Vacuum simulation test device of actuating mechanism and test method thereof

Abstract

The invention discloses a vacuum simulation test device of an execution mechanism and a test method thereof. The vacuum simulation test device of the execution mechanism comprises a support, a lifting module connected to the support, a load unit connected to a mobile end of the lifting module, and a driving unit for driving the lifting module to execute a lifting action. The load unit is used for loading an execution mechanism to be tested, and the driving unit drives the lifting module to lift under a set torque and synchronously drives the load unit so as to simulate the stress state of the execution mechanism in a vacuum state. The lifting module, the driving unit and the load unit jointly simulate the vacuum condition of the actuating mechanism under the actual working condition, so that off-line detection of the working condition parameters of the actuating mechanism is achieved, and compared with an existing on-line mode, the cost is lower, the consumed time is shorter, and the equipment testing efficiency is remarkably improved.

Description

Technical Field

[0001] The present invention relates to the technical field of testing of thin film deposition equipment, and in particular to a vacuum simulation testing device for an actuator and a testing method thereof. Background Art

[0002] In the semiconductor industry, especially for CVD (Chemical Vapor Deposition) equipment, the functions of actuators are mostly implemented in a vacuum environment. When problems occur with the actuator or when optimizing component design, it is difficult to test it on the machine. Machine testing is performed under vacuum conditions, but switching to a vacuum atmosphere state takes a long time, and implementing vacuum testing is expensive, resulting in high testing costs.

[0003] The CVD actuator needs to set a torque alarm value during movement. In order to ensure that the PIN (ejector pin) has moderate load-bearing capacity during the lifting process to protect the wafer, when different customized parts are replaced, the load-bearing torque feedback of the actuator's motor will change, and the torque alarm value needs to be reset. This also leads to obvious disadvantages of online testing due to the need for offline test bench testing and resetting the torque alarm value. Summary of the Invention

[0004] The purpose of the present invention is to overcome the deficiencies of the prior art and provide a vacuum simulation test device and a test method for an actuator, so as to solve the technical problems of high cost and long testing time of the existing actuator under vacuum conditions.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] In the first aspect, an embodiment of the present invention provides a vacuum simulation test device for an actuator, which includes: a bracket, a lifting module connected to the bracket, a load unit connected to the moving end of the lifting module, and a drive unit that drives the lifting module to perform a lifting action; the load unit is used to load the actuator to be tested, and the drive unit drives the lifting module to lift and lower under a set torque, and synchronously drives the load unit to simulate the force state of the actuator under a vacuum state.

[0007] Wherein, the lifting module is a linear screw module.

[0008] Wherein, the linear screw module is a ball screw.

[0009] Wherein, the driving unit is a servo motor.

[0010] Wherein, the load unit is a robot.

[0011] Wherein, the bracket is further connected to the base, the base includes a top support plate, and the actuator to be tested is connected to the space below the top support plate.

[0012] Wherein, the actuator is a lifting execution module that performs the lifting action of the heating unit of the CVD equipment.

[0013] In a second aspect, an embodiment of the present invention provides a vacuum simulation test method, which is performed by a vacuum simulation test device for an actuator as described in any one of the above, and includes the following steps:

[0014] Calculate the vacuum force that the actuator to be tested will withstand under the set vacuum conditions;

[0015] calculating the load torque of the drive unit under the current vacuum force condition;

[0016] Setting the load torque to the current test torque value of the drive unit;

[0017] Control the actuator to perform lifting actions and simultaneously test the operating parameters of the actuator.

[0018] The calculation formula of the vacuum force is: Fv = P*πR 2 ; Where Fv is the vacuum force, P is the difference between the air pressure under vacuum simulation conditions and the external ambient pressure, and R is the radius of the bellows of the actuator.

[0019] The calculation formula for load torque is:

[0020] F=Fv-F A -mg; where F A is the reaction force of the bellows on the actuator, P B is the pitch of the linear screw module, i is the reduction ratio between the drive unit and the lifting module, η is the mechanical efficiency, μ0 is the friction coefficient of the linear screw module, F0 is the preload of the linear screw module, F is the axial load, and m is the load mass.

[0021] The vacuum simulation test device and test method of the actuator of the present invention simulate the vacuum conditions under the actual working conditions of the actuator through the lifting module, the drive unit and the load unit, thereby realizing non-online detection of the actuator working parameters. Compared with the existing online method, it is lower in cost and less time-consuming, and significantly improves the equipment testing efficiency.

