Large-aperture spherical optical element bus on-line detection device and detection method

Abstract

The invention relates to a large-aperture spherical optical element bus on-line detection device which comprises a bottom supporting structure, an X-direction detection assembly and a Z-direction detection assembly. Wherein the supporting mechanism is mainly formed by welding a heavy-load type Foma wheel, a top transverse square pipe, a top mounting plate, a supporting stand column square pipe, a reinforcing rib square pipe and a bottom transverse square pipe; the X-direction detection assembly is mainly composed of a grating ruler, an A servo motor, a speed reducer, a large coupler, a lead screw and a linear guide rail. The detection assembly in the Z direction is mainly composed of a contact type length gauge, a servo motor B, a small coupler and a lead screw module. The device is used for online precise detection of generatrix data of a large-aperture spherical optical element by detection personnel, is especially suitable for large-aperture, heavy-weight and difficult-to-overturn spherical optical elements, and can accurately detect the generatrix data of the large-aperture spherical optical element by adjusting the displacement of the precise detection element in the X and Z directions and the measuring range of the contact type length gauge. And on-line detection is carried out on detected optical element buses with different calibers, thicknesses and bus depths.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of ultra-precision manufacturing and detection of optical elements, and particularly relates to a large-aperture spherical optical element generatrix online detection device and method, which realizes rapid and high-precision online detection of the generatrix of a large-aperture and heavy spherical optical element by integrating a precision displacement detection assembly in the X and Z directions, and is suitable for real-time quality monitoring and feedback in the optical processing process. BACKGROUND

[0002] With the development of science and technology, large-aperture optical elements, especially spherical or aspherical optical elements, are increasingly applied, and the requirements for precision and production capacity are increasingly high. Traditional large-aperture optical element generatrix detection methods mainly rely on spherometer method or template method, which mainly rely on workers and have problems such as large subjective influence of detection results on operators, low sensitivity, and low efficiency. In addition, although interferometer, laser tracker and other high-precision devices can realize surface measurement, they have strict requirements on detection environment (such as temperature, vibration) and spatial layout, and need to be used with large adjustment frame, which is high in cost and low in flexibility.

[0003] In actual production, large-aperture optical elements are often difficult to turn over due to their large weight, resulting in time-consuming and labor-consuming detection process. The existing technology cannot meet the needs of online detection, cannot provide real-time feedback of processing errors, and restricts the improvement of processing precision and the optimization of production efficiency. Therefore, an online detection device with convenient operation and strong environmental adaptability is needed, which can quickly and accurately complete the generatrix parameter detection in the processing site to provide real-time data support for grinding and other processes. SUMMARY

[0004] In order to overcome the above-mentioned deficiencies of the prior art, the present application provides a large-aperture spherical optical element generatrix online detection device and method, which mainly uses a grating ruler and a contact length gauge to measure the displacement change of the spherical generatrix of the optical element in the X and Z directions, respectively, so as to realize process online detection of the generatrix index of the large-aperture spherical optical element and feedback and guide the development of the grinding process.

[0005] In order to solve the above technical problems, the present application provides the following technical solutions:

[0006] A large aperture spherical optical element bus on-line detection device, including support mechanism, X direction detection assembly and Z direction detection assembly. The support mechanism is mainly by heavy load type foma wheel, top horizontal square tube, top mounting plate, support column square tube, reinforcing rib square tube, bottom horizontal square tube welding, the bottom horizontal square tube is connected with movable lifting heavy type foma wheel under, guarantee the movement, leveling and overall stability of support structure when detecting. The X direction detection assembly is mainly by A servo motor, speed reducer, speed reducer base, large coupling, screw rod, screw rod base, stopper, linear guide rail, grating ruler, screw rod sliding table, tank chain support, organ case support plate, detection electrical cabinet,

