Metal thin film capacitance vacuum gauge

Abstract

This invention discloses a metal thin-film capacitive vacuum gauge, comprising: a vacuum gauge body with a connector; the connector having a protection mechanism and a cleaning mechanism; the protection mechanism including: a housing, an inflation sealing assembly, a negative pressure suction assembly, an elastic reset assembly, and a stroke linkage transmission mechanism; the housing having an inflation chamber and a suction chamber; the inflation sealing assembly including a sealing airbag, an inflation piston slidably disposed in the inflation chamber, and an inflation pipe connecting the sealing airbag and the inflation chamber; the negative pressure suction assembly including a suction piston slidably disposed in the suction chamber, and an air inlet pipe connecting the inside of the connector and the suction chamber; the stroke linkage transmission mechanism connecting the inflation sealing assembly, the negative pressure suction assembly, and the elastic reset assembly; the cleaning mechanism including: a storage drive unit, a cleaning component, and a conveying unit; the cleaning mechanism and the stroke linkage transmission mechanism are linked and cooperate. This application can achieve effective protection of the connector, improve signal transmission stability and measurement accuracy, and simplify and reduce maintenance costs.

Description

Technical Field

[0001] This invention relates to the field of vacuum gauge technology, and in particular to a metal thin-film capacitor vacuum gauge. Background Technology

[0002] A metal thin-film capacitive vacuum gauge is a precision instrument that measures the vacuum level by detecting the deformation of an elastic thin film under pressure difference.

[0003] The wiring connectors of existing metal thin-film capacitive vacuum gauges are exposed to air for a long time. The internal metal pins are prone to oxidation reactions with oxygen and moisture, forming a high-resistivity oxide layer that hinders current conduction and reduces signal integrity. Especially in high-frequency and weak signal measurement scenarios, this can easily cause signal attenuation and noise interference, directly affecting the accuracy of vacuum measurement.

[0004] Currently, most vacuum gauges on the market use simple dust covers or independent seals for protection, which can only block dust and moisture to a certain extent and cannot inhibit oxidation at the source. In addition, some cleaning solutions require manual wiping of the pins with external tools, which is cumbersome, costly to maintain, and difficult to achieve integrated and automated protection and cleaning.

[0005] Therefore, it is necessary to propose a metal thin-film capacitive vacuum gauge to solve at least one of the above problems.

[0006] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this application. Summary of the Invention

[0007] To address the shortcomings of existing technologies, this invention provides a metal thin-film capacitive vacuum gauge that effectively protects the connectors, inhibits pin oxidation, simplifies maintenance, improves the stability and accuracy of vacuum gauge signal transmission, and reduces maintenance costs.

[0008] The specific technical solution of the embodiments of the present invention is as follows: A metal thin-film capacitor vacuum gauge includes: a vacuum gauge body, the vacuum gauge body having a connector with pins inside; the connector having a protection mechanism and a cleaning mechanism; the protection mechanism including: a housing, an inflation sealing assembly, a negative pressure suction assembly, an elastic reset assembly, and a stroke linkage transmission mechanism; the housing having an isolated inflation chamber and a suction chamber; the inflation sealing assembly including an annular sealing airbag disposed inside the connector, an inflation piston slidably disposed in the inflation chamber, and an inflation tube connecting the sealing airbag and the inflation chamber; the negative pressure suction assembly including a suction piston slidably disposed in the suction chamber and an air inlet tube connecting the inside of the connector and the suction chamber; the stroke linkage transmission mechanism connecting the inflation sealing assembly, the negative pressure suction assembly, and the... A resilient reset assembly is used to perform a first-stage compression when the connector is inserted into the plug, driving the inflation piston to compress the inflation chamber and generate positive pressure, thus filling the air chamber with gas through the inflation tube into the sealing airbag; a second-stage compression is performed on the resilient reset assembly to drive the vacuum piston to evacuate the plug; the cleaning mechanism includes: a storage drive unit for storing and driving the cleaning medium, a cleaning component adapted to the pin, and a delivery unit for delivering the cleaning medium to the cleaning component; the cleaning mechanism is linked with the stroke linkage transmission mechanism, and when or after the connector is pulled out of the plug, the stroke linkage transmission mechanism drives the storage drive unit to supply the cleaning medium to the cleaning component through the delivery unit, and drives the cleaning component to move relative to the pin.

[0009] Furthermore, the stroke linkage transmission mechanism is an overall linear reciprocating transmission structure, including: a plug-in abutment drive assembly and a transmission assembly. The transmission assembly includes: an active force transmission component, an intermediate linkage component, and a driven force transmission component. The active force transmission component is drivenly connected to the inflation piston, and the driven force transmission component is drivenly connected to the deflation piston. The intermediate linkage component can be drivenly engaged with the active force transmission component and the driven force transmission component respectively. The plug-in abutment drive assembly is connected to the active force transmission component. The plugging and pulling force generated by the plugging and pulling of the connector can be transmitted to the active force transmission component through the plug-in abutment drive assembly, and then transmitted to the driven force transmission component through the intermediate linkage component.

[0010] Furthermore, the active force transmission component includes an active rack, the driven force transmission component includes a driven rack, the intermediate linkage component includes a linkage gear, the linkage gear is rotatably mounted on the housing, and the active rack and the driven rack are respectively located on the radial sides of the linkage gear.

[0011] Furthermore, in the initial assembly state, the active rack and the driven rack are spaced at a predetermined distance in the vertical direction. This predetermined distance is the toothless free-stroke section of the active rack. When the connector is inserted into the plug, the active rack can move vertically in a straight line along with the plug-in abutting drive assembly. When the distance the active rack moves downward is less than or equal to the toothless free-stroke section, the inflation sealing assembly completes the inflation of the sealing airbag. When the active rack meshes with the linkage gear, the rotation of the linkage gear reverses the direction of the rotation, causing the driven rack to move in the opposite direction in a straight line. The negative pressure suction assembly then suctions air from the inner cavity of the plug.

[0012] Furthermore, the elastic reset assembly includes a first spring and a second spring, and the plug-in abutment drive assembly includes a vertical rod, a long plate, a connecting rod, a first fixing rod, a hollow cylinder, and a pressing rod; the vertical rod includes multiple vertical rods, which are disposed on the outside of the plug-in connector; the first spring includes multiple first springs, which are correspondingly sleeved on the vertical rods; the long plate is disposed on both sides of the plug-in connector, and the long plate has mounting holes, through which it is movably sleeved on the vertical rod; the connecting rod is fixed on the long plate for contact limiting of the connector; the first fixing rod is fixed on the long plate near the side of the housing; the pressing rod is fixed on the surface of the inflation piston; the hollow cylinder is movably sleeved on the pressing rod; the second spring is housed inside the hollow cylinder; and the active rack is installed on the outside of the hollow cylinder and extends in the same direction as the hollow cylinder.

[0013] Furthermore, the second spring has a greater rigidity than the first spring. When the connector is inserted into the plug, the connector first contacts the connecting rod, and the connecting rod drives the long plate to move downward, compressing the first spring and completing the first stage of compression. At the same time, the first fixed rod drives the hollow cylinder to move downward, and the second spring pushes the lowering rod downward in its initial state until the inflation piston moves to its limit position, completing the inflation of the sealing airbag. After the inflation piston moves to its limit position, the connecting rod drives the first fixed rod to continue moving downward, the hollow cylinder compresses the second spring, and the hollow cylinder slides axially relative to the lowering rod, driving the active rack to continue descending for the second stage of compression. The active rack meshes with the linkage gear, and the linkage gear drives the driven rack to move upward. The driven rack synchronously drives the suction piston to move upward, generating negative pressure in the suction chamber, and the air in the plug is extracted through the air inlet pipe.

