Multi-dimensional vibration platform with oppositely-arranged double-sandwich type piezoelectric actuators and excitation method of multi-dimensional vibration platform

Abstract

The invention provides a multi-dimensional vibration platform with oppositely-arranged double-sandwich piezoelectric actuators and an excitation method of the multi-dimensional vibration platform, and belongs to the technical field of high-frequency vibration engineering and micro-nano machining.The vibration platform comprises a center platform, the two oppositely-arranged piezoelectric actuators, two end covers and two bolts, wherein the center platform is integrated with the tail end platform, the two flexible hinges and the two amplitude-change poles, and the center platform is slender and is in mirror symmetry about the longitudinal symmetry plane of the tail end platform. The piezoelectric actuator comprises a longitudinal vibration ceramic group, a bending vibration ceramic group around the Y axis and a bending vibration ceramic group around the Z axis, translation along the X / Y / Z axis and rotation around the Y / Z axis can be realized through in-phase or anti-phase excitation different combinations under the condition of not increasing extra driving channels, and five-degree-of-freedom high-frequency micro-vibration output can be achieved at most. The structure has high symmetry, low parasitic vibration, compact size and high integration, and is suitable for precise engineering scenes such as micro-nano processing, laser-assisted manufacturing, cell manipulation and active vibration suppression.

Description

Technical Field

[0001] This invention belongs to the fields of high-frequency vibration engineering and micro / nano fabrication technology. Specifically, it relates to a dual-sandwich piezoelectric actuator opposing arrangement multidimensional vibration platform and its excitation method. Background Technology

[0002] In applications such as biomedical engineering, micro / nano manipulation, precision positioning, and ultrasonic machining, it is often necessary to apply high-frequency microscale vibrations with multiple degrees of freedom (such as translation, rotation, or a combination thereof) to end effectors or target objects. Piezoelectric actuators, with their high response speed, large output force, and nanometer-level displacement accuracy, have become ideal driving elements for achieving such vibrations. Utilizing the inverse piezoelectric effect of piezoelectric materials, electrical signals can be efficiently converted into mechanical vibrations, especially in the resonant state, where large vibration velocity and displacement outputs can be obtained with relatively low input power. In existing multidimensional vibration platforms and excitation schemes, double-sandwich piezoelectric actuators often adopt a co-directional arrangement, that is, two actuators are placed side-by-side on the same side of the platform, achieving two-dimensional or three-dimensional vibration through longitudinal and bending mode coupling. However, this structure has the following limitations: because the actuators are concentrated on one side, it easily leads to asymmetrical force on the platform, generating undesirable parasitic modes; the overall size of the platform is limited, making it difficult to adapt to applications in confined spaces. Summary of the Invention

[0003] This invention addresses the shortcomings of existing piezoelectric vibration platforms in terms of structural symmetry, modal controllability, and multidimensional excitation capabilities. It proposes a dual-sandwich piezoelectric actuator-based multidimensional vibration platform and its excitation method. By combining different combinations of in-phase or out-of-phase excitations, translational motion along the X / Y / Z axes and rotation around the Y / Z axes can be achieved without adding additional drive channels, reaching up to five degrees of freedom for high-frequency micro-vibration output. This structure features high symmetry, low parasitic vibration, compact size, and high integration, making it suitable for precision engineering applications such as micro / nano fabrication, laser-assisted manufacturing, cell manipulation, and active vibration suppression.

[0004] This invention is achieved through the following technical solution: A dual-sandwich piezoelectric actuator opposing arrangement type multidimensional vibration platform: The vibration platform includes a central platform, two piezoelectric actuators, two end caps, and two bolts; The central platform is a composite component integrating an end platform, two flexible hinges, and two amplitude rods; the end platform is centrally symmetrical, and the amplitude rods are frustum cones; Both the piezoelectric actuator and the end cap are cylindrical bodies with through holes extending along the axial direction. One end face of the piezoelectric actuator is in close contact with the inner end face of the end cover, while the other end face is in contact with the thick end face of the amplitude rod. The thin end face of the amplitude rod is connected to one end face of the flexible hinge, and the other end face of the flexible hinge is connected to the lateral end face of the end platform. Both the amplitude transformer and the piezoelectric actuator are provided with brackets in the circumferential direction for fixed constraints. The structure of the vibration platform is arranged in a mirror-symmetric manner about the longitudinal symmetry plane passing through the center of the end platform; The bolt's shank passes sequentially through the through hole of the end cap and the axial through hole of the piezoelectric actuator, and is screwed into the threaded hole on the thick end face of the amplitude transformer, achieving an axial fastening connection between the three; its nut end face fits tightly against the outer end face of the end cap, providing preload.

[0005] Furthermore, a coordinate system is defined: the X-axis is the axial direction of the piezoelectric actuator, the Z-axis is the longitudinal direction of the end platform, and the Y-axis forms a plane perpendicular to the X-axis with the Z-axis, following the right-hand rule; all vibration direction descriptions are based on this coordinate system. The piezoelectric actuator includes a longitudinal vibrating ceramic group, and a bending vibrating ceramic group around the Y-axis and a bending vibrating ceramic group around the Z-axis arranged orthogonally along the Z-axis and Y-axis respectively; the above three groups of ceramics can be configured independently, or any number of groups can be combined to form a variety of excitation modes. The longitudinal vibration ceramic assembly is provided with a driving electrode and a grounding electrode. When a voltage is applied between the two, the piezoelectric actuator generates axial expansion and contraction deformation, which excites the longitudinal vibration mode. The ceramic assembly for bending around the Y-axis is provided with a driving electrode and a grounding electrode. When a driving voltage is applied between its electrodes, the piezoelectric actuator generates bending deformation around the Y-axis, exciting the bending mode around the Y-axis. The ceramic assembly for bending around the Z-axis is provided with a driving electrode and a grounding electrode. When a voltage is applied between its electrodes, the piezoelectric actuator generates bending deformation around the Z-axis, exciting the bending mode around the Z-axis.

