Dangerous object recovery processing device and vacuum processing equipment

Abstract

The utility model relates to a dangerous object recovery processing device and vacuum processing equipment, and belongs to the technical field of vacuum system product recovery processing. The hazardous substance recovery processing device comprises a recovery processing cavity, the recovery processing cavity is provided with a sealable cavity, the recovery processing cavity comprises a condensing device, at least one first connector and at least one second connector, and the at least one first connector is used for being communicated with a vacuum pump to vacuumize the sealable cavity in a first time period; and communicating the target cavity in a second time period to receive the dangerous object discharged by the target cavity, the first time period is different from the second time period; and the at least one second interface is used for introducing a treatment agent, introducing the treatment agent for treating the hazardous substances and discharging the treated treatment agent. According to the dangerous object recycling treatment device, the safety maintenance treatment problem of process dangerous products is solved, the risk that safety accidents are likely to happen is effectively reduced, and the equipment process safety is optimized.

Description

Technical Field

[0001] This utility model relates to the field of vacuum system product recovery and treatment technology, and in particular to a hazardous material recovery and treatment device and vacuum treatment equipment. Background Technology

[0002] Vacuum systems have been widely used in various industries, especially in the field of molecular beam epitaxy (MBE). In MBE systems, materials are synthesized by evaporating a solid source under ultra-high vacuum and directly depositing it onto a substrate.

[0003] During the growth of epitaxial wafers, harmful and flammable hazardous substances such as phosphorus, selenium, and sulfur accumulate in the ultra-high vacuum molecular beam epitaxy (MBE) cavity. White phosphorus, in particular, accumulates in large quantities in the ultra-high vacuum MBE cavity during the growth of indium phosphide (IPT) series epitaxial wafers. Due to its loose texture and extremely low ignition point, maintaining the MBE cavity after phosphide growth is extremely difficult, leading to frequent safety accidents when the MBE equipment is opened. Furthermore, the fumes from the combustion of phosphorus materials cause physiological toxicity to personnel using and maintaining the MBE on-site. Utility Model Content

[0004] The hazardous material recycling and processing device and vacuum processing equipment provided in this application embodiment solve the problem of safe maintenance and processing of process hazardous products, effectively reduce the risk of safety accidents, and optimize the process safety of the equipment.

[0005] In a first aspect, a hazardous material recovery and processing apparatus is provided for connection to a target cavity to receive and process hazardous materials flowing within the target cavity after heating. The apparatus includes a recovery and processing cavity having a sealable chamber, the recovery and processing cavity including a condensation device, at least one first interface, and at least one second interface, wherein…

[0006] The at least one first interface is used to connect a vacuum pump to evacuate the sealable chamber during a first time period; and to connect a target cavity during a second time period to receive hazardous materials discharged from the target cavity; the first time period is different from the second time period;

[0007] The at least one second interface is used to introduce a treatment agent, to introduce a treatment agent for treating hazardous materials, and to discharge the treatment agent after the treatment is completed.

[0008] In some embodiments, each of the first interfaces is provided with a first isolation control valve; the first isolation control valve is used to connect or disconnect the connection between the first interface and the target cavity, or to connect or disconnect the connection between the first interface and the vacuum pump; and / or each of the second interfaces is provided with a second isolation control valve, the second isolation control valve being used to connect or disconnect the channel through which the treatment agent enters the second interface.

[0009] In some embodiments, the first interface is used to connect to the target cavity and the vacuum pump at different times; or, there are multiple first interfaces, wherein at least one of the multiple first interfaces is connected to the target cavity, and at least one of the multiple first interfaces is connected to the vacuum pump.

[0010] In some embodiments, the condensation device is a cooling screen device, which has a cooling pipe inside. The coolant inlet of the cooling pipe extends from one end of the cooling screen of the cooling screen device, and the coolant outlet extends from the other end of the cooling screen.

[0011] In some embodiments, the cooling pipes are evenly laid inside the cold screen and positioned close to the outer wall of the cold screen.

[0012] In some embodiments, the cooling pipes are arranged in a Z-shaped or S-shaped configuration.

[0013] In some embodiments, the outer wall of the cold screen device has an uneven surface.

[0014] In some embodiments, the number of the first interfaces is multiple, and each of the multiple first interfaces is respectively connected to multiple target cavities, and the hazardous materials in each target cavity may be the same or different; and / or

[0015] There are multiple second interfaces, and the processing agent introduced into each second interface may be the same or different.

[0016] In some embodiments, the recycling chamber is further provided with a vacuum gauge for real-time monitoring of the vacuum level within the recycling chamber.

[0017] In some embodiments, the condensation device, the first isolation control valve, the second isolation control valve, and the vacuum gauge of the recycling chamber are all connected to the controller.

[0018] In a second aspect, a vacuum processing apparatus is provided, comprising a hazardous material recovery and processing device according to any of the above embodiments and the target cavity.

[0019] In some embodiments, a heating device is provided inside the target cavity. The heating device is a baking device that surrounds and covers the outer wall of the target cavity, used to heat and vaporize hazardous materials inside the target cavity.

