Work device and substrate support member

Abstract

A work device according to the present disclosure is provided with: a substrate support member that supports a substrate; a table on which the substrate support member is placed; and a control device. The substrate support member has: a substrate placement surface on which the substrate is placed; a contact surface which is a surface opposite to the substrate placement surface and comes into contact with the table when placed on the table; a suction port which is disposed on the substrate placement surface and sucks the substrate; a connection port which communicates with the suction port and opens toward a side opposite to the substrate placement surface; and a held part which is held by a conveyance jig. The table has: a support member placement surface on which the substrate support member is placed; and a negative pressure supply port which is disposed at a position communicating with the connection port in a state in which the substrate support member is placed, and supplies negative pressure to the substrate support member. The control device performs support member replacement processing including support member carry-out processing and support member carry-in processing.

Description

Working device and substrate support member

[0001] Disclosed herein is a working apparatus and a substrate support member.

[0002] Conventionally, there is known a working device that performs work on a substrate and that is capable of replacing a substrate support member that supports the substrate. For example, in the working device described in Patent Document 1, a control device replaces a substrate support member by performing a support member carry-out process and a support member carry-in process. In the support member carry-in process, the control device transports a transport jig holding the substrate support member to be replaced above a table, detaches the substrate support member from the transport jig and places it on the table, and then transports the transport jig out. The support member carry-out process is performed by performing the reverse operations of the support member carry-in process.

[0003] International Publication No. 2022 / 234650

[0004] It is possible to provide a suction port on the top surface of a substrate support member so that the substrate can be supported from below by the substrate support member and fixed by suction. However, when using such a substrate support member, it is necessary to perform additional steps to enable negative pressure to be supplied to the suction port, such as connecting a tube to supply negative pressure to the replaced substrate support member, which is time-consuming.

[0005] The present disclosure has been made to solve the above-mentioned problems, and its main purpose is to facilitate the connection of a negative pressure supply path to a substrate support member when installing the substrate support member in a working device.

[0006] In order to achieve the above-mentioned main object, the present disclosure has adopted the following means.

[0007] a control device for controlling the jig transport unit and the attachment / detachment operation unit; wherein the substrate support member has: a substrate placement surface on which the substrate is placed; a contact surface opposite to the substrate placement surface and in contact with the table when the substrate is placed on the table; a suction port disposed on the substrate placement surface for suctioning the substrate; a connection port communicating with the suction port and opening toward the opposite side to the substrate placement surface; and a held portion held by the transport jig; and wherein the table has: a support member placement surface on which the substrate support member is placed; and a negative pressure supply port disposed in a position communicating with the connection port when the substrate support member is placed, for supplying negative pressure to the substrate support member, The control device controls the jig transport unit and the attachment / detachment operation unit to perform a support member replacement process that includes a support member transport-out process in which the transport jig is brought in, the substrate support member to be removed that is placed on the table is held and attached to the brought-in transport jig, and the transport jig is transported after the attachment; and a support member transport-in process in which the transport jig to which the substrate support member to be brought in is attached is brought in, the substrate support member to be brought in is released from the transport jig, so that it is removed and placed on the table, and the transport jig is transported after the removal.

[0008] In this working device, the substrate support member has a holding portion and can be held by a transport jig. The control device controls the jig transport unit and the attachment / detachment operation unit to perform a support member replacement process, including a support member unloading process and a support member loading process, using the transport jig. The substrate support member has a contact surface opposite the substrate mounting surface that contacts the table when placed on the table, and a connection port that opens toward the side opposite the substrate mounting surface and communicates with a suction port for suctioning the substrate. Meanwhile, the table on which the substrate support member is placed has a negative pressure supply port for supplying negative pressure to the substrate support member. The negative pressure supply port is positioned so as to communicate with the connection port of the substrate support member when the substrate support member is placed on the table. Therefore, when the loaded substrate support member is placed on the table, negative pressure can be supplied from the negative pressure supply port to the suction port via the connection port. Therefore, the process of connecting the negative pressure supply path to the substrate support member does not need to be performed separately from the process of placing the substrate support member on the table. As a result of the above, in this working apparatus, it is easy to connect the negative pressure supply path to the substrate support member when the substrate support member is installed in the working apparatus.

