High-precision dynamic linear displacement metering device based on laser scattering suppression

Through innovative design of the track, stabilization mechanism, and adjustment mechanism, the problems of insufficient environmental adaptability and anti-interference capability of existing devices have been solved, realizing high-precision dynamic linear displacement measurement in complex industrial sites and improving the stability and practicality of the device.

CN121409113APending Publication Date: 2026-01-27SHANDONG MEASUREMENT SCI RES INST
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Patent Information

Application Number
CN202511796933.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-12-02
Publication Date
2026-01-27

AI Technical Summary

Technical Problem

Existing high-precision dynamic linear displacement measuring devices suffer from insufficient environmental adaptability, weak anti-interference ability, and measurement stability that is limited by external conditions, making them unsuitable for effective application in dynamic industrial settings.

Method used

Employing a high-precision dynamic linear displacement metering device based on laser scattering suppression, the device achieves autonomous horizontal movement, leveling, and multi-dimensional angle adjustment through the coordinated operation of the track, stabilizing mechanism, support legs, and adjustment mechanism. Combined with a ring array elastic support and gravity compensation mechanism, it isolates environmental vibrations and installation errors.

Benefits of technology

Maintaining measurement accuracy and stability under complex working conditions enhances the environmental adaptability and reliability of the device, enables dynamic linear displacement measurement with nanometer-level precision, simplifies the installation process, and improves the practicality and reliability of the equipment.

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Abstract

The invention discloses a high-precision dynamic linear displacement metering device based on laser scattering suppression, and relates to the related technical field of displacement monitoring, and the device comprises a host, rails, a stabilizing mechanism, supporting legs, a measuring mechanism, a data processing mechanism, a data processing mechanism, a data processing mechanism, a data processing mechanism, a data processing mechanism and a data processing mechanism, the host is slidably installed above the rails and is used for horizontally moving the host; the stabilizing mechanism is installed between the rails and is used for keeping the host in a horizontal state; the stabilizing mechanism is connected between the track and the main machine, the two adjusting mechanisms are installed between the stabilizing mechanism and the main machine and used for adjusting the horizontal angle and the inclination angle of the main machine, and the track, the stabilizing mechanism, the supporting feet and the adjusting mechanisms are arranged to cooperate with each other. The invention relates to a multi-dimensional angle adjusting device, in particular to a multi-dimensional angle adjusting device, which solves the problem that existing equipment cannot realize horizontal movement, autonomous leveling and multi-dimensional angle adjustment in industrial field application. The problems that an existing dynamic linear displacement metering device is insufficient in environmental adaptability and weak in anti-interference capacity, and the measurement stability is limited by external conditions are solved.
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Description

Technical Field

[0001] This invention relates to the field of displacement monitoring technology, specifically a high-precision dynamic linear displacement metering device based on laser scattering suppression. Background Technology

[0002] The core of existing devices is a laser interferometer, which calculates the nanometer-level dynamic displacement of moving targets by measuring the phase change after the interference of the reference light and the measurement light, and is widely used in the field of ultra-precision measurement. The high-precision dynamic linear displacement measurement device based on laser scattering suppression is a specialized innovation addressing the bottleneck of traditional laser interferometers in effectively measuring rough surfaces. This device introduces core components such as a vortex phase plate to modulate the laser into a special wavefront (such as vortex light), utilizing its physical characteristic of insensitivity to scattered light, and combining it with a common-path differential interference structure to actively suppress measurement noise introduced by surface scattering and environmental disturbances. Ultimately, it can stably extract the phase information corresponding to nanometer-level displacement even under strong scattering backgrounds, achieving high-speed, high-precision dynamic linear displacement measurement of both mirror and non-mirror targets.

