Electrolytic cell electrode with in-situ perturbation device and method of making

Abstract

This invention discloses an electrolytic cell electrode with an integrated in-situ perturbation device and its preparation method. The electrolytic cell electrode includes a substrate layer, an electro-actuated perturbation layer disposed above the substrate layer, and a catalytic wetting layer disposed above the electro-actuated perturbation layer. The electro-actuated perturbation layer is composed of several electrostrictive microbeams, which are fixed to the substrate layer and do not cover the pores in the substrate layer. Each electrostrictive microbeam consists of a fixed part and a driving part connected to the fixed part. The fixed part is used to fix the microbeams to the substrate layer, while the driving part is suspended above the substrate layer and vibrates under the action of a pulsed current, with the vibration direction perpendicular to the plane of the substrate layer. This invention integrates the electro-actuated microbeam array with the electrode body, eliminating the need for an external drive. This saves space and avoids problems such as energy consumption, sealing failure, and leakage short circuits caused by separate designs, making it suitable for high-density, miniaturized electrolysis systems.

Description

Technical Field

[0001] This invention relates to the fields of water electrolysis for hydrogen production and new energy electrode materials, specifically to an electrolyzer electrode with an integrated in-situ electro-actuated micro / nano disturbance device and its preparation method. Background Technology

[0002] Electrolysis of water to produce hydrogen is a core technology for green hydrogen production. Electrodes, as the core components of the electrochemical reaction, directly determine the efficiency, energy consumption, and stability of the electrolyzer, making them a key research focus in this field. Currently, mainstream water electrolysis hydrogen production technologies are divided into three major systems: alkaline electrolyzers, proton exchange membrane electrolyzers, and solid oxide electrolyzers. All types of electrodes face common bottlenecks such as mass transfer limitations and bubble accumulation. Alkaline electrolyzer electrodes mostly use nickel-based materials, while proton exchange membrane electrolyzer electrodes are primarily membrane electrode assemblies and rely on noble metal catalysts. Both suffer from bubble adsorption during the reaction, which obscures catalytic sites, thickens the diffusion boundary layer, exacerbates polarization losses, increases energy consumption, and shortens electrode life. Disordered porous structures also hinder gas transport, further aggravating the bubble accumulation problem.

[0003] Currently, the main improvement solutions are as follows: First, optimize the electrode structure and surface properties, such as preparing ordered porous electrodes and modifying the electrode surface. Although this can accelerate bubble detachment to some extent, it has limited effect on improving mass transfer at the micro-nano scale. Second, add external perturbation devices or apply external excitations, such as mechanical perturbations or magnetic fields. However, these methods suffer from drawbacks such as complex structures, increased energy consumption, and poor adaptability. Furthermore, the electrodes and perturbation devices are independent of each other, making it difficult to achieve precise mass transfer enhancement and hindering the miniaturization and integration of electrolytic cells.

[0004] Patent CN120082905A discloses an actuable bipolar plate, an electrolytic cell unit containing the bipolar plate, and an electrolytic cell. The actuation element is designed inside the bipolar plate body. The oscillation generated by the actuation element is transmitted to the reaction zone of the electrolytic cell to realize the discharge of accumulated bubbles in the porous component, thereby improving the mass transfer impedance and improving the electrolysis efficiency. This patent has the following disadvantages: (1) Embedded / external disturbance device: It is designed separately from the electrode. The energy consumption during the disturbance process is large, which can easily lead to the failure of the electrolytic cell seal, leakage and short circuit. It cannot achieve precise disturbance at the microscale of the electrode surface, and the bubble breaking and mass transfer enhancement effect are also limited; (2) Single structure electrode: It only relies on surface wettability or disordered pore structure to regulate bubble behavior. It lacks an active disturbance mechanism. Under high current density, the bubbles are easy to agglomerate and stagnate. The diffusion layer thickness is difficult to break through, and the mass transfer bottleneck is also very prominent; (3) Magnetic field and other auxiliary enhancement technologies: It requires additional magnets, which occupy part of the electrolytic cell space. The direct effect on bubble detachment is weak, and it is not suitable for miniaturized and high-density electrolysis systems.