[0006] Furthermore, the piezoelectric actuator employs one or a combination of stacked, patch, or piezoelectric tube types to achieve displacement output and deformation response.

[0007] Furthermore, the flexible hinge is connected to the end platform and the amplitude rod respectively by a fixed connection.

[0008] Furthermore, the flexible hinge is either a biaxially symmetrical type or a universal type, used to transmit axial linear motion and multi-directional bending deformation.

[0009] Furthermore, the vibration platform is installed and fixed by means of a variable amplitude rod bracket and a piezoelectric actuator bracket, or by means of a combination of the two, so as to couple the deformation output of the piezoelectric actuator into the multi-degree-of-freedom vibration motion of the end platform.

[0010] Furthermore, the two amplitude rods, two piezoelectric actuators, and two sets of flexible hinges are connected sequentially along the vibration transmission path, and their respective axes are either collinear or non-collinear with adjustable axial angles.

[0011] An excitation method for a multidimensional vibration platform with opposing arrangement of dual-sandwich piezoelectric actuators; When the same positive and negative alternating voltage signal is applied to the driving electrode and ground electrode of the two piezoelectric actuators bending ceramic groups around the Y-axis, and the excitation frequency matches the bending resonant mode around the Y-axis, the end platform generates a vibration that translates along the Z-axis. When the same positive and negative alternating voltage signal is applied to the driving electrode and ground electrode of the two piezoelectric actuators bending ceramic groups around the Z-axis, and the excitation frequency matches the bending resonant mode around the Z-axis, the end platform generates vibration that translates along the Y-axis. When two alternating positive and negative voltage signals are applied to the Z-axis bending resonant ceramic groups of the two piezoelectric actuators respectively, and the frequencies of the two signals match the Z-axis bending resonant mode and the phase difference is 180°, the end platform generates rotational vibration around the Z-axis. When two alternating positive and negative voltage signals are applied to the Y-axis bending resonant ceramic groups of the two piezoelectric actuators respectively, and the frequencies of the two signals match the bending resonant mode around the Y-axis and the phase difference is 180°, the end platform generates rotational vibration around the Y-axis. When two alternating positive and negative voltage signals are applied to the longitudinal resonant ceramic assemblies of the two piezoelectric actuators respectively, and the frequencies of the two signals match the longitudinal resonant mode and the phase difference is 180°, the end platform generates vibration that translates along the X-axis.

[0012] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. Breaking through traditional degree-of-freedom limitations to achieve high-dimensional vibration output: Compared to existing longitudinal-bending composite piezoelectric platforms that can typically only achieve 2-3 degrees of freedom of vibration, this invention, through the symmetrical arrangement of dual sandwich piezoelectric actuators and the independent or combined excitation of longitudinal vibration, bending vibration around the Y-axis and bending vibration around the Z-axis ceramic groups, can flexibly excite translation along the X / Y / Z axes and rotation around the Y / Z axes, achieving up to five degrees of freedom of high-frequency micro-vibration output, significantly expanding its application potential in micro-nano manipulation, multi-dimensional ultrasonic processing and active vibration suppression.

[0013] 2. High structural symmetry and suppression of parasitic modes: The two piezoelectric actuators are arranged on both sides of the end platform to form a mirror symmetric layout, which effectively balances inertial forces and torques, avoids force eccentricity and undesirable parasitic vibrations caused by unilateral driving, and improves the purity of the main mode and the dynamic stability of the system.

[0014] 3. Reliable preload, ensuring drive performance and lifespan: Bolts are passed sequentially through the end cap, piezoelectric actuator, and amplitude transformer, and screwed into the threaded hole at the coarse end of the amplitude transformer to form a stable axial preload. This ensures that the piezoelectric ceramic is always under compressive stress, preventing performance degradation or structural failure caused by tensile stress during operation, and improving the long-term reliability of the platform.

[0015] 4. Flexible fixing methods and strong adaptability: The vibration platform can be installed and fixed through the amplitude rod bracket, piezoelectric actuator bracket or a combination of the two, providing a variety of mechanical interface options, which facilitates integration into processing or operating systems of different sizes and space constraints, thereby improving versatility and engineering applicability.

[0016] 5. Compact and slender configuration, which facilitates system integration: The overall design adopts a slender shape, which extends the vibration transmission path while reducing the cross-sectional area. This not only facilitates the separation and coupling control of higher-order modes, but also significantly reduces the platform height and space occupation, making it easy to embed in confined working environments, such as minimally invasive surgical instruments, microfluidic chips, or precision optomechanical systems.

[0017] 6. Highly efficient excitation strategy, no additional hardware required: By adjusting the phase relationship of the excitation signal (in phase or 180 degrees out of phase) and the frequency selection (matching different resonant modes), the switching and combination of translation and rotation modes can be achieved without adding independent drive channels or circuits. For example, by using a single bending vibration channel around the Z-axis, the dominant Y-axis translation or Z-axis rotation can be selected by frequency tuning, which greatly simplifies the complexity of the control system.