[0007] screw rod slider, guide rail slider, grating ruler slider, tank chain support and organ case. The top mounting plate is fixed with the speed reducer base, the linear guide rail and the guide rail base by screw connection, the A servo motor and the speed reducer are fixed on the speed reducer base by screw connection, the screw rod penetrating through the screw rod sliding table is driven to rotate by the large coupling, which can stably provide large torque in the X direction; The grating ruler is fixed on the top horizontal square tube, and the grating ruler slider on the grating ruler is fixedly connected with the screw rod sliding table, which records the displacement amount of the length gauge in the X direction in real time, ensuring the accuracy of detection; The detection electrical cabinet is fixed outside the support column square tube, which is used for controlling the movement and stopper of the X direction and Z direction, involving power management and control, signal transmission and processing executor three integrated control, having manual and automatic control function, realizing accurate positioning and overtravel stop function. The Z direction detection assembly is mainly composed of B servo motor, motor flange, screw rod module, screw rod sliding table, module base plate, small coupling, length gauge slider, length gauge base plate, contact type length gauge and length gauge base. The screw rod sliding table is fixed on the guide rail slider by screw connection, the back of the module base plate is fixed on the screw rod sliding table, and the front bears the screw rod module, the B servo motor is directly fixed on the screw rod module, and the screw rod module is driven to move by the small coupling, so that the operation is stable during Z direction detection. The contact type length gauge is locked and fixed on the length gauge base plate through the length gauge base, the length gauge base plate is connected with the screw rod module through the length gauge slider, and the contact type length gauge is driven to a specific position through the 400 module fixed on the screw rod sliding table during detection, and the displacement change amount of the spherical optical element in the Z direction is detected through the range.

[0008] Further technical improvements of the application are that the top horizontal square tube and the top mounting plate on the support mechanism are subjected to heat treatment after welding to eliminate stress, and then subjected to precision machining after heat treatment, and installation grooves of the linear guide rail, the motor base and the screw rod base are machined on the top mounting plate.

[0009] Further technical improvements of the present application are that the support mechanism welding adopts seam welding, the top horizontal pipe is welded with large sealing plates at both ends, the bottom horizontal pipe is welded with small sealing plates at both ends, the support mechanism as a whole adopts paint spraying treatment, the top mounting plate adopts stainless steel material, and the mounting surface adopts anticorrosive oil treatment, which effectively plays a rust and dust prevention role and reduces the influence of external factors on detection.

[0010] Further technical improvements of the present application are that the screw rod sliding table is fixed on the X-direction linear guide rail slider, the upper part is connected with a grating ruler slider, the top is fixed with a tank chain support, the front is fixed with a module base plate, and the two end faces are fixedly connected with an organ case, the two ends of the organ case are respectively fixed by organ case support plates and screw rod sliding table sides, the screw rod slider drives the screw rod sliding table assembly to move, X-direction and Z-direction motion detection elements can be integrated on the screw rod slider, and the rigidity of motion and the accuracy of detection are ensured.

[0011] Further technical improvements of the present application are that the limiters are respectively fixed at positions of the screw rod slider to both sides of the screw rod base and the length meter slider with the screw rod module at both ends, so that the guide rail slider and the screw rod module upper slider are prevented from being damaged due to misoperation and overtravel.

[0012] The present application also provides a large-diameter spherical optical element generatrix online detection method, which adopts the above detection device, and has the characteristics that the method comprises the following steps:

[0013] S1. The heavy-duty Foma wheel (1-9) adjustment device is leveled and locked to ensure the stability of the measurement reference;

[0014] S2. The X-direction detection assembly is controlled to move the contact length meter (20-3) to a detection starting position, and the grating ruler (10) is zeroed;

[0015] S3. The Z-direction detection assembly is controlled to make the measurement head of the contact length meter (20-3) contact the optical element surface with constant contact force;

[0016] S4. Start scanning, the A servo motor (2) drives the screw rod sliding table assembly (11) to move at a constant speed along the X direction, while the contact length meter (20-3) measures the Z-direction displacement change in real time, and the grating ruler (10) records the X-direction displacement;

[0017] S5. The collected X-Z displacement data is subjected to polynomial fitting, and the generatrix curvature radius and surface type error are calculated.

[0018] 1) By using a precision contact length gauge with a range greater than the required depth of the optical element's generatrix and a precision grating ruler with a length much greater than the radius of the required optical element's generatrix, and by directly contacting the contact length gauge with the spherical optical element, and by having the grating ruler slider move synchronously with the Z-direction detection component, the displacement changes of each generatrix in the X and Z directions can be recorded in real time and accurately.

[0019] 2) Movable motion components and large-range contact length gauges are used in both the X and Z directions. The spherical optical elements under test with different diameters, thicknesses and generatrices can be detected by adjusting the displacement of the precision detection element in the X and Z directions.

[0020] 3) The entire structure is welded and heavy-duty casters are installed at the bottom to ensure stable support during testing and to allow for movement during optical processing. This not only ensures the strength of the support but also eliminates the difficulty of flipping, significantly improving testing efficiency. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of the online detection device for the busbar parameters of large-aperture spherical optical elements of the present invention.

[0022] Figure 2 This is a schematic diagram of the support mechanism in this invention.

[0023] Figure 3 This is a schematic diagram of the lead screw slide assembly in this invention.

[0024] Figure 4 This is a schematic diagram of the length gauge component in the present invention.

