Wafer inspection apparatus for light emitting diode processing

Abstract

The utility model discloses a wafer detection device for light emitting diode processing, including digital microscope, digital microscope lower surface is provided with double -position subassembly, and the front side of support baseplate upper end surface is provided with support subassembly, through install first support tray and second support tray, the double -position detection of multiple circular wafers is convenient to two staffs, through install first support axle, second support axle and circular bottom disc, make first support tray and second support tray have rotatable ability, to the continuous rotation detection of multiple circular wafers can be carried out to staff, to make the efficiency of circular wafer being detected faster, through fixed connection side bracing plate and support cross bar, make support plate can drive first support tray and second support tray transversely left and right movement, to two staffs can under the condition of uninterrupted respectively to the circular wafer on first support tray and second support tray turn over or take place, to further improve the detection efficiency of circular wafer.

Description

Technical Field

[0001] This utility model relates to the field of light-emitting diode (LED) processing technology, specifically to a wafer inspection device for LED processing. Background Technology

[0002] Light-emitting diodes (LEDs) are a common type of light-emitting device that releases energy through the recombination of electrons and holes. They are widely used in the lighting field. During the processing and assembly of LEDs, digital microscopes are needed to inspect the appearance of the wafers to detect problems such as cracks and scratches on the finished wafers.

[0003] In the existing technology, digital microscopes used for wafer appearance defect inspection can only inspect the appearance of wafers one by one at a time, and cannot continuously inspect multiple wafers for appearance defects, which greatly limits the inspection efficiency of digital microscopes. Although some existing digital microscopes have the ability to rotate and inspect multiple wafers, they do not have the ability to operate in two positions. After multiple wafers in a group have been inspected, they need to be stopped and removed before the next group of multiple wafers can be placed for inspection. The inspection efficiency needs to be further improved. Utility Model Content

[0004] The purpose of this invention is to provide a wafer inspection device for light-emitting diode processing, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A wafer inspection device for light-emitting diode (LED) processing includes a support substrate, a digital microscope, a display screen, a support column, an adjustment sleeve, a fixing bolt, and an extension seat. The support column is fixedly connected to the rear side of the upper end face of the support substrate. An adjustment sleeve is fitted onto the upper side of the outer surface of the support column. A fixing bolt is threaded onto the middle position of the left end face of the adjustment sleeve. An extension seat is connected to the front end face of the adjustment sleeve. A digital microscope is mounted on the front end face of the extension seat. A display screen is mounted on the upper end of the digital microscope. Multiple circular wafers are placed below the digital microscope. A dual-station assembly is provided below the digital microscope to support the multiple circular wafers. A support component is provided on the front side of the upper end face of the support substrate to support the dual-station assembly.

[0007] Preferably, the support assembly includes side support plates, support crossbars, a left stop bar, a follower bar, a right stop bar, a support plate, and limiting through holes. Side support plates are symmetrically fixedly connected to the left and right sides of the upper end face of the support base plate. Support crossbars are symmetrically fixedly connected to the front and rear sides of the inner wall of the side support plates. A support plate is installed above the support base plate. Limiting through holes are symmetrically opened on the front and rear sides of the inside of the support plate, and the limiting through holes match the support crossbars. A follower bar is connected to the middle position of the lower end face of the support plate. A left stop bar is fixedly connected to the left side of the upper end face of the support base plate, and a right stop bar is fixedly connected to the right side of the upper end face of the support base plate.

[0008] Preferably, the dual-station assembly includes a first support shaft, a first support tray, a limiting groove, a second support, a second support shaft, and a circular base. The first support shaft is installed on the right side of the upper surface of the support plate, and the first support tray is connected to the upper end of the first support shaft. The second support shaft is installed on the left side of the upper surface of the support plate, and the second support tray is connected to the upper end of the second support shaft. The second support tray has the same specifications as the first support tray. Multiple limiting grooves are opened on the upper surface of both the first and second support trays, and the limiting grooves match the circular wafer. The circular base is connected to the bottom of both the first and second support shafts, and the circular base is located inside the support plate.

[0009] Preferably, a rotating handle is provided at the middle position of the upper end face of both the first and second support trays, and limit covers are symmetrically installed on the left and right sides of the upper end face of the support plate, and the vertical depth of the limit groove is less than the vertical thickness of the circular wafer.

