Information registration system of silicon wafer carrier

Abstract

The utility model provides an information registration system of a silicon wafer carrier, which comprises a carrier clamp, a code reader, an rfid reader-writer and an industrial personal computer, and is characterized in that the carrier clamp can limit the silicon wafer carrier provided with a bar code label and an rfid label; the code reader and the rfid reader-writer are arranged on the outer side of the carrier clamp and are in signal connection with the industrial personal computer; the code reader identifies the bar code label and transmits label information to the industrial personal computer, and the industrial personal computer controls the rfid reader-writer to rewrite the rfid label. Before the silicon wafer carrier is put into use, the carrier clamp is used for quickly fixing the silicon wafer carrier, the industrial personal computer, the code reader and the rfid reader-writer are used for quickly registering the silicon wafer carrier in an enterprise production management electronic system, and the code reader and the rfid reader-writer can ensure the accuracy of information reading, analysis and transmission in the process. The problem of disordered accounts in subsequent silicon wafer production caused by manual registration errors is avoided, and the registration efficiency of the silicon wafer carrier is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to an information registration system for a silicon wafer carrier. Background Art

[0002] Wafer baskets and other carriers are needed in the production process of silicon wafers. In order to facilitate the traceability and management of the production process and related information of silicon wafers, companies install information management equipment such as barcode labels on silicon wafer carriers. By identifying, rewriting and managing label information, the production process of the silicon wafers in the carriers can be traced.

[0003] Before the silicon wafer carrier is put into use, it is necessary to register the information of the silicon wafer carrier, that is, to enter the label information on the silicon wafer carrier into the enterprise's information management system. The traditional registration of silicon wafer carriers adopts the manual entry method, but manual identification and entry of label IDs are prone to errors, resulting in "messy accounts" during silicon wafer production, and manual entry is inefficient. Utility Model Content

[0004] The purpose of the utility model is to provide an information registration system for a silicon wafer carrier, so as to solve the deficiencies in the above-mentioned background technology.

[0005] The technical solution of the utility model is: an information registration system for a silicon wafer carrier, which includes: a carrier fixture, a code reader, an RFID reader / writer and an industrial computer, wherein the carrier fixture can limit the silicon wafer carrier provided with a barcode label and an RFID label; the code reader and the RFID reader / writer are arranged on the outside of the carrier fixture and are connected to the industrial computer signal; the code reader identifies the barcode label and transmits the label information to the industrial computer, and the industrial computer controls the RFID reader / writer to rewrite the RFID label.

[0006] Furthermore, the carrier clamp includes: a base, a limiting part one and a limiting part two, the limiting part one is arranged on one side of the top surface of the base, and is used to limit the silicon wafer inlet end of the silicon wafer carrier, and the limiting part two is arranged on the other side of the top surface of the base, and is used to limit the end of the silicon wafer carrier opposite to the silicon wafer inlet end.

[0007] Furthermore, the end of the limiting portion 1 toward the limiting portion 2 is in a step shape with a gradually decreasing width, and the side surface of the limiting portion 1 along the width direction is used to abut against the inner wall of the silicon wafer carrier.

[0008] Furthermore, the second limiting portion includes a stopper A and a stopper B, and the stopper A and the stopper B are slidably connected to the base and can move closer to or farther away from each other under the drive of the telescope to abut against the outer wall of the silicon wafer carrier.

[0009] Furthermore, the telescopic device is a cylinder or a hydraulic rod electrically connected to the industrial control machine, and is arranged on the sides of the stopper A and the stopper B that are away from each other.

[0010] Furthermore, a displacement sensor is provided at the telescopic end of the telescope, and the displacement sensor is signal-connected to the industrial computer.

[0011] Furthermore, a mounting platform is provided above the carrier fixture, and a plurality of mounting holes are provided at the end of the mounting platform close to the limiting portion 1, and the code reader is fixed to the mounting holes by connecting bolts.

[0012] Furthermore, the distance between the mounting platform and the base is greater than the length of the silicon wafer carrier.

[0013] Furthermore, the carrier fixture is provided with a mounting rod, and the RFID reader is fixed on the mounting rod.

