Lead frame anti-oxidation operation system

Abstract

The embodiment of the utility model provides a lead frame anti-oxidation operation system, and relates to the field of semiconductors. The anti-oxidation operation system for the lead frame comprises a transmission part, a heating source, a plasma power supply, a first air inlet pipe, a heating cover and a deposition cavity, the transmission part is used for transmitting the lead frame, the heating source is connected to the heating cover, the plasma power source and the first air inlet pipe are connected to the deposition cavity, the first air inlet pipe inputs carbon source gas into the deposition cavity, the heating cover is located on the lower side of the deposition cavity, and the heating cover and the deposition cavity are used for getting close to the transmission part under the action of external force. And covering the lead frame for plasma deposition. In the working process, the heating source provides heat energy for the heating cover, and the plasma power supply is used for providing energy to enable the carbon source gas input by the first gas inlet pipe to form plasma in the deposition cavity, so that a graphene coating is conveniently deposited and formed on the lead frame, and the oxidation resistance of the lead frame is further improved; and the negative influence on the use performance is avoided.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, and more specifically, to a lead frame anti-oxidation system. Background Technology

[0002] In the semiconductor field, copper leadframes offer advantages such as high conductivity, low cost, and ease of stamping production. However, they are prone to high-temperature oxidation, which negatively impacts their performance. Utility Model Content

[0003] This invention provides a lead frame anti-oxidation system that can form a graphene coating on the lead frame, thereby improving the lead frame's anti-oxidation ability and avoiding negative impacts on its performance.

[0004] The embodiments of this utility model can be implemented as follows:

[0005] An embodiment of this utility model provides a lead frame anti-oxidation system, which includes:

[0006] The components include a transmission device, a heating source, a plasma power supply, a first inlet pipe, a heating shroud, and a deposition chamber.

[0007] The transmission device is used to transmit the lead frame, the heating source is connected to the heating shroud, the plasma power supply and the first air inlet pipe are both connected to the deposition chamber, the first air inlet pipe is used to input carbon source gas into the deposition chamber, the heating shroud is located on the lower side of the deposition chamber, and the heating shroud and the deposition chamber are used to approach the transmission device under the action of external force to cover the lead frame for plasma deposition.

[0008] Optionally, the lead frame anti-oxidation system further includes a plasma coil connected to the plasma power source and housed in the deposition chamber near the first inlet pipe.

[0009] Optionally, the lead frame anti-oxidation system further includes a vacuum chamber and a vacuum pump, the vacuum pump being used to evacuate the vacuum chamber, and the transport element and the deposition chamber being housed within the vacuum chamber.

[0010] Optionally, the lead frame anti-oxidation system further includes a cooling platform located below the transmission element, and a first cooling channel is formed within the cooling platform.

[0011] Optionally, the extension direction of the first cooling channel is consistent with the transmission direction of the transmission member to the lead frame.

[0012] Optionally, the lead frame anti-oxidation system further includes a feed basket located at the input end of the transmission element and used to accommodate the stacked lead frames.

[0013] Optionally, the lead frame anti-oxidation system further includes a discharge basket located at the output end of the transmission element and used to accommodate the stacked lead frames.

[0014] Optionally, a second cooling channel is formed inside the discharge basket.

[0015] Optionally, the lead frame anti-oxidation system further includes a second air inlet pipe and a third air inlet pipe, both of which are connected to the deposition chamber. The second air inlet pipe is used to input argon gas into the deposition chamber, and the third air inlet pipe is used to input hydrogen gas into the deposition chamber.

[0016] Optionally, the transmission element includes a cooperating rotating wheel and a movable belt, the movable belt being used to support the lead frame, and the deposition cavity being used to approach the movable belt under external force.

[0017] The beneficial effects of the lead frame anti-oxidation system of this utility model embodiment include, for example:

[0018] The leadframe anti-oxidation system includes a transport component, a heating source, a plasma power supply, a first inlet pipe, a heating shroud, and a deposition chamber. The transport component transports the leadframe, the heating source is connected to the heating shroud, and both the plasma power supply and the first inlet pipe are connected to the deposition chamber. The first inlet pipe supplies carbon source gas to the deposition chamber. The heating shroud is located below the deposition chamber. The heating shroud and deposition chamber are brought close to the transport component under external force to cover the leadframe for plasma deposition. During operation, the transport component continuously transports the leadframe in a streamlined manner, the heating source provides heat to the heating shroud, and the plasma power supply provides energy to form plasma from the carbon source gas supplied through the first inlet pipe within the deposition chamber. This facilitates the deposition of a graphene coating on the leadframe, thereby improving its anti-oxidation capability and preventing negative impacts on its performance. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1This is a schematic diagram of the lead frame anti-oxidation system provided in an embodiment of the present invention.

