Formulation file generation method, execution method, upper computer, machine and equipment

Abstract

The invention provides a formula file generation method, an execution method, an upper computer, a machine and equipment, and the generation method comprises the steps: searching a process step database for a first general process step matched with a first target process formula based on a corresponding relation between the first target process formula and the first general process step; the process step database comprises a corresponding relation between general process steps and parameter values of the process parameters, and the general process steps are process steps suitable for a plurality of process formulas; and generating a formula file of the first target process formula by using the parameter values of the process parameters in the first general process step. According to the scheme, the generation efficiency of the formula file can be effectively improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor process technology, and in particular to a recipe file generation method, execution method, host computer, machine and equipment. Background Art

[0002] In the semiconductor process flow, a machine executes process tasks based on a recipe file to process wafers. A recipe includes multiple process steps and execution information for each step, each of which includes multiple process parameters. Due to the complexity of wafer processing and the diversity of processes, the process parameters used in recipes at different stages vary, making process recipes quite complex and variable.

[0003] Currently, the main method for generating recipe files involves creating multiple process steps based on process requirements, with multiple process parameters in each process step preset using a parameter template; then setting parameter values ​​for each of the process parameters in each process step to generate a recipe file for the process recipe. Because the multiple process parameters in each process step are limited by the fixed parameter template preset, parameter values ​​must be set for each process step during the generation of each recipe file, resulting in low recipe file generation efficiency. Summary of the Invention

[0004] The present application provides a recipe file generation method, execution method, host computer, machine and equipment to solve the problem of low recipe file generation efficiency existing in the related art.

[0005] The first aspect of the present application provides a method for generating a recipe file, comprising: based on the correspondence between the first target process recipe and the first general process step, searching for the first general process step that matches the first target process recipe in a process step database; the process step database includes the correspondence between the general process steps and the parameter values ​​of the process parameters, and the general process steps are process steps applicable to multiple process recipes; and using the parameter values ​​of the process parameters in the first general process step to generate a recipe file for the first target process recipe.

[0006] In one embodiment, the parameter attributes of the process parameters are stored in a process parameter database, and the parameter attributes include a parameter value range. The method further includes: in response to a modification operation on the parameter value range of the target process parameter in the process parameter database, obtaining a modified parameter value range; searching for a second general process step carrying the target process parameter in the process step database; determining whether the parameter value of the target process parameter in the second general process step is within the modified parameter value range; if not, prompting to modify the parameter value of the target process parameter in the second general process step.

[0007] In one embodiment, the method further includes: in response to a deletion operation on the target process parameter in the process parameter database, searching for a third general process step carrying the target process parameter in the process step database; and deleting the target process parameter and parameter value of the third general step.

[0008] In one embodiment, the method further includes: in response to a modification operation on the fourth general process step in the process step database, obtaining a modified fourth general process step; searching for a second target process recipe carrying the fourth general process step in the process recipe database; the process recipe database includes a correspondence between process recipes and general process steps; generating an operation instruction for the user's operation on the modified fourth general process step based on the second target process recipe; if the operation instruction is an add instruction, then in response to the add instruction, the modified fourth general process step is added to the process step database. In one embodiment, the method further includes: if the operation instruction is a confirm modification instruction, then in response to the confirm modification instruction, the fourth general process step in the process step database is replaced with the modified fourth general process step, so that the modified fourth general process step is used to generate multiple new recipe files for the second target process recipe.

[0009] In one embodiment, the method further includes: in response to a deletion operation on the fifth general process step in the process step database, searching for a third target process recipe carrying the fifth general process step in the process recipe database; and deleting the fifth general process step in the third target process recipe.

[0010] In one embodiment, before searching for the first general process step that matches the first target process recipe in a process step database based on the correspondence between the first target process recipe and the first general process step, the method further includes: in response to a selection operation of the first target process recipe among multiple process recipes, obtaining the correspondence between the first target process recipe and the first general process step from the process recipe database; the process recipe database includes the correspondence between process recipes and general process steps.

[0011] In one embodiment, before searching for the first general process step that matches the first target process recipe in the process step database based on the correspondence between the first target process recipe and the first general process step, the method further includes: establishing a correspondence between the general process steps and the process parameters according to the process step requirements; and setting parameter values ​​for all process parameters in the general process steps to form a process step database.

[0012] In one embodiment, generating a recipe file for the first target process recipe also includes: based on the correspondence between the first target process recipe and the first general process step, searching for execution information of the first general process step in a process recipe database; the process recipe database includes the execution information of the general process step; and loading the execution information into the recipe file for the first target process recipe.

[0013] In one embodiment, after generating the recipe file of the first target process recipe, it also includes at least one of the following: in response to a preview operation on the recipe file of the first target process recipe, displaying the content of the recipe file of the first target process recipe; in response to a sending operation on the recipe file of the first target process recipe, sending the recipe file of the first target process recipe to the machine.

[0014] The second aspect of the present application provides a method for executing a recipe file, including: receiving a recipe file of a first target process recipe; generating the recipe file of the first target process recipe using the generation method of any of the above-mentioned embodiments, and sending it in response to the sending operation of the recipe file of the first target process recipe; executing a process task according to the recipe file of the first target process recipe; and deleting the recipe file of the first target process recipe after the process task is completed.

[0015] A third aspect of the present application provides a host computer, comprising: a processor and a memory, wherein the memory stores instructions, and the instructions are loaded and executed by the processor to implement the generation method of any of the above-mentioned embodiments.

[0016] A fourth aspect of the present application provides a machine, comprising: a processor and a memory, wherein the memory stores instructions, and the instructions are loaded and executed by the processor to implement the execution method of any one of the above-mentioned embodiments.

