Jig correction method and operation equipment

Abstract

The invention provides a jig correction method and operation equipment. The jig correction method comprises the following steps of: providing a jig which is positioned in a carrying flow path capable of carrying an object to be carried and can selectively hold the object to be carried; providing an operation device, wherein the operation device is provided with a distance sensor; the operating device is driven to move to the position above the jig, the distance sensor measures different positions of the jig to obtain a plurality of measured values, and the horizontal angle of the jig is adjusted according to the measured values; therefore, the levelness of the jig can be automatically measured, and the levelness is used as a basis for subsequently adjusting the horizontal angle of the jig.

Description

Technical Field

[0001] The present invention relates to a calibration method and an operating device, and in particular to a jig calibration method and an operating device for performing horizontal calibration on a jig in a conveying flow path. Background Art

[0002] In semiconductor processing, there is often a need to transport an object to be transported to an operation area using a track, and to use an operating device to perform a predetermined operation on the object to be transported. The track is generally composed of two rail frames arranged in parallel and two belts located on opposite inner sides of the two rail frames. The object to be transported is placed on the two belts with its two sides. When the object to be transported is transported to the operation area, a fixture between the two rail frames will rise to hold the object to be transported. After the operating device completes the predetermined operation on the object to be transported, the fixture will descend to release the object to be transported and continue to be transported by the belts. The fixture can be, for example, described in Patent No. 1624307 "Carrier Transport Method and Apparatus" and Patent No. 1760977 "Heat Dissipation Pad Lamination Method and Equipment."

[0003] In the prior art, the object to be transported typically needs to be in a horizontal state for the working device to perform the preset operation. Because the jig must maintain the object to be transported in a horizontal state while holding it, the levelness of the jig must be measured and adjusted after the jig is installed. The conventional method for measuring the levelness of the jig is for the operator to place a measuring tool such as a level ruler or an angle gauge on the jig to confirm whether the jig is flat. However, this method requires the operator to obtain the measuring tool before measurement can be performed. Not only is the timeliness insufficient, but manual measurement also adds a lot of uncertainty. Summary of the Invention

[0004] Therefore, an object of the present invention is to provide a fixture calibration method that can improve at least one disadvantage of the prior art.

[0005] Another object of the present invention is to provide an operating device that can improve at least one disadvantage of the prior art.

[0006] Another object of the present invention is to provide an operating device that can be used to perform the fixture calibration method.

[0007] A jig calibration method according to the present invention includes: providing a jig positioned in a conveying flow path capable of conveying an object to be conveyed and capable of selectively holding the object to be conveyed; providing an operating device equipped with a distance sensor; driving the operating device to move above the jig, causing the distance sensor to measure different positions of the jig to obtain multiple measurement values, and adjusting the horizontal angle of the jig based on the measurement values.

[0008] The work equipment according to another object of the present application comprises: a track device provided with a track for carrying a workpiece; a jig device provided with a jig for selectively holding the workpiece; a work device provided with a distance sensor; and a driving device for driving the work device to move relative to the jig and measure different positions of the jig by using the distance sensor.

[0009] The work equipment according to another object of the present application can be used to perform the jig calibration method.

[0010] The jig calibration method and the work equipment according to the present application can move the work device relative to the jig and automatically measure the levelness of the jig by using the distance sensor on the work device, so as to serve as a basis for subsequent adjustment of the horizontal angle of the jig. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 FIG. 1 is a perspective view of a work equipment according to an embodiment of the present application;

[0012] Figure 2 FIG. 2 is a top view of a track device and a jig device of the work equipment;

[0013] Figure 3 FIG. 3 is a side view of the jig device provided on a table top;

[0014] Figure 4 FIG. 4 is a perspective view of an adjustment mechanism of the jig device;

[0015] Figure 5 FIG. 5 is a sectional view of the adjustment mechanism;

[0016] Figure 6 FIG. 6 is a schematic view of the work device of the work equipment for measuring the jig by using a distance sensor;

[0017] Figure 7 FIG. 7 is a schematic view of the distance sensor for measuring multiple support surfaces of the jig;

[0018] Figure 8 FIG. 8 is a schematic view of the distance sensor for measuring multiple points of a support surface of the jig.