[0025] Figure 5 This is a disassembly diagram of the lead screw slide connector in this invention.

[0026] Figure 6 This is a diagram showing the usage state of the present invention;

[0027] Figure 7 The radius of curvature of a generatrix of a large-aperture optical element in a certain embodiment of this description is given below.

[0028] Figure 8 This description refers to the PV value of a certain busbar of a large-aperture optical element in a certain embodiment.

[0029] In the picture:

[0030] 1. Supporting structure: 1-1. Top horizontal square tube; 1-2. Top mounting plate; 1-3. Large sealing plate; 1-4. Support column square tube; 1-5. Top diagonal reinforcing square tube; 1-6. Bottom diagonal reinforcing square tube; 1-7. Bottom horizontal square tube; 1-8. Small sealing plate; 1-9. Heavy-duty caster wheel;

[0031] 2, A servo motor; 3, a speed reducer; 4, a speed reducer base; 5, a large coupling;

[0032] 6, a lead screw; 7, a front lead screw base; 15, a lead screw slide;

[0033] 11, a lead screw slide table assembly: 11-1, a B servo motor; 11-2, a motor flange; 11-3, a lead screw module; 11-4, a lead screw slide table; 11-5, a module base plate; 11-6, a small coupling;

[0034] 9, a linear guide rail; 10, a grating ruler; 16, a guide rail slide; 17, a grating ruler slide;

[0035] 12, a rear lead screw base; 13, an organ cover support plate; 14, an electrical cabinet; 18, a tank chain support; 19, an organ cover; 20, a length gauge assembly: 20-1, a length gauge slide; 20-2, a length gauge base plate; 20-3, a contact type length gauge; 20-4, a length gauge base;

[0036] 21, a large aperture spherical optical element; 22, a single-axis machine. DETAILED DESCRIPTION

[0037] The technical solutions, structures and features in the present application will be described clearly and completely below in combination with the drawings in the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of the patent protection of the present application.

[0038] Please refer to Figures 1-2The large-diameter spherical optical element bus online detection device comprises a support mechanism 1, which is welded by a top horizontal square tube 1-1, a top mounting plate 1-2, a support column square tube 1-4, a top inclined reinforcing rib square tube 1-5, a bottom inclined reinforcing rib square tube 1-6 and a bottom horizontal square tube 1-7. The top mounting plate needs to be welded with the top horizontal square tube first, and then the mounting surface is machined, and then the main bearing structure is integrally welded, so that the overall stability of the support structure can be ensured, and the machining accuracy can be ensured. A large sealing plate 1-3 is welded at both ends of the top horizontal square tube 1-1, and a small sealing plate 1-8 is welded at both ends of the bottom horizontal square tube 1-7. The mounting surface of the top mounting plate 1-2 is oiled, and the other areas are painted, which can significantly improve the rust resistance of the support structure. A plurality of movable and liftable heavy load type Foma wheels 1-9 are arranged at the bottom of the support mechanism 1. The mounting groove of the linear guide rail 9, the reducer base 4, the front screw rod base 7 and the rear screw rod base 12 is machined on the mounting surface of the top mounting plate 2, so that stable operation during detection can be ensured. The electrical cabinet 14 is fixedly connected to the outside of the support column square tube (1-4) at the detection starting end. The A servo motor 2, the B servo motor 11-1 and the limit switch 8 are controlled by the PLC. The power management and control, signal transmission and processing executor three parts are integrated control, which has manual and automatic control functions, and can realize precise positioning and overtravel stop function.

[0039] Please refer to FIG. 1-5, A servo motor 2 is fixed on the reducer base 4 with a speed ratio of 10, the screw rod 6 is fixed on the front screw rod base 7 and the rear screw rod base 12 at both ends, and the reducer base 4, the front screw rod base 7, the rear screw rod base 12 and the linear guide rail 9 are fixed in the mounting groove on the top mounting plate 1-2. The screw rod sliding table assembly 11 is fixedly connected to the guide rail sliding block 16. The A servo motor and the reducer 3 are connected with the screw rod 6 through the large coupling 5. The screw rod 6 penetrates the screw rod sliding table 11-4, and the screw rod sliding block 15 is arranged on the screw rod sliding table 11-4 and is fixed with the screw rod sliding table assembly 11, so that sufficient torque can be provided, and stable operation can be ensured. The module base plate 11-5 is fixedly installed on the front of the screw rod sliding table 11-4, and the screw rod module 11-3 is fixed thereon. The B servo motor 11-1 is fixedly connected to the motor flange 11-2 through the motor flange 11-2. The length meter assembly 20 is fixedly connected to the screw rod module 11-3 through the length meter sliding block 20-1. The B servo motor 11-1 is connected with the screw rod module 11-3 through the small coupling 11-6. The length meter assembly 20 is fixed to the screw rod module 11-3 through the length meter sliding block 20-1, which improves the accuracy of detection operation. The contact type length meter 20-3 is fixed to the length meter base plate 20-2 through the length meter base 20-4, and the back is against the length meter base plate 20-4. A plurality of limiters are fixed on the top mounting plate 1-2 and the module base plate 11-5, respectively. The organ case support plate 13 is fixed on both sides of the top mounting plate 1-2.