[0018] 7. Adjustable vibration characteristics and high design freedom: The vibration amplitude and resonant frequency of the end platform can be adjusted by the stiffness parameters of the flexible hinge without changing the overall shape or height of the platform, which provides convenience for customized design for specific application scenarios.

[0019] In summary, the dual-sandwich piezoelectric actuator opposing arrangement multidimensional vibration platform and its excitation method proposed in this invention have high degrees of freedom, high symmetry, high reliability and high integration, and can be widely used in fields such as laser-assisted processing, ultrasonic micro-milling, cell manipulation, micro-assembly and active vibration suppression. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of the opposing arrangement type multidimensional vibration platform of the dual sandwich piezoelectric actuator described in Embodiment 1. Figure 2 An exploded view of the opposing arrangement type multidimensional vibration platform of the dual sandwich piezoelectric actuators described in Embodiment 1. Figure 3 This is a full cross-sectional schematic diagram of the opposing arrangement type multidimensional vibration platform of the dual sandwich piezoelectric actuators described in Embodiment 1. Figure 4 This is a schematic diagram of the vibration of the end platform of the opposing arrangement type multidimensional vibration platform of the dual sandwich piezoelectric actuator described in Embodiment 2, as it translates along the Z-axis. Figure 5 This is a schematic diagram of the vibration of the end platform of the opposing arrangement type multidimensional vibration platform of the dual sandwich piezoelectric actuator described in Embodiment 2, as it translates along the Y-axis. Figure 6 This is a vibration diagram of the end platform of the opposing arrangement type multidimensional vibration platform of the dual sandwich piezoelectric actuator described in Embodiment 2, showing the rotation of the end platform around the Z-axis. Figure 7 This is a vibration diagram of the end platform of the opposing arrangement type multidimensional vibration platform of the dual sandwich piezoelectric actuator described in Embodiment 2, showing the rotation of the platform around the Y-axis. Figure 8 This is a schematic diagram of the vibration of the end platform of the opposing arrangement type multidimensional vibration platform of the dual sandwich piezoelectric actuator described in Embodiment 2, as it translates along the X-axis. In the diagram, straight arrows indicate the direction of translation, and curved arrows indicate the axis and direction of rotation. 1-Central platform; 2-Piezoelectric actuator; 3-End cap; 4-Bolt; 1-Central platform includes 1-1-End platform, 1-2-Flexible hinge, 1-3-Amplitude rod. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] Unless otherwise specified, the experimental methods used in the following examples are conventional methods. Unless otherwise specified, the materials, reagents, methods, and instruments used are all conventional materials, reagents, methods, and instruments in the art, and can be obtained commercially by those skilled in the art.

[0023] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0024] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0025] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0026] Implementation Method 1, see [link] Figure 1 , Figure 2 and Figure 3 This embodiment describes a dual-sandwich piezoelectric actuator opposing arrangement type multidimensional vibration platform, the vibration platform comprising: 1. Central platform; 2. Two piezoelectric actuators; 3. Two end caps; 4. Two bolts; The central platform 1 is a composite component, which integrates multiple sub-parts, including an end platform 1-1, two flexible hinges 1-2 and two amplitude rods 1-3. The end platform 1-1 has a centrally symmetric geometric configuration; The amplitude-changing rod 1-3 is a variable cross-section rod, with a larger cross-sectional area at one end and a smaller cross-sectional area at the other end, and both end faces are parallel planes; among them, a threaded hole is provided on the larger end face; The left and right end faces of the piezoelectric actuator 2 are both parallel planes, and a through hole is provided along the axial direction. The left and right end faces of the end cap 3 are parallel planes, and are provided with through holes that extend through both end faces axially. One end face of the piezoelectric actuator 2 is tightly fitted with the inner end face of the end cover 3, while the other end face is fitted with the thick end face of the amplitude rod 1-3. The bolt 4 passes through the through hole of the end cover 3 and the axial through hole of the piezoelectric actuator 2 in sequence, and is screwed into the threaded hole on the rough end face of the amplitude rod 1-3, so as to achieve a tight connection of the three in the axial direction; its nut end face is tightly fitted with the outer end face of the end cover 3 to provide preload. The thin end face of the amplitude rod 1-3 is connected to one end face of the flexible hinge 1-2, and the other end face of the flexible hinge 1-2 is connected to the lateral end face of the end platform 1-1. Both the amplitude rod 1-3 and the piezoelectric actuator 2 are provided with brackets for fixed constraints in the circumferential direction; The structure of the vibration platform is arranged in a mirror-symmetric manner about the longitudinal symmetry plane passing through the center of the end platform 1-1; Define the coordinate system as follows: the X-axis is the axis of the piezoelectric actuator 2, the Z-axis is the longitudinal axis of the end platform 1-1, and the Y-axis forms a plane perpendicular to the X-axis with the Z-axis, following the right-hand rule. All vibration direction descriptions are based on this coordinate system.

[0027] In this implementation, by symmetrically arranging two piezoelectric actuators 2 on both sides of the central platform 1 in a counter-facing manner and applying synergistic excitation to them, multiple vibration modes can be effectively excited, thereby achieving high-frequency micro-vibration output with up to five degrees of freedom. This configuration not only enhances the multidimensional motion capability of the vibration platform but also facilitates flexible adjustment of the installation angle of the piezoelectric actuators according to actual application requirements, adapting to different spatial constraints and multidimensional vibration performance requirements.

