A flow guiding mechanism and a plasma generator containing the mechanism

Abstract

This invention discloses a flow guiding mechanism and a plasma generator containing the mechanism, relating to the field of plasma equipment technology. It includes a cathode and an anode. The anode is a tubular body arranged along the axial front-rear direction. The hollow portion of the anode forms an accelerating section and a generating section. The cathode is located at the front end of the anode and corresponds to the accelerating section. It also includes a sheath disposed outside the anode; an air inlet symmetrically disposed within the sheath; and a deflector plate disposed within the air inlet. A double seal of the air inlet can be achieved through an adjustment mechanism. During use, by changing the position of the inner flow guiding holes of the flow guiding port, the angle of attack of the incoming gas is changed, allowing the user to switch the swirling characteristics according to the expected plasma arc characteristics.

Description

Technical Field

[0001] This invention relates to the field of plasma equipment technology, and more specifically, to a flow guiding mechanism and a plasma generator containing the mechanism. Background Technology

[0002] Plasma is generally defined as the fourth state of matter, composed of partially ionized gas containing ions, electrons, neutral atoms or molecules, and various reactive groups. Among the many plasma generation technologies, the plasma generator is one of the most widely used devices. It typically includes a sealed vacuum chamber and two parallel electrode plates placed opposite each other inside the chamber. One electrode is usually grounded, while the other is connected to a high-frequency or very-high-frequency radio frequency power supply. When an alternating electric field is applied between the two electrodes, electrons in the working gas in the electrode gap gain energy under the influence of the electric field and ionize them through collisions with neutral gas molecules, thereby generating and maintaining a high-density plasma.

[0003] In existing technologies, the gas inlet and airflow field control of plasma generators are usually relatively simple. Gas is mostly injected from the side wall of the cavity in a fixed pattern. The distribution of airflow in the cavity, its interaction with the plasma, and its impact on process uniformity are complex. This single airflow pattern makes it difficult to optimize the plasma generation environment according to different materials. Therefore, we propose a flow guiding mechanism and a plasma generator containing this mechanism. Summary of the Invention

[0004] In view of the shortcomings of the existing technology, the purpose of this invention is to provide a flow guiding mechanism and a plasma generator containing the mechanism.

[0005] To achieve the above objectives, the present invention provides the following technical solution: comprising a cathode and an anode, wherein the anode is a tubular body arranged along the axial direction (front-back direction), the hollow portion of the anode forms an accelerating section and a generating section, the cathode is located at the front section of the anode and corresponds to the accelerating section, and further comprising... A sheath is disposed on the outside of the anode; The air inlets are symmetrically located within the sheath. A deflector plate is disposed inside the air intake. An adjustment mechanism, located inside the sheath, guides the flow of the medium gas.

[0006] Preferably, the adjustment mechanism includes a movable component disposed at the air inlet, a deflector disposed inside the anode, the movable component and the deflector cooperating with each other, and a driving component disposed inside the sheath, the driving component and the deflector cooperating with each other.

[0007] Preferably, the movable component includes a piston disposed in the air inlet, one end of the air inlet is provided with a slot, a compression spring is provided on the side wall of the slot, one end of the compression spring is provided with a movable rod, and one end of the movable rod is disposed on the side wall of the piston.

[0008] Preferably, the bottom end of the air inlet is provided with an air outlet and a limiting port, and the bottom end of the outer wall of the movable rod is provided with a limiting rod, which is slidably connected in the limiting port.

[0009] Preferably, the deflector includes an annular groove on the outside of the anode, an annular plate is provided in the annular groove, a first flow guide is provided in the annular plate in a circular shape, a second flow guide is provided in the outer wall of the anode in a circular shape, and two sets of flow guide holes extend downward from the bottom end of the second flow guide.

[0010] Preferably, the outer wall of the annular plate is provided with an arc-shaped groove, and the limiting rod is slidably connected in the arc-shaped groove.

[0011] Preferably, a guide plate is provided inside the second guide port, a rotating shaft is provided at the axial position of the guide plate, and a curved groove is provided on the outer wall of the rotating shaft.

[0012] Preferably, the driving component includes a movable rod arranged circumferentially within the anode, and positioning rods are distributed on the inner side of the movable rod, with the corresponding positioning rods slidably connected within the curved groove.

[0013] Preferably, the inner wall of the sheath is symmetrically provided with support plates, the side wall of the support plates is provided with a driver, the output shaft end of the driver is provided with an annular bar, and multiple sets of the moving rods are provided on the inner wall of the annular bar.

