Vibration measuring device

Abstract

To provide a vibration measuring device capable of outputting information for appropriately analyzing a cause of measured vibrations.SOLUTION: A vibration measuring device 20 installed in a carrying vehicle 3 comprises: a vibration measuring part 21 for measuring vibrations; a position information acquisition part 22 for acquiring position information indicating a position of the carrying vehicle 3; a state information acquisition part 23 for acquiring carrying vehicle state information indicating a state of the carrying vehicle 3; a recording part 24 for recording a measurement result obtained by the vibration measuring part 21, the carrying vehicle state information, and the position information in association with one another; and an output part 25 for outputting information recorded in the recording part 24.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a vibration measuring device mounted on a transport vehicle.

Background Art

[0002] An example of such a vibration measuring device is disclosed in Patent Document 1 below (Japanese Patent Application Laid-Open No. 2008-181245). In the following description of the background art, the reference numerals and names in Patent Document 1 are cited within parentheses.

[0003] The vibration measuring device (vibration measuring instrument 21) of Patent Document 1 is mounted on a transport vehicle (driverless transport vehicle 10) that travels along a travel path (travel rail 2). Further, the transport vehicle (10) is also equipped with a travel position detection sensor (22) that detects the current travel position, and the transport vehicle (10) communicates the travel position where a vibration value equal to or greater than a predetermined value is detected to a subsequent transport vehicle (10). Then, when the transport vehicle (10) receives communication of the travel position where a vibration value equal to or greater than a predetermined value is detected from a preceding transport vehicle (10), it performs control to decelerate the travel speed when traveling at that position. Also, when a vibration value equal to or greater than a predetermined value is detected by the vibration detector (21) of the vehicle itself, the transport vehicle (10) also performs control to decelerate the travel speed of the vehicle itself.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Patent Document 1 describes that by mounting a vibration measuring device (21) and a travel position detection sensor (22) on the transport vehicle (10), even when an unexpected situation such as damage to the travel rail occurs, the abnormality can be confirmed as soon as one transport vehicle (10) passes, so that the spread of damage due to vibration can be prevented.

[0006] However, when vibration measuring devices are mounted on the transport vehicle, the vibration of the vehicle may be amplified due to the vehicle's condition, such as acceleration and deceleration. Therefore, even if a large vibration is measured on one transport vehicle, it cannot be definitively said that the vibration is caused by a malfunction in the rails or other parts of the transport path.

[0007] Therefore, it is necessary to be able to properly analyze the cause of the measured vibrations. [Means for solving the problem]

[0008] In view of the above, the characteristic configuration of the vibration measuring device is a vibration measuring device mounted on a transport vehicle, comprising: a vibration measuring unit for measuring vibrations; a position information acquisition unit for acquiring position information indicating the position of the transport vehicle; a state information acquisition unit for acquiring transport vehicle state information indicating the state of the transport vehicle; a recording unit for recording the measurement results from the vibration measuring unit, the transport vehicle state information, and the position information in relation to each other; and an output unit for outputting the information recorded in the recording unit. The vibration measuring unit is housed in a container transported by the transport vehicle, the container has a plurality of slots into which plate-shaped members, which are articles to be transported by the transport vehicle, are inserted, and comprises a first support member and a second support member inserted into different slots, the vibration measuring unit comprises a vibration sensor and a transmitter that transmits the measurement results from the vibration sensor and is supported by the first support member, the recording unit comprises a receiver that receives the measurement results from the transmitter and a storage device that stores the measurement results received by the receiver and is supported by the second support member. It's at a single point.

[0009] This configuration allows for the acquisition of information indicating vibrations measured at each point along the transport vehicle's travel path and the state of the transport vehicle at those points. As a result, users who receive this information can appropriately understand at which points along the transport vehicle's travel path the vibrations become stronger and what state the transport vehicle is in at those points. In other words, the vibration measuring device according to this configuration can output information necessary for appropriately analyzing the cause of the measured vibrations. In addition, this configuration allows the vibration measuring unit to measure vibrations inside the container during transport. In other words, the vibration measuring unit can measure vibrations that are close to those transmitted to the goods while the transport vehicle is moving with the goods inside the container. Furthermore, with this configuration, the vibration measurement unit and recording unit can be easily installed inside the container by inserting the first and second support members into the slots. Furthermore, with this configuration, the multiple slots provided in the container can be used to insert plate-shaped members, which are the items to be transported, or to insert the first support members that support the vibration sensors of the vibration measurement unit. In other words, the vibration sensors can be placed inside the container in the same environment as the plate-shaped members, which are the items to be transported. Therefore, when the container is transported on a transport vehicle with the first support members that support the vibration sensors inserted into the slots, the vibration measurement unit can measure vibrations that are close to the vibrations acting on the plate-shaped members, which are the items to be transported. Moreover, it is possible to realize a vibration measurement device that can perform vibration measurements on any transport vehicle without having to prepare a special transport vehicle for vibration measurement. Furthermore, with this configuration, since the first support member that supports the vibration sensor and the second support member that supports the receiver and memory device are separate components and inserted into different slots, the influence of the receiver and memory device on vibration measurement by the vibration sensor can be minimized, which has the advantage of making it easier to improve the accuracy of vibration measurement.

