Coating cavity heating device and coating equipment

Abstract

The coating cavity heating device comprises a furnace tube and four groups of auxiliary heating assemblies which are sequentially arranged along the circumferential direction of the furnace tube, and each group of auxiliary heating assembly comprises a plurality of auxiliary heating units which are arranged along the axis direction of the furnace tube and independently control heating. A plurality of air inlet pipes distributed at intervals in the circumferential direction of the furnace pipe are arranged in the furnace pipe, the axis direction of the air inlet pipes is parallel to the axis direction of the furnace pipe, and a plurality of air inlets are formed in the side walls of the air inlet pipes and distributed in the axial direction of the air inlet pipes. When one air inlet pipe is blocked, one group of auxiliary heating components corresponding to the air inlet pipe can be controlled to increase the heating temperature, so that the problem of non-uniform film thickness caused by reduction of blocked air of the air inlet pipe is solved, the maintenance and replacement period of the air inlet pipe can be prolonged, and the production efficiency and the production quality can be effectively ensured; and in addition, through the multiple auxiliary heating units, the multiple areas in the furnace tube have the flexibility of temperature adjustment, so that the requirements of different products are met.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a coating chamber heating device and coating equipment. Background Art

[0002] Coating equipment is one of the important equipment in photovoltaic cell production operations. LPCVD (Low Pressure Chemical Vapor Deposition, abbreviated as LPCVD, Chinese name is low-pressure chemical vapor deposition) equipment is a commonly used coating equipment.

[0003] After being used for a period of time, the air inlet pipe of the existing LPCVD equipment is prone to blockage of the pores at a certain position, resulting in uneven gas flow and poor coating uniformity within and between wafers. Replacing the air inlet pipe takes a long time and the pipe needs to be locked and not produced, which will affect production capacity.

[0004] In addition, the existing LPCVD equipment uses auxiliary heating devices installed directly above and below the furnace tube. When the air inlet pipe is not blocked, the auxiliary heating device can effectively adjust the uniformity of film thickness between sheets. However, when the air inlet pipe is blocked, its heating method cannot solve the problem of severe local thinness within the sheet.

[0005] Therefore, how to improve the uniformity of coating while ensuring production capacity is a technical problem that technicians in this field currently need to solve. Utility Model Content

[0006] The utility model aims to provide a coating chamber heating device and coating equipment, which can make up for the problem of uneven film thickness caused by reduced gas in the air intake pipe, and can effectively ensure production quality and production efficiency.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A coating chamber heating device comprises: a furnace tube and four groups of auxiliary heating components arranged in sequence along the circumferential direction of the furnace tube, each group of the auxiliary heating components comprises a plurality of auxiliary heating units arranged along the axial direction of the furnace tube and independently controlling heating, a plurality of air inlet pipes spaced apart along the circumferential direction of the furnace tube are arranged in the furnace tube, the axial direction of the air inlet pipes is parallel to the axial direction of the furnace tube, a plurality of air inlets are arranged on the side wall of the air inlet pipe, and the plurality of air inlets are distributed along the axial direction of the air inlet pipe.

[0009] In some embodiments, the plurality of air inlets are distributed at equal intervals along the axial direction of the air inlet pipe.

[0010] In some embodiments, the distance between two adjacent air inlets gradually decreases from the furnace tail to the furnace head of the furnace tube.

[0011] In some embodiments, four air inlet pipes are provided in the furnace tube, and the four air inlet pipes correspond one-to-one to the four groups of auxiliary heating components.

[0012] In some embodiments, the auxiliary heating unit includes an arc-shaped heating plate and a heating wire, the arc-shaped heating plate is arranged on the side wall of the furnace tube, and the heating wire is fixed on the arc-shaped heating plate.

[0013] In some embodiments, the inner side surface of the arc-shaped heating plate is provided with a shrinkage groove, and the heating wire is fixed in the shrinkage groove.

[0014] In some embodiments, the heating wire is distributed in a serpentine shape from one end to the other end of the arc-shaped heating plate.

