Anti-interference leakage monitoring device for special gas system

Abstract

The invention relates to an anti-interference leakage monitoring device for a special gas system, and the device comprises a pressure sensor which is used for monitoring the internal pressure of a special gas pipeline and outputting an original pressure signal; the modularized heat management unit is arranged close to the pressure sensor, is used for establishing a virtual temperature measurement point synchronous with the temperature of internal gas outside the special gas pipeline, and comprises an annular heat conduction jacket and a temperature sensor, and the annular heat conduction jacket is tightly attached to the outer wall of the special gas pipeline; a temperature measuring probe of the temperature sensor is arranged on the annular heat conducting jacket; and the processing unit is in communication connection with the pressure sensor and the temperature sensor so as to receive the original pressure signal and the temperature signal, and the processing unit is configured to execute a dynamic compensation algorithm based on the original pressure signal and the temperature signal and output a calibrated pressure signal. According to the invention, the problem of pressure monitoring distortion under the composite interference of environment temperature change and forced convection can be effectively solved, and the false alarm rate and the missing report rate are obviously reduced.

Description

Technical Field

[0001] This invention relates to the field of special gas system safety monitoring technology, and in particular to an anti-interference leak monitoring device for special gas systems. Background Technology

[0002] In semiconductor manufacturing, specialty gases (such as silane, arsine, and phosphine) are the "lifeblood" of critical processes like photolithography, etching, and deposition. However, they themselves are highly dangerous, possessing properties such as extreme toxicity, flammability, explosiveness, and strong corrosiveness. For example, silane can spontaneously combust in air, with an explosive range of 1.37%–96%, and leaks can produce harmful silica aerosols upon combustion. Therefore, safety monitoring of specialty gas systems is a core aspect of safety management in semiconductor factories.

[0003] Currently, the industry generally adopts forced ventilation as the primary safety measure, especially in high-risk areas such as gas cylinder cabinets and valve boxes, where the ventilation frequency can reach up to 300 times per hour to quickly dilute leaked gas. Simultaneously, leak detection systems (such as pressure sensors, infrared sensors, and electrochemical sensors) are deployed in gas cabinets, pipelines, and exhaust vents for real-time leak detection. Furthermore, specialty gas systems are typically equipped with purging lines and waste gas discharge lines to remove residual gas.

[0004] However, existing monitoring technologies face severe challenges under complex real-world conditions, especially in the following scenarios:

[0005] Semi-open outdoor and gas chamber layout: Extremely hazardous gases such as silane are often placed in semi-open areas, while other special gases are concentrated in gas chambers near the outer wall. This layout exposes the monitoring points to drastic environmental temperature changes (such as local temperature differences in winter and diurnal cycles).

[0006] Interference from high-intensity forced ventilation: Forced ventilation at 300 times per hour creates strong forced convection around the gas holder. This airflow not only dilutes the leaked gas, increasing the difficulty of detection, but the pressure pulsations and temperature fluctuations it causes also severely interfere with the reference stability of traditional pressure sensors.

[0007] Limitations of traditional monitoring technologies: Traditional pressure or gas sensors (such as electrochemical and catalytic combustion sensors) are susceptible to temperature and humidity fluctuations and cross-gas interference, leading to decreased accuracy. For example, in silane leak monitoring, PID sensors may falsely report leaks due to interfering gases, while catalytic combustion sensors are prone to poisoning and failure. Furthermore, existing monitoring devices often employ simple temperature compensation models (such as fixed coefficient compensation), which cannot effectively isolate the combined interference from environmental heat penetration and forced convection. Particularly for pressure monitoring, traditional temperature compensation models struggle to accurately distinguish between actual leak signals and equipment thermal stress noise caused by environmental temperature changes.

