Method and device for automatically controlling semiconductor crystal ingot to enter water tank

Abstract

The embodiment of the invention provides a method and device for automatically controlling a semiconductor crystal ingot to enter a water tank, and relates to the technical field of semiconductor crystal ingot processing auxiliary equipment.The device comprises a rack, a lifting and transplanting device is arranged on the rack, a turnover positioning device is arranged on one side of the lifting and transplanting device, and a first conveying device is arranged on the other side of the lifting and transplanting device; the lifting transplanting device comprises a lifting mechanism, the lifting mechanism is arranged at the tail end of the first conveying device, a transverse moving mechanism is arranged above the lifting mechanism, the overturning positioning device comprises an overturning working frame, a lifting device is arranged on the overturning working frame, an overturning driving part is arranged on the lifting device, and the U-shaped conveying group is arranged on the other side of the overturning positioning device. A turnover workbench is arranged on the turnover driving part, a positioning tool is arranged on the turnover workbench, and the turnover driving part is a servo motor. The device has the effects that operation is stable, and the crystal ingot is prevented from being collided and damaged.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor crystal ingot processing auxiliary equipment, and particularly relates to an automatic semiconductor crystal ingot water tank feeding control method and device. BACKGROUND

[0002] In the process of semiconductor crystal ingot processing, the cut crystal ingot needs to be transferred to a water tank for cleaning or soaking treatment. The existing crystal ingot water tank feeding operation is mostly dependent on manual operation or semi-automatic equipment. Manual transfer is low in efficiency and high in labor intensity, and the crystal ingot is easy to be damaged due to bumping. The semi-automatic equipment is usually composed of independent conveying, lifting and overturning devices, but the devices lack coordinated control, and the following problems exist: first, the alignment accuracy of the crystal ingot and the water tank opening is poor, and the error is often 5-10 mm, which easily leads to the jamming or impact of the crystal ingot on the water tank; second, the water tank is easy to deviate during conveying and needs to be manually adjusted; and third, the overturning device only realizes simple rotation and cannot dynamically correct the angle according to the posture of the crystal ingot, so the stability of the feeding operation is poor.

[0003] In view of the above problems, the semiconductor crystal ingot water tank feeding device needs to solve the problem of low operation stability. SUMMARY

[0004] In order to solve the problem of low operation stability of the semiconductor crystal ingot water tank feeding device, the present application provides an automatic semiconductor crystal ingot water tank feeding control method and device.

[0005] The automatic semiconductor crystal ingot water tank feeding control method and device provided by the present application adopt the following technical scheme: An automatic semiconductor crystal ingot water tank feeding control method comprises the following steps: S1, when the first positioning sensor detects the crystal ingot, the first conveying device starts to transport the crystal ingot; S2, when the second positioning sensor detects that the crystal ingot reaches the lifting and transplanting device, the positioning device of the lifting and transplanting device positions the base of the crystal ingot bottom support, then the lifting mechanism lifts the base away from the first conveying device, then the dismounting cylinder of the dismounting device fixes the base and cooperates with the clamping jaw cylinder on the horizontal moving mechanism to separate the crystal ingot bottom support from the base upward, then the crystal ingot bottom support is transferred to the overturning workbench of the overturning and positioning device, and the positioning tool fixes the crystal ingot bottom support; S3, the water tank is conveyed to below the overturning workbench by the second conveying belt, and after the fourth positioning sensor detects the water tank, the water tank positioning device starts to work, and the water tank positioning cylinder realizes the positioning of the water tank; S4, the overturning workbench first rises, then the servo motor drives the overturning workbench to overturn, the third positioning sensor detects the center position of the water tank opening, slows down when approaching the water tank opening, and slowly rotates until the crystal ingot faces the center of the water tank opening, then the overturning workbench descends to feed the crystal ingot into the water tank, the positioning tool is released, and the overturning and positioning device is reset; S5, the water tank positioning cylinder is retracted, the second conveying belt conveys the water tank carrying the crystal ingot to the third conveying belt, the third conveying belt conveys in a direction perpendicular to the second conveying belt, and then the fourth conveying belt is connected to continue to move, and the whole tank entering process is completed.

[0006] An apparatus for controlling the automatic semiconductor crystal ingot into a water tank comprises a rack, a lifting and transplanting device arranged on the rack, a turnover positioning device arranged on one side of the lifting and transplanting device, a first conveying device arranged on the other side of the lifting and transplanting device, a U-shaped conveying group arranged on the other side of the turnover positioning device, a lifting mechanism arranged in the lifting and transplanting device, a horizontal moving mechanism arranged above the lifting mechanism, a turnover workbench arranged on the turnover positioning device, a lifting device arranged on the turnover workbench, a turnover driving element arranged on the lifting device, a turnover workbench arranged on the turnover driving element, a positioning tool arranged on the turnover workbench, and a servo motor as the turnover driving element.

