Magnetic-driven variable vacuum capacitor and mechatronic variable vacuum capacitor

Abstract

This invention discloses a magnetically driven variable vacuum capacitor and an electromechanical integrated variable vacuum capacitor. The magnetically driven variable vacuum capacitor includes a vacuum capacitor body and a magnetic drive mechanism. The vacuum capacitor body includes a shell configured to provide a vacuum environment, a fixed electrode group fixed within the shell, and a movable electrode group rotatably disposed within the shell. The magnetic drive mechanism includes an inner magnetic drive disk and an outer magnetic drive disk. The inner magnetic drive disk is disposed within the shell and fixedly connected to the movable electrode group, while the outer magnetic drive disk is disposed outside the shell and axially opposite to the inner magnetic drive disk. The outer magnetic drive disk transmits magnetic torque to drive the inner magnetic drive disk to rotate the movable electrode group, thereby changing the coupling area between the movable electrode group and the fixed electrode group. This invention can significantly improve capacitance accuracy, reduce electrode processing difficulty and manufacturing cost, and greatly improve capacitance adjustment speed, meeting the requirements of precision equipment for rapid response to electrical parameters.

Description

Technical Field

[0001] This utility model relates to the field of vacuum capacitor technology, and in particular to a magnetically driven variable vacuum capacitor and an electromechanical integrated variable vacuum capacitor. Background Technology

[0002] In fields such as semiconductor manufacturing and high-frequency communication, variable vacuum capacitors (especially mechatronic variable vacuum capacitors used in precision scenarios such as etching equipment) are key components for adjusting electrical parameters. Their core function is to achieve adjustable capacitance by dynamically changing the electrode coupling area in order to meet the precise requirements of equipment for high-frequency signal transmission and energy control.

[0003] In existing technologies, the capacitance adjustment of traditional variable vacuum capacitors relies on mechanical transmission mechanisms. A typical structure includes components such as a pull rod, guide sleeve, bellows, screw, and nut. An external drive device rotates the screw, creating a threaded connection between the screw and nut, which in turn drives the pull rod to move axially, ultimately changing the relative position of the two sets of electrodes in the vertical direction, thus altering the electrode coupling area. According to the capacitance calculation formula C=ɛS / 4πkd (where C is the capacitance, ɛ is the dielectric constant, S is the electrode coupling area, k is the electrostatic constant, and d is the electrode spacing), the change in coupling area directly corresponds to the capacitance adjustment. Simultaneously, this type of structure requires a bellows to achieve a dynamic seal between the pull rod and the vacuum chamber, ensuring a stable internal vacuum environment.

[0004] However, the aforementioned traditional technical solutions suffer from the following insurmountable defects, which severely limit their application effectiveness in precision equipment: 1. Poor capacitance accuracy and susceptibility to environmental influences: To ensure normal operation, traditional mechanical transmission mechanisms require small gaps between components (such as tie rods and guide sleeves, screws and nuts). At the same time, due to limitations in machining accuracy, the straightness of transmission components is difficult to achieve extremely high standards. Furthermore, the machining tolerances of multiple components will overlap in the axial and radial directions. During use, vacuum capacitors will experience capacitance deviations due to changes in installation position (affected by gravity), angle, ambient temperature, and operating temperature, which directly affect the accuracy of etching equipment and wafer yield.

[0005] 2. Low space utilization and stringent electrode technology requirements: Traditional solutions adjust the electrode coupling area vertically, requiring a large amount of installation space in the vacuum chamber for transmission components such as pull rods, guide sleeves, and bellows. This significantly reduces the proportion of space that the electrode ring can occupy, i.e., the electrode coupling area S is limited. Under the premise of ensuring the target capacitance C and the pressure resistance performance of the equipment, the reduction of S inevitably requires a significant reduction in the electrode spacing d, which places extremely high demands on the surface roughness and electrode materials of the electrodes. This not only increases the difficulty of electrode processing but also significantly increases manufacturing costs.

