A device and method for minimizing insertion loss in a MEMS optical switch

Abstract

The application provides a kind of MEMS optical switch insertion loss minimum control device and method, control device includes: channel calibration table, to provide MEMS optical switch channel initial control voltage parameter;Cosine signal source for generating cosine modulation voltage signal;Adder, initial control voltage, cosine modulation voltage and feedback adjustment voltage are superimposed and output to MEMS optical switch;Detection photodiode, receive the light signal of MEMS optical switch channel N output, output the conversion power signal after photoelectric conversion;Multiplier, for the coherent amplification of cosine modulation voltage signal and conversion power signal, output coherent signal;First filter, connect the multiplier, obtain coherent signal, filter out the frequency multiplication component of coherent signal and output direct current component;Integrator, obtain direct current component and integrate the obtained direct current adjustment amount as feedback adjustment voltage output to adder;Feedback adjustment voltage is output to MEMS optical switch via the adder, to realize the compensation of channel control voltage signal.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of spectrum technology, in particular to a MEMS optical switch insertion loss minimum control device and method. BACKGROUND

[0002] 1xN channel MEMS optical switch (Micro - Electro - Mechanical Systems Optical Switch) is used for routing switching of optical signals, commonly used in optical communication network distribution, scheduling optical channels, its working principle is as shown in Figure 1

[0003] The functions and principles of each part are as follows:

[0004] Collimator (collimator): the input side collimator converts "Light in (input light)" into parallel light; the output side collimator converges the parallel light after reflection and other operations and couples it into the corresponding channel (Channel 1 - 4);

[0005] Rotating mirror (rotating mirror): controlled by "MEMS controller (MEMS controller)", rotates according to "Switch position (switch position)" instruction, changes the direction of reflected light, and guides the input light to different output channels (Channel 1 - 4);

[0006] Mirror (fixed mirror): auxiliary change of light path, cooperate with rotating mirror, let the light accurately reach the objective collimator, enter the corresponding channel;

[0007] MEMS controller (MEMS controller): receives and processes switch position signal, drives rotating mirror to rotate, is the control core of the whole optical switch, decides which channel the optical signal is switched to;

[0008] Channel (channel): represents the output path of optical signal, through the cooperation of the above components, the input light can be flexibly switched to different channels, realizing the routing selection of optical signal, supporting the flexible scheduling of signal in optical communication network.

[0009] The principle is simplified as Figure 1 Figure 2 ​​As shown in the structure, the input light of the input port is reflected to different output ports 0-output port N by controlling the rotating mirror to rotate with the center point of the A point. The rotating angle of the rotating mirror is in proportional relationship with the control voltage, different MEMS control voltages are required for switching different channels, and the channel calibration table is provided when the MEMS optical switch is shipped, which is used to provide the initial control voltage parameters of the channel of the MEMS optical switch.

[0010] When the MEMS optical switch switches different channels, the control is carried out according to the calibration data when it is shipped. Due to the vibration in the transportation process / usage environment, temperature change and device aging, the reflecting surface of the rotating mirror of the MEMS optical switch is offset. When the MEMS optical switch is still controlled according to the calibration parameters when it is shipped, the insertion loss will be larger or the switching channel will be abnormal due to the offset between the reflecting surface and the input / output channel without compensation. In addition, when the MEMS optical switch device is aged or fails, the degree of aging and the fault alarm cannot be judged, and the reliability of the system is reduced.

[0011] Therefore, it is necessary to provide a MEMS optical switch insertion loss minimum control device and method to solve or at least partially solve the above problems. SUMMARY

[0012] The present application provides a MEMS optical switch insertion loss minimum control device and method, a cosine signal source is introduced, a very small jitter is superimposed on the control voltage of the MEMS optical switch, coherent detection is used to analyze the output signal of the optical switch, and the control voltage of the MEMS optical switch is adjusted by analyzing the amplitude / frequency / phase characteristics of the output signal, so that the optical switch is locked in the working state with the minimum insertion loss.

[0013] The embodiment of the present application provides a MEMS optical switch insertion loss minimum control device, which comprises:

[0014] The channel calibration table is used to provide the initial control voltage parameters of the channel of the MEMS optical switch.

