Radio frequency pulse modulation method, device and equipment and computer readable storage medium

Abstract

The invention provides a radio frequency pulse modulation method, device and equipment and a computer readable storage medium, and relates to the technical field of radio frequency. The radio frequency pulse modulation method is used for modulating a radio frequency signal into a target radio frequency pulse signal, and the waveform of the radio frequency signal is a sine wave. The radio frequency pulse modulation method comprises the following steps: modulating a radio frequency signal according to the level of an enable signal to obtain an initial radio frequency pulse signal; and in each high-level stage of the initial radio-frequency pulse signal, controlling the initial radio-frequency pulse signal to be subjected to power amplification by applying corresponding power supply voltage in a first stage and a second stage which are at least sequentially included in the high-level stages, so as to obtain a target radio-frequency pulse signal. Wherein the voltage value of the power supply voltage at any moment of the first stage is smaller than the voltage value of the power supply voltage at any moment of the second stage. According to the invention, soft start of radio frequency pulse output can be realized.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency pulse modulation method, apparatus, device, and computer-readable storage medium. Background Art

[0002] With the advancement of RF power technology, RF power supply equipment is now widely used in various electronic devices. This technological development has placed higher demands on RF power supply equipment, particularly the need for RF power supply equipment to output pulsed RF signals within applications. However, current pulsed RF signals directly impact the power supply voltage at each high level, severely impacting output performance. Therefore, achieving soft-start for RF pulse output has become a critical issue. Summary of the Invention

[0003] The present application provides a radio frequency pulse modulation method, apparatus, device and computer-readable storage medium, which can achieve soft start of radio frequency pulse output and improve output effect.

[0004] In a first aspect, a radio frequency pulse modulation method is provided, wherein the radio frequency pulse modulation method is used to modulate a radio frequency signal into a target radio frequency pulse signal, wherein the waveform of the radio frequency signal is a sine wave. The radio frequency pulse modulation method includes: modulating the radio frequency signal according to the level of an enable signal to obtain an initial radio frequency pulse signal. In each high-level phase of the initial radio frequency pulse signal, controlling the initial radio frequency pulse signal to be power amplified by applying a corresponding power supply voltage in at least the first phase and the second phase sequentially included in the high-level phase to obtain a target radio frequency pulse signal. The voltage value of the power supply voltage at any moment in the first phase is less than the voltage value of the power supply voltage at any moment in the second phase.

[0005] In a possible embodiment, the high-level stage further includes a third stage. In each high-level stage of the initial RF pulse signal, the control is performed in at least the first stage and the second stage sequentially included in the high-level stage to apply the corresponding power supply voltage to power amplify the initial RF pulse signal to obtain the target RF pulse signal, including: in each high-level stage of the initial RF pulse signal, the control is performed in the first stage, the second stage and the third stage sequentially included in the high-level stage to apply the corresponding power supply voltage to power amplify the initial RF pulse signal to obtain the target RF pulse signal. Wherein, the voltage value of the power supply voltage at any moment in the third stage is less than the voltage value of the power supply voltage at any moment in the second stage.

[0006] In one possible implementation, the voltage value of the power supply voltage at any moment in the first stage or at any moment in the third stage is greater than or equal to zero and less than the target voltage value, and the voltage value of the power supply voltage at any moment in the second stage is equal to the target voltage value.

[0007] In a possible implementation, the voltage value of the power supply voltage in the first stage changes from zero to the target voltage value, and the voltage value of the power supply voltage in the third stage changes from the target voltage value to zero.

[0008] In one possible embodiment, the first stage includes at least a first sub-stage and a second sub-stage. In each high-level stage of the initial RF pulse signal, controlling the initial RF pulse signal to be power-amplified by applying a corresponding power supply voltage in at least the first stage and the second stage sequentially included in the high-level stage to obtain a target RF pulse signal includes: in each high-level stage of the initial RF pulse signal, controlling the initial RF pulse signal to be power-amplified by applying a corresponding power supply voltage in at least the first sub-stage, the second sub-stage, and the second stage sequentially included in the high-level stage to obtain a target RF pulse signal. Wherein, the voltage value of the power supply voltage at any moment in the first sub-stage is less than the voltage value of the power supply voltage at any moment in the second sub-stage.