[0010] Preferably, magnetic rubber strips are adhered to both the left and right ends of the follower strip, a left magnet strip is adhered to the right end of the left stop strip, and a right magnet strip is adhered to the left end of the right stop strip.

[0011] Preferably, the left end face of the support column is provided with a height scale line, the adjustment sleeve is a structure that can move up and down, and the support base plate is provided with symmetrical mounting through holes on the left and right sides inside.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. In the process of processing light-emitting diodes, by installing a first support tray and a second support tray, it is convenient for two workers to perform dual-station inspection of multiple circular wafers. By installing a first support shaft, a second support shaft, and a circular base, the first and second support trays are made rotatable, so that workers can use the rotatable first and second support trays to continuously rotate and inspect multiple circular wafers, thereby making the digital microscope more efficient in the process of inspecting the appearance defects of circular wafers.

[0014] 2. By fixing the side support plate and the support crossbar, the support plate can drive the first and second support trays to move laterally left and right, so that two workers can flip or pick up the round wafers on the first and second support trays without interruption, thereby further improving the efficiency of the round wafers being inspected.

[0015] 3. By fixing the left and right stop bars, the follower bars can block and restrict the left and right movement of the support plate, preventing excessive movement of the support plate during lateral movement. In addition, the left and right magnetic bars can also be attracted to the magnetic rubber clips in contact, thereby assisting in fixing the follower bars when they move to the left or right, preventing the support plate from easily becoming loose when it moves to the left or right. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the main structure of this utility model;

[0017] Figure 2 This is a structural diagram of the support component and the dual-station component in this utility model;

[0018] Figure 3 This is a structural diagram of the dual-station component after it has been moved to the left in this utility model.

[0019] Figure 4 This is a partial structural diagram of the support component and the dual-station component in this utility model;

[0020] Figure 5 for Figure 2 Enlarged view of A in the middle;

[0021] Figure 6 for Figure 3 Enlarged view of B in the middle;

[0022] Figure 7 This is a structural diagram of the first support shaft, the first bearing tray, and the circular chassis in this utility model.

[0023] In the diagram: 1. Support base plate; 2. Support assembly; 21. Side support plate; 22. Support crossbar; 23. Left stop bar; 24. Follower bar; 25. Right stop bar; 26. Support plate; 27. Limiting through hole; 28. Magnetic rubber clip; 29. ​​Right magnet bar; 211. Left magnet bar; 3. Dual-station assembly; 31. Limiting cover; 32. First support shaft; 33. First support tray; 34. Limiting groove; 35. Rotating handle; 36. Second support tray; 37. Second support shaft; 38. Circular chassis; 4. Circular wafer; 5. Digital microscope; 6. Display screen; 7. Support column; 8. Adjusting sleeve; 9. Fixing bolt; 10. Extension seat. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figures 1-7 This utility model provides a technical solution:

[0026] Example 1:

[0027] A wafer inspection device for light-emitting diode processing includes a support substrate 1, a digital microscope 5, a display screen 6, a support column 7, an adjustment sleeve 8, a fixing bolt 9, and an extension seat 10. The support column 7 is fixedly connected to the rear side of the upper end face of the support substrate 1. The support column 7 is connected to the support substrate 1 by welding. The support column 7 can limit and support the adjustment sleeve 8. The adjustment sleeve 8 is fitted on the upper side of the outer surface of the support column 7. The adjustment sleeve 8 is a vertically movable structure. The vertically movable adjustment sleeve 8 facilitates the adjustment of the height of the digital microscope 5 by the operator. The fixing bolt 9 is threadedly installed at the middle position of the left end face of the adjustment sleeve 8. An internal threaded through hole (not shown in the figure) is opened at the middle position of the left end face of the adjustment sleeve 8, and the internal threaded through hole is threadedly connected to the fixing bolt 9. The fixing bolt 9, which is threaded in the internal threaded through hole, can fix the adjustment sleeve 8 to the outer surface of the support column 7.