[0014] Preferably, it further includes an auxiliary component disposed within the sheath, and a positioning component is disposed within the driving component. The auxiliary component and the positioning component cooperate with each other. The auxiliary component includes a through hole disposed at the bottom end of the air inlet, and an auxiliary block is slidably connected within the through hole. A connecting plate is disposed between the deflection plate and the auxiliary block, and a movable block is disposed at the bottom end of the auxiliary block. Preferably, the positioning element includes an annular portion disposed on the outer side of the support plate, an annular hole is provided on the outer side of the annular portion, and movable openings are symmetrically provided in the annular hole. One end of the movable block is disposed in the movable opening, and a through-hole is provided in each of the movable blocks. Rubber rings are provided in the through-holes on both sides, and one end of the movable block abuts against the outer side of the acceleration part.

[0015] Preferably, one end of the cathode is disposed inside the sheath, and the cathode end corresponds to the acceleration section.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. In this invention, after the gas is introduced into the air inlet, it drives the deflection plate to rotate. Since there is a connecting plate between the deflection plate and the auxiliary block, the rotation of the deflection plate drives the auxiliary block at the end of the connecting plate to move. In this way, the movable block is synchronously adjusted to squeeze the acceleration part, thereby changing the cross-sectional area of ​​the acceleration part, so that the compressed high-voltage electric arc plasma arc flows out from the generating part.

[0017] 2. In this invention, by squeezing the piston, the piston drives the limiting rod on the movable rod to slide within the limiting port. At this time, the gas outlet opens. Since the movable rod drives the limiting rod to slide within the limiting port, and the limiting rod is slidably connected in the arc groove, the annular plate is deflected. At this time, the first guide port and the second guide port are connected, and the gas enters the anode from the guide hole. This not only alleviates the local overheating phenomenon at the root of the anode arc, but also drives the high-voltage arc to move through the swirling flow.

[0018] 3. In this invention, by activating the driver, the driver drives the annular bar to move linearly in the horizontal direction. At this time, the moving rod moves synchronously. Since one end of the positioning rod is slidably connected in the curved groove, it drives the guide plate on the rotating shaft to deflect. After changing the airflow, the user can switch the swirling characteristics according to the expected plasma arc characteristics.

[0019] 4. In this invention, after use, the deflection plate seals the air inlet by the restoring force of the rubber ring and the compression spring. This is the first sealing. The piston returns to its original position. At this time, the first guide port and the second guide port are misaligned. This is the second sealing. As can be seen from the above, the double sealing mechanism prevents foreign objects from entering the air inlet. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure proposed in this invention; Figure 2 This is a cross-sectional schematic diagram of the present invention; Figure 3 This is a side sectional view of the invention. Figure 4 This is a schematic diagram of the internal structure proposed in this invention; Figure 5 This is a schematic diagram of the sheath proposed in this invention; Figure 6 The present invention proposes Figure 3 Schematic diagram at point A; Figure 7 The present invention proposes Figure 4 Schematic diagram at point B; Figure 8 The present invention proposes Figure 5 A schematic diagram at point C.

[0021] In the picture: 1. Cathode; 2. Anode; 3. Accelerator; 4. Generator; 5. Sheath; 6. Inlet; 7. Deflector plate; 8. Adjustment mechanism; 9. Moving part; 10. Deflector; 11. Drive component; 12. Piston; 13. Slot; 14. Compression spring; 15. Moving rod; 16. Outlet; 17. Limiting port; 18. Limiting rod; 19. Annular groove; 20. Annular plate; 21. Guide port one; 22. Guide port two ; 23. Guide hole; 24. Arc groove; 25. Guide plate; 26. Rotating shaft; 27. Curved groove; 28. Moving rod; 29. ​​Positioning rod; 30. Support plate; 31. Driver; 32. Annular bar; 33. Auxiliary component; 34. Positioning component; 35. Through hole; 36. Auxiliary block; 37. Connecting plate; 38. Movable block; 39. Annular part; 40. Annular hole; 41. Movable port; 42. Through port; 43. Rubber ring. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this specification are for illustrative purposes only and do not represent the only possible implementation.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0025] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0026] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.