[0014] Furthermore, there is one inflation chamber located in the middle of the housing; there are two suction chambers symmetrically arranged on both sides of the inflation chamber; there is one set of insertion abutment drive components; and there are two sets of transmission components symmetrically arranged on both sides of the insertion abutment drive components.

[0015] Furthermore, each of the two suction chambers is provided with a one-way air inlet valve, one end of the air inlet pipe is fixedly connected to the one-way air inlet valve, and the other end of the air inlet pipe is fixedly connected to the connector; each of the two suction chambers is also provided with a one-way air outlet valve, which discharges the gas in the suction chamber in one direction. Both the one-way air inlet valve and the one-way air outlet valve are located at the bottom of the suction chamber and are lower than the lowest position of the suction piston.

[0016] Furthermore, the delivery unit includes multiple hollow rings, multiple short tubes, and a delivery tube. The hollow rings are disposed within the inner cavity of the connector, and the short tubes are used to connect two adjacent hollow rings. The delivery tube is fixedly connected to the short tubes. The cleaning component includes an annular sponge, which is disposed within the inner cavity of the hollow ring and surrounds the pin. The inner cavity of the hollow ring has a liquid outlet hole, allowing the cleaning medium to reach the annular sponge through the delivery tube, the short tubes, and the hollow ring.

[0017] Furthermore, the storage drive unit includes two telescopic cylinders, each with an upper support cover at its upper end and a lower support cover at its lower end, with a horizontal plate connecting the two lower support covers; the liquid outlet ends of the two telescopic cylinders are respectively fixedly connected to telescopic pipes, one end of which is connected to the delivery pipe, and the other end of which is connected to the telescopic cylinder; the stroke linkage transmission mechanism further includes: two guide shells fixedly connected to the surface of the vacuum gauge body; sliding blocks slidably connected to the inner cavity of the guide shells, each sliding block having an opening; and a rotating mechanism rotatably connected to the two sliding blocks through the openings. The rotating rod has end stops fixedly connected to both ends; positioning slots are fixedly connected to one side of the two guide shells, and limiting slots are provided in the positioning slots to restrict the circumferential rotation of the end stops only; a pulling block is fixedly connected to the middle of the rotating rod; two torsion springs are movably sleeved on the surface of the rotating rod, and the two ends of the torsion springs are fixedly connected to the surfaces of the sliding block and the pulling block, respectively; a second fixing rod is fixedly connected to the surface of the hollow cylinder; a linkage plate is fixedly connected to one end of the second fixing rod; and a mounting rod is fixedly connected to the surface of the sliding block, and one end of the mounting rod is fixedly connected to the surface of the cross plate.

[0018] The technical solution of the present invention has the following significant beneficial effects: The metal thin-film capacitive vacuum gauge provided in this application integrates a protection mechanism and a cleaning mechanism at the connector. The protection mechanism, through an isolated inflation chamber and a vacuum chamber within the housing, utilizes a stroke-linked transmission mechanism and an elastic reset component. Upon connector insertion, it first performs a primary compression using the insertion force, driving the inflation piston to inflate the sealing bladder and achieve an airtight seal. Then, it performs a secondary compression using the insertion force, driving the vacuum piston to extract air from the connector, creating a low-oxygen or near-vacuum environment, effectively inhibiting pin oxidation. The cleaning mechanism is linked to the stroke-linked transmission mechanism. When or after connector removal, the stroke-linked transmission mechanism drives the storage drive unit to transport the cleaning medium to the cleaning component via the delivery unit, causing the cleaning component to move relative to the pins, automatically wiping away the oxide layer and impurities. The entire system relies on the insertion and removal stroke for fully mechanical linkage, ensuring a sealed, low-oxygen connector, significantly reducing pin oxidation, stabilizing signal transmission and measurement accuracy, automatically cleaning the pins, reducing maintenance, and extending service life. It is reliable, low-cost, and highly adaptable.

[0019] Specific embodiments of the invention are disclosed in detail below with reference to the description and accompanying drawings, indicating how the principles of the invention can be employed. It should be understood that the embodiments of the invention are not therefore limited in scope. Features described and / or shown for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments. Attached Figure Description

[0020] The accompanying drawings described herein are for illustrative purposes only and are not intended to limit the scope of the invention in any way. Furthermore, the shapes and proportions of the components in the drawings are merely illustrative to aid in understanding the invention and do not specifically limit the shapes and proportions of the components. Those skilled in the art, guided by the teachings of this invention, can select various possible shapes and proportions to implement the invention according to specific circumstances.

[0021] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a top view of the structure of the present invention; Figure 3 For the present invention Figure 2 Enlarged view of A in the middle; Figure 4 This is a schematic diagram of the connector structure of the present invention; Figure 5 This is a cross-sectional structural diagram of the long plate of the present invention; Figure 6 This is a cross-sectional view of the short block of the present invention; Figure 7This is a schematic diagram of the rectangular ring airbag of the present invention; Figure 8 This is a cross-sectional view of the housing of the present invention; Figure 9 This is a schematic diagram of the structure of the telescopic cylinder of the present invention; Figure 10 This is a partial structural diagram of the cleaning mechanism of the present invention; Figure 11 This is a schematic diagram of the long plate of the present invention in its initial state; Figure 12 This is a schematic diagram showing the connector fully inserted into the plug connector in this invention; Figure 13 This is a schematic diagram of the invention where the long plate is pulled upwards after the connector is pulled out.

[0022] The reference numerals in the above figures are as follows: 1. Vacuum gauge body; 101. Connector; 2. Protection mechanism; 21. Negative pressure suction assembly; 22. Inflation and sealing assembly; 2101. Vertical rod; 2102. Long plate; 2103. First spring; 2104. Housing; 21041. Inflation chamber; 21042. Suction chamber; 2105. Connecting rod; 2106. Driven rack; 2107. Driving rack; 2108. One-way exhaust valve; 2109. Inlet pipe; 2110. One-way inlet valve; 2111. Short plate; 2112. First fixing rod; 2113. Linkage gear; 2114. Suction piston; 2115. First through hole; 2116. H-shaped partition; 2201. Rectangular ring airbag; 2202. Hollow cylinder; 220 3. Lowering rod; 2204. Inflation tube; 2205. Second spring; 2206. Second through hole; 2207. Inflation piston; 3. Cleaning mechanism; 301. Hollow ring; 302. Telescopic cylinder; 303. Upper support cover; 304. Horizontal plate; 305. Lower support cover; 306. Short block; 307. Telescopic tube; 308. Conveying tube; 309. Annular sponge; 310. Hollow block; 311. Short tube; 312. Liquid outlet; 313. Second fixing rod; 314. Linkage plate; 315. Guide shell; 316. Positioning slot seat; 317. Liquid injection tube; 318. Rotating rod; 319. Torsion spring; 320. Pulling block; 321. Mounting rod; 322. End stop block; 323. Sliding block. Detailed Implementation

[0023] The details of the present invention can be more clearly understood by referring to the accompanying drawings and the description of specific embodiments. However, the specific embodiments of the present invention described herein are for illustrative purposes only and should not be construed as limiting the invention in any way. Under the teachings of this invention, those skilled in the art can conceive of any possible modifications based on the invention, all of which should be considered within the scope of the invention. It should be noted that when an element is referred to as being "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there may be an intervening element. The terms "mounted," "connected," and "connected" should be interpreted broadly, for example, they can refer to mechanical or electrical connections, or internal communication between two elements, and can be direct or indirect connections through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms according to the specific circumstances. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the specification of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0025] To address the technical problems of insufficient sealing protection of connectors, easy oxidation of pins, and reliance on manual cleaning in existing technologies, this invention provides a metal thin-film capacitor vacuum gauge that can effectively protect connectors, inhibit pin oxidation, simplify maintenance operations, improve the stability of vacuum gauge signal transmission and measurement accuracy, and reduce maintenance costs.