[0009] In a possible implementation manner, a voltage value of the power supply voltage at any moment in the first sub-phase is equal, and a voltage value of the power supply voltage at any moment in the second sub-phase is equal.

[0010] In one possible implementation, modulating the RF signal according to the level of the enable signal to obtain the initial RF pulse signal includes: maintaining output of the RF signal during each high-level phase of the enable signal, and stopping output of the RF signal during each low-level phase of the enable signal, to obtain the initial RF pulse signal. The waveform of the initial RF pulse signal during each high-level phase of the enable signal is a sine wave, and the waveform during each low-level phase of the enable signal is a straight line wave with a voltage value of zero.

[0011] In a second aspect, a radio frequency pulse modulation device is provided. The radio frequency pulse modulation device uses the above-mentioned radio frequency pulse modulation method to modulate a radio frequency signal into a target radio frequency pulse signal, wherein the radio frequency signal has a sine wave waveform. The radio frequency pulse modulation device includes a control unit, a modulation unit, and a power amplifier unit. The control unit is configured to output an enable signal to the modulation unit. The modulation unit is configured to input the radio frequency signal and modulate the radio frequency signal according to the level of the enable signal to obtain an initial radio frequency pulse signal. The control unit is further configured to, during each high-level phase of the initial radio frequency pulse signal, control the application of a corresponding power supply voltage in at least a first phase and a second phase sequentially included in the high-level phase, wherein the voltage value of the power supply voltage at any time in the first phase is less than the voltage value of the power supply voltage at any time in the second phase, and the power amplifier unit is configured to amplify the power of the initial radio frequency pulse signal according to the voltage value of the power supply voltage to obtain the target radio frequency pulse signal.

[0012] According to a third aspect, a radio frequency power supply device is provided, which includes a radio frequency pulse modulation device. The radio frequency pulse modulation device includes a control unit, a modulation unit, and a power amplifier unit. The control unit is used to output an enable signal to the modulation unit. The modulation unit is used to input the radio frequency signal and modulate the radio frequency signal according to the level of the enable signal to obtain an initial radio frequency pulse signal. The control unit is also used to control the application of a corresponding power supply voltage in at least the first stage and the second stage sequentially included in each high-level stage of the initial radio frequency pulse signal, wherein the voltage value of the power supply voltage at any moment in the first stage is less than the voltage value of the power supply voltage at any moment in the second stage, and the power amplifier unit is used to power-amplify the initial radio frequency pulse signal according to the voltage value of the power supply voltage to obtain the target radio frequency pulse signal.

[0013] In a fourth aspect, a computer-readable storage medium is further provided, wherein a computer program is stored in the computer-readable storage medium. When the computer program is run on a computer or a processor, the above-mentioned radio frequency pulse modulation method is implemented.

[0014] The RF pulse modulation method, RF pulse modulation device, RF power supply equipment and computer-readable storage medium of the present application can obtain an initial RF pulse signal by modulating the RF signal through configuring an enable signal, and can achieve soft start of the RF pulse output by controlling the power amplification of the initial RF pulse signal by applying a corresponding power supply voltage in at least the first and second stages sequentially included in the high-level stage by configuring each high-level stage of the initial RF pulse signal, thereby improving the output effect and obtaining a target RF pulse signal with better output effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 This is a flow chart of a radio frequency pulse modulation method in some embodiments of the present application.

[0017] Figure 2 FIG. 4 is another flow chart of the radio frequency pulse modulation method in some embodiments of the present application.

[0018] Figure 3 This is another flow chart of the radio frequency pulse modulation method in some embodiments of the present application.

[0019] Figure 4 This is another flow chart of the radio frequency pulse modulation method in some embodiments of the present application.

[0020] Figure 5 FIG. 1 is a schematic diagram of a radio frequency pulse modulation device in an embodiment of the present application.

[0021] Figure 6 Schematic diagram of a radio frequency power supply device in one embodiment of the present application.

[0022] Explanation of the reference numerals: 1000, RF power supply equipment, 10, RF pulse modulation device, 100, control unit, EN, enable signal, VSS, power supply voltage, 200, modulation unit, RFS, RF signal, RFM, initial RF pulse signal, RFP, target RF pulse signal. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0024] In the description of the embodiments of this application, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0025] In the following, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of this application, unless otherwise specified, "plurality" means two or more.