[0005] In summary, existing electrolytic cell electrodes cannot simultaneously achieve enhanced mass transfer, reduced energy consumption, and long-term stable operation. Developing in-situ, automatically bubble-eliminating, and integrated electrodes is a technical problem that needs to be solved in this field. Summary of the Invention

[0006] Purpose of the invention: To overcome the inherent defects of existing embedded / external perturbation devices, single-structure electrodes, and magnetic field-assisted enhancement technologies, this invention provides an electrolytic cell electrode with an in-situ electrically actuated micro / nano perturbation device and its preparation method, so as to achieve efficient breaking of bubbles on the electrode surface, enhance mass transfer, ensure reliable sealing of the electrolytic cell, avoid leakage and short circuit, adapt to miniaturized high-density electrolysis systems, and ultimately improve the overall operating performance and applicability of the electrolysis system.

[0007] Technical Solution: This invention provides an electrolytic cell electrode, comprising a substrate layer, an electro-actuated perturbation layer disposed above the substrate layer, and a catalytic wetting layer disposed above the electro-actuated perturbation layer; wherein, the substrate layer has a foam-like porous structure inside, and a plurality of pores are distributed on the substrate layer; the electro-actuated perturbation layer is composed of a plurality of electrostrictive microbeams, the electrostrictive microbeams are fixed on the substrate layer, and the electrostrictive microbeams do not cover the pores on the substrate layer; the electrostrictive microbeams are composed of a fixing part and a driving part connected to the fixing part, wherein the fixing part is used to fix to the substrate layer, and the driving part is suspended above the substrate layer, the driving part is used to vibrate under the action of a pulsed current, and the vibration direction is perpendicular to the plane of the substrate layer.

[0008] The catalytic wetting layer includes, from bottom to top, a gas-repellent coating, a Ni-Mo alloy core layer, a nitrogen-doped carbon-coated CoNiP transition layer, and an Ir single-atom surface layer, as well as a hydrophilic coating disposed in the pores of the substrate layer. The gas-repellent coating is disposed on the surface of the electrostrictive microbeam and in the non-porous region of the substrate layer.

[0009] Among them, the gas-repellent coating is a fluorosilane superhydrophobic coating, and the hydrophilic coating is a TiO2 nano superhydrophilic coating.

[0010] The substrate layer contains several insulating microchannels for mounting circuits connected to the electrostrictive microbeams. These circuits are externally connected to an external pulse voltage controller.

[0011] The substrate layer has an external circuit interface on its side or back that connects to the insulating microchannel. This external circuit interface is connected to an external pulse voltage controller via wires.

[0012] The drive section of the electrostrictive microbeam has several protrusions.

[0013] Among them, the electrostrictive microbeams in the electro-actuated perturbation layer are arranged in an array, and the electrostrictive microbeams are distributed in the gaps between adjacent pores on the substrate layer.

[0014] The edge of the electrolytic cell electrode is surrounded by a gas collecting groove, which is located on the surface of the catalyst wetting layer. The gas collecting groove is used to collect bubbles generated by the vibration of the electrostrictive microbeam.

[0015] The side of the base layer without the electrically actuated disturbance layer is the back side. A flow channel is opened on the back side of the base layer, and the flow channel is connected to the gas collection groove.

[0016] This invention provides a method for preparing an electrode for an electrolytic cell, comprising the following steps:

[0017] (1) Substrate layer pretreatment: pickling the nickel foam to remove its surface oxide layer; laser engraving the pickled nickel foam to prepare pores and insulating microchannels in the nickel foam, and coating the insulating microchannels with an insulating coating to obtain the substrate layer;

[0018] (2) Preparation of electro-actuated perturbation layer: an array of electrostrictive microbeams is formed by photolithography and etching of piezoelectric ceramic thin films. The electrostrictive microbeams are fixed on the substrate layer and avoid the pores on the substrate layer. The microcircuit is prepared and installed in the insulating microchannel so that the microcircuit connects the electrostrictive microbeams with the pulse voltage.

