Device for detecting trace trisilane in disilane

Abstract

The utility model discloses a device for detecting trace trisilane in disilane, which is characterized in that a detection disc is internally provided with six sample injection holes, the six sample injection holes are sequentially a first interface, a second interface, a third interface, a fourth interface, a fifth interface and a sixth interface clockwise, the upper part in each sample injection hole is provided with a purge valve, and the lower part in each sample injection hole is provided with a purge valve. An air guide nozzle is fixedly connected to the middle of the interior of the sample injection hole, a sliding barrel arranged in the sample injection hole in a sliding mode is connected to the lower portion of the air guide nozzle through a spring, and a plunger located at the outlet position of the air guide nozzle and sliding along with the sliding barrel is arranged in the sliding barrel. By rotating the rotating disc, different communication combination modes of the six sample injection holes and the six communication holes can be realized, gas stored in the quantitative tube can be quickly replaced with disilane gas, so that the effect of quickly analyzing and detecting the gas is achieved, and by additionally arranging sealing pieces on the lower half parts in the sample injection holes, the gas leakage is avoided, and the influence on later gas detection is avoided. Therefore, the accuracy of gas detection is improved to a great extent.

Description

TECHNICAL FIELD

[0001] The utility model relates to a gas detection technical field, concretely relates to a kind of trace propylsilane detection devices in ethylsilane. BACKGROUND

[0002] Propylsilane is an inorganic compound, its chemical formula is Si3H8, colorless transparent at normal temperature and normal pressure has the unpleasant irritating smell of toxic gas;It has similar chemical properties with silane, but its reactivity is stronger than silane;Mainly used in amorphous silicon film, epitaxial growth, oxide film, nitride film, chemical vapor deposition etc.Aspect.Propylsilane is combustible toxic liquid at normal temperature and normal pressure.It has similar chemical properties with silane, but its reactivity is stronger than silane and ethylsilane;It can spontaneously ignite in air;Propylsilane is mainly used for semiconductor silicon film manufacturing, amorphous silicon manufacturing.

[0003] At present, when trace and constant propylsilane is analyzed, propylsilane cannot be detected and analyzed accurately and quickly in a short time, in order to solve the above problems, a trace propylsilane detection device in ethylsilane is provided. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of trace propylsilane detection devices in ethylsilane, to solve the above-mentioned deficiencies in prior art.

[0005] In order to achieve the above purpose, the utility model provides the following technical scheme: a kind of trace propylsilane detection device in ethylsilane, comprising: detection disc, six sample introduction holes are opened in the detection disc, six the sample introduction holes are sequentially first interface, second interface, third interface, fourth interface, fifth interface, sixth interface in clockwise direction, the upper part in the sample introduction hole is provided with purge valve, the middle part in the sample introduction hole is fixedly connected with gas guide nozzle, the lower part of the gas guide nozzle is connected with the sliding cylinder slidingly arranged in the sample introduction hole by spring, the sliding cylinder is provided with plunger in the gas guide nozzle outlet position and along with the sliding cylinder sliding.

[0006] Further, the top of the detection disc is provided with the dosing tube with one end inserted into the fourth interface and the other end inserted into the sixth interface, and the end of the dosing tube inserted into the fourth interface and the sixth interface is movably sleeved with the purge valve.

[0007] Further, the bottom of the detection disc is provided with a movable groove, and the bottom of the detection disc is fixedly connected with two sealing rings arranged at the same center, and the two sealing rings are located on the inner and outer sides of the movable groove.

[0008] Further, a rotating disc is rotatably arranged on the bottom of the detection disc, three sub-detection blocks are fixedly connected to the top of the rotating disc, the three sub-detection blocks are slidably arranged in the movable groove, a connecting groove is arranged in the sub-detection block, an installation block is fixedly installed at the outlet position of the connecting groove on the sub-detection block, two communication holes are arranged in the installation block and communicated with the connecting groove, and the communication holes correspond to the positions of the sample inlets.

[0009] Further, a rotating hole is arranged in the rotating disc, a rotating shaft is fixedly sleeved on the inner wall surface of the rotating hole, a rotating block is fixedly connected to the bottom of the rotating shaft, and the top end of the rotating shaft is connected to the detection disc through a bearing.