[0020] In some embodiments, the hazardous materials within the target cavity include phosphorus products, selenium products, or sulfur products.

[0021] In some embodiments, the heating device of the target cavity is also connected to the controller.

[0022] The hazardous material recycling and disposal solution provided in this application embodiment achieves the following beneficial effects:

[0023] By connecting the vacuum pump and the target cavity containing hazardous materials through the first interface of the recycling and processing chamber, the hazardous materials can be introduced into the target cavity in a closed vacuum environment. Through the control settings of the second interface of its condensation device and the second isolation control valve, the condensed and collected materials can be further reduced in hazard through the processing control. Furthermore, the first and second isolation control valves, located at the chamber interface, can be flexibly switched and changed according to the needs of different hazardous materials. This enables the reduction of the hazard of process hazardous products, thus effectively solving safety threats such as spontaneous combustion, explosion, or air pollution. At the same time, it optimizes the safety performance and maintenance performance of process equipment, thereby achieving both the safe treatment of hazardous products and the optimization of equipment and process while saving operating costs. Attached Figure Description

[0024] Figure 1 These are schematic diagrams of the hazardous material recycling and processing apparatus provided in some embodiments of this application;

[0025] Figure 2 This is a partial structural exploded view of a hazardous material recycling and processing device provided in some embodiments of this application;

[0026] Figure 3 These are schematic diagrams of the cold screen device structure provided in some embodiments of the application;

[0027] Figure 4 These are schematic diagrams of the vacuum gauge structure provided in some embodiments of the application;

[0028] Figure 5 These are schematic diagrams of the vacuum processing equipment provided in some embodiments of this application;

[0029] Figure 6 This is a schematic diagram of the hazardous material recycling process provided in some embodiments of this application;

[0030] Figure 7This is a schematic diagram of the hazardous materials recycling process provided in some other embodiments of this application;

[0031] Figure 8 This is a schematic diagram of the hazardous material recycling process provided in some embodiments of this application;

[0032] Figure 9 This is a schematic diagram of the hazardous material recycling process provided in some embodiments of this application.

[0033] Explanation of reference numerals in the attached figures

[0034] 1-Recovery and processing chamber, 2-Target chamber, 21-Heating device, 11-First interface, 12-First isolation control valve, 13-Second interface, 14-Second isolation control valve, 15-Condensation device, 16-Cooling pipe, 16a-Coolant inlet, 16b-Coolant outlet, 17-Cold shield, 18-Vacuum gauge, 18a-Flange seal, 18b-Support, 18c-Detection unit. Detailed Implementation

[0035] To make the technical solution and beneficial effects of this utility model more apparent and understandable, a detailed description is provided below by listing specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application pertains.

[0036] In the description of this utility model, the terms "upper", "lower", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description of this utility model and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. That is, they should not be construed as limitations on this utility model.

[0037] In this utility model, the terms "first" and "second" are used only for descriptive purposes and should not be construed as indicating the relative importance of the indicated features or the number of indicated technical features. Therefore, features specified as "first" or "second" can explicitly include at least one of those features. In the description of this utility model, "multiple" means at least two, such as two or three; "several" means at least one, such as one, two, or three, unless otherwise explicitly specified. Furthermore, the method operation steps numbered "S11," "S12," etc., are for convenience and do not imply a uniqueness in the order of execution. Without departing from the concept of this utility model, various variations can be selected based on specific circumstances, as long as the claimed function or technical effect is achieved.

[0038] In this utility model, unless otherwise explicitly defined, the terms "installation," "connection," "linking," "fixing," and "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0039] In this utility model, unless otherwise explicitly defined, the terms "above," "on top of," "above," "over," "below," "below," "below," or "below" for "first feature above second feature" can refer to direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Furthermore, "above," "above," and "over" for "first feature above second feature" can mean the first feature is directly above or diagonally above the second feature, or simply indicates that the horizontal height of the first feature is higher than the horizontal height of the second feature. Similarly, "below," "below," and "below" for "first feature below second feature" can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the horizontal height of the first feature is lower than the horizontal height of the second feature.

[0040] Based on the various safety hazards described in the background technology, the inventors of this application, through in-depth research, discovered that the industry uses a method of collecting white phosphorus products through cold screen adsorption and then recycling them into a specific cavity. However, this method only achieves the collection and transfer of hazardous products. When a certain amount of products accumulates, the cavity still needs to be opened, and safety hazards such as flammability, explosion, and air pollution still exist. In other words, the aforementioned safety hazards are not solved; only temporary recycling and problem transfer are achieved. After further consideration and exploration, the inventors found that the reason why these products are prone to safety problems is that when they exist in solid or gaseous forms, they are extremely prone to spontaneous combustion, explosion, or air pollution. Considering the current technical approach of cold screen adsorption recycling and the inherent limitations of existing vacuum system equipment, this problem is prevalent. Therefore, the inventors further considered whether this recycling method could be changed through equipment improvement. In addition to adsorption recycling, they attempted to combine improvements to the cavity device to achieve a further solution processing step, thereby completely reducing the safety of hazardous products.