[0022] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic diagram of the structure of a portion of an actuator tested by a vacuum simulation test device for an actuator according to an embodiment of the present invention.

[0024] Figure 2 This is a side view of the actuator portion of the vacuum simulation test device for the actuator according to an embodiment of the present invention.

[0025] Figure 3 Schematic diagram of the overall structure of a vacuum simulation test device for an actuator according to an embodiment of the present invention.

[0026] Figure 4 This is a side view of a vacuum simulation test device for an actuator according to an embodiment of the present invention.

[0027] Figure 5 It is a front view of a vacuum simulation test device for an actuator according to an embodiment of the present invention.

[0028] Figure 6 Schematic diagram of the overall structure of the vacuum simulation test device of the actuator and the actuator test state according to an embodiment of the present invention.

[0029] Figure 7 for Figure 6 Side view shown.

[0030] Description of reference numerals:

[0031] Actuator 1, drive motor 11, coupling 12, screw module 13, base 14, heating unit 15, heating plate 151, support column 152, connecting arm 16, bellows 17, vacuum testing device 2, base 21, top support plate 211, frame 212, lower space 213, connector 214, bracket 22, load unit 23, drive unit 24, lifting module 25. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making any creative efforts shall fall within the scope of protection of the present invention.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like to indicate orientations or positional relationships based on the orientations or positional relationships described in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature identified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0036] In the present invention, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be understood broadly. For example, they may refer to fixed or detachable connections, or integral molding; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0037] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0038] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. Throughout this specification, the schematic representations of these terms should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0039] In the semiconductor industry, especially for CVD (Chemical Vapor Deposition) equipment, the functions of actuators are mostly implemented in a vacuum environment. When problems occur with the actuator or when optimizing component design, it is difficult to test it on the machine. Machine testing is performed under vacuum conditions, but switching to a vacuum atmosphere state takes a long time, and implementing vacuum testing is expensive, resulting in high testing costs.

[0040] During the CVD actuator's movement, a torque alarm value must be set. To ensure the proper bearing capacity of the PIN (ejector pin) during lift to protect the wafer, the bearing torque feedback from the actuator's motor changes when different custom parts are replaced, requiring a reset of the torque alarm value. This requires offline testing on a test bench, which also leads to significant drawbacks in online testing. To address the aforementioned issues, this embodiment discloses a vacuum simulation test device 2 for an actuator and a test method thereof.

[0041] See also Figures 1 to 2 , which is a schematic structural diagram of the actuator 1 tested by the vacuum simulation test device 2 of the actuator of this embodiment from different perspectives. The actuator 1 is a driving component in the CVD equipment for driving the heating unit to move up and down in the process chamber. The actuator 1 includes: a driving motor 11, a coupling 12 connected to the output shaft of the driving motor 11, a screw module 13 connected to the output end of the coupling 12, a base 14 connected to the moving end of the screw module 13, and a heating unit 15 connected to the base 14. The heating unit 15 includes a heating disk 151 and a support column 152 connected to the bottom of the heating disk 151, and the lower end of the support column 152 is connected to the base 14. A bellows 17 is also sleeved on the outside of the support column 152, the lower end of the bellows 17 is sealed and connected to the base 14, and the upper end of the bellows 17 is sealed and connected to the bottom wall of the process chamber. In the testing state, the upper end of the bellows 17 is sealed and connected to the corresponding supporting surface of the testing device.

[0042] It should be noted that the above is the structure of the actuator 1 tested by the vacuum simulation test device 2 of the actuator of this embodiment. It can be understood that the vacuum simulation test device 2 of the actuator of this embodiment can also perform vacuum simulation tests on other objects that work in a vacuum environment and are used to perform lifting actions.

[0043] See also Figures 3 to 5 The vacuum simulation test device 2 of the actuator of this embodiment includes: a bracket 22, a lifting module 25 connected to the bracket 22, a load unit 23 connected to the moving end of the lifting module 25, and a driving unit 24 that drives the lifting module 25 to perform a lifting action; the load unit 23 is used to load the actuator 1 to be tested, and the driving unit 24 drives the lifting module 25 to rise and fall under a set torque, and synchronously drives the load unit 23 to simulate the stress state of the actuator 1 under a vacuum state.