[0014] The beneficial effects of the utility model are as follows: before the silicon wafer carrier is put into use, it is quickly fixed by using a carrier clamp, and the barcode label in the silicon wafer carrier is read and stored by using an industrial computer, a code reader and an RFID reader / writer, and the information of the RFID label is rewritten to realize the rapid registration of the silicon wafer carrier in the enterprise production management electronic system. The code reader and the RFID reader / writer can ensure the accuracy of information reading, analysis and transmission in the above process, avoid the problem of "disordered accounts" in subsequent silicon wafer production caused by manual registration errors, and improve the registration efficiency of the silicon wafer carrier and reduce labor consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is an elevation view of an embodiment of the utility model;

[0016] Figure 2 It is a schematic diagram of the connection between the carrier clamp and the silicon wafer carrier in the embodiment of the utility model.

[0017] In the figure:

[0018] 1. Carrier fixture; 1-1. Base; 1-2. Limiting part 1; 1-3. Limiting part 2; 1-31. Stopper A; 1-32. Stopper B; 1-33. Telescopic device;

[0019] 2. Barcode reader;

[0020] 3. RFID reader / writer;

[0021] 4. Industrial computer;

[0022] 5. Silicon wafer carrier; 5-1. Silicon wafer inlet end; 5-2. Silicon wafer supporting end; 5-3. Side stop part 1; 5-4. Side stop part 2;

[0023] 6. Barcode label;

[0024] 7. RFID tag;

[0025] 8. Displacement sensor;

[0026] 9. Installation table;

[0027] 10. Install the rod. DETAILED DESCRIPTION

[0028] The technical solution of the embodiment of the utility model is described in detail below with reference to the accompanying drawings.

[0029] In the description of the embodiments of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "set" and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood by specific circumstances.

[0030] Reference Figure 1-2 , an information registration system for a silicon wafer carrier, comprising: a carrier fixture 1, a code reader 2, an RFID reader / writer 3 and an industrial computer 4, wherein the industrial computer 4 is provided with a production information management and control system, the carrier fixture 1 can limit the silicon wafer carrier 5 provided with a barcode label 6 and an RFID label 7; the code reader 2 and the RFID reader / writer 3 are arranged on the outside of the carrier fixture 1 and are connected to the industrial computer 4 by signal; the code reader 2 identifies the barcode label 6 and transmits the label information to the industrial computer 4, and the industrial computer 4 controls the RFID reader / writer 3 to rewrite the RFID label 7.

[0031] Before the silicon wafer carrier 5 is put into use, the information registration system is used to quickly fix it, read, rewrite and store information, and the information of the silicon wafer carrier 5 is registered in the industrial computer 4. The code reader 2 and the RFID reader / writer 3 can ensure the accuracy of information reading, analysis and transmission in the above process, avoid the problem of "disordered accounts" in subsequent silicon wafer production caused by manual registration errors, and improve the registration efficiency of the silicon wafer carrier 5 and reduce labor costs.

[0032] The carrier fixture 1 can be configured according to the shapes and sizes of different silicon wafer carriers 5 , and this embodiment exemplarily lists some feasible technical solutions.

[0033] In this embodiment, the silicon wafer carrier 5 to be registered is in a cubic frame structure, with an opening at the top as a silicon wafer entrance end 5-1, a silicon wafer supporting end 5-2 at the bottom, side stoppers 5-3 at both ends along the length direction, and side stoppers 5-4 at both ends along the width direction. The height of the side stoppers 5-3 is less than the height of the silicon wafer carrier 5, so as to facilitate observation of the silicon wafer from the side and reduce the weight of the silicon wafer carrier 5. The barcode label 6 is attached thereto, and the height of the side stoppers 5-4 is consistent with the height of the silicon wafer carrier 5, so as to effectively protect the edge of the silicon wafer; the RFID tag 7 is embedded in the silicon wafer carrier 5, and its embedded position varies depending on the manufacturer.

[0034] Based on the structural features of the silicon wafer carrier 5, in this embodiment, the carrier fixture 1 is configured as a base 1-1, a limiting portion 1-2 and a limiting portion 2 1-3. The limiting portion 1-2 is arranged on one side of the top surface of the base 1-1 to limit the silicon wafer inlet end 5-1 of the silicon wafer carrier 5, and the limiting portion 2 1-3 is arranged on the other side of the top surface of the base 1-1 to limit the silicon wafer supporting end 5-2 of the silicon wafer carrier 5. Before registering information on the silicon wafer carrier 5, the silicon wafer carrier 5 is erected so that the side stop portion 1 5-3 with the barcode label 6 is exposed upward for identification by the barcode reader 2, and then the silicon wafer carrier 5 is placed vertically downward on the base 1-1 of the carrier fixture 1.