[0028] In this embodiment, bolts 4 pass through the end cap 3 and the piezoelectric actuator 2 in sequence and engage with the threaded holes of the amplitude rod 1-3 to axially fasten the three together, thereby applying the required initial preload force to the piezoelectric actuator 2. This preload force can effectively prevent the piezoelectric actuator 2 from bearing tensile stress during operation, prevent performance degradation or structural damage caused by tensile failure, and significantly improve its service life and the stability and reliability of its output characteristics.

[0029] Two piezoelectric actuators 2 are respectively set on both sides of the end platform 1-1 in a mirror-symmetrical arrangement, which helps to balance the inertial force and its torque, effectively suppress the force eccentricity and unintended parasitic vibration caused by unilateral drive, thereby improving the purity of the main vibration mode and the dynamic stability of the system.

[0030] This vibration platform is not only suitable for scenarios requiring high-frequency, multi-degree-of-freedom vibration control, such as laser processing or vibration-assisted processing, but can also be used in active vibration suppression systems to counteract or suppress external high-frequency vibration interference; its high-dimensional vibration capability gives it broad application prospects in both precision machining and vibration suppression.

[0031] The vibration platform adopts a slender configuration, which extends the vibration transmission path while reducing the cross-sectional area. This facilitates the separation and coupling control of higher-order modes and significantly reduces height and space occupation, making it suitable for confined spaces such as minimally invasive surgical instruments, microfluidic chips, and precision optomechanical systems.

[0032] By selectively exciting the ceramic groups of the two piezoelectric actuators 2 in different operating modes, vibration output from one dimension to five dimensions can be achieved; the vibration amplitude and resonant frequency can be controlled by adjusting the stiffness of the flexible hinge, without changing the overall height of the platform.

[0033] By adjusting the stiffness of the flexible hinge, the vibration amplitude and resonant frequency of the end platform can be flexibly adjusted without changing the overall shape or height of the platform, making it easy to customize the design for different application needs.

[0034] The dual-sandwich piezoelectric actuator counter-arranged multidimensional vibration platform described in Embodiment 1 is further defined as follows: the piezoelectric actuator 2 includes a longitudinal vibration ceramic group, and a bending vibration ceramic group around the Y-axis and a bending vibration ceramic group around the Z-axis arranged orthogonally along the Z-axis and Y-axis directions, respectively; wherein, the above three groups of ceramics can be configured independently, or combined in any two pairs, or all three can be integrated to form a variety of excitation modes; The longitudinal vibration ceramic assembly is provided with a driving electrode and a grounding electrode. When a voltage is applied between the two, the piezoelectric actuator 2 generates axial expansion and contraction deformation, which excites the longitudinal vibration mode. The ceramic assembly for bending around the Y-axis is provided with a driving electrode and a grounding electrode. When a driving voltage is applied between its electrodes, the piezoelectric actuator 2 generates bending deformation around the Y-axis, thereby exciting the bending mode around the Y-axis. The ceramic assembly for bending around the Z-axis is provided with a driving electrode and a grounding electrode. When a voltage is applied between its electrodes, the piezoelectric actuator 2 generates bending deformation around the Z-axis, exciting the bending mode around the Z-axis.

[0035] In this embodiment, the piezoelectric actuator 2 possesses high stiffness characteristics, making it suitable for vibration applications in the high-frequency and even ultrasonic frequency ranges. Its integrated longitudinal and flexural ceramic groups respond rapidly under voltage excitation, and compared to traditional motors or mechanical transmission mechanisms, it can operate at higher frequencies and consumes less power. This high stiffness characteristic helps to increase the system's resonant frequency, enabling ultrasonic excitation, and is particularly suitable for precision operation scenarios sensitive to environmental noise.

[0036] By having two piezoelectric actuators 2 work together in a counter-arranged manner, the three basic modes of longitudinal vibration, bending vibration around the Y-axis and bending vibration around the Z-axis that can be excited by a single actuator can be effectively coupled and extended into three-axis translation (X, Y, Z directions) and two-axis rotation (around the Y-axis and around the Z-axis) of the end platform 1-1, thereby achieving a composite vibration output of up to five degrees of freedom.

[0037] The dual-sandwich piezoelectric actuator counter-arrangement multidimensional vibration platform described in Embodiment 2 is further defined as follows: the piezoelectric actuator 2 can adopt any of the following structural forms: stacked, patch, or piezoelectric tube, or any combination of the above structures, in order to achieve the required displacement output and deformation response.

[0038] The specific selection of the piezoelectric actuator 2 can be configured according to actual application requirements. This structural versatility allows designers to comprehensively consider factors such as installation space, mechanical performance, and output characteristics, thereby optimizing the actuator configuration and improving the overall performance and energy efficiency of the vibration platform.

[0039] Different types of piezoelectric actuators have their own characteristics in terms of displacement output capability, stiffness, and power consumption. For example, surface-mount structures have the advantage of low power consumption and are suitable for energy-sensitive applications; stacked structures can provide larger displacement output and higher stiffness, and are suitable for high-frequency, high-output operating conditions. Therefore, piezoelectric actuator structures can be flexibly selected, combined, or customized according to specific operating conditions to meet diverse application requirements.

[0040] The dual-sandwich piezoelectric actuator opposing arrangement type multidimensional vibration platform described in Embodiment 1 is further defined such that the flexible hinge 1-2 is connected to the end platform 1-1 and the amplitude rod 1-3 respectively by a fixed connection method, the connection method including but not limited to threaded connection, adhesive bonding, welding or integral integral processing.

[0041] The choice of fixed connection method directly affects the structural stability and long-term operational reliability of the system. By selecting a reasonable connection process, the connection between the flexible hinge 1-2 and the end platform 1-1 and the amplitude transformer 1-3 can be ensured to be firm and reliable, effectively suppressing loosening, fatigue or failure caused by high-frequency vibration or alternating loads, thereby improving the overall system stability.

