Three-dimensional force sensor

Abstract

The utility model relates to the technical field of force sensors, in particular to a three-dimensional force sensor. The three-dimensional force sensor comprises a stress rod and a sensing part. The sensing part comprises a force transmission seat and a force sensing arm; one end of the stress rod is connected with the force sensing arm, and the other end of the stress rod extends along the axial direction of the transmission seat; the force transmission seat comprises an inner surface and an outer surface which are opposite in the radial direction, the inner surface surrounds to form an induction space, and the force induction arm is arranged in the induction space; the force sensing arm comprises a first sensing cantilever beam and a second sensing cantilever beam which are crossed, and the extension end of the first sensing cantilever beam and the extension end of the second sensing cantilever beam are respectively connected with the inner surface of the force transmission seat; the first induction cantilever beam and the second induction cantilever beam are respectively provided with a strain sensor. The three-dimensional force sensor can solve the problem that the strain signal output by the strain sensor on the force sensing arm in the prior art cannot accurately reflect the acting force.

Description

Technical Field

[0001] The utility model relates to the technical field of force sensors, in particular to a three-dimensional force sensor. Background Art

[0002] A force sensor is a device that senses force signals and converts them into electrical signals according to specific patterns. Force sensors include one-dimensional, two-dimensional, and three-dimensional force sensors. In practical applications, one-dimensional and two-dimensional sensors cannot meet the requirements of equipment.

[0003] However, when the three-dimensional force sensor in the related art is subjected to an axial force, the force sensing arm will cause a pulling force on the connection position between it and the force transmission seat, causing a stress concentration problem at the connection position. The stress concentration at the connection position has an adverse effect on the micro-strain of the force sensing arm, so that the strain signal output by the strain sensor on the force sensing arm cannot accurately reflect the force situation. Utility Model Content

[0004] The utility model provides a three-dimensional force sensor, which can solve the problem in the related art that the strain signal output by the strain sensor on the force sensing arm cannot accurately reflect the applied force.

[0005] In order to solve the technical problems in the background technology, the utility model provides a three-dimensional force sensor, which includes a force-bearing rod and a sensing part;

[0006] The sensing portion includes a force transmission seat and a force sensing arm; one end of the force-bearing rod is connected to the force sensing arm, and the other end of the force-bearing rod extends along the axial direction of the transmission seat;

[0007] The force transmission seat includes an inner surface and an outer surface that are radially opposite to each other, the inner surface surrounds and forms a sensing space, and the force sensing arm is arranged in the sensing space;

[0008] The force sensing arm includes a first sensing cantilever beam and a second sensing cantilever beam intersecting each other, wherein an extending end of the first sensing cantilever beam and an extending end of the second sensing cantilever beam are respectively connected to the inner surface of the force transmission seat;

[0009] The first sensing cantilever beam and the second sensing cantilever beam are respectively provided with strain sensors.

[0010] Optionally, the first sensing cantilever beam includes a first cantilever beam extension portion and a second cantilever beam extension portion extending in opposite directions;

[0011] The second sensing cantilever beam includes a third cantilever beam extension portion and a fourth cantilever beam extension portion extending in opposite directions;

[0012] An intersection of the first cantilever beam extension, the second cantilever beam extension, the third cantilever beam extension, and the fourth cantilever beam extension is connected to one end of the stress-bearing rod.

[0013] Optionally, an inner groove-shaped gap is formed at a corner position where the extended end of the first sensing cantilever beam is connected to the inner surface of the force transmission seat;

[0014] An inner groove-shaped gap is formed at a corner position where the extended end of the second sensing cantilever beam is connected to the inner surface of the force transmission seat.

[0015] Optionally, the inner concave surface of the inner groove-shaped gap is a curved surface.

[0016] Optionally, the gap is located at a corner position on one side where the first sensing cantilever beam is connected to the inner surface of the force transmission seat and is consistent with the extension direction of the force-bearing rod;

[0017] The gap is located at a corner position on one side where the second sensing cantilever beam is connected to the inner surface of the force transmission seat in the same direction as the extension direction of the force-bearing rod.