[0017] A fifth aspect of the present application provides a semiconductor process equipment, characterized in that it includes a host computer according to any one of the above embodiments and a machine according to any one of the above embodiments.

[0018] In a sixth aspect, the present application provides a computer-readable storage medium, which stores a computer program. When the computer program runs on a computer, the method in any one of the above-mentioned embodiments is executed.

[0019] The advantages or beneficial effects of the above technical solution include at least: since the general process steps and the parameter values ​​of the process parameters, as well as the first target process recipe and the first general process step are in corresponding association with each other, and the general process steps can be applied to multiple process recipes, the parameter values ​​of the process parameters in the first general process step can be directly reused in the recipe file of the first target process recipe, without relying on the parameter template to preset the process parameters and setting the parameter values ​​of the process parameters one by one, thereby effectively improving the generation efficiency of the recipe file of the first target process recipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings are incorporated into and constitute a part of the specification, illustrate embodiments consistent with the present application, and together with the description, serve to explain the principles of the present application. In addition, these drawings and the description are not intended to limit the scope of the concept of the present application in any way, but rather to illustrate the concept of the present application for those skilled in the art by reference to specific embodiments.

[0021] Figure 1 FIG2 is a flow chart of a method for generating a recipe file according to an embodiment of the present application.

[0022] Figure 2 The figure shows a flow chart of modifying the parameter value range of the target process parameter in the process parameter database in one embodiment of the present application.

[0023] Figure 3 FIG2 is a flow chart of a method for generating a recipe file according to another embodiment of the present application.

[0024] Figure 4 Shown is a structural block diagram of the host computer of an embodiment of the present application.

[0025] Figure 5 Shown is a structural block diagram of a semiconductor process equipment according to an embodiment of the present application. DETAILED DESCRIPTION

[0026] Hereinafter, only certain exemplary embodiments are briefly described. As will be appreciated by those skilled in the art, the described embodiments may be modified in various ways without departing from the spirit or scope of the present application. Therefore, the drawings and description are to be regarded as illustrative in nature and not restrictive.

[0027] In the related art, since the process parameters of each process step in the recipe file of the process recipe are preset based on the parameter template, the process parameters of each process step need to always be consistent with the process parameters provided by the parameter template and cannot be adjusted at will, resulting in each process step in the recipe file containing these same process parameters. Therefore, for recipe files that use different parameter templates to preset process parameters, the process steps between different process recipe files cannot be directly reused. However, the inventors found in the process of implementing this application that: in actual applications, some commonly used standard process steps are similar in the process recipes of multiple processes or processes, and the parameter values ​​of the process parameters in these standard process steps are the same. For example, the parameter values ​​of the process parameters in the gate opening step (BT Step), the ashing step (ASH Step) and the etching post-processing step (PET step) are the same in the etching marathon process recipe and other process recipes. The parameter values ​​that need to be set are the same. Therefore, the parameter values ​​of the same process parameters can be reused in different recipe files, and there is no need to re-edit and create the parameter values ​​of these same process parameters in different recipe files. Therefore, the related art has the problem of low efficiency in recipe file generation.

[0028] In view of this, the recipe file generation method, execution method, host computer, machine and equipment provided in the embodiments of the present application can effectively solve the problem of low recipe file generation efficiency existing in the related art. The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0029] Figure 1 FIG2 is a flow chart of a method for generating a recipe file according to an embodiment of the present application.

[0030] like Figure 1 As shown, the method for generating a recipe file includes the following steps S110 to S120.

[0031] Step S110: Based on the correspondence between the first target process recipe and the first universal process step, a first universal process step matching the first target process recipe is searched in a process step database. The process step database includes correspondences between universal process steps and parameter values ​​of process parameters. Universal process steps are process steps applicable to multiple process recipes.

[0032] Step S120 : Generate a recipe file of a first target process recipe using the parameter values ​​of the process parameters in the first target general process step.

[0033] For example, as shown in Table 1 below, the process recipe database in step S110 is used to store multiple different process recipes, each of which corresponds to at least one common process step. As shown in Table 2 below, the process step database in step S110 is used to store multiple different common process steps, each of which corresponds to at least one process parameter. The process recipe database and the process step database may be in a tabular format or a configuration file format, and the present embodiment does not limit the format of the process recipe database and the process step database.

[0034] Table 1 Process recipe database

[0035]

[0036] Each process recipe includes a recipe ID and name, which characterize the recipe. It also includes the IDs of the common process steps that make up the recipe and execution information for each step. This information includes the execution order, execution count, whether there are constraints, and execution conditions. For example, consider the first desorption recipe. Its recipe ID is R001, and its common process step IDs are S001 and S002. For step S001, the execution order and execution count are 1. "False" indicates no constraints, and "Null" indicates no execution conditions.

[0037] Table 2 Process step database

[0038]

[0039] Each common process step includes a process step ID and a name, as well as the number of process parameters, their IDs, and their values. For example, the DC stabilization step has a process step ID of S001 and consists of five process parameters: Parameters 1 through 5. The IDs for Parameters 1 through 5 correspond to P001, P002, P009, P010, and P011, respectively. The values ​​for P001, P002, P009, P010, and P011 correspond to 10, 20, 40, 40, and 40, respectively.

[0040] In an example, the DC stabilization step, the first desorption step, the second desorption step, the stabilization step, the first adsorption step and the second adsorption step in Table 2 can be applied to etching process recipe files of different processes. By utilizing a process step database to store multiple different general process steps and configuring the association between the general process steps and multiple different etching process recipes, it is beneficial to reuse each general process step in different etching process recipe files.

