Low-power-consumption high-voltage pulse excitation circuit for MEMS capacitive sensor

Abstract

The invention discloses a low-power-consumption high-voltage pulse excitation circuit for an MEMS capacitive sensor, and solves the non-ideal problems that the power consumption is improved, the energy efficiency is reduced, the driving capability is reduced and the like when high-voltage pulse excitation is adopted in the prior art. The circuit comprises N stages of charge pump modules which are respectively used for boosting input voltage stage by stage and outputting direct-current boosting voltage corresponding to the charge pump modules; the first-stage energy storage module is used for storing the direct-current boost voltage output by the first charge pump module; the (N-1)-stage feed-forward energy storage modules are respectively used for storing direct-current boost voltages correspondingly output by the second charge pump module to the Nth charge pump module in the N-stage charge pump modules; the energy recovery high-voltage pulse generator is used for realizing dual-load energy multiplexing and alternate high-voltage excitation according to the time sequence control signal; according to the circuit, high efficiency during high-voltage pulse excitation is realized, the capacitance density is increased, and the chip area is reduced.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit technology, and in particular to a low-power high-voltage pulse excitation circuit for capacitive sensors in MEMS (Micro Electro-Mechanical System). Background Technology

[0002] MEMS accelerometers are inertial sensors based on variable capacitance, characterized by low power consumption, small size, and light weight. As a key sensor component in the field of inertial sensing, MEMS accelerometers are widely used in consumer electronics, industrial, automotive, and aerospace applications. These applications require MEMS accelerometers to have low-noise output for accurate measurement of structural horizontal angles or tilt angles, and from the perspective of scale and cost in industrial applications, the overall size and power consumption of MEMS accelerometers must also be kept at a low level.

[0003] High-voltage pulse excitation technology is a key technology for overcoming electrode trace noise, reducing circuit noise, and improving system energy efficiency in MEMS accelerometers. The design challenge lies in dealing with significant dynamic power. (L. Zhong et al., "A0.64mm²Sensor Size, 32.5μg / √Hz Noise Floor, High Efficiency MEMS CapacitiveAccelerometer Using High-Voltage Pulse Excitation Technique," 2024 IEEE Custom Integrated Circuits Conference (CICC), Denver, CO, USA, 2024, pp. 1-2, doi: 10.1109 / CICC60959.2024.10528969.) This paper uses a single-axis MEMS accelerometer system. If the high-voltage pulse excitation technology is applied to a multi-axis MEMS accelerometer system, the increased capacitive load will cause the high-voltage pulse excitation to consume more dynamic power, severely degrading the system's energy efficiency and driving capability. Therefore, when traditional technologies use high-voltage pulse excitation under heavy load conditions, there are non-ideal problems such as increased power consumption, reduced energy efficiency, and decreased driving capability. Summary of the Invention

[0004] This invention provides a low-power high-voltage pulse excitation circuit for MEMS capacitive sensors, which solves the non-ideal problems of increased power consumption, reduced energy efficiency and reduced driving capability in the prior art when using high-voltage pulse excitation. It achieves high efficiency when using high-voltage pulse excitation, and increases capacitance density while reducing chip area.

[0005] This invention provides a low-power high-voltage pulse excitation circuit for MEMS capacitive sensors, the circuit comprising: The system comprises an N-stage charge pump module, a first-stage energy storage module, an N-1-stage feedforward energy storage module, an energy recovery high-voltage pulse generator, a first high-voltage pulse load module, and a second high-voltage pulse load module. The N-stage charge pump module is used to progressively boost the input voltage and output a DC boost voltage corresponding to the charge pump module; wherein, N≥2; The first-stage energy storage module is used to store the DC boost voltage output by the first charge pump module; The N-1 level feedforward energy storage modules are used to store the DC boost voltages output by the second to the Nth level charge pump modules in the N-level charge pump module, respectively. The energy recovery high-voltage pulse generator is used to conduct the energy transmission path from the N-1th stage feedforward energy storage module to the first high-voltage pulse load module during the positive excitation period according to the timing control signal, and at the same time conduct the energy discharge path from the second high-voltage pulse load module to the ground. According to the timing control signal, during the energy recovery period, the residual energy recovery path from the first high-voltage pulse load module to the first-stage energy storage module and the M-stage feedforward energy storage module is turned on, and the energy transfer path from the first-stage energy storage module and the M-stage feedforward energy storage module to the second high-voltage pulse load module is turned on simultaneously; wherein, the M-stage feedforward energy storage module includes: the first-stage feedforward energy storage module to the (N-2)th stage feedforward energy storage module; According to the timing control signal, during the excitation setting period, the discharge path from the first high-voltage pulse load module to ground is turned on, and at the same time, the energy transmission path from the N-1th stage feedforward energy storage module to the second high-voltage pulse load module is turned on, so as to realize dual-load energy reuse and alternating high-voltage excitation.

