An online detection device and detection method for electronic irradiation high dose

Abstract

The present application relates to a kind of online detection device and detection method for electron irradiation high dose, vacuum shell is surrounded into vacuum chamber, installation port is opened on the outer wall of vacuum shell, titanium-based vacuum membrane window is installed in installation port, water cooling plate cover is set on installation port, collimating hole is opened on water cooling plate, collimating hole is through water cooling plate, and it is correspondingly arranged with titanium-based vacuum membrane window, detection component is set in vacuum chamber, detection component is correspondingly arranged with collimating hole;Signal reading device is set outside vacuum shell, signal reading device is connected with detection component;Detection process: target detection electron enters faraday cup-current signal is read by signal reading equipment;Titanium-based vacuum membrane window allows the efficient penetration of electron while maintaining the internal and external pressure difference of vacuum chamber, effectively avoids that gas ionization particle enters detection range, thereby, solve the technical problem that target detection electron beam intensity cannot be detected in atmospheric environment;Meanwhile, the accuracy of detection is improved.

Description

Technical Field

[0001] This invention relates to the field of quantum sensing material preparation technology, and in particular to an online detection device and method for high-dose electron irradiation. Background Technology

[0002] Currently, diamond nitrogen-vacancy (NV) centers are a quantum sensing material capable of high-precision magnetic field measurement. High-energy electron irradiation of nitrogen-containing diamond is a crucial step in the preparation of diamond NV center materials. In this step, the C bonds in the nitrogen-containing diamond (target) break under electron beam bombardment, forming vacancies; subsequently, these vacancies combine with adjacent nitrogen atoms to form NV centers. Probing the irradiation intensity of the electron beam can determine the uniformity of the irradiation intensity distribution, calibrate the intensity value endured by the target, and optimize the preparation process and improve material performance.

[0003] Existing electron beam irradiation intensity detection devices mainly fall into two categories: 1) Faraday cups, which are cup-shaped collectors that directly measure electron beam intensity by absorbing electron beam charge. The cup opening typically has a suppressor electrode or is fitted with a small negative bias voltage to prevent secondary electrons generated by incident electrons colliding with the cup's edge from escaping, and also to prevent secondary electrons generated inside the cup from escaping; 2) Beam transformers, which contain a ceramic slit to allow the electron beam to pass through, and are surrounded by a high-permeability magnetic ring to sense changes in the magnetic field generated by the beam. The intensity of the passing electron beam is calculated by detecting the voltage signal generated on the secondary winding by the changing magnetic field. Both of these devices are typical for measuring electron beam intensity and require operation in a vacuum environment. Under atmospheric conditions, the initial intensity of the electron beam cannot be detected due to interference from ionized gas particles. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the purpose of this invention is to provide an online detection device and method for high-dose electron irradiation, which has the advantage of solving the technical problem of not being able to detect the intensity of an electron beam in an atmospheric environment.

[0005] The above-mentioned objective of this invention is achieved through the following technical solution: In one aspect, this invention provides an online detection device for high-dose electron irradiation, comprising a vacuum housing, a water-cooled plate, a titanium-based vacuum membrane window, a detection component, and a signal reading device; the vacuum housing encloses a vacuum chamber, and an installation opening is provided on the outer wall of the vacuum housing, the installation opening communicating with the vacuum chamber; the titanium-based vacuum membrane window is installed within the installation opening; the water-cooled plate covers the installation opening; a collimation hole is provided on the water-cooled plate, the collimation hole penetrating the water-cooled plate and correspondingly positioned to correspond with the titanium-based vacuum membrane window. The detection component is disposed within the vacuum chamber, and the detection component is correspondingly disposed with respect to the collimation aperture; the signal reading device is disposed outside the vacuum housing, and the signal reading device is connected to the detection component; the titanium-based vacuum membrane window is used to allow the electron beam of the detected target to pass through the atmospheric environment into the vacuum chamber, be collected in the detection component, and block gas ionized particles; the detection component is used to absorb the electron beam used for target irradiation and convert the absorbed electron charge into an analog current signal; the signal reading device is used to read the current signal in the detection component.

[0006] Preferably, the online detection device for high-dose electron irradiation provided by the present invention includes a plurality of detection units, which are spaced apart along a first direction of the vacuum housing, and each detection unit is corresponding to the titanium-based vacuum membrane window. Each detection unit is connected to the signal reading device.

[0007] Preferably, the online detection device for high-dose electron irradiation provided by the present invention includes a detection unit comprising a shielding and fixing component, an insulating mounting component, and at least two detection modules; the shielding and fixing component is configured to form an accommodating cavity, the bottom end of the insulating mounting component is inserted into the accommodating cavity, the top end of the insulating mounting component is located outside the accommodating cavity, and the top end of the insulating mounting component is connected to the top end of the shielding and fixing component by an insulating fastening bolt; the insulating mounting component is provided with at least two mounting cavities, the two mounting cavities are spaced apart along the second direction of the vacuum shell, the mounting cavities are correspondingly arranged one-to-one with the detection modules, and the two detection modules are respectively disposed in the two mounting cavities.

[0008] Preferably, in the online detection device for high-dose electron irradiation provided by the present invention, the shielding fixing component includes a shielding cylinder and a support base. The shielding cylinder is arranged to form the accommodating cavity, and the bottom end of the shielding cylinder is inserted into the support base so that the bottom end of the shielding cylinder is closed.