[0018] Optionally, a circumferential length of the inner groove-shaped gap is greater than a circumferential length of the extension portion of the first sensing cantilever beam or the extension portion of the second sensing cantilever beam connected to the inner surface of the force transmission seat.

[0019] Optionally, on the inner surface of the force transmission seat, slots are formed at positions corresponding to the extending end of the first sensing cantilever beam and the extending end of the second sensing cantilever beam respectively;

[0020] The extending end of the first sensing cantilever beam and the extending end of the second sensing cantilever beam extend into the slot correspondingly.

[0021] Optionally, the extended end of the first sensing cantilever beam and the extended end of the second sensing cantilever beam form a convex structure;

[0022] On the inner surface of the force transmission seat, slots are formed at positions corresponding to the extending end of the first sensing cantilever beam and the extending end of the second sensing cantilever beam respectively;

[0023] The convex structure extends into the card slot accordingly;

[0024] A gap is formed between the outer surface of the convex structure and the inner surface of the slot.

[0025] Optionally, when the force-bearing rod bears a force consistent with the extending direction of the force-bearing rod, the convex structure rotates relative to the slot.

[0026] Optionally, the outer surface of the convex structure and the inner surface of the slot are both arc surfaces;

[0027] The outer surface of the convex structure is inscribed in the inner surface of the slot.

[0028] Optionally, the force transfer seat includes an upper seat and a lower seat, the upper portion of the slot is formed on the inner surface of the upper seat, and the lower portion of the slot is formed on the inner surface of the lower seat.

[0029] The utility model provides a three-dimensional force sensor which forms gaps at the connection positions between the extended end of the first sensing cantilever beam and the extended end of the second sensing cantilever beam and the inner surface of the force transmission seat, thereby avoiding stress concentration at the connection positions, so that the stress concentration area is located on the force sensing arm to improve the sensitivity of the force sensing arm to strain generated in response to the applied force. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0031] Figure 1 A schematic structural diagram of a three-dimensional force sensor provided by a first embodiment is shown;

[0032] Figure 2 Shown Figure 1 A schematic diagram of a longitudinal cross-sectional structure;

[0033] Figure 3 A schematic structural diagram of a three-dimensional force sensor provided by a second embodiment is shown;

[0034] Figure 4 Shown Figure 3 A schematic diagram of a longitudinal cross-sectional structure;

[0035] Figure 5 A schematic diagram of the explosion structure of a three-dimensional force sensor provided by a third embodiment is shown;

[0036] Figure 6 Shown Figure 5 Schematic diagram of the front structure;

[0037] Figure 7 Shown Figure 6 A schematic diagram of a longitudinal cross-sectional structure;

[0038] Figure 8 A schematic diagram of the enlarged structure of the connection position between the convex structure and the slot in the third embodiment is shown. DETAILED DESCRIPTION

[0039] The following is a clear and complete description of the technical solutions of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0040] In describing this utility model, it should be noted that the descriptions of the orientations or positional relationships indicated by terms such as "center," "up," "down," "left," "right," "vertical," "horizontal," "inside," and "outside" in this embodiment are intended only to explain the relative positional relationships and movement of components in a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed to indicate or imply relative importance.

[0041] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, fixed installation, or a detachable connection, detachable installation, or an integral connection, an integral installation; it can be a mechanical connection or an electrical connection, wherein the electrical connection can include any one or a combination of two of a power drive connection and a communication connection; it can be a direct connection, a direct installation, or an indirect connection or indirect installation through an intermediate medium, or it can be internal communication between two elements, which can be a wireless connection or a wired connection. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0042] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0043] Figure 1 FIG. 1 shows a schematic structural diagram of a three-dimensional force sensor provided by the first embodiment of the present utility model. Figure 2 Shown Figure 1 Schematic diagram of the longitudinal cross-section structure.

