Machining position correction system and control method thereof
By introducing a calibration probe assembly into the turret clamping mechanism to detect and compensate for position offset, the problem of insufficient rotation angle control accuracy is solved, achieving higher machining accuracy and efficiency.
Patent Information
- Application Number
- CN202410700048.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-31
- Publication Date
- 2025-12-02
AI Technical Summary
In the existing technology, the rotation angle control precision of the turret clamping mechanism is insufficient, resulting in processing errors and affecting the processing accuracy of silicon rods.
Design a machining position correction system, including a base, a turret clamping mechanism and a slide mechanism. The system uses a calibration probe assembly to detect the positioning device and a calibration device to determine the positional offset of the clamping assembly relative to the machining station, and uses the slide mechanism to compensate for the positional offset, thereby improving the accuracy of rotation angle control.
It improved the processing precision of the processing equipment, reduced processing errors, and enhanced the efficiency and quality of silicon rod processing.
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Figure CN121042973A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of machining technology, and in particular to a machining position correction system and its control method. Background Technology
[0002] Silicon wafers are a crucial material for solar photovoltaic power generation. The manufacturing process of silicon wafers used in solar panels involves several steps: crystal pulling, cutting, squaring, grinding, and slicing. Crystal pulling involves chemically depositing cylindrical silicon rods in a crystal pulling furnace, with a maximum length of 11 meters. Cutting refers to cutting the pulled silicon rods into segments of varying lengths (100-950mm). Squaring involves cutting the cut silicon rods into rectangular shapes. Grinding involves polishing the four surfaces of the squared rectangular monocrystalline silicon rods and rounding the four edges using a grinding wheel.
[0003] In the process of squaring silicon rods, in addition to producing usable cuboid crystal rods, four edge pieces with rounded surfaces are also generated. In traditional monocrystalline silicon rod processing, these edge pieces are usually treated as "waste," broken up, and recycled back into monocrystalline silicon rods. This process is complex and inefficient. To further improve the efficiency of silicon rod processing, edge piece processing equipment has been developed that further squares, cuts, and grinds the edge pieces to obtain usable silicon blocks.
[0004] When grinding silicon blocks, rough grinding is required before fine grinding. In existing technologies, to improve grinding efficiency, a turret clamping mechanism is used to rotate the silicon block between different grinding stations, thereby increasing processing efficiency. Similar to grinding, depending on the characteristics of the processing flow, the turret clamping mechanism is also used in different processing operations of other materials, such as material cutting. Because the turret clamping mechanism needs to rotate between different stations, if the control precision of the turret clamping mechanism's rotation angle is insufficient, it can easily cause a certain positional deviation between the processing tool at the processing station and the material clamped on the turret clamping mechanism. This positional deviation will ultimately lead to processing errors in the silicon block. Summary of the Invention
[0005] The purpose of this invention is to provide a machining position correction system and its control method to solve the machining error problem caused by insufficient control accuracy of the rotation angle of the turret clamping mechanism in the prior art.
[0006] A machining position correction system includes a base, a turret clamping mechanism, and a slide mechanism. At least one machining station is provided on the base. A positioning device and a slide mechanism are provided at the machining station. The slide mechanism includes a machining component and a calibration probe component. The machining component can reciprocate along a first direction of the machining station. The slide mechanism reciprocates along the radial direction of the turret clamping mechanism. A clamping component is provided on the turret clamping mechanism, and a calibration device is provided on the clamping component. The turret clamping mechanism rotates the clamping component to the machining station. The calibration probe component detects the positioning device and the calibration device respectively to determine the positional offset of the clamping component relative to the machining station. The first direction of the machining station is perpendicular to the radial direction of the central turret.
[0007] Furthermore, the slide mechanism includes a slide feed guide rail arranged along the radial direction of the turret clamping mechanism and a machining slide slidably connected to the slide feed guide rail. A machining feed guide rail is arranged on the machining slide along the first direction of the machining station, and the machining component is slidably connected to the machining feed guide rail.
[0008] Furthermore, the base is provided with multiple workstations, including multiple processing workstations. The turret clamping mechanism includes a central turret and multiple clamping components arranged circumferentially along the central turret. The number of clamping components corresponds to the number of workstations on the base. The central turret drives the clamping components to rotate on the base, so that the clamping components can rotate between different workstations.
[0009] Furthermore, the calibration device is a position calibration reference plate, the positioning device is a position positioning reference plate, and the calibration probe assembly detects the positions of the position positioning reference plate and the position calibration reference plate in the first direction of the machining station, respectively, and determines the displacement difference between the position positioning reference plate and the position calibration reference plate in the first direction of the machining station, so as to determine the position difference between the clamping assembly on the turret clamping mechanism and the machining station.
[0010] Furthermore, the calibration probe assembly includes a calibration probe and a calibration probe driving assembly, the calibration probe driving assembly driving the calibration probe to reciprocate along a first direction to protrude or retract onto the processing surface of the processing assembly.
[0011] Furthermore, the slide mechanism is a slide grinding wheel mechanism, and the processing component is a grinding wheel assembly.
[0012] Furthermore, the multiple workstations include at least one loading / unloading workstation, and a transfer and centering mechanism is provided at the loading / unloading workstation. The transfer and centering mechanism includes a transfer component and a centering component. The transfer component transfers materials at the loading / unloading workstation, and the centering component includes a gripper component arranged opposite to each other. The gripper component moves synchronously relative to each other along a first direction of the loading / unloading workstation to perform a centering displacement operation on the materials at the loading / unloading workstation. The first direction of the loading / unloading workstation is perpendicular to the radial direction of the central turret.
[0013] Furthermore, the transfer centering mechanism also includes a support component. One end of the support component is fixed at the loading and unloading station, and the other end is connected to the transfer component. The support component is also provided with a centering component sliding guide rail extending in a third direction. The centering component also includes a centering component base plate. One side of the centering component base plate is slidably connected to the centering component sliding guide rail, and the other side is connected to the gripper component.
[0014] Furthermore, the gripper assembly is equipped with a centering probe assembly, which detects the size and / or position of the material.
[0015] Furthermore, the gripper assembly includes a centering gripper disposed along a first direction of the loading / unloading station and a synchronous drive assembly, wherein the synchronous drive assembly drives the centering gripper to reciprocate along the first direction of the loading / unloading station.
[0016] In another aspect, the present invention provides a control method for a machining position correction system based on the foregoing descriptions, the method comprising:
[0017] The turret clamping mechanism drives the clamping assembly to rotate to the processing station corresponding to the clamping assembly;
[0018] The slide mechanism at the machining station moves toward the clamping assembly in the radial direction of the turret clamping mechanism, and the positioning device and calibration device are detected by the calibration probe assembly to determine the position offset of the clamping assembly relative to the current machining station.
[0019] The machining components of the control slide mechanism move along a first direction to compensate for the positional offset of the clamping components at the current machining station.
[0020] Furthermore, the processing position correction system includes a transfer centering mechanism disposed at the loading and unloading station, and the method further includes:
[0021] The turret clamping mechanism drives the first clamping component to rotate to the loading and unloading station, and the transfer component transfers the material to the first clamping component;
[0022] The centering component at the loading and unloading station moves toward the first clamping component in the radial direction of the turret clamping mechanism and detects the material position through the centering needle detection component;
[0023] The centering component moves synchronously relative to the material along the first direction of the loading and unloading station to perform centering operation on the material;
[0024] The centering probe assembly of the centering component extends to detect the relative distance between the two processed sides of the material.
[0025] The machining position correction system and control method provided by this invention, after the turret clamping mechanism drives the clamping component to rotate to the machining station, the calibration probe component on the slide mechanism detects the positioning device of the machining station and the calibration device on the clamping component respectively, and determines the position offset of the clamping component at the current machining station. This allows the position offset of the clamping component to be compensated by controlling the machining component to move and offset along the first direction, thereby compensating for the control accuracy of the rotation angle of the turret clamping mechanism and improving the machining accuracy of the machining equipment. Attached Figure Description
[0026] Figure 1 This is a schematic diagram of the processing flow of the edge material after the silicon rod is squared according to an embodiment of the present invention.
[0027] Figure 2 This is a schematic diagram of the external structure of the silicon block according to an embodiment of the present invention.
[0028] Figure 3 This is a perspective view of the grinding equipment according to an embodiment of the present invention.
[0029] Figure 4 This is a top view of the grinding equipment according to an embodiment of the present invention.
[0030] Figure 5 This is a perspective view of the grinding equipment according to an embodiment of the present invention.