[0009] Preferably, in the online detection device for high-dose electron irradiation provided by the present invention, the insulating mounting assembly includes an insulating fixing plate, an insulating sleeve, an insulating plate, an insulating cylinder, and an insulating base plate. The insulating fixing plate, the insulating sleeve, the insulating plate, the insulating cylinder, and the insulating base plate are connected sequentially from top to bottom. The insulating fixing plate is connected to the mounting flange at the top of the shielding cylinder by insulating fastening bolts. The insulating fixing plate has at least two first cavities, both of which penetrate the insulating fixing plate, and the two first cavities are spaced apart along the second direction. The insulating sleeve has at least two second cavities. Two second cavities are spaced apart along the second direction, and the first cavity corresponds to the second cavity in a one-to-one manner; at least two third cavities are provided on the insulating plate, and the two third cavities are spaced apart along the second direction, and the third cavity corresponds to the second cavity in a one-to-one manner; two fourth cavities are provided on the insulating cylinder, and the two fourth cavities are spaced apart along the second direction, and the fourth cavity corresponds to the third cavity in a one-to-one manner; the first cavity, the second cavity, the third cavity, and the fourth cavity are sequentially connected to form the mounting cavity; the insulating base plate is sealed at the bottom end of the insulating cylinder.

[0010] Preferably, the online detection device for high-dose electron irradiation provided by the present invention includes a detection module comprising a suppression electrode and a Faraday cup. The suppression electrode is inserted into the first cavity of the insulating sleeve, with its bottom end abutting against the top surface of the insulating plate, and a channel is provided on the suppression electrode. The Faraday cup is inserted into the fourth cavity of the insulating cylinder, with its top end abutting against the bottom surface of the insulating plate and its bottom end abutting against the top surface of the insulating base plate. A blind hole is provided on the Faraday cup, and the blind hole communicates with the channel through the second cavity. A connector terminal is provided on the Faraday cup, with one end of the connector terminal facing away from the Faraday cup passing through the side wall of the insulating cylinder and the side wall of the shielding cylinder, inserted into the vacuum chamber, and connected to the signal reading device.

[0011] Preferably, the online detection device for high-dose electron irradiation provided by the present invention further includes a pressure plate covering a plurality of detection units. The pressure plate has a plurality of through-hole units, which are spaced apart along the first direction, and each through-hole unit corresponds to one of the detection units.

[0012] Preferably, the online detection device for high-dose electron irradiation provided by the present invention includes a vacuum housing comprising an outer shell and an interface flange. The outer shell surrounds the vacuum chamber, and one end of the outer shell has an opening communicating with the vacuum chamber. A connecting flange is provided on the outer wall of the end with the opening, extending outward. The interface flange covers the opening and is bolted to the connecting flange. The interface flange is provided with a high-voltage connector and multiple signal interfaces. The inner end of the high-voltage connector is connected to the suppression electrode via a cable, and an external power supply is connected to the outer end of the high-voltage connector to supply power to the suppression electrode. The inner ports of the multiple signal interfaces are connected to connector terminals on multiple Faraday cups via ribbon cables, and the outer ports of the multiple signal interfaces are all connected to the signal reading device. The signal reading device reads the current signal in the Faraday cup according to a timing sequence.

[0013] Preferably, the online detection device for high-dose electron irradiation provided by the present invention further includes a vacuum pump assembly. The interface flange has a suction port, which communicates with the vacuum chamber through the opening. The vacuum pump assembly is disposed outside the vacuum housing and is connected to the suction port through a vacuum tube. The vacuum pump assembly is used to create a vacuum environment in the vacuum chamber.

[0014] On the other hand, the present invention provides a detection method for an online detection device for high-dose electron irradiation as described above, comprising the following steps: The suppression electrode in the detection assembly forms a potential well with the titanium-based vacuum film. The low-energy stray electrons generated when the target detection electron beam passes through the titanium-based vacuum film cannot pass through the potential well, and the target detection electron beam can pass through the potential well and enter the Faraday cup in the detection assembly. The target detection electron beam is absorbed by the Faraday cup, converting the absorbed charge into an electric current, which is then transmitted to the signal reading device.

[0015] In summary, the beneficial technical effects of this invention are as follows: The online detection device and method for high-dose electron irradiation provided in this application include a vacuum housing, a water-cooled plate, a titanium-based vacuum membrane window, a detection component, and a signal reading device. The vacuum housing forms a vacuum chamber, and an installation port is provided on the outer wall of the vacuum housing, communicating with the vacuum chamber. The titanium-based vacuum membrane window is installed in the installation port, and the water-cooled plate is placed on the installation port. A collimation hole is provided on the water-cooled plate, penetrating the water-cooled plate and corresponding to the titanium-based vacuum membrane window. The detection component is disposed in the vacuum housing. Inside the chamber, the detection component and collimation hole are correspondingly set; the signal reading device is set outside the vacuum shell and connected to the detection component; the detection process is as follows: the target detection electron beam enters the Faraday cup - the signal reading device reads the current signal; by setting a titanium-based vacuum membrane window, the titanium-based vacuum membrane window maintains the pressure difference inside and outside the vacuum chamber while allowing efficient electron penetration, effectively preventing ionized gas particles from entering the detection range. Thus, the technical problem of not being able to detect the intensity of the target detection electron beam in an atmospheric environment is solved; at the same time, the accuracy of detection is improved. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the online detection device for high-dose electron irradiation provided in the first embodiment of the present invention. Figure 1 .

[0017] Figure 2 This is a schematic diagram of the overall structure of the online detection device for high-dose electron irradiation provided in the first embodiment of the present invention. Figure 2 .

[0018] Figure 3 This is a cross-section of the online detection device for high-dose electron irradiation provided in the first embodiment of the present invention. Figure 1 .