[0041] In another example, the general process steps include a wafer adsorption step and a wafer desorption adsorption step. The wafer adsorption step and the wafer desorption adsorption step can be applied to the warm-up step (Season Step) in the chamber pretreatment process recipe and the cleaning step (Clean Step) in the chamber cleaning process recipe. By utilizing the process step database to store the wafer adsorption step and the wafer desorption adsorption step, and configuring the association between the wafer adsorption step and the wafer desorption adsorption step and the warm-up step, and configuring the association between the wafer adsorption step and the wafer desorption adsorption step and the cleaning step, the wafer adsorption step and the wafer desorption adsorption step can be reused in the recipe files of the chamber pretreatment process recipe and the chamber cleaning process recipe.

[0042] In an example, taking the first target process recipe as the first desorption recipe, the recipe file for generating the first target process recipe can be: based on the correspondence between the first desorption recipe and S001 and S002, find the DC stabilization step corresponding to S001 and the first desorption step corresponding to S002 in the process step database in Table 2; use P001, P002, P009, P010, P011 and their corresponding parameter values ​​of 10, 20, 40, 40, 40 that constitute the DC stabilization step, and use P001, P002, P006~P011 and their corresponding parameter values ​​of 4, 200, 200, 1000, 50, 40, 40, 40 that constitute the first desorption step, to generate the recipe file of the first desorption recipe as shown in Table 4 below.

[0043] Exemplarily, in step S120, generating a recipe file of the first target process recipe using the parameter values ​​of the process parameters in the first general process step may include: searching for the process parameter name in the process parameter database using the process parameter ID in the first general process step; and generating the recipe file of the first target process recipe using the process parameter name and its corresponding parameter value.

[0044] For example, as shown in Table 3 below, a process parameter database can be used to store multiple different process parameters. Each process parameter includes a process parameter ID and a process parameter name used to characterize the process parameter, as well as parameter attributes; wherein the parameter attributes include a data type, a minimum value, a maximum value, a unit, and a default value. Taking processing time as an example, the process parameter ID of processing time is P001, the data type is double-precision floating point, the minimum value is 0, the maximum value is 360,000, the unit is s, and the default value is 0. The process parameter database can also be in the form of a table or a configuration file. The embodiment of the present application does not limit the form of the process parameter database.

[0045] Table 3 Process parameter database

[0046]

[0047]

[0048] In another example, taking the example of generating a recipe file of the first desorption process recipe using the parameter values ​​of the process parameters in the DC stabilization step and the first desorption step, step S120 may be: using P001, P002, P009, P010, and P011 in the DC stabilization step to search the process parameter database for corresponding process parameter names, which correspond one to one to processing time, pressure, the center temperature of the electrostatic chuck, the middle area temperature of the electrostatic chuck, and the edge area temperature of the electrostatic chuck; and using P001, P002, and P006 to P011 in the first desorption step to search the process parameter database for corresponding process parameter names, which correspond one to one to processing time. , pressure, low-frequency power supply power, low-frequency power supply frequency, duty cycle of low-frequency power supply frequency, center temperature of electrostatic chuck, middle area temperature of electrostatic chuck, edge area temperature of electrostatic chuck; configure the process parameter names of P001, P002, P009, P010, and P011 in the DC stabilization step and their corresponding parameter values ​​10, 200, 40, 40, and 40 in one-to-one correspondence, and configure the process parameter names of P001, P002, P006~P011 in the first desorption step and their corresponding parameter values ​​4, 200, 200, 1000, 50, 40, 40, and 40 in one-to-one correspondence to generate the recipe file of the first desorption recipe shown in Table 4 below.

[0049] Table 4 Recipe file for the first desorption recipe

[0050]

[0051]

[0052] In the above scheme, since there is a corresponding association relationship between the general process steps and the parameter values ​​of the process parameters, and between the first target process recipe and the first general process step, and the general process steps can be applied to multiple process recipes, the parameter values ​​of the process parameters in the first general process step can be directly reused in the recipe file of the first target process recipe, without relying on the parameter template to preset the process parameters of the recipe file and setting the parameter values ​​of the process parameters one by one, thereby effectively improving the generation efficiency of the recipe file of the first target process recipe.

[0053] Furthermore, since the process step database includes the correspondence between general process steps and parameter values ​​of process parameters, and the general process steps can be applied to multiple different process recipes, in actual applications, when it is necessary to generate recipe files for multiple different target process recipes, the parameter values ​​of the process parameters in the general process steps in the process step database can be reused in the recipe files of different target process recipes. It can also avoid repeatedly setting the parameter values ​​of each process parameter in the general process steps, which is more conducive to quickly generating recipe files for different target process recipes and improving generation efficiency. For example, for some commonly used standard process steps, such as the gate opening step (BT Step), the ashing step (ASH Step) and the post-etching treatment step (PET step), when they are applied to the process recipe of the etching marathon process and the recipe files of other process recipes, the parameter values ​​that need to be set for each step in different process recipe files are the same. By storing the correspondence between the gate opening process step and the parameter values ​​of its process parameters, the correspondence between the ashing step and the parameter values ​​of its process parameters, and the correspondence between the post-etching treatment step and the parameter values ​​of its process parameters in the process step database, and configuring the association between the gate opening step, the ashing step and the post-etching treatment step and the process recipe of the etching marathon process and other process recipes, the parameter values ​​of the process parameters in the gate opening step, the ashing step and the post-etching treatment step can be directly reused in the process recipe of the etching marathon process and the recipe files of other process recipes, and there is no need to re-edit and create the parameter values ​​of the process parameters in these process steps. Based on this, some commonly used standard process steps can also be directly reused in different process recipe files, so that the generation of different process recipe files is no longer limited by the differences in parameter templates, and there is no need to repeatedly edit multiple parameter values ​​in the process steps. This not only improves the efficiency of recipe file generation, but also reduces the risk and workload of manual editing errors.

