Inductor component

Abstract

To provide an inductor component capable of suppressing a decrease in inductance acquisition efficiency.SOLUTION: An inductor component includes: a meander-shaped coil wiring extending in a second direction intersecting a first direction while meandering in the first direction; a first external terminal and a second external terminal; a first connection conductor extending in a third direction intersecting the first direction and the second direction and connected to the first external terminal and the coil wiring; and a second connection conductor extending in the third direction and connected to the second external terminal and the coil wiring. When viewed along the third direction, a coil center line, which is the center of the coil wiring in the first direction and extends in parallel with the second direction, is located between a first center line which is the center of the first connection conductor in the first direction and extends in parallel with the second direction, and a second center line which is the center of the second connection conductor in the first direction and extends in parallel with the second direction.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to an inductor component having a meander-shaped coil wiring provided inside a main body. [Background technology]

[0002] Patent Document 1 discloses an example of an inductor component having meander-shaped coil wiring provided inside the main body.

[0003] In the inductor component disclosed in Patent Document 1, both ends of a meandering coil wiring are connected via vertical wiring to external terminals provided on a first main surface of the inductor component. The coil wiring meanders along the short-side direction of the first main surface and extends along the length of the first main surface from one end to the other end in the lengthwise direction. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2022-26745 Summary of the Invention [Problem to be solved by the invention]

[0005] In the inductor component disclosed in Patent Document 1, the meandering coil wiring meanders along the short direction of the first main surface except at both longitudinal ends of the first main surface. On the other hand, the coil wiring does not meander at both longitudinal ends of the first main surface. As a result, spaces where no coil wiring is provided are generated around the vertical wiring in the inductor component. As a result, the efficiency of obtaining inductance in the inductor component may decrease.

[0006] An object of the present disclosure is to provide an inductor component that can suppress a decrease in efficiency of obtaining inductance. [Means for solving the problem]

[0007] An inductor component according to one aspect of the present disclosure includes: The main body and a meander-shaped coil wiring provided inside the main body, meandering in a first direction and extending in a second direction intersecting the first direction; a first external terminal and a second external terminal provided on an outer surface of the main body; a first connecting conductor provided inside the main body, extending along a third direction intersecting the first direction and the second direction, and connected to the first external terminal and the coil wiring; a second connecting conductor provided inside the main body, extending along the third direction, and connected to the second external terminal and the coil wiring; When viewed along the third direction, a coil center line that is the center of the coil wiring in the first direction and extends parallel to the second direction is located between a first center line that is the center of the first connecting conductor in the first direction and extends parallel to the second direction, and a second center line that is the center of the second connecting conductor in the first direction and extends parallel to the second direction. [Effects of the Invention]

[0008] According to the present disclosure, it is possible to provide an inductor component that can suppress a decrease in the efficiency with which inductance is obtained. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a schematic external perspective view of an inductor component according to an embodiment of the present disclosure; [Figure 2] FIG. 2 is a schematic plan view of coil wiring of an inductor component according to an embodiment of the present disclosure. [Figure 3] FIG. 2 is a schematic cross-sectional view showing the cross section taken along the line III-III in FIG. 1; [Figure 4] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component according to an embodiment of the present disclosure. [Figure 5] 5 is a schematic cross-sectional view illustrating a step subsequent to FIG. 4 in a method for manufacturing an inductor component according to an embodiment of the present disclosure. [Figure 6] 6 is a schematic cross-sectional view illustrating a step subsequent to FIG. 5 in a method for manufacturing an inductor component according to an embodiment of the present disclosure. [Figure 7] 7A and 7B are schematic cross-sectional views illustrating a step subsequent to FIG. 6 in the method for manufacturing an inductor component according to an embodiment of the present disclosure. [Figure 8] 8 is a schematic cross-sectional view illustrating a step subsequent to FIG. 7 in the method for manufacturing an inductor component according to an embodiment of the present disclosure. [Figure 9] 9 is a schematic cross-sectional view illustrating a step subsequent to FIG. 8 in the method for manufacturing an inductor component according to an embodiment of the present disclosure. [Figure 10] 10 is a schematic cross-sectional view illustrating a step subsequent to FIG. 9 in the method for manufacturing an inductor component according to an embodiment of the present disclosure. [Figure 11] 11A and 11B are schematic cross-sectional views illustrating a step subsequent to FIG. 10 in the method for manufacturing an inductor component according to an embodiment of the present disclosure. [Figure 12] 12 is a schematic cross-sectional view illustrating a step subsequent to FIG. 11 in the method for manufacturing an inductor component according to an embodiment of the present disclosure. [Figure 13] 13 is a schematic cross-sectional view illustrating a step subsequent to FIG. 12 in the method for manufacturing an inductor component according to an embodiment of the present disclosure. [Figure 14] 14 is a schematic cross-sectional view illustrating a step subsequent to FIG. 13 in the method for manufacturing an inductor component according to an embodiment of the present disclosure. [Figure 15] FIG. 10 is a schematic plan view of coil wiring of an inductor component according to a modified example of an embodiment of the present disclosure. [Figure 16] FIG. 10 is a schematic plan view of coil wiring of an inductor component according to a modified example of an embodiment of the present disclosure. [Figure 17] FIG. 10 is a schematic plan view of coil wiring of an inductor component according to a modified example of an embodiment of the present disclosure. [Figure 18] FIG. 10 is a schematic plan view of coil wiring of an inductor component according to a modified example of an embodiment of the present disclosure. [Figure 19] FIG. 10 is a schematic plan view of coil wiring of an inductor component according to a modified example of an embodiment of the present disclosure. [Figure 20]FIG. 10 is a schematic plan view of coil wiring of an inductor component according to a modified example of an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0010] An example of the present disclosure will now be described with reference to the accompanying drawings. Note that the following description is merely illustrative in nature and is not intended to limit the present disclosure, its applications, or its uses. The drawings are schematic, and the ratios of dimensions and the like do not necessarily correspond to reality. Furthermore, in the following description, terms indicating specific directions or positions (e.g., terms including "upper," "lower," "right," "left," "front," and "rear") are used as necessary. However, the use of terms indicating specific directions or positions is intended to facilitate understanding of the present disclosure with reference to the drawings, and the meanings of these terms do not limit the technical scope of the present disclosure.