[0019] Figure 4 This is a cross-section of the online detection device for high-dose electron irradiation provided in the first embodiment of the present invention. Figure 2 .

[0020] Figure 5 This is a schematic diagram of the detection component in the online detection device for high-dose electron irradiation provided in the first embodiment of the present invention.

[0021] Figure 6 This is a schematic diagram of the shielding and fixing component in the online detection device for high-dose electron irradiation provided in the first embodiment of the present invention.

[0022] Figure 7 This is a schematic diagram of the structure of the insulating mounting assembly in the online detection device for high-dose electron irradiation provided in the first embodiment of the present invention.

[0023] Figure 8This is a cross-sectional view of the insulating mounting assembly in the online detection device for high-dose electron irradiation provided in the first embodiment of the present invention.

[0024] Figure 9 This is a schematic diagram of the connection structure between the vacuum housing and the titanium-based vacuum membrane window in the online detection device for high-dose electron irradiation provided in the first embodiment of the present invention.

[0025] Figure 10 This is a flowchart of the detection method of the online detection device for high-dose electron irradiation provided in the second embodiment of the present invention.

[0026] Figure 11 The movement of the electron beam is described in the detection method of the online detection device for high-dose electron irradiation provided in the second embodiment of the present invention.

[0027] In the diagram, 1. Online detection device; 10. Vacuum housing; 11. Vacuum chamber; 12. Outer shell; 121. Mounting port; 122. Connecting flange; 123. Opening; 13. Interface flange; 131. High-pressure connector; 132. Signal interface; 133. Pull-out port; 20. Water-cooled plate; 21. Collimation hole; 30. Titanium-based vacuum membrane window; 40. Detection assembly; 41. Detection unit; 411. Shielding fixing assembly; 4111. Shielding cylinder; 4112. Accommodating cavity; 4113. Mounting flange; 4114. Support base; 4115. Horizontal support plate; 4116. Vertical support plate; 4117. Limiting block; 4118. Connecting hole; 4 12. Insulation mounting assembly; 4121. Insulation fixing plate; 4122. Insulation sleeve; 4123. Insulation plate; 4124. Insulation cylinder; 4125. Insulation base plate; 4126. First cavity; 4127. Second cavity; 4128. Third cavity; 4129. Fourth cavity; 4130. Fixing hole; 413. Detection module; 4131. Suppression electrode; 4132. Faraday cup; 4133. Channel; 4134. Blind hole; 4135. Connector terminal; 414. Pressure plate; 4141. Through hole; 50. Signal reading device; 60. Vacuum pump assembly; 70. First direction; 80. Second direction; 90. Third direction. Detailed Implementation

[0028] The present invention will be further described in detail below with reference to the accompanying drawings.

[0029] First embodiment: Reference Figures 1 to 4The first embodiment of this invention discloses an online detection device 1 for high-dose electron irradiation, comprising a vacuum housing 10, a water-cooled plate 20, a titanium-based vacuum membrane window 30, a detection component 40, and a signal reading device 50. The vacuum housing 10 forms a vacuum chamber 11, and an installation port 121 is provided on the outer wall of the vacuum housing 10, communicating with the vacuum chamber 11. The titanium-based vacuum membrane window 30 is installed inside the installation port 121, and the water-cooled plate 20 covers the installation port 121. A collimation hole 21 is provided on the water-cooled plate 20, penetrating the water-cooled plate 20 and corresponding to the titanium-based vacuum membrane window 30. The detection component 40 is disposed within the vacuum chamber 11, corresponding to the collimation hole 21. The signal reading device 50 is disposed within the vacuum housing 10. Externally, a signal reading device is connected to the detection component 40; a titanium-based vacuum membrane window 30 is used to allow the electron beam of the target to pass through the atmospheric environment into the vacuum chamber 11, where it is collected in the detection component 40, and to block gas ionized particles; the detection component 40 is used to absorb the electron beam used for target irradiation and convert the absorbed electron charge into an analog current signal; the signal reading device 50 is used to read the current signal in the detection component 40; by setting the titanium-based vacuum membrane window 30, the titanium-based vacuum membrane window 30 allows efficient electron penetration while maintaining the internal and external pressure difference, effectively preventing gas ionized particles from entering the detection range, thereby solving the technical problem of not being able to detect the intensity of the target detection electron beam in an atmospheric environment; at the same time, it improves the accuracy of detection.

[0030] The vacuum shell 10 is rectangular in shape, and the vacuum shell 10 encloses a rectangular vacuum chamber 11. Figure 1 Taking the orientation shown as an example, an installation port 121 is provided on the top surface of the vacuum housing 10. The titanium-based vacuum membrane window 30 is installed in the installation port 121, and the outer wall of the titanium-based vacuum membrane window 30 is fixed to the inner wall of the installation port 121. During use, the titanium-based vacuum membrane window 30 allows the high-energy electron beam used for diamond target irradiation to pass through, and achieves the blocking of gas ionized particles, while bearing the pressure difference between the inside and outside of the vacuum housing 10.

[0031] Specifically, the water-cooled plate 20 is a copper plate with a strong water-cooling channel 4133. The water-cooled plate 20 is used to absorb about 90% of the irradiation intensity of the electron beam to avoid thermal damage to the titanium-based vacuum membrane window 30 and the detection component 40.

[0032] It should be noted that the water-cooled plate 20 is a component well known to those skilled in the art, and its structure will not be described in detail here.