[0041] Specifically, this application presents a recycling and treatment scheme that can both collect and reduce the hazards of hazardous materials. It maintains a sealed vacuum environment between the target chamber and the recycling chamber. First, a heating device vaporizes the accumulated hazardous materials in the target chamber. Then, a condensation device in the recycling chamber collects and recovers them. Finally, a corresponding treatment agent is introduced under the control of an isolation control valve, thus reducing the hazards of process hazardous products. This effectively solves safety threats such as spontaneous combustion, explosion, or air pollution, and optimizes the safety and maintenance performance of process equipment. It is particularly suitable for vacuum systems with vacuum or ultra-high vacuum requirements, such as molecular beam epitaxy systems. Furthermore, this hazardous material recycling and treatment solution is widely applicable to the recycling and treatment of various industrial hazardous products. The device and treatment method also have advantages such as simple design, ease of implementation, and low cost. For example, in existing vacuum systems with process reaction chambers and cold shield collection chambers, improvements can be made only by modifying the chamber interfaces, isolation control valves, vacuum gauge positions, and required piping. This achieves both safe treatment of hazardous products and optimized equipment and processes while saving operating costs.

[0042] The following detailed description of the hazardous material recycling and processing apparatus, equipment, and operating methods provided in this application, with reference to specific embodiments, illustrates these methods in detail.

[0043] like Figure 1 and Figure 2As shown, the hazardous material recovery and processing device provided in this embodiment is used to connect to a target cavity 2 to receive and process hazardous materials flowing within the target cavity 2 after heating. Specifically, the hazardous material recovery and processing device includes a recovery and processing cavity 1, which has a sealable chamber to form a sealed vacuum environment. The recovery and processing cavity 1 is equipped with a condensation device 15, a first interface 11, and a second interface 13, with at least one first interface 11 and at least one second interface 13. At least one first interface 11 is used to connect a vacuum pump (not shown) to evacuate the sealable chamber during a first time period; and to connect to the target cavity during a second time period to receive hazardous materials discharged from the target cavity 2. Here, the first time period and the second time period are process times at different time points. At least one second interface 13 is used to introduce a processing agent to treat the hazardous materials and to discharge the treated agent after processing.

[0044] In some implementations, the first interface 11 is used to connect to the target cavity 2 and the vacuum pump at different times. This convenient interface switching method is more likely to meet the needs of various processing scenarios. Alternatively, there may be multiple first interfaces 11, in which at least one of the multiple first interfaces 11 is connected to the target cavity 2 and at least one of the multiple first interfaces 11 is connected to the vacuum pump. Each docking method has the advantage of being able to control it individually.

[0045] The hazardous material recovery and processing device provided in this application includes a recovery and processing chamber 1. The recovery and processing chamber 1 is provided with a first interface 11, and a first isolation control valve 12 is provided on the first interface 11. The first isolation control valve 12 is used to connect or disconnect the first interface from the target chamber 2, or to connect or disconnect the first interface 11 from the vacuum pump. In some embodiments, the first isolation control valve 12 can switch the target chamber 2 or the vacuum pump (not shown in the figures) from the recovery and processing chamber 1. In some embodiments, in addition to switching, the first isolation control valve 12 can also regulate the incoming flow rate and / or gas pressure. In some embodiments, multiple first interfaces 11 can be provided, each first interface 11 corresponding to one or more target chambers 2, or each first interface 11 corresponding to one or more vacuum pumps. This arrangement allows for convenient and efficient processing of hazardous materials from different target chambers 2 within the same recovery and processing chamber 1. In some embodiments, when multiple target chambers 2 exist, the hazardous materials in each target chamber 2 can be the same or different, thereby meeting various requirements regarding the type and quantity of hazardous materials.

[0046] The target cavity 2 is a cavity containing hazardous materials. In some embodiments, the hazardous materials include phosphorus products, selenium products, sulfur products, or any other possible process products. For example, the target cavity 2 can be an ultra-high vacuum molecular beam epitaxial cavity used in the indium phosphide series epitaxial wafer growth process. During the process, a large amount of white phosphorus products will accumulate in the target cavity 2.

[0047] Additionally, a second isolation control valve 14 is provided on the second interface 13 of the recovery and processing chamber 1. The second isolation control valve 14 is used to connect or disconnect the channel through which the treatment agent is introduced into the second interface 13. In some embodiments, the second isolation control valve 14 can control the switching of different treatment agents, or control the flow rate and / or gas pressure of the treatment agent, to meet the processing requirements of different scenarios. In some embodiments, depending on the different processing requirements, the treatment agent can be a gaseous treatment agent such as nitrogen, or a liquid treatment agent such as water, liquid nitrogen, ethanol solution, or liquid carbon disulfide. In some embodiments, the second interface 13 can be switched to connect to different inlet pipes (not shown in the attached figures) by the control of the second isolation control valve 14. For example, gaseous treatment agents such as nitrogen can be introduced through a gas pipe, and liquid treatment agents such as water can be injected through a liquid pipe, to ensure the efficient flow of different forms of treatment agents and to meet the processing requirements.