[0040] Please refer to Figure 5, the front of the screw slide 11-4 is fixedly connected with the module base plate 11-5, the back is fixedly connected with the guide rail slider 16 and the grating ruler slider 17, the upper surface is fixedly connected with the tank chain support 18, the front side is fixedly connected with the screw slider 15, and the front and rear sides are connected with one end of the organ case. The screw slide 11-4 can ensure the consistency of the parts that need to be synchronized to the greatest extent, and improve the stability of the direct connection.

[0041] Please refer to Figure 1-6, before detection, the center position of the optical element is found by the cross intersection and the circle center trajectory method, and the large-diameter spherical optical element generatrix online detection device is moved to both sides of the optical element. The detection device is leveled and fixed by adjusting the lifting of the heavy load type Foma wheel 1-9 provided at the bottom of the support mechanism 1. The operator moves the contact length gauge 20-3 placed on the screw slide assembly 11 to a suitable position outside the optical element as the starting point of X direction detection by driving the screw slide assembly 11 through the screw 6 and the screw slider 15 penetrating the screw slide 11-4. The operator moves the length gauge assembly 20 on the screw module 11-3 by rotating the B servo motor 11-1 through the small coupling 11-6, and drives the contact length gauge 20-3 fixed on the length gauge assembly 20 to press down to the range that can cover the depth of the optical element. During detection, the software of the grating ruler 10 and the contact length gauge 20-3 is started first, the integrated electrical cabinet 14 starts the detection function through PLC, the screw 6 is driven to rotate by the A servo motor and the speed reducer 3 through the large coupling 5, the screw slide assembly 11 is moved by being provided on the screw 6 and penetrating the screw slide 11-4, the grating ruler slider 17 fixed on the screw slide assembly 11 is moved synchronously, and the contact length gauge 20-3 fixed on the length gauge assembly 20 extends in real time with the change of the depth of the optical element. The two high-precision detection elements are used synchronously. The grating ruler 10 and the contact length gauge 20-3 software can accurately measure the large-diameter spherical optical element generatrix online data by collecting the moving positions of the grating ruler slider 17 and the contact length gauge 20-3 detection head in real time, and then perform circle fitting and projection mapping on the collected optical element generatrix to accurately analyze the curvature radius and PV value.