[0019] Figure 9 FIG. 9 is a schematic view of the distance sensor for measuring multiple points of a seat portion of the jig.

[0020] SYMBOL DESCRIPTION

[0021] A: track device

[0022] A1: track

[0023] A11: track frame

[0024] A12: Belt

[0025] A13: Pulley

[0026] A14: Driver

[0027] A2: Stopper mechanism

[0028] A3: Side push mechanism

[0029] B: Jig device

[0030] B1: Jig

[0031] B11: Seat

[0032] B111: Seat surface

[0033] B12: Support

[0034] B121: Support surface

[0035] B2: Lifting mechanism

[0036] B21: Fixed seat

[0037] B22: Driver

[0038] B221: Push rod

[0039] B23: Lifting seat

[0040] B24: Guide rod

[0041] B3: Adjustment mechanism

[0042] B31: Base

[0043] B311: Fixed hole

[0044] B32: Adjustment seat

[0045] B321: Pivot hole

[0046] B322: Adjustment hole

[0047] B323: Step portion

[0048] B33: Fixing member

[0049] B331: Fixed portion

[0050] B332: Body portion

[0051] B333: Head portion

[0052] B34: Elastic member B35: Adjustment member B351: Abutting portion B352: Adjustment portion B36: Bracket

[0053] B4: Pedestal

[0054] C: work device

[0055] C1: distance sensor C2: work head

[0056] C3: visual alignment assembly C31: image pickup device C32: light source group

[0057] D: drive device

[0058] L1: longitudinal axis

[0059] L2: lateral axis

[0060] R: conveyance flow path

[0061] S1: first measurement point S2: second measurement point S3: third measurement point S4: fourth measurement point T: stage surface

[0062] W: conveyance object W1: work object W11: wafer

[0063] W12: substrate

[0064] W2: carrier plate

[0065] W21: placement area W22: cutout

[0066] W23: limit pin DETAILED DESCRIPTION

[0067] Referring to Figure 1 , the jig correction method of the embodiments of the present application can be described by way of example using a work device as shown in the drawings, which is provided with:

[0068] a track device A provided with a track A1 that can convey a conveyance object W;

[0069] a jig device B provided with a jig B1 that can selectively hold the conveyance object W;

[0070] a work device C provided with a distance sensor C1;

[0071] a drive device D that can drive the work device C to displace relative to the jig B1 and measure different positions of the jig B1 using the distance sensor C1.

[0072] Referring to Figure 1 , 2In the embodiment of the present application, the workpiece W is a carrier W2 carrying a workpiece W1, the carrier W2 is provided with a plurality of carrier areas W21 arranged in a matrix and a plurality of holes W22 corresponding to the carrier areas W21; the carrier area W21 is surrounded by a plurality of limiting pins W23 and can accommodate the workpiece W1, each carrier area W21 can accommodate one workpiece W1, so that the carrier W2 can accommodate a plurality of workpieces W1; the workpiece W1 can carry, for example, a substrate W12 carrying a wafer W11; the carrier W2 can be, for example, a Boat commonly used in the industry;

[0073] The track device A is arranged on a machine table T, the track device A is provided with a stop mechanism A2 at the end of the track A1, which can selectively lift to stop the movement of the workpiece W, and a side pushing mechanism A3 is arranged on one side of the track A1, which can side push the workpiece W; the track A1 is provided with two parallel rail frames A11, two belts A12 located on the opposite inner sides of the two rail frames A11, a plurality of pulleys A13 through which the belts A12 can pass, and a driver A14 which can drive the pulleys A13 to rotate; the two sides of the workpiece W can be placed on the two belts A12, and the driver A14 drives the pulleys A13 to rotate, so that the pulleys A13 drive the two belts A12 to convey the workpiece W in a conveying flow path R.