[0042] The connection methods include threaded connections, adhesive bonding, welding, and integral molding, each suitable for different design constraints and material matching conditions: threaded connections facilitate disassembly and maintenance, suitable for scenarios requiring frequent adjustments or replacements of components; adhesive bonding or welding provides higher connection rigidity and sealing, suitable for applications with high requirements for structural strength and integrity; integral molding achieves interface-free connections through integral processing, possessing optimal mechanical continuity and structural strength, suitable for applications with stringent reliability requirements and no need for disassembly. Therefore, the above connection methods can be selected or combined according to specific application scenarios to achieve synergistic optimization of structural performance and process feasibility.

[0043] The dual-sandwich piezoelectric actuator opposing arrangement type multidimensional vibration platform described in Embodiment 1 is further defined as follows: the flexible hinges 1-2 are either biaxially symmetrical or universal, and are used to transmit axial linear motion and multi-directional bending deformation.

[0044] Different types of flexible hinges have different motion transmission characteristics. Among them, the biaxially symmetric flexible hinge has a regular structure, is easy to process and manufacture, and is suitable for scenarios with high requirements for geometric symmetry and modal consistency; while the universal flexible hinge simulates the structure of a traditional mechanical universal joint, has better multi-directional bending freedom, and is suitable for applications that require large-angle or complex-directional deformation transmission.

[0045] Choosing the right type of flexible hinge based on the motion requirements of the vibration platform not only helps improve the efficiency of driving force transmission and reduce energy dissipation, but also effectively suppresses the propagation of unintended vibrations. By optimizing its geometry, the excitation force can be guided to be transmitted along an efficient path, allowing the flexible hinge to produce controllable bending or deflection under electro-excitation, thereby significantly weakening stray modes and improving the overall motion stability and control accuracy of the platform.

[0046] The dual-sandwich piezoelectric actuator opposing arrangement type multidimensional vibration platform described in Embodiment 1 is further defined as follows: the vibration platform can be installed and fixed by means of the amplitude rod 1-3 bracket, the piezoelectric actuator 2 bracket, or a combination of the two, so as to efficiently couple the deformation output of the piezoelectric actuator 2 into the multi-degree-of-freedom vibration action of the end platform 1-1.

[0047] The fixed bracket is set at the modal node position of the vibration platform, so as to realize the reliable installation and support of the platform without significantly interfering with the main vibration mode. This arrangement ensures that the excitation energy of the piezoelectric actuator is efficiently transmitted to the end platform, and avoids the introduction of additional stiffness or damping due to external constraints, thereby maintaining high electromechanical coupling efficiency and vibration mode purity.

[0048] The first embodiment of the dual-sandwich piezoelectric actuator opposing arrangement multidimensional vibration platform is further defined as follows: the two amplitude rods 1-3, the two piezoelectric actuators 2 and the two sets of flexible hinges 1-2 are connected sequentially along the vibration transmission path, and their respective axes are preferably configured to be collinear (i.e., the whole is arranged coaxially); as an optional solution, the two axes of any type or multiple components can also be arranged non-collinearly, and their axial angle is adjustable.

[0049] The included angle between the axes of the two piezoelectric actuators 2 directly affects the multidimensional vibration amplitude, motion coupling characteristics, and overall structural height of the end platform 1-1. When the included angle decreases (approaching 0 degrees, i.e., coaxial arrangement), the motion coupling between different degrees of freedom is weakened, improving vibration control accuracy. Conversely, increasing the included angle, while enhancing modal coupling in specific directions, leads to an increase in the structural envelope size. Therefore, a trade-off between coupling strength and structural compactness can be achieved based on application requirements.

[0050] Implementation Method 2, see below Figures 4 to 8 This embodiment describes a dual-sandwich piezoelectric actuator counter-arranged multidimensional vibration platform. The excitation method described in this embodiment is based on the dual-sandwich piezoelectric actuator counter-arranged multidimensional vibration platform described in Embodiment 1. The excitation method includes: When the same positive and negative alternating voltage signal is applied to the driving electrode and ground electrode of the two piezoelectric actuators 2 bending ceramic groups around the Y-axis, and the excitation frequency matches the bending resonant mode around the Y-axis, the end platform 1-1 generates vibration that translates along the Z-axis. When the same positive and negative alternating voltage signal is applied to the driving electrode and ground electrode of the two piezoelectric actuators 2 bending ceramic groups around the Z-axis, and the excitation frequency matches the bending resonant mode around the Z-axis, the end platform 1-1 generates vibration that translates along the Y-axis. When two positive and negative alternating voltage signals are applied to the ceramic assembly of the two piezoelectric actuators 2 around the Z-axis bending resonance, and the frequencies of the two signals match the bending resonance mode around the Z-axis and the phase difference is 180 degrees, the end platform 1-1 generates rotational vibration around the Z-axis. When two positive and negative alternating voltage signals are applied to the Y-axis bending resonant ceramic groups of the two piezoelectric actuators 2 respectively, and the frequencies of the two signals match the bending resonant mode around the Y-axis and the phase difference is 180 degrees, the end platform 1-1 generates rotational vibration around the Y-axis. When two positive and negative alternating voltage signals are applied to the longitudinal resonant ceramic groups of the two piezoelectric actuators 2 respectively, and the frequencies of the two signals match the longitudinal resonant mode and the phase difference is 180°, the end platform 1-1 generates vibration that translates along the X-axis.