[0003] The core flaw of existing high-precision dynamic linear displacement measurement devices lies in their severe lack of environmental adaptability. To achieve nanometer-level measurement accuracy, these devices must be built on an ideal and stable reference plane and rely entirely on external vibration isolation platforms to eliminate environmental interference. This leads to three key problems in real-world industrial applications: first, they lack autonomous horizontal maintenance capability; deformation or tilting of the installation foundation directly introduces uncompensable Abbe and cosine errors; second, fixed support structures cannot effectively suppress low-frequency vibrations transmitted from the ground, nor can they eliminate the reaction force disturbances generated by moving parts within the equipment; and third, the system's measurement stability is entirely dependent on the effectiveness of external vibration isolation facilities, with even minor changes in environmental parameters directly affecting the reliability of the final measurement results. This design philosophy, which forcibly binds measurement accuracy to the working environment, severely restricts the practical application value of such devices in dynamic industrial environments. To ensure the absolute stability of the reference optical path during dynamic measurement and to overcome the impact of environmental vibrations and installation plane deformation on measurement accuracy, a high-precision dynamic linear displacement measurement device based on laser scattering suppression is provided. Summary of the Invention

[0004] The purpose of this invention is to provide a high-precision dynamic linear displacement measuring device based on laser scattering suppression, so as to solve the problems mentioned in the background art, such as insufficient environmental adaptability, weak anti-interference ability, and measurement stability being limited by external conditions in existing dynamic linear displacement measuring devices.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a high-precision dynamic linear displacement metering device based on laser scattering suppression, comprising a main unit and a track, wherein the main unit is slidably mounted above the track for horizontal movement of the main unit; A stabilizing mechanism, installed between the rails, is used to keep the main unit in a horizontal position; The support legs connect the stabilizing mechanism and the track, and are used to support the stabilizing mechanism and the main unit; Two adjustment mechanisms are provided, installed between the stabilizing mechanism and the main unit, and are used to adjust the horizontal angle and tilt angle of the main unit respectively.

[0006] In a further embodiment, a lead screw is rotatably mounted inside the track, and a sliding plate is threaded onto the lead screw.

[0007] In a further embodiment, the support is configured as a plurality of legs, and the plurality of legs are arranged in a circular array evenly.

[0008] In a further embodiment, the support leg includes a hinge support, a telescopic rod, and a spring. Two hinge supports are provided, and the two hinge supports are rotatably connected to both ends of the telescopic rod. One of the hinge supports is fixedly mounted on a sliding plate, and the spring is installed inside the telescopic rod to apply elastic force to the output rod of the telescopic rod.

[0009] In a further embodiment, the stabilizing mechanism includes a base frame, a retaining ring, a ball bearing, and a counterweight. The base frame is fixedly connected above the hinge support at the upper end of the telescopic rod. Multiple branch pipes are connected in a circular array at the upper end of the base frame. The retaining ring is fixedly connected to the upper end of the branch pipes. The ball bearing is rotatably installed between the base frame and the retaining ring. The counterweight is connected to the lower end of the ball bearing via a connecting rod.

[0010] In a further embodiment, the base frame and retaining ring are internally rotatably fitted with multiple ball bearings.

[0011] In a further embodiment, a top plate is fixedly connected to the upper end of the ball, and an mounting plate is rotatably mounted on the upper end of the top plate, with the main unit rotatably mounted inside the mounting plate.

[0012] In a further embodiment, two adjustment mechanisms are respectively installed between the top plate and the mounting plate, and between the side wall of the mounting plate and the main unit.

[0013] In a further embodiment, the adjusting mechanism includes a driving gear, a driven gear, and a linkage gear, with the linkage gear meshing between the driving gear and the driven gear.

