Heating stage support and heating stage using same

Abstract

The utility model relates to a heating stage support and a heating stage using the same. The heating table comprises a support and a heating piece arranged on the support, the support comprises a support body with an installation cavity, the support body comprises a bottom plate and a vertical side plate, and a plurality of air columns used for heat insulation are arranged in the bottom plate and / or the vertical side plate. The air columns can achieve air heat insulation and reduce the heat dissipation speed, and compared with the prior art, the low-power heating piece can be used for achieving the temperature environment which can be built by an original heating piece, and energy consumption is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of heating platforms, in particular to a heating platform bracket and a heating platform using the heating platform bracket. Background Art

[0002] A hot table is an important test and analysis equipment that can create a specific temperature environment and cooperate with the detection instrument to perform performance testing on the test piece placed on the hot table under a specific temperature environment. For example, the hot table on the probe table is mainly used in the semiconductor industry, the radio and television industry, the material industry, and the integrated circuit test. The existing hot tables all include a bracket and a heating element arranged on the bracket. Since some test temperature requirements are relatively high, the bracket will adopt a metal bracket, and an insulating layer will be arranged on the metal bracket. However, the bracket of the above structure dissipates heat quickly and consumes a lot of energy. Therefore, in order to reduce heat conduction and avoid excessive heat loss, the bracket will adopt ceramic materials. For example, the Chinese utility model patent with the authorization announcement number CN 218727536U previously applied by the applicant discloses a probe table and its hot table. The hot table includes a shell, i.e., a bracket, and the shell is made of insulating ceramic. The ceramic has slow heat conduction, which avoids too fast heat loss and improves the energy efficiency of the hot table. However, it was found in use that although the bracket adopts ceramic material, the energy consumption is still relatively high. Therefore, it is still necessary to improve the bracket to reduce its thermal conductivity efficiency to reduce energy consumption. Utility Model Content

[0003] The purpose of the utility model is to provide a heating platform bracket to solve the problem of high energy consumption caused by the bracket heat dissipation block in the prior art; at the same time, the purpose of the utility model is also to provide a heating platform using the above heating platform bracket.

[0004] To achieve the above objectives, a hot plate bracket of the utility model adopts the following technical solution: a hot plate bracket comprises a bracket body having an installation cavity, the bracket body comprises a bottom plate and vertical side plates, and a plurality of air columns for heat insulation are arranged inside the bottom plate and / or the vertical side plates.

[0005] The interior of the bottom plate and / or the vertical side plate is a honeycomb structure, and the air in each channel of the honeycomb structure forms the air column.

[0006] A plurality of crisscross holes are arranged inside the bottom plate and / or the vertical side plate, and the air in each hole forms the air column.

[0007] The interior of the bottom plate and / or the vertical side plate is a hollow structure, and the air in each hole of the hollow structure forms the air column.

[0008] The bracket comprises a placement plate for covering the heating element, and the upper end of the vertical side plate is provided with a limiting protrusion for limiting cooperation with the placement plate.

[0009] A heat platform of the utility model adopts the following technical solution: a heat platform comprises a bracket and a heating element arranged on the bracket, the bracket comprises a bracket body with a mounting cavity, the bracket body comprises a bottom plate and vertical side plates, and a plurality of air columns for heat insulation are arranged inside the bottom plate and / or the vertical side plates.

[0010] The interior of the bottom plate and / or the vertical side plate is a honeycomb structure, and the air in each channel of the honeycomb structure forms the air column.

[0011] A plurality of crisscross holes are arranged inside the bottom plate and / or the vertical side plate, and the air in each hole forms the air column.

[0012] The interior of the bottom plate and / or the vertical side plate is a hollow structure, and the air in each hole of the hollow structure forms the air column.

[0013] The heating element is located in the installation cavity and on the bottom plate. The bracket also includes a placement plate located above the heating element. The upper end of the vertical side plate is provided with a limiting protrusion for limiting cooperation with the placement plate.

