Support device, processing machine and process
The support system with a base body and orientation pins addresses inaccuracies and costs in substrate processing by providing planar support and flexible orientation, enhancing substrate handling and machine efficiency.
DE102024113813B4Active Publication Date: 2026-06-11ASMPT GMBH & CO KG
Patent Information
- Application Number
- DE102024113813
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2024-05-16
- Publication Date
- 2026-06-11
- Estimated Expiration
- 2044-05-16
Smart Images
Figure 00000000_0000_ABST
Abstract
Support system (10) for planar support of a substrate (110) in a processing machine (100) for substrates (110), the support system (10) comprising a support base body (20) with at least one orientation hole (30) and at least one orientation pin (40), wherein the support base body (20) comprises a bottom surface (22) for arrangement on the processing machine (100) and a top surface (24) arranged opposite the bottom surface (22) for planar support of the substrate (110), wherein the at least one orientation hole (30) in the support base body (20) is designed extending from the bottom surface (22) towards the top surface (24) for arranging the support base body (20) over the at least one orientation pin (40), and wherein the at least one orientation pin (40) is designed to be attachable to the processing machine (100).wherein at least one orientation pin (40) is continuously movable and attachable within a corresponding mounting area of the processing machine (100), thus enabling flexible positioning.
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Citation Information
Patent Citations
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