[0027] Example 1 further illustrates the flow guiding mechanism and plasma generator containing the mechanism proposed in this invention, including a cathode 1 and an anode 2. The anode 2 is a tubular body arranged in the axial front-back direction. The hollow portion of the anode 2 forms an acceleration section 3 and a generating section 4. The cathode 1 is located at the front section of the anode 2 and corresponds to the acceleration section 3. It also includes a sheath 5, which is disposed on the outside of the anode 2; an air inlet 6, which is symmetrically disposed within the sheath 5; and a deflection plate 7, which is rotatably connected within the air inlet 6. The adjustment mechanism 8 includes a movable part 9 disposed in the air inlet 6, a deflector 10 disposed in the anode 2, the movable part 9 and the deflector 10 cooperating with each other, and a drive part 11 disposed in the sheath 5, the drive part 11 and the deflector 10 cooperating with each other. When a constant current is passed through anode 2 and cathode 1, cathode 1 first contacts anode 2 to generate high-frequency discharge, and then slowly moves away from anode 2. A high-voltage arc is generated between cathode 1 and anode 2. After an appropriate distance is generated between cathode 1 and anode 2, cathode 1 and anode 2 are relatively stationary. When cathode 1 and anode 2 separate, the high-voltage arc is compressed, and the compressed high-voltage arc plasma arc flows out from the generating part 4. Depend on Figures 1 to 5 It can be seen that the anode 2 is divided into two parts, the acceleration part 3 and the generating part 4. The acceleration part 3 is a Venturi tube structure, and the generating part 4 is cylindrical. The two are connected. This device sets a squeezing component in the middle part of the Venturi tube. The middle part of the acceleration part 3 is squeezed by the cooperation of the auxiliary component 33 and the positioning component 34, thereby accelerating the high voltage arc. The cathode 1 is located at the front end of the acceleration part 3. Its sheath 5 is equipped with an air inlet 6. By introducing gas into the air inlet 6, the gas in the air inlet 6 drives the high-voltage arc to move. The gas entering from the air inlet 6 can effectively alleviate the local overheating phenomenon at the arc root of the anode 2. Meanwhile, the device is equipped with an adjustment mechanism 8 inside the air inlet 6. The adjustment mechanism 8 can achieve double sealing of the air inlet 6. When not in use, the air inlet 6 is blocked by the deflection plate 7, thereby ensuring the stability of the plasma generator. The device is also equipped with a driving component 11, which changes the angle of attack of the cooling gas by changing the position of the guide hole 23 in the guide port 22. This changes the ratio of tangential velocity to axial velocity obtained by the airflow after passing through the guide hole 23. Users can switch the swirling characteristics according to the expected plasma arc characteristics.

[0028] Example 2 Based on Embodiment 1, the following technical features are added: The movable part 9 includes a piston 12 disposed in the air inlet 6. One end of the air inlet 6 is provided with a slot 13. A compression spring 14 is fixedly connected to the side wall of the slot 13. The compression spring 14 is a carbon spring with high strength, which is convenient for daily use. One end of the compression spring 14 is fixedly connected to a movable rod 15. One end of the movable rod 15 is fixedly connected to the side wall of the piston 12. The bottom end of the air inlet 6 is provided with an air outlet 16 and a limiting port 17. A limiting rod 18 is fixedly connected to the bottom end of the outer wall of the movable rod 15. The limiting rod 18 is slidably connected in the limiting port 17. Depend on Figures 2 to 4 It can be seen that a movable rod 15 is fixedly connected to the air inlet 6 by a compression spring 14. A piston 12 is fixed to the end of the movable rod 15. The piston 12 slides in the air inlet 6. In the initial state, the piston 12 blocks the air outlet 16. When in use, compressed gas enters from the air inlet 6. The gas squeezes the piston 12. The piston 12 drives the limiting rod 18 on the movable rod 15 to slide in the limiting port 17. At this time, the air outlet 16 opens and the compressed gas enters the anode 2. The deflector 10 includes an annular groove 19 located on the outside of the anode 2. An annular plate 20 is rotatably connected inside the annular groove 19. A first guide port 21 is provided in the annular plate 20. A second guide port 22 is provided in the annular shape on the outer wall of the anode 2. Two sets of guide holes 23 extend downward from the bottom end of the second guide port 22. An arc-shaped groove 24 is provided on the outer wall of the annular plate 20. A limiting rod 18 is slidably connected in the arc-shaped groove 24. A guide plate 25 is rotatably connected inside the second guide port 22 via a rotating shaft 26. A curved groove 27 is provided on the outer wall of the rotating shaft 26. Depend on Figures 2 to 5It can be seen that an annular plate 20 is rotatably connected to the anode 2. The annular plate 20 has a circumferential guide port 21 inside, and an arc groove 24 is provided on the outer wall of the annular plate 20. When the piston 12 drives the limiting rod 18 to move, the limiting rod 18 is slidably connected in the arc groove 24, so the annular plate 20 rotates. In the initial state, the guide port 21 and the guide port 22 are not connected. When the gas enters the inlet 6, the rotation of the annular plate 20 makes the guide port 21 and the guide port 22 connected, and the gas enters the anode 2. Meanwhile, the device further defines the second guide port 22, with two sets of guide holes 23 extending downward from the bottom end of the second guide port 22. A guide plate 25 is rotatably connected inside the second guide port 22 via a rotating shaft 26. By rotating the guide plate 25, the gas angle is switched, thereby changing the ratio of tangential velocity to axial velocity obtained by the airflow after passing through the guide hole 23. The driving component 11 includes a movable rod 28 that is circumferentially connected to the anode 2. Positioning rods 29 are fixedly connected to the inner side of the movable rod 28. The corresponding positioning rods 29 are slidably connected to the curved groove 27. Support plates 30 are symmetrically fixedly connected to the inner wall of the sheath 5. A driver 31 is detachably installed on the side wall of one set of support plates 30. An annular bar 32 is fixedly connected to the output shaft end of the driver 31. Multiple sets of movable rods 28 are fixedly connected to the inner wall of the annular bar 32. Depend on Figures 2 to 8 It can be seen that the generating part 4 of the anode 2 moves in the horizontal direction by the moving rod 28. The moving rod 28 is fixed with a positioning rod 29 at the position of the rotating shaft 26. The positioning rod 29 is slidably connected in the curved groove 27. The moving rod 28 is controlled by the driver 31 fixed inside the sheath 5. The driver 31 can be an electric cylinder or an electric push rod. The driver 31 drives the annular bar 32 to move in the horizontal direction, thereby driving the moving rod 28 to move linearly in the horizontal direction.