[0048] In addition, the recovery and processing chamber 1 is also equipped with a condensation device 15. When the hazardous material in the target chamber 2 vaporizes and enters the recovery and processing chamber 1, it can be cooled and solidified in the recovery and processing chamber 1 by the condensation device 15. Then, under the control of the second isolation control valve 14, a corresponding treatment agent (nitrogen, water, or ethanol, etc.) is introduced through the second interface 13 to dissolve or heat-purge the hazardous material. After the hazardous material is dissolved, there is no longer any problem of it being flammable or explosive when exposed to air or polluting the air. The gaseous hazardous material after heating and purging can be introduced into an external liquid pipeline (not shown in the attached figure) through the switching of the second isolation control valve 14, which can also solve the technical problem of hazardous products being flammable or explosive when exposed to air or polluting the air. It should be noted that both the first isolation control valve 12 and the second isolation control valve 14 have the function of isolating vacuum from the atmosphere.

[0049] In some embodiments, the condensation device 15 may be a cold shield device. In some embodiments, combined with Figure 1 and Figure 3The cooling screen device includes cooling pipes 16. The coolant inlet 16a of the cooling pipes 16 extends into the cooling screen from one end, and the coolant outlet 16b extends out from the other end. In some preferred embodiments, the cooling pipes 16 are evenly distributed inside the cooling screen 17 and positioned close to its outer wall, resulting in more uniform and effective cooling. In some preferred embodiments, the cooling pipes 16 are arranged in a Z-shape or S-shape, which further optimizes and improves the cooling effect. In some preferred embodiments, the outer wall of the cooling screen device (i.e., the outer wall of the cooling screen 17) has an uneven surface, such as a wavy surface or an accordion-like surface, to increase the surface area for condensation adsorption and greatly improve the adsorption efficiency for hazardous materials.

[0050] In some implementations, combined Figure 1 , Figure 2 and Figure 4 The recycling chamber 1 is also equipped with a vacuum gauge 18 for real-time monitoring of the vacuum level within the chamber to meet the process requirements for handling hazardous materials. In some preferred embodiments, the vacuum gauge 18 extends from the top of the recycling chamber 1, avoiding the risk of damage during operation compared to its placement at the bottom of conventional equipment. In some preferred embodiments, the vacuum gauge 18 comprises a flange sealing part 18a, a support part 18b, and a detection part 18c. The flange sealing part 18a is the outer vacuum portion, located outside the recycling chamber 1, and is sealed via a flange structure. The support part 18b and the detection part 18c are the inner vacuum portions. The support part 18b may include auxiliary accessories such as brackets, extension rods, and cables. The detection part 18c is a vacuum detection component, which may employ a detection sensor, etc., to detect the vacuum level at the current location and provide a signal feedback to the controller. In some preferred embodiments, the heating device 21 of the target cavity 2, the condensing device 15 of the recycling and processing cavity 1, the first isolation control valve 12, the second isolation control valve 14, and the vacuum gauge 18 are all connected to a controller (not shown in the figure). In this way, through the overall control of the controller, effective feedback interaction and efficient control of heating process, cooling process, and monitoring data of processing agent flow, gas pressure, and vacuum degree can be realized in various hazardous material recycling and processing scenarios, thereby greatly improving the recycling and processing efficiency of the equipment.

[0051] In addition, some embodiments of this application also provide a vacuum processing device, which, in addition to the hazardous material recovery and processing device described in any of the above embodiments, also includes a target cavity 2. The target cavity 2 is a cavity containing hazardous materials. In some embodiments, the hazardous materials include phosphorus products, selenium products, sulfur products, or any other possible process products. For example, the target cavity 2 can be an ultra-high vacuum molecular beam epitaxial cavity used in the indium phosphide series epitaxial wafer growth process, during which a large amount of white phosphorus products accumulate in the target cavity 2. A heating device 21 is also provided on the target cavity 2 to bake and heat the target cavity 2, thereby vaporizing the hazardous materials in the target cavity 2. In some embodiments, the heating device 21 is a baking device that surrounds and covers the outer wall of the target cavity 2, used to heat and vaporize the hazardous materials inside the target cavity 2. In some preferred embodiments, in order to uniformly heat the entire target cavity 2 and each area of ​​the cavity, the heating device 21 can be an integrally covered baking garment. After being powered on, the covered baking garment will bake and heat the target cavity 2 and has a heat preservation function. In addition, the target cavity 2 has a sealable chamber, meaning it can provide a sealed environment when the process requires it. For example, after evacuation by a vacuum pump, the interconnecting chambers of the recovery processing cavity 1 and the target cavity 2 remain under vacuum. In some preferred embodiments, the target cavity 2 is an MBE growth chamber, or any other possible vacuum processing process system chamber; this application does not impose any particular limitation.

[0052] In addition, such as Figure 5 As shown, the hazardous material recycling and processing operation of the hazardous material recycling and processing apparatus provided in some embodiments of this application is as follows:

[0053] S11. First, during the first time period, the recovery and processing chamber 1 is connected to a vacuum pump through at least the first interface 11 to evacuate the recovery and processing chamber 1.