[0026] Please refer to the following for comprehensive information. Figures 1 to 13This application specification provides a metal thin-film capacitor vacuum gauge, which may include: a vacuum gauge body 1, the vacuum gauge body 1 having a connector 101 with pins inside; the connector 101 having a protection mechanism 2 and a cleaning mechanism 3; the protection mechanism 2 including: a housing 2104, an inflation sealing assembly 22, a negative pressure pumping assembly 21, an elastic reset assembly, and a stroke linkage transmission mechanism; the housing 2104 having a phase-isolated inflation chamber 21. 041 and suction chamber 21042; the inflatable sealing assembly 22 includes an annular sealing airbag disposed inside the connector 101, an inflation piston 2207 slidably disposed in the inflation chamber 21041, and an inflation pipe 2204 connecting the sealing airbag and the inflation chamber 21041; the negative pressure suction assembly 21 includes a suction piston 2114 slidably disposed in the suction chamber 21042, and an air inlet pipe 2109 connecting the interior of the connector 101 and the suction chamber 21042; the The stroke linkage transmission mechanism connects the inflatable sealing assembly 22, the negative pressure vacuum assembly 21, and the elastic reset assembly. When the connector is inserted into the plug 101, it performs a first-stage compression on the elastic reset assembly and drives the inflatable piston 2207 to compress the inflatable chamber 21041, generating positive pressure and inflating the gas in the inflatable chamber 21041 into the sealing airbag via the inflatable tube 2204. It also performs a second-stage compression on the elastic reset assembly and drives the vacuum piston 2114 to move, evacuating the plug 101. The cleaning mechanism 3 includes a storage drive unit for storing and driving the cleaning medium, a cleaning component adapted to the pin, and a delivery unit for conveying the cleaning medium to the cleaning component. The cleaning mechanism 3 works in conjunction with the stroke linkage transmission mechanism. When or after the connector is pulled out of the plug 101, the stroke linkage transmission mechanism drives the storage drive unit to supply the cleaning medium to the cleaning component via the delivery unit, causing the cleaning component to move relative to the pin.

[0027] The metal thin-film capacitive vacuum gauge provided in this application integrates a protection mechanism 2 and a cleaning mechanism 3 at the connector 101. The protection mechanism 2, through the mutually isolated inflation chamber 21041 and vacuum chamber 21042 within the housing 2104, utilizes a stroke linkage transmission mechanism and an elastic reset component. When the connector is inserted, it first performs a first-stage compression with the help of insertion power, driving the inflation piston 2207 to inflate the sealing airbag to achieve an airtight seal at the interface. Then, it performs a second-stage compression with the help of insertion power, driving the vacuum piston 2114 to extract air from the connector 101 to form a low-oxygen or near-vacuum environment, effectively inhibiting pin oxidation. The cleaning mechanism 3 is linked with the stroke linkage transmission mechanism. When or after the connector is pulled out, it uses the stroke linkage transmission mechanism to drive the storage drive unit to transport the cleaning medium to the cleaning component via the conveying unit, and drives the cleaning component to move relative to the pins, automatically wiping away the oxide layer and impurities. The entire system relies on the insertion and removal stroke to achieve full mechanical linkage, which not only ensures that the connector 101 is sealed with low oxygen, significantly reduces pin oxidation, stabilizes signal transmission and measurement accuracy, but also automatically cleans the pins, reduces maintenance, and extends service life. It has a reliable structure, low cost, and strong adaptability.

[0028] The present application will now be described in detail with reference to the accompanying drawings and embodiments.

[0029] Please refer to the following: Figure 1 and Figure 2 In this embodiment, the metal thin film capacitive vacuum gauge may include: a vacuum gauge body 1, a connector 101 disposed on the vacuum gauge body 1, a detection cavity disposed within the vacuum gauge body 1, and a metal thin film disposed within the detection cavity, etc.

[0030] The core working principle of a metal thin-film capacitive vacuum gauge is to measure vacuum by utilizing the elastic deformation and capacitance effect of a diaphragm. Its detection chamber contains a high-precision, highly elastic metal thin film, dividing the chamber into a measurement chamber connected to the vacuum system being measured and a reference chamber sealed with a fixed high vacuum. The metal thin film and the opposite fixed electrode form a parallel-plate capacitor. When the pressure of the vacuum system changes, a pressure difference is generated across the metal thin film, driving it to undergo micron-level elastic bending. This changes the distance between the plates of the metal thin film and the fixed electrode, causing a corresponding change in capacitance. By detecting the capacitance change and processing and calibrating the signal, the measured vacuum level can be obtained. This is existing technology and will not be elaborated further here.

[0031] In this embodiment, a protection mechanism 2 and a cleaning mechanism 3 are added to the connector 101 based on the above structure to solve the problem of easy oxidation of the pins and the impact on measurement accuracy.

[0032] Please refer to the following: Figure 3 , Figure 4 , Figure 7 and Figure 8 The protection mechanism 2 may include: a housing 2104, an inflatable sealing assembly 22, a negative pressure suction assembly 21, an elastic reset assembly, and a stroke linkage transmission mechanism, etc.

[0033] The stroke linkage transmission mechanism can adopt a linear reciprocating transmission structure, mainly including a plug-in abutment drive assembly and a transmission assembly. The transmission assembly further includes an active force transmission component, an intermediate linkage component, and a driven force transmission component. The active force transmission component is connected to the inflation piston 2207, and the driven force transmission component is connected to the suction piston 2114. The intermediate linkage component can simultaneously cooperate with the active force transmission component and the driven force transmission component to transmit motion and realize the direction of force. The plug-in abutment drive assembly is directly connected to the active force transmission component.

[0034] When the connector is inserted or removed, the external force generated by the insertion or removal first acts on the insertion and abutment drive component, and then is transmitted to the active force transmission component through the insertion and abutment drive component. Subsequently, it is transmitted to the driven force transmission component through the intermediate linkage component, and finally drives the inflation piston 2207 and the vacuum piston 2114 to complete the inflation and sealing and vacuuming actions, respectively. The entire transmission process is realized by a purely mechanical structure, without the need for an additional power source. The structure is simple, the transmission is reliable, and the response is rapid.

[0035] Furthermore, the active force transmission component can be an active rack 2107, the driven force transmission component can be a driven rack 2106, and the intermediate linkage component can be a linkage gear 2113. The linkage gear 2113 is rotatably mounted on the housing 2104. The active rack 2107 and the driven rack 2106 are respectively arranged on the radial sides of the linkage gear 2113 and both mesh with the linkage gear 2113.

[0036] When the driving rack 2107 moves vertically (e.g., vertically downward) under the drive of the plug-in abutment drive assembly, it will drive the linkage gear 2113 to rotate around its own axis through meshing. The linkage gear 2113 then drives the driven rack 2106 to move vertically in the opposite direction (e.g., vertically upward) through meshing, thereby realizing the conversion of motion direction and the transmission of power. The gear and rack transmission method has the characteristics of high transmission accuracy, stable transmission ratio and smooth motion. The radially symmetrical arrangement makes the force in the transmission process balanced, effectively reducing operating noise and jamming risk, and is suitable for the compact installation space in the housing 2104.