[0011] <Present Embodiment> 1 is a schematic perspective view of an inductor component according to an embodiment of the present disclosure. As shown in FIG. 1, the inductor component 10 according to an embodiment of the present disclosure includes a main body 20, an outer insulating layer 21, a first external terminal 31, and a second external terminal 32.

[0012] The main body 20 has a rectangular parallelepiped shape. In this embodiment, the outer surface 20A of the main body 20 includes an upper surface 20Aa facing upward, a lower surface 20Ab facing downward, and a front side surface 20Ac, a rear side surface 20Ad, a left side surface 20Ae, and a right side surface 20Af connecting the upper surface 20Aa and the lower surface 20Ab. The front side surface 20Ac faces forward, and the rear side surface 20Ad faces rearward. The left side surface 20Ae faces left, and the right side surface 20Af faces right. In other words, the upper surface 20Aa and the lower surface 20Ab face opposite each other, the front side surface 20Ac and the rear side surface 20Ad face opposite each other, and the left side surface 20Ae and the right side surface 20Af face opposite each other. In each figure, the X, Y, and Z directions are indicated by arrows. In this embodiment, the X direction is the left-right direction, the Y direction is the front-back direction, and the Z direction is the up-down direction. The X direction, Y direction, and Z direction are perpendicular to one another. The main body 20 is not limited to a rectangular parallelepiped shape, and may have other shapes, such as a cylindrical shape.

[0013] In this embodiment, the upper surface 20Aa and the lower surface 20Ab intersect with the Z direction (orthogonal in this embodiment), and the front side surface 20Ac, the rear side surface 20Ad, the left side surface 20Ae, and the right side surface 20Af are parallel to the Z direction.

[0014] The main body 20 includes a magnetic material, as described in detail below. The main body 20 includes magnetic powder (magnetic material) and a resin containing the magnetic powder. The resin is, for example, an organic insulating material such as an epoxy, phenol, liquid crystal polymer, polyimide, or acrylic resin, or a mixture containing these. The magnetic powder is, for example, an FeSi-based alloy such as FeSiCr, an FeCo-based alloy, or an Fe-based alloy such as NiFe, or an amorphous alloy thereof. Therefore, compared to a configuration in which the main body 20 is made only of ferrite, the magnetic powder can improve DC bias characteristics, and the resin provides insulation between the magnetic powder particles, thereby reducing loss (iron loss) at high frequencies. Note that the main body 20 may be made of a sintered compact of ferrite or magnetic powder, which does not include an organic resin. In other words, the entire main body 20 may be made of a magnetic material. Of course, as described above, a portion of the main body 20 may be made of a magnetic material, and the remainder may be made of a material other than the magnetic material.

[0015] In this embodiment, the median particle size D50 of the magnetic material contained in the main body 20 is 10 μm or less. However, the median particle size D50 of the magnetic material contained in the main body 20 may be larger than 10 μm.

[0016] The external insulating layer 21 is laminated on the upper surface 20Aa of the main body 20. The external insulating layer 21 is laminated on a partial area of ​​the upper surface 20Aa. A first external terminal 31 and a second external terminal 32 are provided in this partial area. The external insulating layer 21 is made of an insulator. For example, the external insulating layer 21 is made of acrylate and silicon dioxide (SiO2).

[0017] The first external terminal 31 and the second external terminal 32 are provided on at least one surface of the outer surface 20A of the main body 20. In this embodiment, the first external terminal 31 and the second external terminal 32 are provided on the upper surface 20Aa of the main body 20. The first external terminal 31 is provided on the left side of the upper surface 20Aa (one side in the X direction). The second external terminal 32 is provided on the right side of the upper surface 20Aa (the other side in the X direction). The first external terminal 31 and the second external terminal 32 are made of a conductive material. In this embodiment, the first external terminal 31 and the second external terminal 32 have a three-layer structure in which Cu, which has low electrical resistance and excellent stress resistance, Ni, which has excellent corrosion resistance, and Au, which has excellent solder wettability and reliability, are arranged in this order from the inside to the outside.

[0018] The first external terminal 31 may be provided on a part other than the left side of the upper surface 20Aa, and the second external terminal 32 may be provided on a part other than the right side of the upper surface 20Aa. The first external terminal 31 and the second external terminal 32 may be provided on a part other than the upper surface 20Aa of the main body 20.

[0019] In this embodiment, the first external terminal 31 and the second external terminal 32 are provided on the same surface (upper surface 20Aa) of the main body 20. However, the first external terminal 31 and the second external terminal 32 may be provided on different surfaces of the main body 20. For example, the first external terminal 31 may be provided on the upper surface 20Aa, while the second external terminal 32 may be provided on the lower surface 20Ab.

[0020] In the present embodiment, the first external terminal 31 and the second external terminal 32 are each provided on one surface (the upper surface 20Aa) of the main body 20. However, the first external terminal 31 and the second external terminal 32 may each be provided across multiple surfaces of the main body 20. For example, the first external terminal 31 may be provided across the entire left side surface 20Ae and the left portions of the upper surface 20Aa, the lower surface 20Ab, the front side surface 20Ac, and the rear side surface 20Ad. Furthermore, for example, the second external terminal 32 may be provided across the entire right side surface 20Af and the right portions of the upper surface 20Aa, the lower surface 20Ab, the front side surface 20Ac, and the rear side surface 20Ad.

[0021] Fig. 2 is a schematic plan view of a coil wiring of an inductor element according to an embodiment of the present disclosure, Fig. 3 is a schematic cross-sectional view showing a cross section taken along line III-III in Fig. 1.

[0022] As shown in FIGS. 2 and 3, the inductor component 10 includes a coil wiring 40, a first connecting conductor 51, a second connecting conductor 52, a seed layer 60, and an inner insulating layer 70.

[0023] The coil wiring 40, the first connecting conductor 51, the second connecting conductor 52, the seed layer 60, and the internal insulating layer 70 are provided inside the main body 20 and are sandwiched between an upper surface 20Aa and a lower surface 20Ab. The upper surface 20Aa is an example of a first surface. The lower surface 20Ab is an example of a second surface.

[0024] The coil wiring 40, the first connecting conductor 51, and the second connecting conductor 52 are made of a conductive material. In this embodiment, the coil wiring 40, the first connecting conductor 51, and the second connecting conductor 52 are made of a conductive material, such as a metal material with low electrical resistance, such as Cu, Ag, Au, or Al.