[0026] In describing the embodiments of the present application, it should be noted that the terms "first," "second," and the like in the specification and claims of the present application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, such that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0027] In addition, the terms "include" and "have" and any variations thereof are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, product, or device.

[0028] See also Figure 1 , Figure 1 Flowchart of the radio frequency pulse modulation method in some embodiments of the present application. Figure 1 As shown, the present application provides a radio frequency pulse modulation method, which is used to modulate a radio frequency signal into a target radio frequency pulse signal, wherein the waveform of the radio frequency signal is a sine wave. The radio frequency pulse modulation method includes:

[0029] Step S100: modulating the radio frequency signal according to the level of the enable signal to obtain an initial radio frequency pulse signal.

[0030] Step S200: In each high-level phase of the initial RF pulse signal, control the initial RF pulse signal to be power amplified by applying a corresponding power supply voltage in at least the first phase and the second phase sequentially included in the high-level phase to obtain a target RF pulse signal.

[0031] The voltage value of the power supply voltage at any moment in the first stage is smaller than the voltage value of the power supply voltage at any moment in the second stage.

[0032] Therefore, the above-mentioned RF pulse modulation method in the present application can obtain an initial RF pulse signal by modulating the RF signal through configuring an enable signal, and by configuring each high-level stage of the initial RF pulse signal, control the initial RF pulse signal to be power amplified by applying a corresponding power supply voltage in at least the first stage and the second stage included in the high-level stage, thereby realizing soft start of the RF pulse output and improving the output effect, so as to obtain a target RF pulse signal with better output effect.

[0033] Specifically, at the rising edge of each high-level stage of the initial RF pulse signal, if the voltage value of the power supply voltage corresponding to the second stage is directly applied, the amplitude of the pulsed RF signal will be too high when each high level arrives, and may even exceed the voltage value of the power supply voltage corresponding to the second stage, causing overcharging. Therefore, by configuring the voltage value of the power supply voltage at any moment in the first stage to be smaller than the voltage value of the power supply voltage at any moment in the second stage, and sequentially applying the voltage value of the power supply voltage corresponding to the first stage and the voltage value of the power supply voltage corresponding to the second stage to power amplify the initial RF pulse signal, the amplitude of the target RF pulse signal can be smaller when each high level arrives, thereby avoiding overcharging and achieving better output effect.

[0034] In some embodiments, the RF pulse modulation method is applied to a RF pulse modulation device, which may include a power amplifier unit. In each high-level stage of the initial RF pulse signal, the power amplifier unit is controlled to apply a corresponding power supply voltage to the power amplifier unit in at least the first stage and the second stage sequentially included in the high-level stage. The power amplifier unit amplifies the power of the initial RF pulse signal according to the voltage value of the power supply voltage to obtain a target RF pulse signal.

[0035] In some embodiments, the amplitude of each high-level phase of the initial RF pulse signal is related to the voltage value of the power supply voltage.

[0036] The waveform of the radio frequency signal may be a sine wave.

[0037] Please also refer to Figure 2 , Figure 2 This is another flow chart of the RF pulse modulation method in some embodiments of the present application. The high level stage also includes a third stage. Figure 2 As shown, the radio frequency pulse modulation method also includes:

[0038] Step S100: modulating the radio frequency signal according to the level of the enable signal to obtain an initial radio frequency pulse signal.

[0039] Step S210: In each high-level stage of the initial RF pulse signal, control the application of corresponding power supply voltages in the first stage, the second stage, and the third stage sequentially included in the high-level stage to power amplify the initial RF pulse signal to obtain a target RF pulse signal.

[0040] The voltage value of the power supply voltage at any moment in the third stage is smaller than the voltage value of the power supply voltage at any moment in the second stage.

[0041] Among them, Figure 2 The step S210 shown in FIG. 1 may be specifically as follows: Figure 1 The steps included in step S200 are shown.

[0042] Therefore, the above-mentioned RF pulse modulation method in the present application, by configuring the high-level stage to also include a third stage, and in each high-level stage of the initial RF pulse signal, controls the application of corresponding power supply voltages in the first stage, the second stage and the third stage included in the high-level stage to power amplify the initial RF pulse signal to obtain the target RF pulse signal, and can also realize soft disconnection of the RF pulse output, further improving the output effect, so as to obtain a target RF pulse signal with better output effect.