[0037] In the initial assembly state, the driving rack 2107 and the driven rack 2106 are spaced a certain distance apart in the vertical direction. This distance corresponds to the toothless idle stroke section of the driving rack 2107, and the length of the toothless section matches the piston stroke required for the sealing airbag to complete inflation. When the connector is inserted into the plug connector 101, the driving rack 2107 moves vertically downward synchronously with the plug and against the drive assembly. Within the range of the toothless idle stroke section, the driving rack 2107 does not mesh with the linkage gear 2113. Only the inflation piston 2207 is driven to complete the inflation of the sealing airbag, ensuring that the interface is completely sealed. When the active rack 2107 moves down to the toothed section and meshes with the linkage gear 2113, the linkage gear 2113 drives the driven rack 2106 to make a reverse linear motion through rotation and reversal, thereby driving the negative pressure suction assembly 21 to perform suction operation on the inner cavity of the connector 101. The empty stroke design realizes the timing control of sealing first and then suction, avoiding air leakage caused by suction in an unsealed state, and ensuring the stable formation of a low oxygen environment inside the connector 101.

[0038] Please refer to the following: Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 In one embodiment, the elastic reset assembly may include a first spring 2103 and a second spring 2205; the insertion abutment drive assembly may include a vertical rod 2101, a long plate 2102, a connecting rod 2105, a first fixing rod 2112, a hollow cylinder 2202, and a pressing rod 2203; multiple vertical rods 2101 are vertically arranged on the outside of the plug 101, multiple first springs 2103 are correspondingly sleeved on the vertical rods 2101, the long plate 2102 is arranged on both sides of the plug 101 and has mounting holes, it is movably sleeved on the vertical rods 2101 through the mounting holes and can slide up and down along the vertical rods 2101, the connecting rod 2105 is fixed on the long plate 2102, used to contact the inserted plug and play a limiting role, the first fixing rod 2112, the long plate 2102 is arranged on both sides of the plug 101 and has mounting holes, it is movably sleeved on the vertical rods 2101 through the mounting holes and can slide up and down along the vertical rods 2101, the connecting rod 2105 is fixed on the long plate 2102, used to contact the inserted plug and play a limiting role, the first fixing rod 2105, the long plate 2102 ... and is used to contact the inserted plug and play a limiting role, the first fixing rod 2105, the long plate The fixed rod 2112 is fixed on the long plate 2102 near the housing 2104. The lowering rod 2203 is fixedly connected to the surface of the inflation piston 2207. The hollow cylinder 2202 is movably sleeved on the lowering rod 2203 and can slide along the axial direction of the lowering rod 2203. The second spring 2205 is housed inside the hollow cylinder 2202. The active rack 2107 is fixedly installed on the outside of the hollow cylinder 2202 and extends in the same direction as the hollow cylinder 2202. The entire assembly transmits the insertion and extraction force through the sliding of the long plate 2102 along the vertical rod 2101. The two-stage compression action is executed step by step through the sliding cooperation between the hollow cylinder 2202 and the lowering rod 2203. The double springs provide the mechanism with a reset force to ensure that each component can automatically return to its position after the action is completed.

[0039] In one embodiment, the second spring 2205 has a greater rigidity than the first spring 2103, thereby further ensuring the sequential order of the two-stage compression actions. When the connector is inserted into the plug connector 101, the connector first contacts the connecting rod 2105, pushing the connecting rod 2105 to move the long plate 2102 downward, compressing the less rigid first spring 2103, completing the first stage of compression of the elastic reset assembly. At the same time, the first fixing rod 2112 moves downward with the long plate 2102, causing the hollow cylinder 2202 to move downward. At this time, the second spring 2205 remains in its initial state and pushes the pressing rod 2203 downward until the inflation piston 2207 moves to the limit position of the inflation chamber 21041, completing the inflation and sealing of the sealing airbag. After the inflation piston 2207 reaches the limit position... The connecting rod 2105 continues to drive the first fixed rod 2112 to move downwards, and the hollow cylinder 2202 begins to compress the second spring 2205, which has greater rigidity. The hollow cylinder 2202 slides axially relative to the pressing rod 2203 and drives the active rack 2107 to continue to descend, completing the secondary compression of the elastic reset assembly. At this time, the active rack 2107 meshes with the linkage gear 2113, and the linkage gear 2113 drives the driven rack 2106 to move upwards. The driven rack 2106 synchronously drives the suction piston 2114 to move upwards, so that a negative pressure is generated in the suction chamber 21042, thereby drawing out the air in the connector 101 through the air inlet pipe 2109. The rigidity graded design helps to further ensure that the sealing action is completed first, and then the vacuuming action is performed, avoiding air leakage and effectively inhibiting pin oxidation.

[0040] In this embodiment, the housing 2104 can be fixedly connected to the surface of the vacuum gauge body 1, and the housing 2104 has a gas filling chamber 21041 and a gas extraction chamber 21042 that are isolated from each other. Specifically, the housing 2104 can include a hollow structure, and the hollow structure is divided into different cavities by a partition to form the gas filling chamber 21041 and the gas extraction chamber 21042. Alternatively, it can be formed by integral molding of the gas filling chamber 21041 and the gas extraction chamber 21042 that are isolated from each other. In this application, no specific limitation is made.

[0041] In one embodiment, the number of inflation chambers 21041 is set to one and arranged in the middle of the housing 2104. Two suction chambers 21042 are symmetrically arranged on both sides of the inflation chamber 21041. The insertion and abutment drive assembly is set as one set, and the transmission assembly is set as two sets. The two sets of transmission assemblies are respectively symmetrically arranged on both sides of the insertion and abutment drive assembly.

[0042] The centrally located inflation chamber 21041 corresponds to the annular sealing airbag, ensuring uniform force during inflation and consistent airbag expansion and sealing. The symmetrically arranged suction chambers 21042 on both sides, together with two sets of transmission components, enable the synchronous movement of the suction pistons 2114 on both sides, making the negative pressure formation in the connector 101 more uniform and the suction efficiency higher. One set of connectors abuts against the drive components to synchronously drive the two sets of transmission components. The structure is compact, the force is balanced, there is no off-center load phenomenon, and the stability and reliability of the mechanism are improved.

[0043] Furthermore, a one-way inlet valve 2110 is installed on each of the two suction chambers 21042. One end of the inlet pipe 2109 is fixedly connected to the one-way inlet valve 2110, and the other end is fixedly connected to the connector 101. A one-way outlet valve 2108 is also installed on each of the two suction chambers 21042. The one-way outlet valve 2108 only allows the gas in the suction chamber 21042 to be discharged outward in one direction. Both the one-way inlet valve 2110 and the one-way outlet valve 2108 are installed at the bottom of the suction chamber 21042 and are lower than the lowest moving position of the suction piston 2114 (this lowest moving position is the limit position when the suction piston 2114 moves downward).

[0044] When the suction piston 2114 moves upward, the suction chamber 21042 forms a negative pressure. Air in the connector 101 enters the suction chamber 21042 through the air inlet pipe 2109 and the one-way air inlet valve 2110. When the suction piston 2114 moves downward, the suction chamber 21042 forms a positive pressure. Gas in the suction chamber 21042 is discharged through the one-way air outlet valve 2108. The one-way air inlet valve 2110 and the one-way air outlet valve 2108 prevent gas backflow and ensure a stable low-oxygen environment in the connector 101.