[0015] The cosine signal source is used to generate a cosine modulation voltage signal Wherein, T is the amplitude, W is the angular frequency, and t is the time.

[0016] The adder superimposes and outputs the initial control voltage of the MEMS optical switch, the cosine modulation voltage and the feedback adjustment voltage to the MEMS optical switch.

[0017] The detection photodiode is connected to the MEMS optical switch and receives the optical signal output by the channel N of the MEMS optical switch, and outputs the converted power signal after photoelectric conversion Wherein, R is the amplitude of the received signal, and P is the received phase.

[0018] a multiplier connected with the cosine signal source and the detection photodiode, for coherent amplification of the cosine modulation voltage signal and the converted power signal, and outputting a coherent signal, the coherent signal comprising a frequency multiplication component and a direct current component;

[0019] a first filter connected with the multiplier, for obtaining the coherent signal, filtering out the frequency multiplication component of the coherent signal, and outputting the direct current component;

[0020] an integrator connected with the first filter, for obtaining the direct current component, integrating the direct current component to obtain a direct current adjustment, and outputting the direct current adjustment as a feedback adjustment voltage to the adder;

[0021] the feedback adjustment voltage is outputted to the MEMS optical switch after being superimposed with the initial control voltage and the cosine modulation voltage via the adder, so as to realize compensation of the channel control voltage signal.

[0022] Preferably, a coherent signal detection module is further included, the coherent signal detection module is connected with the multiplier to obtain the coherent signal, and detects the frequency multiplication component of the coherent signal; if the frequency multiplication component is not detected, it indicates that the MEMS optical switch is not switched to the corresponding output port N, and the coherent signal detection module outputs a MEMS optical switch fault alarm signal.

[0023] Preferably, a device aging threshold module is further included, the device aging threshold module is connected with the integrator to obtain the direct current adjustment, compares the direct current adjustment with a set device aging threshold, and if the direct current adjustment is greater than the set device aging threshold, the device aging threshold module outputs a MEMS optical switch aging alarm signal.

[0024] Preferably, the multiplier amplifies the converted power signal by T / 2 times; the output coherent signal comprises a two-frequency multiplication component and a direct current component, the two-frequency multiplication component is represented as: the direct current component is represented as: wherein T is an amplitude, W is an angular frequency, t is time, R is a received signal amplitude, and P is a received phase.

[0025] Preferably, a 1 / N attenuator is further included, the 1 / N attenuator is connected with the cosine signal source and the adder, attenuates the cosine modulation voltage signal generated by the cosine signal source, and outputs the attenuated cosine modulation voltage signal to the adder, so as to reduce the cosine modulation voltage superimposed on the MEMS optical switch.

[0026] Preferably, a second filter is further included, the second filter is connected with the detection photodiode and the multiplier, and is a band-pass filter with a center frequency of W, for filtering out external interference of the converted power signal.

[0027] Based on the same concept, the application also provides a control method of the MEMS optical switch insertion loss minimum control device, comprising the following steps:

[0028] selecting a channel N output of the MEMS optical switch, and searching for a factory calibration voltage of the channel N through a channel calibration table as an initial control voltage of the channel N;

[0029] superimposing the cosine modulation voltage signal generated by the cosine signal source and the initial control voltage of the channel N through an adder and then outputting to the MEMS optical switch;

[0030] detecting the optical signal of the channel N of the MEMS optical switch through a photodiode and outputting a converted power signal after photoelectric conversion;

[0031] coherently amplifying the cosine modulation voltage signal and the converted power signal through a multiplier and outputting a coherent signal, wherein the coherent signal comprises a frequency doubling component and a direct current component;

[0032] acquiring the coherent signal through a first filter, filtering out the frequency doubling component of the coherent signal and outputting the direct current component to an integrator;

[0033] acquiring the direct current component through the integrator, integrating the direct current component to obtain a direct current adjustment amount, outputting the direct current adjustment amount as a feedback adjustment voltage to the adder, superimposing the initial control voltage and the cosine modulation voltage through the adder and then outputting to the MEMS optical switch, and realizing compensation of the channel control voltage signal.