[0008] These problems lead to severe distortion of pressure monitoring data under complex operating conditions, resulting in high false alarm and false alarm rates, and creating serious safety hazards. Summary of the Invention

[0009] The purpose of this invention is to provide an anti-interference leak monitoring device for special gas systems, which can effectively solve the problem of pressure monitoring distortion under the combined interference of environmental temperature changes (such as local temperature difference in winter, day and night cycle) and forced convection, significantly reduce the false alarm rate and false alarm rate, and achieve accurate identification of minute leaks.

[0010] To achieve the above objectives, the present invention provides an anti-interference leak monitoring device for special gas systems, comprising:

[0011] Pressure sensors are used to monitor the internal pressure of special gas pipelines and output raw pressure signals;

[0012] A modular thermal management unit is set near the pressure sensor and used to establish a virtual temperature measurement point outside the special gas pipeline that is synchronized with the internal gas temperature of the special gas pipeline. The modular thermal management unit includes an annular heat-conducting jacket and a temperature sensor. The annular heat-conducting jacket is tightly fitted to the outer wall of the special gas pipeline, and the temperature measurement probe of the temperature sensor is set on the annular heat-conducting jacket.

[0013] The processing unit is communicatively connected to the pressure sensor and the temperature sensor to receive the raw pressure signal and the temperature signal. The processing unit is configured to perform a dynamic compensation algorithm based on the raw pressure signal and the temperature signal, and output a calibrated pressure signal.

[0014] Optionally, a groove is provided on the outer wall of the annular heat-conducting jacket, and the temperature probe is embedded in the groove.

[0015] Optionally, the gap between the temperature probe and the groove is filled with a thermally conductive medium.

[0016] Optionally, the modular thermal management unit further includes an isolation sealing layer covering the outside of the annular thermally conductive jacket.

[0017] Optionally, the modular thermal management unit further includes a phase change material layer covering the outside of the isolation sealing layer.

[0018] Optionally, the modular thermal management unit further includes a functional housing covering the outside of the phase change material layer, the functional housing being used to provide thermal insulation and explosion-proof protection.

[0019] Optionally, the functional housing is a ceramic sleeve.

[0020] Optionally, two temperature sensors are arranged with an axial spacing along the special gas pipeline, wherein the first temperature sensor is closer to the pressure sensor than the second temperature sensor, and the dynamic compensation algorithm is as follows:

[0021] P_cal = P_meas × (293 / (T+273)) + k · ΔT at

[0022] Where P_cal is the calibrated pressure value, P_meas is the original pressure value measured by the pressure sensor, T is the representative temperature of the gas in the special gas pipeline, taken as the average of the temperature values ​​measured by the two temperature sensors, and ΔT at The axial temperature difference is the difference between the temperature values ​​measured by the first temperature sensor and the second temperature sensor, and k is the thermo-mechanical coupling compensation coefficient.

[0023] Optionally, the distance between the two temperature sensors is between 50 and 200 mm.

[0024] Optionally, the annular heat-conducting jacket is made of beryllium copper.

[0025] The anti-interference leakage monitoring device for special gas systems provided by this invention has at least one of the following beneficial effects:

[0026] 1) Accurate and reliable temperature measurement: Through the modular design of "annular heat-conducting jacket + high thermal conductivity medium + temperature sensor", a "virtual temperature measurement point" that is highly synchronized with the internal gas temperature and can effectively resist rapid environmental disturbances is reconstructed outside the pipeline under the premise of ensuring safety. This fundamentally solves the problem of inaccurate temperature measurement caused by the sensor not being able to directly contact the special gas, and provides a reliable temperature data basis for subsequent compensation.

[0027] 2) Intelligent and comprehensive compensation: Based on the acquisition of reliable temperature data, the processing unit integrates information from multiple sources and executes a multi-modal dynamic compensation algorithm based on physical mechanisms. This effectively distinguishes and cancels out the complex interferences such as environmental temperature changes and forced convection, thereby correcting the distorted pressure measurement value to a stable calibration value.