[0031] Figure 6 This is a perspective view of the transmission and transfer mechanism according to an embodiment of the present invention.
[0032] Figure 7 This is a schematic diagram of the connection between the transmission and transfer mechanism and the horizontal transmission device in an embodiment of the present invention.
[0033] Figure 8 This is a schematic diagram of the connection between the transmission and transfer mechanism and the vertical transmission device in an embodiment of the present invention.
[0034] Figure 9 This is a perspective view of the storage device according to an embodiment of the present invention.
[0035] Figure 10 This is a structural detail diagram of the lifting drive mechanism of the storage bin according to an embodiment of the present invention.
[0036] Figure 11 This is a perspective view of the storage device according to an embodiment of the present invention.
[0037] Figure 12 This is a perspective view of the transfer and centering mechanism according to an embodiment of the present invention.
[0038] Figure 13 This is a structural detail diagram of the second direction driving component of the centering component in an embodiment of the present invention.
[0039] Figure 14 This is a structural detail diagram of the third-party driving component of the centering component in an embodiment of the present invention.
[0040] Figure 15 This is a schematic diagram of the centering component performing a centering operation on a silicon block according to an embodiment of the present invention.
[0041] Figure 16 This is a perspective view of the turret clamping mechanism according to an embodiment of the present invention.
[0042] Figure 17 This is a top view of the turret clamping mechanism according to an embodiment of the present invention.
[0043] Figure 18 This is a perspective view of the turret clamping mechanism of this invention mounted on the base, according to an embodiment of the invention.
[0044] Figure 19 This is a perspective view of a portion of the clamping assembly in the turret clamping mechanism according to an embodiment of the present invention.
[0045] Figure 20 This is a cross-sectional view of a partial clamping component in the turret clamping mechanism according to an embodiment of the present invention.
[0046] Figure 21 This is a schematic diagram of the clamping chamber of the clamping assembly according to an embodiment of the present invention.
[0047] Figure 22 This is a schematic diagram of the clamping assembly of an embodiment of the present invention clamping a silicon block for grinding operations.
[0048] Figure 23 This is a perspective view of the slide grinding wheel mechanism according to an embodiment of the present invention.
[0049] Figure 24 This is an end side view of the grinding wheel assembly according to an embodiment of the present invention.
[0050] Figure 25 This is a schematic diagram of the structure of the grinding wheel drive chamber according to an embodiment of the present invention.
[0051] Figure 26 This is a schematic diagram illustrating the grinding wheel position calibration process according to an embodiment of the present invention.
[0052] Figure 27 This is a schematic diagram of the grinding wheel dressing operation according to an embodiment of the present invention. Detailed Implementation
[0053] To better understand the purpose, structure, and function of this invention, the grinding equipment of this invention will be described in further detail below with reference to the accompanying drawings.
[0054] The grinding equipment provided by this invention is used to perform cutting operations on edge materials, such as... Figure 1 As shown, Figure 1 'a' represents an undivided silicon rod. Figure 1 b represents the square bar in the middle and the four edges obtained after taking the square root. Figure 1 c represents the process of removing the end material from both sides and the arc-shaped top of the edge to obtain the long strip material in the middle. Figure 1 d represents the cutting operation of the long strip in the middle. Figure 1 e represents the finished silicon block obtained after scissor cutting.
[0055] The grinding equipment provided by this invention is used for grinding rectangular silicon blocks to achieve the processing of the surface (as shown in the attached figure). Figure 2 The target dimensions and good surface roughness between AB and CD, AD and BC are shown. The equipment specifically includes a loading and unloading conveyor, a turret clamping mechanism 4, and a slide grinding wheel mechanism 6.
[0056] like Figures 3-5 As shown, the turret clamping mechanism 4 is equipped with multiple sets of clamping components 5. By controlling the rotation of the turret clamping mechanism 4, the multiple sets of clamping components 5 can be switched between multiple different workstations to cooperate in completing the grinding and loading / unloading operations of the silicon block. The multiple workstations include at least one loading / unloading workstation and at least one grinding workstation. The loading / unloading conveyor is set at the loading / unloading workstation to complete the loading / unloading of the silicon block at the loading / unloading workstation. The slide table grinding wheel mechanism 6 is set on the grinding workstation. The slide table grinding wheel mechanism 6 reciprocates along the radial direction of the turret clamping mechanism 4 on the grinding workstation to perform grinding operations on the silicon block.
[0057] The grinding equipment provided in this embodiment of the invention uses a turret clamping mechanism 4 to clamp and rotate the silicon block to complete the conversion of the silicon block at different workstations. This enables continuous material preparation and continuous processing of the silicon block, resulting in high processing efficiency. Moreover, the vertical turret design reduces the footprint and increases the silicon block processing output per unit area.
[0058] The loading and unloading conveying device, turret clamping mechanism 4, and slide grinding wheel mechanism 6 of the grinding equipment of the present invention will be described below. It should be noted that the grinding equipment of the present invention can be applied not only to grinding silicon blocks, but also to processing other materials. Therefore, silicon block grinding is not used as a basis for limiting the scope of protection of the grinding equipment provided by the present invention.
[0059] Furthermore, since each workstation is arranged around the turret clamping mechanism (circumferential direction), this invention defines a separate coordinate system for each workstation to describe each component. Figure 12For example, in this invention, the vertical direction of each workstation is taken as the third direction of the current workstation, namely the z-axis direction; the radial direction of the central turret 41 of the current workstation is taken as the second direction of the current workstation, namely the y-axis direction; and the tangential direction of the central turret 41 of the current workstation is taken as the first direction of the current workstation, namely the x-axis direction.
[0060] 1. Loading and unloading conveyor system:
[0061] The loading and unloading conveying device provided in this embodiment of the invention includes a conveying and transfer mechanism 1, a storage device 2, and a transfer and centering mechanism 3.
[0062] like Figures 6-8 As shown, the conveying and transfer mechanism 1 provided in this embodiment of the invention includes a first transmission component 11 and a second transmission component 12. The first transmission component 11 is rotatably disposed between a first preset workstation and the second transmission component 12, and the end of the second transmission component 12 away from the first transmission component 11 is disposed at the second preset workstation.
[0063] In a specific embodiment of the present invention, the first preset station is the unloading station of the upstream equipment that docks with the grinding equipment, and the second preset station is the loading station of the grinding equipment. Since the material transmission directions between the first preset station and the second preset station may be different, the present invention uses a conveying transfer mechanism 1, which can transmit materials between two stations with the same transmission direction, as well as between two stations with different transmission directions.
[0064] That is, the material transfer direction between the first preset station and the second preset station can be at any angle. By controlling the rotation of the first transfer component 11, the material is transferred between the first preset station and the second transfer component 12. This allows the material to be transferred between the first preset station and the second preset station via the first transfer component 11 and the second transfer component 12. As a result, when the two types of equipment are laid out as a whole, it is not necessary to consider that the transfer direction of the unloading station of the upstream processing equipment and the loading station of the downstream processing equipment must be the same. This improves the layout flexibility between different equipment in the same processing system and increases the utilization rate of factory space.
[0065] In a specific embodiment of the present invention, when the conveying and transfer mechanism 1 is disposed at the loading end of the grinding equipment, that is, when it is connected to the storage device 2, the first preset station is the unloading end of the upstream edge cutting equipment, and the second preset station is the storage device 2. The storage device 2 can receive material from any direction of the edge cutting equipment. The edge cutting equipment and the grinding equipment are not limited by the conveying direction of loading and unloading, making the layout of different equipment more flexible. Therefore, the conveying and transfer mechanism 1 of the present invention can make the installation of the entire edge material processing system more flexible. As shown in the attached figure Figure 7 and attached Figure 8As shown, the transmission and transfer mechanism 1 provided in this embodiment of the invention can achieve docking at 0° and 90°, and can also achieve docking at other angles.
[0066] It is understood that the conveying and transfer mechanism 1 provided in the embodiments of the present invention can also be set at the unloading end of the grinding equipment, or between two processing equipment in other large processing systems, to complete the material transfer between processing equipment with different material transmission directions.
[0067] Furthermore, both the first transmission component 11 and the second transmission component 12 are transmission belts, and the delivery of materials is accomplished by controlling the rotation of the transmission belts along the transmission direction. Figure 6 As shown, the second transmission component 12 includes a second transmission belt and a second belt drive component, the second belt drive component driving the second transmission belt to rotate.