[0044] The vacuum simulation test device 2 of the actuator of this embodiment is not an online test. Instead, it drives the lifting module 25 through the drive unit 24, and the lifting module 25 drives the load unit 23, and the load unit 23 provides a continuous vacuum force to the load. The vacuum force is the upward thrust of the load caused by the pressure difference between the inside and outside of the process chamber when the actuator 1 is in the actual vacuum working state. The drive unit 24 of this embodiment can control its torque so that during the load lifting process, the load unit 23 provides a continuous vacuum force to the load to simulate the vacuum conditions of the actuator 1 in the actual working condition. That is, the vacuum simulation test device 2 of the actuator of this embodiment simulates the vacuum environment through a mechanical structure. Compared with the real vacuum test environment, its cost is significantly lower, and the test process is also simpler and more convenient, which ultimately significantly improves the test efficiency.

[0045] In this embodiment, the lifting module 25 is a linear screw module. Specifically, the linear screw module is a ball screw. In other embodiments, the lifting module 25 can also be another module capable of performing stable and reliable vertical lifting operations, which can change the external lifting thrust according to the output torque of the drive unit 24.

[0046] The drive unit 24 is a servo motor. The servo motor is used to take advantage of its closed-loop high-precision control, wide speed regulation range, fast dynamic response, low inertia, and high rigidity, so as to achieve different torque setting precision and adjustment range, and provide a stable and reliable vacuum simulation state.

[0047] Furthermore, the load unit 23 is a manipulator connected to the movable end of the linear screw module. When the linear screw module's screw is controlled to rotate, it drives the screw block to rise and fall, which in turn drives the manipulator to rise and fall. During testing, the manipulator is connected to the load, which in this embodiment corresponds to the heating unit 15. In other embodiments, the manipulator can also be replaced by a supporting member such as a pallet, as long as it has the function of lifting the load.

[0048] Please refer again Figure 4 and Figure 5 The bracket 22 is also connected to the base 21, which includes a top support plate 211. The actuator 1 to be tested is connected to the space 213 below the top support plate 211. The upper end of the bellows 17 of the actuator 1 is sealed against the lower plate surface of the top support plate 211. The support column 152 is provided through the top support plate 211, and the heating plate 151 is loaded on the load unit 23. In this embodiment, the heating plate 151 is lifted above the load unit 23. Under actual working conditions, the heating plate 151 is located in a vacuum process chamber, and the other parts of the actuator 1 are located outside the process chamber.

[0049] Specifically, the base 21 further includes a frame 212, and a top support plate 211 is connected to the top of the frame 212. A connector 214 is also provided at the bottom of the top support plate 211. The actuator 1 is provided with a connecting arm 16, one end of which is connected to the screw module 13, and the other end is fixedly connected to the connector 214, thereby fixing the actuator 1 to the vacuum simulation device 2 of the actuator.

[0050] In this embodiment, the actuator 1 is a lifting actuator module that performs the lifting action of the heating unit of the CVD equipment.

[0051] The vacuum simulation test device 2 of the actuator of this embodiment simulates the vacuum conditions under the actual working conditions of the actuator through the lifting module 25, the drive unit 24 and the load unit 23, thereby realizing non-online actuator working parameter detection. Compared with the existing online method, it is lower in cost and time-consuming, and significantly improves the equipment testing efficiency.

[0052] This embodiment further discloses a method for testing a vacuum simulation device based on the above-mentioned actuator. The method is performed by the vacuum simulation testing device 2 for the actuator as described in any one of the above items, and includes the following steps:

[0053] The first step is to calculate the vacuum force that the actuator 1 to be tested is subjected to under set vacuum conditions. Different process equipment has different vacuum requirements, so the exact value of the vacuum force it is subjected to must first be determined based on the actual working conditions of the actuator 1.

[0054] The second step is to calculate the load torque of the drive unit 24 under the current vacuum force conditions; that is, this step needs to further calculate the torque load that the drive unit 24 needs to output based on the vacuum force data determined in the first step. During the test, the vacuum force on the load is adjusted by controlling the output torque of the drive unit 24.

[0055] Step 3: Set the load torque to the current test torque value of the drive unit 24. The output torque of the drive unit 24, determined in steps 1 and 2, is then set as the vacuum force applied to the load during the test. During the descent and ascent of the actuator 1, the drive unit 24 maintains the set torque output, so that the load (i.e., the heating unit 15) is constantly subjected to the simulated vacuum force output by the drive unit 24 during the ascent and descent. During this process, although the load is not in a vacuum environment, the vacuum force it actually experiences remains consistent with that of the vacuum environment, thereby mechanically simulating a vacuum environment.

[0056] The fourth step is to control the actuator 1 to perform a lifting action and simultaneously test the operating parameters of the actuator 1. Specifically, the actuator 1 performs a lifting action according to actual operating conditions, and the corresponding vacuum force simulated by the drive unit 24 is applied to the load. This allows the operating condition of the actuator 1 to be tested, allowing for fault detection or optimization of the actuator 1.