[0044] from Figure 1 and Figure 2 As can be seen from the figure, the three-dimensional force sensor structure shown in the first embodiment includes a force-bearing rod 100 and a sensing part 200.

[0045] The sensing portion 200 includes a force transmission seat 210 and a force sensing arm 220. For example, the force rod 100, the force transmission seat 210 and the force sensing arm 220 can be integrally formed. Figure 1 As can be seen in FIG, the force transmission seat 210 includes radial direction A, circumferential direction B and axial direction C.

[0046] One end of the force-bearing rod 100 is connected to the force sensing arm 220, and the other end of the force-bearing rod 100 extends along the axial direction C of the transmission seat 210. Figure 1 and Figure 2 As can be seen in the figure, the other end of the force-bearing rod 100 extends upward along the axial direction C of the transmission seat 210.

[0047] Continue to refer to Figure 1 and Figure 2 The force transfer seat 210 includes an inner surface 211 and an outer surface 212 that are opposite to each other in a radial direction A. The inner surface 211 surrounds a sensing space 2110, and the force sensing arm 200 is disposed in the sensing space 2110. Exemplarily, the inner surface 211 and the outer surface 212 of the force transfer seat 210 are both arc surfaces.

[0048] Continue to refer to Figure 1 The force sensing arm 220 includes a first sensing cantilever beam 221 and a second sensing cantilever beam 222 intersecting each other. The extending end of the first sensing cantilever beam 221 and the extending end of the second sensing cantilever beam 222 are completely connected to the inner surface 211 of the force transmission seat 210 respectively.

[0049] The first sensing cantilever beam 221 and the second sensing cantilever beam 222 are respectively provided with strain sensors (not shown in the figure). Exemplarily, the strain sensors form a Wheatstone bridge circuit, which is used to convert the sensed microstrain of the first sensing cantilever beam 221 or the second sensing cantilever beam 222 into an electrical signal output. Wherein, the extension direction of the first sensing cantilever beam 221, the extension direction of the second sensing cantilever beam 222 and the extension direction of the force-bearing rod 100 respectively form the X-axis, Y-axis and Z-axis of the three-dimensional coordinate system. Exemplarily, the first sensing cantilever beam 221 and the second sensing cantilever beam 222 are perpendicular to each other, so that the extension direction of the first sensing cantilever beam 221, the extension direction of the second sensing cantilever beam 222 and the extension direction of the force-bearing rod 100 form a three-dimensional rectangular coordinate system.

[0050] During use, because the force sensing arm 220 is connected between the force-bearing rod 100 and the inner surface of the force transmission base 210, when the force-bearing rod 100 of the three-dimensional force sensor provided in this embodiment is subjected to a force and applies this force to the force sensing arm 220, the force transmission base 210 simultaneously applies a reaction force to the force sensing arm 220, causing micro-strain in the force sensing arm 220. This micro-strain is analyzed to determine the direction and magnitude of the force through the strain signals output by the first sensing cantilever beam 221 and the second sensing cantilever beam 222.

[0051] Continue to refer to Figure 1 The first sensing cantilever beam 221 includes a first cantilever beam extension and a second cantilever beam extension extending in opposite directions. In this embodiment, the first cantilever beam extension extends along the positive direction of the X-axis of the three-dimensional coordinate system, and the second cantilever beam extension extends along the negative direction of the X-axis of the three-dimensional coordinate system. The second sensing cantilever beam 222 includes a third cantilever beam extension and a fourth cantilever beam extension extending in opposite directions. In this embodiment, the third cantilever beam extension extends along the positive direction of the Y-axis of the three-dimensional coordinate system, and the fourth cantilever beam extension extends along the negative direction of the Y-axis of the three-dimensional coordinate system. The intersection of the first cantilever beam extension, the second cantilever beam extension, the third cantilever beam extension, and the fourth cantilever beam extension is connected to one end of the force-bearing rod 100. In this embodiment, the intersection is the origin of the three-dimensional coordinate system.