[0068] Specifically, in this embodiment of the invention, the first transmission component 11 includes a rotary drive platform 111 and a first transmission belt assembly disposed on the rotary drive platform 111. By controlling the rotary drive platform 111 to rotate, the first transmission belt assembly is driven to rotate as a whole. The first transmission belt assembly includes a first transmission belt and a first belt drive assembly. By controlling the rotation of the first transmission belt, the material placed on the first transmission belt is driven to move.
[0069] Furthermore, in one embodiment of the present invention, a preset clearance distance is maintained between the first transmission component 11 and the second transmission component 12 in the transmission direction of the second transmission component 12 to avoid interference between the first transmission component 11 and the second transmission component 12. Specifically, interference between the first transmission component 11 and the second transmission component 12 can be avoided during rotation. Since the first transmission component 11 is rotatable, a first preset distance can be set between the first transmission component 11 and the second transmission component 12 to avoid interference between the first transmission component 11 and the second transmission component 12 during rotation. This distance should be less than the length of the material being transmitted to ensure that the material can be smoothly transferred between the first transmission component 11 and the second transmission component 12.
[0070] In another embodiment of the present invention, a first translation drive assembly (not shown in the figures) is provided below the rotary drive platform 111. The first translation drive assembly controls the first transmission assembly 11 to reciprocate along the transmission direction of the second transmission assembly 12, so as to avoid interference between the first transmission assembly 11 and the second transmission assembly 12 by controlling the translation of the first translation drive assembly. Specifically, when the first transmission assembly 11 rotates, the first translation drive assembly is controlled to translate away from the second transmission assembly 12 to avoid interference between the first transmission assembly 11 and the second transmission assembly 12. As an alternative embodiment, when the second transmission assembly 12 needs to rotate, the second transmission assembly 12 is controlled to move away from the second transmission assembly 12 to avoid interference with the second transmission assembly 12. After the first transmission assembly 11 finishes rotating, the first transmission assembly 11 is controlled to move closer to the second transmission assembly 12 to prevent the transmitted material from falling during the delivery between the first transmission assembly 11 and the second transmission assembly 12.
[0071] Furthermore, a second translation drive assembly (not shown in the attached figure) is provided below the rotary drive platform 111. The second translation drive assembly controls the first transmission assembly 11 to reciprocate in the vertical direction. While enabling the first transmission assembly 11 to adapt to materials of different transmission heights, it can also raise the first transmission assembly 11 to avoid interference with the second transmission assembly 12 and other equipment when the first transmission assembly 11 rotates.
[0072] Furthermore, a first support 112 is provided below the first transmission component 11, and a second support 121 is provided below the second transmission component 12. The height of the first support 112 is lower than that of the second support 121, so that the transmission height of the first transmission component 11 can switch between above, flush with, and below the second transmission component 12.
[0073] Furthermore, a liftable foot device 13 is provided below the first support 112 and the second support 121. The lifting and lowering of the transmission and transfer mechanism 1 is controlled by controlling the lifting and lowering of the foot device 13 to adapt to different heights of the grinding equipment.
[0074] In a specific embodiment of the present invention, one end of the second transmission component 12 is disposed at the loading station and / or unloading station of the grinding equipment, and the first transmission component 11 is disposed at the unloading end of the upstream processing equipment (edge-cutting integrated machine) and / or the loading end of the downstream processing equipment (silicon block bonding equipment) of the grinding equipment. It is understood that the first transmission component 11 can also be disposed at the loading end or unloading end of the grinding equipment. Since the first transmission component 11 is rotatable, the grinding equipment can adapt to different directions of material inflow or outflow (e.g., ...). Figure 7 , Figure 8 As shown in the figure, this makes the entire edge leather processing system more adaptable to the spatial environment.
[0075] The conveying and transfer mechanism 1 provided in this embodiment of the invention is not only applicable to the grinding equipment of the present invention, but also applicable to various material processing systems. By being set between various processing equipment in the system, the layout of various equipment in the processing system becomes more flexible, and the processing system has lower requirements for factory space.
[0076] like Figures 9-11 As shown, the storage device 2 provided in this embodiment of the invention is installed at the loading end of the grinding equipment, including a transverse conveying device 22 and a storage bin 21. One end of the transverse conveying device 22 is connected to the conveying transfer mechanism 1 to receive the silicon block conveyed by the conveying transfer mechanism 1, and the other end extends into the interior of the grinding equipment to cooperate with the transfer centering mechanism 3 to complete the loading and centering of the silicon block. The transverse conveying device 22 passes through the interior of the storage bin 21, and the storage bin 21 is provided with multiple sets of lifting and lowering storage positions 211. By controlling the lifting and lowering of the storage positions 211, the storage and discharge of materials in the storage bin 21 can be realized.
[0077] Furthermore, the lateral conveying device 22 conveys the material to the storage bin 21 along the first direction. The storage bin 21 is provided with a plurality of storage positions 211. The plurality of storage positions 211 reciprocate along the third direction to transfer the material on the lateral conveying device 22 to the storage position 211 or transfer the material in the storage position 211 to the lateral conveying device 22.
[0078] Furthermore, the lateral conveying device 22 includes a conveyor belt and a drive assembly for controlling the rotation of the conveyor belt. After receiving the silicon block, the lateral conveying device 22 drives the silicon block to the storage bin 21 by controlling the rotation of the conveyor belt.
[0079] Furthermore, the storage bin 21 includes multiple sets of opposing storage racks 213. Two opposing storage racks 213 are respectively arranged on both sides of the transverse conveyor 22 to form a storage position 211. As shown in the attached figure, the transverse width of the material placed on the transverse conveyor 22 is greater than the width of the transverse conveyor 22 (the width of the conveyor belt), so that the two ends of the material protrude from the transverse conveyor 22 and are located above the storage racks 213. When storage is required, the storage racks 213 on both sides are controlled to rise simultaneously, and the storage racks 213 carry the material away from the transverse conveyor 22 to complete the storage of the material; when unloading is required, the storage racks 213 on both sides are controlled to fall simultaneously, so that the material is placed back on the transverse conveyor 22. At this time, the transverse conveyor 22 is controlled to move the material horizontally to the loading station to complete the loading of the material.
[0080] The storage device 2 provided in this embodiment of the invention can serve as an incoming material buffer for the entire automated production line, used to store silicon blocks from the upstream production line, thereby increasing the automation level of the entire system. Furthermore, since the storage bin 21 is arranged perpendicular to the transverse conveyor 22, it does not occupy the space of the transverse conveyor during storage. This results in a smaller footprint for the entire storage device 2 while simultaneously achieving silicon block storage, making the equipment structure more compact.
[0081] Furthermore, the storage bin 21 provided in this embodiment of the invention also includes lifting components 212 disposed on both sides of the transverse conveying device 22. Storage racks 213 are evenly disposed on the lifting components 212. By controlling the two opposing lifting components 212 to reciprocate synchronously in a third direction, the opposing storage racks 213 are driven to reciprocate synchronously in a third direction. Specifically, the lifting component 212 can be a lifting chain assembly. The storage racks 213 are fixedly disposed on the lifting components 212. In order to maintain stability, two or more lifting components 212 are disposed on one side of the transverse conveying device 22, and the storage racks 213 are evenly fixed on the lifting components 212 so that the storage racks 213 remain stable during lifting movement.
[0082] Furthermore, the storage bin 21 provided in this embodiment of the invention also includes a lifting drive assembly 214, which is used to drive the lifting assembly 212 to move upward or downward. Specifically, the lifting drive assembly 214 includes a first driven gear and a second driven gear that mesh with each other. A chain drive assembly is respectively mounted on the first driven gear and the second driven gear. The other end of the chain drive assembly is connected to the lifting assemblies 212 on both sides of the transverse transmission device 22, so as to drive the lifting assemblies 212 on both sides simultaneously to achieve lifting and lowering movements through a set of motors. This ensures the synchronous lifting and lowering of the storage rack 213 and avoids the material from tipping over due to the asynchronous movement of the two storage racks 213 during the rising or falling process.
[0083] The material storage device provided in this embodiment of the invention is not only applicable to the grinding equipment of the present invention, but also applicable to the material buffer device of other processing equipment. For the edge material processing system, since multiple silicon blocks are generated at one time after the edge material is cut in the previous process, the grinding equipment cannot process multiple silicon blocks generated at one time at the same time during the grinding process. Therefore, the material storage device 2 enables the grinding equipment to be more compatible with the upstream processing equipment, eliminating the need for manual material preparation and making the automation level of the entire system higher.