[0029] Working principle: During use, the gas is introduced through the air inlet 6. After entering, it first contacts the deflection plate 7. After pushing the deflection plate 7 to rotate, the gas contacts the piston 12, thereby squeezing the piston 12. The piston 12 drives the limiting rod 18 on the movable rod 15 to slide in the limiting port 17. At this time, the air outlet 16 opens. Since the movable rod 15 drives the limiting rod 18 to slide in the limiting port 17, and the limiting rod 18 is slidably connected in the arc groove 24, the annular plate 20 is deflected. At this time, the flow guide port 1 21 and the flow guide port 22 are connected. The gas enters the anode 2 from the flow guide hole 23, which not only alleviates the local overheating phenomenon at the arc root of the anode 2, but also drives the high-voltage arc to move through the swirling flow. When it is necessary to adjust the swirling characteristics, simply start the driver 31 through the external controller. The driver 31 drives the annular bar 32 to move linearly in the horizontal direction. At this time, the moving rod 28 moves synchronously. Since one end of the positioning rod 29 is slidably connected in the curved groove 27, it drives the guide plate 25 on the rotating shaft 26 to deflect. After changing the airflow, the user can switch the swirling characteristics according to the expected plasma arc characteristics.

[0030] Example 3 Based on Embodiment 2, the following technical features are added: It also includes an auxiliary component 33 provided in the sheath 5, a positioning component 34 provided in the drive component 11, the auxiliary component 33 and the positioning component 34 cooperate with each other, the auxiliary component 33 includes a through hole 35 provided at the bottom end of the air inlet 6, an auxiliary block 36 is slidably connected in the through hole 35, a connecting plate 37 is rotatably connected between the deflection plate 7 and the auxiliary block 36, a movable block 38 is fixedly connected at the bottom end of the auxiliary block 36, the positioning component 34 includes an annular part 39 fixedly connected to the outside of the support plate 30, an annular hole 40 is provided on the outside of the annular part 39, movable openings 41 are symmetrically provided in the annular hole 40, one end of the movable block 38 is movably connected in the movable opening 41, and a through opening 42 is provided in both movable blocks 38, and a rubber ring 43 is provided in the through openings 42 on both sides, and one end of the movable block 38 abuts against the outside of the acceleration part 3; Depend on Figures 2 to 8 It can be seen that the air inlet 6 is provided with a cylindrical through hole 35, and a cylindrical auxiliary block 36 is slidably connected in the through hole 35. Since the deflection plate 7 and the auxiliary block 36 are rotatably connected by a connecting plate 37, when the deflection plate 7 is rotated under force, it drives the auxiliary block 36 at one end of the connecting plate 37 to move in the through hole 35. At this time, the auxiliary block 36 drives the movable block 38 to move.