[0043] In some embodiments, the voltage value of the power supply voltage at any time in the first stage or at any time in the third stage is greater than or equal to zero and less than the target voltage value, and the voltage value of the power supply voltage at any time in the second stage is equal to the target voltage value.

[0044] Therefore, the above-mentioned RF pulse modulation method in the present application can effectively improve the output effect and avoid overcharging by configuring the voltage value of the power supply voltage at any time in the first stage or at any time in the third stage to be lower than the voltage value of the power supply voltage at any time in the second stage.

[0045] Furthermore, the voltage value of the power supply voltage in the first stage changes from zero to a target voltage value, and the voltage value of the power supply voltage in the third stage changes from the target voltage value to zero.

[0046] Therefore, the above-mentioned RF pulse modulation method in the present application can achieve better film forming effect when applied to semiconductor equipment by smoothing the voltage value of the power supply voltage in the first stage and the voltage value of the power supply voltage in the third stage.

[0047] Please also refer to Figure 3 , Figure 3 This is another flow chart of the RF pulse modulation method in some embodiments of the present application. The first stage includes at least a first sub-stage and a second sub-stage. Figure 3 As shown, the radio frequency pulse modulation method further includes:

[0048] Step S100: modulating the radio frequency signal according to the level of the enable signal to obtain an initial radio frequency pulse signal.

[0049] Step S220: In each high-level stage of the initial RF pulse signal, control the initial RF pulse signal to be power amplified by applying a corresponding power supply voltage in at least the first sub-stage, the second sub-stage, and the second stage sequentially included in the high-level stage to obtain a target RF pulse signal.

[0050] The voltage value of the power supply voltage at any moment in the first sub-phase is smaller than the voltage value of the power supply voltage at any moment in the second sub-phase.

[0051] Among them, Figure 3 The step S220 shown in FIG. 1 may be specifically as follows: Figure 1 The steps included in step S200 are shown.

[0052] Therefore, the above-mentioned RF pulse modulation method in the present application, by setting a step-by-step soft start, can more conveniently control the voltage value of the power supply voltage and can also achieve better film forming effects when applied to semiconductor equipment.

[0053] In some embodiments, the first stage may further include a third sub-stage, and step S220 may specifically include: in each high-level stage of the initial RF pulse signal, controlling the first sub-stage, the second sub-stage, the third sub-stage, and the second stage sequentially included in the high-level stage to power amplify the initial RF pulse signal by applying a corresponding power supply voltage to obtain a target RF pulse signal. The voltage value of the power supply voltage at any moment in the first sub-stage, the voltage value of the power supply voltage at any moment in the second sub-stage, and the voltage value of the power supply voltage at any moment in the third sub-stage increase in sequence. Thus, the amplitude variation of the target RF pulse signal in each high-level stage can be smoothed.

[0054] In some embodiments, the voltage value of the power supply voltage at any time in the first sub-phase is equal, and the voltage value of the power supply voltage at any time in the second sub-phase is equal.

[0055] Therefore, the above-mentioned radio frequency pulse modulation method in the present application is more convenient for controlling the voltage value of the power supply voltage by configuring the power supply voltage to have equal voltage value in each step.

[0056] Among them, Figure 2 、 Figure 3 The step S100 shown can refer to the aforementioned related content and will not be described again here.

[0057] Please also refer to Figure 4 , Figure 4FIG. 1 is another flow chart of the RF pulse modulation method in some embodiments of the present application. Figure 4 As shown, the radio frequency pulse modulation method may further include:

[0058] Step S110 : During each high level phase of the enable signal, the RF signal keeps being output, and during each low level phase of the enable signal, the RF signal stops being output, so as to obtain an initial RF pulse signal.

[0059] Step S200: In each high-level phase of the initial RF pulse signal, control the initial RF pulse signal to be power amplified by applying a corresponding power supply voltage in at least the first phase and the second phase sequentially included in the high-level phase to obtain a target RF pulse signal.

[0060] The waveform of the initial RF pulse signal in each high-level phase of the enable signal is a sine wave, and the waveform of the initial RF pulse signal in each low-level phase of the enable signal is a straight wave with a voltage value of zero.