[0028] The left end face of the support column 7 is provided with a height scale line, which makes it convenient for staff to observe the height of the adjustment sleeve 8, so as to make more accurate adjustments to the height of the adjustment sleeve 8. The front end face of the adjustment sleeve 8 is connected to the extension seat 10. The extension seat 10 and the adjustment sleeve 8 are integrated structures. The digital microscope 5 is fixed to the front end face of the extension seat 10 by screws. The extension seat 10 can support the digital microscope 5. The digital microscope 5 is installed on the front end face of the extension seat 10. The display screen 6 is installed on the top of the digital microscope 5. The display screen 6 is connected to the digital microscope 5 by signal. When the digital microscope 5 and the display screen 6 are working, they can magnify the circular crystal 4 located directly below. The magnified image is displayed on the display screen 6 for staff to observe, so that staff can check whether there are cracks and scratches on the upper surface of the circular crystal 4, thereby inspecting the appearance of the circular crystal 4. Since the internal detailed structure and working principle of the digital microscope 5 and the display screen 6 are relatively mature technologies in the existing technology, they will not be described in detail here.

[0029] The support substrate 1 has symmetrical mounting through holes on the left and right sides (shown in the figure). The mounting through holes allow the staff to use external fixing screws to install and fix the support substrate 1 to the designated position on the external inspection table. Multiple circular wafers 4 are placed below the digital microscope 5. A dual-station assembly 3 is set below the digital microscope 5. The dual-station assembly 3 can not only support the multiple circular wafers 4, but also facilitate two staff members to perform dual-station operation on the multiple circular wafers 4. A support assembly 2 is set on the front of the upper end of the support substrate 1. The support assembly 2 can not only support the dual-station assembly 3, but also enable the dual-station assembly 3 to move laterally.

[0030] The dual-station assembly 3 includes a first support shaft 32, a first support tray 33, a limiting groove 34, a second support, a second support shaft 37, and a circular base 38. The first support shaft 32 is installed on the right side of the upper surface of the support plate 26. The first support shaft 32 is connected to the first support tray 33 and the circular base 38 by welding. The first support shaft 32 can support the first support tray 33. The upper end of the first support shaft 32 is connected to the first support tray 33. The first support tray 33 can support multiple circular wafers 4. The second support shaft 37 is installed on the left side of the upper surface of the support plate 26. The second support shaft 37 is connected to the second support tray 36 and another set of circular bases 38 by welding. The second support shaft 37 can support the second support tray 36. The upper end of the second support shaft 37 is connected to the second support tray 36. The second support tray 36 has the same specifications as the first support tray 33. The second support tray 36, which has the same specifications as the first support tray 33, can support another set of multiple circular wafers 4.

[0031] Multiple limiting grooves 34 are provided on the upper surfaces of the first support tray 33 and the second support tray 36, and the limiting grooves 34 match the circular wafers 4. The multiple limiting grooves 34 can limit the circular wafers 4, preventing them from shifting or slipping during the rotation detection process. The vertical depth of the limiting grooves 34 is less than the vertical thickness of the circular wafers 4, so that the staff can pick up and put down the circular wafers 4. The bottom of the first support shaft 32 and the second support shaft 37 are connected to circular bases 38, and the circular bases 38 are located inside the support plate 26. There are two sets of circular bases 38, and the two sets of circular bases 38 are the same size. The two sets of circular bases 38 inside the support plate 26 enable the first support shaft 32 and the second support shaft 37 to rotate. Limiting covers 31 are symmetrically installed on the left and right sides of the upper surface of the support plate 26. The limiting covers 31 can block and limit the circular bases 38, preventing them from shaking or shifting during rotation.

[0032] A rotating handle 35 is provided at the middle of the upper surface of both the first tray 33 and the second tray 36. There are two sets of rotating handles 35, and the two sets of rotating handles 35 are of the same specification. The two sets of rotating handles 35 are connected to the first tray 33 and the second tray 36 by welding. The two sets of rotating handles 35 make it convenient for workers to rotate the first tray 33 and the second tray 36 by hand. The annular side of the rotating handle 35 is covered with an anti-slip silicone sleeve (shown in the figure), which makes the annular side of the rotating handle 35 more slip-resistant.

[0033] Example 2:

[0034] Based on Embodiment 1, in this embodiment, by fixing the side support plate 21 and the support crossbar 22, the support plate 26 can drive the first support tray 33 and the second support tray 36 to move laterally left and right, so that two workers can flip or pick up the circular wafers 4 on the first support tray 33 and the second support tray 36 without interruption, thereby further improving the detection efficiency of the circular wafers 4.