[0015] In some embodiments, four arc-shaped heating plates located in the same circumferential direction are connected in sequence to form a cylindrical structure.

[0016] In some embodiments, two sides of the arc-shaped heating plate are respectively provided with clamping strips and clamping grooves distributed along the axial direction, and two adjacent arc-shaped heating plates in the circumferential direction are clamped to each other through the clamping strips and the clamping grooves.

[0017] A coating equipment comprises any one of the coating chamber heating devices described above.

[0018] Compared with the prior art, the above technical solution has the following advantages:

[0019] The utility model provides a coating chamber heating device and coating equipment. During the coating process, when one of the air inlet pipes is blocked, a group of auxiliary heating components corresponding to the air inlet pipe can be controlled to increase its heating temperature to compensate for the problem of uneven film thickness caused by the reduction of gas due to the blockage of the air inlet pipe. The maintenance and replacement cycle of the air inlet pipe can be extended, and production efficiency and production quality can be effectively guaranteed. In addition, since each group of auxiliary heating components includes multiple auxiliary heating units, multiple areas in the furnace tube have the flexibility of adjustable temperature to meet the needs of different products. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the main structure of a coating chamber heating device provided by a specific embodiment of the utility model;

[0022] Figure 2 A schematic diagram of the side structure of a coating chamber heating device provided by a specific embodiment of the utility model;

[0023] Figure 3 A schematic diagram of the structure of an air intake pipe provided by a specific implementation method of the utility model;

[0024] Figure 4 The present invention is a schematic structural diagram of an arc-shaped heating plate provided in a specific implementation manner of the present invention.

[0025] The reference numerals are as follows:

[0026] 10 is a furnace tube, 11 is a furnace shell, and 12 is a quartz tube;

[0027] 20 is an auxiliary heating component, 21 is an arc-shaped heating plate, 211 is a shrinking groove, 212 is a clamping strip, 213 is a clamping slot, and 22 is a heating wire;

[0028] 30 is an air intake pipe, and 31 is an air intake port. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] Please refer to Figure 1 and Figure 2 The coating chamber heating device provided by the embodiment of the utility model comprises: a furnace tube 10 and four groups of auxiliary heating components 20 sequentially distributed along the circumference direction of the furnace tube 10, wherein the four groups of auxiliary heating components 20 are preferably evenly distributed along the circumference of the furnace tube 10. Figure 2 As shown, a group of the auxiliary heating components 20 is respectively arranged at the upper left, upper right, lower left and lower right of the circumferential direction of the furnace tube 10, wherein each group of the auxiliary heating components 20 includes a plurality of auxiliary heating units arranged along the axial direction of the furnace tube 10 and independently controlling heating, that is, each auxiliary heating unit can be heated independently and is not affected by each other, and when the heating temperature of a certain auxiliary heating unit needs to be adjusted, it can be regulated separately, wherein the auxiliary heating units are preferably evenly distributed along the axial direction of the furnace tube 10, as shown in FIG. Figure 1 As shown, each group of auxiliary heating components 20 is divided into six auxiliary heating units. Figure 1The five vertical dotted lines are only auxiliary lines used to distinguish the six auxiliary heating units. The furnace tube 10 is provided with a plurality of air inlet pipes 30 spaced apart along the circumferential direction thereof, the axial direction of the air inlet pipe 30 is parallel to the axial direction of the furnace tube 10, the side wall of the air inlet pipe 30 is provided with a plurality of air inlet ports 31, and the plurality of air inlet ports 31 are distributed along the axial direction of the air inlet pipe 30. For example, two air inlet pipes 30 or four air inlet pipes 30 may be provided in the furnace tube 10. For the four air inlet pipes 30, the four air inlet pipes 30 correspond to the four groups of auxiliary heating components 20 one by one, such as Figure 2 As shown, an air inlet pipe 30 is respectively arranged at the upper left, upper right, lower left and lower right of the furnace tube 10. When one of the air inlet pipes 30 is blocked, a group of auxiliary heating components 20 corresponding to the air inlet pipe 30 can be controlled to increase its heating temperature to compensate for the problem of uneven film thickness caused by the reduction of gas blocked in the air inlet pipe 30. There is no need to replace the air inlet pipe 30, which can effectively ensure production efficiency and production quality. In addition, since each group of auxiliary heating components 20 includes multiple auxiliary heating units, multiple areas in the furnace tube 10 have the flexibility of adjustable temperature to meet the needs of different products.