[0054] S12, thereafter, during the second time period, the target cavity 2 is connected through at least the first interface 11 to receive the hazardous material discharged from the target cavity 2;

[0055] S13. Then, after being condensed by the condensation device 15 of the recycling chamber 1, the treatment agent is introduced through the second interface 13 of the recycling chamber 1 to achieve the treatment of hazardous materials.

[0056] The recycling and processing chamber 1 has a sealable chamber.

[0057] In some embodiments, each first interface 11 is provided with a first isolation control valve 12; the first isolation control valve 12 is used to connect or disconnect the connection between the first interface 11 and the target cavity 2, or to connect or disconnect the connection between the first interface 11 and the vacuum pump. In some embodiments, each second interface 13 is provided with a second isolation control valve 14, the second isolation control valve 14 is used to connect or disconnect the channel through which the treatment agent is introduced into the second interface 13. In some embodiments, a vacuum gauge 18 is used to monitor the vacuum level in the recovery and treatment cavity 1 in real time and feed it back to the controller. The controller controls the recovery and treatment cavity 1 to meet the vacuum level requirements, which can accurately ensure that the collection and treatment of hazardous materials is carried out under the expected vacuum level conditions, thereby ensuring that the treatment of hazardous materials is more thorough and efficient.

[0058] In addition, such as Figure 6 As shown, in some preferred embodiments, when the controller participates in the overall control, the overall efficiency of the recycling process can be further improved. The specific operating steps of the device are as follows:

[0059] S21. Based on the first operation command issued by the controller, the first isolation control valve 12 switches the first interface 11 to connect to the vacuum pump to perform a vacuuming operation on the recovery processing chamber 1.

[0060] S22. Based on the second operation command issued by the controller, the first isolation control valve 12 switches the first interface 11 to connect to the target cavity 2, completing the introduction of hazardous materials.

[0061] S23. Then, based on the third operation command issued by the controller, the condensation device 15 performs condensation treatment to collect hazardous materials.

[0062] S24. Finally, based on the fourth operation command issued by the controller, the second isolation control valve 14 controls the second interface 13 to introduce the treatment agent to treat the collected hazardous materials.

[0063] In addition, such as Figure 7 As shown, the hazardous material recycling and processing operation of the hazardous material recycling and processing equipment provided in some embodiments of this application is as follows:

[0064] S31. First, the hazardous material is heated and vaporized by the heating device 21 in the target cavity 2, and the vacuum pump is connected to the recovery and processing cavity 1 through at least the first interface 11 to evacuate the recovery and processing cavity 1, so that the interconnected cavity between the recovery and processing cavity 1 and the target cavity 2 is kept in a vacuum state.

[0065] S32, and then in the second time period, the target cavity 1 is connected through at least the first interface 11 to receive the hazardous material discharged from the target cavity 1;

[0066] S33. After being condensed by the condensation device 15 inside the recycling chamber 1, the hazardous material is collected on the condensation device 15.

[0067] S34. Then, the treatment agent is introduced through the second interface 13 of the recycling chamber 1 to achieve the treatment of hazardous materials.

[0068] In addition, such as Figure 8 As shown, in some preferred embodiments, with the controller participating in overall control, the overall efficiency of the recycling process can be further improved. The specific operating steps of the equipment are as follows:

[0069] S41. Based on the fifth operation command issued by the controller, the heating device 21 in the target cavity 2 is controlled to heat and vaporize the hazardous material, and based on the first operation command issued by the controller, the first isolation control valve 12 switches the first interface 11 to connect to the vacuum pump to perform a vacuuming operation on the recovery and processing cavity 1.

[0070] S42. Based on the second operation command issued by the controller, the first isolation control valve 12 switches the first interface 11 to connect to the target cavity 2, completing the introduction of hazardous materials.

[0071] S43. Based on the third operation command issued by the controller, the condensation device 15 performs condensation treatment to collect hazardous materials;

[0072] S44. Based on the fourth operation command issued by the controller, the second isolation control valve 14 controls the second interface 13 to introduce the treatment agent to treat the collected hazardous materials.

[0073] In some preferred embodiments, the hazardous material recovery and treatment method described in any of the above embodiments can use a vacuum gauge 18 to monitor the vacuum level in the recovery and treatment chamber 1 in real time and feed it back to the controller, so that the recovery and treatment chamber 1 meets the vacuum level requirements.

[0074] The following will provide further explanation using specific application examples for the recycling and processing of different hazardous materials. It should be noted that before recycling, one of the first interfaces 11 of the recycling chamber 1 can be connected to the target chamber 2, and another first interface 11 can be connected to a vacuum pump for evacuation. The vacuum level is monitored in real time using a vacuum gauge 18, and the evacuation process is controlled by a controller, thus bringing the entire chamber into a vacuum state. Subsequently, the first isolation control valve 12 is opened, and the recycling chamber 1 and the target chamber 2 are in a vacuum interconnected state.

