Sample stage and vacuum processing system
By employing a planar bearing and claw mounting base for elastic fixation in the vacuum processing system, the problem of unstable temperature transfer in the sample stage during low-temperature processing is solved, achieving uniform growth of sample materials and smooth rotation, suitable for both small and large-sized samples.
Patent Information
- Application Number
- CN202521940134.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-10
- Publication Date
- 2026-08-25
- Estimated Expiration
- 2035-09-10
AI Technical Summary
In existing vacuum processing systems, the sample stage has difficulty in effectively and stably transferring temperature to the sample, especially in low-temperature processing scenarios, which leads to uneven growth of sample materials.
A plane bearing is used to connect the sample mounting base and the cold shield assembly. Combined with the axial elastic fixing method of the claw mounting base and the rotating shaft, heat conduction is ensured without affecting the rotation of the sample. The claw mounting base and the cold shield assembly are in close contact through elastic guide rods and transmission pins. A thermocouple assembly is used to measure the temperature, and a sample stage is set in the vacuum chamber.
It achieves uniform growth of sample materials under low-temperature conditions, is suitable for both small and large-sized samples, has a simple and reliable structure, and ensures smooth rotational motion and stable heat conduction.
Smart Images
Figure CN224678215U_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the field of vacuum equipment technology, and in particular to a sample stage and a vacuum processing system. Background Technology
[0002] In vacuum processing systems, such as molecular beam epitaxy (MBE) systems, where cryogenic processing is required, the sample stage needs to ensure that the temperature can be stably and effectively transferred to the sample. Utility Model Content
[0003] This disclosure provides a sample stage, including:
[0004] Sample mounting base;
[0005] A rotating shaft is connected to the proximal end of the sample mounting base and is used to drive the sample mounting base to rotate.
[0006] The cold screen component is fitted outside the rotating shaft and is used as a cold source.
[0007] A planar bearing, sleeved on the outside of the rotating shaft, is used to rotatably connect the sample mount to the cold shield assembly and to conduct heat between the sample mount and the cold shield assembly; and
[0008] The rotary driver is fixedly connected to the cold shield assembly. The output end of the rotary driver is connected to the rotary shaft to drive the rotary shaft to rotate, thereby causing the sample mounting base to rotate.
[0009] In some embodiments of this disclosure, the fixed race of the planar bearing is fixedly connected to the distal end of the cold shield assembly, and the rotating race of the planar bearing is fixedly connected to the proximal end of the sample mounting base. The fixed race and the rotating race of the planar bearing are thermally coupled to conduct heat between the sample mounting base and the cold shield assembly.
[0010] In some embodiments of this disclosure, the sample mounting base includes:
[0011] The claw mounting base is axially elastically and circumferentially rigidly connected to the rotating shaft; and
[0012] The claws are fixedly connected to the distal end of the claw mounting base and are used to support the sample.
[0013] In some embodiments of this disclosure, the rotating shaft includes a flange circumferentially disposed at the distal end of the rotating shaft, and the flange includes at least one rotating shaft guide hole and at least one rotating shaft drive hole.
[0014] The sample mounting base also includes:
[0015] A pressure plate, axially surrounding the distal end of the rotating shaft and located near the proximal end of the flange, includes at least one pressure plate guide hole and at least one pressure plate drive hole.
[0016] At least one elastic guide rod, the distal end of which is fixedly connected to the claw mounting base, and the proximal end which passes through at least one rotating shaft guide hole and at least one pressure plate guide hole and is connected to the pressure plate, the elastic guide rod being used to achieve axial elastic connection between the claw mounting base and the rotating shaft; and
[0017] At least one drive pin is fixedly connected at its distal end to a claw mounting base and passes through at least one rotating shaft drive hole and at least one pressure plate drive hole, respectively, to achieve a circumferential rigid connection between the claw mounting base and the rotating shaft.