[0054] In one embodiment, parameter attributes of the process parameters are stored in a process parameter database, and the parameter attributes include parameter value ranges, such as Figure 2 As shown, the method further includes the following steps S210 to S240.

[0055] Step S210 : In response to a modification operation on a parameter value range of a target process parameter in a process parameter database, a modified parameter value range is obtained.

[0056] Step S220: Search the process step database for a second general process step having target process parameters.

[0057] Step S230 : determining whether the parameter value of the target process parameter in the second general process step is within the range of the modified parameter value.

[0058] Step S240: If not, prompt to modify the parameter value of the target process parameter in the second general process step.

[0059] For example, the process parameter database is shown in Table 3. Users can use the visual operation interface to modify the minimum or maximum values ​​of process parameters in the process parameter database, thereby modifying the parameter value range of the process parameters. For example, if the target process parameter is processing time, as shown in Table 3, the current minimum value of processing time in the process parameter database is 0s. When the user uses the visual operation interface to edit the minimum value of processing time to 10s, the modified parameter value range obtained in response to this modification operation is 10s to 360,000s. Using the process parameter ID of processing time, such as P001, the process step database (shown in Table 2) is searched for the second general process step with P001, including the DC stabilization step, the first desorption step, the second desorption step, the stabilization step, the first adsorption step, and the second adsorption step. The process step database then determines whether the processing time parameter values ​​in the DC stabilization step, the first desorption step, the second desorption step, the stabilization step, the first adsorption step, and the second adsorption step are within the range of 10s to 360,000s. After judgment, it can be determined that the parameter values ​​of the processing time of the first desorption step, the first adsorption step and the second desorption step are not within 10s~360000s, then it is prompted to modify the parameter values ​​of the processing time of the first desorption step and the first adsorption step and the second desorption step in the process step database.

[0060] Based on this, when the parameter value range of the target process parameter in the process parameter database is modified, it can automatically determine whether the parameter value of the target process parameter of the current process step meets the parameter attribute setting of the modified process parameter, and if it does not meet the requirements, it will automatically prompt to modify the parameter value of the target process parameter in the corresponding process step, which is conducive to improving modification efficiency.

[0061] In one embodiment, the method further includes the following steps S310 to S320.

[0062] Step S310 : In response to a deletion operation on the target process parameter in the process parameter database, searching the process step database for a third general process step carrying the target process parameter.

[0063] Step S320: Delete the target process parameters and parameter values ​​of the third general step.

[0064] For example, taking the case where the target process parameter is the processing time in the process parameter database (as shown in Table 3 above), when the user deletes the processing time and its parameter attributes in the process parameter database through the visual operation interface, in response to the deletion operation, the process parameter ID of the processing time, for example, P001, is used to find the third general process step carrying P001 in the process step database shown in Table 2 above, including a DC stabilization step, a first desorption step, a second desorption step, a stabilization step, a first adsorption step, and a second adsorption step, and then P001 and its parameter values ​​in the DC stabilization step, the first desorption step, the second desorption step, the stabilization step, the first adsorption step, and the second adsorption step are deleted.

[0065] In actual applications, the process parameters in the process parameter database are set according to the hardware of the machine. When the hardware of the machine changes, for example, the new machine can omit some hardware, the corresponding process parameters and their parameter attributes need to be deleted from the process parameter database.

[0066] The above scheme can automatically delete the target process parameters and their parameter values ​​in the third general process step carrying the target process parameters in the process step database when the target process parameters in the process parameter database are deleted, and can quickly delete the redundant process parameters and their parameter values ​​in the process step database, so that the process parameters and their parameter values ​​of the general process steps in the process step database are adapted to the machine characteristics.

[0067] In one embodiment, the method further includes the following steps S410 to S430.

[0068] Step S410 : In response to a modification operation on the fourth general process step in the process step database, obtaining a modified fourth general process step.

[0069] Step S420: Searching for a second target process recipe containing a fourth general process step in a process recipe database; the process recipe database includes a correspondence between process recipes and general process steps.

[0070] Step S430 : generating an operation instruction for the user's operation on the modified fourth general process step based on the second target process recipe.

[0071] Step S440: If the operation instruction is an add instruction, then in response to the add instruction, the modified fourth general process step is added to the process step database.

[0072] For example, taking the modification of the parameter value of P001 in the DC stabilization step in the process step parameter database shown in Table 2 above as an example, the recipe file generation method can be executed in a host computer. When a user modifies the parameter value of P001 in the DC stabilization step through the visual operation interface of the host computer, the host computer responds to the modification operation and obtains the modified parameter value of P001. The second target process recipe containing S001 is searched in the process recipe database shown in Table 1 using the universal process step ID of the DC stabilization step, such as S001. If the user determines that the parameter value of P001 in the modified DC stabilization step is not applicable to the second target process recipe, the user can continue to add a modified fourth universal process step through the visual operation interface and generate a corresponding add instruction. The host computer then responds to the add instruction and adds the modified DC stabilization step to the process step database shown in Table 2.

[0073] In actual applications, the general process steps in the process step database are set according to the process step requirements. When the process step requirements change, the corresponding fourth general process step in the process step database needs to be modified to adapt to the changed process step requirements. The addition of general process steps can be achieved by searching the process recipe database for the second target process recipe containing the fourth general process step. If it is determined that the modified fourth general process step is not applicable to the second target process recipe, the modified fourth general process step is added to the process step database.