[0010] Further features and advantages of the vibration measuring device are described below with reference to the drawings, relating to the embodiments described below. This becomes clear from the description. [Brief explanation of the drawing]

[0011] [Figure 1] Plan view of an article handling facility where vibration measurements are performed using a vibration measuring device. [Figure 2] Side view of a transport vehicle equipped with a vibration measuring device. [Figure 3] A schematic block diagram showing the configuration of the transport vehicle and vibration measuring device. [Figure 4] Diagram illustrating the operation of the guide wheel. [Figure 5] Diagram illustrating the operation of the guide wheel. [Figure 6] Diagram illustrating the detection area of ​​the object detection sensor on the transport vehicle. [Figure 7] Diagram illustrating the detection area of ​​the object detection sensor on the transport vehicle. [Figure 8] A schematic block diagram showing the configuration of the container and vibration measuring device. [Modes for carrying out the invention]

[0012] An embodiment of the vibration measuring device 20 will be described based on the drawings. In this embodiment, an example will be described in which the vibration measuring device 20 is mounted on a transport vehicle 3 that transports goods, and the vibration measuring device 20 performs vibration measurement. Figure 1 is a plan view of the goods transport equipment 200 on which vibration measurement is performed using the vibration measuring device 20. Figure 2 is a side view of the transport vehicle 3 on which the vibration measuring device 20 is mounted. Figure 3 is a schematic block diagram showing the configuration of the transport vehicle 3 and the vibration measuring device 20. Figures 4 and 5 are explanatory diagrams of the operating state of the guide wheels 17 provided on the transport vehicle 3. Furthermore, in the following description, the direction along the travel path 1 will be referred to as the travel direction Y, and the direction along the horizontal plane and perpendicular to the travel direction Y will be referred to as the width direction X. The vertical direction Z is the direction perpendicular to the travel direction Y and the width direction X.

[0013] The article transfer equipment 200 includes a traveling rail 2 suspended and supported from the ceiling and installed along the traveling path 1, and a transfer cart 3 suspended and supported by the traveling rail 2 and traveling on the traveling rail 2 along the traveling path 1 to transfer the container W. That is, the transfer cart 3 described in this embodiment is a so-called ceiling transfer cart. The transfer cart 3 transfers, for example, a FOUP (Front Opening Unified Pod) or the like that houses an article such as a wafer used as a material for a semiconductor substrate as the container W.

[0014] As shown in FIG. 1, the traveling path 1 includes, for example, a single annular main path 1M, a plurality of annular sub-paths 1S passing through a plurality of processing devices 202, and a maintenance path 1C provided in a maintenance area E2 described later. The traveling path 1 is one-way. The transfer cart 3 travels from the upstream side in the traveling direction Y to the downstream side in the traveling direction Y of the traveling path 1. Further, the traveling path 1 includes a transfer area E1 that is an area through which the container W passes when being transferred, and a maintenance area E2 that is an area through which the transfer cart 3 passes when being maintained. In the maintenance area E2, for example, a maintenance lifter 204 for lowering the transfer cart 3 suspended from the traveling rail 2 to the ground side is arranged for maintenance. As shown in FIGS. 4 and 5, the transfer cart 3 is guided by a pair of traveling rails 2.

[0015] The processing device 202 is, for example, a semiconductor processing device or the like for performing various processes such as exposure processing and etching processing. In that case, the above-mentioned FOUP is transferred as the container W in the article transfer equipment 200. Note that the container W and the article housed in the container W may be other objects. For example, the transfer cart 3 may transfer a reticle used for wafer exposure processing in the manufacturing process of a semiconductor substrate as an article and a reticle pod that houses the reticle as the container W. A mounting table 203 is provided in each processing device 202.

[0016] As shown in Fig. 2, the carrier 3 includes a traveling mechanism 5 guided by a traveling rail 2 suspended and supported from the ceiling along a traveling path 1 and traveling along the traveling path 1, and a carrier body 12 located below the traveling rail 2 and suspended and supported by the traveling mechanism 5. Further, the carrier 3 includes a holding mechanism 6 for suspending and holding the container W, and a lifting mechanism 7 for lifting and lowering the holding mechanism 6. As shown in Fig. 2, the carrier 3 travels with the holding mechanism 6 lifted to transport the container W.