[0051] The excitation method described in this embodiment is based on the dual-sandwich piezoelectric actuator opposing arrangement multidimensional vibration platform described in Embodiment 1. By utilizing the spatially opposing symmetrical arrangement of two piezoelectric actuators 2, their longitudinal and bending ceramic assemblies are synergistically excited, achieving high-frequency vibration output of the end platform 1-1 in three translational degrees of freedom (along the X, Y, and Z axes) and two rotational degrees of freedom (around the Y-axis and around the Z-axis), for a total of five degrees of freedom motion capability. This multidimensional excitation capability enables the end platform 1-1 to achieve rapid, independent, or coupled microscale motion in multiple directions, making it suitable for scenarios such as micro-nano fabrication, precision operation, and active vibration suppression with complex trajectory requirements.

[0052] The method uses a piezoelectric actuator 2 as the actuation unit, combining the high rigidity of the sandwich structure with the fast response advantage of the inverse piezoelectric effect to achieve high-precision, high-frequency vibration control at the microscale. Compared with traditional mechanical or electromagnetic transmission methods, this method eliminates the need for contact between moving parts and frictional wear, thus offering a longer service life, higher reliability, and lower maintenance requirements. It is particularly suitable for clean, highly stable, or long-term precision systems.

[0053] A specific embodiment of the dual-sandwich piezoelectric actuator opposing arrangement type multidimensional vibration platform described in Embodiment 1 is provided, and it is also used to explain Embodiment 2. Specifically: A dual-sandwich piezoelectric actuator opposing arrangement type multidimensional vibration platform includes: 1. Central platform; 2. Two piezoelectric actuators; 3. Two end caps; 4. Two bolts; The central platform 1 is a composite component, which integrates multiple sub-parts, including an end platform 1-1, two flexible hinges 1-2 and two amplitude rods 1-3. The end platform 1-1 has a centrally symmetric geometric configuration; The amplitude-changing rod 1-3 is a variable cross-section rod, with a larger cross-sectional area at one end and a smaller cross-sectional area at the other end, and both end faces are parallel planes; among them, a threaded hole is provided on the larger end face; The left and right end faces of the piezoelectric actuator 2 are both parallel planes, and a through hole is provided along the axial direction; the left and right end faces of the end cap 3 are both parallel planes, and a through hole is provided along the axial direction through both end faces. One end face of the piezoelectric actuator 2 is tightly fitted with the inner end face of the end cover 3, while the other end face is fitted with the thick end face of the amplitude rod 1-3. The bolt 4 passes through the through hole of the end cover 3 and the axial through hole of the piezoelectric actuator 2 in sequence, and is screwed into the threaded hole on the rough end face of the amplitude rod 1-3, so as to achieve a tight connection of the three in the axial direction; its nut end face is tightly fitted with the outer end face of the end cover 3 to provide preload. The thin end face of the amplitude rod 1-3 is connected to one end face of the flexible hinge 1-2, and the other end face of the flexible hinge 1-2 is connected to the lateral end face of the end platform 1-1. Both the amplitude rod 1-3 and the piezoelectric actuator 2 are provided with brackets for fixed constraints in the circumferential direction; The structure of the vibration platform is arranged in a mirror-symmetric manner about the longitudinal symmetry plane passing through the center of the end platform 1-1; Define the coordinate system as follows: the X-axis is the axis of the piezoelectric actuator 2, the Z-axis is the longitudinal axis of the end platform 1-1, and the Y-axis forms a plane perpendicular to the X-axis with the Z-axis, following the right-hand rule. All vibration direction descriptions are based on this coordinate system.

[0054] The piezoelectric actuator 2 includes a longitudinal vibration ceramic group, and a bending vibration ceramic group around the Y-axis and a bending vibration ceramic group around the Z-axis arranged orthogonally along the Z-axis and Y-axis directions, respectively; wherein, the above three groups of ceramics can be configured independently, or combined in any two pairs, or all three can be integrated to form a variety of excitation modes; The longitudinal vibration ceramic assembly is provided with a driving electrode and a grounding electrode. When a voltage is applied between the two, the piezoelectric actuator 2 generates axial expansion and contraction deformation, which excites the longitudinal vibration mode. The ceramic assembly for bending around the Y-axis is provided with a driving electrode and a grounding electrode. When a driving voltage is applied between its electrodes, the piezoelectric actuator 2 generates bending deformation around the Y-axis, thereby exciting the bending mode around the Y-axis. The ceramic assembly for bending around the Z-axis is provided with a driving electrode and a grounding electrode. When a voltage is applied between its electrodes, the piezoelectric actuator 2 generates bending deformation around the Z-axis, exciting the bending mode around the Z-axis.

[0055] The piezoelectric actuator 2 adopts a stacked structure to achieve the required displacement output and deformation response.

[0056] The flexible hinge 1-2 is connected to the end platform 1-1 and the amplitude rod 1-3 by a fixed connection method, and the connection method is integrally formed.

[0057] The flexible hinges 1-2 are universal and are used to transmit axial linear motion and multi-directional bending deformation.

[0058] The vibration platform is installed and fixed using the amplitude rod 1-3 bracket, which efficiently couples the deformation output of the piezoelectric actuator 2 into the multi-degree-of-freedom vibration motion of the end platform 1-1.

[0059] The two amplitude rods 1-3, the two piezoelectric actuators 2, and the two sets of flexible hinges 1-2 are connected sequentially along the vibration transmission path, and their respective axes are configured to be collinear (i.e., the whole system is arranged coaxially).