[0014] In a further embodiment, one end of the drive gear is fixedly connected to a dial for controlling the rotation of the drive gear.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. This invention is a high-precision dynamic linear displacement metering device based on laser scattering suppression. By setting up a coordinated structure of track, stabilizing mechanism, support legs and adjustment mechanism, it solves the problem that existing equipment cannot achieve horizontal movement, autonomous leveling and multi-dimensional angle adjustment in industrial field applications. 2. By using the sliding fit between the track and the main unit, the problem of guiding accuracy when the main unit needs to move horizontally during the measurement process is solved; 3. The stability problem of maintaining the horizontal state of the main unit under complex working conditions is solved by combining the stabilizing mechanism with the support legs. 4. By setting up two adjustment mechanisms, the technical problem of needing to precisely adjust the horizontal and tilt angles of the main unit separately has been solved. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the high-precision dynamic linear displacement metering device based on laser scattering suppression proposed in this invention. Figure 2 This is a schematic diagram of the track structure of the high-precision dynamic linear displacement metering device based on laser scattering suppression proposed in this invention; Figure 3 This is a schematic diagram of the main unit, stabilizing mechanism, and support connection structure of the high-precision dynamic linear displacement metering device based on laser scattering suppression proposed in this invention. Figure 4 This is a schematic diagram of the main structure of the high-precision dynamic linear displacement metering device based on laser scattering suppression proposed in this invention; Figure 5 This is a schematic diagram of the connection structure of the main unit, the rolling ball, and the counterweight of the high-precision dynamic linear displacement metering device based on laser scattering suppression proposed in this invention. Figure 6 This is an exploded view of the rolling ball and counterweight of the high-precision dynamic linear displacement metering device based on laser scattering suppression proposed in this invention; Figure 7 This is a schematic diagram of the stabilization mechanism and support connection structure of the high-precision dynamic linear displacement metering device based on laser scattering suppression proposed in this invention. Figure 8 This is a partially exploded view of the stabilization mechanism of the high-precision dynamic linear displacement metering device based on laser scattering suppression proposed in this invention. Figure 9 This is a partial cross-sectional view of the support structure of the high-precision dynamic linear displacement metering device based on laser scattering suppression proposed in this invention.

[0017] In the diagram: 1. Main unit; 11. Mounting plate; 2. Rail; 21. Lead screw; 22. Sliding plate; 3. Stabilizing mechanism; 31. Base frame; 311. Branch pipe; 32. Snap ring; 33. Ball bearing; 331. Top plate; 34. Counterweight; 35. Ball bearing; 4. Support leg; 41. Hinge support; 42. Telescopic rod; 43. Spring; 5. Adjusting mechanism; 51. Driving gear; 511. Dial; 52. Driven gear; 53. Linkage gear. Detailed Implementation

[0018] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Please see Figures 1-9 This embodiment provides a high-precision dynamic linear displacement measurement device based on laser scattering suppression, including a main unit 1, which is a JX-TCKZ-50 laser displacement ranging sensor. It is a precision measurement system based on advanced optical principles. Its core lies in suppressing the scattering noise generated by laser light on rough surfaces or complex environments through special optical field design and signal processing technology, thereby achieving nanometer-level precision linear displacement measurement of moving objects.

[0020] The main structure of host 1 mainly includes a laser emitting unit, an interferometric optical system, a scattering suppression module, and a signal detection unit. The laser emitting unit generates a high-quality single-frequency laser beam, which, after beam shaping, enters the interferometric optical system. Typically, a Michelson or Mach-Zehnder interferometer structure is used to split the beam into a reference beam and a measurement beam. The measurement beam, after illuminating the surface of the moving target, is reflected or scattered back, and then merges with the reference beam at the beam splitter, producing interference. To overcome the dependence of traditional interferometers on mirror reflection, this device introduces a scattering suppression module, such as a vortex phase plate generating an orbital 2 angular momentum beam, or a common-path interferometry design that utilizes the phase characteristics of a special optical field to induce destructive interference of the scattered light at the detection end, while simultaneously enhancing the signal light carrying the true displacement information. The signal detection unit uses a multi-quadrant detector or a balanced detector to receive the interference signal, extracting phase change information through heterodyne interferometry or phase demodulation techniques, and finally calculating the target's dynamic displacement using an algorithm. The purpose of this device is to maintain nanometer-level measurement accuracy and stability even in undesirable measurement environments, such as industrial sites with rough surfaces, vibration interference, or air turbulence.