[0018] In some embodiments of this disclosure, the resilient guide rod includes:
[0019] The guide rod body is fixedly connected to the claw mounting base at its far end, and passes through the guide hole of the rotating shaft and the guide hole of the pressure plate;
[0020] An elastic element, sleeved on the guide rod body, has its distal end connected to a flange and its proximal end connected to a pressure plate; and
[0021] The proximal end of the guide rod body is threadedly connected to the guide hole of the pressure plate, or the elastic guide rod also includes a limiting element, which is set on the proximal end of the guide rod and located at the proximal end of the pressure plate. The elastic element is used to make the claw mounting seat abut against the cold screen assembly upward.
[0022] In some embodiments of this disclosure, the sample stage further includes a thermocouple feedthrough assembly, comprising:
[0023] Thermocouple flange, sealed connection with rotary actuator; and
[0024] A thermocouple passes through an axial through-hole in the rotary actuator and the rotary shaft, and makes direct or indirect contact with the sample mount to measure the temperature of the sample mount.
[0025] In some embodiments of this disclosure, the sample stage further includes:
[0026] A centering bearing is located at the far end of the axial through hole of the rotating shaft. The thermocouple passes through the centering bearing, which is used to fix the thermocouple and to conduct heat between the rotating shaft and the thermocouple.
[0027] In some embodiments of this disclosure, the cold screen assembly includes a cold screen and a cold screen flange, the cold screen flange being located near the cold screen and fixedly connected to the cold screen.
[0028] In some embodiments of this disclosure, the distal end of the rotary drive is fixedly connected to a cold shield flange; and / or
[0029] The cold shield includes a cooling medium circulation chamber for the flow of the cooling medium; and / or
[0030] The sample mounting base also includes a baffle, which is fixed to the far end of the claw mounting base to block the beam.
[0031] This disclosure provides a vacuum processing system, including:
[0032] Vacuum cavity; and
[0033] According to any embodiment of the present disclosure, the sample stage is at least partially disposed within a vacuum chamber.
[0034] The sample stage and vacuum processing system according to some embodiments of this disclosure can bring beneficial technical effects. For example, the sample stage and vacuum processing system according to some embodiments of this disclosure use a planar bearing to connect the sample mounting base and the cold shield assembly, which ensures contact heat conduction without affecting the rotation of the sample, thereby improving the uniformity of sample material growth. As another example, the sample stage and vacuum processing system according to some embodiments of this disclosure uses an axially elastic fixing method between the claw mounting base and the rotation shaft, so that the claw mounting base supports the planar bearing and is always elastically pressed against the lower surface of the cold shield assembly, maintaining good contact between the claw mounting base and the cold shield assembly. Furthermore, the sample stage and vacuum processing system according to some embodiments of this disclosure have a simple and reliable structure, and can be applied not only to the low-temperature requirements of small-sized samples (e.g., substrates) but also to large-sized samples requiring low-temperature growth. Attached Figure Description
[0035] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0036] Figure 1 A schematic diagram of the structure of a sample stage according to some embodiments of the present disclosure is shown;
[0037] Figure 2 A schematic cross-sectional view of a sample stage according to some embodiments of the present disclosure is shown;
[0038] Figure 3 An exploded perspective view of a sample stage at a first angle according to some embodiments of the present disclosure is shown.
[0039] Figure 4 An exploded perspective view of a sample stage from a second angle according to some embodiments of the present disclosure is shown.
[0040] Figure 5 An exploded side view of a sample stage according to some embodiments of the present disclosure is shown;
[0041] Figure 6 A partial cross-sectional schematic diagram of a sample stage according to some embodiments of the present disclosure is shown;
[0042] Figure 7 A schematic diagram of the structure of a vacuum processing system according to some embodiments of the present disclosure is shown.