[0061] Therefore, the above-mentioned RF pulse modulation method in the present application can obtain an initial RF pulse signal by configuring the RF signal to maintain output in each high-level stage of the enable signal and to stop outputting the RF signal in each low-level stage of the enable signal, and the waveform of the initial RF pulse signal in each high-level stage of the enable signal is a sine wave, and the amplitude of the sine wave of the initial RF pulse signal changes with the change of the voltage value of the power supply voltage.

[0062] Among them, Figure 4 The step S110 shown in FIG. 1 may be specifically as follows: Figure 1 The steps included in step S100 are shown.

[0063] Among them, Figure 4 The step S200 shown can refer to the aforementioned related content and will not be repeated here.

[0064] The RF pulse modulation method of the present application, through the above steps, can achieve soft start of RF pulse output in a variety of ways, improve the output effect, avoid overcharging, and is convenient and simple to control, and can obtain a target RF pulse signal with better output effect, especially when applied to semiconductor equipment, it can achieve better film forming effect.

[0065] See also Figure 5 , Figure 5 FIG. 1 is a schematic diagram of a radio frequency pulse modulation device in an embodiment of the present application. Figure 5As shown, the present application also provides a radio frequency pulse modulation device 10. The radio frequency pulse modulation device 10 uses the radio frequency pulse modulation method of any of the aforementioned embodiments to modulate a radio frequency signal RFS into a target radio frequency pulse signal RFP, wherein the waveform of the radio frequency signal RFS is a sine wave. The radio frequency pulse modulation device 10 includes a control unit 100, a modulation unit 200, and a power amplifier unit. The control unit 100 is configured to output an enable signal EN to the modulation unit 200. The modulation unit 200 is configured to input the radio frequency signal RFS and modulate the radio frequency signal RFS according to the level of the enable signal EN to obtain an initial radio frequency pulse signal RFM. The control unit 100 is further configured to control the application of a corresponding power supply voltage VSS during each high-level phase of the initial radio frequency pulse signal RFM, at least in a first phase and a second phase sequentially included in the high-level phase. The voltage value of the power supply voltage VSS at any time in the first phase is less than the voltage value of the power supply voltage VSS at any time in the second phase. The power amplifier unit is configured to amplify the power of the initial radio frequency pulse signal RFM according to the voltage value of the power supply voltage VSS to obtain the target radio frequency pulse signal RFP.

[0066] The operations performed by the RF pulse modulation device 10 or the control unit 100 correspond to the steps in the RF pulse modulation method in any of the aforementioned embodiments. For further operations that can be performed by the RF pulse modulation device 10 or the control unit 100, please refer to the relevant content of the RF pulse modulation method in any of the aforementioned embodiments, and will not be repeated here.

[0067] like Figure 5 As shown, the modulation unit 200 can be connected to the power amplifier unit to modulate the input RF signal RFS to obtain an initial RF pulse signal RFM and output it to the power amplifier unit. The power amplifier unit can be used to connect to a load to amplify the power of the input initial RF pulse signal RFM to obtain a target RF pulse signal RFP and output it to the load. The control unit 100 can be connected to both the modulation unit 200 and the power amplifier unit, output an enable signal EN to the modulation unit 200, and in each high-level stage of the initial RF pulse signal RFM, control the application of the corresponding power supply voltage VSS in at least the first stage and the second stage sequentially included in the high-level stage.

[0068] Among them, the modulation unit 200 is mainly used to execute the step of modulating the radio frequency signal RFS according to the level of the enable signal EN in the above-mentioned radio frequency pulse modulation method to obtain the initial radio frequency pulse signal RFM. The modulation unit 200 may include logic gates, such as AND gates, NOT gates, etc., and may also include electronic components such as switches.

[0069] Among them, the power amplifier unit is mainly used to perform the step of amplifying the power of the initial RF pulse signal RFM according to the power supply voltage VSS to obtain the target RF pulse signal RFP in the above-mentioned RF pulse modulation method. The power amplifier unit may include a RF power amplifier, etc.

[0070] Among them, the control unit 100 is mainly used to execute other specific steps of the above-mentioned RF pulse modulation method. The control unit 100 may include a general-purpose processor such as a central processing unit (CPU), or may be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or may be a microprocessor such as a micro control unit (MCU).