[0074] In one embodiment, the generation method further includes: if the operation instruction is a confirmation modification instruction, then in response to the confirmation modification instruction, the fourth general process step in the process step database is replaced with the modified fourth general process step, so that the modified fourth general process step is used to generate multiple new second target process recipe files.

[0075] For example, please continue to refer to Table 2 and Table 1 above. When the user determines that the parameter value of P001 in the modified DC stabilization step is suitable for the second target process recipe, a confirmation modification operation is performed through the visual operation interface to generate a confirmation modification instruction. In response to the confirmation modification instruction, the upper computer replaces the fourth general process step in the process recipe database with the modified fourth general process step, so that when multiple new recipe files of the second target process recipes are generated next time, the parameter value of P001 in the modified DC stabilization step can be directly used in the recipe files of multiple new second target process recipes.

[0076] It should be noted that in the related art, when a process step needs to be modified, it is necessary to manually and repeatedly adjust the process steps in the recipe file of each process recipe, which is labor-intensive and prone to errors. In the above solution, since the process recipe database includes the correspondence between process recipes and universal process steps, and the universal process steps are set in the process step database, when it is determined that the modified fourth universal process step is applicable to the second target process recipe, by confirming the modification, the modified fourth universal process step can be used to generate multiple new recipe files of the second target process recipe, without having to repeatedly adjust the process steps in the recipe file of each second target process recipe. This reduces the workload and the risk of manual adjustment errors, and is more conducive to flexible adjustment of the recipe file of the second target process recipe.

[0077] In one embodiment, the method further includes the following steps S510 to S520.

[0078] Step S510 : In response to a deletion operation on the fifth general process step in the process step database, searching the process recipe database for a third target process recipe that carries the fifth general process step.

[0079] Step S520: Delete the fifth general process step in the third target process recipe.

[0080] Exemplarily, the process recipe settings in the process recipe database are related to the machine's hardware. For example, when a machine is upgraded, the new machine no longer requires a stabilization step. The user can then delete the stabilization step from the process step database shown in Table 2 through the visual operation interface. Specifically, when the machine uses an old RF power supply, a stabilization step needs to be set between the preheating step and the ignition step in the process recipe. By executing the stabilization step, the machine can stabilize the RF power of the old RF power supply. When the machine is upgraded to a new RF power supply, the stabilization step is no longer required. When the stabilization step is deleted from the process step database, in response to the deletion operation, the ID of the stabilization step, such as S004, is used to search the process recipe database shown in Table 1 for a third target process recipe containing S004, including the first adsorption recipe and the second adsorption recipe. The stabilization step in the first and second adsorption recipes in the process recipe database is then automatically deleted.

[0081] Based on this, when the fifth general process step in the process step database is deleted, the fifth general process step in the corresponding process recipe in the process recipe database can be automatically deleted, which is conducive to improving modification efficiency.

[0082] In one embodiment, before step S110, the method further includes: in response to a selection operation of a first target process recipe among multiple process recipes, obtaining a correspondence between the first target process recipe and the first general process step from a process recipe database; the process recipe database includes a correspondence between process recipes and general process steps.

[0083] Exemplarily, the process recipe database is shown in Table 1 above. Taking the first target process recipe as the first desorption recipe as an example, when the user selects the first desorption recipe from multiple process recipes in the process recipe database through the visual operation interface, in response to the selection operation of the first desorption recipe, the correspondence between the first desorption recipe and S001 and S002 is obtained from Table 1 above, and then the correspondence is used to search S001 and S002 from Table 2 above to obtain the parameter values ​​of the process parameters required to generate the first desorption recipe.

[0084] In related technologies, each process recipe needs to store the parameter values ​​of multiple process parameters in the process steps, which consumes a large amount of storage resources. Compared with related technologies, the above solution uses the correspondence between process recipes and general process steps preset in the process recipe database. When the user selects a target process recipe from multiple process recipes in the process recipe database, the correspondence between the first target process recipe and the first general process step is obtained in response to the selection operation. This correspondence is then used to dynamically generate a recipe file for the target process recipe in real time, which helps reduce the use of storage resources.

[0085] In one embodiment, before step S110, the method further includes the following steps S610 to S620.

[0086] Step S610: Establish a correspondence between common process steps and process parameters according to process step requirements.

[0087] Step S620: Setting parameter values ​​for all process parameters in the common process steps to form a process step database.

[0088] In one example, as shown in Table 2 above, the process step database can be in a tabular form. Taking the DC stabilization step as an example, by establishing a correspondence between the DC stabilization step and the process parameter IDs such as P001, P002, P009, P010 and P011 in Table 2, and setting parameter values ​​10, 200, 40, 40, 40 for P001, P002, P009, P010 and P011 one by one, a correspondence between a general process step and the parameter values ​​of multiple process parameters can be established.

[0089] In the related art, multiple process parameters in the process steps are preset by a parameter template so that different process steps have the same process parameters. For example, the parameter template will set P001~P011 for both the DC stabilization step and the first desorption step, and it is necessary to set parameter values ​​for P001~P011 of the DC stabilization step and the first desorption step. However, for the DC stabilization step, P003~P008 are redundant process parameters; for the first desorption step, P003~P005 are redundant process parameters, which will increase the interference of redundant process parameters and the workload of setting parameter values.

[0090] In the above scheme, since the correspondence between the general process steps and the process parameters is set according to the process step requirements, it reduces the setting of redundant process parameters and their parameter values, which helps reduce the interference of redundant process parameters and the workload of setting parameter values. In this way, for some general process steps with special needs, it is only necessary to establish the correspondence between the general process step and the required process parameters and set the parameter values ​​for the required process parameters, without having to add or delete process parameters for other process steps at the same time to ensure that the process parameters in all process steps meet the requirements of the parameter template. This makes the adjustment of process parameters in the process steps simpler and more flexible, greatly reducing the workload of adjusting process parameters.