[0021] like Figure 1As shown, a track 2 is installed below the main unit 1. The track 2 is bolted to the detection piece 10m away and is perpendicular to the detection piece. A lead screw 21 is rotatably installed inside the track 2, and a sliding plate 22 is threaded onto the lead screw 21. The main unit 1 is mounted on the sliding plate 22, with its transmitting and receiving ends facing the detection piece. Rotating the lead screw 21 through the sliding plate 22 adjusts the distance between the main unit 1 and the detection piece. The distance setting between the high-precision dynamic linear displacement metering device based on laser scattering suppression and the detection piece must adhere to strict optical standards. The core requirement is to accurately place the surface of the detection piece at the focal plane of the laser beam. This working distance is determined by the optical system design of the device and is usually clearly marked in the technical specifications. When adjusting the distance, it is necessary to ensure that the detection piece remains within the depth of focus throughout its entire movement stroke, while not exceeding the linear measurement limit of the main unit 1. Any deviation in the distance setting will cause the light spot to defocus and the wavefront to be distorted, thereby significantly reducing the scattering suppression effect and the signal-to-noise ratio, ultimately affecting the nanometer-level measurement accuracy. Therefore, the correct distance is a fundamental prerequisite for ensuring the performance of the device.

[0022] Vibrations generated during operation can severely affect the main unit 1. Vibrations interfere with the stability of the optical system, causing minute changes in the relative position between the laser beam and the object being measured, thus disrupting the stability of the interference signal. This interference directly reduces the signal-to-noise ratio, causing the originally weak effective signal to be overwhelmed by noise, affecting the scattering suppression effect. Simultaneously, vibrations can cause resonance in optical components and mechanical structures, leading to instability of the measurement reference surface and generating additional Abbe and cosine errors. These factors combined can cause jumps and drifts in the measurement data, and in severe cases, even the loss of interference fringes, resulting in measurement interruption. Ultimately, nanometer-level measurement accuracy cannot be guaranteed, seriously affecting the reliability of the device and the accuracy of the measurement results. To stabilize the main unit 1, such as... Figure 1 As shown, a stabilizing mechanism 3 and a support leg 4 are installed between the main unit 1 and the sliding plate 22.

[0023] The support 4 is configured as multiple legs, and the multiple legs 4 are evenly arranged in a circular array, so as to... Figure 1 and Figure 3 For example, support leg 4 is set to four. Figure 9 As shown, the support leg 4 includes a hinge support 41, a telescopic rod 42, and a spring 43. The telescopic rod 42 consists of a sleeve and an output rod. The output rod is slidably inserted into one end of the sleeve. There are two hinge supports 41, and the two hinge supports 41 are rotatably connected to both ends of the telescopic rod 42 (the two hinge supports 41 are respectively connected to the sleeve and the output rod). The hinge supports 41 installed on the sleeve are fixedly installed on the sliding plate 22. The spring 43 is installed inside the telescopic rod 42, and the spring 43 applies elastic force to the output rod of the telescopic rod 42.

[0024] The elastically extendable support leg 4 effectively absorbs and isolates multidimensional vibrations from the ground. Its ring array layout forms a stable statically determinate support system. The preload of the spring 43 adaptively compensates for the unevenness error of the mounting surface, ensuring that the stabilizing mechanism 3 is always in the optimal working posture. This support leg 4 structure, through the cooperation of the hinged support 41 and the telescopic rod 42, provides elastic support in the vertical direction while allowing slight swaying in all directions, solving the problems of stress concentration and structural deformation caused by uneven ground in traditional rigid supports. The preload design of the spring 43 ensures the initial stiffness of the support system and provides an effective dissipation path for vibration energy, significantly improving the vibration resistance and stability of the device under complex working conditions. This innovative elastic support scheme enables the entire metrology device to adapt to uneven foundation conditions in industrial sites, effectively suppressing the interference of environmental vibrations on the optical system during measurement, providing the necessary mechanical environment protection for nanometer-level precision measurement, and greatly improving the practicality and reliability of the device.