[0060] Reference Figure 4 When the same positive and negative alternating voltage signal is applied to the driving electrode and ground electrode of the two piezoelectric actuators 2 bending ceramic assembly around the Y-axis, and the excitation frequency matches the bending resonant mode around the Y-axis, the end platform 1-1 generates vibration that translates along the Z-axis. Reference Figure 5 When the same positive and negative alternating voltage signal is applied to the driving electrode and ground electrode of the two piezoelectric actuators 2 bending ceramic assembly around the Z-axis, and the excitation frequency matches the bending resonant mode around the Z-axis, the end platform 1-1 generates vibration that translates along the Y-axis. Reference Figure 6 When two positive and negative alternating voltage signals are applied to the ceramic assembly of the two piezoelectric actuators 2 around the Z-axis, and the frequencies of the two signals match the bending resonance mode around the Z-axis and the phase difference is 180 degrees, the end platform 1-1 generates rotational vibration around the Z-axis. Reference Figure 7 When two positive and negative alternating voltage signals are applied to the ceramic assembly of the two piezoelectric actuators 2 around the Y-axis, and the frequencies of the two signals match the bending resonance mode around the Y-axis and the phase difference is 180 degrees, the end platform 1-1 generates rotational vibration around the Y-axis. Reference Figure 8 When two positive and negative alternating voltage signals are applied to the longitudinal resonant ceramic groups of the two piezoelectric actuators 2 respectively, and the frequencies of the two signals match the longitudinal resonant mode and the phase difference is 180°, the end platform 1-1 generates vibration that translates along the X-axis.

[0061] The vibration platform of this invention can achieve high-frequency vibration of three-axis translation and two-axis deflection, with a total of five degrees of freedom of motion output, which is suitable for micro-nano processing, precision operation and active vibration suppression scenarios with load trajectory requirements.

[0062] A computer device system includes a memory, a processor, and a computer program stored in the memory, wherein the processor executes the computer program to implement the steps of the above-described method. A computer-readable storage medium having a computer program / instructions stored thereon, which, when executed by a processor, implement the steps of the above-described method.

[0063] A computer program product includes a computer program / instructions that, when executed by a processor, implement the steps of the method described above.

[0064] The memory in the embodiments of this application can be volatile memory or non-volatile memory, or may include both volatile and non-volatile memory. Non-volatile memory can be read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), or flash memory. Volatile memory can be random access memory (RAM), which is used as an external cache. By way of example, but not limitation, many forms of RAM are available, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate synchronous DRAM (DDR SDRAM), enhanced synchronous DRAM (ESDRAM), synchronous linked DRAM (SLDRAM), and direct rambus RAM (DR RAM). It should be noted that the memory of the methods described in this invention is intended to include, but is not limited to, these and any other suitable types of memory.

[0065] In the above embodiments, implementation can be achieved entirely or partially through software, hardware, firmware, or any combination thereof. When implemented using software, it can be implemented entirely or partially in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer instructions are loaded and executed on a computer, all or part of the processes or functions described in the embodiments of this application are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via wired means such as coaxial cable, optical fiber, digital subscriber line, DSL, or wireless means such as infrared, wireless, microwave, etc. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that integrates one or more available media. The available medium can be a magnetic medium such as a floppy disk, hard disk, magnetic tape; an optical medium such as a high-density digital video disc, DVD; or a semiconductor medium such as a solid-state disk, SSD, etc.

[0066] In implementation, each step of the above method can be completed by integrated logic circuits in the processor's hardware or by instructions in software. The steps of the method disclosed in the embodiments of this application can be directly implemented by a hardware processor, or by a combination of hardware and software modules in the processor. The software modules can reside in random access memory, flash memory, read-only memory, programmable read-only memory, electrically erasable programmable memory, registers, or other mature storage media in the art. This storage medium is located in memory, and the processor reads information from the memory and, in conjunction with its hardware, completes the steps of the above method. To avoid repetition, detailed descriptions are omitted here.

[0067] It should be noted that the processor in the embodiments of this application can be an integrated circuit chip with signal processing capabilities. During implementation, each step of the above method embodiments can be completed by the integrated logic circuits in the processor's hardware or by instructions in software form. The processor can be a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components. It can implement or execute the methods, steps, and logic block diagrams disclosed in the embodiments of this application. The general-purpose processor can be a microprocessor or any conventional processor. The steps of the methods disclosed in the embodiments of this application can be directly embodied as execution by a hardware decoding processor, or as execution by a combination of hardware and software modules in the decoding processor. The software modules can be located in random access memory, flash memory, read-only memory, programmable read-only memory, electrically erasable programmable memory, registers, or other mature storage media in the art. This storage medium is located in memory; the processor reads information from the memory and, in conjunction with its hardware, completes the steps of the above methods.