[0091] In one embodiment, before step S110, the method further includes: establishing a correspondence between each process recipe and at least one common process step based on multiple different process recipe requirements, configuring execution information for each process step, and generating a process recipe database; the execution information includes the execution order, execution count, presence or absence of constraints, and execution conditions for each common process step. By configuring execution information for each common process step, each common process step can be executed according to the execution information. The execution order, execution count, and execution conditions can be selected and adjusted based on actual needs and are not limited in this embodiment of the present application.

[0092] In one embodiment, generating a recipe file for the first target process recipe further includes the following steps:

[0093] Based on the correspondence between the first target process recipe and the first general process step, execution information of the first general process step is searched in a process recipe database; the process recipe database includes the execution information of the general process step.

[0094] The execution information of the first general process step is loaded into the recipe file of the first target process recipe.

[0095] For example, referring to Table 1, taking the generation of a recipe file for the first desorption recipe as an example, using the correspondence between the recipe ID of the first desorption recipe, such as R001, and the common process step IDs, such as S001 and S002, the process recipe database is searched for the execution information for S001: execution order 1, execution count 1, constraint condition False, and execution condition Null; and the execution information for S002: execution order 2, execution count 1, constraint condition False, and execution condition Null. The execution information for S001 and S002 is then loaded into the DC voltage regulation step and the first desorption step in the recipe file for the first desorption recipe shown in Table 4, corresponding to each other, to form the execution information for the DC voltage regulation step and the execution information for the first desorption step.

[0096] Based on this, the execution information of the first general process step can be directly loaded into the recipe file of the first target process recipe, which is conducive to improving the generation efficiency of the recipe file of the first target process recipe and reducing the error risk and workload of manually setting the execution information.

[0097] In one embodiment, after generating the first target process recipe, the method further includes at least one of the following:

[0098] In response to a preview operation on the recipe file of the first target process recipe, displaying content of the recipe file of the first target process recipe;

[0099] In response to the sending operation of the recipe file of the first target process recipe, the recipe file of the first target process recipe is sent to the tool.

[0100] Displaying the content of the recipe file of the first target process recipe includes: using a visual interface to display all process steps in the recipe file of the first target process recipe, the execution order of each process step, process parameters in each process step and their parameter values, etc.

[0101] The above solution, in response to a preview operation on the recipe file of the first target process recipe, displays the contents of the recipe file, allowing the user to view the specific contents of the generated first target process recipe, thereby facilitating the user's confirmation of the process task to be executed. In response to a send operation on the recipe file of the first target process recipe, the recipe file of the first target process recipe is sent to the machine, allowing the machine to receive the recipe file of the first target process recipe and prepare to execute the corresponding process task. In one embodiment, the generation method may further include at least one of the following:

[0102] In response to a management operation on the process parameter database, performing a corresponding management operation on the process parameter database; the management operation on the process parameter database includes at least one of viewing a process parameter, adding a process parameter, modifying a process parameter, and deleting a process parameter;

[0103] In response to a management operation on the process step database, performing a corresponding management operation on the process step database; the management operation on the process step database includes at least one of viewing a general process step, adding a general process step, modifying a general process step, and deleting a general process step;

[0104] In response to a management operation on the process recipe database, a corresponding management operation is performed on the process recipe database; the management operation on the process recipe database includes at least one of viewing process recipes, adding process recipe information, modifying process recipes, and deleting process recipe information.

[0105] The above-mentioned management operations on the process parameter database, process step database and process formula database can be generated by users through operations on different visual operation interfaces. By responding to the management operations on the process parameter database, process step database and process formula database and executing corresponding management operations, flexible management of the process parameter database, process step database and process formula database can be achieved.

[0106] In the above embodiments, the process parameter database, process step database and process recipe database can be created in advance so as to be used to generate and send recipe files to the machine. Figure 3 As shown, the method for generating a recipe file includes the following steps S710 to S750.

[0107] Step S710: Create a process parameter database to store multiple process parameters in the process parameter database and set parameter values ​​of each process parameter.

[0108] Step S720: Create a process step database to configure the corresponding relationship between the common process steps and the parameter values ​​of the process parameters in the process step database.

[0109] Step S730: Create a process recipe database to configure the correspondence between process recipes and general process steps in the process recipe database.

[0110] Step S740: In response to the selection of the first target process recipe from the plurality of process recipes, a recipe file of the first target process recipe is generated. A specific method for generating the recipe file of the first target process recipe can be found in the previous embodiment and will not be described in detail here.

[0111] Step S750: In response to the sending operation, the recipe file of the first target recipe is sent to the machine.

[0112] Based on this, by pre-creating a process parameter database, a process step database and a process recipe database, when a user selects the first target process recipe that he or she wants to execute from multiple process recipes, the corresponding recipe file of the first target process recipe can be quickly generated in response to the selection operation and based on the creation of the process parameter database, the process step database and the process recipe database, which can effectively improve the efficiency of recipe file generation; and when the user confirms to send the recipe file of the first target process recipe, the recipe file of the first target recipe can also be sent to the machine for execution in response to the sending operation.

[0113] The embodiment of the present application further provides a method for executing a recipe file, which includes the following steps S810 to S830.

[0114] Step S810: Receive a recipe file of a first target process recipe. The recipe file of the first target process recipe is generated using any of the above-mentioned methods and is sent in response to a sending operation of the recipe file of the first target process recipe.

