Metastructure lens layout design file data compression method, system and device and medium

Abstract

The invention belongs to the technical field of micro-nano photonics, and discloses a super-structure lens layout design file data compression method, system and device and a medium, and the method comprises the steps: obtaining unit structure parameters used for generating a super-structure lens layout design file; according to the design requirements of the super-structure lens, the caliber of the super-structure lens is divided into a plurality of circular ring areas with different radiuses; placing unit structures in circular ring areas with different radiuses based on the unit structure parameters; and combining the unit structures arranged under different radiuses to finish the drawing of the metamaterial lens. According to the data compression algorithm provided by the invention, the size of the layout design file can be reduced exponentially, and meanwhile, the compressed layout file can be directly used for processing the mask.

Description

Technical Field

[0001] The present invention belongs to the field of micro-nano photonics technology, and in particular relates to a method, system, device and medium for compressing data of a meta-lens layout design file. Background Art

[0002] A metalens is a new type of lens composed of subwavelength-sized unit structures arranged in a designed manner. Since each unit structure can effectively control the amplitude, polarization, and phase of the incident electromagnetic wave, arbitrary control of the wavefront can be achieved by arranging a microstructure array, thereby achieving the focusing and imaging functions of the lens. However, when the aperture of the metalens is relatively large, hundreds of millions of unit structures need to be arranged, or even more, to meet the subwavelength requirements. For example, for a metalens with a diameter of 5 cm, the design wavelength is 632.8 nm, and the period of the unit structure is 350 nm, the number of unit structures that need to be arranged exceeds 16 billion. If each structure is fully described, the layout file will be very large, and the storage space occupied by the layout file will increase dramatically to the TB level, which will make the mask writing device unreadable. Therefore, it is crucial to reduce the file size. Summary of the Invention

[0003] The purpose of the present invention is to provide a method, system, device and medium for compressing meta-lens layout design file data to solve the problems existing in the above-mentioned prior art.

[0004] To achieve the above objectives, the present invention provides a method for compressing metalens layout design file data, comprising:

[0005] Step S1: Obtaining unit structure parameters for generating a metalens layout design file;

[0006] Step S2: Dividing the aperture of the metalens into a plurality of circular regions with different radii according to the design requirements of the metalens; placing unit structures in the circular regions with different radii based on the unit structure parameters;

[0007] Step S3: Combine the unit structures arranged at different radii to complete the drawing of the metalens.

[0008] Optionally, step S2 specifically includes: dividing the aperture of the metalens into multiple circular areas with different radii according to the design requirements of the metalens, dividing the circular areas with the same radius into combinations of different levels, and placing unit structures at each level.

[0009] Optionally, placing the unit structure at each level specifically includes:

[0010] Calculate the number of unit structures that need to be placed at the current radius position, and express the number of unit structures in binary form as a sequence. The length of the sequence is the number of levels that the current radius needs to be divided into.

[0011] Performing hierarchical division based on the number of levels and calculating the hierarchical structure of each level;

[0012] The hierarchical structure number at the current radial position is determined based on the sequence, and the unit structure at the corresponding radial position is drawn based on the hierarchical structure number.

[0013] Optionally, the hierarchical division based on the number of levels specifically includes:

[0014] The i-th level contains two i-1-th level structures, one of which is rotated by 2^(i-2)θ, where θ is the rotation angle.

[0015] Optionally, determining the hierarchical structure number at the current radius position based on the sequence specifically includes:

[0016] Items that are not 0 are selected from the sequence to form a new sequence, and the hierarchical structure number at the current radius position is obtained.

[0017] A meta-lens layout design file data compression system, comprising:

[0018] a data acquisition module configured to obtain unit structure parameters for generating a metalens layout design file;

[0019] A unit structure design module is used to divide the aperture of the metalens into a plurality of circular ring regions of different radii according to the design requirements of the metalens; and to place unit structures in the circular ring regions of different radii based on the unit structure parameters;

[0020] The drawing module is used to combine unit structures arranged at different radii to complete the drawing of the metalens.