[0043] In the above figures, the reference numerals represent:
[0044] 1000-Vacuum Processing System
[0045] 100-Sample Stage
[0046] 110-Sample Mounting Base
[0047] 111-Claw Mounting Base
[0048] 112-Claw
[0049] 113-Pressure Plate
[0050] 1131-Pressure plate guide hole
[0051] 1132 - Pressure plate drive hole;
[0052] 114-Elastic Guide Rod
[0053] 1141-Guide rod body
[0054] 1142-Elastic Component
[0055] 1143-Nut
[0056] 115-Transmission Pin
[0057] 116-Baffle
[0058] 120-rotating shaft
[0059] 121-Flange
[0060] 1211-Rotary shaft guide hole
[0061] 1212-Rotary shaft drive hole
[0062] 130-Cold Screen Components
[0063] 131-Cold Screen
[0064] 1311-Cooling Carrier Circulation Chamber
[0065] 132-Cold Screen Flange
[0066] 131a, 131b - Cooling carrier pipes
[0067] 140-Survey Bearing
[0068] 150-rotary drive
[0069] 160-Thermocouple Feedthrough Assembly
[0070] 161-Thermocouple Flange
[0071] 162-Thermocouple
[0072] 170-centering bearing
[0073] 200-Vacuum Chamber Detailed Implementation
[0074] Some embodiments of this disclosure will now be described with reference to the accompanying drawings. Obviously, the described embodiments are merely exemplary embodiments of this disclosure, and not all embodiments.
[0075] In the description of this disclosure, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "top," "bottom," "horizontal," and "longitudinal," etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this disclosure, it should be noted that unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "coupling" should be interpreted broadly, for example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two elements. In the description of this disclosure, "distal" or "farside" refers to one end or side that extends into a vacuum environment (e.g., a vacuum chamber), while "proximal" or "proximal" is the end or side opposite to "distal" or "farside" (e.g., one end or side away from the vacuum chamber, or one end or side within the vacuum chamber that is closer to the vacuum chamber wall, etc.). Alternatively, the end or side closer to the drive device is called the proximal or proximal end, and the end or side farther from the drive device is called the distal or distal end. Those skilled in the art will understand the specific meaning of the above terms in this disclosure according to the specific circumstances.
[0076] Figure 1 A schematic diagram of the structure of a sample stage 100 according to some embodiments of the present disclosure is shown. Figure 2 A schematic cross-sectional view of a sample stage 100 according to some embodiments of the present disclosure is shown. Figure 3 An exploded perspective view of a sample stage 100 at a first angle according to some embodiments of the present disclosure is shown. Figure 4This diagram shows a two-dimensional exploded view of a sample stage 100 according to some embodiments of the present disclosure. Figure 5 An exploded side view of a sample stage 100 according to some embodiments of the present disclosure is shown.
[0077] like Figures 1-5 As shown, in some embodiments of this disclosure, the sample stage 100 may include a sample mounting base 110, a rotating shaft 120, a cooling shield assembly 130, a planar bearing 140, and a rotary driver 150. The rotating shaft 120 is connected to the proximal end of the sample mounting base 110 and is used to drive the sample mounting base 110 to rotate. The cooling shield assembly 130 is sleeved outside the rotating shaft 120 and serves as a cold source. The planar bearing 140 is sleeved outside the rotating shaft 120. The planar bearing 140 is used to rotatably connect the sample mounting base 110 and the cooling shield assembly 130, and to conduct heat between the sample mounting base 110 and the cooling shield assembly 130. The rotary driver 150 is fixedly connected to the cooling shield assembly 130, and the output end of the rotary driver 150 is connected to the rotating shaft 120 to drive the rotating shaft 120 to rotate, thereby driving the sample mounting base 110 to rotate.
[0078] In some embodiments of this disclosure, the cold screen assembly 130 can be circulated with liquid nitrogen as a cold source. However, this is merely exemplary, and the cold screen assembly 130 can also be circulated with liquid oxygen, liquid argon, etc. The cold screen assembly 130 may also include or be connected to a refrigeration device such as a compressor as a cold source.
[0079] In some embodiments of this disclosure, the sample mount 110 may include a material with good thermal conductivity (e.g., silicon carbide) to effectively and rapidly transfer the temperature of the sample (e.g., substrate) to the cold screen assembly 130, thereby maintaining the sample at a low temperature.
[0080] In some embodiments of this disclosure, the planar bearing 140 may include a material with good thermal conductivity (e.g., silicon carbide) to achieve good thermal conductivity while eliminating the need for lubrication and ensuring smooth and reliable rotational motion.