[0075] Application Example 1

[0076] The specific recycling and treatment process for hazardous phosphorus products (such as white phosphorus) is as follows:

[0077] First, in addition to the first isolation control valve 12 on the first interface 11 connected to the target cavity 2 (exemplarily, such as...), Figure 1 Except for the upper right position shown, which is in the open state, the other first isolation control valves 12 of the first interface 11 (exemplarily, such as...) Figure 1 The second isolation control valve 14 (as shown in the lower left position), the second interface 13 (exemplary, such as...) Figure 1 The upper left and lower right positions shown are both closed. The target cavity 2 is heated to 100℃-200℃. The hazardous phosphorus in the target cavity 2 is vaporized by heating and gradually enters the recovery and treatment cavity 1. At the same time, the coolant outlet 16b is closed and the coolant inlet 16a is opened. Refrigerant (e.g., liquid nitrogen) is introduced into the condenser 15 of the recovery and treatment cavity 1. The gas pressure value of the recovery and treatment cavity 1 will be very low at the beginning (e.g., 1E-3 Torr). This process can last for several days (e.g., 1-3 days) until the gas pressure value in the recovery and treatment cavity 1 reaches 5E-7 Torr or lower. This indicates that the phosphorus in the recovery and treatment cavity 1 has been completely adsorbed and recovered, and the adsorption of phosphorus by the condenser 15 is completed.

[0078] Then, the first isolation control valve 12 on the upper right first interface 11 of the target cavity 2 is closed, and the refrigerant is vented. The coolant inlet 16a and coolant outlet 16b are closed, and the second isolation control valve 14 of the upper left second interface 13, which connects to nitrogen, is opened to introduce nitrogen until the nitrogen content in the recovery and treatment cavity 1 reaches 1.01325 × 10⁻⁶. 5 The process typically lasts 25-35 minutes, using Pascals (Pa) at one standard atmosphere. Then, the second isolation control valve 14 of the upper left second interface 13 is switched to the water (e.g., pure water) channel, or the water channel is opened directly through the second isolation control valve 14 of the lower right second interface 13. This process typically lasts 25-35 minutes until the recycling chamber 1 is full. The second isolation control valve 14 of the upper left second interface 13, the upper left second interface 13, or the lower right second interface 13 is then closed. During this process, nitrogen is expelled, and phosphorus in the chamber is dissolved in the water or deposited in the water in solid form. This avoids spontaneous combustion of phosphorus or explosions caused by contact with air when the chamber is opened, thus optimizing the performance of the process equipment and the safety of the process operation.

[0079] Application Example 2

[0080] For hazardous phosphorus products, another method of recycling and treatment is also available, and the specific operation process is as follows:

[0081] First, in addition to the first isolation control valve 12 on the first interface 11 connected to the target cavity 2 (exemplarily, such as...), Figure 1Except for the upper right position shown, which is in the open state, the other first isolation control valves 12 of the first interface 11 (exemplarily, such as...) Figure 1 The second isolation control valve 14 (as shown in the lower left position), the second interface 13 (exemplary, such as...) Figure 1 The upper left and lower right positions shown are both in the closed state. The target cavity 2 is heated to 150℃-190℃. The hazardous phosphorus in the target cavity 2 is vaporized by heating and gradually enters the recovery and treatment cavity 1. At the same time, the coolant outlet 16b is closed and the coolant inlet 16a is opened. Refrigerant (e.g., liquid nitrogen) is introduced into the condenser 15 of the recovery and treatment cavity 1. The gas pressure value of the recovery and treatment cavity 1 will be very low at the beginning (e.g., 1E-3 Torr). This process can last for several days (e.g., 1-3 days) until the gas pressure value in the recovery and treatment cavity 1 reaches 5E-7 Torr or lower. This indicates that the phosphorus in the recovery and treatment cavity 1 has been completely adsorbed and recovered, and the adsorption of phosphorus by the condenser 15 is completed.

[0082] Then, the first isolation control valve 12 on the upper right first interface 11 of the target cavity 2 is closed, and the refrigerant is emptied. The coolant inlet 16a and the coolant outlet 16b are closed. The second isolation control valve 14 of the upper left second interface 13, which is connected to nitrogen, is opened to introduce hot nitrogen (e.g., nitrogen heated to 90°C) until the pressure in the recovery treatment cavity 1 reaches 1 to 1.1 standard atmospheres. This process can, for example, last for 25 to 35 minutes, to achieve heating and purging of phosphorus products. During this process, phosphorus is reheated and turns into a gaseous state and is blown away by nitrogen. It can be blown into the water channel controlled by the second isolation control valve 14 of the upper left second interface 13 or the water channel controlled by the second isolation control valve 14 of the lower right second interface 13, so that the phosphorus in the cavity dissolves in the water or is deposited in the water in solid form.