[0068] The foregoing has provided a detailed description of the dual-sandwich piezoelectric actuator counter-arranged multidimensional vibration platform and its excitation method proposed in this invention. The principles and implementation methods of this invention have been explained. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this invention. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this invention. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A multidimensional vibration platform with opposing arrangement of dual-sandwich piezoelectric actuators, characterized in that: The vibration platform includes a central platform (1), two piezoelectric actuators (2), two end caps (3) and two bolts (4). The central platform (1) is a composite component integrating an end platform (1-1), two flexible hinges (1-2) and two amplitude rods (1-3); the end platform (1-1) is centrally symmetrical, and the amplitude rods (1-3) are frustums. Both the piezoelectric actuator (2) and the end cap (3) are cylindrical bodies with through holes extending along the axial direction. One end face of the piezoelectric actuator (2) is in close contact with the inner end face of the end cover (3), while the other end face is in contact with the thick end face of the amplitude rod (1-3). The thin end face of the amplitude rod (1-3) is connected to one end face of the flexible hinge (1-2), and the other end face of the flexible hinge (1-2) is connected to the lateral end face of the end platform (1-1). Both the amplitude rod (1-3) and the piezoelectric actuator (2) are provided with brackets in the circumferential direction for fixed constraints; The structure of the vibration platform is arranged in a mirror-symmetric manner about the longitudinal symmetry plane passing through the center of the end platform (1-1); The bolt (4) passes through the through hole of the end cover (3) and the axial through hole of the piezoelectric actuator (2) in sequence, and is screwed into the threaded hole of the rough end face of the amplitude rod (1-3) to achieve a tight connection of the three in the axial direction; its nut end face is tightly fitted with the outer end face of the end cover (3) to provide preload.

2. The vibration platform according to claim 1, characterized in that: Define the coordinate system: the X-axis is the axis of the piezoelectric actuator (2), the Z-axis is the longitudinal axis of the end platform (1-1), and the Y-axis and Z-axis form a plane perpendicular to the X-axis, following the right-hand rule; all vibration direction descriptions are based on this coordinate system. The piezoelectric actuator (2) includes a longitudinal vibration ceramic group, and a bending vibration ceramic group around the Y axis and a bending vibration ceramic group around the Z axis arranged orthogonally along the Z axis and Y axis respectively; the above three groups of ceramics can be configured independently, or any number of groups can be combined to form a variety of excitation modes; The longitudinal vibration ceramic assembly is provided with a driving electrode and a grounding electrode. When a voltage is applied between the two, the piezoelectric actuator (2) generates axial stretching deformation, which excites the longitudinal vibration mode. The ceramic assembly for bending around the Y-axis is provided with a driving electrode and a grounding electrode. When a driving voltage is applied between its electrodes, the piezoelectric actuator (2) generates bending deformation around the Y-axis, which excites the bending mode around the Y-axis. The ceramic assembly for bending around the Z-axis is provided with a driving electrode and a grounding electrode. When a voltage is applied between its electrodes, the piezoelectric actuator (2) generates bending deformation around the Z-axis, which excites the bending mode around the Z-axis.

3. The vibration platform according to claim 2, characterized in that: The piezoelectric actuator (2) adopts one or a combination of stacked, patch, or piezoelectric tube types to achieve displacement output and deformation response.

4. The vibration platform according to claim 3, characterized in that: The flexible hinge (1-2) is connected to the end platform (1-1) and the amplitude rod (1-3) by a fixed connection.

5. The vibration platform according to claim 4, characterized in that: The flexible hinge (1-2) is either a biaxially symmetrical type or a universal type, used to transmit axial linear motion and multi-directional bending deformation.

6. The vibration platform according to claim 5, characterized in that: The vibration platform is installed and fixed separately by means of an amplitude rod (1-3) bracket and a piezoelectric actuator (2) bracket, or by means of a combination of the two, so that the deformation output of the piezoelectric actuator (2) is coupled into the multi-degree-of-freedom vibration action of the end platform (1-1).

7. The vibration platform according to claim 6, characterized in that: The two amplitude rods (1-3), the two piezoelectric actuators (2), and the two sets of flexible hinges (1-2) are connected sequentially along the vibration transmission path, and their respective axes are either collinear or non-collinear with adjustable axial angles.

8. An excitation method for a multidimensional vibration platform with opposing arrangements of dual-sandwich piezoelectric actuators, characterized in that: The excitation method is based on the dual-sandwich piezoelectric actuator opposing arrangement type multidimensional vibration platform according to any one of claims 1 to 7; When the same positive and negative alternating voltage signal is applied to the driving electrode and ground electrode of the bending ceramic group around the Y-axis of the two piezoelectric actuators (2), and the excitation frequency matches the bending resonant mode around the Y-axis, the end platform (1-1) generates a vibration that translates along the Z-axis. When the same positive and negative alternating voltage signal is applied to the driving electrode and ground electrode of the bending ceramic group around the Z-axis of the two piezoelectric actuators (2), and the excitation frequency matches the bending resonant mode around the Z-axis, the end platform (1-1) generates a vibration that translates along the Y-axis. When two positive and negative alternating voltage signals are applied to the Z-axis bending resonant ceramic assembly of the two piezoelectric actuators (2), and the frequencies of the two signals match the Z-axis bending resonant mode and the phase difference is 180°, the end platform (1-1) generates rotational vibration around the Z-axis. When two positive and negative alternating voltage signals are applied to the Y-axis bending resonant ceramic assembly of the two piezoelectric actuators (2), and the frequencies of the two signals match the bending resonant mode around the Y-axis and the phase difference is 180°, the end platform (1-1) generates rotational vibration around the Y-axis. When two positive and negative alternating voltage signals are applied to the longitudinal resonant ceramic groups of the two piezoelectric actuators (2), and the frequencies of the two signals match the longitudinal resonant mode and the phase difference is 180°, the end platform (1-1) generates vibration along the X-axis.

9. A computer device system, comprising a memory, a processor, and a computer program stored in the memory, characterized in that, The processor executes the computer program to implement the steps of the method of claim 8.

10. A computer-readable storage medium having a computer program / instructions stored thereon, characterized in that, When the computer program / instructions are executed by the processor, they implement the steps of the method of claim 8.

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