[0081] According to some embodiments of the present disclosure, the sample stage 100 is connected to the sample mounting base 110 and the cold shield assembly 130 by a plane bearing 140, which realizes that the rotation of the sample (e.g., substrate) is not affected while ensuring contact heat conduction, thereby improving the uniformity of sample material growth.
[0082] Existing low-temperature sample stages 100 are basically only suitable for the growth needs of small-sized substrates, and can generally only meet the needs of scientific research. The sample stage 100 according to some embodiments of this disclosure has a simple and reliable structure, and can be applied not only to the low-temperature requirements of small-sized samples, but also to large-sized samples with low-temperature growth requirements.
[0083] like Figure 2 As shown, in some embodiments of this disclosure, the fixed race of the planar bearing 140 is fixedly connected to the distal end of the cold shield assembly 130, and the rotating race of the planar bearing 140 is fixedly connected to the proximal end of the sample mounting base 110. Thermal coupling exists between the fixed race and the rotating race of the planar bearing 140 for conducting heat between the sample mounting base 110 and the cold shield assembly 130.
[0084] In some embodiments of this disclosure, the planar bearing 140 comprises silicon carbide material, which achieves good thermal conductivity while ensuring smooth and reliable rotational motion.
[0085] In some embodiments of this disclosure, the thermal coupling between the fixed race and the rotating race of the planar bearing 140 includes contact heat transfer and thermal radiation heat transfer.
[0086] like Figure 3 , Figure 4 and Figure 5 As shown, in some embodiments of this disclosure, the sample mounting base 110 may include a claw mounting base 111 and a claw 112. The claw mounting base 111 is axially elastic and circumferentially rigidly connected to the rotation shaft 120. The claw 112 is fixedly connected to the distal end of the claw mounting base 111 for supporting the sample.
[0087] like Figure 2 As shown, in some embodiments of this disclosure, the rotating race of the plane bearing 140 is fixedly connected to the proximal end of the claw mounting seat 111, and the sample heat can be transferred to the cold shield assembly 130 through the claw 112, the claw mounting seat 111 and the plane bearing 140 to achieve sample cooling.
[0088] In some embodiments of this disclosure, the cold screen assembly 130 is fixed, while the claw mounting base 111, carrying the claw 112 and the sample, rotates with the rotation drive. The plane bearing 140 serves to conduct heat without affecting the rotation. Simultaneously, due to thermal contraction, the contact between the claw mounting base 111 and the cold screen assembly 130 may disengage. Therefore, the claw mounting base 111 is axially elastically fixed to the rotation shaft 120, ensuring that the claw mounting base 111 supports the plane bearing 140 and remains elastically pressed against the lower surface of the cold screen assembly 130, maintaining good contact between the claw mounting base 111 and the cold screen assembly 130.
[0089] like Figure 3 , Figure 4 and Figure 5 As shown, in some embodiments of this disclosure, the rotating shaft 120 may include a flange 121, which is circumferentially disposed at the distal end of the rotating shaft 120. The flange 121 may include at least one rotating shaft guide hole 1211 and at least one rotating shaft drive hole 1212.
[0090] like Figure 3 and Figure 4 As shown, in some embodiments of this disclosure, the flange 121 includes three rotation shaft guide holes 1211 and three rotation shaft drive holes 1212. Those skilled in the art will understand that this is merely exemplary, and the flange 121 may also include other numbers of rotation shaft guide holes 1211 and rotation shaft drive holes 1212, such as four rotation shaft guide holes 1211, five rotation shaft drive holes 1212, etc.
[0091] In some embodiments of this disclosure, at least one rotary shaft guide hole 1211 may include a plurality of rotary shaft guide holes 1211 spaced apart. Similarly, at least one rotary shaft drive hole 1212 may include a plurality of rotary shaft drive holes 1212 spaced apart.