[0006] In one possible implementation, the topology of the feedforward energy storage module is a bridging capacitor network; wherein the k-th stage feedforward energy storage module is connected between the output of the k-th stage charge pump module and the output of the (k+1)-th stage charge pump module, 1≤k≤N-1.

[0007] In one possible implementation, the energy recovery period includes: The residual energy recovery of the first high-voltage pulse load module and the pre-charging of the second high-voltage pulse load module are performed simultaneously; wherein: The residual energy recovery of the first high-voltage pulse load module includes: The residual energy of the first high-voltage pulse load module is transferred to the first-stage energy storage module; The residual energy of the first high-voltage pulse load module is transferred to the M-level feedforward energy storage module; wherein, the M-level feedforward energy storage module includes: the first-level feedforward energy storage module to the (N-2)th-level feedforward energy storage module; Pre-charging of the second high-voltage pulse load module includes: The energy from the first-stage energy storage module is transferred to the second high-voltage pulse load module; The energy from the M-level feedforward energy storage module is transferred to the second high-voltage pulse load module; wherein, the M-level feedforward energy storage module includes: the first-level feedforward energy storage module to the (N-2)th-level feedforward energy storage module.

[0008] In one possible implementation, during the positive excitation period, the energy recovery period, and the excitation setting period, the sum of the first high-voltage pulse excitation level output by the first high-voltage pulse load module and the second high-voltage pulse excitation level output by the second high-voltage pulse load module remains constant.

[0009] In one possible implementation, the N-stage charge pump module includes: a Dickson charge pump, a cross-coupled charge pump, or a voltage multiplier charge pump.

[0010] In one possible implementation, the first-stage energy storage module and the N-1-stage feedforward energy storage module include: a combination of stacked MIM capacitors and MOM capacitors, a combination of stacked MIM capacitors and trap capacitors, or a combination of stacked MOM capacitors and trap capacitors.

[0011] One or more technical solutions provided in this invention have at least the following technical effects or advantages: This invention recovers the residual charge on the first high-voltage pulse load after excitation during the energy recovery period, storing it in the first-stage energy storage module and the M-stage feedforward energy storage module, avoiding the waste caused by traditional discharge. Simultaneously, the energy from the first-stage and M-stage feedforward energy storage modules is transferred to the second high-voltage pulse load module to prepare for its subsequent excitation, achieving internal energy reuse. The M-stage feedforward energy storage module includes the first-stage to the (N-2)th stage feedforward energy storage modules. The dual-load alternating operation mode makes the boost circuit operate more continuously, reducing losses from frequent start-stop cycles. The circuit is specifically designed to drive two high-voltage loads, achieving load and energy reuse through precise timing control: while one load is excited, the other discharges or prepares; and the residual energy from the excited load is recovered and used to prepare the other load for charging. This direct energy reuse and rapid switching between loads improves excitation efficiency. The feedforward energy storage module stores intermediate high voltage, which can quickly supply energy to the load during the excitation period, reducing pulse setup time. Energy recovery replenishes the primary energy storage, and the relatively continuous load resulting from alternating dual loads contributes to the stable and efficient operation of the boost circuit. The core innovation and value of this circuit lies in the timing-controlled alternating excitation mechanism of energy recovery and dual-load energy reuse, significantly reducing system power consumption. It effectively recovers residual energy wasted in traditional designs and reuses it between the two loads. Combined with feedforward storage and optimized boost circuit operation, it provides an effective solution for MEMS capacitive sensors requiring low-power, high-efficiency dual high-voltage pulse excitation. This circuit addresses the high-voltage pulse excitation requirements of MEMS capacitive sensors by achieving alternating excitation of energy recovery and dual-load multiplexing through innovative timing control, significantly reducing power consumption. The core beneficial effect is a significant reduction in power consumption, mainly manifested in the recovery of residual energy and energy transfer multiplexing. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of a low-power high-voltage pulse excitation circuit for MEMS capacitive sensors. Figure 2 A schematic diagram of the circuit structure of a first-stage energy recovery high-voltage pulse excitation generator provided in an embodiment of the present invention; Figure 3 A circuit diagram of a primary energy recovery high-voltage pulse excitation generator provided for an embodiment of the present invention; Figure 4 Signal timing diagram of a first-stage energy recovery high-voltage pulse excitation generator provided in an embodiment of the present invention; Figure 5 A schematic diagram of the circuit structure of a two-stage energy recovery high-voltage pulse excitation generator provided in an embodiment of the present invention; Figure 6 Circuit diagram of a two-stage energy recovery high-voltage pulse excitation generator provided in an embodiment of the present invention; Figure 7 The signal timing diagram of the two-stage energy recovery high-voltage pulse excitation generator provided in the embodiment of the present invention. Detailed Implementation