[0007] Optionally, the first conveying device comprises a first conveying belt and a first positioning sensor, and the first positioning sensor is arranged at the starting end of the first conveying belt.

[0008] Optionally, the U-shaped conveying group comprises a second conveying belt, a third conveying belt and a fourth conveying belt, the conveying direction of the third conveying belt is parallel to the conveying direction of the first conveying belt, the conveying direction of the second conveying belt and the fourth conveying belt is perpendicular to the conveying direction of the third conveying belt, the second conveying belt is connected to the turnover positioning device, the fourth positioning sensor is arranged at the end of the second conveying belt, and the second conveying belt is further provided with a water tank positioning device, and the water tank positioning device comprises a water tank positioning cylinder.

[0009] Optionally, the lifting mechanism comprises a lifting workbench, the height of the lifting workbench is higher than that of the first conveying device, the lifting workbench has a cavity, the lifting workbench is further provided with a lifting cylinder, the execution end of the lifting cylinder is provided with a lifting workbench, the second positioning sensor is arranged on the lifting workbench, the height of the second positioning sensor is flush with that of the first conveying belt, the lifting workbench is provided with a positioning device, the lifting workbench is provided with a dismounting device, the horizontal moving mechanism comprises two-axis linear modules, the two-axis linear modules are arranged on the rack, and the execution end of the two-axis linear modules is provided with a clamping jaw cylinder.

[0010] Optionally, the positioning device includes positioning cylinders, four of which are respectively located at the four corners of the lifting platform, and the disassembly device includes disassembly cylinders, two of which are respectively located on both sides of the lifting frame.

[0011] Optionally, the lifting device includes a lifting platform and a linear module. The linear module is mounted on a tilting workbench, and the lifting platform is slidably mounted on the execution end of the linear module. The positioning fixture includes a base support fixing cylinder, and a second conveyor belt is located below the tilting workbench.

[0012] Optionally, the first positioning sensor, the second positioning sensor, the third positioning sensor and the fourth positioning sensor are all laser beam sensors.

[0013] Optionally, both the first conveying device and the U-shaped conveyor group are rigid conveyor belts.

[0014] In summary, this application includes at least one of the following beneficial technical effects: The opening of the water tank is detected by a laser beam sensor, and the position of the water tank is fixed by a water tank positioning mechanism. When entering the tank, the ingot first rises and then flips. When it flips and approaches the water tank, the speed is reduced to achieve accurate alignment between the ingot and the opening of the water tank, avoiding jamming and impact during entry. The entire process, from ingot conveying, lifting and transferring to entering the tank and water tank circulation, is seamlessly connected, improving work efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a front view of the present invention; Figure 3 This is a schematic diagram of the structure of the first conveying device and the lifting and transplanting device of the present invention; Figure 4 This is a schematic diagram of the lifting and transplanting device and the U-shaped transport assembly of the present invention; Figure 5 This is an enlarged view of the water tank positioning device of the present invention.

[0016] Explanation of reference numerals in the attached drawings: 1. Frame; 2. First conveying device; 21. First conveyor belt; 3. Lifting and transplanting device; 31. Lifting mechanism; 311. Lifting work frame; 312. Lifting cylinder; 313. Lifting worktable; 314. Positioning cylinder; 315. Disassembly cylinder; 32. Transverse mechanism; 321. Two-axis linear module; 322. Gripper cylinder; 4. Tilting and positioning device; 41. Tilting work frame; 42. Lifting device; 421. Lifting platform; 42 2. Linear module; 43. Servo motor; 44. Tilting worktable; 45. Positioning fixture; 451. Base support fixing cylinder; 5. U-shaped conveyor group; 51. Second conveyor belt; 511. Water tank positioning device; 52. Third conveyor belt; 53. Fourth conveyor belt; 6. Crystal ingot; 61. Crystal ingot base support; 62. Base; 63. Water tank; 71. First positioning sensor; 72. Second positioning sensor; 73. Third positioning sensor; 74. Fourth positioning sensor. Detailed Implementation

[0017] The terminology used in the following embodiments is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” “the,” “the,” and “this” are intended to also include expressions such as “one or more,” unless the context clearly indicates otherwise. It should also be understood that in the following embodiments of this application, “at least one” and “one or more” refer to one, two, or more than two. The term “and / or” is used to describe the relationship between related objects, indicating that three relationships may exist; for example, A and / or B can indicate: A alone, A and B simultaneously, or B alone, where A and B can be singular or plural. The character “ / ” generally indicates that the preceding and following related objects are in an “or” relationship.