[0019] (3) Preparation of catalytic wetting layer: A fluorosilane superhydrophobic coating is deposited on the surface of the electrostrictive microbeam and the substrate layer, and a TiO2 nano-superhydrophilic coating is deposited on the inner wall of the pores of the substrate layer; a Ni-Mo alloy core layer is deposited by magnetron sputtering, a nitrogen-doped carbon-coated CoNiP transition layer is electrodeposited, and an Ir single-atom surface layer is deposited in the atomic layer.

[0020] (4) Integrated molding: Laser engrave gas collection grooves on the edge of the electrolytic cell electrode obtained in step (3), 3D print flow channels on the back, and seal the microcircuit interface to obtain the electrolytic cell electrode.

[0021] Invention Principle: Electrostrictive microbeams within the electro-actuated perturbation layer vibrate when energized, breaking up bubbles and generating a microfluidic field. The catalytic wetting layer provides reactive sites and differentiated surface wettability; the catalytic wetting layer and the perturbation work synergistically to optimize bubble detachment and ion mass transfer.

[0022] Beneficial effects: Compared with the prior art, the present invention has the following significant advantages: (1) Structural innovation: The electro-actuated microbeam array is integrated with the electrode body, eliminating the need for external drive, saving space and avoiding problems such as energy consumption, sealing failure and leakage short circuit caused by separate design, and is suitable for high-density and miniaturized electrolysis systems. (2) Functional synergy: It achieves triple synergy of high-frequency micro-perturbation, superhydrophobic surface and gradient catalysis, significantly improving the bubble breakage rate, greatly reducing the diffusion layer thickness, increasing the gas production rate by more than half compared with traditional electrodes, and also reducing the concentration polarization overpotential. (3) Advanced process: It integrates photolithography etching, partitioned plasma modification and 3D printing processes to achieve precise preparation of microstructures, making large-scale production feasible and reducing costs compared with the prior art. (4) Energy consumption optimization: The microbeam is driven by pulse voltage, reducing overall energy consumption; during continuous operation testing, the vibration amplitude of the microbeam decays, the catalyst layer does not peel off, the bubble adhesion rate is maintained below 5%, and the long-term operation stability is significantly better than the existing perturbation technology. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural diagram of the electrode in an electrolytic cell.

[0024] Figure 2 This is a diagram showing the positional relationship of each layer in the electrode of an electrolytic cell.

[0025] Figure 3 This is a schematic diagram of the base layer structure.

[0026] Figure 4 This is a schematic diagram of the structure of an insulated microchannel.

[0027] Figure 5 This is a schematic diagram of the structure of the electrically actuated disturbance layer.

[0028] Figure 6 This is a schematic diagram of a single electrostrictive microbeam.

[0029] Figure 7 This is a two-dimensional top view of the electrode structure of an electrolytic cell.

[0030] Figure 8 This is a two-dimensional top view of the electrode structure of an electrolytic cell without a catalytic wetting layer.

[0031] Figure 9 This is a schematic diagram of the back structure of the electrode in an electrolytic cell.

[0032] Figure 10 This is a schematic diagram of the longitudinal cross-sectional structure of the electrode in an electrolytic cell.

[0033] Reference numerals: 100, substrate layer; 101, pores; 102, insulating microchannel; 103, external circuit interface; 104, wire; 200, electro-actuated disturbance layer; 201, electro-strictive microbeam; 202, protrusion; 300, catalytic wetting layer; 400, pulse voltage controller; 500, gas collection groove; 600, flow channel; 601, exhaust manifold; a, electrode working surface. Detailed Implementation

[0034] The technical solution of the present invention will be further described below with reference to the accompanying drawings.

[0035] like Figure 1-2 As shown, the main body of the electrolytic cell electrode is a plate-like structure with a specific thickness. From top to bottom, it consists of a catalytic wetting layer 300, an electro-actuated disturbance layer 200, and a base layer 100. The three are seamlessly integrated through material growth and deposition processes.