[0013] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0014] This invention provides a low-power high-voltage pulse excitation circuit for MEMS capacitive sensors, see [link to relevant documentation]. Figure 1 The circuit includes: The system consists of an N-stage charge pump module, a first-stage energy storage module, an N-1-stage feedforward energy storage module, an energy recovery high-voltage pulse generator, a first high-voltage pulse load module, and a second high-voltage pulse load module.

[0015] N-stage charge pump modules are used to progressively boost the input voltage and output a DC boost voltage corresponding to the charge pump module; where N≥2; Here, the N-stage charge pump module includes: a Dickson charge pump, a cross-coupled charge pump, or a voltage multiplier charge pump. The circuit connection of a specific charge pump module is given below.

[0016] Specifically, the charge pump module includes: a first switch K1, a second switch K2, and a first boost capacitor C1; the first terminal of the first switch K1 is connected to the input voltage; the second terminal of the first switch K1 is connected to the first terminal of the first boost capacitor C1 and the first terminal of the second switch K2; the second terminal of the second switch K2 is connected to the output DC boost voltage; and the second terminal of the first boost capacitor C1 is connected to the square wave excitation signal.

[0017] The first-stage energy storage module is used to store the DC boost voltage output by the first charge pump module; Specifically, the first-stage energy storage module includes: a first MIM capacitor C MIM First MOM capacitor C MOM and the first well capacitor C NW Among them, the first MIM capacitor C MIM The first terminal and the first MOM capacitor C MOM First terminal, first well capacitor C NW The first terminal and the output terminal of the first charge pump module are connected; the first MIM capacitor C MIM The second terminal is connected to the first MOM capacitor C MOM The second terminal and the first well capacitor CNW The second terminal is grounded.

[0018] The N-1 level feedforward energy storage modules are used to store the DC boost voltages output by the second to the Nth level charge pump modules in the N-level charge pump module, respectively. Here, the topology of the feedforward energy storage module is a bridging capacitor network; wherein, the k-th stage feedforward energy storage module is connected between the output terminal of the k-th stage charge pump module and the output terminal of the (k+1)-th stage charge pump module, 1≤k≤N-1.

[0019] Energy recovery high-voltage pulse generator, used for: (1) According to the timing control signal, during the positive excitation period, the energy transmission path from the N-1th stage feedforward energy storage module to the first high-voltage pulse load module is turned on, and the energy discharge path from the second high-voltage pulse load module to the ground is turned on at the same time. Here, during both the positive excitation period and the excitation setting period, the amplitude of the output high-voltage pulse is equal to the difference between the DC boost voltage output by the Nth stage charge pump module and the DC boost voltage output by the (N-1)th stage charge pump module.