[0033] The detection process of the online detection device 1 for high-dose electron irradiation provided in this embodiment is as follows: After the electron beam passes through the collimation hole 21 on the water-cooled plate 20, the target detection electron beam passes through the titanium-based vacuum membrane window 30 and enters the vacuum environment from the atmospheric environment. The energy of the ionized particles generated by the electron beam in the atmospheric environment is mostly less than 100eV, and the penetration ability is much smaller than that of the initial electron beam (i.e., the target detection electron beam), so it cannot penetrate the titanium-based vacuum membrane window 30. Most of the electron beam is absorbed by the water-cooled plate 20, avoiding thermal damage to the detection component 40 and the titanium-based vacuum membrane window 30. During the process of penetrating the titanium-based vacuum membrane window 30, the target detection electron beam will generate a certain number of low-energy stray electrons. The low-energy stray electrons cannot enter the detection component 40, while the kinetic energy of the target detection electron beam is 3MeV, which can enter the detection component 40. The target detection electron beam will be completely absorbed by the detection component 40, and the absorbed charge will be converted into current, which will then be transmitted to the signal reading device.

[0034] It should be noted that the target detection electron beam refers to the initial electron beam that has passed through the collimation aperture 21.

[0035] Continue to refer to Figures 2 to 5 In this embodiment, the detection component 40 includes a plurality of detection units 41, which are spaced apart along the first direction 70 of the vacuum housing 10. Each detection unit 41 is corresponding to the titanium-based vacuum membrane window 30, and each detection unit 41 is connected to the signal reading device 50.

[0036] It should be noted that the first direction 70 of the vacuum housing 10 is the length direction of the vacuum housing 10, the second direction 80 of the vacuum housing 10 is the width direction of the vacuum housing 10, and the third direction 90 of the vacuum housing 10 is the thickness direction of the vacuum housing 10. The first direction 70, the second direction 80 and the third direction 90 of the vacuum housing 10 are arranged perpendicular to each other.

[0037] Furthermore, in this embodiment, the detection unit 41 includes a shielding and fixing component 411, an insulating mounting component 412, and at least two detection modules 413. The shielding and fixing component 411 surrounds a cavity 4112. The bottom end of the insulating mounting component 412 is inserted into the cavity 4112, and the top end of the insulating mounting component 412 is located outside the cavity 4112. The top end of the insulating mounting component 412 is connected to the top end of the shielding and fixing component 411 by an insulating fastening bolt. The insulating mounting component 412 is provided with at least two mounting cavities. The two mounting cavities are spaced apart along the second direction 80 of the vacuum housing 10. The mounting cavities correspond one-to-one with the detection modules 413, and the two detection modules 413 are respectively disposed in the two mounting cavities. By providing the insulating mounting component 412, the detection modules 413 are placed in an insulating environment.

[0038] In this embodiment, the number of through cavities installed on each insulating mounting assembly 412 is 2. Of course, the number of through cavities installed on each insulating mounting assembly 412 can also be 3 or 4.

[0039] The horizontal plate is provided with multiple collimation holes 21, which are arranged in a rectangular array. The collimation holes 21 are set one-to-one with the detection modules 413, and the number of collimation holes 21 is basically the same as the number of detection modules 413.

[0040] Specifically, the centerline of the collimation hole 21 is set parallel to the third direction 90 of the vacuum housing 10.

[0041] Continue to refer to Figures 2 to 6 In this embodiment, the shielding fixing component 411 includes a shielding cylinder 4111 and a support base 4114. The shielding cylinder 4111 is configured to form an accommodating cavity 4112. The bottom end of the shielding cylinder 4111 is inserted into the support base 4114 so that the bottom end of the shielding cylinder 4111 is closed.

[0042] Specifically, the shielding cylinder 4111 is configured to form a cavity 4112, which penetrates the shielding cylinder 4111. The shielding cylinder 4111 is rectangular, but it can also be cylindrical.

[0043] Among them, the outer peripheral wall of the shielding cylinder 4111 opposite to the support base 4114 is provided with a mounting flange 4113, which extends outward.

[0044] Further, in this embodiment, the support base 4114 includes a horizontal support plate 4115 and two vertical support plates 4116. The two vertical support plates 4116 are spaced apart along the second direction 80 on the bottom surface of the horizontal support plate 4115. The ends of the two vertical support plates 4116 facing away from the horizontal support plate 4115 abut against the bottom surface of the vacuum chamber 11. A plurality of limiting blocks 4117 are provided on the edge of the top surface of the horizontal support plate 4115. The plurality of limiting blocks 4117 are spaced apart around the axial direction of the horizontal support plate 4115. The plurality of limiting blocks 4117 and the horizontal support plate 4115 together form an installation cavity. During the installation process, the bottom end of the shielding cylinder 4111 is inserted into the installation cavity. The bottom end of the shielding cylinder 4111 abuts against the top surface of the horizontal support plate 4115. The outer peripheral wall of the shielding cylinder 4111 is in contact with the inner side wall of the limiting block 4117.