[0009] 1 is a schematic configuration diagram of a working device 10 according to the present disclosure; a perspective view showing the internal configuration of the working device 10; a side view showing the internal configuration of the working device 10; a block diagram showing the electrical connection relationships of the working device 10; a perspective view of a substrate support member 90 as seen from the top side; a perspective view of a substrate support member 90 as seen from the bottom side; a perspective view of a table 36 as seen from the top side; a schematic cross-sectional view showing a state immediately before the substrate support member 90 is placed on the table 36; a schematic cross-sectional view showing a state in which the substrate support member 90 has been placed on the table 36; an external perspective view of a transport jig 80; an external perspective view of the transport jig 80 to which the substrate support member 90 is attached; a schematic configuration diagram of an arm member 82; a schematic configuration diagram of a pusher 24; a partially enlarged view of the pusher 24; an explanatory diagram showing the operation when the substrate support member 90 is removed from the transport jig 80; an explanatory diagram showing the operation when the substrate support member 90 is removed from the transport jig 80. An explanatory diagram showing the operation when removing a substrate support member 90 from a transport jig 80. A flowchart showing an example of a support member carry-in process. A perspective view of a modified substrate support member 190 as seen from the top side. An external perspective view of a modified transport jig 180. An explanatory diagram showing how the substrate support member 190 is carried in and out by the transport jig 180. An explanatory diagram showing how the substrate support member 190 is carried in and out by the transport jig 180. An explanatory diagram showing how the substrate support member 190 is carried in and out by the transport jig 180.

[0010] Next, embodiments of the present disclosure will be described with reference to the drawings.

[0011] Fig. 1 is a schematic diagram of a working apparatus 10 according to the present disclosure. Fig. 2 is a perspective view showing the internal configuration of the working apparatus 10. Fig. 3 is a side view showing the internal configuration of the working apparatus 10. Fig. 4 is a block diagram showing the electrical connections of the working apparatus. In Figs. 1 to 3, the left-right direction is the X-axis, the front-rear direction is the Y-axis, and the up-down direction is the Z-axis.

[0012] The working device 10 performs a predetermined operation on a board S supported by a board support member 90. In this embodiment, the working device 10 is configured as a printing device that, as the predetermined operation, uses a squeegee 22 to push solder paste on a screen mask M into pattern holes P1, P2 formed in the screen mask M, thereby applying (printing) the solder paste onto the underlying board S through the pattern holes P1, P2. The working device 10 constitutes a component mounting system in combination with a mounting device that mounts electronic components on the board S on which solder has been printed. Furthermore, the working device 10 is capable of automatically replacing the screen mask M or automatically replacing the board support member 90 using a transport jig 80 when performing a setup change to change the printing target to a different type of board S.

[0013] 1 to 4, the operating device 10 comprises an operating device main body 11, an exchange device 60, a storage rack 70, and a control device 100. The operating device main body 11 has a head device 20 including a head 21, support rails 29 that support the screen mask M and the transport jig 80, first and second substrate transport support devices 30, 40 that transport and support the substrate S by dual lanes, a camera device 50, and a pressure reduction device 65. The operating device 10 also comprises an operation panel that is installed in front of the operating device main body 11 and that displays various information and allows the operator to perform various input operations.

[0014] The head device 20 is installed on the upper level of the working device main body 11. As shown in FIG. 1 , the head device 20 includes a head 21 and a head moving device 26 that moves the head 21 in the front-to-rear direction (Y-axis direction), which is the printing direction. The head moving device 26 includes a Y-axis slider 27 that moves along a guide rail 28 extending in the front-to-rear direction, and a motor that drives the Y-axis slider 27. The head 21 includes a squeegee 22, a squeegee lifting device 23 that raises and lowers the squeegee 22 using, for example, an air cylinder, a pusher 24, and a pusher lifting device 25 that raises and lowers the pusher 24 using, for example, an air cylinder. The squeegee 22 is a plate-shaped member that extends in the left-to-right direction (X-axis direction), which is perpendicular to the printing direction. The pusher 24 is lowered by the pusher lifting device 25 and moved back and forth by the head moving device 26 while protruding downward, thereby pushing back and forth to transport the screen mask M and the transport jig 80 on the support rails 29. The pusher 24 is also used to retrieve the substrate support member 90 on the tables 36, 46 to the transport jig 80 that has been carried onto the support rails 29 when replacing the substrate support member 90 using the transport jig 80, or to remove the substrate support member 90 from the transport jig 80 that has been carried onto the support rails 29 while holding the substrate support member 90, and place it on the tables 36, 46.

[0015] The screen mask M is a thin metal plate, and is fixed with a predetermined tension to a rectangular frame F. The screen mask M has pattern holes P1 and P2 formed therein for printing solder onto the substrate S transported and supported by the first and second substrate transport and support devices 30 and 40, respectively.

