Plasma ignition electrode assembly
By designing the plasma ignition electrode assembly, the material is directly fed into the center of the torch body, which solves the problem of incomplete processing of solid materials in the existing technology, realizes the complete processing of solid materials and improves the stability of the equipment.
Patent Information
- Application Number
- CN202421601020.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-08
- Publication Date
- 2025-09-09
- Estimated Expiration
- 2034-07-08
AI Technical Summary
When existing microwave plasma equipment processes mixed gases containing solid materials, the materials cannot be completely processed by the center of the torch body, resulting in incomplete processing.
A plasma ignition electrode assembly is designed, including an electrode rod outer rod, an electrode head and a feed rod. A feed channel is formed by connecting the feed pipe joint, the feed rod and the electrode head. The material is directly fed into the center of the torch body, and a cooling assembly is equipped to cool key components.
The complete processing of solid materials is achieved, avoiding the problem of incomplete material processing, and at the same time improving the stability and life of the equipment through the cooling component.
Smart Images
Figure CN223319090U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of microwave plasma, in particular to a plasma ignition electrode assembly. Background Art
[0002] In the process of processing materials with microwave plasma equipment, the commonly used feeding methods are mixed feeding and external feeding. Figure 1 (as shown): Mix the material to be processed with the working gas and feed it to the microwave plasma treatment equipment through the side inlet end of the air inlet tee. This feeding method can reduce the number of additional feeding interfaces and the flow rate of the supplied material is more uniform. However, the supply volume is affected by the size of the waveguide, resulting in a small supply volume and easy contamination of the waveguide, resulting in adverse effects such as reduced microwave power and disordered microwave waveform. The waveguide needs to be disassembled and cleaned regularly. It is suitable for the treatment of gaseous materials that are not easily condensed when cooled. External feeding (attached Figure 2 (As shown): The side inlet of the inlet tee is used only to supply working gas. The material to be processed is fed to the microwave plasma treatment equipment through the interface of the feed pipe. This feeding method prevents material contamination of the waveguide, and the interface size can be increased as needed to increase the supply volume. To prevent high-flow material from impacting the microwave plasma torch and shifting the torch's position and direction, a buffer layer is provided to slow the material flow rate. Therefore, it is not suitable for non-gaseous materials. However, it is suitable for processing all types of gases, including those that easily condense when cooled.
[0003] In summary, the two feeding methods mentioned above both directly transport the material to the peripheral area of the torch, which is suitable for various types of gas treatment. Since the microwave plasma torch body is long but small in size, the peripheral area is heated to a high temperature by the heat radiation of the torch, which can meet the treatment requirements when treating gas materials. However, when treating mixed gases containing solid materials, some materials that have not passed through the center of the torch body will not be completely processed when the materials are transported to the peripheral area of the torch, so there is room for improvement. Utility Model Content
[0004] The purpose of the present utility model is to provide a plasma ignition electrode assembly to solve the problems raised in the above background technology.
[0005] To achieve the above objectives, the present invention provides the following technical solutions:
[0006] A plasma ignition electrode assembly includes an electrode rod outer rod, an electrode head, and a feed rod. The feed rod is arranged at the inner center position of the electrode rod outer rod. One end of the feed rod is threadedly connected to the inside of the electrode head. The other end of the feed rod is provided with a feed pipe joint connected to the feed rod. The electrode rod outer rod is connected to the electrode head. The feed pipe joint, the feed rod, and the electrode head are connected to form a feed channel. The assembly also includes a cooling assembly for cooling the electrode rod outer rod, the electrode head, and the feed rod.
[0007] Preferably, the cooling assembly includes an electrode rod water inlet rod, a first tee joint, and a second tee joint. The first tee joint and the second tee joint are connected through a first bushing, the second tee joint and the feed pipe joint are connected through a second bushing, the other end of the feed rod is connected to the second bushing, one end of the electrode rod water inlet rod is connected to the first bushing, and the other end of the electrode rod water inlet rod extends into the electrode head.
[0008] Preferably, a first channel is formed between the electrode rod, the water inlet rod and the feed rod.
[0009] Preferably, a second channel is formed between the electrode head and the feed rod.
[0010] Preferably, a third channel is formed between the electrode rod water inlet rod and the electrode rod outer rod.
[0011] Preferably, the side wall joint of the first three-way joint is connected to a return pipe joint.
[0012] Preferably, the side wall joint of the second three-way joint is connected to a water inlet pipe joint.
[0013] Preferably, the second three-way joint, the first channel, the second channel, the third channel and the first three-way joint are connected in sequence.
[0014] Compared with the prior art, the beneficial effects of the present invention are:
[0015] This plasma ignition electrode assembly changes the traditional feeding method. The feeding pipe joint, feeding rod, and electrode head are designed to be connected to form a feeding channel, which can directly pass the material. The material passes through the feeding pipe joint, feeding rod, and electrode head in sequence, and finally directly sent to the center of the torch body, so that the material can be completely processed, even solid materials can be completely processed. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 This is a schematic diagram of the structure of mixed feeding of microwave plasma equipment in the prior art.
