In-plane inlet and outlet gas micro-nano piezoelectric gas pump

Abstract

The application relates to the field of piezoelectric pumps, in particular to a micro-nano piezoelectric air pump with air inlet and outlet on the same surface, which comprises a rack mechanism, an oil tank, an engine, a battery assembly and a silencer which are sequentially installed on a rack body, a moving piece located outside the rack body, a shell piece arranged outside the oil tank, a control piece arranged on the top of the shell piece and a tool box installed on one side of the shell piece. The piezoelectric ceramic prepared by adopting the micro-nano process is combined with the laser welding assembly mode instead of the adhesive assembly mode, so that the reliability risk of the aging of the adhesive layer and the decrease of the bonding force in the high-temperature, high-humidity and low-temperature environment is avoided, the air tightness and long-term consistency between the layers are ensured, and the durability of the product under the harsh working conditions such as vibration and mechanical impact is remarkably improved. Thirdly, the air inlet, the air outlet and the air exhaust are completed on the same structure surface, the flow path layout and the number of parts are simplified, and the assembly complexity and the cost are reduced.

Description

Technical Field

[0001] This invention relates to the field of piezoelectric pumps, and in particular to a micro / nano piezoelectric pump with air inlet and outlet on the same side. Background Technology

[0002] Currently, the products of the blood pressure monitoring piezoelectric pump are mainly used in human blood pressure and heart rate detection and smart wearable scenarios. The piezoelectric pump makes portable health monitoring possible and has a large market demand and industry prospects.

[0003] Existing technologies suffer from a core flaw: unstable flow rate and back pressure. This directly leads to errors in blood pressure measurement and results in extremely high requirements for material properties and process assembly consistency, leading to low yield and production efficiency. Specifically, the vibration gaps between the upper and lower flow paths and valve gaps often require subsequent adjustments for control, making it difficult to guarantee consistency. Existing structures rely heavily on different types of adhesives for pressure-holding and curing. Under harsh environments such as high temperature, low temperature, and high humidity, the adhesives are prone to significant decreases in bonding strength, causing uncontrollable changes in critical gaps and resulting in drastic fluctuations in back pressure and flow rate. Furthermore, existing technologies cannot meet the reliability requirements of vibration and mechanical shock tests. Uncontrollable changes in gaps can also cause backflow and crosstalk of inlet and outlet gases, generating howling noise and severely affecting the user experience and measurement accuracy. To address this, a micro-nano pressure electric pump with coplanar inlet and outlet is proposed. Summary of the Invention

[0004] In view of the problems existing in the above or prior art, the present invention is proposed.

[0005] Therefore, the object of the present invention is to provide a micro-nano pressure electric pump with air inlet and outlet on the same side.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution: including, The flow path plate mechanism includes an upper metal plate, a valve diaphragm layer located at the bottom of the upper metal plate, a lower metal plate located at the bottom of the valve diaphragm layer, an air inlet, an air outlet, and a vent hole simultaneously formed on the upper and lower metal plates, a valve hole formed on the surface of the valve diaphragm layer, and an upper cavity disposed on the ground of the upper metal plate; and, The vibration mechanism includes a metal substrate disposed at the bottom of the lower metal plate, a piezoelectric ceramic being mounted on the inner side of the surface of the metal substrate, a lower base being disposed at the bottom of the metal substrate, and a lower cavity being formed on the surface of the lower base.

[0007] As a preferred embodiment of the micro-nano pressure electric pump with air inlet and outlet on the same side of the present invention, the flow path plate mechanism and the vibration mechanism are assembled by laser welding to ensure structural sealing.

[0008] As a preferred embodiment of the micro-nano pressure electric pump with air inlet and outlet on the same side of the present invention, the air inlet holes are opened at the four corners of the upper metal plate and the lower metal plate, and the air inlet holes are arranged in a circular array.

[0009] As a preferred embodiment of the micro-nano pressure electric pump with air inlet and outlet on the same side of the present invention, the air outlet is opened at the center of the surface of the upper metal plate and the lower metal plate.