[0074] Please refer to Figure 2 、 3 The jig device B is arranged on the machine table T, the jig device B is provided with a lifting mechanism B2 which can selectively lift the jig B1, an adjusting mechanism B3 which can adjust the level of the jig B1, and a seat B4 on which the jig B1 is arranged;

[0075] The jig B1 is arranged in the conveying flow path R of the track A1 and located between the two rail frames A11, the jig B1 is provided with a seat portion B11 and a plurality of support portions B12 arranged in a matrix and protruding upward from the seat portion B11; the seat portion B11 and the support portions B12 both have a slightly rectangular appearance when viewed from the top; the seat portion B11 is provided with a seat surface B111 which can support the carrier W2; the support portions B12 can correspond to the carrier areas W21 and can pass through the holes W22, each support portion B12 is provided with a support surface B121 which can support the workpiece W1, the support surface B121 is slightly rectangular;

[0076] The lifting mechanism B2 is provided with a fixing seat B21 fixed to the machine table T, a driver B22 arranged below the fixing seat B21, a lifting seat B23 arranged above the fixing seat B21, and a plurality of guide rods B24 connected to the lifting seat B23 and penetrating through the fixing seat B21; the driver B22 can drive the push rod B221 penetrating through the fixing seat B21 to move up and down to drive the lifting seat B23 to lift and lower;

[0077] The adjusting mechanism B3 is arranged on the lifting mechanism B2 and connected to the lifting seat B23, and the pedestal B4 is arranged on the adjusting mechanism B3 and connected to the jig B1, so that when the lifting seat B23 lifts and lowers, the jig B1 can be connected and lifted and lowered together; when the jig B1 rises, the jig B1 can hold the to-be-transported object W, so that the support part B12 can penetrate through the hole W22 and lift the to-be-worked object W1 and the carrier disc W2 apart by the support surface B121, and make the carrier disc W2 fall on the seat surface B111 of the seat part B11, and be lifted apart from the belt A12 by the seat surface B111 of the seat part B11; when the jig B1 descends, the jig B1 releases the holding of the to-be-transported object W, the carrier disc W2 returns to the belt A12, and the to-be-worked object W1 returns to the carrier disc W2; wherein the pedestal B4 can be provided with a heater or a gas passage is opened, so that the jig B1 can adjust the temperature of the to-be-worked object W1 or can adsorb and hold the to-be-worked object W1.

[0078] Please refer to Figure 3 、 4 、5, the adjusting mechanism B3 is provided with a base B31 connected to the lifting seat B23, an adjusting seat B32 capable of moving relative to the base B31, a plurality of fixing members B33, a plurality of elastic members B34, a plurality of adjusting members B35, and two supports B36 arranged on the adjusting seat B32 and connected to the pedestal B4;

[0079] The base B31 has a slightly rectangular appearance when viewed from the top, and the base B31 is provided with a plurality of fixing holes B311 for fixing one end of the fixing member B33, the number of the fixing holes B311 is three, and the fixing holes B311 are distributed in a slightly isosceles triangle shape at each corner of the isosceles triangle on the base B31, two of the three fixing holes B311 are located at two corners on one side of the base B31, and also at two equal angles of the isosceles triangle, and the other fixing hole B311 is located on the other side of the base B31;

[0080] The adjusting seat B32 is arranged above the base B31 and has a rectangular appearance in the top view, and is provided with a plurality of pivot holes B321 for the fixing members B33 to pass through and a plurality of adjusting holes B322 for the adjusting members B35 to pass through; the adjusting seat B32 is provided with a step B323 in each of the pivot holes B321, and each of the adjusting holes B322 is arranged beside each of the pivot holes B321 and has an internal thread; the number of the pivot holes B321 is three, and they are arranged in an isosceles triangle on the adjusting seat B32, two of the three pivot holes B321 are arranged at the two corners on one side of the adjusting seat B32 and also at the two equal angles of the isosceles triangle, and the other pivot hole B321 is arranged on the other side of the adjusting seat B32; in other words, the fixing holes B311 and the pivot holes B321 correspond to each other;

[0081] The number of the fixing members B33 is three, and each of the fixing members B33 is composed of a fixing part B331, a body part B332, and a head part B333; the fixing member B33 can pass through the pivot hole B321 of the adjusting seat B32 and is fixed by embedding the fixing part B331 into the fixing hole B311 of the base B31, the body part B332 can pass through the pivot hole B321, and the width of the head part B333 is greater than that of the body part B332;