[0052] At least one strain sensor is respectively provided on the first cantilever beam extension portion, the second cantilever beam extension portion, the third cantilever beam extension portion and the fourth cantilever beam extension portion, for acquiring microstrain signals of the corresponding cantilever beam extension portion.

[0053] Figure 3 FIG. 2 shows a schematic structural diagram of a three-dimensional force sensor provided by the second embodiment of the present utility model. Figure 4 Shown Figure 3 Schematic diagram of the longitudinal cross-section structure. Figure 5 FIG. 1 shows a schematic diagram of the explosion structure of a three-dimensional force sensor provided by the third embodiment of the present utility model. Figure 6 Shown Figure 5 Schematic diagram of the front structure, Figure 7 Shown Figure 6 Schematic diagram of the longitudinal cross-section structure.

[0054] The three-dimensional force sensor structure provided by the second embodiment and the third embodiment is Figure 1 and Figure 2 Based on the first embodiment shown, the extending end of the first sensing cantilever beam 221 and the extending end of the second sensing cantilever beam 222 are respectively connected to the inner surface 211 of the force transmission seat 210 to form a gap 230 .

[0055] When the force-bearing rod 100 is subjected to a force directed downward along the axial direction C (i.e., downward along the Z-axis of the three-dimensional coordinate system), the extended end of the force sensing arm 220 exerts a tensile force on the connection point between the force sensing arm 220 and the force transmission seat 210, causing stress concentration at this connection point. This stress concentration at this connection point adversely affects the microstrain of the force sensing arm 220, resulting in the strain signal output by the strain sensor on the force sensing arm 220 not accurately reflecting the applied force. In the second and third embodiments, gaps 230 are formed at the connection points where the extended ends of the first sensing cantilever beam 221 and the second sensing cantilever beam 222 connect to the inner surface 211 of the force transmission seat 210, respectively. These gaps 230 block force transmission between the force transmission seat 210 and the force sensing arm 220, thereby preventing stress concentration at this connection point and shifting the stress concentration area to the force sensing arm 220, thereby increasing the sensitivity of the force sensing arm 220 to strain generated in response to the applied force.

[0056] Continue to refer to Figure 3 and Figure 4 In this second embodiment, an inner groove-shaped gap 230 is formed at the location where the extended end of the first sensing cantilever beam 221 connects to the inner surface 211 of the force transmission seat 210; and an inner groove-shaped gap 230 is formed at the corner location where the extended end of the second sensing cantilever beam 222 connects to the inner surface 211 of the force transmission seat 210. In this embodiment, inner groove-shaped gaps 230 are formed at the corner locations where the extended ends of the first, second, third, and fourth cantilever beam extensions connect to the inner surface 211 of the force transmission seat 210.

[0057] In this embodiment, the concave surface of the inner groove is a concave arc surface. In this embodiment, the gap 230 including the concave arc surface is formed at the connection position between the extended end of the first sensing cantilever beam 221 and the extended end of the second sensing cantilever beam 222 and the inner surface 211 of the force transmission seat 210, so as to disperse the stress concentrated at the connection position.

[0058] Continue to refer to Figure 3 and Figure 4, the gap 230 is located at the corner position on one side where the first sensing cantilever beam 221 and the inner surface 211 of the force transfer seat 210 are connected, which is consistent with the extension direction of the force-bearing rod 100; the gap 230 is located at the corner position on one side where the second sensing cantilever beam 222 and the inner surface 211 of the force transfer seat 210 are connected, which is consistent with the extension direction of the force-bearing rod 100. For example, the force-bearing rod 100 in this embodiment extends upward along the axial direction C of the force transfer seat 210, that is, extends along the positive direction of the Z axis of the three-dimensional coordinate system, so that the gap 230 is located at the upper corner position where each sensing cantilever beam is connected to the inner surface 211 of the force transfer seat 210. In order to alleviate the problem of stress concentration in the upper area of ​​the connection position when the force-bearing rod 100 is subjected to the axial force C.