[0045] Continue to refer to Figure 2 , Figure 3 , Figure 7 as well as Figure 8In this embodiment, the insulating mounting assembly 412 includes an insulating fixing plate 4121, an insulating sleeve 4122, an insulating plate 4123, an insulating cylinder 4124, and an insulating base plate 4125. The insulating fixing plate 4121, insulating sleeve 4122, insulating plate 4123, insulating cylinder 4124, and insulating base plate 4125 are connected sequentially from top to bottom. The insulating fixing plate 4121 is connected to the mounting flange 4113 at the top of the shielding cylinder 4111 by insulating fastening bolts. At least two first cavities 4126 are provided on the insulating fixing plate 4121, both of which penetrate the insulating fixing plate 4121 and are spaced apart along a second direction 80. The insulating sleeve 4122 has at least two second cavities 4127, both of which penetrate the insulating sleeve 4122 and are spaced apart along a second direction 80. The first cavity 4126 and the second cavity 4127 are arranged at intervals along the second direction 80, and are arranged in a one-to-one correspondence. At least two third cavities 4128 are opened on the insulating plate 4123, and both third cavities 4128 penetrate the insulating plate 4123. The two third cavities 4128 are arranged at intervals along the second direction 80, and are arranged in a one-to-one correspondence with the second cavity 4127. The insulating cylinder 4124 is provided with two fourth cavities 4129, and both fourth cavities 4129 penetrate the insulating cylinder 4124. The two fourth cavities 4129 are arranged at intervals along the second direction 80, and are arranged in a one-to-one correspondence with the third cavity 4128. The first cavity 4126, the second cavity 4127, the third cavity 4128 and the fourth cavity 4129 are connected in sequence to form an installation cavity. The insulating base plate 4125 is sealed at the bottom end of the insulating cylinder 4124.

[0046] Specifically, in this embodiment, the first cavity 4126, the second cavity 4127, the third cavity 4128 and the fourth cavity 4129 are connected from top to bottom to form an installation cavity, and each installation cavity is directly opposite a collimation hole 21.

[0047] Among them, the insulating fixing plate 4121, the insulating plate 4123 and the insulating base plate 4125 can all be made of ceramic material. Of course, other insulating materials can also be used. This embodiment does not limit this.

[0048] During installation, the insulating sleeve 4122, insulating plate 4123, insulating cylinder 4124, and insulating base plate 4125 are all housed in the accommodating cavity 4112. The insulating fixing plate 4121 is located on the top surface of the shielding cylinder 4111. The bottom surface of the insulating fixing plate 4121 abuts against the top surface of the mounting flange 4113 at the top of the shielding cylinder 4111 and is fastened together by insulating fastening bolts.

[0049] Specifically, with Figure 4Taking the orientation shown as an example, two connecting holes 4118 are opened on the outer side walls of the left and right sides of the shielding cylinder 4111. The center line of the connecting hole 4118 is set parallel to the second direction 80, and the connecting hole 4118 is connected to the accommodating cavity 4112.

[0050] Among them, with Figure 8 Taking the orientation shown as an example, two fixing holes 4130 are opened on the outer walls of both the left and right sides of the insulating cylinder 4124. The center line of the fixing hole 4130 is set parallel to the second direction 80. The fixing hole 4130 is connected to the fourth cavity 4129 on the same side. The fixing hole 4130 and the connecting hole 4118 are set one-to-one and are connected to each other.

[0051] Specifically, the center line of the fixing hole 4130 is set parallel to the center line of the connecting hole 4118. In some feasible ways, the center line of the fixing hole 4130 is set collinear with the center line of the corresponding connecting hole 4118.

[0052] Continue to refer to Figures 2 to 4 In this embodiment, the detection module 413 includes a suppression electrode 4131 and a Faraday cup 4132. The suppression electrode 4131 is inserted into the first cavity 4126 of the insulating sleeve 4122, and its bottom end abuts against the top surface of the insulating plate 4123. A channel 4133 is provided on the suppression electrode 4131. The Faraday cup 4132 is inserted into the fourth cavity 4129 of the insulating cylinder 4124, and its top end abuts against the bottom surface of the insulating plate 4123. The bottom end of the Faraday cup 4132 abuts against the top surface of the insulating base plate 4125. A blind hole 4134 is provided on the Faraday cup 4132, and the blind hole 4134 is connected to the channel 4133 through the second cavity 4127. The Faraday cup 4132 is provided with a connector terminal 4135. The end of the connector terminal 4135 facing away from the Faraday cup 4132 passes through the side wall of the insulating cylinder 4124 and the side wall of the shielding cylinder 4111 and is inserted into the vacuum chamber 11 and connected to the signal reading device 50. By setting a suppression electrode 4131, the suppression electrode 4131 and the titanium-based vacuum membrane window 30 form a potential well. When the target detection electron beam penetrates the titanium-based vacuum membrane window 30, a certain number of low-energy stray electrons will be generated. The low-energy stray electrons cannot pass through the potential well, while the target detection electron beam has a kinetic energy of 3MeV, which is sufficient to pass through the potential well and enter the Faraday cup 4132. Thus, the detection accuracy is improved.

[0053] It should be noted that the connector terminal 4135 is a component well known to those skilled in the art, and its structure will not be described in detail here.

[0054] In this embodiment, each Faraday cup 4132 is provided with two terminals. Both terminals extend outward along the second direction 80 and are spaced apart along the third direction 90. The terminals are inserted into the vacuum chamber 11 by fixing holes 4130 and connecting holes 4118 at the ends of the terminals away from the Faraday cup 4132.

[0055] Specifically, the Faraday cup 4132 is used to absorb the electron beam used for target irradiation and convert the absorbed electron charge into an analog current signal. During the detection process of the Faraday cup 4132, the detection accuracy is improved by suppressing the escape of secondary electrons within the Faraday cup 4132 and the entry of stray particles outside the Faraday cup 4132 through the suppression electrode 4131.

[0056] In this embodiment, the center line of channel 4133 and the center line of blind hole 4134 are both arranged parallel to the third direction 90. In this embodiment, the total number of Faraday cups 4132 is 40. Each Faraday cup 4132 has a separate connector terminal 4135, which corresponds one-to-one with the position of the expected diamond target material, so that the electron beam intensity detected by a single Faraday cup 4132 is consistent with the electron beam intensity irradiated by a single target material.