[0031] In some embodiments, multiple air inlets 31 are evenly spaced along the axial direction of the air inlet pipe 30. The evenly spaced distribution of the air inlets 31 is suitable for scenarios where the air inlet pipe 30 is shorter because for a shorter air inlet pipe 30, when the gas is transported from one end of the air inlet pipe 30 to the other end, the gas loss at each air inlet 31 is less.

[0032] In some embodiments, Figure 3 As shown, the distance between two adjacent air inlets 31 gradually decreases from the furnace tail to the furnace head of the furnace tube 10, that is, the arrangement of the air inlets 31 becomes increasingly dense. This arrangement is suitable for longer air inlet pipes 30, because the longer the air inlet pipe 30, the greater the gas pressure loss, resulting in the amount of gas near the furnace tail end being much greater than the amount of gas near the furnace head end. In this embodiment, by arranging the air inlets 31 from the furnace tail to one end of the furnace head of the furnace tube 10 in a increasingly dense manner, the amount of gas at the air inlets 31 near the furnace head end can be effectively increased.

[0033] In some embodiments, the auxiliary heating unit includes an arc-shaped heating plate 21 and a heating wire 22. The arc-shaped heating plate 21 is arranged on the side wall of the furnace tube 10. The heating wire 22 is fixed on the arc-shaped heating plate 21. The heating wire 22 is distributed in a serpentine shape from one end to the other end of the arc-shaped heating plate 21 to increase the distribution length of the heating wire 22 on the arc-shaped heating plate 21, thereby improving the uniformity of the auxiliary heating unit during heating. The furnace tube 10 includes a furnace shell 11, an insulation layer, a main heating component and a quartz tube 12. The main heating component is arranged on the outer wall of the quartz tube 12. The number of main heating components is preferably multiple, and the multiple main heating components are distributed along the axial direction of the quartz tube 12. The insulation layer is located between the inner wall of the furnace shell 11 and the outer wall of the quartz tube 12. The auxiliary heating component 20 can be arranged between the furnace shell 11 and the quartz tube 12.

[0034] In some embodiments, the coating chamber heating device further comprises a main heating power regulator and an auxiliary heating power regulator. The main heating power regulator is connected to each main heating component and is used to control each main heating component to heat. It can also control each main heating component to heat at different temperatures. The auxiliary heating regulator comprises a first auxiliary heating regulator, a second auxiliary heating regulator, a third auxiliary heating regulator and a fourth auxiliary heating regulator. Figure 2 As shown, the first auxiliary heat regulator can adjust the output power of the auxiliary heating assembly 20 located at the upper left, the second auxiliary heat regulator can adjust the output power of the auxiliary heating assembly 20 located at the upper right, the third auxiliary heat regulator can adjust the output power of the auxiliary heating assembly 20 located at the lower left, and the fourth auxiliary heat regulator can adjust the output power of the auxiliary heating assembly 20 located at the lower right. Each auxiliary heat regulator can also adjust the output power of each auxiliary heating unit of the corresponding group.

[0035] In some embodiments, Figure 4 As shown, the inner side of the arc-shaped heating plate 21 is provided with a shrinking groove 211, and the heating wire 22 is fixed in the shrinking groove 211. The shrinking groove 211 can be a dovetail groove, a T-shaped groove, or an arc groove, etc. The shrinking groove 211 can improve the stability of the heating wire 22 fixed in the arc-shaped heating plate 21.