[0083] Application Example 3

[0084] The specific recycling and treatment process for hazardous selenium products is as follows:

[0085] First, in addition to the first isolation control valve 12 on the first interface 11 connected to the target cavity 2 (exemplarily, such as...), Figure 1 Except for the upper right position shown, which is in the open state, the other first isolation control valves 12 of the first interface 11 (exemplarily, such as...) Figure 1 The second isolation control valve 14 (as shown in the lower left position), the second interface 13 (exemplary, such as...) Figure 1The upper left and lower right positions shown are both closed. The target cavity 2 is heated to 120℃-180℃. The hazardous selenium in the target cavity 2 is vaporized by heating and gradually enters the recovery and treatment cavity 1. At the same time, the coolant outlet 16b is closed and the coolant inlet 16a is opened. Refrigerant (e.g., liquid nitrogen) is introduced into the condenser 15 of the recovery and treatment cavity 1. The gas pressure value of the recovery and treatment cavity 1 will be very low at the beginning (e.g., 1E-3 Torr). This process can last for several days (e.g., 1-3 days) until the gas pressure value in the recovery and treatment cavity 1 reaches 5E-7 Torr or lower. This indicates that the selenium in the recovery and treatment cavity 1 has been completely adsorbed and recovered, and the adsorption of selenium by the condenser 15 is completed.

[0086] Then, the first isolation control valve 12 on the upper right first interface 11 of the target cavity 2 is closed, and the refrigerant is purged. The coolant inlet 16a and coolant outlet 16b are closed, and the second isolation control valve 14 of the upper left second interface 13, which connects to nitrogen, is opened to introduce nitrogen until the pressure in the recovery and treatment cavity 1 reaches 1 standard atmosphere. This process can, for example, last for 25-35 minutes. Subsequently, the second isolation control valve 14 of the upper left second interface 13 is switched to the channel for injecting ethanol solution, or the ethanol solution channel can be opened directly through the second isolation control valve 14 of the lower right second interface 13. This process can, for example, last for 25-35 minutes. Continue for 25-35 minutes until the recycling chamber 1 is full. Then close the second isolation control valve 14 of the upper left second port 13 or the lower right second port 13. During this period, nitrogen is vented and selenium in the chamber is dissolved in the ethanol solution. Because selenium itself has a high vapor pressure, after selenium is used as a material for growth in the chamber during the process, the entire chamber will be heavily coated with selenium vapor. Therefore, collecting and treating selenium products in this way can eliminate contamination from selenium, restore the chamber's ability to grow other compounds, and thus optimize the performance and operating efficiency of the process equipment.

[0087] Application Example 4

[0088] The specific recovery and treatment process for hazardous sulfur products is as follows:

[0089] First, in addition to the first isolation control valve 12 on the first interface 11 connected to the target cavity 2 (exemplarily, such as...), Figure 1 Except for the upper right position shown, which is in the open state, the other first isolation control valves 12 of the first interface 11 (exemplarily, such as...) Figure 1 The second isolation control valve 14 (as shown in the lower left position), the second interface 13 (exemplary, such as...) Figure 1The upper left and lower right positions shown are both closed. The target cavity 2 is heated to 100℃-160℃. The hazardous sulfur in the target cavity 2 is vaporized by heating and gradually enters the recovery and treatment cavity 1. At the same time, the coolant outlet 16b is closed and the coolant inlet 16a is opened. Refrigerant (e.g., liquid nitrogen) is introduced into the condenser 15 of the recovery and treatment cavity 1. The gas pressure value of the recovery and treatment cavity 1 will be very low at the beginning (e.g., 1E-3 Torr). This process can last for several days (e.g., 1-3 days) until the gas pressure value in the recovery and treatment cavity 1 reaches 5E-7 Torr or lower. This indicates that the sulfur in the recovery and treatment cavity 1 has been completely adsorbed and recovered, and the adsorption of sulfur by the condenser 15 is completed.

[0090] Then, the first isolation control valve 12 on the upper right first interface 11 of the target cavity 2 is closed, and the refrigerant is emptied. The coolant inlet 16a and coolant outlet 16b are closed, and the second isolation control valve 14 of the upper left second interface 13, which connects to nitrogen, is opened to introduce nitrogen until the pressure in the recovery and treatment cavity 1 reaches 1 standard atmosphere. This process can, for example, last for 25-35 minutes. Subsequently, the second isolation control valve 14 of the upper left second interface 13 is switched to the channel for injecting carbon disulfide liquid, or the second isolation control valve 14 of the lower right second interface 13 is opened directly. The carbon disulfide liquid channel is opened, and this process can be sustained for 25-35 minutes, until the recovery treatment chamber 1 is filled. The second isolation control valve 14 of the upper left second interface 13, the upper left second interface 13, or the lower right second interface 13 is closed. During this period, nitrogen is vented, and the sulfur in the chamber is dissolved in the carbon disulfide liquid. This treatment can also avoid the pollution caused by sulfur directly spreading into the air, and at the same time, it can eliminate the pollution of the chamber equipment by sulfur, restore the chamber's ability to grow other compounds, thereby optimizing the performance and operating efficiency of the process equipment.