[0025] As shown in Fig. 2, the coil wiring 40 has a meandering shape. The coil wiring 40 extends in the X direction, which is perpendicular to the Y direction, while meandering in the Y direction. The Y direction is an example of a first direction. The X direction is an example of a second direction. Note that the direction in which the coil wiring 40 extends is not limited to the X direction. The coil wiring 40 may extend in any direction that intersects with the Y direction.

[0026] The coil wiring 40 includes a plurality of extending portions 41 each extending along the Y direction, and a folded portion 42 connecting two adjacent extending portions 41 among the plurality of extending portions 41.

[0027] The folded portion 42 includes a curved portion 42A that curves convexly toward one side (front side) in the Y direction, and a curved portion 42B that curves convexly toward the other side (rear side) in the Y direction. In this embodiment, the coil wiring 40 includes seven extending portions 41 and six folded portions 42. In this embodiment, three of the six folded portions 42 are curved portions 42A, and the remaining three of the six folded portions 42 are curved portions 42B. The number of extending portions 41 and the number of folded portions 42 are arbitrary. The number of curved portions 42A and the number of curved portions 42B are also arbitrary.

[0028] The coil wiring 40 includes pads 43 and 44. The pad 43 is provided at one end of the coil wiring 40. The pad 44 is provided at the other end of the coil wiring 40. In this embodiment, the pads 43 and 44 are configured to be wider than other portions of the coil wiring 40 when viewed along the Z direction.

[0029] The coil wiring 40 extends from the pad 43 to the pad 44. The extending portions 41 and the folded portions 42 are alternately provided in the path from the pad 43 to the pad 44. Furthermore, the folded portions 42 are alternately provided with curved portions 42A and curved portions 42B. In this embodiment, the path of the coil wiring 40 from the pad 43 to the pad 44 is as follows. That is, the path is in the following order: pad 43, extending portion 41, curved portion 42B, extending portion 41, curved portion 42A, extending portion 41, curved portion 42B, extending portion 41, curved portion 42A, extending portion 41, curved portion 42B, extending portion 41, curved portion 42A, extending portion 41, curved portion 42A, extending portion 41, and pad 44.

[0030] The position of the pad 43 is not limited to one end of the coil wiring 40, and the position of the pad 44 is not limited to the other end of the coil wiring 40. In other words, the pad 43 can be provided at any position on the coil wiring 40.

[0031] 1 and 2, the coil wiring 40 includes branch wirings 45 and 46. The branch wiring 45 is exposed on the left side surface 20Ae of the main body 20. The branch wiring 46 is exposed on the right side surface 20Af of the main body 20. The branch wirings 45 and 46 are used, for example, to supply power from outside the inductor component 10.

[0032] As shown in FIG. 3 , the first connecting conductor 51 and the second connecting conductor 52 extend along the Z direction. The Z direction is an example of a third direction. One end of the first connecting conductor 51 in the Z direction (the upper end of the first connecting conductor 51) is connected to the first external terminal 31. The other end of the first connecting conductor 51 in the Z direction (the lower end of the first connecting conductor 51) is connected to the pad 43. That is, the first connecting conductor 51 is connected to the first external terminal 31 and the coil wiring 40. One end of the second connecting conductor 52 in the Z direction (the upper end of the second connecting conductor 52) is connected to the second external terminal 32. The other end of the second connecting conductor 52 in the Z direction (the lower end of the second connecting conductor 52) is connected to the pad 44. That is, the second connecting conductor 52 is connected to the second external terminal 32 and the coil wiring 40.

[0033] The extending direction of the first connecting conductor 51 and the second connecting conductor 52 is not limited to the Z direction. The first connecting conductor 51 and the second connecting conductor 52 may extend in any direction intersecting the X and Y directions. For example, the first connecting conductor 51 may extend from the pad 43 toward the first external terminal 31 in a direction inclined with respect to the Z direction (in other words, diagonally upward).

[0034] 2, the first external terminal 31 covers a wider area than the first connecting conductor 51 when viewed along the Z direction, but may be included in the first connecting conductor 51 when viewed along the Z direction. The second external terminal 32 covers a wider area than the second connecting conductor 52 when viewed along the Z direction, but may be included in the second connecting conductor 52 when viewed along the Z direction.

[0035] 2, the maximum length L1 of the first connecting conductor 51 in the Y direction, which is the meandering direction of the coil wiring 40, is longer than the maximum length L2 of the first connecting conductor 51 in the X direction, which is the direction from the pad 43 to the pad 44. In this embodiment, similar to the first connecting conductor 51, the maximum length L3 of the second connecting conductor 52 in the Y direction is longer than the maximum length L4 of the second connecting conductor 52 in the X direction.

[0036] In this embodiment, the first connecting conductor 51 and the second connecting conductor 52 are rectangular with four chamfered vertices when viewed along the Z direction. Note that the shapes of the first connecting conductor 51 and the second connecting conductor 52 when viewed along the Z direction are not limited to rectangles with four chamfered vertices. For example, the vertices of the first connecting conductor 51 and the second connecting conductor 52 do not have to be chamfered. Furthermore, for example, the first connecting conductor 51 and the second connecting conductor 52 may have a shape other than a rectangle, such as a circle or an ellipse, when viewed along the Z direction. Furthermore, for example, the first connecting conductor 51 and the second connecting conductor 52 may have the same shape or size, or different shapes or sizes, when viewed along the Z direction.

[0037] When viewed along the Z direction, the coil center line P0, which is the center of the coil wiring 40 in the Y direction and extends parallel to the X direction, is located between the first center line P1, which is the center of the first connecting conductor 51 in the Y direction and extends parallel to the X direction, and the second center line P2, which is the center of the second connecting conductor 52 in the Y direction and extends parallel to the X direction. That is, in the Y direction, the coil center line P0 is located between the first center line P1 and the second center line P2. That is, the first center line P1 and the second center line P2 are located on opposite sides of the coil center line P0 in the Y direction. As a result, the first connecting conductor 51 is shifted in the Y direction with respect to the coil center line P0, and the second connecting conductor 52 is shifted in the Y direction to the opposite side of the first connecting conductor 51.

[0038] The coil center line P0 is located midway in the Y direction between positions P11 and P21, which will be described later. The first center line P1 is located midway in the Y direction between positions P10 and P13, which will be described later. The second center line P2 is located midway in the Y direction between positions P20 and P23, which will be described later.