[0057] The Faraday cup 4132 has a sidewall and bottom thickness of no less than 10 mm and is made of oxygen-free copper. The 3MeV target detection electron beam penetrates no more than 2 mm into the oxygen-free copper. Therefore, the target detection electron beam will be completely absorbed by the Faraday cup 4132, and the absorbed charge will be converted into current, which will then be transmitted to the signal reading device.

[0058] The water-cooled plate 20 is used to absorb about 90% of the irradiation intensity of the electron beam, avoiding thermal damage to the titanium-based vacuum membrane window 30 and the Faraday cup 4132. The collimation hole 21 on the water-cooled plate 20 is used to allow the electron beam of the target to be detected to pass through the water-cooled plate 20 and enter the vacuum chamber 11.

[0059] Specifically, the vacuum housing 10 is used to provide a vacuum environment for the Faraday cup 4132 to prevent the electron beam from causing gas ionization inside the Faraday cup 4132.

[0060] Furthermore, in this embodiment, the detection assembly 40 also includes a pressure plate 414, which covers multiple detection units 41. The pressure plate 414 has multiple through holes 4141 units, which are spaced apart along the first direction 70. Each through hole 4141 unit corresponds to one detection unit 41. By setting the pressure plate 414, the pressure plate 414 is in direct contact with all the suppression electrodes in the detection assembly 40, so that all the suppression electrodes are connected in series, and all the suppression electrodes can be powered through only one high-voltage channel.

[0061] Specifically, the number of via 4141 units is basically the same as the number of detection units 41. The pressure plate 414 is disposed at the top of all suppression electrodes so that all suppression electrodes are in series.

[0062] The via 4141 unit includes at least two vias 4141, both of which pass through the pressure plate 414. The two vias 4141 are spaced apart along the second direction 80. The first cavity 4126 is correspondingly arranged with the vias 4141, and the vias 4141 are connected to the first cavity 4126.

[0063] Continue to refer to Figure 1 and Figure 9 In this embodiment, the vacuum housing 10 includes an outer shell 12 and an interface flange 13. The outer shell 12 surrounds a vacuum chamber 11. One end of the outer shell 12 has an opening 123 that communicates with the vacuum chamber 11. A connecting flange 122 is provided on the outer wall of the end with the opening 123. The connecting flange 122 extends outward. The interface flange 13 covers the opening 123 and is bolted to the connecting flange 122. The interface flange 13 is provided with a high-voltage connector 131 and multiple signal interfaces 132. The inner end of the high-voltage connector 131 is connected to the suppression electrode 4131 via a cable. An external power supply is connected to the outer end of the high-voltage connector 131 and is used to power the suppression electrode. The inner ports of the multiple signal interfaces 132 are connected to the connector terminals 4135 on multiple Faraday cups 4132 via ribbon cables. The outer ports of the multiple signal interfaces 132 are all connected to the signal reading device 50. The signal reading device 50 reads the current signal in the Faraday cup 4132 according to the timing sequence.

[0064] by Figure 3 Taking the orientation shown as an example, the top of the outer casing 12 is provided with an installation port 121, the left end of the outer casing 12 is provided with an opening 123, and the interface flange 13 is covered on the left end of the outer casing 12.

[0065] The signal reading device includes a signal shielding cable and a signal receiving device, which is connected to the outer port of the signal interface 132 via the signal shielding cable.

[0066] It should be noted that the signal receiving device is a component well known to those skilled in the art, and its structure will not be described in detail here.

[0067] Specifically, the suppression electrode 4131, after being loaded with a negative potential, is used to suppress the escape of secondary electrons within the Faraday cup 4132 and the entry of stray particles outside the Faraday cup 4132.

[0068] Furthermore, the online detection device 1 for high-dose electron irradiation provided in this embodiment also includes a vacuum pump assembly 60. A suction port 133 is provided on the interface flange 13. The suction port 133 is connected to the vacuum chamber 11 through the opening 123. The vacuum pump assembly 60 is disposed outside the vacuum housing 10 and is connected through the vacuum tube suction port 133. The vacuum pump assembly 60 is used to create a vacuum environment in the vacuum chamber 11.

[0069] It should be noted that the vacuum pump assembly 60 is a component well-known to those skilled in the art, and the structure of the vacuum pump will not be described in detail here.

[0070] In this embodiment, the vacuum pump assembly 60 is a combination of a dry backing pump and a molecular pump, which can generate, maintain and control the vacuum environment required by the vacuum housing 10 over a wider range of vacuum pressures.

[0071] The process of detecting electron irradiation intensity under atmospheric conditions in the preparation of quantum material diamond NV color centers provided in this embodiment using the online detection device 1 for high-dose electron irradiation is as follows: Based on the vacuum shell 10 with a titanium-based vacuum membrane window 30 welded on it, a vacuum pump group 60 based on a dry backing pump and a molecular pump is used. The vacuum pump group 60 is responsible for maintaining the vacuum level in the vacuum chamber 11 and constructing an independent vacuum environment. In this vacuum environment, the electron beam intensity is detected by relying on the Faraday cup 4132.

[0072] Specifically, the water-cooled plate 20 absorbs most of the energy of the high-energy electron beam, preventing thermal damage to the titanium-based vacuum membrane window 30 and the Faraday cup 4132. The initial electron beam (i.e., the target detection electron beam) after passing through the collimation hole 21 on the water-cooled plate 20 generates a certain number of low-energy stray electrons during the process of penetrating the titanium-based vacuum membrane window 30. The suppression electrode 4131 is loaded with a voltage of about -500V, and the low-energy stray electrons cannot pass through the potential well formed by the true suppression electrode 4131 and the titanium-based vacuum membrane window 30. The kinetic energy of the target detection electron beam is 3MeV, which is sufficient to pass through the potential well and enter the Faraday cup 4132. It should be noted that the intensity of the high-energy electron beam entering the Faraday cup 4132 through the collimation hole 21 on the water-cooled plate 20 is consistent with the intensity of the electron beam irradiated by the target material. The target detection electron beam will be completely absorbed by the Faraday cup 4132, and the absorbed charge will be converted into current, which will then be transmitted to the signal reading device.

