Multi-stage ion exchange method water medium supply device

By using a multi-stage ion exchange water supply device, which utilizes multiple columns connected in series with different types of ion exchange resins and a threaded sealing structure, the problem of traditional single ion exchange being unable to remove multiple ion impurities is solved, thus achieving efficient water purification and a stable water supply.

CN223823417UActive Publication Date: 2026-01-23SHANGHAI WUDAO ELECTROMECHANICAL EQUIP CO LTD
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Patent Information

Application Number
CN202520198971.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-02-08
Publication Date
2026-01-23
Estimated Expiration
2035-02-08

AI Technical Summary

Technical Problem

Traditional single-ion exchange technology cannot effectively remove multiple different types of ionic impurities from water at the same time, which cannot meet the high-purity water requirements of semiconductor manufacturing, resulting in a decrease in chip yield.

Method used

The water supply device employs a multi-stage ion exchange method, which uses multiple columns connected in series and filled with different types of ion exchange resins. Combined with a threaded cap structure and a sliding tube design, it achieves comprehensive and deep removal of various ionic impurities in water and provides efficient resin regeneration and cleaning methods.

Benefits of technology

It significantly improves water purification effect and efficiency, meets the demand for high-purity water, ensures product quality and production stability, and reduces equipment maintenance difficulty and cost.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a multi-stage ion exchange method water medium supply device, which relates to the technical field of water treatment and comprises a frame, and an ion exchange component is mounted on the frame. The ion exchange assembly comprises a plurality of columns installed on the frame at equal intervals, an exchange cavity is formed in each column, a water medium inlet communicated with the exchange cavity is formed in the side wall of the lower portion of each column, and a water medium outlet communicated with the exchange cavity is formed in the side wall of the upper portion of each column. The water medium inlets and the water medium outlets of the adjacent columns are connected in series through water flow pipelines, and the exchange cavities are filled with different types of ion exchange resin. Through the design that a plurality of column bodies are connected in series and are filled with different types of ion exchange resin, various ion impurities in water can be comprehensively and deeply removed, and compared with a traditional single ion exchange method, the water purification effect and efficiency are greatly improved, and the product quality and the stability of a production process are effectively guaranteed.
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Description

Technical Field

[0001] This utility model relates to the field of water treatment technology, specifically to a multi-stage ion exchange water medium supply device. Background Technology

[0002] In this era of rapid technological advancement, the demand for high-purity water media is becoming increasingly urgent and diverse. In the semiconductor manufacturing field, as chip manufacturing processes continue to shrink, evolving from micrometer-level to nanometer-level and even smaller sizes, even extremely small amounts of metal ion impurities in water, such as alkali metal ions like sodium and potassium ions, as well as transition metal ions like copper and iron, can cause serious problems in key processes of chip manufacturing, such as photolithography, etching, and thin film deposition. These impurity ions may migrate to the surface of silicon wafers, damaging the electrical performance of semiconductor devices, leading to a significant decrease in chip yield and causing huge economic losses.

[0003] Traditional water purification technologies, such as simple sedimentation filtration and single ion exchange, are inadequate when faced with such stringent water quality requirements. Sedimentation filtration can usually only remove larger suspended particles and has almost no ability to remove dissolved ionic impurities.

[0004] Single ion exchange technology is based on the reversible exchange reaction between ion exchange resins and specific ions in water to achieve ion removal. Strongly acidic cation exchange resins are mainly used to remove cations in water, such as calcium, magnesium, and iron metal cations. The principle is that hydrogen ions on the resin exchange with cations in the water. Strongly basic anion exchange resins are mainly used to target anions in water, such as chloride ions, sulfate ions, and carbonate ions. The removal is achieved by exchanging hydroxide ions on the resin with anions in the water.

[0005] However, this single ion exchange method has serious drawbacks. It can only exchange ions of a specific type and cannot simultaneously remove multiple different types of ions from water in a comprehensive and deep manner. In practical applications, water often contains multiple cation and anion impurities. Water treated by a single ion exchange may still contain a high concentration of other unexchanged ions, which cannot meet the requirements for water purity.

[0006] In view of the above, this application is hereby submitted. Utility Model Content

[0007] The purpose of this invention is to provide a multi-stage ion exchange water medium supply device to solve the problems mentioned in the background art.

[0008] To solve the above-mentioned technical problems, this utility model provides a multi-stage ion exchange water medium supply device, including a frame on which an ion exchange assembly is installed. The ion exchange assembly includes multiple columns equidistantly installed on the frame. Each column has an exchange cavity inside, a water medium inlet communicating with the exchange cavity on its lower side wall, and a water medium outlet communicating with the exchange cavity on its upper side wall. The water medium inlets and outlets of adjacent columns are connected in series through water flow pipes, and each exchange cavity is filled with different types of ion exchange resin.