[0016] 3, the support rails 29 are a pair of left and right rails extending in the front-to-rear direction (Y-axis direction), and are installed between the head device 20 and the first and second substrate transport support devices 30, 40. The support rails 29 support the screen mask M and the transport jig 80 in a horizontal position, and also guide the screen mask M and the transport jig 80 pushed by the pusher 24 so that they move in the front-to-rear direction.

[0017] The first and second substrate transport and support devices 30, 40 transport and support the substrate S, and also bring the supported substrate S into contact with and separate from the screen mask M on the support rails 29. As shown in FIGS. 2 to 4 , the first and second substrate transport and support devices 30, 40 include conveyor devices 31, 41, conveyor spacing change devices 34, 44, conveyor lifting devices 35, 45, tables 36, 46, and support member lifting devices 37, 47. The conveyor devices 31, 41 include conveyor belts provided on a pair of front and rear side frames 33s, 43s, respectively, and a motor that drives the conveyor belts. The pair of side frames 33s, 43s are erected on base frames 33b, 43b, and substrate guides 32, 42 are provided at the upper ends of the pair of side frames 33s, 43s. The conveyor spacing change devices 34, 44 change (adjust) the spacing of the conveyor belts by moving one or both of the pair of side frames 33s, 43s closer to or farther apart. This allows the first and second board transport and support devices 30, 40 to transport and support boards S of different sizes. The conveyor lifting devices 35, 45 raise and lower the conveyor devices 31, 41 (conveyor belts) by raising and lowering the supports supporting the base frames 33b, 43b. The tables 36, 46 are support bases on which the board support members 90 can be placed. The support member lifting devices 37, 47 raise and lower the supports supporting the tables 36, 46 to raise and lower the board support members 90 placed on the tables 36, 46.

[0018] The substrate support member 90 supports the substrate S from the underside and fixes the substrate S by suction. As shown in FIG. 5A , the substrate support member 90 has a substrate mounting surface 91 on which the substrate S is placed. The substrate mounting surface 91 is at least a part of the upper surface of the substrate support member 90. When the substrate support member 90 places the substrate S, the underside of the substrate S comes into contact with the substrate mounting surface 91. The substrate mounting surface 91 may have one or more recesses (not shown) to prevent interference between the substrate support member 90 and components present on the underside of the substrate S. The substrate mounting surface 91 is provided with suction ports 91 a for suctioning the placed substrate S. One or more suction ports 91 a may be provided, and in this embodiment, eight suction ports 91 a are provided.

[0019] 5B , the substrate support member 90 includes a back surface 92, which is the surface opposite the substrate placement surface 91, a held portion 93, a first leg 94a, and a second leg 94b. The held portion 93 is a portion that is held by the transport jig 80 that holds the substrate support member 90. The held portion 93 includes a first side portion 93a at the outer edge of the back surface 92, a pair of first pin members 93c (first engaged portions) provided on the first side portion 93a, a second side portion 93b that faces the first side portion 93a at the outer edge of the back surface 92, and a pair of second pin members 93d (second engaged portions) provided on the second side portion 93b. The first side portion 93a (particularly the portion of the first side portion 93a between the pair of first pin members 93c) is supported by a first arm member 82a, which is one of a pair of arm members 82 of the transport jig 80. The pair of first pin members 93c are engaged with the first arm member 82a. The second side portion 93b (particularly the portion of the second side portion 93b between the pair of second pin members 93d) is supported by the second arm member 82b, which is the other of the pair of arm members 82 of the transport jig 80. The pair of second pin members 93d are engaged with the second arm member 82b.

[0020] The first leg 94a is attached to a side (also referred to as a third side) adjacent to (orthogonal to) the first side 93a at the outer edge of the back surface 92 so as to protrude downward from the back surface 92 (i.e., in the opposite direction from the substrate mounting surface 91). The second leg 94b is attached to a side (also referred to as a fourth side) facing the third side at the outer edge of the back surface 92 so as to protrude downward from the back surface 92 (i.e., in the opposite direction from the substrate mounting surface 91). At least a portion of the lower surface of the first leg 94a forms a contact surface 95a, and at least a portion of the second leg 94b forms a contact surface 95b. When the substrate support member 90 is placed on the table 36, 46, the table 36, 46 comes into contact with the contact surfaces 95a, 95b. Because contact surfaces 95a, 95b are present on the lower surfaces of the first leg portion 94a and the second leg portion 94b, which are provided so as to protrude downward from the back surface 92, the back surface 92 including the first side portion 93a and the second side portion 93b is provided on the surface opposite the substrate mounting surface 91 and at a position higher than the contact surfaces 95a, 95b (i.e., at a position closer to the substrate mounting surface 91 than the contact surfaces 95a, 95b). As a result, even when the contact surfaces 95a, 95b of the substrate support member 90 are in contact with the tables 36, 46, the first side portion 93a and the second side portion 93b do not contact the tables 36, 46, and therefore the arm member 82 of the transport jig 80 can be inserted below the first side portion 93a and the second side portion 93b.