[0028] 3) Extremely strong environmental adaptability: Corresponding protective and buffer structures (such as ceramic shell and phase change material layer) are designed for different working conditions outdoors and inside the gas holder, so that the device can maintain the stability and accuracy of monitoring data under harsh conditions such as severe temperature changes and high-intensity forced convection, fundamentally solving the industry problem of high false alarms and missed alarms.

[0029] 4) Breaking through industry bottlenecks and achieving inherent safety: By bypassing the sensor material bottleneck through external "heat conduction" and combining an all-inorganic non-metallic (ceramic) shell with PCM packaging, the explosion-proof and corrosion-resistant requirements of special gas environments are met.

[0030] 5) Significantly improved operation and maintenance efficiency: The device automatically performs accurate compensation and leakage detection without waiting for the ambient temperature to stabilize, reducing testing time by more than 50%, and the data meets the SEMI F5-0222 standard;

[0031] 6) Layered functional integration: Through a multi-layered functional design of annular heat-conducting jacket + heat-conducting medium + isolation sealing layer + phase change material layer + functional shell, multiple functions such as "heat collection", "heat homogenization", "precise temperature measurement", "physical isolation", "thermal buffer" and "environmental protection" are systematically integrated into one, forming a complete "thermal quiet zone" to ensure accurate and stable external temperature measurement under complex working conditions. Attached Figure Description

[0032] Those skilled in the art will understand that the accompanying drawings are provided to better understand the invention and do not constitute any limitation on the scope of the invention. Wherein:

[0033] Figure 1 This is a schematic diagram of the structure of an anti-interference leakage monitoring device for a special gas system provided in an embodiment of the present invention;

[0034] Figure 2 for Figure 1 A schematic diagram of the cross-section at the temperature probe.

[0035] in:

[0036] 1-Pressure sensor; 2-Special gas pipeline; 3-Annular heat-conducting jacket; 4-Temperature sensor; 4-1-Temperature probe; 5-Processing unit; 6-Heat-conducting medium; 7-Isolation sealing layer; 8-Phase change material layer; 9-Functional housing. Detailed Implementation

[0037] To make the objectives, advantages, and features of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clearly illustrate the purpose of the embodiments of this invention. Please refer to the accompanying drawings to make the objectives, features, and advantages of this invention more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only used to complement the content disclosed in the specification, for those skilled in the art to understand and read, and are not intended to limit the implementation conditions of this invention. Any modifications to the structure, changes in proportions, or adjustments to the size, if they are the same as or similar to the effects and objectives achieved by this invention, should still fall within the scope of the technical content disclosed in this invention.

[0038] Please refer to Figure 1This invention provides an anti-interference leak monitoring device for special gas systems, comprising:

[0039] Pressure sensor 1 is used to monitor the internal pressure of special gas pipeline 2 and output the raw pressure signal;

[0040] A modular thermal management unit is provided near the pressure sensor 1 and is used to establish a virtual temperature measurement point on the outside of the special gas pipeline 2 that is synchronized with the internal gas temperature of the special gas pipeline 2. The modular thermal management unit includes an annular heat-conducting jacket 3 and a temperature sensor 4. The annular heat-conducting jacket 3 is tightly attached to the outer wall of the special gas pipeline 2, and the temperature measurement probe 4-1 of the temperature sensor 4 is set on the annular heat-conducting jacket 3.

[0041] The processing unit 5 is communicatively connected to the pressure sensor 1 and the temperature sensor 4 to receive the raw pressure signal and the temperature signal. The processing unit 5 is configured to perform a dynamic compensation algorithm based on the raw pressure signal and the temperature signal and output the calibrated pressure signal.