[0025] like Figure 6 , Figure 7 and Figure 8 As shown, the stabilizing mechanism 3 includes a base frame 31, a retaining ring 32, a ball bearing 33, and a counterweight 34. The base frame 31 has a ring structure and is fixedly connected to the hinge support 41 at the upper end of the telescopic rod 42. The upper end of the base frame 31 is connected to multiple branch pipes 311 in a ring array. The retaining ring 32 is fixedly connected to the upper end of the branch pipes 311. The ball bearing 33 is rotatably installed between the base frame 31 and the retaining ring 32. The counterweight 34 is connected to the lower end of the ball bearing 33 through a connecting rod. During installation, first, pass the counterweight 34 through the annular hole of the base frame 31 so that the lower end of the ball 33 is engaged in the annular hole of the base frame 31. Then, connect all the branch pipes 311 to the base frame 31. Next, put the retaining ring 32 on the upper end of the ball 33. At this time, the retaining ring 32 is located on the branch pipe 311. Finally, after passing through the base frame 31, branch pipe 311 and retaining ring 32 with multiple bolts in sequence, connect them with nuts so that the base frame 31, branch pipe 311 and retaining ring 32 form a frame structure. The ball 33 can rotate within the frame structure while preventing the ball 33 from detaching from the frame structure.

[0026] The main unit 1 is mounted on the upper end of the ball 33. A counterweight 34 applies a downward pulling force to the ball 33, ensuring that the ball 33 maintains a stable mechanical balance through the gravity of the counterweight 34. When the track 2 tilts or vibrates slightly, the ball 33 automatically adjusts its position under gravity, causing the main unit 1 to deflect at a corresponding angle. This passive gravity compensation mechanism corrects the attitude of the main unit 1 in real time, ensuring that its optical measurement axis remains on the preset reference horizontal plane. This purely mechanical stabilization scheme effectively isolates foundational disturbances, providing a stable working foundation for the laser scattering suppression measurement system and guaranteeing the accuracy and reliability of nanometer-level dynamic displacement measurement.

[0027] To increase the flexibility and stability of the ball 33's rotation, multiple balls 35 are rotatably mounted inside the base frame 31 and retaining ring 32, contacting the surface of the ball 33. By converting sliding friction into rolling friction through the balls 35, the frictional resistance and wear of the ball 33 during rotation are significantly reduced, enabling the host unit 1 to respond more sensitively and smoothly to minute attitude changes. This multi-point contact rolling support structure ensures the ball 33's rotational freedom in any direction while providing precise radial positioning, effectively preventing jamming or wobbling that may occur during dynamic measurement, further improving the reliability and service life of the stabilizing mechanism 3 under complex working conditions.

[0028] like Figure 5 As shown, a top plate 331 is fixedly connected to the upper end of the ball 33, and a mounting plate 11 is rotatably mounted on the upper end of the top plate 331. The main unit 1 is rotatably mounted inside the mounting plate 11. To allow for fine-tuning of the angles of the mounting plate 11 and the main unit 1, adjustment mechanisms 5 are installed between the top plate 331 and the mounting plate 11, and between the side wall of the mounting plate 11 and the main unit 1. Figure 4 and Figure 6 As shown, the adjustment mechanism 5 includes a driving gear 51, a driven gear 52, and a linkage gear 53. The linkage gear 53 meshes between the driving gear 51 and the driven gear 52. One end of the driving gear 51 is fixedly connected to a dial 511 that controls the rotation of the driving gear 51. The diameter of the driven gear 52 is much larger than that of the driving gear 51 and the linkage gear 53. Therefore, after the driving gear 51 is rotated by the dial 511, the motion is greatly reduced and the torque is amplified by multi-stage gear transmission, ultimately driving the driven gear 52 to produce an extremely precise angular displacement.

[0029] Taking the adjustment mechanism 5 installed between the top plate 331 and the mounting plate 11 as an example, the driven gear 52 is fixedly connected to the lower end of the mounting plate 11, and the driving gear 51 and the linkage gear 53 are rotatably connected to the upper end of the top plate 331. By rotating the driving gear 51 through the dial 511, and then finely adjusting the angle of the driven gear 52 through the linkage gear 53, the horizontal angle of the main unit 1 can be adjusted.

[0030] Taking the adjustment mechanism 5 installed between the side wall of the mounting plate 11 and the main unit 1 as an example, the driving gear 51, the driven gear 52 and the linkage gear 53 are all rotatably connected to the inner side wall of the mounting plate 11. The side wall of the main unit 1 is fixedly connected to the end face of the driven gear 52. By rotating the driving gear 51 through the dial 511, and then finely adjusting the angle of the driven gear 52 through the linkage gear 53, the tilt angle of the main unit 1 can be adjusted (vertical plane angle adjustment).