[0092] like Figure 3 As shown, in some embodiments of this disclosure, the sample mounting base 110 may further include a pressure plate 113, at least one elastic guide rod 114, and at least one drive pin 115. The pressure plate 113 is axially surrounding the distal end of the rotating shaft 120 and located near the proximal end of the flange 121. The pressure plate 113 may include at least one pressure plate guide hole 1131 and at least one pressure plate drive hole 1132. The distal ends of at least one elastic guide rod 114 are respectively fixedly connected to the claw mounting base 111 and pass through at least one rotating shaft guide hole 1211 and at least one pressure plate guide hole 1131, and are connected to the pressure plate 113. The elastic guide rod 114 is used to apply an axial upward elastic force to the pressure plate 113 and transmit it to the claw mounting base 111 to achieve an axial elastic connection between the claw mounting base 111 and the rotating shaft 120. At least one drive pin 115 is fixedly connected to the claw mounting base 111 and passes through at least one rotating shaft drive hole 1212 and at least one pressure plate drive hole 1132 respectively, so as to achieve a circumferential rigid connection between the claw mounting base 111 and the rotating shaft 120.
[0093] like Figure 3 and Figure 4 As shown, in some embodiments of this disclosure, the pressure plate 113 includes three pressure plate guide holes 1131 and three pressure plate transmission holes 1132. Those skilled in the art will understand that this is merely exemplary, and the pressure plate 113 may also include other numbers of pressure plate guide holes 1131 and pressure plate transmission holes 1132, such as four pressure plate guide holes 1131, five pressure plate transmission holes 1132, etc.
[0094] In some embodiments of this disclosure, at least one rotating shaft guide hole 1211 and at least one pressure plate guide hole 1131 are positioned correspondingly, such that after at least one elastic guide rod 114 passes through at least one rotating shaft guide hole 1211 and at least one pressure plate guide hole 1131 respectively, at least one elastic guide rod 114 is axially parallel to the rotating shaft 120.
[0095] In some embodiments of this disclosure, at least one pressure plate guide hole 1131 may include a plurality of pressure plate guide holes 1131 spaced apart. Similarly, at least one pressure plate drive hole 1132 may include a plurality of pressure plate drive holes 1132 spaced apart.
[0096] Figure 6 A partial cross-sectional schematic diagram of a sample stage 100 according to some embodiments of the present disclosure is shown.
[0097] like Figure 6 As shown, in some embodiments of this disclosure, the elastic guide rod 114 may include a guide rod body 1141 (e.g., a screw), an elastic element 1142, and a limiting element 1143. The distal end of the guide rod body 1141 is fixedly connected to the claw mounting base 111 and passes through the rotation shaft guide hole 1211 and the pressure plate guide hole 1131. The elastic element 1142 is sleeved on the guide rod body 1141, with its distal end connected to the flange 121 (e.g., abutting or fixedly connected), and its proximal end connected to the pressure plate 113 (e.g., abutting or fixedly connected). The limiting element 1143 (e.g., a nut) may be disposed on the proximal end of the guide rod body 1141 and located at the proximal end of the pressure plate 113. The distal end face of the limiting element 1143 may abut against the proximal end face of the pressure plate 113. The upward elastic force of the elastic element 1142 is transmitted to the claw mounting seat 111 through the pressure plate 113, the limiting element 1143, and the guide rod body 1141, thereby causing the claw mounting seat 111 to support the plane bearing 140 and abut against the cold shield assembly 130 upward. In some embodiments, the proximal end of the guide rod body 1141 may be fixedly connected to the pressure plate 113, for example, by threading it into the pressure plate guide hole 1131 of the pressure plate 113 or by a pair of limiting elements located at the proximal and distal ends of the pressure plate 113.
[0098] In some embodiments of this disclosure, the elastic element 1142 may include a spring or a tension spring, etc.
[0099] like Figure 6As shown, in some embodiments of this disclosure, the distal end of the elastic element 1142 (e.g., a spring) abuts against the flange 121 of the rotating shaft 120, and the proximal end abuts against the pressure plate 113, generating an upward elastic force. The pressure plate 113 is restricted to the guide rod body 1141 by the limiting member 1143. The elastic force of the elastic element 1142 is transmitted to the guide rod body 1141 through the limiting member 1143. The guide rod body 1141 is connected to the claw mounting seat 111, and finally transmits the elastic force to the claw mounting seat 111, so that the claw mounting seat 111 always presses against the cold screen assembly 130 upward.