[0021] An electronic device includes a memory and a processor, wherein the memory is used to store a computer program, and the processor runs the computer program to enable the electronic device to execute the method for compressing data of a meta-lens layout design file.

[0022] A computer-readable storage medium stores a computer program, which, when executed by a processor, implements a method for compressing data of a meta-lens layout design file.

[0023] The technical effects of the present invention are:

[0024] The method proposed in the present invention is based on the instantiation body design in L-edit. When the instantiation body is called, only its position and orientation are recorded, and there is no need to draw the instantiation body's geometric structure. Therefore, when using the instantiation body to draw a graphic array, the graphics occupy less storage space. A binary layout allocation method is used to draw a metalens by rotating the divided structure by a certain angle, thereby achieving efficient compression of the metalens layout file. At the same time, the resulting compressed file does not lose the geometric information of all building blocks on the metalens.

[0025] The layout file for the annular metalens designed in this invention achieves excellent compression. The designed layout file can be opened and displayed normally on a computer without losing the position and radius information of each building block on the metalens. This invention achieves compression of terabyte-scale layout files to megabyte-scale (all layout files mentioned in this invention are in .gds format). The designed compression algorithm exhibits superior compression capabilities without losing detailed information about the building blocks on the metalens. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] The accompanying drawings, which constitute part of this application, are intended to provide a further understanding of this application. The exemplary embodiments and descriptions of this application are intended to explain this application and do not constitute an improper limitation on this application. In the accompanying drawings:

[0028] Figure 1 Schematic diagram of the structure of a metasurface unit in an embodiment of the present invention;

[0029] Figure 2 This is a core principle diagram of the data compression algorithm in an embodiment of the present invention;

[0030] Figure 3 Schematic diagram of the meta-lens layout with an aperture of 20P in an embodiment of the present invention;

[0031] Figure 4 This is a central portion view of a layout design file generated by a compression algorithm for a 50mm-diameter metalens according to an embodiment of the present invention;

[0032] Figure 5 This is an implementation flow chart of an embodiment of the present invention. DETAILED DESCRIPTION

[0033] Various exemplary embodiments of the present invention will now be described in detail. This detailed description should not be considered as limiting the present invention, but rather as a more detailed description of certain aspects, features, and embodiments of the present invention.

[0034] It should be understood that the terms described herein are intended only to describe particular embodiments and are not intended to limit the present invention. In addition, for numerical ranges herein, it should be understood that each intermediate value between the upper and lower limits of the range is also specifically disclosed. Each smaller range between any intermediate value within a stated value or stated range and any other stated value or intermediate value within the stated range is also encompassed by the present invention. The upper and lower limits of these smaller ranges may be independently included or excluded within the scope.

[0035] Unless otherwise indicated, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art. Although only preferred methods are described herein, any method similar or equivalent to that described herein may also be used in the practice or testing of the present invention. All documents mentioned in this specification are incorporated by reference to disclose and describe the methods associated with the documents. In the event of any conflict with any incorporated document, the contents of this specification shall prevail.

[0036] It will be apparent to those skilled in the art that various modifications and variations may be made to the specific embodiments of the present invention without departing from the scope or spirit of the invention. Other embodiments will be apparent to those skilled in the art from the present invention. The present description and examples are intended to be illustrative only.

[0037] The words “include,” “including,” “have,” “contain,” etc. used in this article are open-ended terms, meaning including but not limited to.

[0038] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0039] like Figure 1 - Figure 5 As shown, this embodiment provides a method for compressing data of a metalens layout design file, including: obtaining unit structure parameters for generating a metalens layout design file; dividing the aperture of the metalens into multiple circular areas with different radii according to the design requirements of the metalens; placing unit structures in the circular areas with different radii based on the unit structure parameters; and combining the unit structures arranged at different radii to complete the drawing of the metalens.