[0084] like Figures 12-15As shown, the transfer and centering mechanism 3 provided in this embodiment of the invention is set at the loading and unloading station, including a transfer component and a centering component. The transfer component includes a spatial transfer device and a gripping execution device at the end of the spatial transfer device, so as to drive the gripping execution device to transfer materials at the loading station through the spatial transfer device. The centering component includes a gripper component arranged opposite to each other. The gripper component moves synchronously relative to each other along a first direction to perform a centering operation on the material. Specifically, the gripper component performs a centering operation on the silicon block placed on the clamping component 5 at the loading station.
[0085] In a specific embodiment of the present invention, the loading and unloading of the grinding equipment are located at the same station, so the transfer component can simultaneously complete the loading and unloading of silicon blocks. After the transfer component places the silicon block on the second chuck of the clamping component 5 of the turret clamping mechanism 4, the centering component performs a centering clamping operation on the silicon block, so that the center of the silicon block coincides with the center of the clamping component 5, that is, the center of the material coincides with the material clamping center of the loading station, so as to facilitate subsequent grinding operations.
[0086] Furthermore, the transfer centering mechanism 3 also includes a support component 31, one end of which is fixed to the loading station, and the other end is connected to the spatial transfer device of the transfer component; the support component 31 is also provided with a centering component sliding guide rail 36 extending in a third direction, and the gripper assembly also includes a centering gripper base plate 310, one side of which is slidably connected to the centering component sliding guide rail 36, and the other side of which is connected to the gripper assembly.
[0087] Specifically, the support assembly 31 is provided with a centering screw extending in a third direction, and the centering gripper base plate 310 is provided with a centering bolt. The centering bolt is connected to the centering screw so that by controlling the rotation of the centering assembly screw, the gripper assembly as a whole can be controlled to reciprocate in a third direction.
[0088] In this embodiment of the invention, the spatial transfer device and the centering component are designed coaxially, coordinating the clamping, transfer, and centering operations of the material at the loading station, saving space at the loading station and making the equipment structure compact. The centering component as a whole can reciprocate along a third direction, facilitating the centering and clamping operations of materials with different thicknesses and heights.
[0089] In a specific embodiment of the present invention, the support component 31 is a support frame extending along a third direction. One end of the support component is fixed to the base 7 of the grinding equipment, and the other end is connected to the first direction crossbeam 32 of the spatial transfer device. The spatial transfer device provided in this embodiment of the present invention includes a first direction crossbeam 32 and a first direction drive component. A third direction vertical beam 33 is slidably connected to the first direction crossbeam 32. A third direction drive component is provided on the third direction vertical beam 33. The first direction drive component drives the third direction vertical beam 33 to reciprocate on the first direction crossbeam 32. A suction cup component is connected to the end of the third direction vertical beam 33. The third direction drive component drives the suction cup component to reciprocate on the third direction vertical beam 33. The suction cup component acts as a gripping execution device of the transfer component to pick up materials.
[0090] Specifically, the first direction crossbeam 32 is provided with a first direction lead screw and a lead screw drive motor for driving the first direction lead screw to rotate. The third direction vertical beam 33 is connected to the first direction lead screw by bolts, and the rotation direction of the first direction lead screw is controlled by the lead screw drive motor, thereby realizing the reciprocating motion of the third direction vertical beam 33 in the first direction.
[0091] Furthermore, a vertical beam cylinder is provided on the third-party vertical beam 33, and the suction cup assembly is located at the end of the vertical beam cylinder. By controlling the extension and retraction of the vertical beam cylinder, the reciprocating motion of the suction cup assembly in the third-party direction is realized.
[0092] The spatial transfer device provided in this embodiment of the invention has a simple structure for spatial motion control, enabling it to quickly transfer silicon blocks between the storage device 2 and the loading station, thereby improving the overall operating efficiency of the equipment.
[0093] In a specific embodiment of the present invention, since the suction cup assembly needs to place the silicon block on the clamping component 5 of the turret clamping mechanism 4, in order to avoid interference with the clamping component 5 of the turret clamping mechanism 4, the suction cup assembly provided in this embodiment of the present invention includes a second direction extension plate 34. One end of the second direction extension plate 34 is connected to the end of the third direction vertical beam 33, and the other end is connected to at least one suction cup 35. The second direction extension plate 34 maintains a preset extension distance between the suction cup 35 and the end of the third direction vertical beam 33, thereby avoiding interference between the transfer assembly and the clamping component 5 on the turret clamping mechanism 4.
[0094] Furthermore, the gripper assembly provided in this embodiment of the invention includes centering grippers 37 arranged opposite to each other along a first direction and a synchronous driving component. The synchronous driving component can drive the two centering grippers 37 to move synchronously relative to each other along the first direction, thereby realizing the centering operation of the silicon block at the loading station, so that the center of the silicon block coincides with the clamping center of the loading station.
[0095] Specifically, the synchronous drive assembly in this embodiment of the invention can be a gear and rack structure, a ball screw structure, or other device capable of achieving synchronous reverse movement of two centering jaws 37. In a specific embodiment of the invention, the synchronous drive assembly includes a centering drive motor, a bidirectional lead screw, and a centering guide rail. The bidirectional lead screw and the centering guide rail are arranged parallel to each other along a first direction. The two centering jaws 37 are respectively mounted on the positive thread section and the negative thread section of the bidirectional lead screw, and are slidably arranged on the centering guide rail. The centering drive motor is connected to the bidirectional lead screw for transmission. By driving the bidirectional lead screw to rotate through the centering drive motor, the centering jaws 37 arranged oppositely move synchronously in opposite directions. The synchronous reverse movement of the centering jaws 37 in this invention ensures that the stroke of the oppositely arranged centering jaws 37 is the same each time they move, thereby guaranteeing the accuracy of the centering operation.
[0096] Furthermore, the gripper assembly is also provided with an alignment probe assembly 38, as shown in the attached figure. Figure 15 As shown, the centering probe assembly 38 is positioned on the front side of the centering jaw 37 and operates synchronously with it. As the centering jaw 37 approaches the material, the centering probe assembly 38 first detects the position of the material's side, allowing the centering jaw 37 to control its movement speed based on its distance from the material. This provides a mechanism where, when the centering probe assembly 38 is not in contact with the material, the centering jaw 37 moves rapidly; and when it does, the centering probe retracts and the centering jaw 37 performs the centering operation slowly. This improves centering and clamping efficiency while preventing the centering jaw 37 from bumping into the material due to excessively rapid movement. Furthermore, by simultaneously detecting the material's position using the centering probe assemblies 38 on both sides, the distance between the material and its side can be obtained, thereby determining the grinding allowance.
[0097] Furthermore, the alignment probe assembly 38 includes an alignment probe and a probe driving assembly. The probe driving assembly drives the alignment probe to reciprocate along a first direction to control the alignment probe to protrude or retract from the clamping surface of the alignment jaws 37. This allows for position detection and measurement of the material when the alignment probe protrudes from the clamping surface of the alignment jaws 37, and for controlling the movement of the alignment jaws 37 to complete the alignment and clamping operation of the silicon block when the probe retracts from the clamping surface, thus preventing the probe from interfering with the alignment and clamping operation of the alignment jaws 37.
[0098] Understandably, in addition to driving the centering probe to protrude or retract from the clamping surface of the centering jaw 37 via the probe driving component, the centering probe can also be connected to the centering jaw 37 via an elastic element. When the centering jaw 37 performs the centering clamping operation, the centering probe retracts under the action of material pressure. When the centering jaw 37 releases the material, the centering probe extends out from the clamping surface of the centering jaw 37 under the action of elastic force, so as to facilitate the measurement and detection of the material.
[0099] Furthermore, the centering gripper 37 provided in this embodiment of the invention includes a clamping block disposed on the opposite side of the centering gripper 37, and the clamping surface of the clamping block maintains a preset length and width to accommodate materials of different sizes.
[0100] Furthermore, the centering assembly provided in this embodiment of the invention also includes a second direction driving assembly 39. The centering gripper base plate 310 is connected to the second direction driving assembly 39, and the second direction driving assembly 39 controls the centering gripper base plate 310 to drive the gripper assembly as a whole to reciprocate along the second direction. By controlling the centering assembly to reciprocate along the second direction, the centering gripper 37 as a whole is driven to move towards the material.
[0101] Specifically, the second direction drive assembly 39 is a rack that extends along the second direction on the gripper assembly and a rack drive assembly fixed on the base. The gear at the drive end of the rack drive assembly meshes with the rack on the gripper assembly, and the rack reciprocates along the second direction by rotating the drive gear.
[0102] Furthermore, the centering component also includes a centering calibration device. The centering calibration device and the loading station are in a relatively fixed positional relationship. The centering probe component 38 determines the material clamping center of the loading station by detecting the centering calibration device.