[0036] like Figure 3 As shown, the substrate layer 100, located at the bottom of the electrolytic cell electrode, serves as the supporting framework and main conductor of the entire electrode. Its interior is a three-dimensional, interconnected, foam-like porous structure with numerous pores 101. Within the solid framework of the substrate layer 100, micron-sized insulating microchannels 102 are pre-formed. Figure 4 As shown, the inner walls of these insulating microchannels 102 are covered with a polytetrafluoroethylene (PTFE) insulating coating. The insulating microchannels 102 extend from the external circuit interface 103 on the electrode side or back to the upper surface of the substrate layer 100.

[0037] like Figure 5-6 As shown, the electro-actuated perturbation layer 200 is directly grown and fixed to the upper surface of the substrate layer 100. This layer is composed of a large number of independent electrostrictive microbeams 201 arranged in an array. Each electrostrictive microbeam 201 consists of a fixed part and a driving part connected to the fixed part. The fixed part of each electrostrictive microbeam 201 is fixed to the non-porous region of the upper surface of the substrate layer 100, while its driving part is suspended. The distribution position of the electrostrictive microbeam array is staggered with the pores 101 of the substrate layer 100 in the planar projection, that is, the electrostrictive microbeams 201 do not cover the openings of the pores 101, ensuring that the electrolyte can flow freely through the pores 101. Each electrostrictive microbeam 201 has a microelectrode integrated inside or on its surface, and is connected to the end of the insulating microchannel 102 inside the substrate layer 100 through extremely fine wires 104, thereby forming an electrical path.

[0038] The catalytic wetting layer 300 is a coating covering the outermost layer of the entire electrode, completely encapsulating all exposed surfaces of the electrostrictive microbeams 201 and the areas of the upper surface of the substrate layer 100 not covered by the microbeams, including the inner walls of the pores 101. The catalytic wetting layer 300 is tightly bonded to the electro-actuated perturbation layer 200 and the upper surface of the substrate layer 100. The catalytic wetting layer 300 includes, from top to bottom, an Ir single-atom surface layer, a nitrogen-doped carbon-coated CoNiP transition layer, a Ni-Mo alloy core layer, and a gas-repellent coating (fluorosilane); simultaneously, a TiO2 nano-superhydrophilic coating is deposited separately on the inner walls of the pores. Specifically, the surface of the electrostrictive microbeam and the upper surface of the substrate (non-porous region) are fully covered with a gas-repellent coating, while the inner wall of the substrate pores is only coated with a superhydrophilic coating and not with a gas-repellent coating. A Ni-Mo alloy core layer is deposited on the gas-repellent coating, a CoNiP transition layer is deposited on the Ni-Mo alloy core layer, and Ir single atoms are deposited on the CoNiP transition layer. The Ir single atom surface layer is located on the outermost surface of the electrolytic cell electrode and is in direct contact with the electrolyte.

[0039] like Figure 7-8 As shown, the electrostrictive microbeams 201 of the electrostriction perturbation layer 200 are arranged in a regular array. The pores 101 of the substrate layer 100 are distributed in the gaps between adjacent electrostrictive microbeams 201. Each electrostrictive microbeam 201 has a nanoscale protrusion 202 at its top. The vibration direction of the electrostrictive microbeam 201 is perpendicular to the main plane of the electrode.

[0040] An external circuit interface 103 is provided on the side or back of the electrode. This external circuit interface 103 is connected to an external pulse voltage controller 400 via a wire 104. The control signal output by the pulse voltage controller 400 is connected to the insulating microchannel 102 inside the substrate layer 100 through the external circuit interface 103, and finally transmitted to the driving part of each electrostrictive microbeam 201. A ring of micro gas collecting grooves 500 is arranged around the edge of the electrode working surface a, and the gas collecting grooves 500 are located on the surface of the catalytic wetting layer 300. On the back of the electrode, a flow channel 600 is formed by 3D printing. Figure 9 As shown. The inlet of the guide channel is connected to the gas collection groove 500 through the electrode sidewall or a specially designed channel, and the outlet is collected to the exhaust manifold 601 on the back of the electrode.