[0040] In order to solve the problems existing in the prior art, this embodiment proposes a method for compressing the layout design file data of a large-aperture meta-lens based on a hierarchical cascade algorithm. Like traditional lenses, meta-lenses are circularly symmetrical, so the unit structures placed at a position r from the center of the lens are the same, which indirectly provides the possibility for layout file data compression. The purpose of this embodiment is to reduce the design layout file so that the drawn layout file can be read. The data compression algorithm proposed in this embodiment can exponentially reduce the size of the layout design file, and the compressed layout file can be directly used for mask processing.

[0041] The data compression method provided in this embodiment specifically includes the following steps:

[0042] S1, obtaining a unit structure parameter library for generating a layout design file, wherein the library data is derived from theoretical calculation or simulation;

[0043] S2, placing the designed unit structures at different radii. Taking advantage of the fact that the unit structures arranged at the same radius have the same structural size, the structure arrangement at that radius is divided into different levels of combinations in a binary manner. The high-level structure is composed of the low-level structure replicated and rotated by a certain angle. The geometric structure at the entire radius appears to be a combination of different levels according to the required rotation arrangement;

[0044] S3, combines the complete structures arranged at different radii to complete the drawing of the entire metalens.

[0045] In practice, in step S2, the designed unit structures are placed at different radial positions. Taking advantage of the fact that the unit structures arranged at the same radius have the same structural size, the structure arrangement at that radius is divided into different levels of combinations in a binary manner, where the high-level structure is composed of the low-level structure copied and rotated by a certain angle. The geometric structure at the entire radius is composed of the desired rotation arrangement at different levels. The process includes the following steps:

[0046] Calculate the number of unit structures M_N that need to be placed at the radius r_N = N*P. Assume that the aperture of the metalens is D and the period of its unit structure is P, then M_N = floor(2*p*r_N / P). Represent M_N as a binary sequence and arrange it in reverse order. The length of this sequence is the number of levels that need to be divided at this radius. Calculate the hierarchical structure of each level. The first level is the unit structure at this radius. The second level contains two first-level structures, one of which is rotated by an angle of θ, θ = 2π / M_N. Similarly, the i-th level contains two i-1-th level structures, one of which is rotated by 2^(i-2)θ.

[0047] Select the non-zero items in the binary sequence to form a new sequence. The sequence element value is the sequence number of the non-zero element, which is also the level number. The selected levels are rotated according to a certain rotation angle, where the rotation angle α of the m-th level structure is:

[0048]

[0049] Where K is the structure number of the selected i-th level. Each hierarchical structure in the structure library can be referenced at most once to draw the entire structure at the radius position.

[0050] Alternatively, in step S3, the complete structures arranged at different radii are combined to complete the drawing of the entire metalens. The process is: repeat step S2 to draw all structures with radii from 0 to D / 2, and the drawing of the entire metalens is completed.

[0051] The method proposed in this embodiment is based on the instantiation body design in L-edit. When the instantiation body is called, only its position and orientation are recorded, and there is no need to draw the instantiation body's geometric structure. Therefore, when using the instantiation body to draw a graphic array, the graphics occupy less storage space. A binary layout allocation method is used to draw a metalens by rotating the divided structure by a certain angle, thereby achieving efficient compression of the metalens layout file. At the same time, the resulting compressed file does not lose the geometric information of all building blocks on the metalens.

[0052] The specific implementation process of this embodiment includes:

[0053] Figure 1 The cylindrical structure shown is the unit structure selected in this embodiment. The unit structure can also be a rectangular parallelepiped, a hexagonal prism, or even a combined unit structure. The layout design file does not involve the height information of the structure. Therefore, for a cylinder, its structural information can be described only by the radius. For a metalens with an aperture of D and a unit structure period of P, the required input file is a data table with N rows and 2 columns, where N = floor(D / (2P)). The first column of the data table is the distance between the center of the microcylinder and the center of the metalens, and the second column is the radius of the microcylinder.