[0082] The number of the elastic members B34 is three, and each of the elastic members B34 is arranged outside the body part B332 of each of the fixing members B33 and elastically supports between the head part B333 of each of the fixing members B33 and the step B323 of the adjusting seat B32, so that the elastic member B34 can provide a force for the adjusting seat B32 to move towards the base B31;

[0083] The number of the adjusting members B35 is three, and each of the adjusting members B35 is composed of a contact part B351 and an adjusting part B352 with an external thread; the adjusting member B35 can pass through the adjusting seat B32 and be screwed into the adjusting hole B322 by the adjusting part B352, and the contact part B351 abuts against the base B31; when the adjusting member B35 is screwed into the adjusting hole B322, the adjusting seat B32 can move upwards and accumulate the elastic restoring force of the elastic member B34; when the adjusting member B35 is unscrewed from the adjusting hole B322, the adjusting seat B32 can move downwards and release the elastic restoring force of the elastic member B34; in other words, the adjusting member B35 can provide a force for the adjusting seat B32 to move away from the base B31;

[0084] The number of the fixing holes B311 and the pivot holes B321 is not limited to three, and can be four, respectively located at four corners of the base B31 and the adjusting seat B32. The number of the fixing members B33, the elastic members B34, and the adjusting members B35 is also respectively four.

[0085] Please refer to Figure 1 、 6 The distance sensor C1 of the work device C is arranged between a work head C2 and a visual alignment assembly C3.

[0086] In the embodiment of the present application, the distance sensor C1 can be a non-contact distance sensor such as an eddy current distance sensor, but is not limited thereto, and can also be a contact distance sensor such as a distance probe. The work head C2 is a coating head capable of coating a liquid material on the workpiece W1, but is not limited thereto, and can also be a head capable of attaching a thermal interface material to the workpiece W1 or a head capable of planting a heat sink on the workpiece W1. The visual alignment assembly C3 is provided with an image sensor C31 arranged above and a light source assembly C32 arranged below. The driving device D can be a combination of multiple axial gantry tracks.

[0087] After the workpiece W is conveyed to the upper side of the jig B1, the jig B1 is raised to hold the workpiece W, and after the visual alignment assembly C3 confirms the position of the workpiece W1 on the workpiece W, the driving device D drives the work device C to displace to a corresponding position to perform a predetermined work on the workpiece W1.

[0088] In the embodiment of the present application, the work equipment needs to correct the jig B1 before performing a predetermined work on the workpiece W1. The correction of the jig includes measuring the levelness of the jig B1 and adjusting the horizontal angle of the jig B1, and when the jig is corrected, the workpiece W has not been placed on the track A1 for conveying.

[0089] The jig correction method comprises:

[0090] The driving device D drives the work device C to displace to the upper side of the jig B1, and the distance sensor C1 measures different positions of the jig B1 to obtain a plurality of measurement values and adjusts the horizontal angle of the jig B1 according to the measurement values.

[0091] When measuring the levelness of the jig B1, please refer to Figure 7The distance sensor C1 measures the support surface B121 of the support portion B12. The different positions (indicated by ⊕) are distributed on the support surface B121 of the support portion B12 of the jig B1. The seat portion B11 is divided into four regions by a longitudinal axis L1 and a transverse axis L2 intersecting the center of the seat portion B11. The different positions are distributed in different regions. For example, the distance sensor C1 measures a first measurement value of 50.05 mm at a first measurement point S1 located at the left front corner, a second measurement value of 50.05 mm at a second measurement point S2 located at the left rear corner, a third measurement value of 51.15 mm at a third measurement point S3 located at the right front corner, and a fourth measurement value of 51.15 mm at a fourth measurement point S4 located at the right rear corner. It can be determined that the jig B1 is tilted to one side with the left higher and the right lower. Alternatively, please refer to Figure 8 The different positions (indicated by ⊕) are distributed on the support surface B121 of the same support portion B12 of the jig B1. The different positions are preferably four different corner positions of the same support surface B121. Alternatively, please refer to Figure 9 The different positions (indicated by ⊕) are distributed on the four different corner positions of the seat surface B111 of the seat portion B11 of the jig B1. Before measuring the levelness of the jig B1, the vision alignment assembly C3 of the work device C can first confirm the positions of the measurement points in the jig B1. When the difference between the measurement values exceeds the predetermined range, the horizontal angle of the jig B1 needs to be adjusted. When adjusting the horizontal angle of the jig B1, the operator can refer to the height difference of each measurement point, adjust the rotation of each adjustment hole B322 by adjusting each adjustment member B35, and make the position of the adjustment seat B32 provided with each adjustment hole B322 away from or close to the base B31, so as to adjust the measurement points of the jig B1 to the same level. In the embodiment of the present application, the operator only needs to adjust the horizontal angle of the jig B1 to the difference between the measurement values of each measurement point within the predetermined range, and does not need to adjust to the same measurement value.