[0073] It should be noted that the online detection device 1 does not require a vacuum during the detection process and can cover electron beam intensity detection within the nA~mA intensity range.

[0074] Second embodiment: Reference Figure 10 and Figure 11The second embodiment of the present invention provides a detection method for an online detection device 1 for high-dose electron irradiation as described in the first embodiment, comprising the following steps: S101, the suppression electrode 4131 in the detection component 40 forms a potential well with the titanium-based vacuum film. The low-energy stray electrons generated when the target detection electron beam passes through the titanium-based vacuum film cannot pass through the potential well, and the target detection electron beam can pass through the potential well and enter the Faraday cup 4132 in the detection component 40.

[0075] Specifically, the vacuum pump assembly 60 is responsible for maintaining the vacuum level in the vacuum chamber 11, and the insulating cylinder 4124 maintains the insulation between the Faraday cup 4132, the suppression electrode 4131 and the vacuum housing 10. The initial electron beam (i.e. the target detection electron beam) after passing through the collimation hole 21 on the water-cooled plate 20 passes through the titanium-based vacuum membrane window 30, that is, it enters the vacuum environment from the atmospheric environment. The ionized particles generated by the electron beam in the atmospheric environment have an energy of less than 100 eV, and their penetration ability is much smaller than that of the initial electron beam, so they cannot penetrate the titanium-based vacuum membrane window 30.

[0076] Most of the electron beam is absorbed by the water-cooled plate 20, avoiding thermal damage to the Faraday cup 4132 and the titanium-based vacuum membrane window 30. During the process of penetrating the titanium-based vacuum membrane window 30, the target detection electron beam will generate a certain number of low-energy stray electrons. The suppression electrode 4131 is loaded with a voltage of about -500V. The low-energy stray electrons cannot pass through the potential well formed by the true suppression electrode 4131 and the titanium-based vacuum membrane window 30. The target detection electron beam has a kinetic energy of 3MeV, which is sufficient to pass through the potential well and enter the Faraday cup 4132.

[0077] Specifically, each Faraday cup 4132 has its own independent signal output and corresponds one-to-one with the position of the expected diamond target, so that the electron beam intensity detected by a single Faraday cup 4132 is consistent with the electron beam intensity irradiated by a single target.

[0078] S102, the target detection electron beam is absorbed by the Faraday cup 4132, the absorbed charge is converted into current, and the current is transmitted to the signal reading device.

[0079] Specifically, the Faraday cup 4132 has a sidewall and bottom thickness of no less than 10 mm and is made of oxygen-free copper. The penetration depth of the 3MeV electron beam in oxygen-free copper is no more than 2 mm. Therefore, the target detection electron beam will be completely absorbed by the Faraday cup 4132, and the absorbed charge will be converted into current, which will then be transmitted to the signal reading device.

[0080] The online detection device 1 and detection method for high-dose electron irradiation provided in this application include a vacuum housing 10, a water-cooled plate 20, a titanium-based vacuum membrane window 30, a detection component 40, and a signal reading device 50. The vacuum housing 10 forms a vacuum chamber 11, and an installation port 121 is provided on the outer wall of the vacuum housing 10, which communicates with the vacuum chamber 11. The titanium-based vacuum membrane window 30 is installed in the installation port 121, and the water-cooled plate 20 covers the installation port 121. A collimation hole 21 is provided on the water-cooled plate 20, which penetrates the water-cooled plate 20 and is correspondingly arranged with the titanium-based vacuum membrane window 30. The detection component 40... The detector assembly 40 is positioned inside the vacuum chamber 11, corresponding to the collimation hole 21. The signal reading device 50 is positioned outside the vacuum housing 10 and connected to the detector assembly 40. The detection process is as follows: the target detection electron beam enters the Faraday cup 4132, and the signal reading device reads the current signal. By setting the titanium-based vacuum membrane window 30, the titanium-based vacuum membrane window 30 maintains the pressure difference between the inside and outside of the vacuum chamber 11 while allowing efficient electron penetration, effectively preventing ionized gas particles from entering the detection range. This solves the technical problem of not being able to detect the intensity of the target detection electron beam in an atmospheric environment and improves the accuracy of the detection.

[0081] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0082] Finally, it should be noted that the above embodiments are merely examples for clearly illustrating the present invention and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. An online detection device for high-dose electron irradiation, characterized in that: Includes vacuum housing, water-cooled plate, titanium-based vacuum membrane window, detection components, and signal reading equipment; The vacuum housing is configured to form a vacuum chamber. An installation port is provided on the outer wall of the vacuum housing, which communicates with the vacuum chamber. The titanium-based vacuum membrane window is installed in the installation port. A water-cooled plate is placed on the installation port. A collimation hole is provided on the water-cooled plate, which passes through the water-cooled plate and is correspondingly arranged with the titanium-based vacuum membrane window. The detection component is disposed in the vacuum chamber, and the detection component is correspondingly arranged with the collimation hole. The signal reading device is disposed outside the vacuum housing and is connected to the detection component; The titanium-based vacuum membrane window is used to allow the electron beam of the detected target to pass through the atmospheric environment into the vacuum chamber, where it is collected in the detection assembly and to block ionized gas particles. The detection component is used to absorb the electron beam used for target irradiation and convert the absorbed electron charge into an analog current signal. The signal reading device is used to read the current signal in the detection component.