[0010] As a preferred embodiment of the micro-nano pressure electric pump with air inlet and outlet on the same side of the present invention, wherein the valve hole, air inlet hole and air outlet hole are all staggered in pairs.

[0011] As a preferred embodiment of the micro-nano pressure electric pump with air inlet and outlet on the same side of the present invention, the number and position of the air inlet holes of the upper metal plate and the four corner valve holes of the valve diaphragm layer after stacking correspond to the number and position of the air inlet holes of the lower metal plate.

[0012] As a preferred embodiment of the micro-nano pressure electric pump with air inlet and outlet on the same side of the present invention, the number and position of the air outlet holes of the lower metal plate and the central valve hole of the valve diaphragm layer after stacking correspond to the number and position of the air outlet holes of the upper metal plate.

[0013] As a preferred embodiment of the micro-nano pressure electric pump with air inlet and outlet on the same side of the present invention, the valve diaphragm layer is supported by a flexible material with a certain degree of extensibility.

[0014] As a preferred embodiment of the micro-nano pressure electric pump with air inlet and outlet on the same side of the present invention, the air inlet, air outlet and air vent are all located on the upper metal plate.

[0015] As a preferred embodiment of the micro-nano pressure electric pump with air inlet and outlet on the same side of the present invention, wherein: a slot is provided at the bottom of the upper metal layer for the valve diaphragm layer to be displaced.

[0016] The beneficial effects of the micro-nano pressure electric pump with air inlet and outlet on the same side of the present invention are as follows: Through the multi-layer staggered stacking design of air inlet, air outlet, air vent and valve hole between the upper metal plate, valve diaphragm layer and lower metal plate, the physical structure of the one-way valve is self-locking, which fundamentally eliminates the gas backflow, crosstalk and whistling problems caused by the traditional solution relying on gap control, and greatly improves the airflow stability and back pressure stability. Secondly, the piezoelectric ceramics prepared by micro-nano technology, combined with the assembly method of laser welding instead of adhesives, not only avoid the reliability risks of adhesive layer aging and reduced bonding strength under high temperature, high humidity and low temperature environments, but also ensure the airtightness and long-term consistency between layers, significantly improving the durability of the product under harsh working conditions such as vibration and mechanical shock. Intake, exhaust, and venting are all completed on the same structural surface, which simplifies the flow path layout and the number of parts, reduces assembly complexity and cost, and allows for flexible control of back pressure and flow rate by adjusting parameters such as valve diaphragm material, thickness, orifice diameter, and cavity size, making it suitable for various portable medical scenarios such as blood pressure monitoring, heart rate detection, and smart wearables. Finally, the combination of flexible diaphragm material and staggered perforation structure enables the valve to open and close rapidly and reliably under high-frequency ceramic vibration, ensuring efficient air intake and exhaust, and achieving adaptive closure under venting conditions. This comprehensively improves the flow stability, environmental adaptability, mass production yield, and reliability of the piezoelectric pump. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall structure of a micro-nano pressure electric pump with air inlet and outlet on the same side.

[0019] Figure 2 This is a schematic diagram of the exploded structure of a micro / nano pressure electric pump with air entering and exiting from the same side.

[0020] Figure 3 This is a schematic diagram of the bottom structure of the upper metal plate in a micro / nano pressure electric pump with air inlet and outlet on the same side.

[0021] In the diagram: 100, flow path plate mechanism; 101, upper metal plate; 102, valve diaphragm layer; 103, lower metal plate; 104, air inlet; 105, air outlet; 106, vent hole; 107, valve hole; 108, upper cavity; 200, vibration mechanism; 201, metal substrate; 202, piezoelectric ceramic; 203, lower base; 204, lower cavity. Detailed Implementation

[0022] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0023] Example Reference Figures 1-3 This is one embodiment of the present invention, which provides a micro-nano pressure electric pump with air inlet and outlet on the same side, which includes a flow path plate mechanism 100 and a vibration mechanism 200.