[0042] By modularly configuring the annular heat-conducting jacket 3 and temperature sensor 4, a precise "virtual temperature measurement point" can be reconstructed outside the special gas pipeline 2 while ensuring safety. This fundamentally solves the problem of inaccurate temperature measurement caused by the sensor's inability to directly contact the special gas, thus obtaining reliable temperature data. Furthermore, based on the obtained reliable temperature data, a dynamic compensation algorithm is used to compensate for the measured original pressure value, effectively distinguishing and canceling the combined interference from environmental temperature changes and forced convection. This calibrates the distorted pressure measurement value to a stable pressure value, significantly reducing the false alarm rate and missed alarm rate, and enabling accurate identification of minute leaks.

[0043] In this embodiment, the special gas pipeline 2 serves as the installation foundation of the device and the initial path for heat conduction, enabling the heat of the gas inside the pipeline to be conducted to the outer wall of the pipeline. The special gas pipeline 2 includes, but is not limited to, a SUS316L stainless steel pipeline.

[0044] In this embodiment, the inner side of the annular heat-conducting jacket 3 forms a large-area tight contact with the outer wall of the pipe through an interference fit, efficiently capturing heat. At the same time, utilizing its own high thermal conductivity, the captured heat is rapidly transferred and homogenized within its annular body, forming an annular uniform temperature zone, i.e., a "virtual temperature measuring point." The annular heat-conducting jacket 3 can be designed as a split two-half ring, which can be quickly installed and securely fastened with mounting ears and screws at both ends.

[0045] Preferably, the annular heat-conducting jacket 3 uses beryllium copper (BeCu) as its base material, which has a thermal conductivity as high as 130 W / m·K, far exceeding that of stainless steel (16 W / m·K). This allows for rapid heat transfer from the pipe wall, facilitating efficient capture of the heat signal conducted by the gas inside the pipe through the pipe wall. Beryllium copper also possesses excellent corrosion resistance, making it suitable for applications containing Cl. - Corrosive gases such as NH3.

[0046] Preferably, a groove is formed on the outer wall of the annular heat-conducting jacket 3, and the temperature probe 4-1 is embedded in the groove. By forming a groove on the outer wall of the annular heat-conducting jacket 3 to accommodate the temperature probe 4-1, the annular heat-conducting jacket 3 can fit more closely to the outer wall of the special gas pipeline 2, resulting in more accurate temperature measurements. Furthermore, the groove mechanically limits and fixes the temperature probe 4-1, preventing the temperature probe 4-1 from shifting due to pipeline vibration or external impact, thus ensuring the reliability of long-term monitoring.

[0047] More preferably, the gap between the temperature probe 4-1 and the groove is filled with a thermally conductive medium 6 to fix and seal the temperature probe 4-1 within the groove, and to form a tight thermal connection between the temperature probe 4-1 and the annular thermally conductive jacket 3. This eliminates the microscopic air gap between the temperature probe 4-1 and the metal groove, establishes an ultra-low thermal resistance heat transfer channel, and ensures that heat is efficiently conducted from the annular thermally conductive jacket 3 to the temperature probe 4-1. In this embodiment, the thermally conductive medium 6 is, for example, a high thermal conductivity silicone grease, whose viscoelastic properties can absorb the energy of pipe vibration and prevent the sensor from failing due to mechanical fatigue. In addition to using high thermal conductivity silicone grease, other thermally conductive media well known to those skilled in the art can also be used, and the present invention does not limit this.

[0048] To achieve the above structure, especially the matching of the annular heat-conducting jacket 3 and the temperature probe 4-1, the following table 1 shows the design rules for the key dimensions of the groove for different pipe diameters.

[0049] Table 1

[0050] The design rules and basis are as follows:

[0051] The groove depth H ≈ (0.4~0.6) × ds

[0052] Basis: This ratio ensures that the temperature probe 4-1 is effectively wrapped and compressed, while providing sufficient space for the heat-conducting medium 6 to achieve optimal heat conduction.

[0053] The groove width W = ds + (0.5~1.5) mm

[0054] Basis: The extra width is used to accommodate sufficient thermally conductive medium 6 and to compensate for minor deviations during installation, ensuring that the sensor can be easily embedded.