[0103] The control flow of the loading and unloading conveying device according to an embodiment of the present invention is briefly described below:
[0104] S1. The conveying and transfer mechanism 1 transfers the material to the storage device 2;
[0105] S2, The storage bin 21 of the storage device 2 stores the material to the storage position 211;
[0106] S3. When the grinding equipment needs to be fed, the storage bin 21 will transfer the material to the transverse conveying device 22 of the storage device 2, and the transverse conveying device 22 will transfer the material to the material gripping position of the transfer component.
[0107] S4. After the gripping execution device of the transfer component grips the material, the space transfer device transfers the material to the loading and unloading station.
[0108] S5. The centering component detects the position and size of the materials at the loading and unloading stations and completes the centering displacement operation of the materials.
[0109] S6. When the grinding equipment needs to unload materials, the gripping execution device of the transfer component grips the materials at the loading and unloading stations, and then the spatial transfer device transfers the materials to the unloading end.
[0110] The above steps constitute the complete operation flow of the loading and unloading conveyor device. Specifically, step S5, where the centering component completes the material centering operation, further includes:
[0111] S51, the turret clamping mechanism 4 drives the first clamping component to rotate to the loading and unloading station, and the transfer component clamps the material and places it on the second chuck of the first clamping component.
[0112] S52, The centering component performs a centering operation on the first processed side of the material and detects the first processed side by a centering detection probe to determine the processing allowance of the first processed side;
[0113] S53. The second chuck drives the material to rotate as a whole so that the second processing side is positioned opposite to the centering component. The centering component performs a centering operation on the second processing side of the material, and the centering detection probe detects the second processing side to determine the processing allowance of the second processing side.
[0114] The loading and unloading conveying device provided in this embodiment of the invention can not only receive materials from different conveying directions, but also store materials through the storage device 2. At the same time, it can complete the loading and unloading of materials, as well as the centering operation and size detection of materials. The entire system has a compact structure and a higher degree of automation, which simplifies the workflow for subsequent processing operations and also simplifies the structural complexity of the equipment.
[0115] 2. Turret clamping mechanism 4:
[0116] The turret clamping mechanism 4 provided in this embodiment of the invention is rotatably mounted on the base 7, including a central turret 41 and multiple clamping components 5 arranged along the circumferential direction of the central turret 41. The central turret 41 can rotate along its central axis. In a specific embodiment of the invention, the central axis of the central turret 41 is a rotation axis perpendicular to the direction of the base 7. The central turret 41 rotates along the central axis to drive each clamping component 5 to rotate between different workstations. The base 7 is provided with workstations corresponding to the clamping components 5 on the turret clamping mechanism. Therefore, after one silicon block clamping and alignment, multiple processing workstations can simultaneously perform grinding operations such as rough grinding and fine grinding of the silicon block to achieve the purpose of processing multiple silicon blocks simultaneously in one processing cycle, thereby improving the grinding efficiency of the silicon block.
[0117] like Figures 16-19 As shown, in a specific embodiment of the present invention, the turret clamping mechanism 4 includes a central turret 41 and three clamping components 5 evenly arranged along the circumferential direction of the central turret 41, that is, the included angle between two adjacent clamping components 5 is 120°. Corresponding to the turret clamping mechanism 4, the base 7 of the grinding equipment is provided with a loading and unloading station, a rough grinding station and a fine grinding station, and the included angle between each station is also 120°. Therefore, after the silicon block completes the centering and clamping operation at the loading and unloading station, the rough grinding and fine grinding processes can be completed sequentially by controlling the rotation of the turret clamping mechanism 4. Finally, it is rotated to the loading and unloading station and the silicon block is unloaded by the transfer centering mechanism 3.
[0118] Furthermore, a rotary drive assembly 42 is provided on the base 7, which drives the central turret 41 to rotate as a whole. A rotary gear is provided at one axial end of the central turret 41, and the turret clamping mechanism 4 also includes a gear drive assembly that meshes with the rotary gear. The gear drive assembly drives the rotary gear to rotate, thereby driving the central turret 41 to rotate as a whole. In a specific embodiment of the present invention, the rotary gear is located at the bottom end of the central turret 41, and the gear drive assembly includes a drive gear meshing with the rotary gear on the base 7 and a gear drive motor located in the base to drive the drive gear to rotate. The present invention uses a gear drive to control the rotation angle of the central turret 41, which can ensure the rotation accuracy of the central turret 41, thereby ensuring the processing accuracy of silicon ingot grinding.
[0119] Furthermore, a slip ring bracket 43 and a slip ring assembly are provided at one axial end of the central turret 41. The slip ring bracket 43 fixes the slip ring assembly to a preset position on the central turret 41. The fixed end of the slip ring assembly is connected to a preset external power source. The external power source is connected to the rotating end of the slip ring assembly through the interior of the slip ring assembly. The rotating end of the slip ring assembly is connected to the power equipment inside the turret clamping mechanism 4 to transmit the external power source to the power equipment inside the turret clamping mechanism 4. The external power source can be a power source, a gas source, or an oil source. The power equipment can be not only a rotational power equipment, but also other equipment that is suitable for gas or oil.
[0120] In a specific embodiment of the present invention, the turret clamping mechanism 4 includes a slip ring bracket 43 at the top and a slip ring assembly. The slip ring assembly is fixed above the central turret 41 of the turret clamping mechanism 4 via the slip ring bracket 43. The slip ring assembly delivers electricity, gas, and lubricating oil into the interior of the central turret 41. The present invention uses an electric slip ring device to provide power to the electrical, gas, and lubrication equipment of the central turret 41, while also avoiding the wiring entanglement problem caused by continuously providing power to the electrical equipment of the rotating material loading unit.
[0121] In this embodiment of the invention, the turret clamping mechanism 4 rotates along the central axis via the central turret 41 to drive each clamping component 5 to rotate between different workstations, thereby enabling the simultaneous processing of multiple materials within one work cycle and improving the processing efficiency of the equipment.
[0122] like Figures 19-22 As shown, the clamping assembly 5 on the turret clamping mechanism 4 includes a first clamping assembly 51 and a second clamping assembly 52 arranged opposite to each other along the axial direction of the central turret 41. The first clamping assembly 51 and the second clamping assembly 52 reciprocate along the axial direction of the central turret 41 to clamp or release materials.
[0123] It should be noted that the clamping component 5 provided in this embodiment of the invention can be applied not only to the turret clamping mechanism 4 of the grinding equipment, but also to other rotating frames or moving frames.
[0124] Furthermore, the first chuck assembly 51 includes a clamping chamber and a first chuck 511. A clamping drive assembly 513 is provided in the clamping chamber. The clamping chamber forms an internally sealed space, thus isolating the clamping drive assembly 513 from the external environment and preventing dust and water mist generated during the equipment processing from entering the interior of the clamping drive assembly 513.
[0125] Furthermore, the clamping chamber includes a cover 541 and a clamping drive assembly 513 within the cover 541. The cover 541 is connected to the side wall of the central turret 41. A first chuck 511 extends through a first opening on the cover 541 to the outside of the cover 541. The clamping drive assembly 513 drives the first chuck 511 to reciprocate along the axial direction of the central turret 41. This invention uses a clamping chamber to protect the clamping drive assembly 513 within the cover 541, preventing silicon powder and water mist from affecting the clamping drive assembly 513 during processing and ensuring the operational stability of the equipment.
[0126] Furthermore, the first chuck assembly 51 also includes a first chuck bracket 512 and a first chuck 511. A clamping slide rail is provided inside the cover 541 of the clamping chamber. Specifically, the clamping slide rail is provided on the side wall of the central turret 41. One end of the first chuck bracket 512 is slidably connected to the clamping slide rail, and the other end extends radially away from the central turret 41 and connects to the first chuck 511. The clamping drive assembly 513 drives the first chuck bracket 512 to reciprocate on the clamping slide rail, so as to drive the first chuck 511 located at the end of the first chuck bracket 512 to reciprocate in the clamping direction.
[0127] Furthermore, the clamping drive assembly 513 also includes a clamping screw and a clamping screw drive motor. The first chuck bracket 512 is connected to the clamping screw, and the clamping screw is driven to rotate by the clamping screw drive motor, which in turn drives the first chuck bracket 512 to reciprocate along the axial direction of the clamping screw.
