Trichlorosilane purification device in polycrystalline silicon production process

Abstract

The utility model provides a trichlorosilane purification device in a polycrystalline silicon production process, which belongs to the technical field of trichlorosilane purification devices and comprises a distillation component, the distillation component comprises a distillation barrel, a heating barrel is mounted in the distillation barrel, a top cover is mounted at the top of the distillation barrel, a first gas guide pipe is mounted on the surface of the top cover, and a second gas guide pipe is mounted on the surface of the top cover. A first gas guide pipe is mounted at one end of the heating barrel, a transfer barrel is mounted on the surface of the other end of the first gas guide pipe, a second gas guide pipe is mounted on one side of the bottom of the transfer barrel, a stirring rod is rotatably connected to the interior of the heating barrel, and a plurality of scrapers are mounted on the surface of the stirring rod. According to the method, the purity of trichlorosilane is improved, so that the quality and the purity of a polycrystalline silicon product are improved, meanwhile, impurities and wastes can be separated, the workload of subsequent treatment is reduced, the production efficiency is improved, the energy consumption and the production cost can be reduced, and the resource utilization rate is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of trichlorosilane purification devices, and particularly relates to a trichlorosilane purification device in the process of polysilicon production. Background Technique

[0002] Polysilicon is a form of elemental silicon. When molten elemental silicon solidifies under supercooled conditions, silicon atoms are arranged in a diamond lattice form to form many crystal nuclei. If these crystal nuclei grow into grains with different crystal plane orientations, then these grains combine to crystallize into polysilicon. Trichlorosilane is an inorganic compound with the chemical formula SiHCl3. Alias: trichlorosilane, silicon chloroform, trichlorosilane.

[0003] In the process of polysilicon production, trichlorosilane can be purified by distillation. Through the distillation process, trichlorosilane is separated and purified according to its boiling point difference. The boiling point of trichlorosilane is 57.6 °C, and the boiling points of the main impurities are generally higher. The existing purification devices are inconvenient to stir the liquid when purifying trichlorosilane, thus reducing the purification effect of trichlorosilane. At the same time, it is inconvenient to cool and liquefy trichlorosilane gas, thus reducing the working efficiency of the purification device. Content of the Utility Model

[0004] The purpose of the utility model is to provide a trichlorosilane purification device in the process of polysilicon production, aiming to solve the problems put forward in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solutions:

[0006] A trichlorosilane purification device in the process of polysilicon production, comprising:

[0007] A distillation component, the distillation component includes a distillation barrel, a heating barrel is installed inside the distillation barrel, a top cover is installed on the top of the distillation barrel, a first air duct is installed on the surface of the top cover, a transfer barrel is installed on the surface of the other end of the first air duct, a second air duct is installed on one side of the bottom of the transfer barrel, a stirring rod is rotatably connected inside the heating barrel, a plurality of scraping plates are installed on the surface of the stirring rod, an orifice plate adapted to the scraping plates is installed on the bottom of the top cover, a driving mechanism for driving the stirring rod is installed on the top of the top cover, a control valve is installed on the bottom of the heating barrel, and a control crank for adjusting the control valve is installed on the bottom of the distillation barrel; and

[0008] Cooling assembly, the cooling assembly includes a cooling box arranged on one side of the distillation barrel, a connection valve is installed on the surface of the cooling box, and the connection valve is clamped with the second air duct. One end of the connection valve located inside the cooling box is fixedly connected with a third air duct. A condenser pipe is installed on the surface of the other end of the third air duct. A heat dissipation fan is installed on the top of the cooling box. A collection hopper is installed at the bottom of the cooling box, and the other end of the condenser pipe communicates with the collection hopper. A drain valve is installed at the bottom of the collection hopper.

[0009] As a preferred solution of the present utility model, an electric telescopic rod is rotatably connected to the surface of the distillation barrel, a connection block is fixedly connected to the surface of the top cover, and the extended end of the electric telescopic rod is rotatably connected to the connection block.