[0055] Safety boundary: Remaining wall thickness after the trench = Tclamp - H

[0056] Requirements: Tremaining ≥ 0.5 mm (for 1 / 4 inch pipe diameter, reduce to ≥ 0.3 mm).

[0057] Basis: This ensures that the annular heat-conducting jacket 3 will not crack or undergo plastic deformation from the groove when it is clamping the special gas pipeline 2.

[0058] Preferably, the modular thermal management unit further includes an isolation sealing layer 7 covering the outside of the annular thermally conductive jacket 3. The isolation sealing layer 7 is made of cured high-temperature epoxy resin, and its function is to prevent the external phase change material (PCM) and the internal high thermal conductivity silicone grease from interpenetrating and contaminating each other, ensuring the long-term stability of the performance of both, and providing additional fixation and stress buffering for the temperature probe 4-1 and the leads, ensuring the electrical safety of the sensor.

[0059] More preferably, the modular thermal management unit further includes a phase change material layer 8 covering the outside of the isolation sealing layer 7. When the external ambient temperature fluctuates rapidly, the phase change material absorbs / releases latent heat during the phase change process, which can effectively buffer the thermal shock transferred to the internal temperature measurement. In this embodiment, the phase change material layer 8 is made of paraffin wax and silicon dioxide mixed in a mass ratio of 7:3, and its phase change point can be selected between -10°C and 40°C (preferably 28°C ± 2°C) depending on the environment, to absorb and buffer rapid fluctuations in ambient temperature.

[0060] More preferably, the modular thermal management unit also includes a functional housing 9 covering the phase change material layer 8, which provides thermal insulation and explosion-proof protection. In this embodiment, for outdoor / high explosion-proof scenarios, the functional housing 9 can be a ceramic sleeve with a thickness of 1.5mm ± 0.1mm, providing excellent thermal insulation, explosion-proof, and corrosion resistance. The ceramic material functional housing 9 has a low thermal conductivity, significantly improving thermal insulation performance compared to traditional metal housings. It can block the thermal shock of external high temperatures (such as furnace radiant heat) or low temperatures (such as -40℃ extreme cold) to the temperature probe 4-1, while also having good compressive strength and corrosion resistance, meeting the explosion-proof and corrosion-resistant requirements of special gas environments. For cabinet-indoor scenarios, high-strength, corrosion-resistant engineering plastics such as PPS or PEI can be selected to control cost and weight.

[0061] Preferably, there are two temperature sensors 4, spaced axially along the gas pipeline 2, wherein the first temperature sensor is closer to the pressure sensor than the second temperature sensor. The dynamic compensation algorithm is as follows:

[0062] P_cal = P_meas × (293 / (T+273)) + k · ΔT at

[0063] Where P_cal is the calibrated pressure value (final output, used to determine if there is a leak), P_meas is the original pressure value measured by pressure sensor 1, T is the representative temperature of the gas in the special gas pipeline 2, taken as the average of the temperature values ​​measured by the two temperature sensors 4, i.e., T=(T1+T2) / 2, where T1 and T2 are the temperature values ​​measured by the first and second temperature sensors, respectively, and ΔT at The axial temperature difference is the difference between the temperature values ​​measured by the first and second temperature sensors, i.e., ΔT. at = T1-T2, k is the thermo-mechanical coupling compensation coefficient, 293 represents the reference temperature, corresponding to 20℃, and 273 represents the conversion constant between the Celsius and Kelvin scales.

[0064] The first term in the formula, P_meas × (293 / (T+273)), is based on the ideal gas law and undergoes temperature compensation to eliminate the influence of uniform temperature changes. The second term in the formula, k·ΔT, is... at The axial temperature difference ΔT is uniquely introduced in this invention. at It is used to quantitatively characterize and counteract the additional thermal stress effects caused by environmental heat infiltration or forced convection.