[0018] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0019] The following is in conjunction with the appendix Figures 1-5 The present invention will be described in further detail below.

[0020] This application discloses an automated semiconductor ingot water tank loading device, referring to... Figure 1 and Figure 2 The system includes a frame 1, on which a lifting and transplanting device 3 is mounted. A flipping and positioning device 4 is located on one side of the lifting and transplanting device 3, and a first conveying device 2 is located on the other side. A U-shaped conveyor group 5 is located on the other side of the flipping and positioning device 4. Both the first conveying device 2 and the U-shaped conveyor group 5 are rigid conveyor belts. The first conveying device 2 includes a first conveyor belt and a first positioning sensor 71. The first positioning sensor 71 is located at the starting end of the first conveyor belt 21 to detect whether an ingot has entered the first conveyor belt 21. The first conveyor belt is used to transport ingots 6. For stable transport, the ingots 6 are placed on an ingot base 61, and a base 62 is also provided under the ingot base 61. The lifting and transplanting device 3 includes a lifting mechanism 31 located at the end of the first conveyor belt. A lateral movement mechanism 32 is located above the lifting mechanism. The flipping and positioning device 4 includes a flipping work frame 41 mounted on the frame 1. 1 is equipped with a lifting device 42, which is equipped with a flipping drive component. The flipping drive component is equipped with a flipping worktable 44, which is equipped with a positioning fixture 45. The U-shaped conveyor group 5 includes a second conveyor belt 51, a third conveyor belt 52, and a fourth conveyor belt 53. All three conveyor belts are rigid and form a U-shape. The third conveyor belt 52 is parallel to the conveying direction of the first conveyor belt 21. The conveying directions of the second conveyor belt 51 and the fourth conveyor belt 53 are perpendicular to the direction of the third conveyor belt 52. The second conveyor belt 51 is connected to the flipping positioning device 4 to transport the empty water tank 63 to the flipping positioning device 4 for loading crystal ingots. The third conveyor belt 52 and the fourth conveyor belt 53 are used to transport the loaded water tank 63. The U-shaped structure makes the conveying path of the water tank 63 folded, which improves the space utilization rate compared with the straight layout and is suitable for compact workshop scenarios. The first conveyor belt 21 and the third conveyor belt 52 are in the same direction, which facilitates the connection with the production lines of the preceding and following processes.

[0021] Reference Figure 2 and Figure 3The lifting mechanism 31 includes a lifting work frame 311, which is higher than the first conveying device 2. The lifting work frame 311 has a cavity and is equipped with a lifting cylinder 312. The lifting cylinder 312 has a lifting worktable 313 at its actuating end. The lifting worktable 313 is docked to the first conveyor belt 21 in its default working state. A second positioning sensor 72 is also provided on the lifting work frame 311. The second positioning sensor 72 is set at the same height as the first conveyor belt 21 to detect whether an ingot has arrived at the lifting and transplanting device 3. A positioning device is provided on the lifting worktable 313, and a disassembly device is provided on the lifting work frame 311. The positioning device includes four positioning cylinders 314, which are respectively located on the lifting worktable 311. At the four corners of the workbench 313, the base 62 is constrained to a designated position from four directions. The disassembly device includes disassembly cylinders 315. There are two disassembly cylinders 315, which are respectively set on both sides of the lifting work frame 311 to fix the base and cooperate with the transverse mechanism 32 to separate the base 62 and the ingot base 61. The transverse mechanism 32 includes a two-axis linear module 321, which is set on the frame. The execution end of the two-axis linear module 321 is equipped with a gripper cylinder 322, which is used to grip the ingot base 61. The end of the transverse mechanism 32 is equipped with a flipping positioning device 4. The two-axis linear module 321 moves the gripper cylinder 322 after gripping to separate the ingot base 61 from the base 62, and then moves it transversely to the flipping positioning device 4.