[0036] In some embodiments, Figure 2 As shown, four arc-shaped heating plates 21 located in the same circumferential direction are connected in sequence to form a cylindrical structure, through which auxiliary heating can be performed in a 360° direction, and the appropriate temperature can be provided more flexibly.

[0037] In some embodiments, the two sides of the arc heating plate 21 are respectively provided with a clamping strip 212 and a clamping groove 213 distributed along the axial direction, and two adjacent arc heating plates 21 in the circumferential direction can be clamped with each other through the clamping strip 212 and the clamping groove 213, wherein the clamping strip 212 and the clamping groove 213 can not only facilitate the connection of the arc heating plate 21, but also improve the connection stability of the arc heating plate 21.

[0038] An embodiment of the utility model further provides a coating device, comprising the coating chamber heating device provided by any one of the above embodiments. For the beneficial effects of the coating device, please refer to the above coating chamber heating device, which will not be described again here.

[0039] It should be noted that, in this specification, relational terms such as first and second are merely used to distinguish one entity from other entities, but do not necessarily require or imply any actual relationship or order between these entities.

[0040] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0041] The above is a detailed introduction to a coating chamber heating device and coating equipment provided by the utility model. This article uses specific examples to illustrate the principle and implementation method of the utility model. The description of the above embodiments is only used to help understand the core idea of ​​the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A coating chamber heating device, characterized in that: include: A furnace tube (10) and four groups of auxiliary heating components (20) arranged in sequence along the circumferential direction of the furnace tube (10), each group of the auxiliary heating components (20) comprising a plurality of auxiliary heating units arranged along the axial direction of the furnace tube (10) and independently controlled for heating, a plurality of air inlet pipes (30) arranged in the furnace tube (10) and spaced apart along the circumferential direction thereof, the axial direction of the air inlet pipe (30) being parallel to the axial direction of the furnace tube (10), a plurality of air inlets (31) being arranged on the side wall of the air inlet pipe (30), the plurality of air inlets (31) being distributed along the axial direction of the air inlet pipe (30).

2. The coating chamber heating device according to claim 1, characterized in that: The plurality of air inlets (31) are distributed at equal intervals along the axial direction of the air inlet pipe (30).

3. The coating chamber heating device according to claim 1, characterized in that: The distance between two adjacent air inlets (31) gradually decreases from the furnace tail to the furnace head of the furnace tube (10).

4. The coating chamber heating device according to claim 1, characterized in that: Four air inlet pipes (30) are arranged in the furnace tube (10), and the four air inlet pipes (30) correspond one to one to the four groups of auxiliary heating components (20).

5. The coating chamber heating device according to claim 1, characterized in that: The auxiliary heating unit comprises an arc-shaped heating plate (21) and a heating wire (22); the arc-shaped heating plate (21) is arranged on the side wall of the furnace tube (10); and the heating wire (22) is fixed on the arc-shaped heating plate (21).

6. The coating chamber heating device according to claim 5, characterized in that: The inner side surface of the arc-shaped heating plate (21) is provided with a shrinking groove (211), and the heating wire (22) is fixed in the shrinking groove (211).

7. The coating chamber heating device according to claim 5, characterized in that: The heating wire (22) is distributed in a serpentine shape from one end to the other end of the arc-shaped heating plate (21).

8. The coating chamber heating device according to claim 5, characterized in that: The four arc-shaped heating plates (21) located in the same circumferential direction are connected in sequence to form a cylindrical structure.

9. The coating chamber heating device according to claim 8, characterized in that: A clamping strip (212) and a clamping groove (213) distributed along the axial direction are respectively provided on both sides of the arc-shaped heating plate (21), and two arc-shaped heating plates (21) adjacent to each other in the circumferential direction are clamped to each other via the clamping strip (212) and the clamping groove (213).

10. A coating device, characterized in that: The coating chamber heating device comprises the coating chamber heating device as described in any one of claims 1 to 9.

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