[0006] 3. Low capacitance adjustment efficiency: Traditional variable vacuum capacitors require the screw to rotate 10.5 revolutions (corresponding to an angle of 3780°) to adjust the electrode coupling area from zero to the maximum coupling area. The long adjustment stroke results in slow capacitance response speed, which is difficult to meet the needs of precision equipment for rapid dynamic adjustment of electrical parameters.

[0007] In summary, existing traditional variable vacuum capacitors and mechatronic variable vacuum capacitors have significant shortcomings in capacitance accuracy, space utilization, lifespan, and regulation efficiency due to the inherent defects of their mechanical transmission structures. They cannot fully meet the application requirements of high-stability and cost-effective capacitors in the current precision manufacturing field, and a new structural solution that can overcome the above-mentioned technical bottlenecks is urgently needed. Utility Model Content

[0008] The problem to be solved by this utility model is to provide a magnetically driven variable vacuum capacitor and an electromechanical integrated variable vacuum capacitor to overcome the defects of traditional variable vacuum capacitors, such as poor capacitance accuracy, low space utilization and low capacitance adjustment efficiency.

[0009] The technical solution adopted by this utility model to solve its technical problem is: a magnetically driven variable vacuum capacitor, comprising: A vacuum capacitor body includes a housing configured to provide a vacuum environment, a fixed electrode assembly fixed within the housing, and a movable electrode assembly rotatably disposed within the housing. A magnetic drive mechanism includes an inner magnetic drive disk and an outer magnetic drive disk. The inner magnetic drive disk is disposed inside the housing and fixedly connected to the moving electrode group. The outer magnetic drive disk is disposed outside the housing and is axially opposite to the inner magnetic drive disk. The outer magnetic drive disk is used to transmit magnetic torque to drive the inner magnetic drive disk to rotate the moving electrode group, thereby changing the coupling area between the moving electrode group and the fixed electrode group.

[0010] As a further improvement of this utility model, the moving electrode group includes a moving electrode disk and a moving electrode sheet group fixed on the moving electrode disk. The moving electrode sheet group is composed of several concentric moving electrode sheets arranged radially at intervals. The fixed electrode assembly includes a fixed electrode disk and a fixed electrode plate assembly fixed on the fixed electrode disk. The fixed electrode plate assembly is composed of several concentric fixed electrode plates arranged radially at intervals. When the moving electrode group rotates, a number of the moving electrode pieces can move one by one into the gap between two adjacent fixed electrode pieces, so that the moving electrode pieces and the fixed electrode pieces are arranged alternately in the radial direction and have at least partial overlap.

[0011] As a further improvement of this utility model, the arc lengths of the moving electrode plates and the arc lengths of the fixed electrode plates increase gradually from the center outward along the radius, and the central angles corresponding to each moving electrode plate are the same, and the central angles corresponding to each fixed electrode plate are also the same.

[0012] As a further improvement of this utility model, both the moving electrode group and the fixed electrode group are provided with one set; Alternatively, both the moving electrode group and the fixed electrode group may be provided with two or more groups arranged in a centrally symmetrical manner, and the number of the moving electrode group and the fixed electrode group may be the same.

[0013] As a further improvement of this utility model, both the inner magnetic drive disk and the outer magnetic drive disk include a disk and a plurality of permanent magnets. The side of the two disks facing each other is set as the mounting surface. The plurality of permanent magnets are arranged and fixed on the mounting surface in a circumferential direction, and the magnetic pole directions of the permanent magnets are all set along the central axis of the disk. At the same time, the magnetic pole directions of two adjacent permanent magnets are opposite.

[0014] As a further improvement of this utility model, the housing includes a ceramic tube, an upper connecting ring fixed end, a lower connecting ring fixed end, a water cooling plate and a sealing top cover. The upper connecting ring fixed end and the lower connecting ring fixed end are respectively fixed to the upper and lower ends of the ceramic tube. The water cooling plate is fixed between the upper connecting ring fixed end and the sealing top cover. The water cooling plate is provided with a cooling cavity for cooling water to flow through, as well as an inlet hole and an outlet hole that are connected to the cooling cavity.