[0115] Exemplarily, the recipe file for the first target process recipe is generated in a host computer and executed on the machine. When a user selects the first target process recipe from the multiple process recipes in the process recipe database shown in Table 1 using a visual operation interface, the host computer displays the contents of the recipe file for the first target process recipe in response to the selection. When the user continues to perform a "send" operation on the recipe file for the first target process recipe, the host computer sends the recipe file for the first target process recipe to the machine, causing the machine to receive the recipe file for the first target process recipe. In this example, the recipe file for the first target process recipe can be sent from the host computer to the machine as a temporary file.

[0116] Step S820: Execute the process task according to the recipe file of the first target process recipe.

[0117] Step S830: After the process task is executed, the recipe file of the first target process recipe is deleted.

[0118] In the above scheme, when the recipe file of the first target process recipe is received, the process task is executed according to the recipe file of the first target process recipe, and the recipe file of the first target process recipe is immediately deleted after the execution of the process task is completed. This can ensure that the recipe file of the first target process recipe is only effective in the current process task, and the recipe file of the first target process recipe is immediately deleted after the execution of the process task is completed. This can avoid the recipe file of the first target process recipe from being leaked locally, which is beneficial to improving the confidentiality of the use of the recipe file of the first target process recipe.

[0119] Figure 4 Shown is a structural block diagram of the host computer of an embodiment of the present application.

[0120] like Figure 4 As shown, the host computer 10 includes a memory 11 and a processor 12. The memory 11 stores a computer program that can be executed by the processor 12. When the processor 12 executes the computer program, the method for generating a recipe file in the above embodiment is implemented. The number of the memory 11 and the processor 12 can be one or more.

[0121] The host computer 10 also includes a communication interface 13, which is used to communicate with external devices and perform data exchange transmission. If the memory 11, the processor 12 and the communication interface 13 are implemented independently, the memory 11, the processor 12 and the communication interface 13 can be interconnected through a bus and complete communication with each other. The bus can be an Industry Standard Architecture (ISA) bus, a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. The bus can be divided into an address bus, a data bus, a control bus, etc. For ease of representation, Figure 3 Only one thick line is used in the diagram, but this does not mean that there is only one bus or one type of bus.

[0122] Optionally, in a specific implementation, if the memory 11, the processor 12 and the communication interface 13 are integrated on a chip, the memory 11, the processor 12 and the communication interface 13 can communicate with each other through an internal interface.

[0123] Since the host computer 10 adopts all the technical solutions of all the embodiments of the above-mentioned method for generating a recipe file, it at least has all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be described one by one here.

[0124] The present application also provides a machine comprising: a processor and a memory, wherein the memory stores instructions, which are loaded and executed by the processor to implement the execution method of any of the above-described embodiments. Because this machine utilizes all the technical solutions of all the above-described embodiments of the recipe file execution method, it at least has all the beneficial effects brought about by the technical solutions of the above-described embodiments, and will not be further described here. Furthermore, the structural block diagram and principles of the machine can be referenced with the above-described host computer 10, and will not be further described here.

[0125] like Figure 5As shown, an embodiment of the present application further provides a semiconductor process equipment 100, comprising a host computer 10 according to any of the aforementioned embodiments and a machine 20 according to any of the aforementioned embodiments. The host computer 10 is configured to generate a recipe file for a first target process recipe and send the recipe file for the first target process recipe to the machine 20, causing the machine 20 to perform a process task according to the recipe file for the first target process recipe. Because the semiconductor process equipment 100 utilizes all of the technical solutions of all of the aforementioned embodiments of the host computer 10 and machine 20, it at least has all of the beneficial effects brought about by the technical solutions of the aforementioned embodiments, and no further details will be given here.

[0126] An embodiment of the present invention provides a computer-readable storage medium storing a computer program, which, when executed by a processor, implements the method provided in the embodiment of the present application.

[0127] It should be understood that the processor may be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field-programmable gate arrays (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor may be a microprocessor or any conventional processor, etc. It is worth noting that the processor may be a processor that supports the Advanced RISC Machines (ARM) architecture.

[0128] Furthermore, optionally, the above-mentioned memory may include a read-only memory and a random access memory, and may also include a non-volatile random access memory. The memory may be a volatile memory or a non-volatile memory, or may include both volatile and non-volatile memories. Among them, the non-volatile memory may include a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory. The volatile memory may include a random access memory (RAM), which is used as an external cache. By way of example but not limitation, many forms of RAM are available. For example, static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous link dynamic random access memory (SLDRAM) and direct RAM bus random access memory (DR RAM).

[0129] In the above embodiments, all or part of the embodiments may be implemented using software, hardware, firmware, or any combination thereof. When implemented using software, all or part of the embodiments may be implemented in the form of a computer program product. A computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the processes or functions according to the present application are generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions may be stored in a computer-readable storage medium or transferred from one computer-readable storage medium to another.

[0130] In the description of this specification, the reference terms "one embodiment," "some embodiments," "example," "specific example," or "some examples" mean that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. Moreover, the specific features, structures, materials, or characteristics described may be combined in any appropriate manner in any one or more embodiments or examples. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification, as well as features of different embodiments or examples, unless they are mutually inconsistent.

[0131] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. Throughout the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0132] Any process or method description in a flow chart or otherwise described herein can be understood to represent a module, segment or portion of code comprising one or more executable instructions for implementing the steps of a specific logical function or process. The scope of the preferred embodiments of the present application includes additional implementations in which the functions may be performed in a different order than shown or discussed, including in a substantially simultaneous manner or in a reverse order depending on the functions involved.