[0010] As a preferred solution of the present utility model, the driving mechanism includes a first pulley fixedly connected to the surface of the stirring rod, and a transmission belt is arranged on the surface of the first pulley; and

[0011] A servo motor installed on the surface of the connection block, a second pulley is fixedly connected to the surface of the output shaft of the servo motor, and the transmission belt is in contact with the second pulley.

[0012] As a preferred solution of the present utility model, an exhaust pipe is installed on the surface of the cooling box, and the exhaust pipe is fixedly connected to one end of the condenser pipe. A drain pipe is installed on the surface of the cooling box and below the exhaust pipe, and the drain pipe is fixedly connected to the other end of the condenser pipe.

[0013] As a preferred solution of the present utility model, a water level observation board is installed on the surface of the collection hopper, and the water level observation board is a transparent observation tube.

[0014] As a preferred solution of the present utility model, a protection door is rotatably connected to the surface of the cooling box, and an adjustment handle is installed on the surface of the protection door.

[0015] Compared with the prior art, the beneficial effects of the present utility model are:

[0016] Through the combined use of the distillation assembly and the cooling assembly, this solution can remove impurities in trichlorosilane, improve the purity of trichlorosilane, thereby improving the quality and purity of polysilicon products. At the same time, it can separate impurities and waste materials, reduce the workload of subsequent processing, improve production efficiency, thereby reducing energy consumption and production costs, and improving resource utilization rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings are used to provide a further understanding of the present utility model, and constitute a part of the specification. They are used together with the embodiments of the present utility model to explain the present utility model, and do not constitute a limitation to the present utility model.

[0018] In the accompanying drawings:

[0019] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0020] Figure 2 is a schematic diagram of the distillation component in the structure of the present utility model;

[0021] Figure 3 is a schematic diagram of the distillation component in the structure of the present utility model;

[0022] Figure 4 is a schematic diagram of the cooling component in the structure of the present utility model;

[0023] Figure 5 is a schematic diagram of the cooling component in the structure of the present utility model.

[0024] In the figure: 1. Distillation component; 101. Distillation barrel; 102. Heating barrel; 103. Top cover; 104. First air duct; 105. Transfer barrel; 106. Second air duct; 107. Stirring rod; 108. Scraper; 109. Orifice plate; 110. First pulley; 111. Transmission belt; 112. Servo motor; 113. Second pulley; 114. Electric telescopic rod; 115. Control valve; 116. Control crank; 117. Connecting block; 2. Cooling component; 201. Cooling box; 202. Connecting valve; 203. Third air duct; 204. Condenser; 205. Radiating fan; 206. Exhaust pipe; 207. Drain pipe; 208. Collection hopper; 209. Drain valve; 210. Water level observation board; 211. Protection door; 212. Adjusting handle. Detailed implementation manners

[0025] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0026] Embodiment

[0027] Please refer to Figures 1-5 , the technical solutions provided in this embodiment are as follows:

[0028] A trichlorosilane purification device in the polysilicon production process, comprising: a distillation assembly 1, the distillation assembly 1 includes a distillation barrel 101, a heating barrel 102 is installed inside the distillation barrel 101, a top cover 103 is installed on the top of the distillation barrel 101, a first gas guide pipe 104 is installed on the surface of the top cover 103, a transfer barrel 105 is installed on the surface of the other end of the first gas guide pipe 104, a second gas guide pipe 106 is installed on one side of the bottom of the transfer barrel 105, a stirring rod 107 is rotatably connected inside the heating barrel 102, a plurality of scraping plates 108 are installed on the surface of the stirring rod 107, an orifice plate 109 adapted to the scraping plates 108 is installed on the bottom of the top cover 103, a driving mechanism for driving the stirring rod 107 is installed on the top of the top cover 103, a control valve 115 is installed on the bottom of the heating barrel 102, a control crank 116 for adjusting the control valve 115 is installed on the bottom of the distillation barrel 101, and a cooling assembly 2, the cooling assembly 2 includes a cooling box 201 arranged on one side of the distillation barrel 101, a connection valve 202 is installed on the surface of the cooling box 201, and the connection valve 202 is clamped with the second gas guide pipe 106, a third gas guide pipe 203 is fixedly connected to one end of the connection valve 202 located inside the cooling box 201, a condensing pipe 204 is installed on the surface of the other end of the third gas guide pipe 203, a heat dissipation fan 205 is installed on the top of the cooling box 201, a collecting hopper 208 is installed on the bottom of the cooling box 201, and the other end of the condensing pipe 204 is communicated with the collecting hopper 208, a drain valve 209 is installed on the bottom of the collecting hopper 208.