[0041] The connection relationships of the components in the electrolytic cell electrode are as follows:

[0042] Mechanical connection: The substrate layer 100, the electro-actuated disturbance layer 200, and the catalytic wetting layer 300 are physically and firmly bonded together from top to bottom through material growth process to form a mechanical whole.

[0043] Circuit connection: External pulse voltage controller 400 → Electrode external circuit interface 103 → Insulated microchannel 102 inside the substrate layer → Drive terminal of each electrostrictive microbeam 201. This circuit is used to independently control the vibration of the microbeam array.

[0044] Gas flow channel: The electrostrictive microbeam 201 vibrates to generate bubbles → gas collection groove 500 → flow channel 600.

[0045] The functional relationships among the components in the electrolytic cell electrode are as follows:

[0046] Electrostrictive microbeams 201 within the electro-actuated disturbance layer 200 vibrate, breaking up bubbles and generating a microfluidic field. The catalytic wetting layer 300 provides reactive sites and differentiated surface wettability, synergistically optimizing bubble detachment and ion mass transfer with the disturbance. The broken bubbles, driven by the vibration-induced flow field, enter the edge gas collection trough 500. The gas flowing into the gas collection trough 500 enters the back guide channel 600 through an internal connecting path, and finally exits the system from the exhaust manifold 601, completing the closed-loop process of "disturbance-breaking-collection-exhaust".

[0047] Example 1

[0048] Electrolytic cell electrodes with built-in in-situ electrically actuated micro / nano perturbation devices were fabricated using nickel metal as the substrate material according to the following steps, and their performance was tested:

[0049] (1) Substrate pretreatment: The nickel foam (porosity 80%, pore size 200μm) was placed in 5% hydrochloric acid solution for 30min to remove the surface oxide layer; the pores and the reserved micro-channels for microcircuits were laser engraved on the nickel foam, and a polytetrafluoroethylene insulating coating was plasma deposited in the insulating micro-channels and dried and cured at 120℃ for 2h.

[0050] (2) Disturbance layer preparation: Piezoelectric ceramic film with a thickness of 8 μm was deposited by sol-gel method; array microbeams were formed by photolithography and etching, with the following dimensions: length 80 μm, width 25 μm, thickness 8 μm, and array spacing 150 μm; microcircuits were prepared and connected to the microbeams to ensure stable pulse voltage transmission.

[0051] (3) Preparation of catalytic wetting layer: Ni-Mo alloy core layer (2 μm thick) was deposited by magnetron sputtering, CoNiP transition layer (1 μm thick) was coated with nitrogen-doped carbon by electrodeposition, and Ir single-atom surface layer (5 nm thick) was deposited by atomic layer deposition; plasma treatment was performed for partitioned modification, and fluorosilane superhydrophobic coating (contact angle 155°) was deposited on the surface of the microbeam and the active area of ​​the substrate, and TiO2 nano superhydrophilic coating (contact angle 8°) was deposited on the inner wall of the pores; wherein, the active area of ​​the substrate is the side of the substrate layer that is in contact with the electro-actuated perturbation layer, and the area with pore openings in this side is excluded.

[0052] (4) Integrated molding: Laser engrave the gas collection groove (80μm wide and 40μm deep) on the edge of the electrode, 3D print the flow channel on the back of the electrode, seal the microcircuit interface, and obtain the finished electrode.

[0053] The electrode was applied to an alkaline electrolytic cell (30% KOH electrolyte, 60℃), and the test results are as follows:

[0054] (1) At a current density of 2A / cm², the gas production rate reaches 920mL / (cm²・h), which is 53% higher than that of traditional foam electrodes and 35% higher than that of embedded bipolar plate perturbation electrodes;

[0055] (2) The concentration polarization overpotential is reduced to 0.12V, which is 32% lower than the existing technology, and the cell voltage is reduced to 4.0kWh / Nm³;

[0056] (3) After 1200 hours of continuous operation, the vibration amplitude of the microbeam decreased by 7.5%, the catalyst layer did not peel off, the bubble adhesion rate remained at 4.8%, and the stability was excellent.