[0015] As a further improvement of this utility model, both the fixed electrode group and the moving electrode group are arranged in a first chamber formed by the ceramic tube, the fixed end of the upper connecting ring and the fixed end of the lower connecting ring, and the inner magnetic drive disk is arranged in a second chamber formed by the water cooling plate and the sealing top cover; the water cooling plate is annular with a through hole in its middle, and the moving electrode group is provided with a rotating shaft, which passes through the through hole and is fixedly connected to the inner magnetic drive disk.

[0016] As a further improvement of this utility model, the water cooling plate is provided with stepped grooves at both ends of the through hole, and a thrust ball bearing is installed in each of the two stepped grooves. An annular boss is provided at each end of the rotating shaft, and the two annular bosses abut against the two thrust ball bearings respectively.

[0017] As a further improvement of this utility model, a conductive slip ring is installed between the rotating shaft and the water cooling plate.

[0018] Furthermore, this utility model also provides an electromechanical integrated variable vacuum capacitor, including a motor, a bracket, and a magnetically driven variable vacuum capacitor as described above. The motor is fixedly mounted on one end of the housing via the bracket, and the motor shaft is fixedly connected to the external magnetic drive disk via a coupling.

[0019] The beneficial effects of this utility model are as follows: This utility model provides a magnetically driven variable vacuum capacitor and an electromechanical integrated variable vacuum capacitor. It uses an external magnetic drive disk located outside the housing to achieve contactless magnetic coupling transmission with an internal magnetic drive disk located inside the housing. This drives the moving electrode group to rotate, changing its coupling area with the fixed electrode group, thus achieving capacitance adjustment. Since the mechanical transmission components such as pull rods, guide sleeves, screws, and nuts of traditional variable vacuum capacitors are completely eliminated, capacitance deviations caused by mechanical clearances and processing tolerances are fundamentally avoided, significantly improving capacitance accuracy and adapting to the capacitance stability requirements of precision scenarios such as etching equipment. Simultaneously, because there are no traditional mechanical transmission components inside the housing, the space occupied by the fixed and moving electrode groups is greatly increased. The coupling area of ​​the fixed and moving electrode groups can be made larger. Under the premise of unchanged capacitance, the electrode spacing can be increased, thus greatly reducing the surface roughness requirements of the electrode sheets under the same withstand voltage conditions, and correspondingly reducing material requirements, thereby reducing processing difficulty and manufacturing costs. Furthermore, since the moving electrode group changes its coupling area with the fixed electrode group by rotating, only a small angle of rotation is needed to switch the coupling area from zero to the maximum, which greatly improves the capacitance adjustment speed and meets the requirements of precision equipment for rapid response to electrical parameters. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a front view of the magnetically driven variable vacuum capacitor of this utility model; Figure 2 This utility model is based on Figure 1 Cross-sectional view along the AA direction; Figure 3 This utility model is based on Figure 1 Cross-sectional view along the BB direction; Figure 4 This is a perspective view of the moving electrode assembly in the magnetically driven variable vacuum capacitor of this utility model; Figure 5This is a perspective view of the external magnetic drive disk in the magnetically driven variable vacuum capacitor of this utility model. Figure 6 This utility model Figure 2 Enlarged view of section C; Figure 7 This is a perspective view of the mechatronic variable vacuum capacitor of this utility model; Figure 8 This is a cross-sectional view of the mechatronic variable vacuum capacitor of this utility model.