[0039] When viewed along the Z direction, the first connecting conductor 51 and the second connecting conductor 52 are positioned away from the coil center line P0 in the Y direction. In other words, when viewed along the Z direction, the entire first connecting conductor 51 and the entire second connecting conductor 52 are not located on the coil center line P0 in the Y direction.

[0040] When viewed along the Z direction, the first connecting conductor 51 and the second connecting conductor 52 are positioned symmetrically with respect to the coil center point CP. The coil center point CP is a position that is the center of the coil wiring 40 in the Y direction and also the center of the coil wiring 40 in the X direction. In this embodiment, the coil center point CP is a position that is midway between positions P11 and P21 in the Y direction and also midway between the left side surface 20Ae (the left end of the coil wiring 40) and the right side surface 20Af (the right end of the coil wiring 40) in the X direction.

[0041] When viewed along the Z direction, distance D1 and distance D2 are equal. Distance D1 is the distance in the Y direction from the coil center line P0 to the first center line P1. Distance D2 is the distance in the Y direction from the coil center line P0 to the second center line P2.

[0042] In the Y direction, position P10 is between positions P11 and P12. Position P10 is the end of the first connecting conductor 51 in the Y direction (positions P10 and P13) that is farther from the coil center line P0 in the Y direction. Position P10 is an example of a conductor end. Position P11 is the position farthest from the coil center line P0 on the outer peripheral edge 40A of the coil wiring 40 that is on the same side as position P10 with respect to the coil center line P0. Position P11 is an example of a first position. Position P12 is the position farthest from the coil center line P0 on the inner peripheral edge 40B of the coil wiring 40 that is on the same side as position P10 with respect to the coil center line P0. Position P12 is an example of a second position.

[0043] In this embodiment, position P20 has the same positional relationship with respect to the coil wiring 40 as position P10, as will be described in detail below. In the Y direction, position P20 is located between positions P21 and P22. Position P20 is the end of the second connecting conductor 52 that is farther from the coil center line P0 in the Y direction than the coil center line P0 (positions P20 and P23). Position P20 is an example of a conductor end. Position P21 is the farthest position from the coil center line P0 on the outer circumferential edge 40A of the coil wiring 40 that is on the same side as position P20 with respect to the coil center line P0. Position P21 is an example of a first position. Position P22 is the farthest position from the coil center line P0 on the inner circumferential edge 40B of the coil wiring 40 that is on the same side as position P20 with respect to the coil center line P0. Position P22 is an example of a second position.

[0044] 3, the distance D3 between the coil wiring 40 and the upper surface 20Aa in the Z direction is shorter than the distance D4 between the coil wiring 40 and the lower surface 20Ab in the Z direction. In other words, the coil wiring 40 is located closer to the upper surface 20Aa than to the lower surface 20Ab in the Z direction.

[0045] As described above, the coil wiring 40 includes the folded portion 42, as shown in FIG. 2, and the folded portion 42 includes the curved portions 42A and 42B.

[0046] In the Y direction, the curved portions 42A and 42B are located on opposite sides of the coil center line P0. The coil wiring 40 is folded back from one side (forward) in the Y direction to the other side (backward) at the curved portion 42A, and from the other side (backward) in the Y direction to one side (forward) at the curved portion 42B.

[0047] As described above, in this embodiment, three of the six fold-back portions 42 are curved portions 42A, and the remaining three of the six fold-back portions 42 are curved portions 42B. The coil wiring 40 on the same side of the coil center line P0 as the first center line P1 in the Y direction is folded back at the curved portions 42A. The coil wiring 40 on the same side of the coil center line P0 as the second center line P2 in the Y direction is folded back at the curved portions 42B. In other words, the coil wiring 40 on the same side of the coil center line P0 as the first center line P1 in the Y direction is folded back three times, and the coil wiring 40 on the same side of the coil center line P0 as the second center line P2 in the Y direction is folded back three times. In other words, the coil wiring 40 is folded back three times on each side of the coil center line P0 in the Y direction. From the above, the number of folds of the coil wiring 40 on the same side of the coil center line P0 as the first center line P1 in the Y direction is the same as the number of folds of the coil wiring 40 on the same side of the coil center line P0 as the second center line P2 in the Y direction. Note that the coil wiring 40 may be folded back a number of times other than three, for example, four times, on both sides of the coil center line P0 in the Y direction.

[0048] As shown in FIG. 3, the seed layer 60 is located on the other side of the coil wiring 40 in the Z direction (below the coil wiring 40). In other words, the coil wiring 40 is laminated on the seed layer 60. The seed layer 60 is made of a conductive material. In this embodiment, the seed layer contains titanium (Ti) and copper (Cu). The seed layer may also contain titanium (Ti) and nickel (Ni). The seed layer 60 can also be considered to be part of the coil wiring. In this case, the coil wiring has a two-layer structure consisting of the seed layer 60 and the electroplated layer (coil wiring 40).

[0049] The internal insulating layer 70 is located on the other side of the seed layer 60 in the Z direction (below the seed layer 60). In other words, the seed layer 60 is stacked on the internal insulating layer 70. The internal insulating layer 70 is made of an insulating material that does not contain a magnetic material. The internal insulating layer 70 is made of, for example, an organic resin such as an epoxy resin, a phenolic resin, a polyimide resin, a liquid crystal polymer, or a combination thereof; a sintered body such as glass or alumina; or a thin film such as a silicon oxide film, a silicon nitride film, or a silicon oxynitride film.

[0050] Due to the provision of the internal insulating layer 70, the other side of the coil wiring 40 in the Z direction (the lower side of the coil wiring 40) is covered with an insulator. On the other hand, one side of the coil wiring 40 in the Z direction (the upper side of the coil wiring 40) is not covered with an insulator. In other words, the portions of the coil wiring 40 facing the first external terminal 31 and the second external terminal 32 are not covered with an insulator. In addition, the sides of the coil wiring 40 (directions perpendicular to the Z direction) are not covered with an insulator. In other words, the portions of the coil wiring 40 facing the front side surface 20Ac, the rear side surface 20Ad, the left side surface 20Ae, and the right side surface 20Af are not covered with an insulator.

[0051] In the inductor element 10 described above, the dimensions of each component are, for example, as follows.