[0017] As shown in Figs. 2, 4, and 5, each traveling mechanism 5 is provided with a pair of traveling wheels 15 rotationally driven by an electric traveling actuator 35. The traveling actuator 35 is, for example, a motor (traveling motor). The traveling wheels 15 roll on the traveling surfaces formed on the respective upper surfaces of the traveling rails 2. Although not shown in detail, the traveling mechanism 5 is provided with a pair of traveling auxiliary wheels 16 that freely rotate around an axis along the vertical direction Z (around the vertical axis) in a state of contacting the respective inner surfaces of the pair of traveling rails 2.

[0018] As shown in Figs. 4 and 5, a guide rail 13 extending in the direction along the traveling direction Y of the carrier 3 is provided in the branch section of the traveling path 1. Although not shown, a similar guide rail 13 is also provided in the merging section of the traveling path 1. The guide rail 13 includes a pair of guide surfaces 14 (first guide surface 14a, second guide surface 14b). The pair of guide surfaces 14 (first guide surface 14a, second guide surface 14b) face opposite sides in the width direction X orthogonal to the traveling direction Y and each extend along the traveling direction Y. Further, the carrier 3 is provided with a guide wheel 17 that rotates around a vertical axis along the vertical direction Z (around the vertical axis). The guide wheel 17 is provided so as to be positionally changeable to the right and left of the guide rail 13 disposed at the center between the pair of left and right traveling rails 2, and rotates in contact with the first guide surface 14a which is the guide surface 14 on the right side of the guide rail 13, or the second guide surface 14b which is the guide surface 14 on the left side.

[0019] The vehicle control unit 4 of the transport vehicle 3 causes the running mechanism 5 to perform a switching operation to selectively contact either of the pair of guide surfaces 14 with the guide wheels 17 in branching and merging sections, as described below.

[0020] Figure 4 shows an example of the transport vehicle 3 proceeding along the right-hand path in the direction of travel Y (straight ahead in this example) in a branching section. In this case, the vehicle control unit 4 positions the guide wheel 17 on the side of the first guide surface 14a of the guide rail 13 (right side in the direction of travel Y). As a result, the transport vehicle 3 travels with the first guide surface 14a of the guide rail 13 and the guide wheel 17 in contact. As shown in Figure 4, when the transport vehicle 3 travels straight ahead along the right-hand path (first side X1 in the width direction) in a branching section, one of the pair of running rails 2 (the left side in this example) is interrupted, and the left running wheel 15 and running auxiliary wheel 16 derail. Note that the running auxiliary wheel 16 is omitted in Figure 4 for simplification. However, the guide rail 13 supports the load of the transport vehicle 3 by receiving it via the guide wheel 17, which prevents the transport vehicle 3 from falling off the running rail 2, allowing the transport vehicle 3 to travel straight ahead in the branching section.

[0021] Figure 5 shows an example of the transport vehicle 3 proceeding along the left-hand path in the direction of travel Y at a branching section (in this example, branching along a curved path). In this case, the vehicle control unit 4 positions the guide wheel 17 on the side of the second guide surface 14b of the guide rail 13 (the left side in the direction of travel Y). As a result, the transport vehicle 3 is guided with the second guide surface 14b of the guide rail 13 and the guide wheel 17 in contact. As shown in Figure 5, when the transport vehicle 3 branches off to the left (second side X2 in the width direction) at a branching section, one of the pair of running rails 2 (in this case, the right side) is interrupted, and the running wheel 15 and running auxiliary wheel 16 on the right side derail. However, the guide rail 13 supports the transport vehicle 3 by receiving its load via the guide wheel 17, preventing the transport vehicle 3 from falling off the running rail 2, and allowing the transport vehicle 3 to travel along the branching section.

[0022] As shown in Figure 3, in addition to the above, the transport vehicle 3 is equipped with a position detection sensor 8, a speed sensor 9, an object detection sensor 10, and a communication unit 11.

[0023] The vehicle control unit 4 controls the operation of the transport vehicle 3. For example, the vehicle control unit 4 can communicate wirelessly with the equipment control unit H, which manages the entire goods transport equipment 200, via the communication unit 11. Based on transport commands from the equipment control unit H, the vehicle control unit 4 autonomously controls the transport vehicle 3 to move, transport the container W between different mounting platforms 203, stop above the designated mounting platform 203, and transfer the container W by raising and lowering the holding mechanism 6.