[0100] Because the cold screen assembly 130 (e.g., cold screen 131) operates at a low temperature, the components may shift due to cold contraction, which may cause poor contact between the claw mounting base 111 and the cold screen assembly 130. The elastic force of the elastic guide rod 114 continuously pushes upward, which can dynamically compensate for the displacement caused by cold contraction, ensuring that the claw mounting base 111 and the cold screen assembly 130 maintain close contact and maintain a stable heat conduction path.
[0101] like Figures 1-5 As shown, in some embodiments of this disclosure, the sample stage 100 may further include a thermocouple feedthrough assembly 160. The thermocouple feedthrough assembly 160 may include a thermocouple flange 161 and a thermocouple 162. The thermocouple flange 161 is sealed to the rotary actuator 150. The thermocouple 162 passes through an axial through-hole in the rotary actuator 150 and the rotary shaft 120, and is thermally coupled to the sample mount 110, for example, in direct or indirect contact, to measure the temperature of the sample mount 110.
[0102] like Figure 3 As shown, in some embodiments of this disclosure, the sample stage 100 may further include a centering bearing 170. The centering bearing 170 is disposed at the distal end of the axial through hole of the rotating shaft 120, and the thermocouple 162 passes through the centering bearing 170. The centering bearing 170 is used to fix the thermocouple 162 and to conduct heat between the rotating shaft 120 and the thermocouple 162.
[0103] In some embodiments of this disclosure, a centering bearing is located inside the rotating shaft 120 for fixing the thermocouple 162 assembly and for conducting temperature. In some embodiments of this disclosure, the centering bearing comprises silicon carbide material to rapidly transfer heat to the thermocouple 162, ensuring a fast temperature response to provide feedback on the temperature of the sample on the sample mount 110.
[0104] In some embodiments of this disclosure, the two metal wires of the thermocouple 162 can pass through the axial through-hole of the rotating shaft 120 via a fixing tube (e.g., a fixing ceramic tube) and then be inserted into the centering bearing via a metal component. The centering bearing prevents the thermocouple 162 from being suspended by close contact with the rotating shaft 120, ensuring effective heat transfer to monitor the temperature of the sample on the sample mounting base 110.
[0105] like Figures 1-5 As shown, in some embodiments of this disclosure, the cold screen assembly 130 may include a cold screen 131 and a cold screen flange 132. The cold screen flange 132 is located near the cold screen 131 and is fixedly connected to the cold screen 131.
[0106] like Figures 1-5 As shown, in some embodiments of this disclosure, the distal end of the rotary drive is fixedly connected to the cold shield flange 132.
[0107] like Figure 2 As shown, in some embodiments of this disclosure, the cold screen 131 may include a cooling carrier circulation chamber 1311 for the flow of a cooling carrier (e.g., liquid nitrogen).
[0108] like Figure 1 As shown, in some embodiments of this disclosure, the cooling carrier can enter the cooling carrier circulation chamber 1311 through cooling carrier pipes 131a and 131b.
[0109] like Figure 3 , Figure 4 and Figure 5 As shown, in some embodiments of this disclosure, the sample mounting base 110 may further include a baffle 116 fixed to the distal end of the claw mounting base 111 for blocking the beam. The baffle 116 can prevent the beam from depositing on the bearing and causing rotational jamming.
[0110] Figure 7 A schematic diagram of the structure of a vacuum processing system 1000 according to some embodiments of the present disclosure is shown.
[0111] like Figure 7 As shown, in some embodiments of this disclosure, the vacuum processing system 1000 may include a vacuum chamber 200 and a sample stage 100 according to any embodiment of this disclosure. The sample stage 100 is at least partially disposed within the vacuum chamber 200.
[0112] It should be noted that the above are merely exemplary embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.