[0071] The RF pulse modulation method and RF pulse modulation device 10 of the present application, through the above steps and structures, can achieve soft start of RF pulse output in a variety of ways, improve output effect, avoid overcharging, and are convenient and simple to control, and can obtain a target RF pulse signal RFP with better output effect, especially when used in semiconductor equipment, can achieve better film forming effect.

[0072] See also Figure 6 , Figure 6 FIG. 1 is a schematic diagram of a radio frequency power supply device in an embodiment of the present application. Figure 6 As shown, the present application further provides a radio frequency power supply device 1000 , which includes a radio frequency source and the radio frequency pulse modulation device 10 in any of the aforementioned embodiments.

[0073] Please refer again Figure 5 .like Figure 5As shown, the RF pulse modulation device 10 includes a control unit 100, a modulation unit 200, and a power amplifier unit. The control unit 100 is used to output an enable signal EN to the modulation unit 200. The modulation unit 200 is used to input the RF signal RFS and modulate the RF signal RFS according to the level of the enable signal EN to obtain an initial RF pulse signal RFM. The control unit 100 is also used to control the application of a corresponding power supply voltage VSS in at least the first and second stages included in the high-level stage during each high-level stage of the initial RF pulse signal RFM, wherein the voltage value of the power supply voltage VSS at any time in the first stage is less than the voltage value of the power supply voltage VSS at any time in the second stage, and the power amplifier unit is used to power amplify the initial RF pulse signal RFM according to the voltage value of the power supply voltage VSS to obtain a target RF pulse signal RFP.

[0074] The more specific structure of the RF pulse modulation device 10 can be found in the relevant content of the RF pulse modulation device 10 in any of the aforementioned embodiments, and will not be repeated here.

[0075] In some embodiments, the RF pulse modulation device 10 can be connected to a load to output a target RF pulse signal RFP to the load, wherein the load can be a plasma load.

[0076] The RF pulse modulation method, RF pulse modulation device 10 and RF power supply equipment 1000 of the present application can realize soft start of RF pulse output in a variety of ways, improve the output effect, avoid overcharging, and are convenient and simple to control. A target RF pulse signal RFP with better output effect can be obtained, thereby improving the competitiveness of the RF power supply equipment 1000, especially when used in semiconductor equipment, which can achieve better film forming effect.

[0077] The present application also provides a computer-readable storage medium, in which a computer program is stored. When the computer program runs on a computer or a processor, the radio frequency pulse modulation method of any of the aforementioned embodiments is implemented.

[0078] In the multiple embodiments provided in this application, it should be understood that the disclosed methods, devices, and equipment can be implemented in other ways. For example, the device embodiments described above are merely schematic; for example, the division of units is merely a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0079] Units described as separate components may or may not be physically separate, and components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected to achieve the purpose of this embodiment according to actual needs.

[0080] In addition, the functional units in various embodiments of the present invention may be integrated into a single processing unit, each unit may be physically included separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or hardware plus software functional units.

[0081] The above-mentioned integrated unit implemented in the form of a software functional unit can be stored in a computer-readable storage medium. The above-mentioned software functional unit is stored in a storage medium and includes a number of instructions for causing a computer device (which can be a personal computer, server, or network device, etc.) to perform some steps of the method of each embodiment of the present invention. The aforementioned storage medium includes: a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk, etc., various media that can store program code.

[0082] The above description is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application; the embodiments of this application and the features of the embodiments can be combined with each other unless there is a conflict. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. A radio frequency pulse modulation method, characterized in that: Used to modulate a radio frequency signal into a target radio frequency pulse signal, wherein the waveform of the radio frequency signal is a sine wave; Wherein, the radio frequency pulse modulation method includes: Modulating the radio frequency signal according to the level of the enable signal to obtain an initial radio frequency pulse signal; In each high-level phase of the initial radio frequency pulse signal, controlling the initial radio frequency pulse signal to be power amplified by applying a corresponding power supply voltage in at least a first phase and a second phase sequentially included in the high-level phase to obtain a target radio frequency pulse signal; The voltage value of the power supply voltage at any moment in the first stage is smaller than the voltage value of the power supply voltage at any moment in the second stage.