[0020] (2) According to the timing control signal, during the energy recovery period, the residual energy recovery path from the first high-voltage pulse load module to the first-stage energy storage module and the M-stage feedforward energy storage module is turned on, and the energy transfer path from the first-stage energy storage module and the M-stage feedforward energy storage module to the second high-voltage pulse load module is turned on simultaneously; wherein, the M-stage feedforward energy storage module includes: the first-stage feedforward energy storage module to the N-2th stage feedforward energy storage module; Here, the energy recovery period includes: simultaneously performing residual energy recovery from the first high-voltage pulse load module and pre-charging of the second high-voltage pulse load module; wherein: Residual energy recovery from the first high-voltage pulse load module includes: (1) Transfer the residual energy of the first high-voltage pulse load module to the first-stage energy storage module; (2) The residual energy of the first high-voltage pulse load module is transferred to the M-level feedforward energy storage module; wherein, the M-level feedforward energy storage module includes: the first-level feedforward energy storage module to the N-2-th level feedforward energy storage module; Pre-charging of the second high-voltage pulse load module includes: (1) Transfer the energy from the first-stage energy storage module to the second high-voltage pulse load module; (2) Transfer the energy from the M-level feedforward energy storage module to the second high-voltage pulse load module; The M-level feedforward energy storage module includes: the first-level feedforward energy storage module to the N-2-level feedforward energy storage module.

[0021] (3) According to the timing control signal, during the excitation setting period, the discharge path from the first high-voltage pulse load module to the ground is turned on, and the energy transmission path from the N-1 level feedforward energy storage module to the second high-voltage pulse load module is turned on, so as to realize dual load energy reuse and alternating high-voltage excitation.

[0022] In one specific embodiment provided by the invention, see [link to specific embodiment]. Figure 2 ,include: First-stage charge pump module 101, first-stage energy storage module 102, first-stage charge pump module 103, first-stage feedforward energy storage module 105, energy recovery high-voltage pulse generator 107, first high-voltage pulse load module 108, and second high-voltage pulse load module 109.

[0023] Here, the first-stage energy storage module and the N-1-stage feedforward energy storage module include: a combination of MIM capacitors and MOM capacitors stacked together, a combination of MIM capacitors and trap capacitors stacked together, or a combination of MOM capacitors and trap capacitors stacked together.

[0024] See Figure 3 The first-stage charge pump module 101 includes: a first switch K1, a second switch K2, a first boost capacitor C1, and a square wave excitation signal. The output DC voltage is a DC boost voltage VCP1, which is stored in the first-stage energy storage module 102.

[0025] The second-stage charge pump module 103 includes: a third switch K3, a fourth switch K4, a second boost capacitor C2, and a square wave excitation signal. The output DC voltage is a DC boost voltage VCP2, which is stored in the first-stage feedforward energy storage module 105.

[0026] Here, a specific circuit connection method for the energy storage module and the feedforward energy storage module is given. The first-stage energy storage module 102 proposed in Embodiment 1 includes: a first MIM capacitor C MIM First MOM capacitor C MOM and the first well capacitor C NW One end of it is connected to the output of the first-stage charge pump module 101, and the other end is grounded.

[0027] The first-stage feedforward energy storage module 105 includes: a second MIM capacitor C MIM Second MOM capacitor C MOM Second well capacitor C NW One end of it is connected to the output of the first-stage charge pump module 101, and the other end is connected to the output of the second-stage charge pump module 103.

[0028] The first high-voltage pulse load module 108 proposed in Embodiment 1 includes: a seventh switch K7, an eighth switch K8, and a first load capacitor C4.

[0029] The second high-voltage pulse load module 109 proposed in Embodiment 1 includes: a ninth switch K9, a tenth switch K10, and a second load capacitor C5.

[0030] It should be noted that in the embodiments mentioned in this invention, the seventh switch K7, the eighth switch K8, the ninth switch K9, and the tenth switch K10 in the first high-voltage pulse load module 108 and the second high-voltage pulse load module 109 are always closed.

[0031] The energy recovery high-voltage pulse generator 107 proposed in Embodiment 1 includes: a first high-voltage pulse signal generation branch and a second high-voltage pulse signal generation branch.