[0009] Furthermore, the column has a hollow cylindrical tube structure with open top and bottom. An upper cap is threadedly connected to the top of the column to seal the upper opening, and a lower cap is threadedly connected to the bottom of the column to seal the lower opening.

[0010] Furthermore, the column has a hollow cylindrical tube structure with open top and bottom. An upper cap is threadedly connected to the top of the column to seal the upper opening, and a lower cap is threadedly connected to the bottom of the column to seal the lower opening.

[0011] Furthermore, the outer diameter of the sliding tube is adapted to the inner diameter of the hollow tube, and a sealing film is also wrapped on the inner and outer walls of the sliding tube, which is in contact with the inner wall of the hollow tube.

[0012] Furthermore, a sewage pipe is fixedly installed on the top of the upper cover, and the end of the sewage pipe away from the upper cover is connected to a main sewage pipe. When the sliding tube slides upward along the inner wall of the hollow tube to its limit position, the sliding tube is inserted into the inside of the sewage pipe.

[0013] Furthermore, each of the columns is fixedly equipped with an air intake pipe at its bottom, and each air intake pipe is equipped with a regulating valve. One end of the air intake pipe is fixedly connected to the bottom surface of the lower cover, and the end of the air intake pipe away from the lower cover is connected to a main air supply pipe.

[0014] Furthermore, multiple annular sieve plates are provided inside the column, and the ion exchange resin is disposed between two opposing sieve plates.

[0015] Furthermore, the outer ring sidewall of the sieve plate is fitted with the inner wall of the column, and the inner ring sidewall of the sieve plate is fitted with the outer wall of the hollow tube.

[0016] Compared with the prior art, the beneficial effects of this utility model are:

[0017] 1. This utility model, through the design of multiple columns connected in series and filled with different types of ion exchange resins, can comprehensively and deeply remove various ionic impurities in water. Compared with traditional single ion exchange methods, it greatly improves the effect and efficiency of water purification, meets the needs of industries with high water purity requirements, and effectively ensures product quality and production process stability.

[0018] 2. In this utility model, the column adopts an open structure with threaded connection and capping at the top and bottom, which facilitates the filling and replacement of ion exchange resin. The threaded connection of the upper and lower caps ensures the sealing of the column during operation and reduces the difficulty and cost of equipment maintenance.

[0019] 3. This utility model provides an effective means for the regeneration and cleaning of ion exchange resin in the column by combining a sliding tube, float, first opening, and second opening set in a hollow tube. Gas pressurization can improve the efficiency of regeneration and cleaning, reduce costs, and enable the resin to be more evenly distributed in the column after regeneration and cleaning, restoring its good ion exchange performance and extending the service life of the ion exchange resin, thereby ensuring the long-term stable operation of the entire multi-stage ion exchange water medium supply device and the continuity of water medium treatment effect. Attached Figure Description

[0020] Figure 1 This is a front view structural diagram of the present utility model;

[0021] Figure 2 This is a three-dimensional structural diagram of the ion exchange component in this utility model;

[0022] Figure 3 This is a front view schematic diagram of the ion exchange component in this utility model;

[0023] Figure 4 For along Figure 3 A schematic diagram of the structure with the mid-section AA.

[0024] In the diagram: 1. Frame; 2. Column; 3. Water pipe; 4. Air inlet pipe; 5. Regulating valve; 6. Main air supply pipe; 7. Sewage pipe; 8. Main sewage pipe; 9. Lower cover; 10. Upper cover; 11. Hollow tube; 12. Sieve plate; 13. Ion exchange resin; 14. Sliding tube; 15. Float column; 16. First opening; 17. Second opening. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Please see Figures 1-4 This utility model provides a technical solution: a multi-stage ion exchange water medium supply device, including a frame 1, on which an ion exchange component is installed; the ion exchange component includes a plurality of columns 2 equidistantly installed on the frame 1, each column 2 having an exchange cavity inside, a water medium inlet communicating with the exchange cavity on its lower side wall, and a water medium outlet communicating with the exchange cavity on its upper side wall, the water medium inlets and outlets of adjacent columns 2 being connected in series through water flow pipes 3, and each exchange cavity being filled with different types of ion exchange resins 13.

[0027] Specifically, frame 1 serves as the supporting structure for the entire ion exchange assembly. Multiple columns 2 are equidistantly mounted on frame 1, forming a multi-stage ion exchange unit. Water enters the exchange cavity through the water inlet at the bottom of column 2, where it undergoes an ion exchange reaction with different types of ion exchange resins 13, removing corresponding ionic impurities. The water then flows out through the water outlet at the top. Adjacent columns 2 are connected in series via water flow pipes 3, allowing water to pass through different types of resins sequentially, achieving multi-stage ion exchange and gradually improving the purity of the water medium.