[0128] In a specific embodiment of the present invention, a first chuck 511 is disposed at the upper end of the central turret 41, and a second chuck 521 is disposed at the lower end of the central turret 41. The silicon block is placed on the second chuck 521. The silicon block is clamped and released by controlling the reciprocating motion of the first chuck 511. This ensures the stable placement of the silicon block on the second chuck 521 and avoids the movement of the second chuck 521 affecting the position of the silicon block on the second chuck 521 during the clamping process, thereby improving the stability of the clamping operation.
[0129] Furthermore, since the first chuck 511 needs to reciprocate at the first opening of the clamping chamber, to prevent silicon powder and water mist from entering the cover 541 through the first opening, the clamping chamber provided in this embodiment of the invention also includes a chuck accordion cover 542. The chuck accordion cover 542 is a closed annular cover, with one axial end connected to the first chuck support 512 and the other end connected to the first opening. The chuck accordion cover 542 ensures the reciprocating motion of the first chuck 511 while preventing dust and water mist from entering the cover 541 through the first opening, further improving the protection level of the clamping chamber.
[0130] Furthermore, the cover 541 is provided with a second opening 543, which is connected to an external air source to blow air into the clamping chamber, so that the inner cavity of the clamping chamber is in a slightly positive pressure state. The slightly positive pressure state increases the resistance of external dust and water mist to entering the clamping chamber, further improving the protection level of the clamping chamber.
[0131] Furthermore, the second chuck 521 includes a second chuck bracket 522 and a second chuck 521. One end of the second chuck bracket 522 is connected to the side wall of the rotating frame, and the other end extends radially away from the rotating frame and is connected to the second chuck 521 at the end of the second chuck bracket 522.
[0132] Furthermore, in this embodiment of the invention, the second chuck 521 can rotate around the central axis of the second chuck 521 to drive the material placed on the second chuck 521 to rotate as a whole, so as to facilitate the material to rotate by the second chuck 521 to cooperate with the processing device to process different sides of the material.
[0133] Specifically, the second chuck assembly 52 also includes a chuck rotation drive assembly, which includes a chuck rotation motor 524 and a chuck bearing 523. The second chuck 521 is connected to the rotation shaft of the chuck rotation motor 524 through the chuck bearing 523. The second chuck 521 is driven to rotate by the chuck rotation motor 524, so as to drive the material on the second chuck 521 to rotate.
[0134] Furthermore, the first chuck assembly 51 also includes a driven bearing 515 and a floating chuck 514. The floating chuck 514 is connected to the first chuck 511 via the driven bearing 515, so that the floating chuck 514 rotates with the second chuck 521. By providing a floating chuck 514 on the first chuck 511, the present invention allows the clamping assembly 5 to clamp the material while simultaneously rotating the entire material along the central axis of the clamping assembly 5, preventing the material from shifting on the clamping assembly during rotation and ensuring that the center of the material remains aligned with the center of the clamping assembly 5.
[0135] Since the silicon block needs to be ground in both the 0° and 90° directions during the grinding process, in order to ensure that the silicon block can be rotated while being clamped, the present invention adopts a method in which the second chuck 521 actively rotates the first chuck 511 and then rotates it. This method ensures that the silicon block will not shift its position while rotating, thereby ensuring that the clamping center always coincides with the center of the silicon block and thus ensuring grinding accuracy.
[0136] like Figure 22 As shown, during the grinding operation, the grinding wheel 624 rotates at high speed between the first chuck 511 and the second chuck 521. Therefore, the clamping assembly 5 needs to provide grinding clearance space for the grinding wheel 624. Specifically, the present invention connects the central turret 41 through the first chuck bracket 512 and the second chuck bracket 522, so that the clamping center of the first chuck 511 and the second chuck 521 maintains a certain distance from the side wall of the central turret 41, providing machining clearance space for the grinding wheel to perform the grinding operation.
[0137] Furthermore, the first chuck 511 has a preset first axial length in the axial direction, and the second chuck 521 has a second axial length in the axial direction, so as to provide processing clearance space when the clamping assembly 5 clamps the material.
[0138] In a specific embodiment of the present invention, since the silicon block is small in size, the grinding wheel used to grind the silicon block is larger in size than the silicon block. Therefore, the present invention provides clearance space for the grinding wheel during grinding operation by extending the axial length of the first chuck 511 and the second chuck 521.
[0139] The turret clamping mechanism 4 provided in this embodiment of the invention is applicable not only to the grinding equipment of this invention, but also to other processing equipment. The turret clamping mechanism 4 can cooperate to complete the simultaneous processing operations at different workstations, making the entire equipment structure compact, improving processing efficiency, and ensuring the stable operation of the equipment.
[0140] 3. Slide table grinding wheel mechanism 6
[0141] In this embodiment of the invention, both the rough grinding station and the fine grinding station of the grinding equipment are equipped with a sliding grinding wheel mechanism 6. By controlling the grinding wheel assembly 62 of the sliding grinding wheel mechanism 6 to reciprocate along the radial direction of the central turret 41, the grinding operation of the silicon block is realized.
[0142] like Figures 23-27 As shown, the slide table grinding wheel mechanism 6 provided in this embodiment of the invention includes a slide table feed guide rail 63 arranged along the second direction of the grinding station, a grinding wheel slide 61 slidably connected to the slide table feed guide rail 63, and a slide table feed drive assembly. Two grinding wheel assemblies 62 are arranged opposite to each other on the grinding wheel slide 61. The slide table feed drive assembly drives the grinding wheel slide 61 to reciprocate along the second direction to move closer to or away from the clamping assembly 5.
[0143] Furthermore, a grinding wheel feed guide and a grinding wheel feed drive assembly are arranged opposite each other on the grinding wheel slide 61 along the first direction of the grinding station. The grinding wheel assemblies 62 are slidably arranged on the grinding wheel feed guide. The grinding wheel feed drive assembly drives the grinding wheel assemblies 62 to reciprocate along the first direction so that the two opposite grinding wheel assemblies 62 move closer or further away from each other.
[0144] The slide grinding wheel mechanism 6 provided in this embodiment of the invention controls the grinding wheel assembly 62 to move closer to the clamping assembly 5 by the grinding wheel slide 61, so as to ensure that the left and right grinding wheels are fed synchronously during high-speed grinding, and the grinding process is more stable.
[0145] Furthermore, during the grinding operation of the grinding wheel assembly 62, the grinding wheel 624 rotates at high speed and feeds along the grinding direction. This can cause the grinding wheel to overheat. If the grinding wheel 624 is under such conditions for a long time, defects will appear on its surface, ultimately affecting the quality of the ground silicon block surface. Therefore, in this embodiment of the invention, a corresponding cooling system is designed for the grinding wheel.
[0146] Specifically, the grinding wheel assembly 62 includes a grinding wheel drive assembly 623, a grinding wheel 624, and a spindle unit. The spindle unit includes a rotating spindle (not shown in the figure) and a spindle housing 621 coaxially arranged with the rotating spindle. The rotating spindle is enclosed inside the spindle housing 621, and the rotating spindle and the spindle housing 621 are relatively independent. While the rotating spindle maintains high-speed rotation, the spindle housing remains relatively stationary. Therefore, the grinding wheel drive assembly 623 drives the rotating spindle to rotate, thereby driving the grinding wheel 624 connected to the end of the rotating spindle to rotate. A grinding wheel cooling assembly 625 is provided at one end of the spindle housing 621 to cool the grinding wheel.
[0147] Furthermore, the grinding wheel cooling assembly 625 includes a liquid inlet and a nozzle extending to the side of the grinding wheel 624. The liquid inlet is connected to external coolant, and the coolant is sprayed onto the grinding wheel 624 through the nozzle. The grinding wheel cooling assembly 625 provided in this embodiment of the invention can effectively reduce the temperature of the grinding wheel 624 by spraying coolant onto the grinding wheel separately, thereby improving grinding efficiency and grinding quality.
[0148] Furthermore, since silicon powder and water mist are generated during the grinding process, the slide grinding wheel mechanism 6 of this embodiment of the invention also includes a grinding wheel drive chamber. A grinding wheel drive assembly 623 is disposed inside the grinding wheel drive chamber. One end of the spindle unit extends into the grinding wheel drive chamber to connect the rotating spindle to the grinding wheel drive assembly 623, and the other end extends out of the grinding wheel drive chamber and is connected to the grinding wheel at the end. The grinding wheel drive chamber includes a grinding wheel cover 641, which protects each drive assembly in a sealed internal space, preventing water mist and silicon powder from affecting the drive assemblies.
[0149] Furthermore, a bellows-shaped protective cover 642 is installed on the main shaft unit outside the grinding wheel drive chamber. One end of the bellows-shaped protective cover 642 is fixedly connected to the grinding wheel drive chamber, and the other end is connected to the end of the main shaft housing 621. The bellows-shaped protective cover 642 prevents water mist and silica powder from entering the grinding wheel drive chamber through the gaps in the main shaft unit, further ensuring the stable operation of the equipment.