[0024] The position detection sensor 8 is used to detect the location of the transport vehicle 3. For example, as shown in Figure 3, position indicators B indicating the position along the travel path 1 are placed along the travel path 1. Position indicators B can be, for example, one-dimensional or two-dimensional barcodes, or markers with numbers or letters written on them. The position detection sensor 8 can be a barcode reader, an image recognition device, or a character recognition device that recognizes numbers or letters. The position detection sensor 8 can also derive the travel distance of the transport vehicle 3 using a sensor that detects the rotation angle of the axle (not shown) of the travel wheels 15. Based on the travel distance of the transport vehicle 3 since detecting the position indicator B, the position detection sensor 8 can detect the current position of the transport vehicle 3 on the travel path 1. The position information detected by the position detection sensor 8 is transmitted to the vehicle control unit 4. In this way, the transport vehicle 3 can detect its position on the travel path 1 using multiple position indicators B. Furthermore, the transport vehicle 3 can sequentially transmit the detected location information to the equipment control unit H, and the equipment control unit H can transmit a transport command generated based on that location information to the transport vehicle 3.

[0025] The speed sensor 9 is used to detect the travel speed of the transport vehicle 3. The speed sensor 9 can be implemented using, for example, a sensor that detects the rotation angle of the axle (not shown) of the traveling wheel 15. In that case, the speed sensor 9 can derive the rotation speed of the axle (not shown) based on the rotation angle of the axle (not shown) of the traveling wheel 15, and derive the travel speed of the transport vehicle 3 based on that rotation speed. The speed sensor 9 can then transmit the derived travel speed to the vehicle control unit 4. Alternatively, the speed sensor 9 may sequentially transmit the measured rotation angle of the axle (not shown) of the traveling wheel 15 to the vehicle control unit 4, and the vehicle control unit 4 may derive the travel speed of the transport vehicle 3 based on the value of that rotation angle.

[0026] The object detection sensor 10 is used to detect objects that are obstacles to the moving transport vehicle 3. For example, multiple transport vehicles 3 exist on the travel path 1 and are traveling simultaneously. Therefore, in order to prevent collisions with other transport vehicles 3, the transport vehicle 3 is equipped with an object detection sensor 10 that detects objects that are within a set area in front of it in the travel direction Y.

[0027] Figures 6 and 7 illustrate the detection area 18 of the object detection sensor 10 of the transport vehicle 3. As shown in Figure 6, when the area in front of the transport vehicle 3 in the direction of travel Y is a straight section, the detection area 18 set in front of the transport vehicle 3 in the direction of travel Y is shaped to extend longer along the direction of travel Y than along the width direction X. In contrast, as shown in Figure 7, when the area in front of the transport vehicle 3 in the direction of travel Y is a curved section, the detection area 18 set in front of the transport vehicle 3 in the direction of travel Y is shaped to extend longer along the width direction X than along the direction of travel Y, in accordance with the curved shape of the travel path 1.

[0028] Next, the vibration measuring device 20 mounted on the transport vehicle 3 will be described. As shown in Figure 3, the vibration measuring device 20 includes a vibration measuring unit 21 for measuring vibrations, a position information acquisition unit 22 for acquiring position information indicating the position of the transport vehicle 3, a state information acquisition unit 23 for acquiring transport vehicle state information indicating the state of the transport vehicle 3, a recording unit 24 for recording the measurement results from the vibration measuring unit 21, the transport vehicle state information, and the position information in relation to each other, and an output unit 25 for outputting the information recorded in the recording unit 24. The vibration measuring device 20 is equipped with information communication functions, information calculation processing functions, information storage functions, etc., and as will be described later, at least some of these functions may be used to realize the functions of the vibration measuring unit 21, the position information acquisition unit 22, the state information acquisition unit 23, the recording unit 24, and the output unit 25. Furthermore, the vibration measuring device 20 may be realized by a single device equipped with these functions, or by multiple devices equipped with these functions.

[0029] The vibration measurement unit 21 can be implemented using a sensor capable of measuring physical quantities representing vibration, such as amplitude, frequency, and acceleration. Alternatively, the vibration measurement unit 21 may be configured to measure vibrations in three mutually orthogonal directions: the X, Y, and Z directions. Or, the vibration measurement unit 21 may be configured to measure vibrations in two or one of the X, Y, and Z directions. The vibration measurement unit 21 may acquire time information regarding the time the measurement results were obtained, along with the vibration measurement results.

[0030] The location information acquisition unit 22 acquires location information indicating the position of the transport vehicle 3. For example, the location information acquisition unit 22 uses the information communication function of the vibration measuring device 20 to acquire location information indicating the position of the transport vehicle 3 detected by the position detection sensor 8 of the transport vehicle 3. The location information acquisition unit 22 may also acquire time information about the time when the location information was detected along with the location information.

[0031] The status information acquisition unit 23 acquires transport vehicle status information indicating the status of the transport vehicle 3. For example, the status information acquisition unit 23 acquires transport vehicle status information measured by the transport vehicle 3 by utilizing the information communication function provided by the vibration measuring device 20. The status information acquisition unit 23 may also acquire time information about the time when the transport vehicle status information was obtained, along with the transport vehicle status information.

[0032] The transport vehicle status information includes at least one of the following: the travel speed of the transport vehicle 3, the acceleration state of the transport vehicle 3, the operating state of the operating mechanism provided by the transport vehicle 3, and the detection state of the sensors provided by the transport vehicle 3 (e.g., object detection sensor 10).