[0010] Further, the sample outlet pipe, the carrier gas pipe, the chromatographic column and the sample inlet pipe are respectively inserted into the first interface, the second interface, the third interface and the fifth interface, and the sample outlet pipe, the carrier gas pipe, the chromatographic column and the sample inlet pipe are all movably sleeved with the purge valve.

[0011] Further, a helium ionization detector is movably sleeved at the top end of the chromatographic column, a stabilizing block is fixedly connected to the top of the detection disc, a stabilizing groove is arranged in the stabilizing block, and the chromatographic column and the helium ionization detector are located in the stabilizing groove.

[0012] In the above technical solution, the ethylsilane micro-propylsilane detection device provided by the utility model has the following beneficial effects:

[0013] By rotating the rotating disc, different communication combination modes of the six sample inlets and the six communication holes can be realized, the gas stored in the quantitative tube can be quickly replaced with ethylsilane gas, and the effect of rapid gas analysis and detection is achieved. By arranging the new sealing element in the lower half of the sample inlet, when the sample inlet and the communication hole are aligned, the sliding cylinder slides into the communication hole under the elastic force of the spring, the plunger slides out of the outlet of the air guide nozzle, the sample inlet and the communication hole are communicated, when the rotating disc is rotated, the communication hole and the sample inlet are misaligned, the sliding cylinder abuts against the inner wall of the communication hole, thereby overcoming the elastic force of the spring and retracting into the sample inlet, the plunger blocks the outlet of the air guide nozzle, gas leakage is avoided, and the accuracy of gas detection is greatly improved.

[0014] It should be understood that the foregoing general description and the following detailed description are only exemplary and illustrative, but not for limiting the present disclosure.

[0015] The present application provides an overview of various implementations or examples of the technology described in the present disclosure, and is not a comprehensive disclosure of the full scope or all features of the disclosed technology. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments will be briefly introduced as follows. Obviously, the drawings described below are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings.

[0017] Figure 1 is a three-dimensional structure schematic diagram of the present application;

[0018] Figure 2 is a top view structure schematic diagram of the detection disc of the present application;

[0019] Figure 3 is a structure schematic diagram of the sub-detection block of the present application;

[0020] Figure 4 is a structure schematic diagram of the rotating disc of the present application;

[0021] Figure 5 is a bottom structure schematic diagram of the detection disc provided by the embodiment of the present application;

[0022] Figure 6 is a structure schematic diagram of the sealing element provided by the embodiment of the present application.

[0023] Explanation of reference signs:

[0024] 1, detection disc; 2, sample inlet hole; 3, purge valve; 4, constant volume tube; 5, sample inlet tube; 6, carrier gas tube; 7, sample outlet tube; 8, movable groove; 9, sub-detection block; 10, connecting groove; 11, mounting block; 12, communication hole; 13, rotating disc; 14, fixed groove; 15, bearing; 16, rotating hole; 17, rotating shaft; 18, rotating block; 19, chromatographic column; 20, helium ionization detector; 21, stabilizing block; 22, stabilizing groove; 23, sliding cylinder; 24, gas guide nozzle; 25, plunger; 26, connecting strip; 27, spring; 28, sealing ring. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be described clearly and completely below in combination with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present disclosure.