[0054] Figure 2 Shown is the schematic diagram of the layout design file compression algorithm. Figure 2 (a) shows the different hierarchical structures at a distance of 4P from the center of the metalens. The radius of the unit structure is the data in the 6th row and 2nd column of the input file. Figure 2 (b) shows the ring structure formed by rotating and arranging these hierarchical structures in a designed manner.

[0055] The number of unit structures that need to be arranged on a ring with a radius of 5P is floor(2*pi*(4*P) / P)=25, which is converted into binary data as 11001. The length of this binary data sequence is 5, so 5 levels are required to describe this ring.

[0056] The center position of the structure of level 1 is (N*P, 0); level 2 is composed of two levels 1, one of which is rotated by Δθ5 around the center of the metalens. Level 3 consists of two Level 2s, one of which is rotated by 2Δθ5 around the center of the metalens. Level 4 consists of two Level 3s, one of which is rotated by 4Δθ5 around the center of the metalens. Level 5 consists of two Level 4s, one of which is rotated by 8Δθ5 around the center of the metalens.

[0057] The final ring structure is described by the levels that are not zero in the binary data, that is, levels 1, 4, and 5. The binary data needs to be arranged in reverse order as 10011, where the non-zero data are the 1st, 4th, and 5th numbers in the sequence. The non-zero numbers form a new sequence [1,4,5]. The elements in the sequence represent the positions of the non-zero elements, which is also the encoding of the hierarchical structure. The final ring is composed of levels 1 and 4 rotated 2 1-1 Δθ5, level 5 rotation 2 1-1 Δθ5+2 4-1 Δθ5 composition.

[0058] Generally, the number of unit structures that need to be arranged on a ring with a radius of mP is floor(2*pi*(m*P) / P). Convert it into binary data, and assume that the length of the binary data sequence is n. Therefore, n levels are required to describe this ring.

[0059] The center position of the structure at level 1 is (m*P, 0);

[0060] Level 2 is composed of two Levels 1, one of which is rotated by Δθ around the center of the metalens. i ,

[0061] …

[0062] Level n1 is composed of two levels n1-1, one of which is rotated 2 around the center of the metalens. n1-2 Δθ i ;

[0063] …

[0064] Level n is composed of two levels n-1, one of which is rotated 2 around the center of the metalens. n-2 Δθ i ;

[0065] The final ring structure is also described by rotating the binary data at all levels that are not zero. Again, the binary data is sorted in reverse order, and the positions of the non-zero elements are returned. This position is then used to form a new sequence to describe the rotation information at each level.

[0066] Figure 3 The following figure shows a metalens layout file with an aperture of 20*P and a unit structure period of P. This describes the overall compression process, which is most effective at larger apertures, such as 50mm. Considering only the final ring to illustrate this compression effect, the number of unit structures required for the final ring is floor(2*pi*r / P), which is 448795. Converting this to binary is 1101101100100011011, with a length of 19. This means a 19-level library is required, and then 11 non-zero levels are selected from this library to form the final ring. A total of 20 operations are required to complete the arrangement of 448795 unit structures, significantly reducing the layout file space.

[0067] To more intuitively illustrate the effectiveness of data compression, this example compares the GDS file sizes before and after compression. The results are shown in Table 1. It can be seen that the size of the uncompressed file is proportional to the area of ​​the metalens. Therefore, when the aperture increases to the centimeter level, the layout file quickly increases to the GB or even TB level. However, the compressed layout file is approximately proportional to the metalens aperture. Therefore, this method is highly effective in compressing layout files, resulting in a significantly smaller layout file. In Table 1, when the metalens aperture is 50mm, the estimated uncompressed file size is 10.156TB. The "*" in this example is because the actual layout file size in GDS format was not obtained.

[0068] Figure 4 This is a view of the central portion of the metalens layout file generated after the compression algorithm.