[0045] Please refer to the following: Figure 9 and Figure 10 In this embodiment, the cleaning mechanism 3 includes: a storage drive unit, a cleaning component, and a conveying unit, etc.

[0046] The conveying unit may include multiple hollow rings 301, multiple short tubes 311, and a conveying tube 308. The hollow rings 301 are disposed in the inner cavity of the connector 101, and the short tubes 311 are used to connect adjacent hollow rings 301. The conveying tube 308 is fixedly connected to the short tubes 311 to form a complete conveying path. The cleaning component is an annular sponge 309, which is disposed in the inner cavity of the hollow ring 301 and surrounds the needle. The inner cavity of the hollow ring 301 is provided with a liquid outlet hole 312. The cleaning medium can be conveyed into the hollow ring 301 through the conveying tube 308 and the short tubes 311, and then permeate into the annular sponge 309 through the liquid outlet hole 312.

[0047] When the hollow ring 301 moves up and down with the linkage transmission mechanism, it drives the annular sponge 309 to slide along the surface of the pin, thereby wiping and cleaning the pin. The annular sponge 309 fits the outer wall of the pin, cleaning without dead corners. The porous material can evenly absorb the cleaning medium, leaving no residue during the wiping process and achieving good cleaning effect.

[0048] In one embodiment, the storage drive unit may include two telescopic cylinders 302, each telescopic cylinder 302 having an upper support cover 303 mounted on its upper end and a lower support cover 305 mounted on its lower end. A horizontal plate 304 is fixedly connected between the two lower support covers 305. The liquid outlet ends of the two telescopic cylinders 302 are respectively connected to telescopic pipes 307, one end of which is connected to a delivery pipe 308, and the other end is connected to the telescopic cylinder 302. The stroke linkage transmission mechanism also includes two guide shells 315 fixed on the surface of the vacuum gauge body 1, a sliding block 323 slidably connected to the inner cavity of the guide shell 315, and an opening at both ends via the sliding block 323. The rotating rod 318 is rotatably connected to the hole, the end blocks 322 are fixed at both ends of the rotating rod 318, the positioning groove seat 316 is fixed on one side of the guide shell 315, the pulling block 320 is fixed in the middle of the rotating rod 318, the two torsion springs 319 are sleeved on the rotating rod 318, the second fixing rod 313 is fixed on the surface of the hollow cylinder 2202, the linkage plate 314 is fixed at one end of the second fixing rod 313, and the mounting rod 321 is fixed on the surface of the sliding block 323. The other end of the mounting rod 321 is fixedly connected to the horizontal plate 304. The positioning groove seat 316 is provided with a limiting groove to limit the circumferential rotation of the end blocks 322.

[0049] When the connector is pulled out of the plug connector 101, the hollow cylinder 2202 moves upward, causing the linkage plate 314 to push the pull block 320, so that the rotating rod 318 rotates against the elastic force of the torsion spring 319. The end stop block 322 is released from the limit groove. The linkage plate 314 continues to move upward, causing the sliding block 323 to slide upward along the guide shell 315. The telescopic cylinder 302 is compressed through the mounting rod 321 and the horizontal plate 304, so that the cleaning medium in the telescopic cylinder 302 is supplied to the annular sponge 309 through the telescopic tube 307 and the conveying unit. When the sliding block 323 slides to the top, the end stop block 322 is re-engaged into the limit groove. The torsion spring 319 resets and causes the rotating rod 318 to return to its original position, completing the supply of cleaning medium and driving the cleaning parts to wipe the needle feet. The whole system relies on mechanical linkage to achieve the cleaning action. The reset design of the torsion spring 319 ensures reliable operation cycle and realizes automatic cleaning.

[0050] In one specific embodiment, the protection mechanism 2 includes a housing 2104. One side of the housing 2104 is fixedly connected to the surface of the vacuum gauge body 1. Long plates 2102 are provided on both sides of the connector 101. Two connecting rods 2105 are fixedly connected to the surface of each long plate 2102. Two vertical rods 2101 are provided on one side of each long plate 2102. One end of each vertical rod 2101 extends through one side of the long plate 2102, and the other end is fixedly connected to the surface of the vacuum gauge body 1. A first spring 2103 is movably sleeved on the surface of each vertical rod 2101. Both ends of the first spring 2103 are fixedly connected to the surfaces of the long plate 2102 and the vacuum gauge body 1, respectively. Both sides of the inner cavity of 2104 (i.e., in the two suction chambers 21042) are provided with suction pistons 2114. The surfaces of the two suction pistons 2114 are fixedly connected with driven racks 2106. The surface of one of the long plates 2102 is fixedly connected with a first fixing rod 2112. By setting the suction pistons 2114, the air in the connector 101 can be drawn into the housing 2104, thereby reducing the oxygen inside the connector 101 and making the connector 101 reach a near-vacuum state. This can effectively reduce the contact between the pins and oxygen inside the connector 101, effectively inhibit pin oxidation, ensure the stability of the pins in transmitting electrical signals, and thus ensure the accuracy of the detection data.

[0051] One side of the driven rack 2106 meshes with the linkage gear 2113. One side of the linkage gear 2113 is provided with the driving rack 2107. One side of the housing 2104 is fixedly connected to two one-way air inlet valves 2110. One end of the one-way air inlet valve 2110 is fixedly connected to the air inlet pipe 2109. One end of the air inlet pipe 2109 is fixedly connected to the surface of the connector 101. By setting the one-way air inlet valve 2110, after the air in the connector 101 is extracted, the air in the housing 2104 will not flow back into the connector 101, ensuring the vacuum effect in the connector 101. This effectively reduces the contact between the connector 101 pins and oxygen, prevents the pins from oxidizing, and makes the pins more stable when transmitting signals, thus making the data detected by the vacuum gauge body 1 more accurate.

[0052] Both sides of the housing 2104 are fixedly connected to one-way vent valves 2108. The inner cavity of the housing 2104 is fixedly connected to an H-shaped partition 2116, which is used to divide the housing 2104 into different cavities. Both sides of the linkage gear 2113 are rotatably connected to short plates 2111. One end of the short plate 2111 is fixedly connected to the surface of the H-shaped partition 2116. The surface of the H-shaped partition 2116 has two first through holes 2115. By setting the one-way vent valves 2108, after the connector is removed from the plug connector 101, the upward movement of the active rack 2107 and the downward movement of the driven rack 2106 driven by the linkage gear 2113 allow the gas drawn into the housing 2104 to be discharged through the one-way vent valves 2108, thereby facilitating the next extraction of air from the plug connector 101, ensuring the vacuum inside the plug connector 101, and thus protecting the pins.

[0053] The inflatable sealing assembly 22 includes a sealing airbag whose shape can be adapted to the inner contour of the connector 101. For example, when the inner contour of the connector 101 is rectangular, the sealing airbag can be a rectangular ring airbag 2201. The rectangular ring airbag 2201 is fixedly embedded in the inner cavity of the connector 101. An inflation piston 2207 is provided in the inner cavity of the housing 2104. A pressing rod 2203 is fixedly connected to the surface of the inflation piston 2207. One end of the pressing rod 2203 extends through to the outside of the H-shaped partition 2116. An inflation tube 2204 is fixedly connected to one side of the inflation chamber 21041 of 104. One end of the inflation tube 2204 is fixedly connected to the surface of the rectangular ring airbag 2201. A hollow cylinder 2202 is movably sleeved on the surface of the pressure rod 2203. By setting the rectangular ring airbag 2201, after the connector is inserted into the connector 101, the connection can be sealed. After the connector 101 is evacuated, the vacuum inside the connector 101 can be guaranteed, effectively reducing the oxidation of the pins inside the connector 101 and effectively protecting the pins.