[0032] See Figure 3 and Figure 4 The first high-voltage pulse signal generation branch includes: switch S1, switch S2 and energy recovery switch S5, control signal P1, control signal P2, and control signal P5; The second high-voltage pulse signal generation branch includes: switch S3, switch S4 and pre-charge switch S6, control signal P3, control signal P4, and control signal P6. Among them, the clocks P2 and P3 are delayed by two pulse widths relative to the clock P1; the clocks P5 and P6 are delayed by one pulse width relative to the clock P1; the clock P4 is in phase with the clock P2.

[0033] Specifically, the first-stage energy recovery high-voltage pulse generator proposed in Embodiment 1 includes three working stages, as follows: In the first stage, P1 controls S1 to turn on, P2 controls S2 to turn off, P3 controls S3 to turn off, P4 controls S4 to turn on, P5 controls the energy recovery switch S5 to turn off, and P6 controls the pre-charge switch S6 to turn off; the first-stage feedforward energy storage module 105 transmits energy to the first high-voltage pulse load module 108, and the first high-voltage pulse signal generates a branch output level VCP2; the second high-voltage pulse load module 109 transmits energy to ground, and the second high-voltage pulse signal generates a branch output level 0.

[0034] In the second stage, P1 controls S1 to turn off, P2 controls S2 to turn off, P3 controls S3 to turn off, P4 controls S4 to turn off, P5 controls the energy recovery switch S5 to turn on, and P6 controls the pre-charge switch S6 to turn on; the first high-voltage pulse load module 108 transmits energy to the first-stage energy storage module 102, and the first high-voltage pulse signal generates the branch output level VCP1; the first-stage energy storage module 102 transmits energy to the second high-voltage pulse load module 109, and the second high-voltage pulse signal generates the branch output level VCP1.

[0035] In the third stage, P1 controls S1 to turn off, P2 controls S2 to turn on, P3 controls S3 to turn on, P4 controls S4 to turn off, P5 controls the energy recovery switch S5 to turn off, and P6 controls the pre-charge switch S6 to turn off; the first high-voltage pulse 108 load transmits energy to ground, and the first high-voltage pulse signal generates a branch output level of 0; the first-stage feedforward energy storage module 105 transmits energy to the second high-voltage pulse load module 109, and the second high-voltage pulse signal generates a branch output level of VCP2.

[0036] In one embodiment provided by the present invention, see Figure 5 The circuit includes: a first-stage charge pump module 101, a second-stage charge pump module 103, a third-stage charge pump module 104, a first-stage energy storage module 102, a first-stage feedforward energy storage module 105, a second-stage feedforward energy storage module 106, an energy recovery high-voltage pulse generator 107, a first high-voltage pulse load module 108, and a second high-voltage pulse load module 109.

[0037] See Figure 6 ,and Figure 7 The first-stage charge pump module 101 includes: a first switch K1, a second switch K2, a first boost capacitor C1, and a square wave excitation signal. The output DC voltage is a DC boost voltage VCP1, which is stored in the first-stage energy storage module 102.

[0038] The second-stage charge pump module 103 includes a third switch K3, a fourth switch K4, a second boost capacitor C2, and a square wave excitation signal. The output DC voltage is a DC boost voltage VCP2, which is stored in the first-stage feedforward energy storage module 105.

[0039] The third-stage charge pump module 104 includes: a fifth switch K5, a sixth switch K6, a third boost capacitor C3, and a square wave excitation signal. The output DC voltage is a DC boost voltage VCP3, which is stored in the second-stage feedforward energy storage module 106.

[0040] The first-stage energy storage module 102 proposed in this embodiment includes: a first MIM capacitor C MIM First MOM capacitor C MOMand the first well capacitor C NW One end of it is connected to the output of the first-stage charge pump module 101, and the other end is grounded.

[0041] The first-stage feedforward energy storage module 105 includes: a second MIM capacitor C MIM Second MOM capacitor C MOM Second well capacitor C NW One end of it is connected to the output of the first-stage charge pump module 101, and the other end is connected to the output of the second-stage charge pump module 103.