[0033] The travel speed of the transport vehicle 3 is the value measured by the speed sensor 9 of the transport vehicle 3. The acceleration state of the transport vehicle 3 (i.e., acceleration indicating acceleration, deceleration, constant speed, etc.) can be determined by calculating the change in travel speed measured by the speed sensor 9 of the transport vehicle 3. The vehicle control unit 4 of the transport vehicle 3 may calculate the acceleration state of the transport vehicle 3, and the state information acquisition unit 23 of the vibration measuring device 20 may acquire the calculated acceleration state. Alternatively, the state information acquisition unit 23 of the vibration measuring device 20 may calculate the acceleration state from the acquired travel speed of the transport vehicle 3 using the calculation processing function of the vibration measuring device 20. For example, it is thought that the vibration of the transport vehicle 3 will be relatively large when the transport vehicle 3 is accelerating or decelerating, and relatively small when the transport vehicle 3 is traveling at a constant speed.

[0034] The operating state of the operating mechanisms of the transport vehicle 3 refers to information about the operating state of the transport vehicle 3's operating mechanisms, such as the travel mechanism 5, the holding mechanism 6, and the lifting mechanism 7. For example, the transport vehicle 3 is equipped with guide wheels 17 as part of the travel mechanism 5, as shown in Figures 4 and 5, and their operation is controlled by the vehicle control unit 4. The state information acquisition unit 23 can acquire information from the vehicle control unit 4 of the transport vehicle 3 indicating whether the guide wheels 17 are located on the right or left side in the direction of travel Y. Note that the operating state is not limited to the state of the guide wheels 17 (i.e., the travel mechanism 5). For example, it could be the operating state of the lifting mechanism 7, the operating state of the holding mechanism 6, etc. For example, when the guide wheels 17 of the travel mechanism 5 are operating (i.e., when the position of the guide wheels 17 switches between left and right), the vibration of the transport vehicle 3 is expected to be relatively large.

[0035] The detection state of the object detection sensor 10 on the transport vehicle 3 includes, for example, information about the shape of the detection area 18 of the object detection sensor 10 shown in Figures 6 and 7, and information about whether or not an object has been detected. The state of the detection area 18 of the object detection sensor 10 on the transport vehicle 3 is controlled by the vehicle control unit 4. Information on whether or not the object detection sensor 10 has detected an object is also transmitted to the vehicle control unit 4. The state information acquisition unit 23 can then acquire information about the detection state of the object detection sensor 10 on the transport vehicle 3 from the vehicle control unit 4 of the transport vehicle 3. For example, if the object detection sensor 10 detects an object, the vibration of the transport vehicle 3 is expected to become relatively large due to reasons such as the transport vehicle 3 decelerating.

[0036] As described above, the status information acquisition unit 23 can acquire information indicating the behavior of the transport vehicle 3, which may affect the vibrations measured by the vibration measurement unit 21, as transport vehicle status information. Therefore, by referring to such transport vehicle status information, the user can easily analyze whether or not the vibrations are strongly influenced by the state of the transport vehicle 3.

[0037] The recording unit 24 records the measurement results (vibration information) from the vibration measurement unit 21, the transport vehicle status information, and the location information in an associated manner. The recording unit 24 can be realized by utilizing the information storage function provided by the vibration measurement device 20. For example, if the measurement results from the vibration measurement unit 21, the transport vehicle status information, and the location information are all associated with time information as described above, the recording unit 24 can record the measurement results from the vibration measurement unit 21, the transport vehicle status information, and the location information in an associated manner at the same time or within a predetermined time range. If that information is not associated with time information, the recording unit 24 can record the measurement results from the vibration measurement unit 21, the transport vehicle status information, and the location information recorded simultaneously or within a predetermined time period as a single dataset in an associated manner.

[0038] Furthermore, the vibration information may be physical quantities representing vibration, such as amplitude, frequency, and acceleration, measured by the vibration measurement unit 21, or it may be values ​​calculated from these quantities. For example, the vibration information may be the root mean square (RMS) calculated from the vibration waveform.

[0039] Thus, the recording unit 24 can record transport vehicle travel data which is data in which position information indicating the position of the transport vehicle 3 and vibration information indicating vibrations measured by the transport vehicle 3 are associated, or transport vehicle travel data which is data in which position information indicating the position of the transport vehicle 3, vibration information indicating vibrations measured by the transport vehicle 3 and transport vehicle status information indicating the state of the transport vehicle 3 are associated. Time information may be associated with the position information, vibration information and transport vehicle status information included in the transport vehicle travel data. In addition, the recording unit 24 can record information about the positions that the transport vehicle 3 passed through during its journey as route map data which is data of the travel route 1 that the transport vehicle 3 traveled. Time information may be associated with the information about the positions that the transport vehicle 3 passed through during its journey.