[0026] Please refer to Figures 1-6The utility model provides a kind of detection device of trace propylsilane in ethylsilane, comprising: detection disc 1, six sample injection holes 2 are opened in detection disc 1, six sample injection holes 2 are sequentially first interface, second interface, third interface, fourth interface, fifth interface, sixth interface in clockwise direction, the upper part in sample injection hole 2 is provided with purge valve 3, the middle part in sample injection hole 2 is fixedly connected with gas guide nozzle 24, the lower part of gas guide nozzle 24 is connected with sliding cylinder 23 slidingly arranged in sample injection hole 2 by spring 27, one end of spring 27 is fixedly connected on gas guide nozzle 24, the other end of spring 27 is fixedly connected on sliding cylinder 23, plunger 25 located at the outlet position of gas guide nozzle 24 and sliding with sliding cylinder 23 is arranged in sliding cylinder 23, plunger 25 is fixedly connected on the inner wall of sliding cylinder 23 by three connecting strips 26, the top of detection disc 1 is provided with two dosing tubes 4 respectively inserted into fourth interface and sixth interface, and the end of dosing tube 4 inserted into fourth interface and sixth interface is movably sleeved with purge valve 3, the bottom of detection disc 1 is provided with movable groove 8, the bottom of detection disc 1 is fixedly connected with two sealing rings 28 arranged with the same center, two sealing rings 28 are located at the inner and outer sides of movable groove 8 respectively, the bottom of detection disc 1 is rotatably provided with rotating disc 13, the top of rotating disc 13 is fixedly connected with three sub-detecting blocks 9, three sub-detecting blocks 9 are slidingly arranged in movable groove 8, connecting groove 10 is opened in sub-detecting block 9, mounting block 11 is fixedly installed on the outlet position of connecting groove 10 on sub-detecting block 9, two communication holes 12 are opened in mounting block 11 and communicate with connecting groove 10, communication hole 12 corresponds with the position of sample injection hole 2, rotating hole 16 is opened in rotating disc 13, rotating shaft 17 is fixedly sleeved on the inner wall surface of rotating hole 16, rotating block 18 is fixedly connected on the bottom of rotating shaft 17, the top end of rotating shaft 17 is connected on detection disc 1 by bearing 15, sample outlet tube 7, carrier gas tube 6, chromatographic column 19 and sample injection tube 5 are respectively inserted into first interface, second interface, third interface and fifth interface, sample outlet tube 7, carrier gas tube 6, chromatographic column 19 and sample injection tube 5 are all movably sleeved with purge valve 3, helium ionization detector 20 is movably sleeved on the top end of chromatographic column 19, stable block 21 is fixedly connected on the top of detection disc 1, stable groove 22 is opened in stable block 21, chromatographic column 19 and helium ionization detector 20 are located in stable groove 22.

[0027] Specifically, when the detection disc 1 and the rotating disc 13 are assembled together, the two sealing rings 28 seal the movable groove 8 from the outside, further preventing gas leakage from causing environmental pollution, and at the same time, the detection blocks 9 act as a bridge for gas transfer and replacement. When the rotating disc 13 is rotated, the combination of the corresponding sample injection holes 2 and the corresponding communication holes 12 will change, thereby enabling rapid replacement of different gases. When gas is injected into the fifth interface through the sample injection tube 5, the gas enters the detection block 9 connected with the fifth interface and the sixth interface, and the sixth interface is connected with the quantitative tube 4, so that the gas can be transferred to the quantitative tube 4 for storage. Then, the rotating disc 13 is rotated to drive the three detection blocks 9 to slide in the movable groove 8, so that the combination of the six sample injection holes 2 and the six communication holes 12 changes, thereby enabling rapid replacement of ethylsilane gas and gas analysis and detection. When the rotating disc 13 is rotated, the communication hole 12 will lose the butt joint with the corresponding sample injection hole 2, and the sliding cylinder 23 will abut against the inner wall of the communication hole 12, thereby overcoming the elastic force of the spring 27 and retracting into the sample injection hole 2, so that the plunger 25 blocks the outlet of the gas guide nozzle 24, avoiding gas leakage and affecting the later gas detection, thereby greatly improving the accuracy of gas detection. When the sample injection hole 2 is connected with the communication hole 12, the sliding cylinder 23 slides into the communication hole 12 under the elastic force of the spring 27, so that the plunger 25 slides out of the outlet of the gas guide nozzle 24, realizing the connection between the sample injection hole 2 and the communication hole 12.

[0028] By arranging the helium ionization detector 20, in use, ethylsilane gas can be injected into the inside of the carrier gas tube 6, and the rotating block 18 is rotated to drive the rotating disc 13 to rotate, so that the gas in the quantitative tube 4 is replaced by ethylsilane gas. Then, the rotating block 18 is rotated to make the gas in the quantitative tube 4 pass through the chromatographic column 19, so as to separate propylsilane impurities. Then, the helium ionization detector 20 can realize the effect of detection and analysis. The top surface of the detection disc 1 is fixedly installed with a stabilizing block 21, and the stabilizing block 21 is provided with a stabilizing groove 22. The stabilizing groove 22 can realize the effect of stabilizing the helium ionization detector 20 and the chromatographic column 19, and increase safety.

[0029] Reference Figure 2 The detection disc 1 is provided with a fixed groove 14, the rotating shaft 17 is connected with the fixed groove 14 through a bearing 15, the outer ring of the bearing 15 is embedded in the fixed groove 14, and the inner ring of the bearing 15 is fixedly sleeved on the outer side of the rotating shaft 17.