[0031] Working principle: When gas is introduced into the air inlet 6, it drives the deflector plate 7 to rotate. Since the deflector plate 7 and the auxiliary block 36 are rotatably connected by the connecting plate 37, the rotation of the deflector plate 7 drives the auxiliary block 36 at the end of the connecting plate 37 to move. In this way, the movable block 38 is simultaneously adjusted to squeeze the acceleration part 3, thereby changing the cross-sectional area of ​​the acceleration part 3, thus compressing the high-voltage arc. When the device is not in use, the restoring force of the rubber ring 43 and the compression spring 14 causes the deflection plate 7 to block the air inlet 6, and the piston 12 returns to its original position, causing the guide port 1 21 and the guide port 22 to be misaligned. As can be seen from the above, the double blocking mechanism prevents foreign objects from entering the air inlet 6 and affecting the use of the plasma generator.

[0032] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A flow guiding mechanism comprising a cathode and an anode, the anode being a tubular body arranged in an axial fore-aft direction, a hollow portion of the anode being formed with an acceleration section and a generation section, the cathode being located at a front end of the anode and corresponding to the acceleration section, characterized in that, It also includes, A sheath is disposed on the outside of the anode; The air inlets are symmetrically located within the sheath. A deflector plate is disposed inside the air inlet; An adjustment mechanism, located inside the sheath, guides the flow of the medium gas.

2. The flow guiding mechanism according to claim 1, characterized in that, The adjustment mechanism includes a movable component disposed at the air inlet, a deflector disposed inside the anode, the movable component and the deflector cooperating with each other, and a driving component disposed inside the sheath, the driving component and the deflector cooperating with each other.

3. The flow guiding mechanism according to claim 2, characterized in that, The movable component includes a piston disposed in an air inlet. One end of the air inlet has a slot, and a compression spring is disposed on the side wall of the slot. One end of the compression spring is disposed on a movable rod, and one end of the movable rod is disposed on the side wall of the piston.

4. A flow guiding mechanism according to claim 3, characterized in that, The bottom end of the air inlet is provided with an air outlet and a limiting port, and the bottom end of the outer wall of the movable rod is provided with a limiting rod, which is slidably connected in the limiting port.

5. A flow guiding mechanism according to claim 4, characterized in that, The deflector includes an annular groove on the outside of the anode, an annular plate inside the annular groove, a first flow guide port in the annular plate, a second flow guide port in the annular shape on the outer wall of the anode, and two sets of flow guide holes extending downward from the bottom end of the second flow guide port.

6. A flow guiding mechanism according to claim 5, characterized in that, The outer wall of the annular plate is provided with an arc-shaped groove, and the limiting rod is slidably connected in the arc-shaped groove.

7. A flow guiding mechanism according to claim 5, characterized in that, A guide plate is provided inside the second guide port, and a rotating shaft is provided at the axial position of the guide plate. A curved groove is provided on the outer wall of the rotating shaft.

8. A flow guiding mechanism according to claim 7, characterized in that, The driving component includes a movable rod arranged circumferentially within the anode, and positioning rods distributed on the inner side of the movable rod, with the corresponding positioning rods slidably connected within the curved groove.

9. A flow guiding mechanism according to claim 8, characterized in that, The inner wall of the sheath is symmetrically provided with support plates, the side wall of the support plates is provided with a driver, the output shaft end of the driver is provided with an annular bar, and multiple sets of the moving rods are provided on the inner wall of the annular bar.

10. A flow guiding mechanism according to claim 9, characterized in that, It also includes auxiliary components installed inside the sheath. The driving component has a positioning component installed inside it. The auxiliary component and the positioning component cooperate with each other. The auxiliary component includes a through hole at the bottom of the air inlet. An auxiliary block is slidably connected inside the through hole. A connecting plate is installed between the deflection plate and the auxiliary block. A movable block is installed at the bottom of the auxiliary block.

11. A flow guiding mechanism according to claim 10, characterized in that, The positioning component includes an annular portion disposed on the outer side of the support plate. An annular hole is provided on the outer side of the annular portion. A movable opening is symmetrically provided in the annular hole. One end of the movable block is disposed in the movable opening. A through-hole is provided in each of the movable blocks. A rubber ring is provided in the through-hole on both sides. One end of the movable block abuts against the outer side of the acceleration part.

12. A plasma generator, characterized in that, Includes the flow guiding mechanism as described in any one of claims 1-11, wherein one end of the cathode is disposed within the sheath, and the cathode end corresponds to the acceleration section.

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