[0042] The second-stage feedforward energy storage module 106 includes: a third MIM capacitor C MIM Third MOM capacitor C MOM and the third well capacitor C NW One end of it is connected to the output of the second-stage charge pump module 103, and the other end is connected to the output of the third-stage charge pump module 104.

[0043] The first high-voltage pulse load module 108 includes: a seventh switch K7, an eighth switch K8, and a first load capacitor C4.

[0044] The second high-voltage pulse load module 109 includes: a ninth switch K9, a tenth switch K10, and a second load capacitor C5.

[0045] The energy recovery high-voltage pulse generator 107 includes: a first high-voltage pulse signal generation branch and a second high-voltage pulse signal generation branch; such as Figure 5 As shown, where, The first high-voltage pulse signal generation branch includes: switch S1, switch S2, energy recovery switch S5 and energy recovery switch S7, control signal P1, control signal P2, control signal P5 and control signal P7. The second high-voltage pulse signal generation branch includes: switch S3, switch S4, pre-charge switch S6 and pre-charge switch S8, control signal P3, control signal P4, control signal P6 and control signal P8. Among them, the clocks P2 and P3 are delayed by three pulse widths relative to the clock P1; the clocks P6 and P7 are delayed by two pulse widths relative to the clock P1; the clocks P5 and P8 are delayed by one pulse width relative to the clock P1; and the clock P4 is in phase with the clock P2.

[0046] Specifically, the two-stage energy recovery high-voltage pulse generator of this embodiment includes four operating stages: In the first stage, P1 controls S1 to turn on, P2 controls S2 to turn off, P3 controls S3 to turn off, P4 controls S4 to turn on, P5 controls energy recovery switch S5 to turn off, P6 controls pre-charge switch S6 to turn off, P7 controls energy recovery switch S7 to turn off, and P8 controls pre-charge switch S8 to turn off. The second-stage feedforward energy storage module 106 transmits energy to the first high-voltage pulse load module 108, and the first high-voltage pulse signal generates a branch output level VCP3. The second high-voltage pulse load module 109 transmits energy to ground, and the second high-voltage pulse signal generates a branch output level 0.

[0047] In the second stage, P1 controls S1 to turn off, P2 controls S2 to turn off, P3 controls S3 to turn off, P4 controls S4 to turn off, P5 controls the energy recovery switch S5 to turn on, P6 controls the pre-charge switch S6 to turn off, P7 controls the energy recovery switch S7 to turn off, and P8 controls the pre-charge switch S8 to turn on. The first high-voltage pulse load module 108 transmits energy to the first-stage feedforward energy storage module 105, and the first high-voltage pulse signal generates the branch output level VCP2. The first-stage energy storage module 102 transmits energy to the second high-voltage pulse load module 109, and the second high-voltage pulse signal generates the branch output level VCP1.

[0048] In the third stage, P1 controls S1 to turn off, P2 controls S2 to turn off, P3 controls S3 to turn off, P4 controls S4 to turn off, P5 controls the energy recovery switch S5 to turn off, P6 controls the pre-charge switch S6 to turn on, P7 controls the energy recovery switch S7 to turn on, and P8 controls the pre-charge switch S8 to turn off; the first high-voltage pulse load module 108 transmits energy to the first-stage energy storage module 102, and the first high-voltage pulse signal generates the branch output level VCP1; the first-stage feedforward energy storage module 105 transmits energy to the second high-voltage pulse load module 109, and the second high-voltage pulse signal generates the branch output level VCP2.

[0049] In the fourth stage, P1 controls S1 to turn off, P2 controls S2 to turn on, P3 controls S3 to turn on, P4 controls S4 to turn off, P5 controls the energy recovery switch S5 to turn off, P6 controls the pre-charge switch S6 to turn off, P7 controls the energy recovery switch S7 to turn off, and P8 controls the pre-charge switch S8 to turn off; the first high-voltage pulse load module 108 transmits energy to ground, and the output level of the first high-voltage pulse signal generation branch is 0; the second-stage feedforward energy storage module 106 transmits energy to the second high-voltage pulse load module 109, and the output level of the second high-voltage pulse signal generation branch is VCP3.