[0052] The thickness (length in the Z direction) of the main body 20 is 10 μm. The thickness of the external insulating layer 21 is 7 μm. In each of the first external terminal 31 and the second external terminal 32, the Cu layer is 5 μm thick, the Ni layer is 5 μm thick, and the Au layer is 0.01 μm thick. The thickness of the coil wiring 40 is 45 μm. The width W of the coil wiring 40 when viewed along the Z direction (see FIG. 2) is 70 μm. The thickness of each of the first connecting conductor 51 and the second connecting conductor 52 is 50 μm. The thickness of the layer made of titanium (Ti) in the seed layer 60 is 0.04 μm. The thickness of the layer made of copper (Cu) in the seed layer 60 is 0.10 μm. The thickness of the internal insulating layer 70 is 5 μm. The area of ​​the main body 20 when viewed along the Z direction is 1570 μm (X direction) × 770 μm (Y direction). When viewed along the Z direction, the area of ​​each of the first external terminal 31 and the second external terminal 32 is 440 μm (X direction) × 690 μm (Y direction). When viewed along the Z direction, the area of ​​each of the first connecting conductor 51 and the second connecting conductor 52 is 150 μm (X direction) × 250 μm (Y direction). Note that the dimensions of each component are not limited to the above-mentioned dimensions.

[0053] In this embodiment, the distance D5 (see FIG. 2) along the X direction between two adjacent extension portions 41 of the coil wiring 40 is five times or more the median particle size D50 of the magnetic material contained in the main body 20. In other words, the median particle size D50 of the magnetic material contained in the main body 20 is one-fifth or less of the distance D5. As described above, in this embodiment, the median particle size D50 of the magnetic material contained in the main body 20 is 10 μm or less. In other words, when the median particle size D50 of the magnetic material contained in the main body 20 is 10 μm, the distance D5 is 50 μm or more.

[0054] In this embodiment, the distance D3 (see FIG. 3) between the coil wiring 40 and the upper surface 20Aa in the Z direction is four or more times the median particle size D50 of the magnetic material contained in the main body 20. As described above, the median particle size D50 of the magnetic material contained in the main body 20 is 10 μm or less. In other words, when the median particle size D50 of the magnetic material contained in the main body 20 is 10 μm, the distance D3 is 40 μm or more.

[0055] <Manufacturing method for inductor components> An example of a method for manufacturing the inductor component 10 according to this embodiment will be described below with reference to Figures 4 to 14 and 3. Figures 4 to 14 are schematic cross-sectional views illustrating the method for manufacturing the inductor component according to this embodiment of the present disclosure.

[0056] 4, an insulating film 82 is formed on the entire surface of a support substrate 81. The support substrate 81 is made of a ceramic such as ferrite or alumina. The insulating film 82 is made of a resin such as epoxy or polyimide.

[0057] 5, the internal insulating layer 70 is formed on a portion of the insulating film 82. The internal insulating layer 70 has the same shape as the coil wiring 40 when viewed along the Z direction.

[0058] Next, as shown in FIG. 6, a seed layer 60 is formed on the inner insulating layer 70 .

[0059] Next, as shown in FIG. 7 , the coil wiring 40 is formed on the seed layer 60. This will be described in detail below. First, a dry film resist (DFR) 90 is laminated on the insulating film 82 and the seed layer 60. Next, the DFR 90 is exposed to light. As a result, a pattern of the same shape as the portion of the DFR 90 directly above the seed layer 60 is transferred to the portion of the DFR 90 directly above the seed layer 60, excluding the coil wiring. Next, the DFR 90 is developed. As a result, the portion of the DFR 90 to which the pattern has not been transferred is removed, and the seed layer 60 is exposed in the portion where the DFR 90 has been removed. Next, electrolytic plating is performed. As a result, a metal film is formed. This metal film is the coil wiring 40.

[0060] Next, as shown in FIG. 8, a first connecting conductor 51 and a second connecting conductor 52 are formed on the coil wiring 40. The first connecting conductor 51 and the second connecting conductor 52 are formed in the same manner as the formation of the coil wiring 40, as follows: First, a DFR is laminated on the coil wiring 40 and the DFR 90 in FIG. 7, then the DFR is exposed and developed to form openings of the same shapes as the first connecting conductor 51 and the second connecting conductor 52, and then electrolytic plating is performed. The DFR is then peeled off. The first connecting conductor 51 is formed on a pad 43 at one end of the coil wiring 40, and the second connecting conductor 52 is formed on a pad 44 at the other end of the coil wiring 40.

[0061] Next, seed etching is performed, whereby the seed layer 60 exposed to the outside in Fig. 8 is removed, and only the seed layer 60 covered by the coil wiring 40 remains as shown in Fig. 9.

[0062] 10, a first magnetic layer 201 is formed on the insulating film 82 by known means, for example, thermocompression bonding of a magnetic composite film made of a metal filler and a resin. As a result, the internal insulating layer 70, the seed layer 60, the coil wiring 40, the first connecting conductor 51, and the second connecting conductor 52 are covered with the first magnetic layer 201.

[0063] 11, the first magnetic layer 201 is ground by known means, for example, mechanical polishing, to expose the first connecting conductors 51 and the second connecting conductors 52.

[0064] 12, a solder resist (external insulating layer 21) is formed on the first magnetic layer 201. The external insulating layer 21 is formed by known means such as exposure and development. The external insulating layer 21 is formed on a part of the first magnetic layer 201.

[0065] 13, the support substrate 81 and the insulating film 82 are removed by a known means, for example, mechanical polishing, thereby exposing the inner insulating layer 70.

[0066] Next, as shown in FIG. 14, the second magnetic layer 202 is formed by a known method, for example, thermocompression bonding of a magnetic composite film made of a metal filler and a resin. The second magnetic layer 202 is formed so as to cover the exposed internal insulating layer 70. The first magnetic layer 201 and the second magnetic layer 202 form the main body 20. In FIG. 14, the boundary between the first magnetic layer 201 and the second magnetic layer 202 is indicated by a dashed line. Note that in FIG. 14, the thickness (length in the Z direction) of the second magnetic layer 202 is greater than the thickness of the first magnetic layer 201. However, the thickness of the second magnetic layer 202 may be less than the thickness of the first magnetic layer 201.

