, causing the transmission rod 0 to move downward at the same speed. Since the bottom of the transmission rod 0 is in contact with the steel ball 4, it will give the steel ball 4 a downward driving force. The steel ball 4 is constrained by the limiting surface 26 and the V-shaped groove of the inclined surface and can only move downward in the vertical direction; when the steel ball 4 moves downward, it gives the guide block 31 an oblique downward driving force. The guide block 31 is constrained by the first guide column 311 in the strip limiting groove 27, so that the guide block 31 drives the lower end of the right slit 32 to move horizontally to the right, and the speed and displacement are the same as those of the steel ball 4, realizing the horizontal rightward movement of the right slit 32.

[0036] (2) Horizontal co-speed leftward movement of the left slit piece 8: When the right slit piece 32 moves to the right, the transmission paddle 5 rotates clockwise. Since the transmission block 7 is limited between the upper end surface of the third limit block 25 and the lower end surfaces of the two limit columns 22, at this time, the transmission block 7 can only be driven to move horizontally to the left, thereby driving the left slit piece 8 to move to the left at a co-speed.

[0037] The above two steps together realize the opening of the slit. When the slit is closed, the micrometer screw is rotated counterclockwise to make the moving rod at the bottom of the screw away from the top of the transmission rod 0. At this time, the spring 9 will push the left slit piece 8 to the right, thereby providing a rightward thrust to the transmission block 7, so that the transmission paddle 5, the right slit piece 32, the steel ball 4 and the transmission rod 0 return to their original positions, thereby closing the slit.

[0038] The above description is only used to illustrate the technical solution of the present invention, rather than to limit it. For ordinary professional and technical personnel in this field, the specific technical solutions recorded in the above embodiments can be modified, or some of the technical features therein can be replaced by equivalents. These modifications or replacements do not cause the essence of the corresponding technical solution to deviate from the scope of the technical solution protected by the present invention.

Claims

1. A high-precision adjustable slit for use in a vacuum environment, characterized by: The invention comprises a slit body, an adjustment mechanism and a transmission rod (0); the slit body comprises a body (1), a fixing plate (2), a right slit structure (3), a steel ball (4), a transmission paddle (5), a transmission shaft (6), a transmission block (7), a left slit sheet (8), a spring (9), a sealing cover (14) and an adjustment cylinder (10) connected directly above the body (1); The main body (1) is a hollow cylindrical structure, the fixed plate (2) is circumferentially connected to the inner side wall of one end of the main body (1), and the cover (14) is covered on the other end of the main body (1) and is detachably connected to the fixed plate (2); a light-through hole (21) is respectively provided at the center position of the fixed plate (2) and the cover (14); a first limit block (23) located on the left side of the light-through hole (21) and a second limit block (24) and a third limit block (25) respectively connected to the upper and lower ends of the first limit block (23) are provided on the inner side surface of the fixed plate (2); the inner side walls of the first limit block (23), the second limit block (24) and the third limit block (25) are all plane, and the outer side walls are all connected to the inner side wall of the main body (1); the right end surface of the second limit block (24) forms a limit surface (26); The right slit structure (3) comprises a guide block (31) and a right slit sheet (32) connected to the lower end of the guide block (31); the upper portion of the left side surface of the guide block (31) is provided as an inclined surface inclined to the upper right, a V-shaped groove is provided on the inclined surface, and the lower portion of the left side surface is used to abut against the limiting surface (26); the steel ball (4) is located between the limiting surface (26) and the V-shaped groove; the guide block (31) is provided with at least one first guide column (311) on the side facing the fixed plate (2), a transversely extending strip limiting groove (27) is provided on the fixed plate (2) at a position corresponding to the first guide column (311), and the first guide column (311) is slidably arranged in the strip limiting groove (27); the right side of the guide block (31) is provided with a second guide column (312) extending away from the fixed plate (2); At least two limiting posts (22) are provided on the inner side of the fixed plate (2) at a position below the light-through hole (21); the transmission block (7) is located between the third limiting block (25) and the at least two limiting posts (22), and is clearance-matched with both of them; the transmission paddle (5) is a strip-shaped structure, and strip-shaped holes (51) extending along its length are provided at both ends; a third guide post (71) is provided at one end of the transmission block (7), and the second guide post (312) and the third guide post (71) are respectively slidably arranged in the two strip-shaped holes (51), and the transmission shaft (6) passes through the transmission paddle (5) and is fixed to the fixed plate (2); The left slit piece (8) is fixedly connected to the other end of the transmission block (7), and a slit is formed between the right end surface of the left slit piece (32) and the left end surface of the right slit piece (8). One end of the spring (9) is embedded in the countersunk hole on the left end surface of the transmission block (7), and the other end abuts against the inner side wall of the first limit block (23). The regulating cylinder (10) is a hollow structure with a closed top; the regulating mechanism comprises an regulating member (11) and a telescopic bellows (12); the main body of the regulating member (11) is fixed on the regulating cylinder (10), and the bottom regulating end thereof is in contact with or fixedly connected to the top of the transmission rod (0); the bottom of the transmission rod (0) passes through the main body (1) and is in contact with the steel ball (4); the telescopic bellows (12) is sleeved on the upper part of the transmission rod (0), and one end is vacuum welded to the top outer circle of the transmission rod (0), and the other end is vacuum welded to the bottom inner circle of the regulating cylinder (10).