[0014] The beneficial effects of the utility model are as follows: a plurality of air columns are arranged inside the bottom plate and / or the vertical side plates of the bracket, the air columns can realize air insulation and reduce the heat loss rate. Compared with the existing ones, a low-power heating element can be used to achieve the temperature environment that the original heating element can create, thereby reducing energy consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of an embodiment of a heating platform of the utility model;

[0016] Figure 2 yes Figure 1 Schematic diagram of the internal structure of the medium heat stage;

[0017] Figure 3 yes Figure 1 Schematic diagram of the cross-sectional structure of the medium heat stage;

[0018] Figure 4 yes Figure 3 Schematic diagram of the structure of the midsole plate. DETAILED DESCRIPTION

[0019] In order to facilitate the understanding of the present invention, the present invention is described in more detail below in conjunction with the accompanying drawings and specific embodiments. The accompanying drawings provide preferred embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described in this specification. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0020] It should be noted that, unless otherwise defined, the technical and scientific terms used in this specification have the same meanings as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0021] An embodiment of a hot stage of the utility model is as follows Figure 1-Figure 4 As shown, it includes a bracket 2 and a heating element 8 arranged on the bracket. In this embodiment, the heating element uses a ceramic heating plate, and the ceramic heating plate is provided with a first terminal and a second terminal. The first terminal is connected to a first cable 4, and the second terminal is connected to a second cable 5. Specifically, the bracket is provided with a first connecting plate 13 for fixed connection of the first terminal and a second connecting plate for fixed connection of the second terminal. A thermocouple 6 is arranged on the bracket.

[0022] The bracket 2 includes a bracket body having an installation cavity, and the heating element 8 is placed in the installation cavity. The bracket also includes a placement plate 7 for covering the installation cavity, for placing the test piece thereon. The bracket body includes a bottom plate 9 and a vertical side plate 10, and a plurality of air columns 12 for heat insulation are arranged inside the bottom plate and the vertical side plate. The inside of the bottom plate and the vertical side plate are both honeycomb structures, and the air in each duct of the honeycomb structure forms the above-mentioned air column. The upper end of the vertical side plate 10 is provided with a limiting protrusion 11 for limiting the placement plate 7. The vertical side plate and the bottom plate can be bonded. In this embodiment, the vertical side plate and the bottom plate are both made by 3D printing. Insulating pads 17 are arranged on the bottom plate.

[0023] In this embodiment, the vertical side plates 10 and the bottom plate 9 form an installation cavity, the heating element 8 is located in the installation cavity and is arranged on the bottom plate, and the first connecting plate 13 and the second connecting plate are both arranged on the bottom plate. The bottom plate is also provided with a through hole 14 for the thermocouple to pass through, and the through hole can also be formed by a channel where one of the air columns is located. A measuring hole 16 connected to the through hole is provided on the upper side of the bottom plate, and the measuring hole 16 is provided for the measuring end of the thermocouple to be exposed, so that the ambient temperature can be tested more accurately. In this embodiment, the measuring hole 16 is a long hole and its length extends along the length direction of the thermocouple, so as to facilitate the exposure of the measuring end of the thermocouple. A positioning step is provided on the bottom plate, and the vertical side plate is arranged on the step surface.

[0024] In this embodiment, the heat stage further includes a mounting frame 1, in which a plurality of heat shielding layers 3 are arranged, and the heat stage is located in a space surrounded by the innermost heat shielding layer. Each heat shielding layer is a boxed structure, which is stacked together at intervals, and a mounting structure is arranged between any two adjacent heat shielding layers to achieve interval installation and fixation. Specifically, a positioning installation hole is arranged on the outer heat shielding layer of two adjacent heat shielding layers, and a positioning installation protrusion is arranged on the inner heat shielding layer. This structure greatly reduces the contact area between any two adjacent heat shielding layers, thereby reducing the conduction loss of heat.