[0024] Specifically, the flow path plate mechanism 100 includes an upper metal plate 101, a valve diaphragm layer 102 located at the bottom of the upper metal plate 101, and a lower metal plate 103 located at the bottom of the valve diaphragm layer 102. An air inlet 104, an air outlet 105, and a vent 106 are simultaneously provided on the upper metal plate 101 and the lower metal plate 103. A valve hole 107 is provided on the surface of the valve diaphragm layer 102, and a slotted structure is also provided on the bottom surface of the upper metal plate as an upper cavity 108.

[0025] The vibration mechanism 200 includes a metal substrate 201 disposed at the bottom of the lower metal plate 103, and a piezoelectric ceramic 202 fabricated using micro-nano processes is mounted on the inner side of the surface of the metal substrate 201. This micro-nano piezoelectric ceramic 202 employs a P4 or P8 ceramic system with high Qm value and low dielectric loss. High consistency control of ceramic thickness, electrode pattern, and diameter is achieved through precision micro-nano fabrication technology, thereby ensuring stable and repeatable displacement output under the same driving voltage.

[0026] Furthermore, the air inlets 104 are located at the four corners of the upper metal plate 101 and the lower metal plate 103, arranged in a circular array, while the air outlets 105 are located at the center of the surfaces of the upper metal plate 101 and the lower metal plate 103. The valve holes 107, air inlets 104, and air outlets 105 are all staggered, forming a typical staggered one-way valve structure. When the piezoelectric ceramic 202 vibrates downward, the valve diaphragm layer 102 is displaced downward under the action of the air pressure difference, and the airflow enters the valve diaphragm layer 102 through the air inlet 104 of the upper metal plate 101, and then enters the lower cavity 204 through the valve hole 107; when the piezoelectric ceramic 202 vibrates upward, the valve diaphragm layer 102 adheres upward to the bottom surface of the upper metal plate 101, and the valve holes 107 and air inlets 104 are closed in a staggered manner, effectively preventing the airflow from flowing in the opposite direction. This structure fundamentally solves the problems of gas backflow, crosstalk, and whistling caused by improper clearance control in traditional pneumatic electric pumps, and significantly improves airflow stability and back pressure stability.

[0027] After the air inlet 104 of the upper metal plate 101 is stacked with the valve holes 107 at the four corners of the valve diaphragm layer 102, their positions and numbers correspond to the air inlet 104 of the lower metal plate 103. After the air outlet 105 of the lower metal plate 103 is stacked with the valve hole 107 at the center of the valve diaphragm layer 102, their positions and numbers correspond to the air outlet 105 of the upper metal plate 101. The valve diaphragm layer 102 is supported by a flexible material with a certain degree of extensibility, specifically selected from flexible polymer materials such as PET, PI, PU, ​​silicone rubber, silicone, or EPDM. By precisely matching the hole positions and diameters of each layer, and combining the Young's modulus and thickness adjustment of the valve diaphragm material, the one-way valve achieves rapid opening and reliable closing under high-frequency ceramic vibration, ensuring efficient gas filling during the intake stage and stable output during the exhaust stage, while also possessing adaptive closing capability against instantaneous pressure shocks under venting conditions.

[0028] Preferably, the air inlet 104, air outlet 105 and air vent 106 are all located on the upper metal plate 101, so that air inlet, air outlet and air vent are completed on the same structural surface, which greatly simplifies the flow path layout and assembly complexity.