[0040] The output unit 25 outputs the information recorded in the recording unit 24. For example, the output unit 25 can use the information communication function of the vibration measuring device 20 to output the information recorded in the recording unit 24 to other devices that can communicate with the vibration measuring device 20. In addition to outputting information in a manner that transmits it to other devices, the output unit 25 may also output information to the display device 41, print it on paper, or output it to a portable storage device.

[0041] As described above, by using the vibration measuring device 20 of this embodiment, it is possible to obtain information indicating the vibration measured at each position on the travel path 1 of the transport vehicle 3 and the state of the transport vehicle 3 at that position. As a result, a user who receives this information can appropriately understand at which positions on the travel path 1 of the transport vehicle 3 the vibration becomes large, and what state the transport vehicle 3 is in at that time. In other words, the vibration measuring device 20 according to this embodiment can output information that is necessary for appropriately analyzing the cause of the measured vibration.

[0042] Next, an example of installing the vibration measuring device 20 in the container W will be described. Figure 8 is a schematic block diagram showing the configuration of the container W and the vibration measuring device 20. The vibration measuring device 20 is housed in the container W being transported by the transport vehicle 3. The vibration measuring device 20 performs vibration measurements while the transport vehicle 3 is transporting the container W (i.e., while it is moving). In other words, the vibration measuring unit 21 of the vibration measuring device 20 can measure vibrations close to those transmitted to the article while the transport vehicle 3 is moving with the article inside the container W.

[0043] As shown in the figure, the container W is a box-shaped container with a rectangular or nearly rectangular cross-section. One side of the container W is openable and closable by a door (not shown), and when the door is open, articles can be placed inside the container W and removed from it. The plate-shaped member 30, which is an article placed inside the container W as shown in Figure 8, is, for example, an actual wafer or a member that imitates one. Thus, as shown in Figure 8, the transport vehicle 3 may be driven with only the vibration measuring device 20 placed inside the container W, or with the vibration measuring device 20 placed inside the container W and the plate-shaped member 30 placed inside the container W.

[0044] The container W has multiple slots 19 inside into which plate-shaped members 30 and other items to be stored and transported by the transport vehicle 3 can be inserted. Specifically, multiple partitions 27 are arranged vertically on the inner surface of the container W. The spaces between these partitions 27 form the slots 19.

[0045] The vibration measuring device 20 shown in Figure 8 is configured to be installed inside the existing container W without altering its internal structure. Specifically, the vibration measuring device 20 is comprised of two separate devices, each containing the functions of a position information acquisition unit 22, a state information acquisition unit 23, a recording unit 24, and an output unit 25. One device comprises a vibration measuring unit 21, while the other comprises an information processing device C. The information processing device C can be implemented using a portable computer device or tablet terminal equipped with information communication functions, information storage functions, and information processing functions.

[0046] The vibration measuring device 20 includes a first support member 31 and a second support member 32 that are inserted into different slots 19. The vibration measuring unit 21 includes a vibration sensor 21a and a transmitter 21b that transmits the measurement results from the vibration sensor 21a, and is supported by the first support member 31. For example, the vibration sensor 21a can be realized using an acceleration sensor as described above.

[0047] The second support member 32 supports the information processing device C. The information processing device C includes a position information acquisition unit 22, a state information acquisition unit 23, a recording unit 24, and an output unit 25. The recording unit 24 includes a receiver 24a that receives measurement results from the transmitter 21b, and a recording device 24b such as a flash memory that stores the measurement results received by the receiver 24a, and is supported by the second support member 32. In this case, communication between the transmitter 21b and the receiver 24a may be wired or wireless.

[0048] The transmitter 21b of the vibration measuring unit 21, which is supported by the first support member 31, and the receiver 24a of the recording unit 24, which is supported by the second support member 32, are configured to communicate using various communication standards such as Bluetooth®. The measurement results of the vibration sensor 21a are then sequentially recorded in the recording device 24b.

[0049] In the example shown in Figure 8, of the functions of the vibration measuring device 20, which includes a vibration measuring unit 21, a position information acquisition unit 22, a state information acquisition unit 23, a recording unit 24, and an output unit 25, the function of the vibration measuring unit 21 is mounted on the first support member 31, and the functions of the position information acquisition unit 22, a state information acquisition unit 23, a recording unit 24, and an output unit 25 are mounted on the second support member 32, with the first support member 31 and the second support member 32 being inserted into separate slots 19. By adopting this configuration, the vibration measuring unit 21, position information acquisition unit 22, state information acquisition unit 23, recording unit 24, and output unit 25 of the vibration measuring device 20 can be easily installed inside the container W.