2. The high-precision adjustable slit for use in a vacuum environment according to claim 1, characterized in that: The second guide column (312) and the third guide column (71) are at equal distances from the transmission shaft (6) when the slit is in a closed state.

3. The high-precision adjustable slit for use in a vacuum environment according to claim 2, characterized in that: The angle between the inclined plane and the horizontal direction is 45°.

4. A high-precision adjustable slit for use in a vacuum environment according to any one of claims 1 to 3, characterized in that: The end faces at both ends of the main body (1) are respectively configured as a CF knife-edge flange structure, an ISO-K structure, an ISO-F structure or a KF structure.

5. The high-precision adjustable slit for use in a vacuum environment according to claim 4, characterized in that: The end faces at both ends of the main body (1) are respectively provided with CF knife-edge flange structures; when the CF knife-edge flange structure is connected to an external vacuum system, a copper gasket is used for sealing.

6. The high-precision adjustable slit for use in a vacuum environment according to claim 1, characterized in that: The adjustment mechanism further includes a clamping cover (13) mounted on the top end of the adjustment cylinder (10); The adjusting member (11) is a micrometer; The main body of the micrometer is fixed on the clamping cover (13), and the bottom of the moving rod of the micrometer is in contact with or fixedly connected to the top of the transmission rod (0).

7. The high-precision adjustable slit for use in a vacuum environment according to claim 1, characterized in that: The number of the first guide columns (311) is two; The number of the strip-shaped limiting grooves (27) is two; The number of the limiting columns (22) is two.

8. The high-precision adjustable slit for use in a vacuum environment according to claim 7, characterized in that: The fixing plate (2), the regulating cylinder (10) and the main body (1) are an integrated structure.

9. The high-precision adjustable slit for use in a vacuum environment according to claim 8, characterized in that: A transmission shaft through hole (52) is provided in the middle of the transmission paddle (5), and a transmission shaft fixing hole (28) is provided on the fixing plate (2) at a position corresponding to the transmission shaft through hole (52); The transmission shaft (6) passes through the transmission shaft through hole (52) of the transmission paddle (5) and is fixedly connected to the transmission shaft fixing hole (28).

10. The high-precision adjustable slit for use in a vacuum environment according to claim 1, characterized in that: Also includes three first screws and one second screw; The cover (14) is provided with four screw countersunk holes (141), one of which is arranged corresponding to the transmission shaft (6); threaded blind holes are respectively provided on the fixing plate (2) at positions corresponding to the other three screw countersunk holes (141); and an internal thread is provided on the end of the transmission shaft (6) facing the cover (14); One end of the three first screws passes through the three screw countersunk holes (141) and is threadedly connected to the corresponding threaded blind holes; one end of the second screw passes through the corresponding screw countersunk holes (141) and is connected to the internal thread of the end of the transmission shaft (6).

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