[0034] Preferably, the cosine modulation voltage signal is expressed as , wherein T is an amplitude, W is an angular frequency, and t is time; and the converted power signal is expressed as , wherein R is a received signal amplitude and P is a received phase; the multiplier amplifies the converted power signal by T / 2 times; the output coherent signal comprises a frequency doubling component and a direct current component, the frequency doubling component is expressed as , and the direct current component is expressed as .

[0035] Preferably, the control device further comprises a coherent signal detection module connected to the multiplier, and the control method further comprises:

[0036] the coherent signal detection module acquires the coherent signal and detects the frequency doubling component of the coherent signal; if no frequency doubling component is detected, it indicates that the MEMS optical switch is not switched to the corresponding output port N, and the coherent signal detection module outputs a MEMS optical switch fault alarm signal.

[0037] Preferably, the control device further comprises a device aging threshold module connected to the integrator, and the control method further comprises:

[0038] The device aging threshold module acquires the DC adjustment amount and compares it with the set device aging threshold. If the DC adjustment amount is greater than the set device aging threshold, the device aging threshold module outputs a MEMS optical switch aging alarm signal.

[0039] Compared with the prior art, the technical solution of the embodiments of the present invention has the following beneficial effects:

[0040] This invention provides a MEMS optical switch insertion loss minimization control device and method. It introduces a cosine signal source and adds a very small jitter to the control voltage of the MEMS optical switch. Coherent detection is used to analyze the output signal of the MEMS optical switch. By analyzing the amplitude, frequency, and phase characteristics of the output signal, the control voltage of the MEMS optical switch is adjusted to lock the MEMS optical switch in a minimum insertion loss operating state. Analyzing the amplitude, frequency, and phase characteristics of the output signal can determine whether the current optical switch is operating normally. If aging or other issues are detected, an early alarm is issued, allowing maintenance personnel to intervene in advance, avoiding service interruptions during system operation, and improving system reliability. Attached Figure Description

[0041] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention, but not all embodiments. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 This is a schematic diagram of the working principle of a MEMS optical switch.

[0043] Figure 2 Simplified schematic diagram of MEMS optical switch;

[0044] Figure 3 A schematic diagram of a MEMS optical switch insertion loss minimization control device provided for one embodiment of the present invention;

[0045] Figure 4 When channel N is selected for the MEMS optical switch, the MEMS optical switch only receives the initial control voltage. Schematic diagram of the rotating mirror's rotation position;

[0046] Figure 5 When channel N is selected for the MEMS optical switch, the MEMS optical switch only receives the initial control voltage. The graph shows the control voltage and output power of the MEMS optical switch when the rotating mirror rotates from position 1 to position 3.

[0047] Figure 6 For the MEMS optical switch to select channel N, the MEMS optical switch inputs an initial control voltage superimposed with a cosine modulation voltage, and when the rotating mirror is rotated from position 1 to position 3, a graph of the control voltage and output power of the MEMS optical switch;

[0048] Figure 7 A flow chart of a control method of the MEMS optical switch loss minimum control device provided for an embodiment of the present application is provided.

[0049] In the figure: 111-channel calibration table; 211-cosine signal source; 311-1 / N attenuator; 4-adder; 5-MEMS optical switch; 6-detection photodiode; 7-second filter; 8-multiplier; 9-coherent signal detection module; 10-first filter; 11-integrator; 12-device aging threshold module. DETAILED DESCRIPTION

[0050] To make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0051] The technical solutions of the present application will be described in detail below with specific embodiments. The following specific embodiments can be combined with each other, and the same or similar concepts or processes can not be described in some embodiments.

[0052] Based on the problems in the prior art, the embodiments of the present application provide a MEMS optical switch loss minimum control device and method, a cosine signal source is introduced, a very small jitter is superimposed on the control voltage of the MEMS optical switch, coherent detection is used to analyze the output signal of the optical switch, the amplitude / frequency / phase characteristics of the output signal are analyzed, the control voltage of the MEMS optical switch is adjusted, and the optical switch is locked in the working state with minimum loss.