[0054] A second spring 2205 is fixedly connected to the inner cavity of the hollow cylinder 2202. One end of the second spring 2205 is fixedly connected to one end of the lower pressure rod 2203. One side of each of the two active racks 2107 is fixedly connected to the surface of the hollow cylinder 2202. A second through hole 2206 is opened on the surface of the H-shaped partition 2116.

[0055] By setting up the protection mechanism 2, the oxidation of the pins can be reduced. After the connector is inserted into the interface of the vacuum gauge connector 101, the oxygen in the interface is reduced by increasing the sealing at the interface and extracting the air in the interface. This allows the interface to be in a low-oxygen or vacuum-like state, reducing the contact between the pins and oxygen, thereby effectively reducing the oxidation of the pins, ensuring the integrity and stability of signal transmission, and thus ensuring the accuracy of the measurement.

[0056] Please refer to the following: Figure 11 and Figure 12 In a specific application scenario: when inserting the connector into the plug 101, the connector first contacts the surface of the connecting rod 2105. The connecting rod 2105 limits the insertion of the connector into the plug 101, allowing for a more stable insertion. Pushing the connector downwards further inserts it into the plug 101. As the connector is pushed downwards, the connecting rod 2105 moves downwards, causing the long plate 2102 to slide downwards on the vertical rod 2101, thus compressing the first spring 2103. Simultaneously, the first fixing rod 2112 drives the hollow cylinder 2202 downwards. Because the hollow cylinder 2202 is supported by the second spring 2205, and the second spring 2205 has high rigidity, the hollow cylinder 2202... 2. When moving downwards, the second spring 2205 is not directly compressed. Instead, the second spring 2205 pushes the lowering rod 2203, thereby causing the inflation piston 2207 to move within the inflation chamber 21041 of the housing 2104. This allows air from the inflation chamber 21041 to enter the inflation tube 2204, and then, through the inflation tube 2204, it enters the rectangular ring airbag 2201, causing the rectangular ring airbag 2201 to inflate. This effectively seals the circumference of the connector 101, ensuring a seal at the connection point after the connector is inserted into the connector 101. When the inflation piston 2207 moves to the bottom of the inflation chamber 21041, the connection... As the connecting rod 2105 continues to descend, the first fixed rod 2112 also continues to descend. Since the inflation piston 2207 has reached its lowest point and the lowering rod 2203 can no longer move downwards, the hollow cylinder 2202 compresses the second spring 2205, causing the hollow cylinder 2202 to slide on the lowering rod 2203. This causes the surface drive rack 2107 to continue descending, engaging with the linkage gear 2113. The drive rack 2107 drives the linkage gear 2113 to rotate on the short plate 2111. The rotation of the linkage gear 2113 causes the driven rack 2106 to move upwards, thereby driving the suction piston 2114 to move upwards, causing the suction chamber 21042 to produce air. By generating negative pressure, air can be extracted from the connector 101 through the air inlet pipe 2109 and the one-way air inlet valve 2110, allowing the air in the connector 101 to enter the air extraction chamber 21042. Subsequently, the air extraction piston 2114 moves downward to discharge the air in the air extraction chamber 21042 through the one-way air outlet valve 2108, bringing the connector 101 to a near-vacuum state. This prevents the pins inside the connector 101 from contacting oxygen and oxidizing, effectively protecting the pins and preventing the formation of an oxide layer on the pin surface. This ensures the stability of the pin electrical signal transmission, making the data transmission of the vacuum gauge body 1 more accurate and improving the detection effect of the vacuum gauge body 1.

[0057] Please refer to the following: Figure 8 , Figure 9 , Figure 10 and Figure 13 In one specific embodiment, the cleaning mechanism 3 may include a plurality of hollow rings 301 disposed in the inner cavity of the connector 101. Short blocks 306 are fixedly connected between the plurality of hollow rings 301, wherein a hollow block 310 is fixedly connected to the surface of two hollow rings 301. Short tubes 311 are fixedly connected between the plurality of hollow rings 301, wherein a delivery tube 308 is fixedly connected to the surface of two short tubes 311. The delivery tube 308 is fixedly embedded inside the long plate 2102 and the connecting rod 2105. An annular sponge 309 is fixedly connected to the inner cavity of the hollow ring 301, and a liquid outlet hole 312 is opened in the inner cavity of the hollow ring 301. Two upper support covers 303 are fixedly connected to the surface of the housing 2104. By setting the upper support covers 303, the telescopic cylinder 302 can be limited, so that when one end of the telescopic cylinder 302 moves, the other end does not move. The anhydrous ethanol added inside can be squeezed out from the telescopic cylinder 302 and finally sprayed onto the annular sponge 309. The annular sponge 309 can then use anhydrous ethanol to wipe the surface of the pins, thereby effectively cleaning the surface of the pins, ensuring the cleanliness of the pin surface, preventing the formation of an oxide layer, protecting the pins, and making them less likely to affect signal transmission, so that the vacuum gauge body 1 can detect more accurately.

[0058] A telescopic cylinder 302 is fixedly connected to the inner cavity of the upper support cover 303. A lower support cover 305 is fixedly connected to one end of the telescopic cylinder 302. A horizontal plate 304 is fixedly connected between the two lower support covers 305. The liquid outlet ends of the two telescopic cylinders 302 are fixedly connected to telescopic tubes 307. One end of each telescopic tube 307 is fixedly connected to the surface of the delivery tube 308. Two guide shells 315 are fixedly connected to the surface of the vacuum gauge body 1. By setting the horizontal plate 304, the two lower support covers 305 can be moved simultaneously, and the two telescopic cylinders 302 can be squeezed simultaneously, allowing the anhydrous ethanol in the telescopic cylinders 302 to be discharged. Thus, the surface of the needle can be cleaned with anhydrous ethanol, effectively eliminating the oxide layer, protecting the needle, and ensuring the accuracy of the detection data of the vacuum gauge body 1.

[0059] A sliding block 323 is slidably connected to the inner cavity of the guide shell 315. The sliding block 323 can be square. A rotating rod 318 is rotatably connected inside the two sliding blocks 323. Both ends of the rotating rod 318 are fixedly connected to end stops 322, which can also be square. A positioning groove seat 316 is fixedly connected to one side of each of the two guide shells 315. The cross-section of the positioning groove seat 316 can be U-shaped. The opening directions of the two positioning groove seats 316 can be opposite to each other. The surface of the rotating rod 318 is fixedly connected to... The pull block 320, through the setting of the positioning groove seat 316, can limit the end stop 322. After the end stop 322 enters the positioning groove seat 316, it can effectively prevent the rotating rod 318 from rotating, ensuring the stability of the upward movement of the rotating rod 318. This allows the lower support cover 305 to more stably squeeze the telescopic cylinder 302, allowing the anhydrous ethanol in the telescopic cylinder 302 to be stably discharged, and allowing the anhydrous ethanol to clean the surface of the pin, making the surface of the pin cleaner and ensuring the stability of the pin signal transmission.

[0060] Two torsion springs 319 are movably sleeved on the surface of the rotating rod 318. The two ends of the torsion springs 319 are fixedly connected to the surfaces of the sliding block 323 and the pulling block 320, respectively. A second fixing rod 313 is fixedly connected to the surface of the hollow cylinder 2202. A linkage plate 314 is fixedly connected to one end of the second fixing rod 313. Mounting rods 321 are fixedly connected to the surfaces of the two sliding blocks 323. One end of the mounting rod 321 is fixedly connected to the surface of the horizontal plate 304. An injection pipe 317 is fixedly connected to the surface of the telescopic cylinder 302. One end of the injection pipe 317 extends through to one side of the upper support cover 303.