[0065] Specifically, the two temperature sensors 4 should be arranged adjacent to the installation position of the pressure sensor 1, and at a certain interval along the pipe axis. The interval range is 50-200mm, preferably 100mm, for measuring the axial temperature difference ΔT. at .

[0066] k is a thermo-mechanical coupling compensation coefficient, the theoretical value of which is directly related to the macroscopic physical properties of the pipeline system. Based on the theories of mechanics of materials and thermoelasticity, the following relationship is established:

[0067] k∝E·α·D / t

[0068] It can be seen that the thermo-mechanical coupling compensation coefficient k is directly proportional to the product of the pipe material's Young's modulus E, coefficient of thermal expansion a, and pipe diameter D, and inversely proportional to the pipe wall thickness t. For SUS316L material, E and a are inherent material constants; therefore, the value of k mainly varies monotonically within a predictable range with the industry-standard pipe dimensions (D and t).

[0069] In this embodiment, the effective range of k is 0.005-0.04. This is based on common knowledge in the art regarding the thermal stress behavior of pipelines and can be determined using conventional "thermal gradient-pressure response" calibration methods. Specifically, for any given special gas pipeline system, those skilled in the art can obtain its specific k value using the following conventional methods:

[0070] Under controlled conditions, a known axial temperature difference ΔT is artificially created in the monitored pipe section. at And record the change in pressure sensor 1 reading ΔP, using k=ΔP / ΔT at The calculations show that by applying and extrapolating the above-mentioned conventional methods to SUS316L piping systems of different specifications, this invention establishes the effective range of this universality. The correspondence between the k-value and the piping specification is shown in Table 2 below.

[0071] Table 2 Nominal pipe diameter Typical outer diameter (mm) Typical wall thickness (mm) The influence and explanation of the trend of k value 1 / 4" 6.35 0.89 (Sch5S) Benchmark. Under this specification, the pipe rigidity is relatively the best, and the thermal stress effect is the least significant, corresponding to the lower limit region of the k value (0.005). 3 / 8" 9.525 0.89 (Sch5S) As the pipe diameter D increases, the value of k increases. With the wall thickness remaining constant, increasing the pipe diameter enhances the thermal stress effect, and the value of k increases accordingly. 1 / 2" 12.7 1.07 (Sch5S) As the pipe diameter D continues to increase, the k value also continues to increase. This is one of the most commonly used specifications for special gas systems. For this specification and below, the k value is preferably 0.015. 3 / 4" 19.05 1.07 (Sch5S) As the pipe diameter D increases significantly, the k value also increases significantly. The significant increase in pipe diameter dominates the rise in the k value, pushing it into the upper half of the range. 1" 25.4 1.07 (Sch5S) / 2.11 (Sch10S) When the pipe diameter D is at its maximum, the k value reaches its maximum. For thin-walled pipes such as Sch5S, the k value approaches or reaches the upper limit of the range (0.04); if thick-walled pipes such as Sch10S are used, the increase in wall thickness will partially suppress the k value, making it slightly lower than the upper limit.

[0072] Therefore, the effective range of k values ​​from 0.005 to 0.04 systematically covers all cases, from the thinnest and most rigid S1 / 4"Sch5S pipes (k value approaching the lower limit) to the thickest S1"Sch5S pipes with the most significant thermal stress effects (k value approaching the upper limit). Those skilled in the art can quickly determine the optimal k value within the above range through limited conventional testing, based on the nominal pipe diameter and wall thickness of their specific pipe.

[0073] In this embodiment, the processing unit 5 can automatically determine the dominant interference mode (such as outdoor temperature change or cabinet convection), and adopt a multi-source information fusion strategy to fuse multiple physical signals such as temperature and axial temperature difference. The executed dynamic compensation algorithm not only considers gas state changes, but also innovatively introduces the axial temperature difference ΔT. at This method quantifies and offsets the thermal stress error of the sensor body caused by complex external environments, achieving a leap from "single-factor compensation" to "multi-modal composite compensation." In this embodiment, the processing unit 5 includes, but is not limited to, a PLC, which has a built-in signal conditioning circuit and a microprocessor. The signal conditioning circuit is responsible for acquiring and preprocessing sensor signals, and the microprocessor, as the intelligent decision center, is configured to execute the dynamic compensation algorithm and output the calibrated pressure signal.