[0030] In the utility model, reference Figures 1 to 6In use, the gas can be injected into the interior of the sample inlet tube 5, and the gas can flow into the interior of the dosing tube 4 through the sixth interface and be stored by the screening block 9, the disilane gas can be injected into the interior of the carrier gas tube 6, the rotating block 18 is rotated to drive the rotating disc 13 to rotate, the combination of the six sample inlets 2 and the six communication holes 12 is changed, the gas in the interior of the dosing tube 4 is replaced with the disilane gas, the rotating block 18 is rotated again, the gas in the interior of the dosing tube 4 passes through the chromatographic column 19, the trisilane impurities are separated, and the effect of detection and analysis can be achieved through the helium ionization detector 20.

[0031] The above only describes some exemplary embodiments of the present application by way of illustration, and it is needless to say that the described embodiments can be modified in various ways without departing from the spirit and scope of the present application for those skilled in the art. Therefore, the above drawings and descriptions are illustrative in nature and should not be understood as limiting the scope of protection of the present application.

Claims

1. A device for detecting trace propylsilane in disilane, comprising: Detection disc (1), characterized in that: the detection disc (1) is provided with six sample holes (2), the first interface, the second interface, the third interface, the fourth interface, the fifth interface and the sixth interface are sequentially arranged in the clockwise direction, the upper part of the sample hole (2) is provided with a purge valve (3), the middle part of the sample hole (2) is fixedly connected with a gas guide nozzle (24), the lower part of the gas guide nozzle (24) is connected with a sliding cylinder (23) which is slidably arranged in the sample hole (2) through a spring (27), and the sliding cylinder (23) is provided with a plunger (25) which is located at the outlet position of the gas guide nozzle (24) and slides with the sliding cylinder (23).

2. The apparatus for detecting trace propylsilane in disilane according to claim 1, wherein The top surface of the detection disc (1) is provided with a dosing tube (4) which is inserted into the fourth interface and the sixth interface respectively, and the end of the dosing tube (4) which is inserted into the fourth interface and the sixth interface is movably sleeved with the purge valve (3).

3. The apparatus for detecting trace propylsilane in ethylsilane according to claim 2, wherein The bottom of the detection disc (1) is provided with a movable groove (8), and the bottom surface of the detection disc (1) is fixedly connected with two sealing rings (28) which are arranged at the same center, and the two sealing rings (28) are located at the inner and outer sides of the movable groove (8) respectively.

4. The apparatus for detecting trace propylsilane in ethylsilane according to claim 3, wherein A rotating disc (13) is rotatably arranged on the bottom of the detection disc (1), the top of the rotating disc (13) is fixedly connected with three sorting blocks (9), the three sorting blocks (9) are slidably arranged in the movable groove (8), the sorting block (9) is provided with a connecting groove (10), the outlet position of the connecting groove (10) on the sorting block (9) is fixedly installed with a mounting block (11), the mounting block (11) is provided with two communication holes (12) which communicate with the connecting groove (10), and the communication holes (12) correspond to the positions of the sample holes (2).

5. A device for detecting trace propylsilane in disilane according to claim 4, wherein The rotating disc (13) is provided with a rotating hole (16), the inner circular wall of the rotating hole (16) is fixedly sleeved with a rotating shaft (17), the bottom of the rotating shaft (17) is fixedly connected with a rotating block (18), and the top end of the rotating shaft (17) is connected to the detection disc (1) through a bearing (15).

6. The apparatus for detecting trace propylsilane in disilane according to claim 1, wherein The first interface, the second interface, the third interface and the fifth interface are respectively inserted with a sample outlet tube (7), a carrier gas tube (6), a chromatographic column (19) and a sample inlet tube (5), and the sample outlet tube (7), the carrier gas tube (6), the chromatographic column (19) and the sample inlet tube (5) are movably sleeved with the purge valve (3).

7. A device for detecting trace propylsilane in ethylsilane according to claim 6, characterized in that The top end of the chromatographic column (19) is movably sleeved with a helium ionization detector (20), the top of the detection disc (1) is fixedly connected with a stabilizing block (21), the stabilizing block (21) is provided with a stabilizing groove (22), and the chromatographic column (19) and the helium ionization detector (20) are located in the stabilizing groove (22).

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