[0031] The adjustment mechanism 5 achieves significant deceleration of motion through gear transmission ratio, converting manual coarse adjustment into precise angular displacement. This effectively solves the problem of nanometer-level fine adjustment of the yaw and pitch angles of the main unit 1 in the horizontal plane, ensuring the accurate establishment of the optical measurement reference plane. An independent gear transmission system enables rolling fine adjustment of the main unit 1 around the optical axis, solving the problem of precise control of the optical element's rotational alignment around the axis and ensuring precise matching of key parameters such as the polarization state of the scattering suppression optical path with the detection system. Therefore, these two vertically distributed adjustment mechanisms 5 together constitute a complete three-degree-of-freedom attitude fine adjustment system. Through purely mechanical transmission, it achieves sub-micro-radian-level control of the spatial attitude of the main unit 1, effectively eliminating optical path alignment deviations caused by installation errors and environmental changes, and providing a long-term stable optical reference guarantee for laser scattering suppression measurements.

[0032] Compared to existing high-precision dynamic linear displacement measurement devices that generally rely on external vibration isolation platforms and lack autonomous environmental adaptability, this invention constructs a built-in mechanical stabilization system integrating vibration reduction, leveling, and stabilization through a stabilization mechanism 3 and support legs 4, achieving a significant technological breakthrough. The stabilization mechanism 3 achieves autonomous attitude maintenance based on gravity reference through a unique combination of counterweights 34 and rolling balls 33. Its core advantage lies in effectively suppressing low-frequency swaying during measurement. This passive stabilization mechanism does not rely on external energy; it achieves continuous and stable reference maintenance solely through a precise mechanical structure. The support legs 4, through a ring-array elastic support structure, form an adaptive terrain-matching capability. This design can compensate for installation errors caused by uneven ground in real time, and its unique geometric layout ensures the static stability of the support system and the uniformity of load distribution.

[0033] This innovative design completely eliminates the device's dependence on an ideal laboratory environment, achieving coordinated control of three-dimensional vibration isolation and automatic leveling through a purely mechanical structure. Specifically, the spring-43 damping system of the support leg 4 effectively isolates high-frequency vibrations transmitted from the ground. The internal spring 43 not only provides necessary elastic support but also achieves optimal damping characteristics through precise preload design. Meanwhile, the counterweight principle of the stabilizing mechanism 3 fundamentally eliminates inertial interference generated by internal motion. The counterweight block 34, rigidly connected to the ball bearing 33 via a connecting rod, ensures the immediacy and accuracy of gravity compensation. Both work collaboratively through a precise mechanical interface to construct an independent measurement benchmark unaffected by the external environment. The stability of this benchmark directly guarantees the measurement accuracy of the laser scattering suppression optical system.

[0034] This technological breakthrough makes it possible to extend nanometer-level precision measurement from controlled laboratory environments to complex industrial sites, effectively solving the measurement inaccuracies caused by vibration and tilt in traditional equipment applications. Through a built-in mechanical stabilization system, this invention significantly improves the equipment's environmental adaptability, ease of installation, and long-term reliability while maintaining the same measurement accuracy. It is particularly noteworthy that all functions of this system are implemented purely mechanically, without the need for electronic control system intervention. This not only reduces system complexity and failure rate but also ensures stable operation in harsh industrial environments. The ring array arrangement of the support legs 4, in conjunction with the gravity self-compensation mechanism of the stabilization mechanism 3, forms a complete environmental adaptation system. This system can automatically respond to foundation changes caused by long-term factors such as ground settlement and temperature deformation, ensuring continuous measurement accuracy.