Claims
1. A sample stage, characterized in that, include: Sample mounting base; A rotating shaft is connected to the proximal end of the sample mounting base and is used to drive the sample mounting base to rotate; A cold screen assembly is sleeved outside the rotating shaft, and the cold screen assembly is used as a cold source; A planar bearing, sleeved outside the rotating shaft, is used to rotatably connect the sample mounting base to the cold shield assembly and to conduct heat between the sample mounting base and the cold shield assembly; and A rotary driver is fixedly connected to the cold screen assembly. The output end of the rotary driver is connected to the rotary shaft to drive the rotary shaft to rotate, thereby causing the sample mounting base to rotate.
2. The sample stage according to claim 1, characterized in that, The fixed race of the planar bearing is fixedly connected to the distal end of the cold screen assembly, and the rotating race of the planar bearing is fixedly connected to the proximal end of the sample mounting base. The fixed race and the rotating race of the planar bearing are thermally coupled to conduct heat between the sample mounting base and the cold screen assembly.
3. The sample stage according to claim 1, characterized in that, The sample mounting base includes: A claw mounting base is axially elastically and circumferentially rigidly connected to the rotating shaft; and The claw is fixedly connected to the distal end of the claw mounting base and is used to support the sample.
4. The sample stage according to claim 3, characterized in that, The rotating shaft includes a flange, which is circumferentially disposed at the distal end of the rotating shaft. The flange includes at least one rotating shaft guide hole and at least one rotating shaft drive hole. The sample mounting base also includes: A pressure plate, axially surrounding the distal end of the rotating shaft and located near the proximal end of the flange, includes at least one pressure plate guide hole and at least one pressure plate drive hole; At least one elastic guide rod, the distal end of which is fixedly connected to the claw mounting base, and the proximal end which passes through the at least one rotating shaft guide hole and the at least one pressure plate guide hole, and is connected to the pressure plate. The elastic guide rod is used to achieve an axial elastic connection between the claw mounting base and the rotating shaft; and At least one drive pin is fixedly connected at its distal end to the claw mounting base and passes through at least one rotating shaft drive hole and at least one pressure plate drive hole, respectively, to achieve a circumferential rigid connection between the claw mounting base and the rotating shaft.
5. The sample stage according to claim 4, characterized in that, The elastic guide rod includes: The guide rod body is fixedly connected at its distal end to the claw mounting base and passes through the rotating shaft guide hole and the pressure plate guide hole; An elastic element, sleeved on the guide rod body, wherein the distal end of the elastic element is connected to the flange, and the proximal end of the elastic element is connected to the pressure plate; and The proximal end of the guide rod body is threadedly connected to the guide hole of the pressure plate, or the elastic guide rod further includes a limiting member disposed on the proximal end of the guide rod and located at the proximal end of the pressure plate, the elastic member being used to cause the claw mounting seat to abut against the cold screen assembly upward.
6. The sample stage according to claim 1, characterized in that, It also includes thermocouple feedthrough components, including: Thermocouple flange, sealed connection to the rotary actuator; and A thermocouple passes through the axial through-holes of the rotary driver and the rotary shaft, and is in direct or indirect contact with the sample mount to measure the temperature of the sample mount.
7. The sample stage according to claim 6, characterized in that, Also includes: A centering bearing is disposed at the distal end of the axial through hole of the rotating shaft, the thermocouple passes through the centering bearing, the centering bearing is used to fix the thermocouple and to conduct heat between the rotating shaft and the thermocouple.
8. The sample stage according to claim 1, characterized in that, The cold screen assembly includes a cold screen and a cold screen flange, wherein the cold screen flange is located near the cold screen and is fixedly connected to the cold screen.
9. The sample stage according to claim 8, characterized in that, The distal end of the rotary drive is fixedly connected to the cold shield flange; and / or The cold shield includes a cooling carrier circulation chamber for the flow of the cooling carrier; and / or The sample mounting base also includes a baffle fixed to the far end of the claw mounting base for blocking the beam.
10. A vacuum processing system, characterized in that, include: Vacuum cavity; as well as The sample stage according to any one of claims 1-9, wherein the sample stage is at least partially disposed within the vacuum chamber.