[0021] Icons: 100-Lead frame anti-oxidation system; 110-Transfer component; 112-Rotating wheel; 114-Moving belt; 120-Heating source; 125-Plasma power supply; 128-Plasma coil; 130-First inlet pipe; 135-Second inlet pipe; 138-Third inlet pipe; 140-Heating hood; 150-Deposition chamber; 160-Vacuum chamber; 165-Vacuum pump; 170-Cooling platform; 175-First cooling channel; 180-Feed basket; 190-Discharge basket; 195-Second cooling channel. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0024] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0025] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0026] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0027] The terms “comprising,” “including,” or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase “comprising one…” does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0028] Unless otherwise explicitly specified and limited, terms such as "setup" and "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0029] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0030] Please refer to Figure 1 The lead frame anti-oxidation system 100 provided in the embodiments of this utility model can solve the above problems, and will be described in detail below.

[0031] The lead frame anti-oxidation system 100 includes a transmission component 110, a heating source 120, a plasma power supply 125, a first air inlet pipe 130, a heating hood 140, and a deposition chamber 150.

[0032] The transmission device 110 is used to transmit the lead frame, the heating source 120 is connected to the heating cover 140, the plasma power supply 125 and the first air inlet pipe 130 are both connected to the deposition chamber 150, the first air inlet pipe 130 is used to input carbon source gas into the deposition chamber 150, the heating cover 140 is located on the lower side of the deposition chamber 150, and the heating cover 140 and the deposition chamber 150 are used to approach the transmission device 110 under the action of external force so as to cover the lead frame for plasma deposition.

[0033] During operation, the transmission component 110 is used for continuous, streamlined transmission of the lead frame, the heating source 120 is used to provide heat energy to the heating shroud 140, and the plasma power supply 125 is used to provide energy so that the carbon source gas input from the first air inlet pipe 130 forms plasma in the deposition chamber 150, which facilitates the deposition of a graphene coating on the lead frame, thereby improving the oxidation resistance of the lead frame and avoiding negative impacts on its performance.

[0034] It is worth noting that, in order to achieve efficient transmission of the lead frame, the transmission component 110 may include a cooperating rotating wheel 112 and a movable belt 114, the movable belt 114 being used to support the lead frame, and the deposition chamber 150 being used to approach the movable belt 114 under the action of external force.

[0035] It should be noted that, in order to ensure that the heat generated by the heat source can fully contact the deposited plasma, the coil of the heat source can be arranged on the side wall of the heating cover 140, thereby reducing the distance between the heat and the plasma.

[0036] In this embodiment, the rotating wheels 112 are located on the lower sides of both ends of the movable belt 114 and are in frictional engagement with the movable belt 114, so that at least one of the rotating wheels 112 is a driving wheel, and the other can be either a driving wheel or a driven wheel. Of course, in other embodiments of this utility model, the specific number of rotating wheels 112 can be one, three, four, etc., but it must be ensured that at least one rotating wheel 112 is a driving wheel.

[0037] Please refer to Figure 1 To improve the continuity of the lead frame entering the movable belt 114, the lead frame anti-oxidation system 100 may also include a feed basket 180. The feed basket 180 is located at the input end of the conveyor 110 and is used to accommodate the stacked lead frames. Specifically, the feed basket 180 is located above the input end of the movable belt 114, and the lead frames can fall from the bottom of the feed basket 180 onto the movable belt 114 and then move with the movable belt 114.

[0038] Please refer to Figure 1 The lead frame anti-oxidation system 100 also includes a cooling platform 170, which is located below the transfer member 110, and a first cooling channel 175 is formed in the cooling platform 170.

[0039] During operation, the cooling platform 170 can support the movable belt 114 on the one hand, and cool down the lead frame transported on the movable belt 114 through the cooling medium contained in the first cooling channel 175.

[0040] Furthermore, the extension direction of the first cooling channel 175 is consistent with the transmission direction of the transmission member 110 to the lead frame. In this embodiment, the first cooling channel 175 is designed as a multi-layer structure, with the multi-layer first cooling channels 175 arranged sequentially along the direction close to the movable belt 114, thereby achieving efficient cooling.

[0041] Of course, in other embodiments of this utility model, the first cooling channel 175 can also be configured as an annular or spiral structure, and its specific structural shape is not limited.

[0042] Please refer to Figure 1To facilitate the collection of the transported lead frames, the lead frame anti-oxidation system 100 may also include a discharge basket 190. The discharge basket 190 is located at the output end of the transport member 110 and is used to accommodate the stacked lead frames. Specifically, the discharge basket 190 is located below the output end of the movable belt 114, and the lead frames can fall from the movable belt 114 into the discharge basket 190.

[0043] Furthermore, the lead frame that has just entered the discharge basket 190 has a certain amount of heat. The lead frame can be cooled down by forming a second cooling channel 195 inside the discharge basket 190.

[0044] In this embodiment, the second cooling channel 195 is formed on the side wall and bottom wall of the discharge basket 190, thereby ensuring sufficient contact area with the stacked lead frame, so as to cool the lead frame.