[0035] From a practical application perspective, this innovative and stable system provides a brand-new technical solution for online precision measurement in industrial settings. Traditional equipment requires cumbersome installation and commissioning processes and strict environmental control requirements, while this invention greatly simplifies the installation process and shortens equipment preparation time through its autonomous and stable characteristics. More importantly, the system achieves excellent reliability while maintaining high precision. All mechanical components are designed for durability; for example, the mating surfaces of the ball bearing 33 and the ball bearing 35 undergo special hardening treatment to ensure that accuracy will not be affected by wear during long-term use. This design concept, which perfectly combines precision metrology technology with industrial practicality, represents a new direction in the development of high-precision measurement equipment and provides reliable technical support for quality control and process optimization in high-end manufacturing. The entire system achieves optimal dynamic coordination between components through precisely calculated mechanical parameter matching. The stiffness coefficient of the spring 43 and the mass of the counterweight 34 have undergone rigorous theoretical calculations and experimental verification to ensure that the system maintains optimal dynamic response characteristics under various operating conditions.

[0036] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-precision dynamic linear displacement measuring device based on laser scattering suppression, comprising a main unit (1), characterized in that: Track (2), the host (1) is slidably mounted above the track (2) for horizontal movement of the host (1); A stabilizing mechanism (3) is installed between rails (2) to maintain the horizontal position of the main unit (1); The support leg (4) is connected between the stabilizing mechanism (3) and the track (2) to support the stabilizing mechanism (3) and the main unit (1). Two adjustment mechanisms (5) are installed between the stabilizing mechanism (3) and the host (1) to adjust the horizontal angle and tilt angle of the host (1) respectively.

2. The high-precision dynamic linear displacement measuring device based on laser scattering suppression according to claim 1, characterized in that: A lead screw (21) is rotatably installed inside the track (2) shown, and a sliding plate (22) is threaded onto the lead screw (21).

3. The high-precision dynamic linear displacement metering device based on laser scattering suppression according to claim 2, characterized in that: The support (4) is configured as multiple, and the multiple support (4) are arranged in a circular array evenly.

4. The high-precision dynamic linear displacement measuring device based on laser scattering suppression according to claim 3, characterized in that: The support leg (4) includes a hinge support (41), a telescopic rod (42), and a spring (43). There are two hinge supports (41), and the two hinge supports (41) are rotatably connected to the two ends of the telescopic rod (42). One of the hinge supports (41) is fixedly installed on the sliding plate (22). The spring (43) is installed inside the telescopic rod (42) and is used to apply elastic force to the output rod of the telescopic rod (42).

5. The high-precision dynamic linear displacement metering device based on laser scattering suppression according to claim 4, characterized in that: The stabilizing mechanism (3) includes a base frame (31), a retaining ring (32), a ball bearing (33), and a counterweight (34). The base frame (31) is fixedly connected above the hinge support (41) at the upper end of the telescopic rod (42). The upper end of the base frame (31) is connected to multiple branch pipes (311) in a ring array. The retaining ring (32) is fixedly connected to the upper end of the branch pipes (311). The ball bearing (33) is rotatably installed between the base frame (31) and the retaining ring (32). The counterweight (34) is connected to the lower end of the ball bearing (33) through a connecting rod.

6. The high-precision dynamic linear displacement metering device based on laser scattering suppression according to claim 5, characterized in that: The base frame (31) and retaining ring (32) are internally fitted with multiple ball bearings (35).

7. The high-precision dynamic linear displacement metering device based on laser scattering suppression according to claim 6, characterized in that: The upper end of the ball (33) is fixedly connected to a top plate (331), and the upper end of the top plate (331) is rotatably mounted with an mounting plate (11). The main unit (1) is rotatably mounted inside the mounting plate (11).

8. The high-precision dynamic linear displacement metering device based on laser scattering suppression according to claim 7, characterized in that: The two adjustment mechanisms (5) are respectively installed between the top plate (331) and the mounting plate (11) and between the side wall of the mounting plate (11) and the main unit (1).

9. The high-precision dynamic linear displacement metering device based on laser scattering suppression according to claim 8, characterized in that: The adjustment mechanism (5) includes a driving gear (51), a driven gear (52) and a linkage gear (53), wherein the linkage gear (53) meshes between the driving gear (51) and the driven gear (52).

10. The high-precision dynamic linear displacement measuring device based on laser scattering suppression according to claim 9, characterized in that: One end of the drive gear (51) is fixedly connected to a dial (511) for controlling the rotation of the drive gear (51).

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