[0059] For example, the length of the inner groove-shaped gap 230 in the circumferential direction B is greater than the circumferential length of the extension of the first sensing cantilever beam 221 or the extension of the second sensing cantilever beam 222 connected to the inner surface of the force transmission seat 210. If the length of the gap 230 is equal to or less than the length of the extension of each sensing cantilever beam, stress concentration may occur at the local connection point. Therefore, by making the length of the gap 230 greater than the length of each sensing cantilever beam extension, local stress concentration is avoided.

[0060] In order to further block the force transmission between the force transfer seat and the force sensing arm and avoid stress concentration at the connection position, grooves are formed on the inner surface of the force transfer seat at the positions corresponding to the extended ends of the first sensing cantilever beam and the second sensing cantilever beam; the extended ends of the first sensing cantilever beam and the second sensing cantilever beam extend into the grooves respectively.

[0061] Figure 5 FIG. 1 shows a schematic diagram of the explosion structure of a three-dimensional force sensor provided by the third embodiment of the present utility model. Figure 6 Shown Figure 5 Schematic diagram of the front structure, Figure 7 Shown Figure 6 Schematic diagram of the longitudinal cross-section structure.

[0062] from Figure 6 As can be seen in the figure, the three-dimensional force sensor shown in the third embodiment includes a force-bearing rod 100 and a sensing portion 200. The sensing portion 200 includes a force transmission seat 210 and a force sensing arm 220. The force transmission seat 210 includes radial, circumferential and axial directions.

[0063] One end of the stress-bearing rod 100 is connected to the force sensing arm 220, and the other end of the stress-bearing rod 100 extends along the axial direction of the transmission base 210. The other end of the stress-bearing rod 100 extends upward along the axial direction of the transmission base 210.

[0064] from Figure 5 As can be seen in the figure, the force transfer seat 210 includes a radially opposite inner surface 211 and an outer surface 212. The inner surface 211 surrounds a sensing space 2110, and the force sensing arm 200 is disposed in the sensing space 2110. Exemplarily, the inner surface 211 and the outer surface 212 of the force transfer seat 210 are both arc surfaces.

[0065] Continue to refer to Figure 6 The force sensing arm 220 includes a first sensing cantilever beam 221 and a second sensing cantilever beam 222 intersecting each other. The extending end of the first sensing cantilever beam 221 and the extending end of the second sensing cantilever beam 222 are respectively connected to the inner surface 211 of the force transmission seat 210 to form a Figure 7 and Figure 8 Gap 230 is shown.

[0066] The first sensing cantilever beam 221 and the second sensing cantilever beam 222 are respectively provided with strain sensors (not shown in the figure). Exemplarily, the strain sensors form a Wheatstone bridge circuit, which is used to convert the sensed microstrain of the first sensing cantilever beam 221 or the second sensing cantilever beam 222 into an electrical signal output. Wherein, the extension direction of the first sensing cantilever beam 221, the extension direction of the second sensing cantilever beam 222 and the extension direction of the force-bearing rod 100 respectively form the X-axis, Y-axis and Z-axis of the three-dimensional coordinate system. Exemplarily, the first sensing cantilever beam 221 and the second sensing cantilever beam 222 are perpendicular to each other, so that the extension direction of the first sensing cantilever beam 221, the extension direction of the second sensing cantilever beam 222 and the extension direction of the force-bearing rod 100 form a three-dimensional rectangular coordinate system.

[0067] During use, because the force sensing arm 220 is connected between the force-bearing rod 100 and the force transmission base 210, when the force-bearing rod 100 of the three-dimensional force sensor is subjected to a force and applies this force to the force sensing arm 220, the force transmission base 210 simultaneously applies a reaction force to the force sensing arm 220, causing the force sensing arm 220 to experience micro-strain. The direction and magnitude of the applied force are analyzed using the strain signals output by the first sensing cantilever beam 221 and the second sensing cantilever beam 222.