2. The radio frequency pulse modulation method according to claim 1, wherein: The high level stage also includes a third stage; The method comprises: controlling, in each high-level phase of the initial radio frequency pulse signal, at least in the first phase and the second phase sequentially included in the high-level phase, to power amplify the initial radio frequency pulse signal by applying a corresponding power supply voltage to obtain a target radio frequency pulse signal, including: In each high-level phase of the initial radio frequency pulse signal, controlling the application of corresponding power supply voltages in the first phase, the second phase, and the third phase sequentially included in the high-level phase to power amplify the initial radio frequency pulse signal to obtain a target radio frequency pulse signal; The voltage value of the power supply voltage at any moment in the third stage is smaller than the voltage value of the power supply voltage at any moment in the second stage.

3. The radio frequency pulse modulation method according to claim 2, wherein: The voltage value of the power supply voltage at any moment in the first stage or at any moment in the third stage is greater than or equal to zero and less than the target voltage value, and the voltage value of the power supply voltage at any moment in the second stage is equal to the target voltage value.

4. The radio frequency pulse modulation method according to claim 3, wherein: The voltage value of the power supply voltage in the first stage changes from zero to the target voltage value, and the voltage value of the power supply voltage in the third stage changes from the target voltage value to zero.

5. The radio frequency pulse modulation method according to claim 1, wherein: The first stage includes at least a first sub-stage and a second sub-stage; The method comprises: controlling, in each high-level phase of the initial radio frequency pulse signal, at least in the first phase and the second phase sequentially included in the high-level phase, to power amplify the initial radio frequency pulse signal by applying a corresponding power supply voltage to obtain a target radio frequency pulse signal, including: In each high-level phase of the initial radio frequency pulse signal, controlling the initial radio frequency pulse signal to be power amplified by applying a corresponding power supply voltage in at least a first sub-phase, a second sub-phase, and a second phase sequentially included in the high-level phase to obtain a target radio frequency pulse signal; The voltage value of the power supply voltage at any moment in the first sub-phase is smaller than the voltage value of the power supply voltage at any moment in the second sub-phase.

6. The radio frequency pulse modulation method according to claim 5, characterized in that: The voltage value of the power supply voltage at any moment in the first sub-phase is equal, and the voltage value of the power supply voltage at any moment in the second sub-phase is equal.

7. The radio frequency pulse modulation method according to claim 1, wherein: The step of modulating the radio frequency signal according to the level of the enable signal to obtain an initial radio frequency pulse signal includes: During each high level phase of the enable signal, the radio frequency signal keeps being output, and during each low level phase of the enable signal, the radio frequency signal stops being output, so as to obtain an initial radio frequency pulse signal; The waveform of the initial RF pulse signal in each high-level phase of the enable signal is a sine wave, and the waveform of the initial RF pulse signal in each low-level phase of the enable signal is a straight wave with a voltage value of zero.

8. A radio frequency pulse modulation device, characterized in that: The radio frequency pulse modulation device modulates the radio frequency signal into a target radio frequency pulse signal using the radio frequency pulse modulation method according to any one of claims 1 to 7, wherein the waveform of the radio frequency signal is a sine wave; Wherein, the radio frequency pulse modulation device includes a control unit, a modulation unit and a power amplifier unit; The control unit is used to output an enable signal to the modulation unit; The modulation unit is used to input the radio frequency signal and modulate the radio frequency signal according to the level of the enable signal to obtain an initial radio frequency pulse signal; In which, the control unit is further used to control the application of a corresponding power supply voltage in at least the first stage and the second stage sequentially included in each high-level stage of the initial RF pulse signal, wherein the voltage value of the power supply voltage at any moment in the first stage is less than the voltage value of the power supply voltage at any moment in the second stage, and the power amplifier unit is used to power amplify the initial RF pulse signal according to the voltage value of the power supply voltage to obtain the target RF pulse signal.

9. A radio frequency power supply device, characterized in that: It comprises the radio frequency pulse modulation device as claimed in claim 8.

10. A computer-readable storage medium, characterized in that The computer-readable storage medium stores a computer program, and when the computer program is run on a computer or a processor, the radio frequency pulse modulation method according to any one of claims 1 to 7 is implemented.

Images