[0074] In this embodiment, the temperature sensor 4 is an integrated temperature sensor, preferably a Pt100 sensor. Its temperature probe 4-1 uses a PT100 platinum resistance thermometer armored core with Ex ia IIC T6 explosion-proof certification. The Pt100 sensor is embedded and fixed in the groove through the thermally conductive medium 6, forming a stable thermal and mechanical connection with the annular thermally conductive jacket 3. The fast response of the Pt100 sensor, combined with the heat homogenization effect of the annular thermally conductive jacket 3, accurately measures the homogenized temperature of the annular thermally conductive jacket 3, ensuring that the temperature difference ΔT between the virtual temperature measurement point and the pipeline is ≤0.5℃. In outdoor scenarios, the low-temperature resistance of the Pt100 sensor can also work synergistically with the phase change material layer 8 to suppress measurement drift caused by diurnal temperature differences.

[0075] The technical concept of the present invention will be further illustrated by the following two specific examples.

[0076] Example 1: Monitoring of silane pipelines in outdoor semi-open environments

[0077] Installation: First, pre-install the temperature probes 4-1 of the two Pt100 sensors in the grooves of the annular thermally conductive jacket 3, and fix and seal them in the grooves with a layer of 0.5mm±0.1mm high thermal conductivity silicone grease. Then, fit the annular thermally conductive jacket 3 onto the predetermined position on the outer wall of the silane special gas pipeline 2 (it needs to be set near the pressure sensor 1), ensuring good contact. Next, apply the isolation sealing layer 7 and the phase change material layer 8 to the outside of the annular thermally conductive jacket 3 in sequence, and finally, cover the phase change material layer with the functional outer shell 9.

[0078] Wiring and Configuration: Connect the signal lines of the two Pt100 sensors and pressure sensor 1 to the PLC. Pre-install the dynamic compensation algorithm program in the PLC and set parameters, such as the thermal-mechanical coupling compensation coefficient k=0.015.

[0079] Operation and Verification: After the system is powered on, the PLC continuously collects P_meas, temperatures T1 and T2. For example, when afternoon sunlight causes one side of the pipeline to heat up (generating an axial temperature difference), the PLC can automatically identify this "outdoor heat infiltration" mode and execute a dynamic compensation algorithm. After this compensation, the output P_cal will effectively filter out thermal stress interference and accurately reflect the pressure condition inside the pipeline.

[0080] Example 2: Used for monitoring strong convective environments inside gas holders.

[0081] In a gas holder with 300 air changes per hour, the installation method is the same as in Example 1. When forced cold air blows directly onto the sensor installation point, the phase change material layer 8 effectively buffers the rapid temperature change caused by the airflow. The PLC recognizes the "forced convection" mode and utilizes ΔT atThe signal compensates for the cooling effect of the airflow. Even under transient operating conditions such as the start-up and shutdown of the air exchanger, the device can still maintain a stable pressure reading, effectively avoiding false alarms caused by airflow pulsation.

[0082] In summary, this invention provides an anti-interference leak monitoring device for special gas systems. Its core lies in a unique indirect monitoring system combining external heat conduction and dynamic compensation. Through a multi-layered functional design consisting of an annular heat-conducting jacket 3, a heat-conducting medium 6, an isolation sealing layer 7, a phase change material layer 8, and a functional outer shell 9, it systematically integrates multiple functions such as heat collection, heat homogenization, precise temperature measurement, physical isolation, heat buffering, and environmental protection. While ensuring safety, it can reconstruct a precise "virtual temperature measurement point" outside the special gas pipeline 2, fundamentally solving the problem of inaccurate temperature measurement caused by the sensor's inability to directly contact the special gas. Simultaneously, based on reliable temperature data, a dynamic compensation algorithm is used to compensate for the measured original pressure value, effectively distinguishing and offsetting combined interferences such as environmental temperature changes and forced convection. This calibrates the distorted pressure measurement value to a stable pressure value, significantly reducing the false alarm rate and missed alarm rate, and achieving accurate identification of minute leaks.