[0053] Figure 3 A structure schematic diagram of the MEMS optical switch loss minimum control device provided for an embodiment of the present application is provided. Figure 4 For the MEMS optical switch to select channel N, the MEMS optical switch only inputs an initial control voltage, and a rotating mirror rotating position schematic diagram is provided. Figure 5 For the MEMS optical switch to select channel N, the MEMS optical switch only inputs an initial control voltage, and when the rotating mirror is rotated from position 1 to position 3, a graph of the control voltage and output power of the MEMS optical switch.Figure 6 For the MEMS optical switch to select the channel N, the MEMS optical switch input initial control voltage is superimposed with the cosine modulation voltage, and when the rotating mirror is rotated from position 1 to position 3, the control voltage and the output power of the MEMS optical switch are shown in the figure; Figure 7 The control method flow chart of the MEMS optical switch insertion loss minimum control device provided by an embodiment of the present application is shown in the figure.

[0054] Now referring to Figure 3 The MEMS optical switch insertion loss minimum control device provided by an embodiment of the present application comprises:

[0055] The channel calibration table 111 is used to provide the initial control voltage parameters of the MEMS optical switch channel;

[0056] The cosine signal source 211 is used to generate the cosine modulation voltage signal Wherein, T is the amplitude, W is the angular frequency, and t is the time.

[0057] The adder 4 superimposes the initial control voltage of the MEMS optical switch 5, the cosine modulation voltage, and the feedback adjustment voltage and outputs them to the MEMS optical switch 5.

[0058] The detection photodiode 6 is connected to the MEMS optical switch 5 and receives the optical signal output by the channel N of the MEMS optical switch 5, and outputs the converted power signal after photoelectric conversion Wherein, R is the amplitude of the received signal, and P is the received phase.

[0059] The multiplier 8 is connected to the cosine signal source 211 and the detection photodiode 6, and is used for coherent amplification of the cosine modulation voltage signal and the converted power signal, and outputs the coherent signal, which includes the frequency multiplication component and the direct current component.

[0060] The first filter 10 is connected to the multiplier 8, obtains the coherent signal, filters out the frequency multiplication component of the coherent signal, and outputs the direct current component.

[0061] The integrator 11 is connected to the first filter 10, obtains the direct current component, integrates the direct current component to obtain the direct current adjustment amount, and outputs the direct current adjustment amount as the feedback adjustment voltage to the adder 4.

[0062] The feedback adjustment voltage is superimposed with the initial control voltage and the cosine modulation voltage via the adder 4 and then output to the MEMS optical switch 5, so as to realize compensation of the channel control voltage signal.

[0063] Specifically, the channel calibration table 111 provides the required MEMS control voltage corresponding to switching different channels, as shown in the following table 1:

[0064] Table 1: MEMS optical switch factory calibration table

[0065]

[0066] Specifically, the first filter 10 is a low-pass filter for filtering out the doubled frequency component after coherence.

[0067] In some embodiments, a coherent signal detection module 9 is further included, which is connected to the multiplier 8 to obtain the coherent signal and detect the doubled frequency component of the coherent signal; if no doubled frequency component is detected, it indicates that the MEMS optical switch 5 has not switched to the corresponding output port N, and the coherent signal detection module 9 outputs a MEMS optical switch failure alarm signal.

[0068] In some embodiments, a device aging threshold module 12 is further included, which is connected to the integrator 11 to obtain the DC adjustment amount, compares the DC adjustment amount with a set device aging threshold, and if the DC adjustment amount is greater than the set device aging threshold, the device aging threshold module 12 outputs a MEMS optical switch aging alarm signal.

[0069] In some embodiments, the multiplier 8 amplifies the converted power signal by T / 2 times; the output coherent signal includes a doubled frequency component and a DC component, the doubled frequency component is represented as: ; and the DC component is represented as: ; wherein T is the amplitude, W is the angular frequency, t is the time, R is the received signal amplitude, and P is the received phase.