[0035] Since the structure of the side baffle plate 1 is weak near the silicon wafer entrance end 5-1, if it is fixed by a clamping method, it will be damaged once the clamping force is too large. Therefore, in this embodiment, the limiting part 1-2 is configured as a structure for abutting and limiting the inner side thereof. It is worth noting that the size of the limiting part 1-2 should be smaller than the size of the side baffle 1 5-3 that is recessed toward the silicon wafer supporting end 5-2, so that when the erected silicon wafer carrier 5 is moved in the vertical direction, the limiting part 1-2 can be smoothly inserted between the opposite side baffles 5-4 and abut against the inner wall of the side baffle 2 5-4.

[0036] In order to expand the application range of the carrier fixture 1, the above-mentioned limiting part 1-2 is configured as follows: the end portion facing the limiting part 2 1-3 is in a step shape with a gradually decreasing width, and the side surface of the limiting part 1-2 along the width direction abuts against the inner wall of the silicon wafer carrier 5. The width of the step is configured according to the size of the commonly used silicon wafer carrier 5. In this embodiment, 5-inch, 6-inch and 8-inch silicon wafer carriers are commonly used. Therefore, in this embodiment, the end portion of the limiting part 1-2 facing the limiting part 2 1-3 is constructed as a three-level step shape, and the step width farthest from the limiting part 2 1-3 and the distance between it and the limiting part 2 1-3 are adapted to the size of the 8-inch silicon wafer carrier 5, and the step width closest to the limiting part 2 1-3 and the distance between it and the limiting part 2 1-3 are adapted to the size of the 5-inch silicon wafer carrier 5.

[0037] Different from the silicon wafer inlet end 5-1 of the silicon wafer carrier 5, the silicon wafer supporting end 5-2 has many silicon wafer supporting grooves inside, so its internal structure is thick, and its structural features are not suitable for the inner side abutment limiting method, so the limiting part 2 1-3 is configured to clamp the structure of the silicon wafer carrier 5 from the outside. Specifically, the limiting part 2 1-3 includes a stopper A1-31, a stopper B1-32 and a retractor 1-33, the stopper A1-31 and the stopper B1-32 are slidably connected to the base 1-1, and are symmetrically arranged about the axis of the limiting part 1-2, the retractor 1-33 is arranged on the side of the stopper A1-31 and the stopper B1-32 that are away from each other, and the stopper A1-31 and the stopper B1-32 can be driven by the retractor 1-33 to move closer to or farther from each other to abut against the outer wall of the silicon wafer carrier 5.

[0038] In this embodiment, the telescopic device 1-33 can be a cylinder or a hydraulic rod, which is fixed on the base 1-1 and electrically connected to the industrial computer 4. It is controlled by the industrial computer 4 to extend and retract, thereby changing the position of the block A1-31 and the block B1-32.

[0039] Similar to the limit part 1-2, the limit part 2 1-3 can also be electrically controlled to adapt to silicon wafer carriers 5 of different sizes. For example, a displacement sensor 8 can be set at the telescopic end of the telescope 1-33, and the displacement sensor 8 is connected to the industrial computer 4 signal. Under the coordinated action of the displacement sensor 8 and the industrial computer 4, the telescopic distance of the telescope 1-33 is controlled to be several groups of fixed values. These groups of fixed values ​​are determined according to the width of the silicon wafer supporting end 5-2 of the 5-inch, 6-inch and 8-inch silicon wafer carriers 5.

[0040] In this embodiment, a mounting platform 9 is provided above the carrier fixture 1, and the base 1-1 of the carrier fixture 1 and the mounting platform 9 can be fixed by existing connection support methods, such as adding support rods, support platforms, etc., which are not specifically limited here; a plurality of mounting holes are provided at the end of the mounting platform 9 close to the limit portion 1-2, and the code reader 2 is fixed in the mounting hole by a connecting bolt, and its installation position can be adjusted according to the placement position of the barcode label 6 on each batch of silicon wafer carriers 5 on the side stop portion 5-3. For example, some barcode labels 6 are pasted in the center, while some are pasted close to the edge.