[0029] In a specific embodiment of the present invention, through the combined use of the distillation assembly 1 and the cooling assembly 2, impurities in trichlorosilane can be removed, the purity of trichlorosilane can be improved, thereby improving the quality and purity of polysilicon products. At the same time, impurities and waste can be separated, reducing the workload of subsequent processing, improving production efficiency, thereby reducing energy consumption and production costs, and improving resource utilization rate.

[0030] Specifically, an electric telescopic rod 114 is rotatably connected to the surface of the distillation barrel 101, a connection block 117 is fixedly connected to the surface of the top cover 103, and the extending end of the electric telescopic rod 114 is rotatably connected to the connection block 117.

[0031] In a specific embodiment of the present invention, through the combined use of the electric telescopic rod 114 and the connection block 117, the movement of the extending end of the electric telescopic rod 114 drives the connection block 117 to move, thereby driving the top cover 103 to open and close.

[0032] Specifically, the driving mechanism includes a first pulley 110 fixedly connected to the surface of the stirring rod 107. A transmission belt 111 is arranged on the surface of the first pulley 110, and a servo motor 112 is installed on the surface of the connecting block 117. A second pulley 113 is fixedly connected to the surface of the output shaft of the servo motor 112, and the transmission belt 111 is in contact with the second pulley 113.

[0033] In a specific embodiment of the present utility model, when the servo motor 112 is started, its output shaft drives the second pulley 113 to rotate. The rotation of the second pulley 113 drives the first pulley 110 to rotate under the action of the transmission belt 111, thereby driving the stirring rod 107 to rotate.

[0034] Specifically, an exhaust pipe 206 is installed on the surface of the cooling box 201, and the exhaust pipe 206 is fixedly connected to one end of the condensing pipe 204. A drain pipe 207 is installed on the surface of the cooling box 201 and below the exhaust pipe 206, and the drain pipe 207 is fixedly connected to the other end of the condensing pipe 204.

[0035] In a specific embodiment of the present utility model, through the setting of the exhaust pipe 206, the gas in the condensing pipe 204 can be discharged. Through the setting of the drain pipe 207, the liquid inside the condensing pipe 204 can be discharged.

[0036] Specifically, a water level observation board 210 is installed on the surface of the collection hopper 208, and the water level observation board 210 is a transparent observation tube.

[0037] In a specific embodiment of the present utility model, through the setting of the water level observation board 210, the liquid level height inside the collection hopper 208 can be observed, so as to facilitate the discharge of the liquid inside the collection hopper 208.

[0038] Specifically, a protection door 211 is rotatably connected to the surface of the cooling box 201, and an adjustment handle 212 is installed on the surface of the protection door 211.

[0039] In a specific embodiment of the present utility model, through the setting of the protection door 211, the cooling box 201 can be sealed. Through the setting of the adjustment handle 212, it is convenient to open and close the protection door 211.