[0070] In some embodiments, a 1 / N attenuator 311 is further included, which is connected to the cosine signal source 211 and the adder 4, attenuates the cosine modulation voltage signal generated by the cosine signal source 211 and outputs it to the adder 4, so as to reduce the cosine modulation voltage superimposed on the MEMS optical switch 5, the attenuated cosine modulation voltage signal is a small disturbance, such as 0.01db, to avoid affecting the service optical path.

[0071] In some embodiments, a second filter 7 is further included, which is connected to the detection photodiode 6 and the multiplier 8, and the second filter 7 is a band-pass filter with a center frequency of W, used to filter out external interference of the converted power signal.

[0072] Referring to Figures 4-6 , the channel N output of the MEMS optical switch 5 is selected, the factory calibration voltage of the channel N is found as the initial control voltage of the channel N through the channel calibration table 111; and the initial control voltage is input into the MEMS optical switch 5 as the control voltage;

[0073] If the rotating mirror of the MEMS optical switch 5 rotates to position 1, it indicates that the rotating mirror is left-biased, and in the process of the rotating mirror rotating from position 1 to position 2, the power of the output channel N becomes larger and larger;

[0074] If the rotating mirror of the MEMS optical switch 5 rotates to position 2, it indicates that the rotating mirror position is aligned, and the power of the output channel N is the largest at position 2;

[0075] If the rotating mirror of the MEMS optical switch 5 rotates to position 3, it indicates that the rotating mirror position is right-biased, and the power of the output channel N is continuously reduced in the process of rotating the rotating mirror from position 1 to position 3.

[0076] When the voltage applied to the MEMS optical switch 5 is in the position 1-position 2 interval, the power of the output channel N is in a positive proportional relationship with the control voltage of the MEMS optical switch 5, that is, the higher the control voltage of the MEMS optical switch 5, the greater the output.

[0077] When the voltage applied to the MEMS optical switch 5 is in the position 2-position 3 interval, the power of the output channel N is in an inverse proportional relationship with the control voltage of the MEMS optical switch 5, that is, the higher the control voltage of the MEMS optical switch 5, the smaller the output.

[0078] By using this characteristic, a small amplitude cosine modulation signal can be superimposed on the control voltage of the MEMS optical switch 5, and the MEMS optical switch 5 can be adjusted through the amplitude / phase / frequency information of the output signal; the control voltage of the MEMS optical switch is maintained at position 2.

[0079] Referring to Figure 7 The application also provides a control method of the MEMS optical switch insertion loss minimum control device, which comprises the following steps:

[0080] S1: selecting the channel N output of the MEMS optical switch 5, and searching for the factory calibration voltage of the channel N as the initial control voltage of the channel N through the channel calibration table 111;

[0081] S2: superimposing the cosine modulation voltage signal generated by the cosine signal source 211 and the initial control voltage of the channel N through the adder 4 and then outputting to the MEMS optical switch 5;

[0082] S3: detecting the light signal of the channel N of the MEMS optical switch 5 through the photodiode 6, and outputting the converted power signal after photoelectric conversion;

[0083] S4: coherently amplifying the cosine modulation voltage signal and the converted power signal through the multiplier 8, and outputting a coherent signal, wherein the coherent signal comprises a frequency multiplication component and a direct current component;

[0084] S5: the first filter 10 acquires the coherent signal, filters out the frequency multiplication component of the coherent signal, and outputs the direct current component to the integrator 11;

[0085] S6: The integrator 11 obtains the DC component, integrates the DC component to obtain a DC adjustment amount, and outputs the DC adjustment amount as a feedback adjustment voltage to the adder 4. The feedback adjustment voltage is output to the MEMS optical switch 5 after being superimposed on the initial control voltage and the cosine modulation voltage via the adder 4, so as to realize compensation of the channel control voltage signal.

[0086] In some embodiments, the cosine modulation voltage signal is represented as , wherein T is the amplitude, W is the angular frequency, and t is the time; that is, the MEMS optical switch 5 superimposes a small cosine modulation signal on the channel N optical signal.

[0087] The converted power signal is represented as , wherein R is the received signal amplitude, W is the angular frequency, t is the time, and P is the received phase; that is, the output signal of the channel N optical signal of the MEMS optical switch 5 after passing through the detection photodiode 6 is .