[0021] The substrate support member 90 also has a connection port 96, positioning holes 97a and 97b, and magnets 98a and 98b provided on the underside of the first leg 94a. The connection port 96 is provided near the center of the underside of the first leg 94a and opens toward the side opposite the substrate mounting surface 91. The connection port 96 communicates with the suction port 91a through a communication passage (not shown) provided inside the substrate support member 90. A gasket 96a, which serves as a sealing member, is provided at a position corresponding to the connection port 96. The gasket 96a is an elastic member formed of, for example, rubber or resin. The gasket 96a is disposed in a recess provided in a portion of the underside of the first leg 94a, such that the lower surface of the gasket 96a (the surface opposite the substrate mounting surface 91) is substantially flush with the contact surface 95a (the lower surface of the gasket 96a and the contact surface 95a are substantially flush with each other). The gasket 96a is preferably positioned so that its lower surface protrudes slightly below the contact surface 95a. The positioning holes 97a and 97b are recessed from the contact surface 95a toward the substrate mounting surface 91, and are disposed on both sides of the connection port 96, one on each side. The positions and sizes of the positioning holes 97a and 97b are determined so that the positioning pins 36d and 36e of the tables 36 and 46 can be inserted into the positioning holes 97a and 97b when the substrate support member 90 is placed on the tables 36 and 46. The magnets 98a and 98b are permanent magnets provided on the contact surface 95a, and are disposed on both sides of the connection port 96 and the positioning holes 97a and 97b, one on each side. The magnets 98a and 98b are arranged in recesses provided in the first leg 94a, and the lower surfaces of the magnets 98a and 98b (the surfaces opposite the substrate mounting surface 91) are at approximately the same height as the contact surface 95a (the lower surfaces of the magnets 98a and 98b and the contact surface 95a are approximately flush with each other).

[0022] Furthermore, two first recognition marks 99a are formed on the first leg 94a. Furthermore, two second recognition marks 99b are formed on the second leg 94b. The first and second recognition marks 99a, 99b are used by the working device 10 to recognize the position and size (front-rear width) of the board support member 90 when replacing the board support member 90.

[0023] As shown in FIG. 6 , the table 36 includes a support member mounting surface 36 a, a negative pressure supply port 36 b, positioning pins 36 d and 36 e, and a detection unit 38. The support member mounting surface 36 a is a surface on which a substrate support member 90 is mounted. The support member mounting surface 36 a is at least a portion of the upper surface of the table 36, and in this embodiment, the entire upper surface serves as the support member mounting surface 36 a. The negative pressure supply port 36 b supplies negative pressure to the substrate support member 90 mounted on the table 36. The negative pressure supply port 36 b communicates with the inside of a pipe 36 c provided below the table 36 via a through-hole in the table 36 (see FIGS. 7A and 7B ). The pipe 36 c is connected to a pressure reducing device 65 (see FIG. 4 ), such as a vacuum pump. Therefore, negative pressure from the pressure reducing device 65 can be supplied to the connection port 96 of the substrate support member 90 via the pipe 36 c and the negative pressure supply port 36 b. When negative pressure is supplied to the connection port 96, negative pressure is supplied to the suction port 91a, and the substrate S placed on the substrate mounting surface 91 is suction-fixed. The pressure reducing device 65 may be a component of the working device 10 (a part of the working device 10) or may be a device installed separately from the working device 10. The positioning pins 36d and 36e are arranged to protrude upward from the support member mounting surface 36a, with one on each side of the negative pressure supply port 36b, sandwiching the negative pressure supply port 36b. The positioning pins 36d and 36e are inserted into the positioning holes 97a and 97b when the substrate support member 90 is placed on the table 36 or 46. The tip portions of the positioning pins 36d and 36e have tapered portions whose diameter gradually decreases toward the tip. The detection unit 38 is a sensor for detecting that the substrate support member 90 has been placed on the support member mounting surface 36a of the table 36. In this embodiment, the detection unit 38 is a non-contact sensor, specifically a capacitance-type proximity sensor. The detection unit 38 has a detection area directly above itself, and detects whether an object (here, a board support member 90) is present in this detection area. The detection area of ​​the detection unit 38 includes only the vicinity of the detection unit 38, and the detection unit 38 detects the presence of the object (here, a board support member 90) when the contact surfaces 95 a, 95 b of the board support member 90 come close enough to contact the support member mounting surface 36 a.