[0068] Continue to refer to Figure 6The first sensing cantilever beam 221 includes a first cantilever beam extension and a second cantilever beam extension extending in opposite directions. In this embodiment, the first cantilever beam extension extends in the positive direction of the X-axis of the three-dimensional coordinate system, and the second cantilever beam extension extends in the negative direction of the X-axis of the three-dimensional coordinate system. The second sensing cantilever beam 222 includes a third cantilever beam extension and a fourth cantilever beam extension extending in opposite directions. In this embodiment, the third cantilever beam extension extends in the positive direction of the Y-axis of the three-dimensional coordinate system, and the fourth cantilever beam extension extends in the negative direction of the Y-axis of the three-dimensional coordinate system. The intersection of the first cantilever beam extension, the second cantilever beam extension, the third cantilever beam extension, and the fourth cantilever beam extension is connected to one end of the force-bearing rod 100. In this embodiment, the intersection is the origin of the three-dimensional coordinate system.

[0069] At least one strain sensor is respectively provided on the first cantilever beam extension portion, the second cantilever beam extension portion, the third cantilever beam extension portion and the fourth cantilever beam extension portion, for acquiring microstrain signals of the corresponding cantilever beam extension portion.

[0070] Continue to refer to Figures 5 to 7 The extended ends of the first sensing cantilever beam 221 and the second sensing cantilever beam 222 each form a convex structure 240. Slots 250 are formed on the inner surface 211 of the force transmission base 210 at locations corresponding to the extended ends of the first sensing cantilever beam 221 and the second sensing cantilever beam 222. The convex structures 240 extend into the slots 250, forming a gap between the outer surface of the convex structure 240 and the inner surface of the slots 250.

[0071] When the force-bearing rod 100 bears a force in the same direction as the extending direction of the force-bearing rod 100 , the convex structure 240 rotates relative to the locking slot 250 .

[0072] The outer surface of the convex structure 240 and the inner surface of the latching slot 250 are both curved surfaces, and the outer surface of the convex structure 240 is inscribed within the inner surface of the latching slot 250. In this embodiment, the convex structure 240 is cylindrical, comprising a circumferential surface and first and second side end surfaces located on either side of the circumferential surface. The circumferential surface is an outwardly convex curved surface, and the first and second side end surfaces are parallel planes. The outer surface of the convex structure 240 is a cylindrical circumferential surface. In this embodiment, the shape of the latching slot 250 corresponds to that of the convex structure 240. The inner surface of the latching slot 250 is an inwardly concave curved surface corresponding to the circumferential surface of the convex structure 240. A gap 230 is formed between the inner surface of the latching slot 250 and the outer surface of the convex structure 240, and the latching slot 250 contacts the first and second side end surfaces of the convex structure 240.

[0073] In other embodiments, the outer surface of the convex structure 240 is an outwardly convex spherical arc surface, and the inner surface of the locking groove 250 is an inwardly concave spherical arc surface.

[0074] In this embodiment, the force transfer seat 210 includes an upper seat 310 and a lower seat 320 . The inner surface of the upper seat 310 forms the upper portion of the slot 250 , and the inner surface of the lower seat 320 forms the lower portion of the slot 250 .

[0075] Figure 8 The enlarged structural diagram of the connection position between the convex structure and the card slot in the third embodiment is shown. Figure 8 As can be seen in the figure, the upper seat 310 and the lower seat 320 are connected to form the force transmission seat 210. The force transmission seat 210 has a slot 250 formed therein. A gap 230 is formed between the inner surface 251 of the slot 250 and the outer surface 241 of the convex structure 240. The outer surface 240 of the convex structure 240 is inscribed in the inner surface 251 of the slot 250 to form an inscribed position 242. The inscribed position 242 includes an upper inscribed position and a lower inscribed position.