[0057] Example 2

[0058] This embodiment provides a method for preparing the electrostrictive microbeam in Embodiment 1, including the following steps:

[0059] (1) Microbeam surface pretreatment: oxygen plasma cleaning of piezoelectric ceramic film, wherein the oxygen plasma cleaning parameters are: 50–80W, 30–60s, 0.1–0.3mbar;

[0060] (2) Nanomask forming: Photolithography and etching of piezoelectric ceramic thin film to form array microbeams, wherein the photoresist is polymethyl methacrylate PMMA A4 950k, spin coating 3000–5000 rpm, thickness 200–300 nm; baking: 170℃, 30 min; exposure: accelerating voltage 30 kV, dose 250–400 μC / cm²; development: developer ratio MIBK:IPA=1:3, 60 s, IPA termination;

[0061] (3) Nanoscale protrusion etching: ICP / RIE equipment was selected; gas: SF620 sccm + Ar 10 sccm; power: ICP 300 W, RF 50–80 W; pressure: 5–8 mTorr; time: 30–90 s; protrusion height: 50–150 nm;

[0062] (4) Mask removal + post-processing: Remove photoresist / nanospheres: 1% dilute HF solution, 10–20 s or oxygen plasma 100W, 2 min; rinse with deionized water + dry with nitrogen.

[0063] Example 3

[0064] This embodiment provides the catalytic wetting layer of Example 1, which consists of, from top to bottom, an Ir single-atom surface layer, a nitrogen-doped carbon-coated CoNiP transition layer, a Ni-Mo alloy core layer, and a gas-repellent coating (fluorosilane); the catalytic wetting layer also includes a TiO2 nano-superhydrophilic coating deposited separately on the inner wall of the pores.

[0065] The method for preparing the catalytic wetting layer includes the following steps:

[0066] (1) Zoned wettability modification: A fluorosilane superhydrophobic coating is deposited on the surface of the microbeam and the non-porous region of the substrate; a TiO2 nano-superhydrophilic coating is deposited on the inner wall of the substrate pores; wherein, the raw material of the fluorosilane superhydrophobic coating is fluorosilane (preferably 1H,1H,2H,2H-perfluorooctyltriethoxysilane), and the raw material of the TiO2 nano-superhydrophilic coating is TiO2 (nanocrystalline / ALD).

[0067] (2) Magnetron sputtering: A Ni-Mo alloy core layer is sputtered on a fluorosilane superhydrophobic coating; the raw material of the Ni-Mo alloy core layer is a Ni-Mo alloy target, wherein the Ni:Mo molar ratio is 7:3~9:1, and in this embodiment it is preferably 8:2.

[0068] (3) Electrodeposition: A nitrogen-doped carbon-coated CoNiP transition layer was electrodeposited on the Ni-Mo alloy core layer; the raw materials for the nitrogen-doped carbon-coated CoNiP transition layer included cobalt salt, nickel salt, hypophosphite, nitrogen source (urea / ethylenediamine), and carbon source (glucose / pyrrole). The preparation method was the same as that described in "Xia Ji, Li Shaomin, Gao Sen, et al. Preparation of cobalt-based nanomaterials supported on carbon nanotubes: an excellent electrocatalytic hydrogen evolution active material [J]. [2026-03-12]. "

[0069] (4) Atomic layer deposition: depositing Ir single-atom surface layer on nitrogen-doped carbon-coated CoNiP transition layer; the Ir single-atom surface layer is the catalytic working surface, and its raw material is iridium precursor (preferably Ir(acac)3, IrCl3).