[0040] Working principle: When in use, put polysilicon inside the heating barrel 102, then close the top cover 103 and start the distillation barrel 101. At this time, the distillation barrel 101 heats the polysilicon through the heating barrel 102. At this time, the gas will enter the inside of the transfer barrel 105 through the first gas pipe 104, and then enter the inside of the third gas pipe 203 through the second gas pipe 106 and the connection valve 202. At this time, the liquid enters the inside of the condenser tube 204. At this time, the cooling box 201 will cool the condenser tube 204. The cooled liquid will enter the inside of the collection hopper 208. When the heating barrel 102 heats the polysilicon, start the servo motor 112. When the servo motor 112 starts, its output shaft drives the second pulley 113 to rotate. The rotation of the second pulley 113 drives the first pulley 110 to rotate under the action of the transmission belt 111, thereby driving the stirring rod 107 to rotate. The rotation of the stirring rod 107 drives the scraper 108 to rotate, so as to stir the polysilicon and trichlorosilane. At the same time, due to the setting of the orifice plate 109, the probability of the polysilicon jamming the scraper 108 can be prevented. At the same time, the scraper 108 scrapes the inner wall of the orifice plate 109.

[0041] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A trichlorosilane purification device in a polysilicon production process, characterized in that: include: A distillation assembly (1), the distillation assembly (1) comprising a distillation barrel (101), a heating barrel (102) being installed inside the distillation barrel (101), a top cover (103) being installed on the top of the distillation barrel (101), a first air guide tube (104) being installed on the surface of the top cover (103), a transfer barrel (105) being installed on the surface of the other end of the first air guide tube (104), a second air guide tube (106) being installed on one side of the bottom of the transfer barrel (105), and a transfer tube (106) being installed on the inner side of the heating barrel (102). The top cover (103) is movably connected to a stirring rod (107), a plurality of scrapers (108) are installed on the surface of the stirring rod (107), a perforated plate (109) adapted to the scrapers (108) is installed at the bottom of the top cover (103), a driving mechanism for driving the stirring rod (107) is installed at the top of the top cover (103), a control valve (115) is installed at the bottom of the heating barrel (102), and a control crank (116) for adjusting the control valve (115) is installed at the bottom of the distillation barrel (101); and A cooling component (2), wherein the cooling component (2) comprises a cooling box (201) arranged on one side of a distillation barrel (101), a connecting valve (202) being installed on the surface of the cooling box (201), and the connecting valve (202) being snap-connected with the second air duct (106), one end of the connecting valve (202) located on the inner side of the cooling box (201) being fixedly connected with a third air duct (203), a condensing tube (204) being installed on the surface of the other end of the third air duct (203), a cooling fan (205) being installed on the top of the cooling box (201), a collecting hopper (208) being installed on the bottom of the cooling box (201), and the other end of the condensing tube (204) being connected with the collecting hopper (208), and a drain valve (209) being installed on the bottom of the collecting hopper (208).

2. The trichlorosilane purification device in a polysilicon production process according to claim 1, characterized in that: The surface of the distillation barrel (101) is rotatably connected to an electric telescopic rod (114), the surface of the top cover (103) is fixedly connected to a connecting block (117), and the extended end of the electric telescopic rod (114) is rotatably connected to the connecting block (117).

3. The trichlorosilane purification device in a polysilicon production process according to claim 1, characterized in that: The driving mechanism comprises a first pulley (110) fixedly connected to the surface of the stirring rod (107), and a transmission belt (111) is arranged on the surface of the first pulley (110); and A servo motor (112) is mounted on the surface of a connection block (117); a second pulley (113) is fixedly connected to the surface of an output shaft of the servo motor (112), and a transmission belt (111) is in contact with the second pulley (113).

4. The trichlorosilane purification device in a polysilicon production process according to claim 1, characterized in that: An exhaust pipe (206) is installed on the surface of the cooling box (201), and the exhaust pipe (206) is fixedly connected to one end of the condenser pipe (204); a drain pipe (207) is installed on the surface of the cooling box (201) and below the exhaust pipe (206), and the drain pipe (207) is fixedly connected to the other end of the condenser pipe (204).

5. The trichlorosilane purification device in a polysilicon production process according to claim 1, characterized in that: A water level observation plate (210) is installed on the surface of the collection bucket (208), and the water level observation plate (210) is a transparent observation tube.

6. The trichlorosilane purification device in a polysilicon production process according to claim 1, characterized in that: A protective door (211) is rotatably connected to the surface of the cooling box (201), and an adjustment handle (212) is installed on the surface of the protective door (211).

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