[0029] A lower base 203 is provided at the bottom of the metal substrate 201, and a lower cavity 204 is formed on the surface of the lower base 203, creating a complete gas compression and release space. When the micro-nano piezoelectric ceramic 202 vibrates downward, the internal and external pressure difference opens the air inlet channel between the upper metal plate 101 and the valve diaphragm layer 102. Gas enters the slots around the metal substrate 201 through the upper metal plate 101 and the upper cavity 108 and flows into the lower cavity 204. At the same time, the valve diaphragm on the outlet side moves downward, and gas flows from the valve hole 107 to the inflation port, while the valve diaphragm on the deflation side remains closed. When the micro-nano piezoelectric ceramic 202 vibrates upward, the edges of the metal substrate 201 and the upper cavity 108 close, and the valve diaphragms at the inlet and outlet ends close synchronously to prevent gas backflow, thereby avoiding flow fluctuations and whistling phenomena caused by interference between the incoming and outgoing gases. During deflation, the instantaneous pressure at the outlet causes the valve diaphragm to close, and the impact pressure pushes the valve diaphragm downward, allowing the airflow to exit through the deflation hole 106, achieving controllable pressure relief.

[0030] The flow path plate mechanism 100 and the vibration mechanism 200 are assembled using laser welding between their respective layers to ensure a sealed structure. Compared to traditional adhesive pressure-curing methods, laser welding not only eliminates the problem of decreased adhesion of the adhesive layer under high temperature, low temperature, and high temperature and humidity environments, but also avoids changes in critical gaps caused by adhesive layer aging and creep, thus eradicating reliability risks related to back pressure and flow drift. Simultaneously, the laser welding process reduces assembly consistency requirements and improves mass production efficiency and yield. By adjusting the specifications and thickness of the metal material, the number, diameter, and spacing of holes, the cavity size, the valve diaphragm material and thickness, the ceramic selection, and the micro-nano processing parameters, the back pressure and flow rate of the pump can be flexibly controlled, making it suitable for diverse applications such as portable blood pressure monitoring, heart rate monitoring, and smart wearable devices.

[0031] In use, the piezoelectric ceramic 202, fabricated using micro-nano technology, generates high-frequency alternating downward and upward displacements under electrical signal excitation. When the piezoelectric ceramic 202 vibrates downward, the metal substrate 201 moves downward synchronously, creating a negative pressure inside the upper cavity 108. External gas enters the valve diaphragm layer 102 through the air inlets 104 arranged in a circular array at the four corners of the upper metal plate 101. Because the valve orifice 107 and the air inlet 104 are misaligned and the valve diaphragm layer 102 is made of flexible material, the valve diaphragm layer 102 displaces downward under the action of the pressure difference, and the gas passes through the valve orifice. 107 enters the lower cavity 204, and at the same time, the outlet valve diaphragm moves downward to make the gas flow from the valve hole 107 in the center of the valve diaphragm layer 102 to the outlet. The venting valve diaphragm remains closed. When the piezoelectric ceramic 202 vibrates upward, the metal substrate 201 resets upward and closes with the edge of the upper cavity 108. At this time, the inlet valve diaphragm adheres upward to the bottom surface of the upper metal plate 101 to close the inlet channel. The outlet valve diaphragm also closes to prevent gas backflow. When venting, the instantaneous pressure at the outlet causes the valve diaphragm to close and pushes the valve diaphragm downward. The airflow flows out through the vent hole 106. By alternating vibrations of the piezoelectric ceramic 202, combined with the multi-layered staggered stacking structure of the inlet hole 104, outlet hole 105, vent hole 106 and valve hole 107 between the metal plate 101, valve diaphragm layer 102, and lower metal plate 103, as well as the laser welding sealing assembly between each layer, unidirectional gas intake, directional exhaust and controllable pressure relief are achieved, thereby obtaining stable and continuous flow and back pressure output.