[0067] 3, the first external terminal 31 and the second external terminal 32 are formed by known means such as plating, completing the inductor component 10. The first external terminal 31 and the second external terminal 32 are formed on the first magnetic layer 201 in a portion where the outer insulating layer 21 is not present. The first external terminal 31 is connected to the exposed first connecting conductor 51, and the second external terminal 32 is connected to the exposed second connecting conductor 52.

[0068] According to this embodiment, the coil center line P0 is located between the first center line P1 and the second center line P2. That is, the first connecting conductor 51 is offset to one side in the Y direction with respect to the coil center line P0, and the second connecting conductor 52 is offset to the other side in the Y direction with respect to the coil center line P0. This allows the first connecting conductor 51 to expand toward one end of the coil wiring 40 in the Y direction, and the second connecting conductor 52 to expand toward the other end of the coil wiring 40 in the Y direction. This allows the coil wiring 40 to meander more in the Y direction at the portions of the coil wiring 40 connected to the first connecting conductor 51 and the second connecting conductor 52, i.e., at both ends of the coil wiring 40 in the X direction. As a result, a decrease in the efficiency of obtaining inductance from the inductor component 10 can be suppressed.

[0069] According to this embodiment, when viewed along the Z direction, the first connecting conductor 51 and the second connecting conductor 52 are located at positions deviated from the coil center line P0 in the Y direction. This allows the first connecting conductor 51 and the second connecting conductor 52 to be made smaller, while increasing the meandering of the coil wiring 40 in the Y direction at both ends of the coil wiring 40 in the X direction.

[0070] According to this embodiment, the first connecting conductor 51 and the second connecting conductor 52 are positioned symmetrically to each other. This increases the degree of freedom in the mounting orientation of the inductor component 10 when mounting the inductor component 10 on another member such as a substrate. For example, it becomes unnecessary to provide a direction mark on the main body 20.

[0071] According to the present embodiment, position P10 is located between positions P11 and P12. That is, the first connecting conductor 51 extends to near the end of the coil wiring 40 in the Y direction. This allows the coil wiring 40 to meander more in the Y direction near the first connecting conductor 51.

[0072] According to this embodiment, the maximum length L1 of the first connecting conductor 51 in the Y direction is longer than the maximum length L2 of the first connecting conductor 51 in the X direction. In other words, the first connecting conductor 51 is long in the Y direction. This allows the coil wiring 40 to meander more in the Y direction near the first connecting conductor 51. Furthermore, because the first connecting conductor 51 is long in the Y direction, the fixing strength of the first connecting conductor 51 against the action of pressure along the Y direction on the main body 20 can be increased.

[0073] According to this embodiment, the coil wiring 40 is folded back the same number of times on both sides of the coil center line P0 in the Y direction. This allows the magnetic flux generated when a current flows through the coil wiring 40 to be symmetrical with respect to the center of the coil wiring 40. This increases the degree of freedom in the mounting orientation of the inductor component 10 when the inductor component 10 is mounted on another member such as a substrate.

[0074] According to this embodiment, the distance D3 in the Z direction between the coil wiring 40 and the upper surface 20Aa of the main body 20 is shorter than the distance D4 in the Z direction between the coil wiring 40 and the lower surface 20Ab. This allows the coil wiring 40, which generates heat when a current flows through it, to be closer to the conductive first external terminal 31 and second external terminal 32. As a result, the heat dissipation performance of the inductor component 10 can be improved.

[0075] According to the present embodiment, the first connecting conductor 51 and the second connecting conductor 52 extend along the Z direction. In this case, it may be difficult to fill the magnetic material around the first connecting conductor 51 and the second connecting conductor 52 during the manufacturing process of the inductor component 10.

[0076] According to this embodiment, the median particle size D50 of the magnetic material contained in the main body 20 is 10 μm or less. This allows for improved filling of the magnetic material compared to a configuration in which the median particle size D50 of the magnetic material contained in the main body 20 is greater than 10 μm.

[0077] According to this embodiment, the median particle size D50 of the magnetic material contained in the main body 20 is equal to or less than 1 / 5 of the distance D5 along the X direction between two adjacent extension portions 41 of the coil wiring 40. This improves the packing efficiency of the magnetic material compared to a configuration in which the median particle size D50 of the magnetic material contained in the main body 20 is greater than 1 / 5 of that distance.

[0078] As a result, in the manufacturing process of the inductor component 10, the first connecting conductor 51 and the second connecting conductor 52 can be easily filled with a magnetic material.

[0079] <Modification> Various modified examples of the inductor element 10 will be described below with reference to Figures 15 to 20. Figures 15 to 20 are schematic plan views of coil wiring of inductor elements according to modified examples of an embodiment of the present disclosure.

[0080] 2, the first connecting conductor 51 and the second connecting conductor 52 are positioned away from the coil center line P0 in the Y direction when viewed along the Z direction. However, as shown in Fig. 15, the first connecting conductor 51 and the second connecting conductor 52 may be arranged to straddle the coil center line P0 in the Y direction when viewed along the Z direction. In other words, the first connecting conductor 51 and the second connecting conductor 52 do not have to be positioned away from the coil center line P0 in the Y direction when viewed along the Z direction.

[0081] 15, the coil center line P0 is located between the first center line P1 and the second center line P2 when viewed along the Z direction. Therefore, in the configuration shown in Fig. 15, similar to the configuration shown in Fig. 2, the first connecting conductor 51 is shifted in the Y direction with respect to the coil center line P0, and the second connecting conductor 52 is shifted in the Y direction to the opposite side of the first connecting conductor 51 with respect to the coil center line P0. Note that in the configuration shown in Fig. 15, the distance D1 and the distance D2 are equal.

[0082] In the configuration shown in FIG. 2, position P10 is located between positions P11 and P12 in the Y direction, and position P20 is located between positions P21 and P22. However, positions P10 and P20 are not limited to the positions shown in FIG. 2. For example, as shown in FIG. 16, position P10 may be located at the same position as position P11 in the Y direction. Also, for example, position P20 may be located at the same position as position P21. Note that positions P10 and P11 may be located at slightly different positions in the Y direction due to dimensional tolerances or the like. In other words, position P10 may be located at approximately the same position as position P11 in the Y direction. The same applies to positions P20 and P21.

[0083] 16, the first connecting conductor 51 can be extended to the end of the coil wiring 40 in the Y direction. This allows the coil wiring 40 to meander more in the Y direction near the first connecting conductor 51.