[0050] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the present invention.

Claims

1. A low-power high-voltage pulse excitation circuit for MEMS capacitive sensors, characterized in that, include: The system comprises an N-stage charge pump module, a first-stage energy storage module, an N-1-stage feedforward energy storage module, an energy recovery high-voltage pulse generator, a first high-voltage pulse load module, and a second high-voltage pulse load module. The N-stage charge pump module is used to progressively boost the input voltage and output a DC boost voltage corresponding to the charge pump module; wherein, N≥2; The first-stage energy storage module is used to store the DC boost voltage output by the first charge pump module; The N-1 level feedforward energy storage modules are used to store the DC boost voltages output by the second to the Nth level charge pump modules in the N-level charge pump module, respectively. The energy recovery high-voltage pulse generator is used to, according to the timing control signal, during the positive excitation period, conduct the energy transmission path from the N-1th stage feedforward energy storage module to the first high-voltage pulse load module, and at the same time conduct the energy discharge path from the second high-voltage pulse load module to ground; According to the timing control signal, during the energy recovery period, the residual energy recovery path from the first high-voltage pulse load module to the first-stage energy storage module and the M-stage feedforward energy storage module is turned on, and the energy transfer path from the first-stage energy storage module and the M-stage feedforward energy storage module to the second high-voltage pulse load module is turned on simultaneously; wherein, the M-stage feedforward energy storage module includes: the first-stage feedforward energy storage module to the (N-2)th stage feedforward energy storage module; According to the timing control signal, during the excitation setting period, the discharge path from the first high-voltage pulse load module to ground is turned on, and at the same time, the energy transmission path from the N-1th stage feedforward energy storage module to the second high-voltage pulse load module is turned on, so as to realize dual-load energy reuse and alternating high-voltage excitation.

2. The low-power high-voltage pulse excitation circuit for MEMS capacitive sensors according to claim 1, characterized in that, The topology of the feedforward energy storage module is a bridging capacitor network; wherein, the k-th stage feedforward energy storage module is connected between the output terminal of the k-th stage charge pump and the output terminal of the (k+1)-th stage charge pump, 1≤k≤N-1.

3. The low-power high-voltage pulse excitation circuit for MEMS capacitive sensors according to claim 1, characterized in that, The energy recovery period includes: simultaneously performing residual energy recovery from the first high-voltage pulse load module and pre-charging of the second high-voltage pulse load module; wherein: The residual energy recovery of the first high-voltage pulse load module includes: The residual energy of the first high-voltage pulse load module is transferred to the first-stage energy storage module; The residual energy of the first high-voltage pulse load module is transferred to the M-level feedforward energy storage module; wherein, the M-level feedforward energy storage module includes: the first-level feedforward energy storage module to the (N-2)th-level feedforward energy storage module; Pre-charging of the second high-voltage pulse load module includes: The energy from the first-stage energy storage module is transferred to the second high-voltage pulse load module; The energy from the M-level feedforward energy storage module is transferred to the second high-voltage pulse load module; wherein, the M-level feedforward energy storage module includes: the first-level feedforward energy storage module to the (N-2)th-level feedforward energy storage module.

4. The low-power high-voltage pulse excitation circuit for MEMS capacitive sensors according to claim 1, characterized in that, During the positive excitation period, the energy recovery period, and the excitation setting period, the sum of the first high-voltage pulse excitation level output by the first high-voltage pulse load module and the second high-voltage pulse excitation level output by the second high-voltage pulse load module remains constant.

5. The low-power high-voltage pulse excitation circuit for MEMS capacitive sensors according to claim 1, characterized in that, The N-stage charge pump module includes: a Dickson charge pump, a cross-coupled charge pump, or a voltage multiplier charge pump.

6. The low-power high-voltage pulse excitation circuit for MEMS capacitive sensors according to claim 1, characterized in that, The first-stage energy storage module and the N-1-stage feedforward energy storage module include: a combination of stacked MIM capacitors and MOM capacitors, a combination of stacked MIM capacitors and trap capacitors, or a combination of stacked MOM capacitors and trap capacitors.

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