Claims

1. An electrode for an electrolytic cell, characterized in that, The system includes a substrate layer, an electro-actuated perturbation layer disposed above the substrate layer, and a catalytic wetting layer disposed above the electro-actuated perturbation layer. The substrate layer has a foam-like porous structure with a number of pores distributed on it. The electro-actuated perturbation layer is composed of a number of electrostrictive microbeams fixed to the substrate layer, and the microbeams do not cover the pores on the substrate layer. Each electrostrictive microbeam consists of a fixed part and a driving part connected to the fixed part. The fixed part is used to fix itself to the substrate layer, and the driving part is suspended above the substrate layer. The driving part is used to vibrate under the action of a pulsed current, with the vibration direction perpendicular to the plane of the substrate layer.

2. The electrolytic cell electrode according to claim 1, characterized in that, The catalytic wetting layer includes, from bottom to top, a gas-repellent coating, a Ni-Mo alloy core layer, a nitrogen-doped carbon-coated CoNiP transition layer, and an Ir single-atom surface layer, as well as a hydrophilic coating disposed in the pores of the substrate layer. The gas-repellent coating is disposed on the surface of the electrostrictive microbeam and in the non-porous region of the substrate layer.

3. The electrolytic cell electrode according to claim 1, characterized in that, The gas-repellent coating is a fluorosilane superhydrophobic coating, and the hydrophilic coating is a TiO2 nano-superhydrophilic coating.

4. The electrolytic cell electrode according to claim 1, characterized in that, The substrate layer contains several insulating microchannels for mounting circuits connected to the electrostrictive microbeams. These circuits are externally connected to an external pulse voltage controller.

5. The electrolytic cell electrode according to claim 4, characterized in that, The side or back of the substrate layer has an external circuit interface that connects to the insulating microchannel. This external circuit interface is connected to an external pulse voltage controller via wires.

6. The electrolytic cell electrode according to claim 1, characterized in that, The drive section of the electrostrictive microbeam has several protrusions.

7. The electrolytic cell electrode according to claim 1, characterized in that, The electrostrictive microbeams in the electro-actuated perturbation layer are arranged in an array and distributed in the gaps between adjacent pores on the substrate layer.

8. The electrolytic cell electrode according to claim 1, characterized in that, A gas collecting groove is arranged around the edge of the electrode of the electrolytic cell. The gas collecting groove is located on the surface of the catalyst wetting layer and is used to collect bubbles generated by the vibration of the electrostrictive microbeam.

9. The electrolytic cell electrode according to claim 8, characterized in that, The side of the substrate without an electrically actuated disturbance layer is the back side. A flow channel is provided on the back side of the substrate, and the flow channel is connected to the gas collection groove.

10. A method for preparing an electrolytic cell electrode according to any one of claims 1-9, characterized in that, Includes the following steps: (1) Substrate layer pretreatment: pickling the nickel foam to remove its surface oxide layer; laser engraving the pickled nickel foam to prepare pores and insulating microchannels in the nickel foam, and coating the insulating microchannels with an insulating coating to obtain the substrate layer; (2) Preparation of electro-actuated perturbation layer: an array of electrostrictive microbeams is formed by photolithography and etching of piezoelectric ceramic thin films. The electrostrictive microbeams are fixed on the substrate layer and avoid the pores on the substrate layer. The microcircuit is prepared and installed in the insulating microchannel so that the microcircuit connects the electrostrictive microbeams with the pulse voltage. (3) Preparation of catalytic wetting layer: A fluorosilane superhydrophobic coating is deposited on the surface of the electrostrictive microbeam and the substrate layer, and a TiO2 nano-superhydrophilic coating is deposited on the inner wall of the pores of the substrate layer; a Ni-Mo alloy core layer is deposited by magnetron sputtering, a nitrogen-doped carbon-coated CoNiP transition layer is electrodeposited, and an Ir single-atom surface layer is deposited in the atomic layer. (4) Integrated molding: Laser engrave gas collection grooves on the edge of the electrolytic cell electrode obtained in step (3), 3D print flow channels on the back, and seal the microcircuit interface to obtain the electrolytic cell electrode.

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