[0084] 2, the first connecting conductor 51 and the second connecting conductor 52 are positioned symmetrically with respect to the coil center point CP when viewed along the Z direction. However, the first connecting conductor 51 and the second connecting conductor 52 may be positioned asymmetrically with respect to the coil center point CP when viewed along the Z direction.

[0085] According to this modification, the first connecting conductor 51 and the second connecting conductor 52 are positioned asymmetrically relative to each other. This increases the degree of freedom in the positions, sizes, and shapes of the first connecting conductor 51 and the second connecting conductor 52. This makes it easy to fine-tune the inductance of the inductor component 10, for example, by changing the positions, sizes, and shapes of the first connecting conductor 51 and the second connecting conductor 52.

[0086] Hereinafter, an example in which the first connecting conductor 51 and the second connecting conductor 52 are positioned asymmetrically with respect to the coil center point CP when viewed along the Z direction will be described with reference to FIGS.

[0087] 17, the distance D1 in the Y direction from the coil center line P0 to the first center line P1 may be different from the distance D2 in the Y direction from the coil center line P0 to the second center line P2. In the configuration shown in Fig. 17, the distance D2 is greater than the distance D1, but the distance D2 may also be smaller than the distance D1. Because the distance D1 is different from the distance D2, the first connecting conductor 51 and the second connecting conductor 52 are positioned asymmetrically with respect to the coil center point CP when viewed along the Z direction.

[0088] 17, the distance D1 in the Y direction from the coil center line P0 to the first center line P1 is different from the distance D2 in the Y direction from the coil center line P0 to the second center line P2. This makes it easy to configure inductor components 10 with different inductances. This makes it easy to fine-tune the inductance of inductor component 10.

[0089] As shown in Fig. 18, the size of the first connecting conductor 51 and the size of the second connecting conductor 52 may be different when viewed along the Z direction. In the configuration shown in Fig. 18, the size of the first connecting conductor 51 is smaller than the size of the second connecting conductor 52, but the size of the first connecting conductor 51 may be larger than the size of the second connecting conductor 52. Because the sizes of the first connecting conductor 51 and the second connecting conductor 52 are different when viewed along the Z direction, the first connecting conductor 51 and the second connecting conductor 52 are positioned asymmetrically with respect to the coil center point CP.

[0090] 18, inductor components 10 with different inductances can be easily configured by making the sizes of first connecting conductors 51 and second connecting conductors 52 different. This makes it easy to fine-tune the inductance of inductor component 10.

[0091] As shown in Fig. 19, the first connecting conductor 51 and the second connecting conductor 52 may have different shapes when viewed along the Z direction. In the configuration shown in Fig. 19, the first connecting conductor 51 has an elliptical shape and the second connecting conductor 52 has a rectangular shape when viewed along the Z direction. The shapes of the first connecting conductor 51 and the second connecting conductor 52 are arbitrary. Because the first connecting conductor 51 and the second connecting conductor 52 have different shapes when viewed along the Z direction, the first connecting conductor 51 and the second connecting conductor 52 are positioned asymmetrically with respect to the coil center point CP.

[0092] 19, inductor components 10 with different inductances can be easily configured by differentiating the shape of first connecting conductor 51 from the shape of second connecting conductor 52. This makes it easy to fine-tune the inductance of inductor component 10.

[0093] In the configuration shown in FIG. 2 , the number of folds of the coil wiring 40 on the same side of the coil center line P0 as the first center line P1 in the Y direction is the same as the number of folds of the coil wiring 40 on the same side of the coil center line P0 as the second center line P2 in the Y direction. Specifically, in the configuration shown in FIG. 2 , the coil wiring 40 is folded three times on each side of the coil center line P0 in the Y direction. However, the number of folds of the coil wiring 40 on the same side of the coil center line P0 as the first center line P1 in the Y direction may be different from the number of folds of the coil wiring 40 on the same side of the coil center line P0 as the second center line P2 in the Y direction. For example, in the configuration shown in FIG. 20 , the number of folds of the coil wiring 40 on the same side of the coil center line P0 as the first center line P1 in the Y direction is three, and the number of folds of the coil wiring 40 on the same side of the coil center line P0 as the second center line P2 in the Y direction is two.

[0094] The inductor component described above can also be expressed as follows.

[0095] (1) An inductor component according to one aspect of the present disclosure includes: The main body and a meander-shaped coil wiring provided inside the main body, meandering in a first direction and extending in a second direction intersecting the first direction; a first external terminal and a second external terminal provided on an outer surface of the main body; a first connecting conductor provided inside the main body, extending along a third direction intersecting the first direction and the second direction, and connected to the first external terminal and the coil wiring; a second connecting conductor provided inside the main body, extending along the third direction, and connected to the second external terminal and the coil wiring; When viewed along the third direction, a coil center line that is the center of the coil wiring in the first direction and extends parallel to the second direction is located between a first center line that is the center of the first connecting conductor in the first direction and extends parallel to the second direction, and a second center line that is the center of the second connecting conductor in the first direction and extends parallel to the second direction.

[0096] (2) In the inductor component of (1), When viewed along the third direction, the first connecting conductor and the second connecting conductor may be positioned away from the coil center line in the first direction.

[0097] (3) In the inductor component of (1) or (2), When viewed along the third direction, the first external terminal and the second external terminal may be positioned point-symmetrically with respect to a coil center point, which is the center of the coil wiring in the first direction and the center of the coil wiring in the second direction.

[0098] (4) In the inductor component of (1) or (2), When viewed along the third direction, the first external terminal and the second external terminal may be located asymmetrically with respect to a coil center point, which is the center of the coil wiring in the first direction and the center of the coil wiring in the second direction.

[0099] (5) In the inductor component of (4), The distance in the first direction from the coil center line to the first center line may be different from the distance in the first direction from the coil center line to the second center line.

[0100] (6) In the inductor component of (4) or (5), When viewed along the third direction, the first connecting conductor and the second connecting conductor may have different sizes.

[0101] (7) In any one of the inductor components (4) to (6), When viewed along the third direction, the first connecting conductor and the second connecting conductor may have different shapes.

[0102] (8) In any one of the inductor components (1) to (7), In the first direction, the conductor end of the first connecting conductor that is farther from the coil center line may be located between a first position on the outer edge of the coil wiring that is on the same side of the coil center line as the conductor end, and a second position on the inner edge of the coil wiring that is on the same side of the coil center line as the conductor end, that is farthest from the coil center line.