[0017] Figure 2 This is a schematic diagram of the structure of external feeding of microwave plasma equipment in the prior art.
[0018] Figure 3 This is a schematic structural diagram of the plasma ignition electrode assembly in the present utility model.
[0019] Figure 4 This is a schematic cross-sectional view of the plasma ignition electrode assembly in the present invention.
[0020] The meanings of the numbers in the figure are: 1, microwave generator; 2, waveguide tube; 3, air inlet tee; 4, flare head; 5, electrode rod; 6, feed pipe; 70, electrode rod outer rod; 71, electrode head; 72, electrode rod water inlet rod; 73, first tee joint; 74, second tee joint; 75, first bushing; 76, feed pipe joint; 77, second bushing; 78, feed rod; 700, third channel; 701, first channel; 702, second channel. DETAILED DESCRIPTION
[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0022] In order to facilitate the understanding of the existing microwave plasma technology industry, we first introduce the existing technology. In the process of microwave plasma equipment processing materials, the commonly used feeding methods are mixed type and external type. The schematic diagram of microwave plasma processing equipment is as follows Figure 1 and Figure 2 As shown, it includes a microwave generator 1, a waveguide tube 2, an air intake tee tube 3, a torch head 4, an electrode rod 5, and a feeding pipe 6. The microwave generator 1 is connected to the waveguide tube 2 and can be used to generate and conduct microwaves. The joints at both ends of the tube body of the air intake tee tube 3 are respectively connected to the waveguide tube 2 and the torch head 4. The side wall end joint of the air intake tee tube 3 is used to introduce working gas. One end of the electrode rod 5 passes through the torch head 4 and extends to the center of the torch body. The torch head 4 and the electrode rod work together to generate a microwave plasma torch in the torch body. The above structure and products are all existing mature technologies. The following introduces the two existing feeding methods: hybrid and external:
[0023] Mixed feeding (with Figure 1 (As shown): The material to be processed is mixed with the working gas and fed to the microwave plasma treatment equipment through the side inlet of the air inlet tee. This feeding method reduces the need for additional feed interfaces and provides a more uniform material flow rate. However, the supply volume is limited by the size of the waveguide, and it is easy to contaminate the waveguide, resulting in adverse effects such as reduced microwave power and disrupted microwave waveforms. The waveguide needs to be disassembled and cleaned regularly. It is suitable for processing gaseous materials that are not easily condensed when cooled.
[0024] External feed (with Figure 2(As shown): The side inlet of the inlet tee is used only to supply working gas. The material to be processed is fed to the microwave plasma treatment equipment through the interface of the feed pipe. This feeding method prevents material contamination of the waveguide, and the interface size can be increased as needed to increase the supply volume. To prevent high-flow material from impacting the microwave plasma torch and shifting the torch's position and direction, a buffer layer is provided to slow the material flow rate. Therefore, it is not suitable for non-gaseous materials. However, it is suitable for processing all types of gases, including those that easily condense when cooled.
[0025] In summary, the two feeding methods mentioned above both directly transport the material to the peripheral area of the torch, which is suitable for all types of gas treatment. Since the microwave plasma torch body is long but small in size, the peripheral area is heated to a high temperature by the heat radiation of the torch, which can meet the treatment requirements when treating gas materials. However, when treating mixed gases containing solid materials, some materials that have not passed through the center of the torch body will not be completely processed when the materials are transported to the peripheral area of the torch.
[0026] In order to solve the defects of the above two feeding methods, the utility model provides a technical solution:
[0027] A plasma ignition electrode assembly, see Figure 3-Figure 4 , including an electrode rod outer rod 70, an electrode head 71, and a feed rod 78, such as Figure 4 As shown, a cavity is provided inwardly at one end of the electrode head 71 close to the electrode rod outer rod 70, and a through hole connected to the cavity is provided inwardly at one end of the electrode head 71 away from the electrode rod outer rod 70; a feed rod 78 is provided at the inner center position of the electrode rod outer rod 70, and one end of the feed rod 78 is threadedly connected to the inside of the electrode head 71. Specifically, one end of the feed rod 78 is threadedly connected to the through hole in the electrode head 71.
[0028] The outer rod 70 of the electrode rod is threadedly connected to the electrode head 71, and the other end of the feed rod 78 is provided with a feed pipe joint 76 connected to the feed rod 78. The feed pipe joint 76, the feed rod 78, and the electrode head 71 are connected to form a feed channel. The feed pipe joint 76 can be connected to an external feed pipe. The material enters from the feed pipe, passes through the feed pipe joint 76, the feed rod 78, and the electrode head 71 in turn, and finally directly sent to the center of the torch body, so that the material can be completely processed. Compared with the existing technology that can only transport materials to the surrounding area of the torch, the present application can also completely process solid materials.