[0061] By setting up the cleaning mechanism 3, the pins at the interface inside the connector 101 can be cleaned and protected. When the vacuum gauge is checked regularly, anhydrous ethanol can be added to the annular sponge 309 to wipe and clean the surface of the interface pins. Wiping the pins with anhydrous ethanol through the annular sponge 309 can effectively remove the oxide layer on the surface, ensuring the cleanliness of the pin surface and effectively preventing the oxidation of the pins, thus protecting them and ensuring the stability of electrical signal transmission, making the test data more accurate.

[0062] During use, the sealing cap on the surface of the injection tube 317 can be removed, and anhydrous ethanol can be injected into the telescopic cylinder 302 through the injection tube 317. Then, the sealing cap can be installed back on the surface of the injection tube 317. When the hollow cylinder 2202 slides downward, it will drive the second fixed rod 313 to descend. After the hollow cylinder 2202 moves to a certain position, the linkage plate 314 will contact the pulling block 320, thereby pressing down on the pulling block 320 to rotate the rotating rod 318, causing the torsion spring 319 to be twisted. At the same time, the pulling block 320 flips. When the linkage plate 314 continues to descend, it will move below the pulling block 320, relieving the pressure on the pulling block 320. The torsion spring 319 resets the pulling block 320 to a horizontal state. This is then applied to the vacuum gauge body 1. During inspection and cleaning, the plug can be first pulled out of the connector 101. Pulling the long plate 2102 upwards will move the hollow cylinder 2202 upwards. The hollow cylinder 2202 will cause the second fixed rod 313 to drive the linkage plate 314 upwards. Since the sliding block 323 has upward movement space and the torsion spring 319 is relatively rigid, the linkage plate 314 can push the pulling block 320 upwards, causing the rotating rod 318 to drive the sliding block 323 to slide within the guide shell 315. At the same time, the end stop 322 can be allowed to enter the positioning slot 316 to ensure the stable movement of the rotating rod 318. The mounting rod 321 and the horizontal plate 304 will drive the two lower support covers 305 to move, allowing the two telescopic cylinders 302 to shorten, thereby providing a cleaning solution for the inside of the telescopic cylinders 302. Anhydrous ethanol is squeezed to allow it to enter the telescopic tube 307. The telescopic tube 307 then transports it into the conveying tube 308. The conveying tube 308 and short tube 311 then transport the anhydrous ethanol to a hollow ring 301 on one side. The hollow block 310 and the short tube 311 on the other side then transport it into multiple hollow rings 301 on the other side. The anhydrous ethanol can then be allowed to soak the annular sponge 309 through the outlet hole 312. As the sponge moves on the hollow cylinder 2202, the first fixed rod 2112, the long plate 2102, and the connecting rod 2105 drive several hollow rings 301 simultaneously. The annular sponge 309 then wipes and cleans the pins inside the connector 101. This process cleans and protects the pins, reducing the presence of oxide layers. Simultaneously, when the sliding block 323 contacts the top of the inner cavity of the guide shell 315, the sliding block 323 is limited, and the end stop 322 moves out of the positioning slot 316. The linkage plate 314, driven by the second fixed rod 313 and the hollow cylinder 2202, can push the pulling block 320 upwards, causing the rotating rod 318 to rotate. This moves the linkage plate 314 above the pulling block 320, compressing the telescopic cylinder 302. This does not affect the continued upward movement of the hollow ring 301 to clean the pin surface, effectively protecting the pins and ensuring stable signal transmission, thus guaranteeing the accuracy of data detection in the vacuum gauge body 1.

[0063] It should be noted that when the connector is pulled out of the plug 101, the elastic reset components such as the first spring 2103 and the second spring 2205 release elastic potential energy, driving the long plate 2102 to automatically lift upwards. During the upward movement of the long plate 2102, it simultaneously drives the hollow cylinder 2202, the second fixed rod 313, the linkage plate 314, and other components to move as a whole, thereby triggering the entire stroke linkage transmission mechanism to operate in tandem. When the storage drive unit stores cleaning media, it can automatically start the cleaning operation. The entire cleaning process relies on pure mechanical structure transmission, without manual intervention or additional power and control components such as motors, air pumps, and electronic control modules. It can complete a series of actions such as cleaning media delivery, cleaning media wetting of cleaning components, and reciprocating wiping of pins by the cleaning components by simply using the stroke changes of the connector insertion and removal. The actions are connected smoothly and respond quickly, achieving seamless linkage between insertion / removal and cleaning.

[0064] Furthermore, maintenance personnel can manually lift the long plate 2102 at any time, based on actual operating conditions such as equipment runtime, on-site dust and humidity, and the severity of oxide layer and impurity accumulation on the pin surface, to actively drive the stroke linkage transmission mechanism to reciprocate and initiate the cleaning process independently. This cleaning mechanism 3 has both automatic and manual operating modes. The automatic mode can achieve routine cleaning based on normal plugging and unplugging actions, suitable for continuous equipment operation scenarios. The manual mode can achieve deep cleaning at fixed points and times, adapting to diverse maintenance scenarios such as routine equipment inspections, periodic deep maintenance, and temporary fault checking, effectively balancing the efficiency of automated operation with the flexibility of manual operation. The two modes complement each other, continuously cleaning and protecting the pins, minimizing the impact of oxidation and dirt accumulation on signal transmission, simplifying maintenance processes, reducing labor costs, and effectively extending the service life of the connector 101 and pins.

[0065] This invention innovatively integrates three major functions—airtight sealing, negative pressure oxygen reduction, and mechanical cleaning—into the connector 101 structure. The entire process employs a purely mechanical linkage design, requiring no motors, electrical controls, or additional energy. It features a compact structure, high reliability, and low failure rate. By suppressing pin oxidation at the source, blocking the oxidation environment during the process, and removing oxidation impurities afterward, it forms a full-cycle protection system, significantly improving pin conductivity stability. This ensures long-term stability of vacuum gauge signal transmission quality and measurement accuracy, greatly reducing maintenance costs associated with manual cleaning and component replacement, and extending equipment lifespan. It is particularly suitable for long-term continuous operation scenarios such as industrial vacuum systems, semiconductor manufacturing, and precision testing.

[0066] The various embodiments described in this specification are presented in a progressive manner, with each embodiment focusing on its differences from the others. Similar or identical parts between embodiments can be referred to interchangeably. The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made according to the spirit and essence of the present invention should be included within the scope of protection of the present invention.