[0032] In summary, through the multi-layered staggered stacking design of the air inlet 104, air outlet 105, air vent 106, and valve hole 107 between the upper metal plate 101, valve diaphragm layer 102, and lower metal plate 103, the physical structure of the one-way valve achieves self-locking, fundamentally eliminating the gas backflow, crosstalk, and whistling problems caused by the gap control reliance of traditional solutions, and significantly improving airflow stability and back pressure stability. Secondly, the piezoelectric ceramic 202 prepared using micro-nano technology, combined with the assembly method of laser welding instead of adhesives, not only avoids the reliability risks of adhesive layer aging and reduced bonding strength under high temperature, high humidity, and low temperature environments, but also ensures the airtightness and long-term consistency between layers, significantly improving the product's durability under harsh conditions such as vibration and mechanical shock. Third, the intake, exhaust, and venting are all completed on the same structural surface, simplifying the flow path layout and reducing the number of parts, thus lowering assembly complexity and cost. Furthermore, by adjusting parameters such as the valve diaphragm material, thickness, orifice diameter, and cavity size, back pressure and flow rate can be flexibly controlled, adapting to various portable medical scenarios such as blood pressure monitoring, heart rate detection, and smart wearables. Finally, the combination of the flexible valve diaphragm material and the staggered perforation structure ensures rapid and reliable valve opening and closing under high-frequency ceramic vibration. This guarantees efficient intake and exhaust while achieving adaptive closure under venting conditions, thereby comprehensively improving the flow stability, environmental adaptability, mass production yield, and operational reliability of the piezoelectric pump.

[0033] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A micro-nano piezoelectric gas pump with in-plane inlet and outlet, characterized in that: include, The flow path plate mechanism (100) includes an upper metal plate (101), a valve diaphragm layer (102) located at the bottom of the upper metal plate (101), a lower metal plate (103) located at the bottom of the valve diaphragm layer (102), an air inlet (104), an air outlet (105), and a vent (106) simultaneously opened on the upper metal plate (101) and the lower metal plate (103), a valve hole (107) opened on the surface of the valve diaphragm layer (102), and an upper cavity (108) disposed on the ground of the upper metal plate; and, The vibration mechanism (200) includes a metal substrate (201) disposed at the bottom of the lower metal plate (103), a piezoelectric ceramic (202) is installed on the inner side of the surface of the metal substrate (201), a lower base (203) is disposed at the bottom of the metal substrate (201), and a lower cavity (204) is opened on the surface of the lower base (203).

2. The in-plane gas-in gas micro / nano piezoelectric pump of claim 1, wherein: The flow path plate mechanism (100) and the vibration mechanism (200) are assembled by laser welding to ensure structural sealing.

3. The in-plane gas-in gas micro / nano piezoelectric pump of claim 2, wherein: The air inlets (104) are located at the four corners of the upper metal plate (101) and the lower metal plate (103), and the air inlets (104) are arranged in a circular array.

4. The micro / nano pressure electric pump with coplanar air inlet and outlet as described in claim 3, characterized in that: The vent (105) is located at the center of the surface of the upper metal plate (101) and the lower metal plate (103).

5. The micro / nano pressure electric pump with coplanar air inlet and outlet as described in claim 4, characterized in that: The valve hole (107), air inlet (104) and air outlet (105) are all staggered.

6. The micro / nano pressure electric pump with coplanar air inlet and outlet as described in claim 5, characterized in that: The number and position of the air inlet (104) of the upper metal plate (101) and the four corner valve holes (107) of the valve membrane layer (102) after stacking correspond to the number and position of the air inlet (104) of the lower metal plate (103).

7. The micro / nano pressure electric pump with coplanar air inlet and outlet as described in claim 6, characterized in that: The number and position of the air vents (105) of the lower metal plate (103) and the central valve hole (107) of the valve membrane layer (102) after stacking correspond to the number and position of the air vents (105) of the upper metal plate (101).

8. The micro / nano pressure electric pump with coplanar air inlet and outlet as described in claim 7, characterized in that: The valve diaphragm layer (102) is supported by a flexible material and has a certain degree of extensibility.

9. The micro / nano pressure electric pump with coplanar air inlet and outlet as described in claim 8, characterized in that: The air inlet (104), air outlet (105) and air vent (106) are all located on the upper metal plate (101).

10. The micro / nano pressure electric pump with coplanar air inlet and outlet as described in claim 9, characterized in that: The bottom of the upper metal layer is provided with a slot for the valve membrane layer (102) to be displaced.

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