[0042] The above merely describes preferred embodiments of the present application, and is not intended to limit the present application in any form. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art will appreciate that modifications, equivalent replacements, improvements, etc. can be made to the technical solutions, structures and features described in the foregoing embodiments, or some technical features thereof can be replaced equivalently. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An online inspection device for the busbar of a large-aperture spherical optical element, characterized in that, include: The support mechanism (1) is a frame consisting of a top horizontal square tube (1-1), a top mounting plate (1-2), a support column square tube (1-4), a top diagonal reinforcing rib square tube (1-5), a bottom diagonal reinforcing rib square tube (1-6), and a bottom horizontal square tube (1-7) welded together. The bottom horizontal square tube (1-7) is equipped with a heavy-duty caster wheel (1-9) that can be raised and lowered. The X-direction detection component includes an A-servo motor (2), a reducer (3), a large coupling (5), a lead screw (6), and a linear guide rail (9) mounted on the top mounting plate (1-2), and a grating ruler (10) mounted on the top horizontal square tube (1-1). The linear guide rail (9) is provided with a sliding guide rail slider (16). The A-servo motor (2) drives the lead screw (6) to rotate through the reducer (3) and the large coupling (5). The two ends of the lead screw (6) are fixed by the front lead screw base (7) and the rear lead screw base (12). The linear guide rail (9) is arranged parallel to both sides of the lead screw (6) to form a high-rigidity X-direction motion platform. The Z-direction detection component includes a lead screw slide assembly (11) and a length gauge assembly (20). The lead screw slide assembly (11) is slidably connected to a linear guide rail (9) via a guide rail slider (16) and engages with a lead screw (6) via a lead screw slider (15). The lead screw slide assembly (11) includes a B servo motor (11-1), a motor flange (11-2), a lead screw module (11-3), a lead screw slide (11-4), a module base plate (11-5), and a small coupling (11-6). The front of the lead screw slide (11-4) is fixed to the guide rail slider (16), and the back is fixed to the module base plate (11-5). A grating ruler slider (17) and a tank chain support frame (18) are installed on the top. The lead screw (6) is connected from left to right to the lead screw slider (15) that passes through the lead screw slide (16). 5) Connection; The lead screw module (11-3) is mounted on the module base plate (11-5). The B servo motor (11-1) is fixed to the end of the lead screw module (11-3) through the motor flange (11-2) and drives the length gauge assembly (20) on the lead screw module (11-3) to move through the small coupling (11-6); The length gauge assembly (20) includes a length gauge slider (20-1), a length gauge base plate (20-2), a contact length gauge (20-3), and a length gauge base (20-4). The length gauge base plate (20-2) is connected to the lead screw module (11-3) through the length gauge slider (20-1). The contact length gauge (20-3) is vertically fixed on the length gauge base plate (20-2) through the length gauge base (20-4) to ensure that the measurement direction is consistent with the normal direction of the workpiece; The control system includes a detection electrical cabinet (14) fixed on the outside of the support column square tube (1-4) near the detection start end, for controlling the movement of servo motor A (2) and servo motor B (11-1), and collecting measurement data from the grating ruler (10) and contact length gauge (20-3) in real time. Through the coordinated movement of the X-direction detection component and the Z-direction detection component, the contact length gauge (20-3) scans and measures along the generatrix of the optical element. At the same time, the grating ruler (10) records the X-direction displacement in real time, and the contact length gauge (20-3) measures the Z-direction displacement change. The curvature radius and surface error of the generatrix are obtained through data processing.

2. The online inspection device for the busbar of a large-aperture spherical optical element according to claim 1, characterized in that, The top mounting plate (1-2) is welded to the top horizontal square tube (1-1) and then heat-treated to relieve stress. It is machined with slots for mounting the linear guide rail (9), reducer base (4), front lead screw base (7) and rear lead screw base (12) to ensure the installation accuracy of each component. The top horizontal square tube (1-1) is welded with large sealing plates (1-3) at both ends, and the bottom horizontal square tube (1-7) is welded with small sealing plates (1-8) at both ends.

3. The online inspection device for the busbar of a large-aperture spherical optical element according to claim 1, characterized in that, A tank chain bracket (18) is fixed above the lead screw slide (11-4) to protect the cable and signal line. Bellows covers (19) are installed on both sides respectively. The other end of the bellows cover (19) is fixed on the bellows cover support plate (13) to prevent dust and cutting fluid from entering the moving parts.

4. The online inspection device for the busbar of a large-aperture spherical optical element according to claim 1, characterized in that, The top mounting plate (1-2) and module base plate (11-5) are respectively provided with limiters (8) to limit the stroke range of the lead screw slider (15) and the length gauge slider (20-1) to prevent the equipment from being damaged by excessive movement.

5. The online inspection device for the busbar of a large-aperture spherical optical element according to claim 4, characterized in that, The limit switch (8) adopts a photoelectric proximity switch with a response time of less than 1ms, ensuring rapid braking in emergency situations.

6. The online inspection device for the busbar of a large-aperture spherical optical element according to any one of claims 1-5, characterized in that, The range of the contact length gauge (20-3) is adjustable, and its measuring head can be pressed vertically down onto the surface of the optical element being measured.

7. The online inspection device for the busbar of a large-aperture spherical optical element according to any one of claims 1-5, characterized in that, The measuring length of the grating ruler (10) is greater than the generatrix radius of the optical element being measured.

8. A method for online inspection of the busbar of a large-aperture spherical optical element, employing the inspection device described in any one of claims 1-5, characterized in that, Includes the following steps: S1. The leveling device is adjusted and locked using a heavy-duty ferrule (1-9) to ensure the stability of the measurement reference. S2. Control the X-direction detection component to move the contact length gauge (20-3) to the detection start position, and zero the grating ruler (10); S3. Control the Z-direction detection component to make the measuring head of the contact length gauge (20-3) contact the surface of the optical element with a constant contact force; S4. Start scanning. Servo motor A (2) drives the lead screw slide assembly (11) to move at a constant speed along the X direction. At the same time, the contact length gauge (20-3) measures the Z-direction displacement change in real time, and the grating ruler (10) records the X-direction displacement. S5. Perform polynomial fitting on the collected XZ displacement data to calculate the radius of curvature of the generatrix and the surface error.

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