[0022] Reference Figure 2 and Figure 4 The lifting device 42 includes a lifting platform 421 and a linear module 422. The linear module 422 is mounted on the tilting work frame 41. The lifting platform 421 is slidably mounted on the execution end of the linear module 422. The tilting drive is a servo motor 43, which is mounted on the lifting platform 421. The positioning fixture 45 includes a base fixing cylinder 451, which is used to fix the ingot base 61. The tilting work table 44 is used to receive the ingot base 61 conveyed by the transverse mechanism 32. Below the worktable 44 is the second conveyor belt 51. The flipping worktable 44 is also equipped with a third positioning sensor 73 for detecting the position of the water tank 63. The flipping positioning device 4 integrates three-level action logic of lifting, flipping and lowering. With the synchronous connection of the lifting and transplanting device 3, the flipping positioning device 4 first lifts the crystal ingot after receiving it to avoid the bottom support scraping against the water tank during the flipping process. The flipping shaft is driven by a servo motor 43. The flipping angular velocity is adjustable. When it approaches the opening of the water tank 63, it decelerates to 20° / s to reduce the inertial impact of the crystal ingot.

[0023] Reference Figure 5The second conveyor belt 51 is equipped with a fourth positioning sensor 74 at its end. The fourth positioning sensor is used to detect whether the water tank 63 enters below the flipping positioning device 4. The second conveyor belt 51 is also equipped with a water tank positioning device 511. The water tank positioning device 511 includes a water tank positioning cylinder. When the water tank 63 reaches the working position, the water tank positioning cylinder positions the water tank to facilitate the subsequent entry of the crystal ingot 6.

[0024] The first positioning sensor 71, the second positioning sensor 72, the third positioning sensor 73, and the fourth positioning sensor 74 are all laser beam sensors.

[0025] The automated control method for semiconductor ingot water tank is as follows: S1. When the first positioning sensor 71 detects the crystal ingot, the first conveying device 2 starts to transport the crystal ingot 6. S2. When the second positioning sensor 72 detects that the crystal ingot has arrived at the lifting and transplanting device 3, the positioning device of the lifting and transplanting device 3 positions the base 62 that carries the crystal ingot base 61. Then the lifting mechanism 31 lifts up and lifts the base 62 away from the first conveying device 2. Subsequently, the disassembly cylinder 315 of the disassembly device fixes the base 62 and cooperates with the gripper cylinder 322 on the transverse mechanism 32 to lift the crystal ingot base 61 upward away from the base 62. Then the crystal ingot base 61 is transferred to the flipping worktable 44 of the flipping positioning device 4, and the positioning fixture 45 fixes the crystal ingot base 61. S3. Water tank 63 is conveyed by the second conveyor belt 51 to the bottom of the tilting worktable 44. After the fourth positioning sensor 74 detects water tank 63, the water tank positioning device 511 is activated and the water tank positioning cylinder realizes the positioning of water tank 63. S4. The flipping worktable 44 rises first, and then the servo motor 43 drives the flipping worktable 44 to flip. The third positioning sensor 73 detects the center position of the opening of the water tank 63. When it approaches the opening of the water tank 63, it decelerates and slowly rotates until the crystal ingot 6 faces the center of the opening of the water tank 63. Then the flipping worktable 44 descends and sends the crystal ingot 6 into the water tank 63. The positioning fixture 45 is released and the flipping positioning device 4 is reset. S5. The water tank positioning cylinder retracts, and the second conveyor belt 51 transports the water tank 63 containing the crystal ingot to the third conveyor belt 52. The third conveyor belt 52 transports the crystal ingot in a direction perpendicular to the second conveyor belt 51, and then the fourth conveyor belt 53 changes direction and continues to move, completing the entire box entry process.

[0026] The above are merely preferred embodiments of the present invention. The scope of protection of the present invention is not limited to the above embodiments. Any equivalent modifications or variations made by those skilled in the art based on the content disclosed in the present invention should be included within the scope of protection set forth in the claims.

Claims

1. An automated semiconductor ingot into water tank control method, characterized by: The method comprises the following steps: S1, the first positioning sensor detects the ingot, and the first conveying device starts to transport the ingot; S2, when the second positioning sensor detects that the ingot reaches the lifting and transplanting device, the positioning device of the lifting and transplanting device positions the base carrying the ingot bottom support, then the lifting mechanism rises to lift the base away from the first conveying device, then the dismounting cylinder of the dismounting device fixes the base and cooperates with the clamping jaw cylinder on the horizontal moving mechanism to separate the ingot bottom support from the base upward, then the ingot bottom support is transferred to the turnover workbench of the turnover positioning device, and the positioning tool fixes the ingot bottom support; S3, the water tank is conveyed to below the turnover workbench by the second conveying belt, the fourth positioning sensor detects the water tank, the water tank positioning device is started, and the water tank positioning cylinder realizes the positioning of the water tank; S4, the turnover workbench first rises, then the servo motor drives the turnover workbench to turn over, the third positioning sensor detects the center position of the water tank opening, slows down when approaching the water tank opening, and slowly rotates until the ingot faces the center of the water tank opening, then the turnover workbench descends to send the ingot into the water tank, the positioning tool is released, and the turnover positioning device is reset; S5, the water tank positioning cylinder is retracted, the second conveying belt conveys the water tank carrying the ingot to the third conveying belt, the third conveying belt is conveyed in a direction perpendicular to the second conveying belt, and then the fourth conveying belt changes direction to continue to move, thereby completing the whole tank entering process.