[0050] The slots 19 into which the first support member 31 and the second support member 32 are inserted can be changed as appropriate. For example, the first support member 31 that supports the vibration measuring unit 21 may be inserted into the slot 19 where the vibration is expected to be greatest.

[0051] As described above, the multiple slots 19 provided in the container W can be used to insert plate-shaped members 30 as the items to be transported, or to insert first support members 31 that support the vibration sensors 21a of the vibration measuring unit 21. In other words, the vibration sensors 21a can be placed inside the container W in the same environment as the plate-shaped members 30 as the items to be transported. Therefore, when the container W is transported on the transport vehicle 3 with the first support members 31 that support the vibration sensors 21a inserted into the slots 19, the vibration measuring unit 21 can measure vibrations that are close to the vibrations acting on the plate-shaped members 30 as the items to be transported. Furthermore, a vibration measuring device 20 can be realized that can perform vibration measurements on any transport vehicle 3 without having to prepare a special transport vehicle 3 for vibration measurement. Furthermore, according to this embodiment, since the first support member 31 that supports the vibration sensor 21a and the second support member 32 that supports the receiver 24a and the recording device 24b are separate members and are inserted into different slots 19, the influence of the receiver 24a and the recording device 24b on the vibration measurement by the vibration sensor 21a can be minimized, which has the advantage of making it easier to improve the accuracy of vibration measurement.

[0052] [Other Embodiments] Next, other embodiments of the vibration measuring device 20 will be described.

[0053] (1) In the above embodiment, a configuration in which the transport vehicle 3 is an overhead transport vehicle was described as an example. However, the configuration is not limited to such a configuration, and for example, the transport vehicle 3 may be an AGV (Automatic Guided Vehicle), an STV (Sorting Transfer Vehicle), a stacker crane, or an autonomous mobile robot (AMR).

[0054] (2) In the above embodiment, an example was described in which the position detection sensor 8 detects the position of the transport vehicle 3 based on a position index B indicating the position on the travel path 1. However, the position detection sensor 8 may detect the position of the transport vehicle 3 by other means. For example, the position detection sensor 8 may detect the position of the transport vehicle 3 by receiving signals from GNSS satellites that make up the GNSS (Global Navigation Satellite System).

[0055] (3) In the above embodiment, the contents of the transport vehicle status information can be changed as appropriate. For example, it may include information about the detection status of various sensors provided by the transport vehicle 3. Examples of various sensors provided by the transport vehicle 3 include a sensor that detects the operating state of the holding mechanism 6 that holds the container W, and a sensor that detects the operating state of the lifting mechanism 7 that raises and lowers the holding mechanism 6.

[0056] (4) In the above embodiment, an example was described in which the transport vehicle 3 is driven with plate-shaped members 30, such as actual wafers or substrates that mimic them, contained in the container W. However, the number of plate-shaped members 30 contained in the container W can be changed as appropriate. For example, it is not necessary to contain plate-shaped members 30 in the container W. Alternatively, the number of plate-shaped members 30 contained may be adjusted so that it is close to the weight of the container W when the transport vehicle 3 is actually transporting wafers as goods.

[0057] (5) The configurations disclosed in each of the embodiments described above can be applied in combination with configurations disclosed in other embodiments, as long as no inconsistencies arise. With regard to other configurations, the embodiments disclosed herein are merely illustrative in all respects. Therefore, various modifications can be made as appropriate without departing from the spirit of this disclosure.

[0058] [Summary of the above embodiment] The following describes the overview of the vibration measuring device mentioned above.

[0059] The vibration measuring device is mounted on a transport vehicle and comprises a vibration measuring unit for measuring vibrations, a position information acquisition unit for acquiring position information indicating the position of the transport vehicle, a state information acquisition unit for acquiring transport vehicle state information indicating the state of the transport vehicle, a recording unit for recording the measurement results from the vibration measuring unit, the transport vehicle state information, and the position information in relation to each other, and an output unit for outputting the information recorded in the recording unit.

[0060] This configuration allows for the acquisition of information indicating vibrations measured at each point along the transport vehicle's travel path and the state of the transport vehicle at those points. As a result, users who receive this information can appropriately understand at which points along the transport vehicle's travel path the vibrations become stronger and what state the transport vehicle is in at those points. In other words, the vibration measuring device according to this configuration can output information necessary for appropriately analyzing the cause of the measured vibrations.

[0061] Here, the transport vehicle status information preferably includes at least one of the following: the travel speed of the transport vehicle, the acceleration state of the transport vehicle, the operating state of the travel mechanism provided by the transport vehicle, and the detection state of the sensors provided by the transport vehicle.

[0062] This configuration allows the vibration measurement unit to acquire information indicating the behavior of the transport vehicle that may affect the vibrations it measures, as transport vehicle status information. Therefore, by referring to such transport vehicle status information, users can easily analyze whether or not the vibrations are strongly influenced by the state of the transport vehicle.