[0022] Referring to the accompanying drawings, the following explanations are provided: 1. Inner magnetic drive disk; 2. Outer magnetic drive disk; 201. Magnetic disk; 2011. Mounting surface; 2012. Positioning rib; 202. Permanent magnet; 3. Moving electrode disk; 4. Moving electrode plate assembly; 401. Moving electrode plate; 5. Fixed electrode disk; 6. Fixed electrode plate assembly; 601. Fixed electrode plate; 7. Ceramic tube; 8. Upper connecting ring fixed end; 9. Lower connecting ring fixed end; 10. Water cooling disk; 1001. Cooling chamber; 1002. Water inlet; 1003. Water outlet; 1004. Stepped groove; 11. Sealed top cover; 12. Rotating shaft; 1201. Annular boss; 13. Thrust ball bearing; 14. Conductive slip ring; 15. Motor; 16. Bracket; 17. Coupling; 18. Drive circuit board. Detailed Implementation

[0023] The present application will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0024] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0026] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The illustrations only show the components related to this application and are not drawn according to the number, shape and size of the components in actual implementation. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0027] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0028] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0029] Example 1

[0030] See Figures 1 to 6 This invention provides a magnetically driven variable vacuum capacitor, comprising a vacuum capacitor body and a magnetic drive mechanism. The vacuum capacitor body includes a housing configured to provide a vacuum environment, a fixed electrode assembly fixed within the housing, and a movable electrode assembly rotatably disposed within the housing. The magnetic drive mechanism includes an inner magnetic drive disk 1 and an outer magnetic drive disk 2. The inner magnetic drive disk 1 is rotatably disposed within the housing and fixedly connected to the movable electrode assembly, while the outer magnetic drive disk 2 is disposed outside the housing and axially opposite to the inner magnetic drive disk 1. The outer magnetic drive disk 2 rotates under the drive of an external motor and transmits magnetic torque to drive the inner magnetic drive disk 1 to rotate the movable electrode assembly, thereby changing the coupling area between the movable electrode assembly and the fixed electrode assembly.

[0031] This utility model of a magnetically driven variable vacuum capacitor employs a magnetic drive mechanism. An outer magnetic drive disk 2 located outside the housing engages with an inner magnetic drive disk 1 located inside the housing through contactless magnetic coupling, thereby driving the moving electrode group to rotate and change its coupling area with the fixed electrode group, thus achieving capacitance adjustment. Since the mechanical transmission components such as pull rods, guide sleeves, screws, and nuts of traditional variable vacuum capacitors are completely eliminated, capacitance deviations caused by mechanical clearances and processing tolerances are fundamentally avoided, significantly improving capacitance accuracy and adapting to the capacitance stability requirements of precision applications such as etching equipment. Simultaneously, the absence of traditional mechanical transmission components within the internal space greatly increases the space that the fixed and moving electrode groups can occupy inside the housing, allowing for a larger coupling area. Under the premise of unchanged capacitance, the electrode spacing can be increased, thus significantly reducing the surface roughness requirements of the electrode sheets and the material requirements under the same withstand voltage conditions, thereby reducing processing difficulty and manufacturing costs. Furthermore, since the moving electrode group changes its coupling area with the fixed electrode group by rotating, only a small angle of rotation is needed to switch the coupling area from zero to the maximum, which greatly improves the capacitance adjustment speed and meets the requirements of precision equipment for rapid response to electrical parameters.

[0032] See Figure 2 The moving electrode assembly includes a moving electrode disk 3 and a moving electrode sheet assembly 4 fixed to the bottom surface of the moving electrode disk 3. The moving electrode sheet assembly 4 is composed of several concentric circular moving electrode sheets 401 arranged radially at intervals. Similarly, the fixed electrode assembly includes a fixed electrode disk 5 and a fixed electrode sheet assembly 6 fixed to the top surface of the fixed electrode disk 5. The fixed electrode sheet assembly 6 is composed of several concentric circular fixed electrode sheets 601 arranged radially at intervals. The lengths of both the moving electrode sheet 401 and the fixed electrode sheet 601 extend along the axial direction of the vacuum capacitor body.