[0057] At the same time, through the above-mentioned testing method, the actuator 1 can also be tested under different vacuum environments so that the alarm torque under different vacuum environments can be set after testing to make the alarm more accurate.

[0058] The calculation formula of the vacuum force is: Fv = P*πR 2 Where Fv is the vacuum force, P is the difference between the air pressure under vacuum simulation conditions and the external ambient pressure, and R is the radius of the bellows 17 of the actuator. The magnitude of the vacuum force Fv is related to the diameter of the bellows 17 and the internal pressure difference.

[0059] The calculation formula for load torque is:

[0060] F=Fv-F A -mg; where F A is the reaction force of the bellows on the actuator, P B is the pitch of the linear screw module, i is the reduction ratio between the drive unit and the lifting module, η is the mechanical efficiency, which is generally 0.85-0.95, μ0 is the friction coefficient of the linear screw module, which is generally between 0.1-0.3, and F0 is the preload of the linear screw module, which is generally 1 / 3F, F is the axial load in N, and m is the load mass.

[0061] If a transmission is provided between the driving unit 24 and the lifting module 25 , the i is the speed ratio between the servo motor and the retarder. If no transmission is provided, the value of i is 1.

[0062] During the test, the Partly due to the L The impact on the calculation results is very small, and the calculated value of this part can also be ignored to simplify the calculation process.

[0063] The testing method of this embodiment uses a lifting module, a drive unit, and a load cell to simulate the vacuum conditions under actual actuator operating conditions, thereby achieving offline actuator operating parameter testing. Compared with existing online methods, this method is less costly and time-consuming, significantly improving equipment testing efficiency. Furthermore, the ability to set warning torques under different vacuum conditions through pre-testing allows for more accurate alarms.

[0064] The above examples are merely provided to further illustrate the technical content of the present invention for easier understanding by the reader, but do not limit the embodiments of the present invention to these examples. Any extension or re-creation of the technology based on the present invention is protected by the present invention. The scope of protection of the present invention shall be determined by the claims.

Claims

1. A vacuum simulation test device for an actuator, characterized in that: include: A bracket, a lifting module connected to the bracket, a load unit connected to the moving end of the lifting module, and a drive unit that drives the lifting module to perform a lifting action; the load unit is used to load the actuator to be tested, and the drive unit drives the lifting module to move up and down under a set torque, and synchronously drives the load unit to simulate the force state of the actuator under a vacuum state.

2. The vacuum simulation test device for an actuator according to claim 1, characterized in that: The lifting module is a linear screw module.

3. The vacuum simulation test device for an actuator according to claim 2, characterized in that: The linear screw module is a ball screw.

4. The vacuum simulation test device for an actuator according to claim 2, characterized in that: The driving unit is a servo motor.

5. The vacuum simulation test device for an actuator according to claim 4, characterized in that: The load unit is a robot.

6. The vacuum simulation test device for an actuator according to any one of claims 1 to 5, characterized in that: The bracket is further connected to a base, and the base includes a top support plate. The actuator to be tested is connected to the space below the top support plate.

7. The vacuum simulation test device for an actuator according to claim 6, characterized in that: The actuator is a lifting execution module that performs the lifting action of the heating unit of the CVD equipment.

8. A vacuum simulation test method, the test method being performed by the vacuum simulation test device for the actuator according to any one of claims 1 to 7, characterized in that: The following steps are involved: Calculate the vacuum force that the actuator to be tested will withstand under the set vacuum conditions; calculating the load torque of the drive unit under the current vacuum force condition; Setting the load torque to the current test torque value of the drive unit; Control the actuator to perform lifting actions and simultaneously test the operating parameters of the actuator.

9. The vacuum simulation test method according to claim 8, characterized in that: The calculation formula of the vacuum force is: Fv = P*πR 2 ; Where Fv is the vacuum force, P is the difference between the air pressure under vacuum simulation conditions and the external environment pressure, and R is the bellows radius of the actuator.

10. The vacuum simulation test method according to claim 9, characterized in that: The calculation formula of the load torque is: F=Fv-F A -mg; where F A is the reaction force of the bellows on the actuator, P B is the pitch of the linear screw module, i is the reduction ratio between the drive unit and the lifting module, η is the mechanical efficiency, μ0 is the friction coefficient of the linear screw module, F0 is the preload of the linear screw module, F is the axial load, and m is the load mass.

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