[0041] It is worth noting that the distance between the mounting platform 9 and the base 1 - 1 is greater than the length of the silicon wafer carrier 5 so that the barcode label 6 is located within the recognition range of the barcode reader 2 .

[0042] In this embodiment, the RFID tag 7 in the silicon wafer carrier 5 is embedded in the wall of the silicon wafer carrier 5. The embedded position varies depending on the manufacturer. Therefore, a detachable mounting rod 10 can be set on the base 1-1 of the carrier fixture 1, and the RFID reader 3 can be tied to the mounting rod 10. The installation position of the mounting rod 10 can be adaptively adjusted, and the binding height of the RFID reader 3 can also be adaptively adjusted so that the RFID tag 7 is within the recognition range of the RFID reader 3.

[0043] Compared with the prior art, the beneficial effect of the utility model is that before the silicon wafer carrier 5 is put into use, the carrier clamp 1 is used to quickly fix it, and the industrial computer 4, code reader 2 and RFID reader / writer 3 are used to read and store information from the barcode label 6 in the silicon wafer carrier 5, and rewrite the information of the RFID label 7, so as to realize the rapid registration of the silicon wafer carrier 5 in the enterprise production management electronic system. The code reader 2 and RFID reader / writer 3 can ensure the accuracy of information reading, analysis and transmission in the above process, avoid the problem of "disordered accounts" in subsequent silicon wafer production caused by manual registration errors, and improve the registration efficiency of the silicon wafer carrier 5 and reduce labor consumption.

[0044] The above are preferred implementations of the present utility model. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present utility model. These improvements and modifications should also be regarded as the protection scope of the present utility model.

Claims

1. A silicon wafer carrier information registration system, characterized in that: include: A carrier fixture, a code reader, an RFID reader / writer and an industrial computer, wherein the carrier fixture can limit the position of a silicon wafer carrier provided with a barcode label and an RFID label; the code reader and the RFID reader / writer are arranged on the outside of the carrier fixture and are connected to the industrial computer signal; the code reader identifies the barcode label and transmits the label information to the industrial computer, and the industrial computer controls the RFID reader / writer to rewrite the RFID label.

2. The information registration system for a silicon wafer carrier according to claim 1, characterized in that: The carrier clamp includes: a base, a limiting part one and a limiting part two. The limiting part one is arranged on one side of the top surface of the base to limit the silicon wafer inlet end of the silicon wafer carrier, and the limiting part two is arranged on the other side of the top surface of the base to limit the end of the silicon wafer carrier opposite to the silicon wafer inlet end.

3. The information registration system for a silicon wafer carrier according to claim 2, characterized in that: The end of the limiting portion 1 toward the limiting portion 2 is in a step shape with a gradually decreasing width, and the side surface of the limiting portion 1 along the width direction is used to abut against the inner wall of the silicon wafer carrier.

4. The information registration system for a silicon wafer carrier according to claim 2 or 3, characterized in that: The second limiting part includes a stopper A and a stopper B. The stopper A and the stopper B are slidably connected to the base and can move closer to or farther from each other under the drive of the telescopic device to abut against the outer wall of the silicon wafer carrier.

5. The information registration system for a silicon wafer carrier according to claim 4, characterized in that: The telescopic device is a cylinder or a hydraulic rod electrically connected to the industrial control machine, and is arranged on the sides of the stopper A and the stopper B that are away from each other.

6. The information registration system for a silicon wafer carrier according to claim 4, characterized in that: The telescopic end of the telescope is provided with a displacement sensor, and the displacement sensor is connected to the industrial computer signal.

7. A silicon wafer carrier information registration system according to any one of claims 2-3, 5-6, characterized in that: A mounting platform is provided above the carrier fixture, and a plurality of mounting holes are provided at the end of the mounting platform close to the first limiting portion, and the code reader is fixed to the mounting holes through a connecting bolt.

8. The information registration system for a silicon wafer carrier according to claim 7, characterized in that: The distance between the mounting platform and the base is greater than the length of the silicon wafer carrier.

9. The information registration system for a silicon wafer carrier according to claim 7, characterized in that: The carrier fixture is provided with a mounting rod, and the RFID reader is fixed on the mounting rod.

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