2. An apparatus constructed from the automated semiconductor crystal ingot into water tank control method according to claim 1, characterized by: The machine frame (1) is provided with a lifting and transplanting device (3) on one side, a turnover positioning device (4) on the other side, a first conveying device (2) on the other side of the lifting and transplanting device (3), and a U-shaped conveying group (5) on the other side of the turnover positioning device (4).

3. The apparatus of claim 2, wherein the method further comprises: determining if the temperature of the semiconductor ingot is within a predetermined temperature range; and if the temperature of the semiconductor ingot is not within the predetermined temperature range, then controlling the temperature of the semiconductor ingot to be within the predetermined temperature range. The first conveying device (2) comprises a first conveying belt (21) and a first positioning sensor (71), and the first positioning sensor (71) is arranged at the starting end of the first conveying belt (21).

4. The apparatus comprising an automated semiconductor ingot water tank control method according to claim 3, characterized in that: The U-shaped conveying group (5) comprises a second conveying belt (51), a third conveying belt (52) and a fourth conveying belt (53), the third conveying belt (52) is parallel to the conveying direction of the first conveying belt (21), the conveying direction of the second conveying belt (51) and the fourth conveying belt (53) is perpendicular to the direction of the third conveying belt (52), the second conveying belt (51) is connected to the overturning positioning device (4), the fourth positioning sensor (74) is arranged at the end of the second conveying belt (51), the second conveying belt (51) is further provided with a water tank positioning device (511), and the water tank positioning device (511) comprises a water tank positioning cylinder (314).

5. The apparatus of claim 4, wherein the method further comprises: determining if the temperature of the ingot is within a predetermined range; and if the temperature of the ingot is not within the predetermined range, then controlling the temperature of the ingot to be within the predetermined range. The lifting mechanism (31) comprises a lifting workbench (311), the height of the lifting workbench (311) is higher than that of the first conveying device (2), the lifting workbench (311) has a cavity, the lifting workbench (311) is further provided with a lifting cylinder (312), the execution end of the lifting cylinder (312) is provided with a lifting workbench (313), the second positioning sensor (72) is arranged on the lifting workbench (311), the arrangement height of the second positioning sensor (72) is flush with the first conveying belt (21), the lifting workbench (313) is provided with a positioning device, the lifting workbench (311) is provided with a dismounting device, the transverse moving mechanism (32) comprises a two-axis linear module (321), the two-axis linear module (321) is arranged on the rack (1), and the execution end of the two-axis linear module (321) is provided with a clamping jaw cylinder (322).

6. The apparatus comprising an automated semiconductor ingot water tank control method according to claim 5, characterized in that: The positioning device comprises a positioning cylinder (314), the positioning cylinder (314) has four positioning cylinders arranged at four corners of the lifting workbench (313) respectively, the dismounting device comprises a dismounting cylinder (315), and the dismounting cylinder (315) has two dismounting cylinders arranged on the two sides of the lifting workbench (311) respectively.

7. The apparatus comprising an automated semiconductor ingot water tank control method according to claim 4, characterized in that: The lifting device (42) comprises a lifting platform (421) and a linear module (422), the linear module (422) is arranged on the overturning workbench (41), and the lifting platform (421) is slidably arranged at the execution end of the linear module (422); the positioning tool (45) comprises a bottom support fixing cylinder (451), and the overturning workbench (44) is below the second conveying belt (51).

8. The apparatus of claim 2, wherein the method further comprises: determining if the temperature of the ingot is within a predetermined range; and if the temperature of the ingot is not within the predetermined range, then controlling the temperature of the ingot to be within the predetermined range. The first positioning sensor (71), the second positioning sensor (72), the third positioning sensor (73) and the fourth positioning sensor (74) are all laser transmission sensors.

9. The apparatus of claim 2, wherein the method further comprises: determining if the water level in the water tank is below a predetermined level; and if the water level is below the predetermined level, then automatically filling the water tank with water. The first conveying device (2) and the U-shaped conveying group (5) are both rigid conveying belts.

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