[0033] When the moving electrode group rotates, a number of moving electrode pieces 401 can move one by one into the gap between two adjacent fixed electrode pieces 601, so that the moving electrode pieces 401 and the fixed electrode pieces 601 are arranged alternately in the radial direction and have at least partial overlap. The area of ​​the overlap is the coupling area between the moving electrode group and the fixed electrode group.

[0034] In this invention, both the moving electrode 401 and the fixed electrode 601 are arranged in a fan-shaped concentric circle at intervals. During rotation, the moving electrode 401 can be directly embedded into the gap between the fixed electrode 601. Only a small angle of rotation is needed to switch the coupling area from zero to maximum, enabling rapid capacitance adjustment. Simultaneously, both the moving electrode 401 and the fixed electrode 601 are arranged radially at intervals, maximizing the use of radial space within the housing and increasing the total electrode coupling area. Based on the capacitance formula C=ɛS / 4πkd, the electrode spacing d can be increased while keeping the capacitance C constant, reducing the requirements for electrode surface roughness and high-voltage resistance of the material, and decreasing processing costs.

[0035] Preferably, from the center outward along the radius, the arc length of several moving electrode pieces 401 in each moving electrode piece group 4 and the arc length of several fixed electrode pieces 601 in each fixed electrode piece group 6 are gradually increased, and the central angles corresponding to each moving electrode piece 401 are the same, and the central angles corresponding to each fixed electrode piece 601 are also the same. As a result, during the rotation of the moving electrode group, the change in coupling area corresponding to each unit angle is uniform and consistent, avoiding sudden changes in capacitance caused by uneven electrode piece sizes, realizing linear adjustment of capacitance, and facilitating precise control of capacitance by precision equipment.

[0036] Optionally, both the moving electrode group 4 and the fixed electrode group 6 can be provided with one or more groups.

[0037] When both the moving electrode group 4 and the fixed electrode group 6 are set as one group, for example, the central angle corresponding to each moving electrode 401 and each fixed electrode 601 can be set to 180°. When both the moving electrode group 4 and the fixed electrode group 6 are set as two or more groups, the two or more moving electrode groups 4 are centrally symmetrically distributed on the bottom surface of the moving electrode disk 3, and the two or more fixed electrode groups 6 are centrally symmetrically distributed on the top surface of the fixed electrode disk 5, and the number of moving electrode groups 4 and fixed electrode groups 6 is the same.

[0038] See Figure 3 and Figure 4 In this embodiment, the moving electrode group 4 and the fixed electrode group 6 are both set as two centrally symmetrical groups. The arc of each moving electrode 401 and each fixed electrode 601 is π / 2. The coupling area only needs to be rotated 90° from zero to the maximum.

[0039] See Figure 2 The housing includes a ceramic tube 7, an upper connecting ring fixed end 8, a lower connecting ring fixed end 9, a water cooling plate 10, and a sealed top cover 11. The ceramic tube 7 is a round tube with open ends at both the top and bottom. The upper connecting ring fixed end 8 and the lower connecting ring fixed end 9 are respectively sealed and welded to the upper and lower ends of the ceramic tube 7. The fixed electrode group and the moving electrode group are both set in the first chamber formed by the ceramic tube 7, the upper connecting ring fixed end 8, and the lower connecting ring fixed end 9, and the fixed electrode plate 5 in the fixed electrode group is fixed to the lower connecting ring fixed end 9.

[0040] Furthermore, the water-cooled plate 10 is welded to the top of the upper connecting ring fixed end 8. The water-cooled plate 10 is annular with a through hole in the middle and a cooling chamber 1001 for cooling water to flow inside. At the same time, the outer side of the water-cooled plate 10 is also provided with a water inlet hole 1002 and a water outlet hole 1003 that are connected to the cooling chamber 1001. Cooling water is supplied into the cooling chamber 1001 through the water inlet hole 1002 and flows out through the water outlet hole 1003. This can remove the heat generated by the variable vacuum capacitor in real time, avoid thermal deformation of the thrust ball bearing 13, demagnetization of the permanent magnet 202, and performance degradation of the conductive slip ring 14 caused by high temperature, and ensure that all components are in a normal temperature working state for a long time, thus extending the overall life. At the same time, this integrated design of the water-cooled plate 10 and the shell integrates the cooling function and the vacuum sealing function, eliminating the need for additional cooling devices, simplifying the overall structure, and reducing the equipment installation space requirements.