[0150] Furthermore, the grinding wheel drive chamber is provided with an air inlet 643 to blow air into the grinding wheel drive chamber. The air inlet 643 is connected to an external air source, which makes the grinding wheel drive chamber present a slightly positive pressure state, providing resistance to the entry of external dust and water mist, and playing a secondary auxiliary sealing role.
[0151] Furthermore, the grinding wheel drive assembly 623 includes a grinding wheel rotation drive motor and a tension belt. The rotating shaft of the grinding wheel rotation drive motor is connected to the rotating main shaft through the tension belt. The grinding wheel rotation drive motor drives the tension belt to rotate, thereby driving the rotating main shaft to rotate.
[0152] Furthermore, the grinding wheel drive assembly 623 also includes a belt adjustment device, which includes a belt shaft mounting plate and multiple elongated holes on the belt shaft mounting plate. The rotating shaft at one end of the tension belt is mounted in the elongated hole by a bolt assembly, and the other end of the tension belt is connected to the rotating spindle. The tension of the tension belt is adjusted by adjusting the position of the bolt assembly in the elongated hole.
[0153] This invention utilizes a motor to drive a synchronous belt, which in turn drives a main shaft unit, which in turn drives a grinding wheel 624, ultimately achieving high-speed rotation of the grinding wheel 624. The device incorporates a belt tensioning mechanism to adjust the belt tension and ensure stable operation. The overall structure is compact and highly space-efficient.
[0154] Furthermore, the grinding wheel drive assembly in this embodiment of the invention also includes a calibration probe assembly 65, which is used to detect the position of the material to be ground. The calibration probe assembly 65 includes a calibration probe and a calibration probe drive assembly, which drives the calibration probe to reciprocate along a first direction to protrude or retract onto the grinding surface of the grinding wheel 624. The calibration probe assembly 65, together with the turret clamping mechanism 4, constitutes the machining position correction system of the machining equipment provided in this embodiment of the invention. The machining position correction system will be further described below.
[0155] 4. Machining position correction system
[0156] like Figure 26As shown, in this embodiment of the invention, a calibration device 54 is also provided on the clamping assembly 5. In order to avoid the rotation error of the central turret 41 during the rotation process from affecting the grinding accuracy of the silicon block, this embodiment of the invention introduces a calibration probe on the grinding wheel assembly 62 and a position calibration assembly on the clamping assembly 5, which can calibrate the rotation angle of the central turret 41 and further improve the grinding accuracy of the silicon block.
[0157] The present invention comprises a machining position correction system provided in the embodiment of the present invention, consisting of a turret clamping mechanism 4, a clamping component 5 and a calibration device 54 on the turret clamping mechanism 4, a calibration probe component 65 on the slide grinding wheel mechanism 6, and a positioning device 71 on the grinding station.
[0158] It should be noted that this position correction system can be applied not only to the grinding equipment of the present invention, but also to other processing equipment with similar structures to the present invention, such as a slide mechanism with a structure similar to the slide grinding wheel mechanism 6, and the slide mechanism is provided with corresponding processing components. By setting corresponding calibration probe components 65 on the processing components, the processing position correction of the above embodiment can be realized.
[0159] Specifically, the system includes a base 7, a turret clamping mechanism 4, and a slide mechanism (corresponding to the slide grinding wheel mechanism of the grinding equipment). The base 7 is provided with at least one processing station. The processing station is provided with a positioning device 71 and a slide mechanism. The slide mechanism includes a processing component and a calibration probe component 65. The slide mechanism reciprocates along the second direction of the processing station so that the processing component performs processing operations on the material at the processing station. The turret clamping mechanism 4 is provided with a clamping component 5. The clamping component 5 is provided with a calibration device 54. The turret clamping mechanism 4 drives the clamping component 5 to rotate to the processing station. The calibration probe component 65 detects the positioning device 71 and the calibration device 54 respectively to determine the positional offset of the clamping component 5 relative to the processing station.
[0160] Furthermore, the calibration device 54 is a position calibration reference plate, the positioning device 71 is a position positioning reference plate, and the calibration probe assembly 65 detects the positions of the position positioning reference plate and the position calibration reference plate in the first direction of the machining station, respectively, and determines the displacement difference between the position positioning reference plate and the position calibration reference plate in the first direction of the machining station, so as to determine the position difference between the clamping assembly 5 on the turret clamping mechanism 4 and the machining station.
[0161] Furthermore, the processing position correction system provided in this embodiment of the invention also includes a transfer centering mechanism 3 provided at the loading and unloading station as described in the foregoing embodiment, so as to complete the centering of the material center with the clamping center of the clamping component 5 during loading through the transfer centering mechanism 3, as the basis for subsequent processing correction. Since it has been described in detail in the foregoing embodiment, it will not be repeated here.
[0162] The correction method of the processing position correction system of the processing equipment in the above embodiment will be described in detail below. The method includes:
[0163] S1. The turret clamping mechanism 4 drives the clamping assembly 5 to rotate to the processing station corresponding to the clamping assembly 5.
[0164] S2. The slide mechanism at the machining station moves toward the clamping assembly 5 in the radial direction of the turret clamping mechanism 4, so as to detect the positioning device 71 and the calibration device 54 respectively through the calibration probe assembly 65, and determine the position offset of the clamping assembly 5 relative to the current machining station.
[0165] S3. Control the machining components of the slide mechanism to move along the first direction to compensate for the positional offset of the clamping components at the current machining station.
[0166] Specifically, controlling the movement of the processing component of the slide mechanism along the first direction to compensate for the positional offset of the clamping component at the current processing station involves controlling the entire processing component of the slide mechanism to move in the opposite direction of the positional offset along the first direction at the current processing station by a corresponding positional offset. At this time, the distance between the two processing components on the slide mechanism remains fixed, and the distance between the two processing components is the target processing distance of the material to be processed relative to the processing side. Furthermore, the centering operation at the loading and unloading station included in this method has already been described in the foregoing embodiments, and it may further include:
[0167] S01, the turret clamping mechanism 4 drives the first clamping component to rotate to the loading and unloading station, and the transfer component transfers the material to the first clamping component;
[0168] S02, the centering component at the loading and unloading station moves toward the first clamping component in the radial direction of the turret clamping mechanism and detects the material position through the centering probe component 38;
[0169] S03. The centering component moves synchronously relative to the material along the first direction of the loading and unloading station to perform centering operation on the material.
[0170] S04, The centering probe assembly 38 of the centering component extends to detect the relative distance between the two processing sides of the material.
[0171] The machining position correction system provided in this embodiment of the invention, after the turret clamping mechanism drives the clamping component 5 to rotate to the machining station, the calibration probe component 65 on the slide mechanism detects the positioning device 71 of the machining station and the calibration device 54 on the clamping component 5 respectively, to determine the position offset of the clamping component 5 at the current machining station, so that the position offset of the clamping component 5 can be compensated by controlling the machining component as a whole to move and offset along the first direction, thereby compensating for the control accuracy of the rotation angle of the turret clamping mechanism 4 and improving the machining accuracy of the machining equipment.
[0172] 6. Knife Repair System
[0173] Furthermore, in this embodiment of the invention, a tool trimming device 53 is also provided laterally on the clamping component 5 of the turret clamping mechanism 4. The turret clamping mechanism 4, the clamping component 5 on the turret clamping mechanism 4, the tool trimming device 53, and the slide grinding wheel mechanism 6 described in the foregoing embodiments together constitute the tool trimming system provided in this embodiment. This tool trimming system can perform tool trimming operations on the grinding device while the slide grinding wheel mechanism 6 is performing a grinding operation on the material clamped by the clamping component 5, without needing to drive the slide grinding wheel mechanism 6 to the tool trimming station for tool trimming operations. This not only simplifies the equipment structure but also improves grinding efficiency.
[0174] Specifically, in a specific embodiment of the present invention, the second chuck bracket 522 includes a first support portion and a second support portion. The first support portion is connected to the central turret 41, and the second support portion is located radially away from the central turret 41 and connected to the second chuck 521. The axial length of the first support portion is greater than that of the second support portion, and the tool trimming device is disposed on the first support portion.