[0091] The hazardous material recovery and treatment scheme described in this application provides a solution that can both collect and reduce the hazards of hazardous materials. It maintains a sealed vacuum environment between the target hazardous material chamber and the recovery and treatment chamber. First, a heating device vaporizes the accumulated hazardous materials in the target chamber. Then, a condensation device in the recovery and treatment chamber collects and recovers the materials. Finally, a corresponding treatment agent is introduced under the control of an isolation control valve, thus reducing the hazards of process hazardous products. This effectively solves safety threats such as spontaneous combustion, explosion, or air pollution, and optimizes the safety and maintenance performance of process equipment. It is particularly suitable for vacuum systems with vacuum or ultra-high vacuum requirements, such as molecular beam epitaxy systems. Furthermore, this hazardous material recovery and treatment solution is widely applicable to the recovery and treatment of various industrial hazardous products. The device and treatment method also have advantages such as simple design, ease of implementation, and low cost. For example, in existing vacuum systems with process reaction chambers and cold shield collection chambers, improvements can be made only by modifying the chamber interfaces, isolation control valves, vacuum gauge positions, and required piping. This achieves both safe treatment of hazardous products and optimized equipment and processes while saving operating costs.

[0092] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations included in the claims. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this utility model that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this utility model and do not limit the scope of protection of this utility model patent.

Claims

1. A hazardous material recycling and processing device, characterized in that, The apparatus, used for connecting to a target cavity to receive and process heated hazardous materials flowing within the target cavity, includes a recovery and processing cavity having a sealable chamber. The recovery and processing cavity includes a condensation device, at least one first interface, and at least one second interface. The at least one first interface is used to connect a vacuum pump to evacuate the sealable chamber during a first time period; and to connect a target cavity during a second time period to receive hazardous materials discharged from the target cavity; the first time period is different from the second time period; The at least one second interface is used to introduce a treatment agent, to introduce a treatment agent for treating hazardous materials, and to discharge the treatment agent after the treatment is completed.

2. The hazardous material recovery and treatment device according to claim 1, characterized in that, Each of the first interfaces is provided with a first isolation control valve; the first isolation control valve is used to connect or disconnect the connection between the first interface and the target cavity, or to connect or disconnect the connection between the first interface and the vacuum pump; and / or Each of the second interfaces is provided with a second isolation control valve, which is used to connect or disconnect the channel through which the treatment agent enters the second interface.

3. The hazardous material recovery and treatment device according to claim 1, characterized in that, The first interface is used to connect to the target cavity and the vacuum pump at different times; or, there are multiple first interfaces, wherein at least one of the multiple first interfaces is connected to the target cavity and at least one of the multiple first interfaces is connected to the vacuum pump.

4. The hazardous material recovery and treatment device according to claim 1, characterized in that, The condensation device is a cold screen device, which is equipped with a cooling pipe. The coolant inlet of the cooling pipe extends into the cold screen from one end of the cold screen device, and the coolant outlet extends out from the other end of the cold screen.

5. The hazardous material recovery and treatment device according to claim 4, characterized in that, The cooling pipes are evenly laid inside the cold shield and are located close to the outer wall of the cold shield.

6. The hazardous material recovery and treatment device according to claim 4, characterized in that, The cooling pipes are arranged in a Z-shaped or S-shaped pattern.

7. The hazardous material recovery and treatment device according to claim 4, characterized in that, The outer wall of the cold screen device has an uneven surface.

8. The hazardous material recovery and treatment device according to claim 1, characterized in that, The number of the first interfaces is multiple, and each of the multiple first interfaces is connected to multiple target cavities, and the hazardous materials in each target cavity may be the same or different; and / or There are multiple second interfaces, and the processing agent introduced into each second interface may be the same or different.

9. The hazardous material recovery and treatment device according to claim 1, characterized in that, The recycling chamber is also equipped with a vacuum gauge for real-time monitoring of the vacuum level within the recycling chamber.

10. The hazardous material recovery and treatment device according to claim 1, characterized in that, Each of the first interfaces is provided with a first isolation control valve; the first isolation control valve is used to connect or disconnect the connection between the first interface and the target cavity, or to connect or disconnect the connection between the first interface and the vacuum pump; and / or, each of the second interfaces is provided with a second isolation control valve, the second isolation control valve being used to connect or disconnect the channel through which the treatment agent enters the second interface; The recycling chamber is also equipped with a vacuum gauge for real-time monitoring of the vacuum level within the recycling chamber. The condensation device, the first isolation control valve, the second isolation control valve, and the vacuum gauge in the recycling chamber are all connected to the controller.

11. A vacuum processing device, characterized in that, Includes the hazardous material recovery and treatment apparatus according to any one of claims 1 to 10 and the target cavity.

12. The vacuum processing equipment according to claim 11, characterized in that, The target cavity is equipped with a heating device, which is a baking device that surrounds and covers the outer wall of the target cavity, and is used to heat and vaporize the hazardous materials inside the target cavity.

13. The vacuum processing equipment according to claim 11, characterized in that, The hazardous materials within the target cavity include phosphorus products, selenium products, or sulfur products.

14. The vacuum processing equipment according to claim 12, characterized in that, The heating device of the target cavity is also connected to the controller.

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