[0133] The logic and / or steps represented in the flowchart or otherwise described herein may be considered, for example, as an ordered list of executable instructions for implementing logical functions, and may be embodied in any computer-readable medium for use by, or in conjunction with, an instruction execution system, apparatus, or device (such as a computer-based system, a system including a processor, or other system that can fetch and execute instructions from an instruction execution system, apparatus, or device).

[0134] It should be understood that various parts of the present application can be implemented using hardware, software, firmware, or a combination thereof. In the above embodiments, multiple steps or methods can be implemented using software or firmware stored in a memory and executed by a suitable instruction execution system. All or part of the steps of the above embodiment method can be completed by instructing the relevant hardware through a program, which can be stored in a computer-readable storage medium. When the program is executed, it includes one or a combination of the steps of the method embodiment.

[0135] In addition, the functional units in the various embodiments of the present application may be integrated into a single processing module, or each unit may exist physically separately, or two or more units may be integrated into a single module. The aforementioned integrated modules may be implemented in the form of hardware or in the form of software functional modules. If the aforementioned integrated modules are implemented in the form of software functional modules and sold or used as independent products, they may also be stored in a computer-readable storage medium. The storage medium may be a read-only memory, a magnetic disk, or an optical disk, etc.

[0136] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any person skilled in the art can easily conceive of various modifications or substitutions within the technical scope disclosed in this application, and such modifications or substitutions should be included within the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A method for generating a recipe file, characterized in that: include: Based on the correspondence between the first target process recipe and the first general process step, searching a process step database for a first general process step that matches the first target process recipe; The process step database includes a correspondence between common process steps and parameter values ​​of process parameters, wherein the common process steps are process steps applicable to multiple process recipes; A recipe file of the first target process recipe is generated using parameter values ​​of the process parameters in the first general process step.

2. The generation method according to claim 1, characterized in that The parameter attributes of the process parameters are stored in a process parameter database, the parameter attributes including parameter value ranges, and the generating method further includes: In response to a modification operation on a parameter value range of a target process parameter in the process parameter database, obtaining a modified parameter value range; searching the process step database for a second general process step having the target process parameters; determining whether a parameter value of a target process parameter in the second general process step is within the range of the modified parameter value; If not, a prompt is given to modify the parameter value of the target process parameter in the second general process step.

3. The generation method according to claim 2, characterized in that The generating method further comprises: In response to a deletion operation on a target process parameter in the process parameter database, searching the process step database for a third general process step having the target process parameter; The target process parameters and parameter values ​​of the third general step are deleted.

4. The generation method according to claim 1, characterized in that Also includes: In response to a modification operation on a fourth general process step in the process step database, obtaining a modified fourth general process step; Searching a process recipe database for a second target process recipe having the fourth general process step; The process recipe database includes the correspondence between process recipes and general process steps; generating an operation instruction for the user's operation on the modified fourth general process step based on the second target process recipe; If the operation instruction is an add instruction, then in response to the add instruction, the modified fourth general process step is added to the process step database.

5. The generation method according to claim 4, characterized in that Also includes: If the operation instruction is a confirmation modification instruction, then in response to the confirmation modification instruction, the fourth general process step in the process step database is replaced with the modified fourth general process step, so that the modified fourth general process step is used to generate multiple new recipe files of the second target process recipe.

6. The generation method according to claim 4, characterized in that The method further comprises: In response to a deletion operation on the fifth general process step in the process step database, searching the process recipe database for a third target process recipe containing the fifth general process step; The fifth general process step in the third target process recipe is deleted.

7. The generation method according to claim 1, characterized in that Before searching a process step database for a first general process step that matches the first target process recipe based on the correspondence between the first target process recipe and the first general process step, the method further includes: In response to a selection operation of a first target process recipe among a plurality of process recipes, a correspondence between the first target process recipe and the first general process step is obtained from a process recipe database; the process recipe database includes the correspondence between process recipes and general process steps.

8. The generation method according to claim 1, characterized in that Before searching a process step database for a first general process step that matches the first target process recipe based on the correspondence between the first target process recipe and the first general process step, the method further includes: According to the process step requirements, a corresponding relationship between the general process steps and the process parameters is established; Parameter values ​​are set for all process parameters in the common process steps to form the process step database.

9. The generation method according to claim 1, characterized in that The recipe file for generating the first target process recipe further includes: Based on the correspondence between the first target process recipe and the first general process step, searching for execution information of the first general process step in a process recipe database; the process recipe database includes execution information of the general process steps; The execution information is loaded into the recipe file of the first target process recipe.

10. The generation method according to claim 1, characterized in that After generating the recipe file of the first target process recipe, the method further includes at least one of the following: In response to a preview operation on the recipe file of the first target process recipe, displaying content of the recipe file of the first target process recipe; In response to the sending operation of the recipe file of the first target process recipe, the recipe file of the first target process recipe is sent to the tool.

11. A method for executing a recipe file, characterized in that: include: receiving a recipe file of a first target process recipe; The recipe file of the first target process recipe is generated by the generation method according to any one of claims 1 to 10, and is sent in response to a sending operation of the recipe file of the first target process recipe; Executing a process task according to the recipe file of the first target process recipe; After the process task is completed, the recipe file of the first target process recipe is deleted.

12. A host computer, characterized in that: include: A processor and a memory, wherein the memory stores instructions, and the instructions are loaded and executed by the processor to implement the method according to any one of claims 1 to 10.

13. A machine, characterized in that: include: A processor and a memory, wherein the memory stores instructions, and the instructions are loaded and executed by the processor to implement the method according to claim 11.

14. A semiconductor process equipment, characterized in that: It includes the host computer according to claim 12 and the machine according to claim 13.

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