[0092] The jig correction method and the work equipment of the embodiment of the present application. The work device C can move relative to the jig B1, and the distance sensor C1 on it automatically measures the levelness of the jig B1, which serves as the basis for subsequent adjustment of the horizontal angle of the jig B1.

[0093] The above only describes the embodiments of the present application, which cannot limit the scope of the present application. Any simple equivalent changes and modifications made according to the content of the patent application and the patent specification are still within the scope of the present application.

Claims

1. A jig calibration method, comprising: providing a jig located in a conveying flow path of a conveying device for conveying a conveyed object and selectively holding the conveyed object; providing a work device provided with a distance sensor; driving the work device to be displaced above the jig, and measuring different positions of the jig by the distance sensor to obtain a plurality of measurement values and adjusting a horizontal angle of the jig according to the measurement values.

2. The jig correction method of claim 1, wherein, The jig is provided with a seat and a plurality of support portions protruding from the seat, each of the support portions is provided with a support surface, and the distance sensor measures the support surfaces.

3. The jig correction method of claim 2, wherein, The different positions are distributed in the support surfaces of different support portions.

4. The jig correction method of claim 3, wherein, The seat and the support portions have a substantially rectangular appearance in a top view, and each of the support portions is arranged in the seat in a matrix manner, the seat is divided into four regions by a longitudinal axis and a transverse axis intersecting at a center of the seat, and the different positions are distributed in different regions.

5. The jig correction method of claim 2, wherein, The different positions are distributed in the support surface of the same support portion.

6. The jig correction method of claim 5, wherein, The support surface is rectangular, and the different positions are corner positions of the support surface.

7. The jig correction method of claim 1, wherein, The jig is provided with a seat and a plurality of support portions protruding from the seat, the distance sensor measures the seat, the seat has a substantially rectangular appearance in a top view, and the different positions are corner positions of the seat.

8. The jig correction method of claim 1, wherein, The work device is provided with a visual alignment assembly, and the visual alignment assembly confirms a position of a measurement point before the distance sensor measures the jig.

9. A work apparatus, comprising: a track device provided with a track for conveying a conveyed object; a jig device provided with a jig for selectively holding the conveyed object; a work device provided with a distance sensor; a driving device for driving the work device to be displaced relative to the jig and measuring different positions of the jig by the distance sensor.

10. The work apparatus according to claim 9, wherein The jig is located in the conveying flow path of the track and between two track frames, the jig is provided with a seat and a plurality of support portions protruding upward from the seat, each of the support portions is provided with a support surface, and the distance sensor measures the support surfaces of the support portions.

11. The work apparatus according to claim 9, wherein The jig device is provided with a lifting mechanism for selectively lifting the jig, an adjusting mechanism for adjusting a horizontal angle of the jig, and a base for the jig; the adjusting mechanism is arranged on the lifting mechanism, and the base is arranged on the adjusting mechanism.

12. The work apparatus according to claim 11, wherein The adjusting mechanism is provided with a base, an adjusting seat, a plurality of elastic members, and a plurality of adjusting members; the elastic members provide a force for the adjusting seat to approach the base, and the adjusting members provide a force for the adjusting seat to move away from the base.

13. The work apparatus according to claim 9, wherein The work device is provided with a work head and a visual alignment assembly; the work head performs a predetermined work on the conveyed object, and the visual alignment assembly confirms a position of a measurement point in the jig.

14. A work apparatus for performing the jig calibration method according to any one of claims 1 to 8.

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