[0035] The support assembly 2 includes a side support plate 21, a support crossbar 22, a left stop bar 23, a follower bar 24, a right stop bar 25, a support plate 26, and a limiting through hole 27. The side support plates 21 are symmetrically fixedly connected to the left and right sides of the upper end face of the support base plate 1. The side support plates 21 are connected to the support base plate 1 and the support crossbar 22 by welding. The side support plates 21 can support and fix the support crossbar 22. The support crossbar 22 is symmetrically fixedly connected to the front and rear sides of the inner wall of the side support plates 21. The supporting plate 26 has symmetrically opened limiting through holes 27 on the front and rear sides inside, and the limiting through holes 27 match the support crossbar 22. The support crossbar 22 can limit and support the support plate 26 through the limiting through holes 27 to prevent the support plate 26 from shaking or shifting during use. The support plate 26 is installed on the top of the support base plate 1, and the support plate 26 can support the dual-station assembly 3.

[0036] A follower strip 24 is connected to the middle of the lower end face of the support plate 26. The follower strip 24 is connected to the support plate 26 by welding. The follower strip 24 facilitates the left stop strip 23 and the right stop strip 25 to block and restrict the lateral movement of the support plate 26. A left stop strip 23 is fixedly connected to the left side of the upper end face of the support base plate 1. The left stop strip 23 is connected to the support base plate 1 by welding. The left stop strip 23 can block and restrict the leftward movement of the follower strip 24. A right stop strip 25 is fixedly connected to the right side of the upper end face of the support base plate 1. The right stop strip 25 is connected to the support base plate 1 by welding. The right stop strip 25 can block and restrict the rightward movement of the follower strip 24, thereby preventing the support plate 26 from moving excessively during left and right movements.

[0037] Magnetic rubber strips 28 are attached to both the left and right ends of the follower strip 24. A left magnet strip 211 is attached to the right end of the left stop strip 23, and a right magnet strip 29 is attached to the left end of the right stop strip 25. The magnetic rubber strips 28 facilitate the adsorption of the left magnet strip 211 or the right magnet strip 29, preventing the support plate 26 from easily becoming loose after being moved to the left or right. The inner walls of the left magnet strip 211 and the right magnet strip 29 are provided with semi-circular slots (shown in the figure), and the semi-circular slots match the magnetic rubber strips 28. The semi-circular slots facilitate the magnetic rubber strips 28 to be locked inside the left magnet strip 211 or the right magnet strip 29, thereby further improving the adsorption stability between the magnetic rubber strips 28 and the left magnet strip 211 or the right magnet strip 29.

[0038] Working Principle: During the processing of light-emitting diodes (LEDs), this device is used to inspect the appearance defects of the circular wafers 4 used for LEDs. The operator first places multiple circular wafers 4 to be inspected into multiple limiting slots 34 on the first support tray 33 and the second support tray 36. After placement, the support plate 26 is moved to the left. During this process, the left stop bar 23 and the left magnetic bar 211 block and restrict the leftward movement of the follower bar 24. The left magnetic bar 211 also attracts the magnetic rubber clip 28 inside, preventing easy separation between the left magnetic bar 211 and the magnetic rubber clip 28. This positions the support plate 26 in place. The support crossbar 22 limits and supports the laterally moving support plate 26 through the limiting through hole 27, preventing wobbling or displacement during lateral movement. Then, the operator can use the digital microscope 5 and the display screen 6 to inspect the appearance defects of the circular wafers 4 below (see reference). Figure 3 During this process, the operator only needs to hold the rotating handle 35 on the first tray 33 to rotate the first tray 33, so that the multiple circular wafers 4 on the first tray 33 can be rotated sequentially to be directly under the digital microscope 5 for appearance defect inspection; after all the multiple circular wafers 4 on the first tray 33 have been inspected, the support plate 26 is moved to the right. During this process, the right stop bar 25 and the right magnetic bar 29 will block and restrict the follower bar 24 that moves to the right a certain distance, and the right magnetic bar 29 will attract the magnetic rubber clip 28 stuck inside, preventing the right magnetic bar 29 and the magnetic rubber clip 28 from easily separating, thereby positioning the support plate 26 that has moved to the right (see reference). Figure 1Then, the operator repeats the above operation to sequentially inspect the appearance defects of multiple circular wafers 4 on the second tray 36. At the same time, another operator can flip the multiple circular wafers 4 on the first tray 33 to inspect the appearance defects on the other side of the multiple circular wafers 4 on the first tray 33 later. During the appearance inspection of the other side of the multiple circular wafers 4 on the first tray 33, another operator can flip the multiple circular wafers 4 on the second tray 36. During the appearance inspection of the other side of the multiple circular wafers 4 on the second tray 36, another operator can remove the multiple circular wafers 4 on the first tray 33 and replace the circular wafers 4 to be inspected. By repeating this process, the device can have a dual-station operation capability, making the inspection of multiple circular wafers 4 more efficient.