[0069] Table 1 Comparison results

[0070]

[0071]

[0072] As can be seen in Table 1, the compression method designed in this embodiment for compressing large amounts of data in large-aperture metalens layouts was used to design a layout file for a metalens with a circular layout, achieving excellent compression. The designed layout file can be opened and displayed normally on a computer without losing the position and radius information of each building block on the metalens. This embodiment achieves compression of terabyte-scale layout files to megabyte-scale (all layout files mentioned in this embodiment are in .gds format), demonstrating superior compression capabilities without losing detailed information about the building blocks on the metalens.

[0073] This embodiment provides a meta-lens layout design file data compression system, including:

[0074] a data acquisition module configured to obtain unit structure parameters for generating a metalens layout design file;

[0075] A unit structure design module is used to divide the aperture of the metalens into a plurality of circular ring regions of different radii according to the design requirements of the metalens; and to place unit structures in the circular ring regions of different radii based on the unit structure parameters;

[0076] The drawing module is used to combine unit structures arranged at different radii to complete the drawing of the metalens.

[0077] In practice, this embodiment provides an electronic device, including a memory and a processor, wherein the memory is used to store a computer program, and the processor runs the computer program to enable the electronic device to execute the method for compressing data of a meta-lens layout design file.

[0078] This embodiment further provides a computer-readable storage medium storing a computer program, which implements the method for compressing meta-lens layout design file data when executed by a processor.

[0079] The above description is merely a preferred embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A method for compressing meta-lens layout design file data, characterized in that: include: Step S1: Obtaining unit structure parameters for generating a metalens layout design file; Step S2: Dividing the aperture of the metalens into a plurality of circular regions with different radii according to the design requirements of the metalens; placing unit structures in the circular regions with different radii based on the unit structure parameters; Step S3: Combine the unit structures arranged at different radii to complete the drawing of the metalens.

2. The method according to claim 1, characterized in that The step S2 specifically includes: dividing the aperture of the metalens into a plurality of circular areas with different radii according to the design requirements of the metalens, dividing the circular areas with the same radius into combinations of different levels, and placing unit structures at each level.

3. The method according to claim 2, characterized in that Placing unit structures at various levels specifically includes: Calculate the number of unit structures that need to be placed at the current radius position, and express the number of unit structures in binary form as a sequence. The length of the sequence is the number of levels that the current radius needs to be divided into. Performing hierarchical division based on the number of levels and calculating the hierarchical structure of each level; The hierarchical structure number at the current radial position is determined based on the sequence, and the unit structure at the corresponding radial position is drawn based on the hierarchical structure number.

4. The method according to claim 3, characterized in that The hierarchical division based on the number of levels specifically includes: The i-th level contains two i-1-th level structures, one of which is rotated by 2^(i-2)θ, where θ is the rotation angle.

5. The method according to claim 3, characterized in that The determining of the hierarchical structure number at the current radius position based on the sequence specifically includes: Items that are not 0 are selected from the sequence to form a new sequence, and the hierarchical structure number at the current radius position is obtained.

6. A meta-lens layout design file data compression system, characterized in that: include: a data acquisition module configured to obtain unit structure parameters for generating a metalens layout design file; A unit structure design module is used to divide the aperture of the metalens into multiple circular areas of different radii according to the design requirements of the metalens; placing unit structures in circular areas of different radii based on the unit structure parameters; The drawing module is used to combine unit structures arranged at different radii to complete the drawing of the metalens.

7. An electronic device, characterized in that: The electronic device comprises a memory and a processor, wherein the memory is used to store a computer program, and the processor runs the computer program to enable the electronic device to execute a method for compressing metalens layout design file data according to any one of claims 1 to 5.

8. A computer-readable storage medium, characterized in that It stores a computer program, which, when executed by a processor, implements a meta-lens layout design file data compression method as described in any one of claims 1 to 5.

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