[0041] Furthermore, the sealing top cover 11 is welded to the top of the water-cooling plate 10, and the inner magnetic drive plate 1 is rotatably disposed in the second chamber formed by the water-cooling plate 10 and the sealing top cover 11. The housing of this application uses a ceramic tube 7 as the main body. The ceramic tube 7 has excellent insulation performance, which can meet the insulation requirements under high voltage scenarios and avoid the risk of leakage. Through the cooperation of the upper connecting ring end 8, the lower connecting ring end 9 and the sealing top cover 11, the vacuum sealing effect is further enhanced, ensuring the stability of the vacuum environment inside the housing.

[0042] Continue reading Figure 2 The moving electrode assembly is equipped with a rotating shaft 12, which can be integrally machined on the top of the moving electrode disk 3. The rotating shaft 12 passes through the through hole of the water cooling disk 10 and is fixedly connected to the inner magnetic drive disk 1. This transmission connection method has a short torque transmission path and no additional loss, ensuring that the power of the outer magnetic drive disk 2 can be efficiently transmitted to the moving electrode assembly, reducing transmission errors, and achieving a compact structure.

[0043] It is worth mentioning that the water-cooling plate 10 has stepped grooves 1004 at both the upper and lower ends of the through hole, and thrust ball bearings 13 are installed in both stepped grooves 1004. Each end of the rotating shaft 12 has an annular boss 1201, which abuts against the opposite sides of the two thrust ball bearings 13. By setting thrust ball bearings 13 between the rotating shaft 12 and the water-cooling plate 10, this application can, on the one hand, convert the sliding friction between the rotating shaft 12 and the water-cooling plate 10 into rolling friction, significantly reducing rotational resistance, reducing component wear, and extending service life. It also makes the rotating electrode assembly rotate more smoothly and reduces jamming during capacitance adjustment. On the other hand, it can precisely limit the axial and radial displacement of the rotating shaft 12, preventing the moving electrode assembly from shifting due to gravity or axial force, ensuring stable electrode spacing, and guaranteeing capacitance accuracy.

[0044] In addition, a conductive slip ring 14 is installed between the rotating shaft 12 and the water cooling plate 10. The conductive slip ring 14 adopts existing conventional technology. The conductive slip ring 14 can realize continuous and stable electrical connection between the moving electrode group and the external circuit during the rotation of the rotating shaft 12, thereby improving the stability of electrical performance.

[0045] See Figure 2 , Figure 5 and Figure 6 Both the inner magnetic drive disk 1 and the outer magnetic drive disk 2 include a disk 201 and multiple permanent magnets 202. The side of the disk 201 of the inner magnetic drive disk 1 and the disk 201 of the outer magnetic drive disk 2 facing each other is designated as the mounting surface 2011. The multiple permanent magnets 202 are arranged circumferentially and fixed on the mounting surface 2011, and the magnetic pole direction of the permanent magnets 202 is set along the central axis direction of the disk 201. At the same time, the magnetic pole directions of two adjacent permanent magnets 202 are opposite.