Claims

1. A metal thin-film capacitance vacuum gauge, the metal thin-film capacitance vacuum gauge comprising: A vacuum gauge body, wherein the vacuum gauge body is provided with a connector and pins are provided inside the connector; characterized in that: the connector is provided with a protection mechanism and a cleaning mechanism; The protective mechanism includes: a housing, an inflation sealing assembly, a negative pressure suction assembly, an elastic reset assembly, and a stroke linkage transmission mechanism; the housing has an isolated inflation chamber and a suction chamber; the inflation sealing assembly includes an annular sealing airbag disposed inside the connector, an inflation piston slidably disposed in the inflation chamber, and an inflation tube connecting the sealing airbag and the inflation chamber; the negative pressure suction assembly includes a suction piston slidably disposed in the suction chamber and an air inlet tube connecting the inside of the connector and the suction chamber; the stroke linkage transmission mechanism connects the inflation sealing assembly, the negative pressure suction assembly, and the elastic reset assembly, and is used to perform a first-stage compression on the elastic reset assembly and drive the inflation piston to compress the inflation chamber to generate positive pressure when the connector is inserted into the connector, so that the gas in the inflation chamber is filled into the sealing airbag through the inflation tube; and to perform a second-stage compression on the elastic reset assembly and drive the suction piston to move, thereby evacuating the connector; The cleaning mechanism includes: a storage drive unit for storing and driving the cleaning medium, a cleaning component adapted to the pin, and a delivery unit for delivering the cleaning medium to the cleaning component; the cleaning mechanism is linked with the stroke linkage transmission mechanism, and when or after the connector is pulled out of the plug, the stroke linkage transmission mechanism drives the storage drive unit to supply the cleaning medium to the cleaning component via the delivery unit, and drives the cleaning component to move relative to the pin.

2. The metal thin-film capacitance vacuum gauge as described in claim 1, characterized in that, The stroke linkage transmission mechanism is a linear reciprocating transmission structure, including: a plug-in abutment drive assembly and a transmission assembly. The transmission assembly includes: an active force transmission component, an intermediate linkage component and a driven force transmission component. The active force transmission component is drivenly connected to the inflation piston, the driven force transmission component is drivenly connected to the suction piston, and the intermediate linkage component can be drivenly engaged with the active force transmission component and the driven force transmission component respectively. The plug-in abutting drive assembly is connected to the active force transmission component. The plugging and pulling force generated by the plugging and pulling of the connector can be transmitted to the active force transmission component through the plug-in abutting drive assembly, and then to the driven force transmission component through the intermediate linkage component.

3. The metal thin-film capacitance vacuum gauge as described in claim 2, characterized in that, The active force transmission component includes an active rack, the driven force transmission component includes a driven rack, and the intermediate linkage component includes a linkage gear. The linkage gear is rotatably mounted on the housing, and the active rack and the driven rack are located on opposite radial sides of the linkage gear.

4. The metal thin-film capacitive vacuum gauge as described in claim 3, characterized in that, In the initial assembly state, the active rack and the driven rack are spaced a predetermined distance apart in the vertical direction. The predetermined distance is the toothless free travel section of the active rack. When the connector is inserted into the plug, the active rack can move vertically in a straight line along with the plug-in abutting drive assembly. When the distance the active rack moves downward is less than or equal to the toothless free travel section, the inflation sealing assembly completes the inflation of the sealing airbag. When the active rack meshes with the linkage gear, the rotation of the linkage gear drives the driven rack to move in the opposite direction in a straight line, and the negative pressure suction assembly evacuates the inner cavity of the plug.

5. The metal thin-film capacitive vacuum gauge as described in claim 4, characterized in that, The elastic reset assembly includes a first spring and a second spring, and the plug-in abutment drive assembly includes a vertical rod, a long plate, a connecting rod, a first fixing rod, a hollow cylinder, and a downward pressing rod; There are multiple vertical rods, which are disposed on the outside of the connector; there are multiple first springs, which are correspondingly sleeved on the vertical rods. The long plate is disposed on both sides of the connector, and the long plate is provided with mounting holes, through which it is movably sleeved on the vertical rod; The connecting rod is fixed to the long plate and is used to limit the contact of the joint. The first fixing rod is fixed to the long plate near the side of the housing; The pressure rod is fixed to the surface of the inflation piston; The hollow cylinder is movably sleeved on the lower pressure rod; The second spring is housed inside the hollow cylinder, and the active rack is mounted on the outside of the hollow cylinder and extends in the same direction as the hollow cylinder.

6. The metal thin-film capacitive vacuum gauge as described in claim 5, characterized in that, The second spring has a higher rigidity than the first spring. When the connector is inserted into the plug, the connector first contacts the connecting rod. The connecting rod drives the long plate to move downward, compressing the first spring and completing the first stage of compression. At the same time, the first fixed rod drives the hollow cylinder to move downward, and the second spring pushes the lowering rod downward in its initial state until the inflation piston moves to its limit position, completing the inflation of the sealing airbag. After the inflation piston moves to its limit position, the connecting rod drives the first fixed rod to continue moving downward. The hollow cylinder compresses the second spring, and the hollow cylinder slides axially relative to the lowering rod, driving the active rack to continue descending for the second stage of compression. The active rack meshes with the linkage gear, and the linkage gear drives the driven rack to move upward. The driven rack synchronously drives the suction piston to move upward, generating negative pressure in the suction chamber. The air in the plug is drawn out through the air inlet pipe.

7. The metal thin-film capacitive vacuum gauge as described in claim 2, characterized in that, The number of inflation chambers is one, which is located in the middle of the housing; the number of air extraction chambers is two, which are symmetrically arranged on both sides of the inflation chamber; the number of plug-in abutment drive components is one set; the number of transmission components is two sets, which are symmetrically arranged on both sides of the plug-in abutment drive components.

8. The metal thin-film capacitance vacuum gauge as described in claim 7, characterized in that, Each of the two suction chambers is provided with a one-way air inlet valve. One end of the air inlet pipe is fixedly connected to the one-way air inlet valve, and the other end of the air inlet pipe is fixedly connected to the connector. Each of the two suction chambers is also provided with a one-way air outlet valve. The one-way air outlet valve is used to discharge the gas in the suction chamber in one direction. Both the one-way air inlet valve and the one-way air outlet valve are located at the bottom of the suction chamber and are lower than the lowest position of the suction piston.

9. The metal thin-film capacitive vacuum gauge as described in claim 5, characterized in that, The conveying unit includes multiple hollow rings, multiple short tubes, and a conveying tube. The hollow rings are disposed in the inner cavity of the connector, the short tubes are used to connect two adjacent hollow rings, and the conveying tube is fixedly connected to the short tubes. The cleaning component includes an annular sponge, which is disposed in the inner cavity of the hollow ring and surrounds the needle. The inner cavity of the hollow ring has a liquid outlet hole, and the cleaning medium can reach the annular sponge through the delivery pipe, the short pipe, and the hollow ring.

10. The metal thin-film capacitive vacuum gauge as described in claim 9, characterized in that, The storage drive unit includes two telescopic cylinders. Each telescopic cylinder has an upper support cover at its upper end and a lower support cover at its lower end. A horizontal plate connects the two lower support covers. The liquid outlet ends of the two telescopic cylinders are respectively fixedly connected to telescopic pipes. One end of the telescopic pipe is connected to the conveying pipe, and the other end of the telescopic pipe is connected to the telescopic cylinder. The stroke linkage transmission mechanism further includes: two guide shells fixedly connected to the surface of the vacuum gauge body; sliding blocks slidably connected to the inner cavity of the guide shells, each of the sliding blocks having an opening; a rotating rod rotatably connected to the two sliding blocks through the openings, with end blocks fixedly connected to both ends of the rotating rod; positioning slots fixedly connected to one side of the two guide shells, each positioning slot having a limiting groove for limiting only the circumferential rotation of the end blocks; a pulling block fixedly connected to the middle of the rotating rod; two torsion springs movably sleeved on the surface of the rotating rod, each torsion spring having its ends fixedly connected to the surfaces of the sliding block and the pulling block, respectively; a second fixing rod fixedly connected to the surface of the hollow cylinder; a linkage plate fixedly connected to one end of the second fixing rod; and a mounting rod fixedly connected to the surface of the sliding block, one end of the mounting rod being fixedly connected to the surface of the horizontal plate.

Images