[0175] In a preferred embodiment of the present invention, the horizontal height of the first support is located at the clamping plane of the second clamp, and the tool trimming device 53 is disposed on the first support and is flush with the clamping plane of the second clamp. The tool trimming device 53 includes an oilstone assembly, which includes oilstones disposed opposite to each other on both sides of the first support. The oppositely disposed oilstones can simultaneously perform tool trimming operations on the oppositely disposed grinding wheel assembly 62.
[0176] Furthermore, in a specific embodiment of the present invention, the grinding station includes a rough grinding station and a fine grinding station. At least one clamping assembly 5 is laterally provided with a rough grinding dressing device, and at least two clamping assemblies 5 are laterally provided with fine grinding dressing devices. Therefore, in a preferred embodiment of the present invention, a rough grinding dressing device is provided on both sides of one of the clamping assemblies 5, and a fine grinding dressing device 53 is provided on at least two clamping assemblies 5, so that the dressing operation of different grinding wheels can be realized simultaneously during the grinding operation.
[0177] 5. Control methods for grinding equipment
[0178] This invention also provides a control method based on the above-mentioned grinding equipment, which specifically includes the following steps:
[0179] S1. The turret clamping mechanism 4 drives the clamping assembly 5 to rotate to the corresponding grinding station, and the sliding table grinding wheel mechanism 6 performs grinding operation on the first processing side of the material at the current grinding station.
[0180] S2. The clamping assembly 5 drives the material to rotate as a whole, so that the second processing side of the material is set relative to the grinding surface of the slide grinding wheel mechanism 6.
[0181] S3, the sliding table grinding wheel mechanism 6 performs grinding operations on the second processing side of the material at the current grinding station until the grinding operation of the material at the current grinding station is completed.
[0182] The grinding equipment provided in this embodiment of the invention has at least two grinding stations on the base 7 and a clamping component 5 corresponding to the grinding station on the turret clamping mechanism 4, so that materials at different grinding stations can be ground, thereby improving the processing efficiency of the equipment.
[0183] In a specific grinding operation, the grinding of the silicon block is completed through one rough grinding and one fine grinding. Therefore, the control method of the grinding equipment in this embodiment of the invention may further include the following steps:
[0184] S11. Control the turret clamping mechanism 4 to rotate, driving the first clamping component to rotate to the rough grinding station. At this time, the second clamping component is located at the fine grinding station, and the third clamping component is located at the loading and unloading station.
[0185] S12, the material on the first clamping assembly is subjected to rough grinding operation at the rough grinding station; the material on the second clamping assembly is subjected to fine grinding operation at the fine grinding station; the transfer and centering mechanism 3 located at the loading and unloading station performs material transfer and centering operation on the third clamping assembly;
[0186] S13. Control the turret clamping mechanism 4 to rotate, driving the first clamping assembly to rotate to the fine grinding station. At this time, the second clamping assembly is located at the loading and unloading station, and the third clamping assembly is located at the rough grinding station.
[0187] S14. The material on the third clamping assembly is subjected to rough grinding at the rough grinding station; the material on the first clamping assembly is subjected to fine grinding at the fine grinding station; the transfer and centering mechanism 3 located at the loading and unloading station unloads the processed material on the second clamping assembly and performs material transfer and centering operations.
[0188] The control method for the grinding equipment provided in this embodiment of the invention, by setting at least two grinding stations on the base 7 and setting clamping components 5 corresponding to the grinding stations on the turret clamping mechanism 4, allows materials at different grinding stations to be ground in a processing cycle, thereby improving the processing efficiency of the equipment.
[0189] The present invention has been further described above with reference to specific embodiments. However, it should be understood that the specific descriptions herein should not be construed as limiting the substance and scope of the present invention. Various modifications made to the above embodiments by those skilled in the art after reading this specification are all within the scope of protection of the present invention. The various specific technical features described in the above embodiments can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, the embodiments of the present invention will not further describe various possible combinations.
[0190] If the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.
Claims
1. A machining position correction system, characterized in that, The device includes a base, a turret clamping mechanism, and a slide mechanism. The base has at least one machining station, and the machining station is equipped with a positioning device and a slide mechanism. The slide mechanism includes a machining component and a calibration probe component. The machining component can reciprocate along a first direction of the machining station, and the slide mechanism reciprocates along the radial direction of the turret clamping mechanism. The turret clamping mechanism is equipped with a clamping component, which includes a first chuck component and a second chuck component. The clamping component is equipped with a calibration device. The turret clamping mechanism drives the clamping component to rotate to the machining station. The calibration probe component detects the positioning device and the calibration device respectively to determine the positional offset of the clamping component relative to the machining station. The first direction of the machining station is perpendicular to the radial direction of the central turret.
2. The machining position correction system according to claim 1, characterized in that, The slide mechanism includes a slide feed guide rail arranged along the radial direction of the turret clamping mechanism and a machining slide slidably connected to the slide feed guide rail. A machining feed guide rail is arranged on the machining slide along the first direction of the machining station, and the machining component is slidably connected to the machining feed guide rail.
3. The machining position correction system according to claim 2, characterized in that, The base has multiple workstations, including multiple processing workstations. The turret clamping mechanism includes a central turret and multiple clamping components arranged around the central turret. The number of clamping components corresponds to the number of workstations on the base. The central turret drives the clamping components to rotate on the base, so that the clamping components can rotate between different workstations.
4. The machining position correction system according to claim 3, characterized in that, The calibration device is a position calibration reference plate, the positioning device is a position positioning reference plate, and the calibration probe assembly detects the positions of the position positioning reference plate and the position calibration reference plate in the first direction of the machining station, respectively, and determines the displacement difference between the position positioning reference plate and the position calibration reference plate in the first direction of the machining station, so as to determine the position difference between the clamping assembly on the turret clamping mechanism and the machining station.
5. The machining position correction system according to claim 4, characterized in that, The calibration probe assembly includes a calibration probe and a calibration probe driving assembly. The calibration probe driving assembly drives the calibration probe to reciprocate along a first direction to protrude or retract onto the processing surface of the processing assembly.
6. The machining position correction system according to any one of claims 1-5, characterized in that, The slide mechanism is a slide grinding wheel mechanism, and the processing component is a grinding wheel assembly.
7. The machining position correction system according to claim 3, characterized in that, The multiple workstations include at least one loading and unloading workstation. A transfer and centering mechanism is provided at the loading and unloading workstation. The transfer and centering mechanism includes a transfer component and a centering component. The transfer component transfers materials at the loading and unloading workstation. The centering component includes a gripper component arranged opposite to each other. The gripper component moves synchronously relative to each other along a first direction of the loading and unloading workstation to perform a centering displacement operation on the materials at the loading and unloading workstation. The first direction of the loading and unloading workstation is perpendicular to the radial direction of the central turret.
8. The machining position correction system according to claim 7, characterized in that, The transfer centering mechanism also includes a support component. One end of the support component is fixed at the loading and unloading station, and the other end is connected to the transfer component. The support component is also provided with a centering component sliding guide rail extending in a third direction. The centering component also includes a centering component base plate. One side of the centering component base plate is slidably connected to the centering component sliding guide rail, and the other side is connected to the gripper component.
9. The machining position correction system according to claim 8, characterized in that, The gripper assembly is equipped with a centering probe assembly, which detects the size and / or position of the material.
10. The machining position correction system according to claim 9, characterized in that, The gripper assembly includes a centering gripper and a synchronous drive assembly arranged along a first direction of the loading and unloading station. The synchronous drive assembly drives the centering gripper to reciprocate along the first direction of the loading and unloading station.
11. A control method based on the machining position correction system according to any one of claims 1-10, characterized in that, The method includes: The turret clamping mechanism drives the clamping assembly to rotate to the processing station corresponding to the clamping assembly; The slide mechanism at the machining station moves toward the clamping assembly in the radial direction of the turret clamping mechanism, and the positioning device and calibration device are detected by the calibration probe assembly to determine the position offset of the clamping assembly relative to the current machining station. The machining components of the control slide mechanism move along a first direction to compensate for the positional offset of the clamping components at the current machining station.
12. The method according to claim 11, characterized in that, The processing position correction system includes a transfer centering mechanism installed at the loading and unloading station, and the method further includes: The turret clamping mechanism drives the first clamping component to rotate to the loading and unloading station, and the transfer component transfers the material to the first clamping component; The centering component at the loading and unloading station moves toward the first clamping component in the radial direction of the turret clamping mechanism and detects the material position through the centering needle detection component; The centering component moves synchronously relative to the material along the first direction of the loading and unloading station to perform centering operation on the material. The centering probe assembly of the centering component extends to detect the relative distance between the two processed sides of the material.
Citation Information
Cited By
Silicon wafer chamfering processing production system and method thereof
CN121447511A