[0025] In the above description of this specification, unless otherwise clearly specified and limited, the terms "fixed", "installed", "connected" or "connected" should be understood in a broad sense. For example, with regard to the term "connection", it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal connection of two elements or the interaction relationship between two elements. Therefore, unless otherwise clearly defined in this specification, those skilled in the art can understand the specific meanings of the above terms in this utility model according to the specific circumstances.

[0026] According to the above description of this specification, those skilled in the art may also understand that the terms used below, such as "up", "down", "front", "back", "left", "right", "length", "width", "thickness", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", "center", "longitudinal", "lateral", "clockwise" or "counterclockwise", etc., which indicate the orientation or position relationship, are based on the orientation or position relationship shown in the drawings of this specification, and are only for the purpose of facilitating the explanation of the scheme of the utility model and simplifying the description, rather than explicitly or implicitly indicating that the device or element involved must have the specific orientation, be constructed and operate in a specific orientation. Therefore, the above-mentioned orientation or position relationship terms cannot be understood or interpreted as limitations on the scheme of the utility model.

[0027] In addition, the terms "first" or "second" used in this specification to refer to numbers or ordinals are only used for descriptive purposes and cannot be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this specification, the meaning of "plurality" is at least two, such as two, three or more, etc., unless otherwise clearly and specifically defined.

[0028] In other embodiments of the utility model, the heating element may also be an electric heating wire; the vertical side panel and the bottom panel may also be integrally formed; the vertical side panel and the bottom panel may not be formed by the 3D printing method, but each may adopt a separate structure; a honeycomb structure may be provided only inside the bottom panel; a honeycomb structure may be provided only on the vertical side panel; the honeycomb structure may also be replaced by criss-crossing channels, in which case the air in each channel forms an air column; the honeycomb structure may also be replaced by a hollow structure, in which case the air in each channel of the hollow structure forms an air column.

[0029] The embodiment of a heating stage bracket of the present invention has the same structure as the heating stage in each embodiment of the above-mentioned heating stage, and will not be described in detail herein.

Claims

1. A hot stage bracket, characterized in that: The invention comprises a support body with a mounting cavity, wherein the support body comprises a bottom plate and vertical side plates, and a plurality of air columns for heat insulation are arranged inside the bottom plate and / or the vertical side plates.

2. The hot stage bracket according to claim 1, characterized in that: The interior of the bottom plate and / or the vertical side plate is a honeycomb structure, and the air in each channel of the honeycomb structure forms the air column.

3. The hot stage support according to claim 1, characterized in that: A plurality of crisscross holes are arranged inside the bottom plate and / or the vertical side plate, and the air in each hole forms the air column.

4. The hot stage bracket according to claim 1, characterized in that: The interior of the bottom plate and / or the vertical side plate is a hollow structure, and the air in each hole of the hollow structure forms the air column.

5. The hot stage support according to any one of claims 1 to 4, characterized in that: The bracket comprises a placement plate for covering the heating element, and the upper end of the vertical side plate is provided with a limiting protrusion for limiting cooperation with the placement plate.

6. A heating platform, comprising a support and a heating element arranged on the support, characterized in that: The bracket comprises a bracket body having a mounting cavity, the bracket body comprises a bottom plate and vertical side plates, and a plurality of air columns for heat insulation are arranged inside the bottom plate and / or the vertical side plates.

7. The hot stage according to claim 6, characterized in that: The interior of the bottom plate and / or the vertical side plate is a honeycomb structure, and the air in each channel of the honeycomb structure forms the air column.

8. The hot stage according to claim 6, characterized in that: A plurality of crisscross holes are arranged inside the bottom plate and / or the vertical side plate, and the air in each hole forms the air column.

9. The hot stage according to claim 6, characterized in that: The interior of the bottom plate and / or the vertical side plate is a hollow structure, and the air in each hole of the hollow structure forms the air column.

10. The hot stage according to any one of claims 6 to 9, characterized in that: The heating element is located in the installation cavity and on the bottom plate. The bracket also includes a placement plate located above the heating element. The upper end of the vertical side plate is provided with a limiting protrusion for limiting and cooperating with the placement plate.

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