[0029] It should be noted that the electrode head 71 of the electrode rod after ignition passes through the torch head and extends to the inner center of the torch body, so that the supplied material will directly enter the inner center of the torch body and the material (gaseous or solid material) can be completely processed.
[0030] The device also includes a cooling assembly for cooling the electrode rod outer rod 70, the electrode head 71, and the feed rod 78. Specifically, the cooling assembly includes an electrode rod water inlet rod 72, a first tee joint 73, and a second tee joint 74. The first tee joint 73 and the second tee joint 74 are connected via a first bushing 75. The first bushing 75 is threadedly connected to the inner wall of one end of the first tee joint 73. The outer wall of one end of the second tee joint 74 is threadedly connected to the inner wall of the first bushing 75. The second tee joint 74 is connected to the feed pipe joint 76 via a second bushing 77. The outer wall of one end of the second bushing 77 is threadedly connected to the inner wall of the other end of the second tee joint 74. The feed pipe joint 76 is threadedly connected to the second bushing 77.
[0031] The other end of the feed rod 78 is threadedly connected to the inner wall of the second bushing 77 , one end of the electrode rod water inlet rod 72 is threadedly connected to the inner wall of the first bushing 75 , and the other end of the electrode rod water inlet rod 72 extends into the electrode head 71 .
[0032] The electrode rod outer rod 70 and the first three-way joint 73 can also be connected through a bushing. The electrode rod outer rod 70 is threadedly connected to the inner wall of the bushing, and the end of the bushing away from the electrode rod outer rod 70 is threadedly connected to the inner wall of the first three-way joint 73.
[0033] The inner wall and outer wall of the bushing, the first bushing and the second bushing are all provided with threads near both ends.
[0034] A first channel 701 is formed between the electrode rod water inlet rod 72 and the feed rod 78; a second channel 702 is formed between the electrode head 71 and the feed rod 78; a third channel 700 is formed between the electrode rod water inlet rod 72 and the electrode rod outer rod 70; the second three-way joint 74, the first channel 701, the second channel 702, the third channel 700 and the first three-way joint 73 are connected in sequence.
[0035] The side wall joint of the first three-way joint 73 is connected to a return pipe joint.
[0036] The side wall joint of the second three-way joint 74 is connected to a water inlet pipe joint.
[0037] During use, cooling water enters the second three-way joint 74 from the water inlet pipe joint, then flows into the first channel 701, then flows into the second channel 702, and finally flows into the third channel 700, and then flows out from the first three-way joint 73 to the return pipe joint, forming a cooling water flow loop as a whole. The cooling water flow in the first channel 701 can cool the feed rod 78, the cooling water flow in the second channel 702 can cool the feed rod 78 and the electrode head 71, and the cooling water flow in the third channel 700 can cool the electrode rod outer rod 70.
Claims
1. A plasma ignition electrode assembly, characterized in that: The invention comprises an electrode rod outer rod (70), an electrode head (71), and a feeding rod (78). The feeding rod (78) is arranged at the inner center position of the electrode rod outer rod (70). One end of the feeding rod (78) is threadedly connected to the inner part of the electrode head (71). The other end of the feeding rod (78) is provided with a feeding pipe joint (76) connected to the feeding rod (78). The electrode rod outer rod (70) is connected to the electrode head (71). The feeding pipe joint (76), the feeding rod (78), and the electrode head (71) are connected to form a feeding channel. The invention also comprises a cooling component for cooling the electrode rod outer rod (70), the electrode head (71), and the feeding rod (78).
2. A plasma ignition electrode assembly according to claim 1, characterized in that: The cooling assembly comprises an electrode rod water inlet rod (72), a first three-way joint (73), and a second three-way joint (74). The first three-way joint (73) and the second three-way joint (74) are connected via a first bushing (75), the second three-way joint (74) and the feed pipe joint (76) are connected via a second bushing (77), the other end of the feed rod (78) is connected to the second bushing (77), one end of the electrode rod water inlet rod (72) is connected to the first bushing (75), and the other end of the electrode rod water inlet rod (72) extends into the electrode head (71).
3. The plasma ignition electrode assembly according to claim 2, characterized in that: A first channel (701) is formed between the electrode rod water inlet rod (72) and the feed rod (78).
4. The plasma ignition electrode assembly according to claim 3, characterized in that: A second channel (702) is formed between the electrode head (71) and the feed rod (78).
5. The plasma ignition electrode assembly according to claim 4, characterized in that: A third channel (700) is formed between the electrode rod water inlet rod (72) and the electrode rod outer rod (70).
6. The plasma ignition electrode assembly according to claim 1, characterized in that: The side wall joint of the first three-way joint (73) is connected to a return pipe joint.
7. The plasma ignition electrode assembly according to claim 1, characterized in that: The side wall joint of the second three-way joint (74) is connected to a water inlet pipe joint.
8. The plasma ignition electrode assembly according to claim 5, characterized in that: The second three-way connector (74), the first channel (701), the second channel (702), the third channel (700) and the first three-way connector (73) are connected in sequence.