[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wafer inspection device for light-emitting diode processing, comprising a support substrate (1), a digital microscope (5), a display screen (6), a support column (7), an adjustment sleeve (8), a fixing bolt (9), and an extension seat (10), characterized in that: A support column (7) is fixedly connected to the rear side of the upper end face of the support substrate (1). An adjustment sleeve (8) is fitted on the upper side of the outer surface of the support column (7). A fixing bolt (9) is threaded on the middle position of the left end face of the adjustment sleeve (8). An extension seat (10) is connected to the front end face of the adjustment sleeve (8). A digital microscope (5) is installed on the front end face of the extension seat (10). A display screen (6) is installed on the upper end of the digital microscope (5). Multiple circular wafers (4) are placed below the digital microscope (5). The digital microscope (5) is provided with a dual-station assembly (3) below it, and the dual-station assembly (3) is used to support multiple circular wafers (4). The support substrate (1) is provided with a support assembly (2) on the front side of its upper end, and the support assembly (2) is used to support the dual-station assembly (3).

2. The wafer inspection device for light-emitting diode processing according to claim 1, characterized in that: The support assembly (2) includes a side support plate (21), a support crossbar (22), a left stop bar (23), a follower bar (24), a right stop bar (25), a support plate (26), and a limiting through hole (27). The side support plate (21) is symmetrically fixedly connected to the left and right sides of the upper end face of the support base plate (1). The support crossbar (22) is symmetrically fixedly connected to the front and rear sides of the inner wall of the side support plate (21). The support plate (26) is installed above the support base plate (1). The limiting through holes (27) are symmetrically opened on the front and rear sides inside the support plate (26), and the limiting through holes (27) match the support crossbar (22). The follower bar (24) is connected to the middle position of the lower end face of the support plate (26). The left stop bar (23) is fixedly connected to the left side of the upper end face of the support base plate (1), and the right stop bar (25) is fixedly connected to the right side of the upper end face of the support base plate (1).

3. The wafer inspection device for light-emitting diode processing according to claim 2, characterized in that: The dual-station assembly (3) includes a first support shaft (32), a first support tray (33), a limiting groove (34), a second support, a second support shaft (37), and a circular chassis (38). The first support shaft (32) is installed on the right side of the upper end face of the support plate (26), and the first support tray (33) is connected to the upper end of the first support shaft (32). The second support shaft (37) is installed on the left side of the upper end face of the support plate (26), and the second support tray (36) is connected to the upper end of the second support shaft (37). The second support tray (36) has the same specifications as the first support tray (33). Multiple limiting grooves (34) are opened on the upper end faces of the first support tray (33) and the limiting grooves (34) are matched with the circular wafer (4). The circular chassis (38) is connected to the bottom of the first support shaft (32) and the second support shaft (37), and the circular chassis (38) is located inside the support plate (26).

4. The wafer inspection device for light-emitting diode processing according to claim 3, characterized in that: A rotating handle (35) is provided at the middle position of the upper end face of the first support plate (33) and the second support plate (36). Limiting covers (31) are symmetrically installed on the left and right sides of the upper end face of the support plate (26). The vertical depth of the limiting groove (34) is less than the vertical thickness of the circular wafer (4).

5. The wafer inspection device for light-emitting diode processing according to claim 2, characterized in that: The left and right ends of the follower strip (24) are both bonded with magnetic rubber strips (28), the right end of the left stop strip (23) is bonded with a left magnet strip (211), and the left end of the right stop strip (25) is bonded with a right magnet strip (29).

6. The wafer inspection device for light-emitting diode processing according to claim 2, characterized in that: The support column (7) has a height scale line on its left end face, the adjustment sleeve (8) is a structure that can move up and down, and the support base plate (1) has symmetrical mounting through holes on the left and right sides inside.

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