[0046] Specifically, such as Figure 5 As shown, the outer ring of the mounting surface 2011 is provided with multiple evenly spaced positioning ribs 2012 along the circumferential direction, and each positioning rib 2012 is arranged radially. For ease of understanding, the multiple permanent magnets are equally divided into several first magnetic blocks and several second magnetic blocks. A first magnetic block is embedded between two adjacent positioning ribs 2012, and a second magnetic block is embedded between two adjacent first magnetic blocks. The magnetic poles of the first magnetic blocks and the second magnetic blocks are opposite, that is, in the circumferential direction, the polarity arrangement of the multiple permanent magnets 202 is an alternating arrangement of N poles and S poles. The permanent magnets 202 of the inner magnetic drive disk 1 and the permanent magnets 202 of the outer magnetic drive disk 2 attract each other. When the outer magnetic drive disk 2 rotates, it will drive the inner magnetic drive disk 1 to rotate by magnetic coupling, thereby driving the moving electrode group to rotate, changing the coupling area between the moving electrode plate 401 and the fixed electrode plate 601, and realizing the change of capacitance.

[0047] like Figure 6 As shown, on the opposite surfaces of the inner magnetic drive disk 1 and the outer magnetic drive disk 2, the magnetic poles are arranged alternately. Because the magnetic field outside the magnetic poles of the permanent magnet 202 is distributed divergently, the principle of like poles repelling and unlike poles attracting is utilized to distort the divergent magnetic field, causing the scattered magnetic flux to re-converge onto the opposite pole of the opposite permanent magnet 202. This increases the attractive force and reduces the lag between the two disks when the outer magnetic drive disk 2 suddenly rotates. Furthermore, since the outer magnetic drive disk 2 is in the external atmosphere and the inner magnetic drive disk 1 is in a vacuum environment, the sealing top cover 11 is preferably made of pure copper plate, which has low permeability, reducing magnetic loss and better maintaining the attractive force between the inner magnetic drive disk 1 and the outer magnetic drive disk 2, preventing the occurrence of lag.

[0048] Example 2

[0049] See Figure 7 and Figure 8This utility model also provides an electromechanical integrated variable vacuum capacitor, including a motor 15, a bracket 16, a drive circuit board 18, and a magnetically driven variable vacuum capacitor as described in Embodiment 1. The motor 15 is fixedly mounted on the sealed top cover 11 of the housing via the bracket 16, and the motor shaft of the motor 15 is fixedly connected to the external magnetic drive disk 2 via a coupling 17. The drive circuit board 18 is electrically connected to the motor 15 and is used to control the speed and rotation angle of the motor 15, thereby achieving precise control of the rotation angle of the moving electrode group and ensuring the capacitance adjustment accuracy.

[0050] This embodiment of the mechatronic variable vacuum capacitor integrates the motor 15 with the magnetically driven variable vacuum capacitor. The motor 15 can directly control the speed and angle of the external magnetic drive disk 2, realizing the automatic and precise adjustment of the capacitance value. It is suitable for the needs of automated production lines such as semiconductor manufacturing. At the same time, the integrated mechatronic design can reduce the installation and debugging difficulty for users and improve the ease of use.

[0051] The same or similar parts between the various embodiments in this specification can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments.

[0052] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A magnetically driven variable vacuum capacitor, characterized by, include: A vacuum capacitor body includes a housing configured to provide a vacuum environment, a fixed electrode assembly fixed within the housing, and a movable electrode assembly rotatably disposed within the housing. A magnetic drive mechanism includes an inner magnetic drive disk (1) and an outer magnetic drive disk (2). The inner magnetic drive disk (1) is disposed inside the housing and fixedly connected to the moving electrode assembly. The outer magnetic drive disk (2) is disposed outside the housing and is axially opposite to the inner magnetic drive disk (1). The outer magnetic drive disk (2) is used to transmit magnetic torque to drive the inner magnetic drive disk (1) to rotate the moving electrode group, so that the coupling area between the moving electrode group and the fixed electrode group changes.