[0103] (9) In any one of the inductor components (1) to (7), In the first direction, the conductor end of the first connecting conductor that is farther from the coil center line and the position of the outer edge of the coil wiring that is on the same side of the coil center line as the conductor end may be at the same position or approximately the same position.

[0104] (10) In any one of the inductor components (1) to (9), The maximum length of the first connecting conductor in the first direction may be longer than the maximum length of the first connecting conductor in the second direction.

[0105] (11) In any one of the inductor components (1) to (10), The number of folds of the coil wiring on the same side as the first center line relative to the coil center line in the first direction may be the same as the number of folds of the coil wiring on the same side as the second center line relative to the coil center line in the first direction.

[0106] (12) In any one of the inductor components (1) to (11), The outer surface of the body is a first surface on which the first external terminal and the second external terminal are provided and which faces one of the third directions; a second surface facing the other of the third direction and sandwiching the coil wiring between the first surface and the second surface, The distance between the coil wiring and the first surface in the third direction may be shorter than the distance between the coil wiring and the second surface in the third direction.

[0107] (13) In any one of the inductor components (1) to (12), The body may comprise a magnetic material; The magnetic material contained in the main body may have a median particle size of 10 μm or less.

[0108] (14) In any one of the inductor components (1) to (13), The body may comprise a magnetic material; The coil wiring may include a plurality of extending portions each extending along the first direction, and a folded portion connecting two adjacent extending portions among the plurality of extending portions, The median particle size of the magnetic material contained in the main body may be equal to or less than 1 / 5 of the distance along the second direction between the two adjacent extension portions.

[0109] Any of the various embodiments described above may be combined appropriately to achieve the effects of each of them.

[0110] While the present invention has been fully described in connection with preferred embodiments, with appropriate reference to the drawings, various changes and modifications will become apparent to those skilled in the art, and it is to be understood that such changes and modifications are included within the scope of the present invention as defined by the appended claims unless they depart therefrom. [Explanation of symbols]

[0111] 10 Inductor components 20 Main Unit 20A external 20Aa Top surface (1st surface) 20Ab bottom surface (second surface) 31 First external terminal 32 Second external terminal 40 Coil wiring 41 Extension 42 Folded section 51 First connecting conductor 52 Second connecting conductor CP coil center point D1 Distance D2 distance D3 Distance D4 Distance D5 distance L1 maximum length L2 maximum length P0 Coil center line P1 1st Chuo Line P2 2nd Chuo Line P10 position (conductor end) P11 position (1st position) P12 position (2nd position)

Claims

1. The main body and a meander-shaped coil wiring provided inside the main body, meandering in a first direction and extending in a second direction intersecting the first direction; a first external terminal and a second external terminal provided on an outer surface of the main body; a first connecting conductor provided inside the main body, extending along a third direction intersecting the first direction and the second direction, and connected to the first external terminal and the coil wiring; a second connecting conductor provided inside the main body, extending along the third direction, and connected to the second external terminal and the coil wiring; An inductor component, wherein, when viewed along the third direction, a coil center line that is the center of the coil wiring in the first direction and extends parallel to the second direction is located between a first center line that is the center of the first connecting conductor in the first direction and extends parallel to the second direction, and a second center line that is the center of the second connecting conductor in the first direction and extends parallel to the second direction.

2. The inductor component according to claim 1 , wherein the first connecting conductor and the second connecting conductor are positioned away from the coil center line in the first direction when viewed along the third direction.

3. The inductor component of claim 1 or 2, wherein, when viewed along the third direction, the first external terminal and the second external terminal are positioned point-symmetrically with respect to a coil center point, which is the center of the coil wiring in the first direction and the center of the coil wiring in the second direction.

4. An inductor component as described in claim 1 or 2, wherein, when viewed along the third direction, the first external terminal and the second external terminal are located asymmetrically with respect to a coil center point which is the center of the coil wiring in the first direction and the center of the coil wiring in the second direction.

5. The inductor component according to claim 4 , wherein a distance in the first direction from the coil center line to the first center line is different from a distance in the first direction from the coil center line to the second center line.

6. The inductor component according to claim 4 , wherein the first connecting conductor and the second connecting conductor have different sizes when viewed along the third direction.

7. The inductor component according to claim 4 , wherein the first connecting conductor and the second connecting conductor have different shapes when viewed along the third direction.

8. 3. An inductor component as described in claim 1 or 2, wherein, in the first direction, the conductor end of the first connecting conductor that is farthest from the coil center line is located between a first position on the outer edge of the coil wiring that is on the same side of the coil center line as the conductor end, and a second position on the inner edge of the coil wiring that is on the same side of the coil center line as the conductor end, that is farthest from the coil center line.

9. 3. An inductor component as described in claim 1 or 2, wherein, in the first direction, the conductor end of the first connecting conductor that is farthest from the coil center line and the position of the outer edge of the coil wiring that is on the same side of the coil center line as the conductor end are at the same position or approximately the same position.

10. The inductor component according to claim 1 , wherein a maximum length of the first connecting conductor in the first direction is longer than a maximum length of the first connecting conductor in the second direction.

11. 3. The inductor component according to claim 1, wherein the number of folds of the coil wiring on the same side as the first center line relative to the coil center line in the first direction is the same as the number of folds of the coil wiring on the same side as the second center line relative to the coil center line in the first direction.

12. The outer surface of the body is a first surface on which the first external terminal and the second external terminal are provided and which faces one of the third directions; a second surface facing the other of the third direction and sandwiching the coil wiring between the first surface and the second surface, The inductor component according to claim 1 , wherein a distance between the coil wiring and the first surface in the third direction is shorter than a distance between the coil wiring and the second surface in the third direction.

13. the body includes a magnetic material; 3. The inductor component according to claim 1, wherein the magnetic material contained in the body has a median particle size of 10 [mu]m or less.

14. the body includes a magnetic material; the coil wiring includes a plurality of extending portions each extending along the first direction and a folded portion connecting two adjacent extending portions among the plurality of extending portions, 3 . The inductor component according to claim 1 , wherein a median grain size of the magnetic material contained in the body is equal to or less than ⅕ of a distance along the second direction between the two adjacent extension portions.

Images