[0028] By using a design that connects multiple columns 2 in series and fills them with different types of ion exchange resins 13, it is possible to remove various ionic impurities in water in a comprehensive and deep manner. Compared with single ion exchange resin treatment, it greatly improves the effect and efficiency of water purification and can meet the needs of various application scenarios with high water purity requirements.

[0029] It should be noted that column 2 in this scheme is divided into three parts. One part is filled with a strong acidic cation exchange resin, another part is filled with a strong basic anion exchange resin, and the third part is filled with cation exchange resin and anion exchange resin in a certain ratio, depending on the relative size of the exchange capacity of the two resins. This forms a multi-stage compound column unit.

[0030] See Figure 2 The column 2 has a hollow cylindrical tube structure with open top and bottom. An upper cap 10 is threaded to the top of the column 2 to seal the upper opening, and a lower cap 9 is threaded to the bottom of the column 2 to seal the lower opening.

[0031] Specifically, the column 2 adopts a hollow cylindrical tube structure with open top and bottom. The upper cover 10 and the lower cover 9 are connected by threads to seal the two open ends of the column 2. This not only facilitates the filling and replacement of the ion exchange resin 13 inside the column 2, but also ensures the sealing of the column 2 during operation, preventing water leakage or the entry of external impurities.

[0032] The threaded cap structure makes the assembly and maintenance of column 2 simple. When it is necessary to replace ion exchange resin 13, it is only necessary to unscrew the upper cap 10 and the lower cap 9 to operate, which reduces the difficulty and cost of equipment maintenance, while ensuring the stability and reliability of the device operation, which helps to maintain the normal operation of the ion exchange process and ensure the quality of water treatment.

[0033] See Figure 4 The upper cover 10 has a through hole in the middle. A hollow tube 11 extending along the axis of the column 2 is arranged inside the through hole. A sliding tube 14 that can slide along its axis is arranged inside the hollow tube 11. The bottom end of the sliding tube 14 is sealed and the top end is open. A float 15 that can slide along the internal axis of the hollow tube 11 is fixedly installed on the bottom wall of the sliding tube 14. A first opening 16 is also opened on the outer wall of the sliding tube 14. A second opening 17 is opened on the side wall of the hollow tube 11. When the sliding tube 14 slides upward along the inner wall of the hollow tube 11 to the limit position, the first opening 16 and the second opening 17 coincide.

[0034] Specifically, the water medium entering the column 2 is purified by the ion exchange resin 13, and the purified water is discharged through the water flow pipe 3. When the ion exchange resin 13 needs to be cleaned, the sliding tube 14 is pulled to slide upwards into the hollow tube 11, so that the first opening 16 and the second opening 17 coincide. The cleaning water can be introduced into the sliding tube 14 through the first opening 16 and the second opening 17 and then discharged. This provides an effective means for the regeneration and cleaning of the ion exchange resin 13 in the column 2. Gas pressurization can improve the efficiency of regeneration and cleaning and reduce costs.

[0035] See Figure 4 The outer diameter of the sliding tube 14 is adapted to the inner diameter of the hollow tube 11. A sealing film is also wrapped on the inner and outer walls of the sliding tube 14, and the sealing film is in contact with the inner wall of the hollow tube 11.

[0036] Specifically, in order to ensure that the sliding tube 14 maintains good sealing performance when sliding inside the hollow tube 11, except for specific times when the openings overlap, it can effectively prevent the unintended flow of water or other substances between the hollow tube 11 and the sliding tube 14 at other times.

[0037] See Figure 2A sewage pipe 7 is fixedly installed on the top of the upper cover 10. The end of the sewage pipe 7 away from the upper cover 10 is connected to the main sewage pipe 8. When the sliding pipe 14 slides upward along the inner wall of the hollow pipe 11 to the limit position, the sliding pipe 14 is inserted into the inside of the sewage pipe 7.

[0038] Specifically, the sewage pipe 7 at the top of the upper cover 10 is connected to the main sewage pipe 8. When the sliding pipe 14 slides upward along the inner wall of the hollow pipe 11 to the limit position, the sliding pipe 14 is inserted into the sewage pipe 7. At this time, the water or waste liquid that needs to be discharged from the column 2 enters the sewage pipe 7 through the hollow pipe 11 and the sliding pipe 14, and finally flows into the main sewage pipe 8 for discharge.

[0039] See Figure 4 Each column 2 has an air inlet pipe 4 fixedly installed at its bottom. Each air inlet pipe 4 is equipped with a regulating valve 5. One end of the air inlet pipe 4 is fixedly connected to the bottom surface of the lower cover 9, and the end of the air inlet pipe 4 away from the lower cover 9 is connected to the main air supply pipe 6.

[0040] Specifically, the combination of the air inlet pipe 4, the main air supply pipe 6, and the regulating valve 5 provides an effective means for the regeneration and cleaning of the ion exchange resin 13 inside the column 2.