2. The magnetically driven variable vacuum capacitor of claim 1, wherein, The moving electrode group includes a moving electrode disk (3) and a moving electrode sheet group (4) fixed on the moving electrode disk (3). The moving electrode sheet group (4) is composed of several concentric moving electrode sheets (401) arranged radially at intervals. The fixed electrode group includes a fixed electrode disk (5) and a fixed electrode sheet group (6) fixed on the fixed electrode disk (5). The fixed electrode sheet group (6) is composed of a plurality of concentric fixed electrode sheets (601) arranged radially at intervals. When the moving electrode group rotates, a plurality of the moving electrode pieces (401) can move one by one into the gap between two adjacent fixed electrode pieces (601), so that the moving electrode pieces (401) and the fixed electrode pieces (601) are arranged alternately in the radial direction and have at least partial overlap.

3. The magnetically driven variable vacuum capacitor of claim 2, wherein, From the center outward along the radius, the arc length of the moving electrode (401) and the arc length of the fixed electrode (601) increase gradually, and the central angles corresponding to each moving electrode (401) are the same, and the central angles corresponding to each fixed electrode (601) are also the same.

4. The magnetically driven variable vacuum capacitor of claim 3, wherein, Both the moving electrode group (4) and the fixed electrode group (6) are provided with one set; Alternatively, both the moving electrode group (4) and the fixed electrode group (6) are provided with two or more groups that are centrally symmetrically distributed, and the number of the moving electrode group (4) and the fixed electrode group (6) is the same.

5. The magnetically driven variable vacuum capacitor of claim 1, wherein, Both the inner magnetic drive disk (1) and the outer magnetic drive disk (2) include a disk (201) and a plurality of permanent magnets (202). The opposite side of the two disks (201) is set as the mounting surface (2011). The plurality of permanent magnets (202) are arranged circumferentially and fixed on the mounting surface (2011). The magnetic pole direction of the permanent magnets (202) is set along the central axis of the disk (201), and the magnetic pole direction of two adjacent permanent magnets (202) is opposite.

6. The magnetically driven variable vacuum capacitor of claim 1, wherein, The housing includes a ceramic tube (7), an upper connecting ring fixed end (8), a lower connecting ring fixed end (9), a water cooling plate (10), and a sealing top cover (11). The upper connecting ring fixed end (8) and the lower connecting ring fixed end (9) are respectively fixed to the upper and lower ends of the ceramic tube (7). The water cooling plate (10) is fixed between the upper connecting ring fixed end (8) and the sealing top cover (11). The water cooling plate (10) is provided with a cooling chamber (1001) for cooling water to flow through, as well as a water inlet (1002) and a water outlet (1003) that are connected to the cooling chamber (1001).

7. The magnetically driven variable vacuum capacitor of claim 6, wherein, Both the fixed electrode group and the moving electrode group are located in the first chamber formed by the ceramic tube (7), the upper connecting ring fixed end (8) and the lower connecting ring fixed end (9). The inner magnetic drive disk (1) is located in the second chamber formed by the water cooling disk (10) and the sealing top cover (11). The water cooling disk (10) is annular with a through hole in its middle. The moving electrode group is provided with a rotating shaft (12), which passes through the through hole and is fixedly connected to the inner magnetic drive disk (1).

8. The magnetically driven variable vacuum capacitor of claim 7, wherein, The water cooling plate (10) is provided with stepped grooves (1004) at both ends of the through hole, and thrust ball bearings (13) are installed in both stepped grooves (1004). An annular boss (1201) is provided at each end of the rotating shaft (12), and the two annular bosses (1201) abut against the two thrust ball bearings (13) respectively.

9. The magnetically driven variable vacuum capacitor of claim 7, wherein, A conductive slip ring (14) is installed between the rotating shaft (12) and the water cooling plate (10).

10. An electromechanical integrated variable vacuum capacitor, characterized by, Includes a motor (15), a bracket (16), and a magnetically driven variable vacuum capacitor as described in any one of claims 1 to 9. The motor (15) is fixedly mounted on one end of the housing via the bracket (16), and the motor shaft of the motor (15) is fixedly connected to the external magnetic drive disk (2) via a coupling (17).

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