[0063] Furthermore, it is preferable that the vibration measuring unit is housed in a container transported by the transport vehicle.

[0064] With this configuration, the vibration measuring unit can measure vibrations inside the container while it is being transported. In other words, the vibration measuring unit can measure vibrations that are close to those transmitted to the goods while the transport vehicle is moving with the goods inside the container.

[0065] Furthermore, it is preferable that the container has a plurality of slots into which plate-shaped members, which are articles to be contained in and transported by the transport vehicle, are inserted, and that it has a first support member and a second support member inserted into different slots, the vibration measuring unit has a vibration sensor and a transmitter that transmits the measurement results from the vibration sensor and is supported by the first support member, and the recording unit has a receiver that receives the measurement results from the transmitter and a storage device that stores the measurement results received by the receiver and is supported by the second support member.

[0066] With this configuration, the vibration measurement unit and recording unit can be easily installed inside the container by inserting the first support member and the second support member into the slots. Furthermore, with this configuration, the multiple slots provided in the container can be used to insert plate-shaped members, which are the items to be transported, or to insert the first support members that support the vibration sensors of the vibration measurement unit. In other words, the vibration sensors can be placed inside the container in the same environment as the plate-shaped members, which are the items to be transported. Therefore, when the container is transported on a transport vehicle with the first support members that support the vibration sensors inserted into the slots, the vibration measurement unit can measure vibrations that are close to the vibrations acting on the plate-shaped members, which are the items to be transported. Moreover, it is possible to realize a vibration measurement device that can perform vibration measurements on any transport vehicle without having to prepare a special transport vehicle for vibration measurement. Furthermore, with this configuration, since the first support member that supports the vibration sensor and the second support member that supports the receiver and memory device are separate components and inserted into different slots, the influence of the receiver and memory device on vibration measurement by the vibration sensor can be minimized, which has the advantage of making it easier to improve the accuracy of vibration measurement. [Industrial applicability]

[0067] This invention can be used in a vibration measuring device that can output information for appropriately analyzing the cause of measured vibrations. [Explanation of symbols]

[0068] 3: Transport vehicle 5: Running mechanism 19: Slot 20: Vibration measuring device 21: Vibration measurement unit 21a: Vibration sensor 21b: Transmitter 22: Location information acquisition section 23: Status Information Acquisition Unit 24: Records Department 24a: Receiver 25: Output section 30: Plate-shaped member 31: First support member 32: Second support member W: Container

Claims

1. A vibration measuring device mounted on a transport vehicle, A vibration measuring unit that measures vibrations, A location information acquisition unit that acquires location information indicating the position of the transport vehicle, A status information acquisition unit that acquires transport vehicle status information indicating the status of the transport vehicle, A recording unit that records the measurement results from the vibration measuring unit, the transport vehicle status information, and the position information in relation to each other, The system comprises an output unit that outputs the information recorded in the recording unit, The vibration measuring unit is housed in a container transported by the transport vehicle. The container is provided with a plurality of slots into which plate-shaped members, which are articles to be contained in and transported by the transport vehicle, are inserted. It comprises a first support member and a second support member that are inserted into different slots, The vibration measuring unit comprises a vibration sensor and a transmitter that transmits the measurement results from the vibration sensor, and is supported by the first support member. The recording unit comprises a receiver that receives the measurement results from the transmitter, and a storage device that stores the measurement results received by the receiver, and is supported by the second support member, in a vibration measuring device.

2. A vibration measuring device mounted on a transport vehicle, A vibration measuring unit that measures vibrations, A location information acquisition unit that acquires location information indicating the position of the transport vehicle, A status information acquisition unit that acquires transport vehicle status information indicating the status of the transport vehicle, A recording unit that records the measurement results from the vibration measuring unit, the transport vehicle status information, and the position information in relation to each other, The system comprises an output unit that outputs the information recorded in the recording unit, The vibration measuring unit is housed in a container transported by the transport vehicle. The container is provided with a plurality of slots into which plate-shaped members, which are articles to be contained in and transported by the transport vehicle, are inserted. The system includes a first support member that is inserted into the aforementioned slot, The vibration measuring device comprises a vibration sensor and a transmitter that transmits the measurement results from the vibration sensor, and is supported by the first support member.

3. comprising a first support member and a second support member inserted into different slots, The vibration measuring device according to claim 2, wherein the recording unit comprises a receiver that receives the measurement results from the transmitter and a storage device that stores the measurement results received by the receiver, and is supported by the second support member.

4. The vibration measuring device according to any one of claims 1 to 3, wherein the transport vehicle status information includes at least one of the following: the travel speed of the transport vehicle, the acceleration state of the transport vehicle, the operating state of the travel mechanism provided by the transport vehicle, and the detection state of the sensor provided by the transport vehicle.

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