[0045] Please refer to Figure 1 In order to enable the carbon source gas to be deposited stably and efficiently, the lead frame anti-oxidation system 100 may also include a second air inlet pipe 135 and a third air inlet pipe 138. Both the second air inlet pipe 135 and the third air inlet pipe 138 are connected to the deposition chamber 150. The second air inlet pipe 135 is used to input argon gas into the deposition chamber 150, and the third air inlet pipe 138 is used to input hydrogen gas into the deposition chamber 150.

[0046] Argon gas primarily serves as a protective gas, while hydrogen gas primarily functions as a reducing agent. Furthermore, the first inlet pipe 130, the second inlet pipe 135, and the third inlet pipe 138 can be arranged side by side, allowing all gases to smoothly enter the deposition chamber 150.

[0047] Please refer to Figure 1 In order to improve the plasma formation rate, the lead frame anti-oxidation system 100 also includes a plasma coil 128, which is connected to the plasma power supply 125 and housed in the deposition chamber 150 near the first inlet pipe 130, so that the carbon source gas can come into contact with the plasma coil 128 as soon as it enters the deposition chamber 150.

[0048] Please refer to Figure 1 In order to provide good deposition conditions, the lead frame anti-oxidation system 100 may also include a vacuum chamber 160 and a vacuum pump 165, the vacuum pump 165 being used to evacuate the vacuum chamber 160, and the transfer element 110 and the deposition chamber 150 being housed in the vacuum chamber 160.

[0049] In summary, the lead frame anti-oxidation system 100 provided by the embodiments of this utility model has at least the following beneficial effects:

[0050] The lead frame anti-oxidation system 100 uses a transfer device 110 for continuous, streamlined transport of the lead frame, a heating source 120 to provide heat to the heating shroud 140, and a plasma power supply 125 to provide energy so that the carbon source gas input from the first air inlet pipe 130 forms plasma in the deposition chamber 150, which facilitates the deposition of a graphene coating on the lead frame, thereby improving the lead frame's anti-oxidation capability and avoiding negative impacts on its performance.

[0051] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A lead frame anti-oxidation system, characterized in that, include: The components include a transmission device (110), a heating source (120), a plasma power supply (125), a first air inlet pipe (130), a heating shroud (140), and a deposition chamber (150). The transmission device (110) is used to transmit the lead frame, the heating source (120) is connected to the heating cover (140), the plasma power supply (125) and the first air inlet pipe (130) are both connected to the deposition chamber (150), the first air inlet pipe (130) is used to input carbon source gas into the deposition chamber (150), the heating cover (140) is located on the lower side of the deposition chamber (150), and the heating cover (140) and the deposition chamber (150) are used to approach the transmission device (110) under the action of external force to cover the lead frame for plasma deposition.

2. The lead frame anti-oxidation system according to claim 1, characterized in that, The lead frame anti-oxidation system also includes a plasma coil (128), which is connected to the plasma power supply (125) and housed in the deposition chamber (150) near the first air inlet pipe (130).

3. The lead frame anti-oxidation system according to claim 1, characterized in that, The lead frame anti-oxidation system also includes a vacuum chamber (160) and a vacuum pump (165), the vacuum pump (165) being used to evacuate the vacuum chamber (160), the transmission element (110) and the deposition chamber (150) being housed in the vacuum chamber (160).

4. The lead frame anti-oxidation system according to claim 1, characterized in that, The lead frame anti-oxidation system also includes a cooling platform (170) located below the transmission member (110), and a first cooling channel (175) is formed in the cooling platform (170).

5. The lead frame anti-oxidation system according to claim 4, characterized in that, The extension direction of the first cooling channel (175) is consistent with the transmission direction of the transmission member (110) to the lead frame.

6. The lead frame anti-oxidation system according to any one of claims 1-5, characterized in that, The lead frame anti-oxidation system also includes a feed basket (180), which is located at the input end of the transmission member (110) and is used to accommodate the stacked lead frames.

7. The lead frame anti-oxidation system according to any one of claims 1-5, characterized in that, The lead frame anti-oxidation system also includes a discharge basket (190), which is located at the output end of the transmission element (110) and is used to accommodate the stacked lead frames.

8. The lead frame anti-oxidation system according to claim 7, characterized in that, A second cooling channel (195) is formed inside the discharge basket (190).

9. The lead frame anti-oxidation system according to any one of claims 1-5, characterized in that, The lead frame anti-oxidation system also includes a second air inlet pipe (135) and a third air inlet pipe (138), both of which are connected to the deposition chamber (150). The second air inlet pipe (135) is used to input argon gas into the deposition chamber (150), and the third air inlet pipe (138) is used to input hydrogen gas into the deposition chamber (150).

10. The lead frame anti-oxidation system according to any one of claims 1-5, characterized in that, The transmission component (110) includes a cooperating rotating wheel (112) and a movable belt (114), the movable belt (114) being used to support the lead frame, and the deposition cavity (150) being used to approach the movable belt (114) under the action of external force.

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