[0088] The multiplier 8 coherently amplifies the converted power signal and the cosine modulation voltage signal; the coherent process is represented as:

[0089] The output coherent signal includes a double-frequency component and a DC component, the double-frequency component is represented as: , and the DC component is represented as: , wherein T is the amplitude, W is the angular frequency, t is the time, R is the received signal amplitude, and P is the received phase.

[0090] The double-frequency component COS(2Wt) is filtered out by the first filter (low-pass filter) 10, and the DC component COS(-P) is retained, so that .

[0091] As can be seen from the above, the converted power signal is amplified by T / 2 times through the coherent processing method.

[0092] Meanwhile, the adjustment direction of the MEMS optical switch 5 can be known from the received phase P.

[0093] When the MEMS optical switch 5 is in position 1, P is positive, F(x) is positive, and the control voltage of the MEMS optical switch is increased.

[0094] When the MEMS optical switch 5 is in position 3, P is negative, F(x) is negative, and the control voltage of the MEMS optical switch 5 is decreased.

[0095] Therefore, the MEMS optical switch 5 can be locked in position 2 by the control voltage.

[0096] In some embodiments, the control device further comprises a coherent signal detection module 9 connected to the multiplier 8, and the control method further comprises:

[0097] The coherent signal detection module 9 acquires a coherent signal, detects a frequency multiplication component of the coherent signal; if the frequency multiplication component is not detected, it indicates that the MEMS optical switch 5 has not switched to the corresponding output port N, and the coherent signal detection module 9 outputs a MEMS optical switch fault alarm signal.

[0098] In some embodiments, the control device further comprises a device aging threshold module 12 connected to the integrator 11, and the control method further comprises:

[0099] The device aging threshold module 12 acquires a direct current adjustment amount, compares the direct current adjustment amount with a set device aging threshold, and if the direct current adjustment amount is greater than the set device aging threshold, the device aging threshold module 12 outputs a MEMS optical switch aging alarm signal.

[0100] In summary, the embodiment of the application provides a MEMS optical switch insertion loss minimum control device and method, a cosine signal source 211 is introduced, a very small jitter is superimposed on the control voltage of the MEMS optical switch 5, coherent detection is used to analyze the output signal of the MEMS optical switch 5, the control voltage of the MEMS optical switch 5 is adjusted by analyzing the amplitude / frequency / phase characteristics of the output signal, so that the MEMS optical switch 5 is locked in the working state with the minimum insertion loss; by analyzing the amplitude / frequency / phase characteristics of the output signal, it can be judged whether the current optical switch is in normal working state, if aging or other conditions occur, an alarm can be sent in advance; so that maintenance personnel can intervene in advance, avoid business interruption during system operation, and improve system reliability.

[0101] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the application, and not to limit them; although the application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the application.

Claims

1. A MEMS optical switch insertion loss minimization control device, characterized in that, include: Channel calibration table, used to provide initial control voltage parameters for MEMS optical switch channels; A cosine signal source is used to generate cosine-modulated voltage signals. Where T is the amplitude, W is the angular frequency, and t is the time; The adder superimposes the initial control voltage, cosine modulation voltage, and feedback adjustment voltage of the MEMS optical switch and outputs the result to the MEMS optical switch. The photodiode is detected, connected to a MEMS optical switch, receives the optical signal output from channel N of the MEMS optical switch, and outputs the conversion power signal after photoelectric conversion. Where R is the received signal amplitude and P is the received phase; The multiplier, connected to the cosine signal source and the detection photodiode, is used for coherent amplification of the cosine-modulated voltage signal and the converted power signal, and outputs a coherent signal, which includes a frequency harmonic component and a DC component. The first filter is connected to the multiplier to acquire the coherent signal, filter out the harmonic components of the coherent signal, and output the DC component. An integrator, connected to the first filter, acquires the DC component, integrates the DC component to obtain the DC adjustment amount, and outputs the DC adjustment amount as a feedback adjustment voltage to the adder. The feedback adjustment voltage is superimposed on the initial control voltage and the cosine modulation voltage by the adder and then output to the MEMS optical switch to achieve compensation of the channel control voltage signal.