[0076] exist Figure 8 When the right side of the force sensing arm shown receives the downward force F from the force-bearing rod, the convex structure 240 tends to rotate clockwise relative to the slot 250, and the convex structure 240 applies downward pressure to the inscribed position 242 on the lower side, while the convex structure 240 does not apply force to the inscribed position 242 on the upper side, so that the structure cuts off the force transmission between the force sensing arm and the force transmission seat, and does not generate stress concentration at the connection position between the force sensing arm and the force transmission seat, but causes stress to be concentrated on the force sensing arm, thereby causing the force sensing arm to generate micro-strain, thereby improving the sensitivity of the micro-strain response of the force sensing arm.

[0077] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A three-dimensional force sensor, characterized in that: The three-dimensional force sensor includes a force-bearing rod and a sensing portion; The sensing portion includes a force transmission seat and a force sensing arm; one end of the force-bearing rod is connected to the force sensing arm, and the other end of the force-bearing rod extends along the axial direction of the transmission seat; The force transmission seat includes an inner surface and an outer surface that are radially opposite to each other, the inner surface surrounds and forms a sensing space, and the force sensing arm is arranged in the sensing space; The force sensing arm includes a first sensing cantilever beam and a second sensing cantilever beam intersecting each other, wherein an extending end of the first sensing cantilever beam and an extending end of the second sensing cantilever beam are respectively connected to the inner surface of the force transmission seat; The first sensing cantilever beam and the second sensing cantilever beam are respectively provided with strain sensors.

2. The three-dimensional force sensor according to claim 1, wherein: The first sensing cantilever beam includes a first cantilever beam extension portion and a second cantilever beam extension portion extending in opposite directions; The second sensing cantilever beam includes a third cantilever beam extension portion and a fourth cantilever beam extension portion extending in opposite directions; An intersection of the first cantilever beam extension, the second cantilever beam extension, the third cantilever beam extension, and the fourth cantilever beam extension is connected to one end of the stress-bearing rod.

3. The three-dimensional force sensor according to claim 1, wherein: An inner groove-shaped gap is formed at the corner where the extended end of the first sensing cantilever beam is connected to the inner surface of the force transmission seat; An inner groove-shaped gap is formed at a corner position where the extended end of the second sensing cantilever beam is connected to the inner surface of the force transmission seat.

4. The three-dimensional force sensor according to claim 3, wherein: The inner concave surface of the inner groove-shaped gap is a curved surface.

5. The three-dimensional force sensor according to claim 3, wherein: The gap is located at a corner position on one side where the first sensing cantilever beam is connected to the inner surface of the force transmission seat in the same direction as the extension direction of the force-bearing rod; The gap is located at a corner position on one side where the second sensing cantilever beam is connected to the inner surface of the force transmission seat in the same direction as the extension direction of the force-bearing rod.

6. The three-dimensional force sensor according to claim 3, wherein: The length of the inner groove-shaped gap in the circumferential direction is greater than the circumferential length of the extension portion of the first sensing cantilever beam or the extension portion of the second sensing cantilever beam connected to the inner surface of the force transmission seat.

7. The three-dimensional force sensor according to claim 1, wherein: On the inner surface of the force transmission seat, slots are formed at positions corresponding to the extending end of the first sensing cantilever beam and the extending end of the second sensing cantilever beam respectively; The extending end of the first sensing cantilever beam and the extending end of the second sensing cantilever beam extend into the slot correspondingly.

8. The three-dimensional force sensor according to claim 7, wherein: The extended end of the first sensing cantilever beam and the extended end of the second sensing cantilever beam form a convex structure; The convex structure extends into the card slot accordingly; A gap is formed between the outer surface of the convex structure and the inner surface of the slot.

9. The three-dimensional force sensor according to claim 8, wherein: When the force-bearing rod bears a force in the same direction as the extension of the force-bearing rod, the convex structure rotates relative to the clamping slot.

10. The three-dimensional force sensor according to claim 8, wherein: The outer surface of the convex structure and the inner surface of the slot are both arc surfaces; The outer surface of the convex structure is inscribed in the inner surface of the slot.

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