[0083] The above description is merely a description of preferred embodiments of the present invention and is not intended to limit the scope of the invention in any way. Any changes or modifications made by those skilled in the art based on the above disclosure are within the protection scope of the present invention. Obviously, those skilled in the art can make various modifications and variations to the present invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the present invention and its equivalents, the present invention also intends to include these modifications and variations.

Claims

1. An anti-tamper leak monitoring device for a gas system, characterized in that, The utility model relates to a kind of pressure sensor and temperature sensor for special gas pipeline, comprising: Pressure sensor for monitoring the internal pressure of special gas pipeline and outputting raw pressure signal; Modular thermal management unit, which is arranged near the pressure sensor and is used to establish a virtual temperature measurement point outside the special gas pipeline that synchronizes with the internal gas temperature of the special gas pipeline, the modular thermal management unit comprises an annular heat-conducting jacket and a temperature sensor, the annular heat-conducting jacket is tightly attached to the outer wall of the special gas pipeline, and the temperature measurement probe of the temperature sensor is arranged on the annular heat-conducting jacket; Processing unit, which is communicatively connected with the pressure sensor and the temperature sensor to receive the raw pressure signal and the temperature signal, the processing unit is configured to execute a dynamic compensation algorithm based on the raw pressure signal and the temperature signal, and output a calibrated pressure signal.

2. The anti-tamper leak monitoring device for a gas system of claim 1, wherein, The outer wall of the annular heat-conducting jacket is provided with a groove, and the temperature measurement probe is embedded in the groove.

3. The anti-tamper leak monitoring device for a gas system of claim 2, wherein, The gap between the temperature measurement probe and the groove is filled with a heat-conducting medium.

4. The anti-tamper leak monitoring device for a gas system of claim 1, wherein, The modular thermal management unit further comprises an isolation sealing layer wrapped outside the annular heat-conducting jacket.

5. The anti-tamper leak monitoring device for a gas system of claim 4, wherein, The modular thermal management unit further comprises a phase change material layer wrapped outside the isolation sealing layer.

6. The anti-tamper leak monitoring device for a gas system of claim 5, wherein, The modular thermal management unit further comprises a functional shell wrapped outside the phase change material layer, and the functional shell is used to provide thermal insulation and explosion-proof protection.

7. The anti-tamper leak monitoring device for a gas system of claim 6, wherein, The functional shell is a ceramic sleeve.

8. The tamper-resistant leak monitoring device for a gas system of claim 1, wherein, The temperature sensor is two and is arranged at an axial distance along the special gas pipeline, wherein the first temperature sensor is closer to the pressure sensor than the second temperature sensor, and the dynamic compensation algorithm is as follows: P cal = P meas x (293 / (T+273)) + k - AT at wherein P cal is the calibrated pressure value, P meas is the raw pressure value measured by the pressure sensor, T is the representative temperature of the gas in the gas pipeline, taken as the average of the temperature values measured by the two temperature sensors, AT at is the axial temperature difference, taken as the difference between the temperature values measured by the first temperature sensor and the second temperature sensor, and k is the thermal-mechanical coupling compensation coefficient.

9. The anti-tamper leak monitoring device for a gas system of claim 8, wherein, The distance between the two temperature sensors is between 50-200mm.

10. The tamper-resistant leak monitoring device for a gas system of claim 1, wherein, The annular heat-conducting jacket is made of beryllium copper material.

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