2. The MEMS optical switch insertion loss minimization control device according to claim 1, characterized in that, It also includes a coherent signal detection module, which is connected to the multiplier to acquire coherent signals and detect the frequency harmonics of the coherent signals; if no frequency harmonics are detected, it indicates that the MEMS optical switch has not switched to the corresponding output port N, and the coherent signal detection module outputs a MEMS optical switch fault alarm signal.

3. The MEMS optical switch insertion loss minimization control device according to claim 1, characterized in that, It also includes a device aging threshold module, which is connected to the integrator to obtain the DC adjustment amount, compares the DC adjustment amount with the set device aging threshold, and if the DC adjustment amount is greater than the set device aging threshold, the device aging threshold module outputs a MEMS optical switch aging alarm signal.

4. The MEMS optical switch insertion loss minimization control device according to claim 1, characterized in that, The multiplier amplifies the converted power signal by a factor of T / 2; the output coherent signal includes a second harmonic component and a DC component, the second harmonic component being represented as: The DC component is represented as: Where T is the amplitude, W is the angular frequency, t is the time, R is the received signal amplitude, and P is the received phase.

5. The MEMS optical switch insertion loss minimization control device according to claim 1, characterized in that, It also includes an 1 / N attenuator, which is connected to a cosine signal source and an adder. The 1 / N attenuator attenuates the cosine modulation voltage signal generated by the cosine signal source and outputs it to the adder to reduce the cosine modulation voltage superimposed on the MEMS optical switch.

6. The MEMS optical switch insertion loss minimization control device according to claim 1, characterized in that, It also includes a second filter, which is connected to the detection photodiode and the multiplier. The second filter is a bandpass filter with a center frequency of W, used to filter out external interference in the converted power signal.

7. A control method for a MEMS optical switch insertion loss minimization control device as described in any one of claims 1-6, characterized in that, Includes the following steps: Select the output of channel N of the MEMS optical switch, and find the factory calibration voltage of channel N through the channel calibration table as the initial control voltage of channel N; The cosine modulated voltage signal generated by the cosine signal source and the initial control voltage of channel N are superimposed by an adder and then output to the MEMS optical switch. The photodiode detects the optical signal of the MEMS optical switch channel N and outputs the converted power signal after photoelectric conversion. The cosine-modulated voltage signal and the converted power signal are coherently amplified by a multiplier to output a coherent signal, which includes a frequency harmonic component and a DC component. The first filter acquires the coherent signal, filters out the harmonic components of the coherent signal, and outputs the DC component to the integrator. The integrator acquires the DC component, integrates the DC component to obtain the DC adjustment amount, and outputs the DC adjustment amount as a feedback adjustment voltage to the adder. The feedback adjustment voltage is superimposed by the initial control voltage and the cosine modulation voltage through the adder and then output to the MEMS optical switch to realize the compensation of the channel control voltage signal.

8. The control method according to claim 7, characterized in that, The cosine-modulated voltage signal is represented as Where T is the amplitude, W is the angular frequency, and t is the time; the converted power signal is expressed as... Where R is the received signal amplitude and P is the received phase; the multiplier amplifies the converted power signal by a factor of T / 2; the output coherent signal includes a second harmonic component and a DC component, the second harmonic component being expressed as: The DC component is represented as: .

9. The control method according to claim 7, characterized in that, The control device further includes a coherent signal detection module connected to the multiplier, and the control method further includes: The coherent signal detection module acquires the coherent signal and detects the harmonic components of the coherent signal; if no harmonic components are detected, it indicates that the MEMS optical switch has not switched to the corresponding output port N, and the coherent signal detection module outputs a MEMS optical switch fault alarm signal.

10. The control method according to claim 7, characterized in that, The control device further includes a device aging threshold module, which is connected to the integrator, and the control method further includes: The device aging threshold module acquires the DC adjustment amount and compares it with the set device aging threshold. If the DC adjustment amount is greater than the set device aging threshold, the device aging threshold module outputs a MEMS optical switch aging alarm signal.

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