[0041] See Figure 4 Multiple annular sieve plates 12 are arranged inside the column 2, and ion exchange resin 13 is disposed between two opposite sieve plates 12.

[0042] See Figure 4 The outer ring sidewall of the sieve plate 12 is attached to the inner wall of the column 2, and the inner ring sidewall of the sieve plate 12 is attached to the outer wall of the hollow tube 11.

[0043] Working principle: Water medium enters and initially flows.

[0044] The raw water medium first enters the first column 2 on the frame 1 and flows into its exchange cavity through the water medium inlet on the lower side wall of the column 2. In the exchange cavity, the water medium and the ion exchange resin 13 filled therein begin to undergo ion exchange reaction. Since each column 2 is filled with different types of ion exchange resin 13, it selectively adsorbs and exchanges different kinds of ion impurities in the water.

[0045] Multi-stage serial switching process

[0046] After being processed by the first column 2, the water medium flows through the water medium outlet on the upper side wall and into the next adjacent column 2 via the water flow pipe 3. This process continues, flowing between multiple series-connected columns 2. Each time the water passes through a column 2, specific types of ionic impurities in the water are further removed. Through this multi-stage series connection, the purity of the water medium is gradually improved.

[0047] As described above, although the present invention has been shown and described with reference to specific preferred embodiments, it should not be construed as limiting the present invention itself. Various changes in form and detail may be made to the present invention without departing from the spirit and scope of the appended claims.

Claims

1. A multi-stage ion exchange water medium supply device, comprising a frame (1), characterized in that: An ion exchange assembly is installed on the frame (1); the ion exchange assembly includes multiple columns (2) equidistantly installed on the frame (1), each column (2) has an exchange cavity inside, a water medium inlet communicating with the exchange cavity on its lower side wall, and a water medium outlet communicating with the exchange cavity on its upper side wall. The water medium inlets and water medium outlets of adjacent columns (2) are connected in series through water flow pipes (3), and each exchange cavity is filled with different types of ion exchange resins (13).

2. The multi-stage ion exchange water medium supply device as described in claim 1, characterized in that: The column (2) has a hollow cylindrical structure with open top and bottom. An upper cap (10) is threaded to the top of the column (2) to seal the upper opening, and a lower cap (9) is threaded to the bottom of the column (2) to seal the lower opening.

3. The multi-stage ion exchange water medium supply device as described in claim 2, characterized in that: The upper cover (10) has a through hole in the middle. A hollow tube (11) extending axially along the column (2) is provided inside the through hole. A sliding tube (14) that can slide along its axial direction is provided inside the hollow tube (11). The bottom end of the sliding tube (14) is sealed and the top end is open. A float (15) that can slide along the axial direction inside the hollow tube (11) is fixedly installed on the bottom wall of the sliding tube (14). A first opening (16) is also provided on the outer wall of the sliding tube (14). A second opening (17) is provided on the side wall of the hollow tube (11). When the sliding tube (14) slides upward along the inner wall of the hollow tube (11) to the limit position, the first opening (16) and the second opening (17) coincide.

4. The multi-stage ion exchange water medium supply device as described in claim 3, characterized in that: The outer diameter of the sliding tube (14) is adapted to the inner diameter of the hollow tube (11). A sealing film is also wrapped on the inner and outer walls of the sliding tube (14), and the sealing film is in contact with the inner wall of the hollow tube (11).

5. The multi-stage ion exchange water medium supply device as described in claim 3, characterized in that: A sewage pipe (7) is fixedly installed on the top of the upper cover (10). The end of the sewage pipe (7) away from the upper cover (10) is connected to a main sewage pipe (8). When the sliding pipe (14) slides upward along the inner wall of the hollow pipe (11) to the limit position, the sliding pipe (14) is inserted into the inside of the sewage pipe (7).

6. The multi-stage ion exchange water medium supply device as described in claim 2, characterized in that: Each column (2) is fixedly installed with an air inlet pipe (4) at its bottom. Each air inlet pipe (4) is equipped with a regulating valve (5). One end of the air inlet pipe (4) is fixedly connected to the bottom surface of the lower cover (9). The end of the air inlet pipe (4) away from the lower cover (9) is connected to a main air supply pipe (6).

7. The multi-stage ion exchange water medium supply device as described in claim 1, characterized in that: Multiple annular sieve plates (12) are arranged inside the column (2), and the ion exchange resin (13) is disposed between two opposing sieve plates (12).

8. The multi-stage ion exchange water medium supply device as described in claim 7, characterized in that: The outer ring sidewall of the sieve plate (12) is attached to the inner wall of the column (2), and the inner ring sidewall of the sieve plate (12) is attached to the outer wall of the hollow tube (11).