2. The online detection device for high-dose electron irradiation according to claim 1, characterized in that: The detection component includes multiple detection units, which are spaced apart along a first direction of the vacuum housing. Each detection unit is corresponding to the titanium-based vacuum membrane window, and each detection unit is connected to the signal reading device.

3. The online detection device for high-dose electron irradiation according to claim 2, characterized in that: The detection unit includes a shielding and fixing component, an insulating mounting component, and at least two detection modules; the shielding and fixing component is configured to form an accommodating cavity, the bottom end of the insulating mounting component is inserted into the accommodating cavity, the top end of the insulating mounting component is located outside the accommodating cavity, and the top end of the insulating mounting component is connected to the top end of the shielding and fixing component by an insulating fastening bolt. The insulating mounting assembly is provided with at least two mounting cavities, which are spaced apart along the second direction of the vacuum housing. Each mounting cavity corresponds to a detection module, and the two detection modules are respectively disposed in the two mounting cavities.

4. The online detection device for high-dose electron irradiation according to claim 3, characterized in that: The shielding fixing assembly includes a shielding cylinder and a support base. The shielding cylinder is arranged to form the accommodating cavity, and the bottom end of the shielding cylinder is inserted into the support base so that the bottom end of the shielding cylinder is closed.

5. The online detection device for high-dose electron irradiation according to claim 4, characterized in that: The insulating mounting assembly includes an insulating fixing plate, an insulating sleeve, an insulating plate, an insulating cylinder, and an insulating base plate. The insulating fixing plate, the insulating sleeve, the insulating plate, the insulating cylinder, and the insulating base plate are connected sequentially from top to bottom. The insulating fixing plate is connected to the mounting flange at the top of the shielding cylinder by insulating fastening bolts. The insulating fixing plate has at least two first cavities, both of which penetrate the insulating fixing plate, and the two first cavities are spaced apart along the second direction. The insulating sleeve has at least two second cavities, which are spaced apart along the second direction, and the first cavity and the second cavity are arranged in a one-to-one correspondence. At least two third cavities are provided on the insulating board, and the two third cavities are spaced apart along the second direction, with each third cavity corresponding to one of the second cavities. The insulating cylinder is provided with two fourth cavities, which are spaced apart along the second direction. The fourth cavities are arranged in a one-to-one correspondence with the third cavity. The first cavity, the second cavity, the third cavity, and the fourth cavity are sequentially connected to form the mounting cavity. The insulating base plate is sealed at the bottom end of the insulating cylinder.

6. The online detection device for high-dose electron irradiation according to claim 5, characterized in that: The detection module includes a suppression electrode and a Faraday cup. The suppression electrode is inserted into the first cavity of the insulating sleeve. The bottom end of the suppression electrode abuts against the top surface of the insulating plate. The suppression electrode is provided with a channel. The Faraday cup is inserted into the fourth cavity of the insulating cylinder. The top of the Faraday cup abuts against the bottom surface of the insulating plate, and the bottom of the Faraday cup abuts against the top surface of the insulating base plate. A blind hole is provided on the Faraday cup, and the blind hole communicates with the channel through the second cavity. The Faraday cup is provided with a connector terminal. The end of the connector terminal facing away from the Faraday cup passes through the side wall of the insulating cylinder and the side wall of the shielding cylinder in sequence and is inserted into the vacuum chamber, and is connected to the signal reading device.

7. The online detection device for high-dose electron irradiation according to claim 2, characterized in that: The detection assembly also includes a pressure plate, which covers the plurality of detection units. The pressure plate has a plurality of through-hole units, which are spaced apart along the first direction. Each through-hole unit corresponds to one of the detection units.

8. The online detection device for high-dose electron irradiation according to claim 6, characterized in that: The vacuum housing includes an outer shell and an interface flange. The outer shell surrounds the vacuum chamber. One end of the outer shell has an opening that communicates with the vacuum chamber. A connecting flange is provided on the outer wall of the end with the opening. The connecting flange extends outward. The interface flange covers the opening and is bolted to the connecting flange. The interface flange is equipped with a high-voltage connector and multiple signal interfaces. The inner end of the high-voltage connector is connected to the suppression electrode via a cable, and an external power supply is connected to the outer end of the high-voltage connector. The external power supply is used to power the suppression electrode. The inner ports of the multiple signal interfaces are connected to the connector terminals on the multiple Faraday cups via ribbon cables, and the outer ports of the multiple signal interfaces are all connected to the signal reading device; The signal reading device reads the current signal in the Faraday cup according to the timing sequence.

9. The online detection device for high-dose electron irradiation according to claim 8, characterized in that: It also includes a vacuum pump assembly, with a suction port on the interface flange, the suction port communicating with the vacuum chamber through the opening, the vacuum pump assembly being located outside the vacuum housing, and the vacuum pump assembly being connected to the suction port through a vacuum tube; The vacuum pump assembly is used to create a vacuum environment in the vacuum chamber.

10. A detection method for an online detection device for high-dose electron irradiation as described in any one of claims 1 to 9, characterized in that: Includes the following steps: The suppression electrode in the detection assembly forms a potential well with the titanium-based vacuum film. The low-energy stray electrons generated when the target detection electron beam passes through the titanium-based vacuum film cannot pass through the potential well, and the target detection electron beam can pass through the potential well and enter the Faraday cup in the detection assembly. The target detection electron beam is absorbed by the Faraday cup, converting the absorbed charge into current, and transmitting the current to the signal reading device.

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