[0024] 7A is a schematic cross-sectional view showing a state immediately before the substrate support member 90 is placed on the table 36. FIG. 7B is a schematic cross-sectional view showing a state in which the substrate support member 90 has been placed on the table 36. As shown in FIG. 7B , when the substrate support member 90 is placed at a predetermined position on the support member placement surface 36a (for example, within the area indicated by the dashed line frame in FIG. 6), in this state, the negative pressure supply port 36b faces and communicates with the connection port 96, the positioning pins 36d and 36e of the tables 36 and 46 are inserted into the positioning holes 97a and 97b, the substrate support member 90 (particularly the contact surface 95a here) is positioned directly above the detection unit 38, and the magnets 98a and 98b face the support member placement surface 36a. As described above, if the lower surface of the gasket 96a protrudes slightly downward from the contact surface 95a, the gasket 96a elastically deforms when the substrate support member 90 is placed on the table 36, thereby more reliably sealing the gap between the negative pressure supply port 36b and the connection port 96. Furthermore, the table 36 is made of a magnetic material such as iron. This allows the magnets 98a, 98b of the substrate support member 90 to magnetically attract the table 36, thereby preventing the positioning pins 36d, 36e from coming out of the positioning holes 97a, 97b and more reliably sealing the gap between the negative pressure supply port 36b and the connection port 96. It is sufficient that the portions of the table 36 that face the magnets 98a, 98b when the substrate support member 90 is placed thereon are made of a magnetic material.

[0025] The configuration of the table 46 is similar to that of the table 36, and therefore a detailed description thereof will be omitted. The table 46 includes a support member mounting surface 36a, a negative pressure supply port 36b, a pipe 36c, positioning pins 36d and 36e, etc., similar to the table 36. The table 46 also includes a detection unit 48 (see FIG. 4) similar to the detection unit 38.

[0026] 1 and 2 , the camera device 50 includes a camera body 51 and a camera moving device 55 that moves the camera body 51 back and forth and left and right (X and Y directions). The camera moving device 55 includes an X-axis slider 56, a motor that drives the X-axis slider 56, a Y-axis slider 58, and a motor that drives the Y-axis slider 58. The Y-axis slider 58 is an elongated member that extends left and right and is bridged between a pair of left and right Y-axis guide rails 59, and moves back and forth along the Y-axis guide rails 59. The X-axis slider 56 moves left and right along an X-axis guide rail 57 provided on the Y-axis slider 58. The camera body 51 is fixed to the X-axis slider 56 and has two imaging fields of view (upper reading unit 52 and lower reading unit 53) on the top and bottom. The camera device 50 acquires the position of the substrate S by using the lower reading unit 53 to capture an image of a mark formed on the upper surface of the substrate S that has been carried in and supported by the first and second substrate transport and support devices 30, 40. The camera device 50 also acquires the position and size (front-to-rear width) of the substrate support member 90 by using the upper reading unit 52 to capture an image of a mark (first and second recognition marks 99a, 99b) formed on the bottom surface of the substrate support member 90 that has been carried in together with the transport jig 80 onto the support rails 29.

[0027] The exchange device 60 receives a storage rack 70 that stores exchangeable parts such as a screen mask M and a transport jig 80, and transports the exchangeable parts between the storage rack 70 and the operating device main body 11. The exchange device 60 includes a left unit 61a installed on the left side of the front of the operating device main body 11, and a right unit 61b installed on the right side of the front of the operating device main body 11. The left unit 61a and the right unit 61b each include a rack support member 62 that receives the storage rack 70 and supports its underside from both the left and right sides, and a rack lifting device 63 that raises and lowers the rack support member 62. The rack lifting device 63 is configured, for example, by a combination of a ball screw mechanism and a motor, or a linear motor. The storage rack 70 supported by the rack support member 62 is raised and lowered together with the rack support member 62 by the rack lifting device 63. Furthermore, the left unit 61a and the right unit 61b have a frame forward / backward moving device 64 that moves the frames of the replacement parts in the storage rack 70 forward and backward from both the left and right sides by means of belts, rollers, or the like.

[0028] The storage rack 70 is a storage body that has a pair of left and right support rails 71 in multiple tiers, one above the other, and is capable of storing a replacement part on each support rail 71. Openings 72, 73 are formed on the front and rear sides of the storage rack 70, facing the operating device main body 11. A replacement part is inserted or removed by a worker or the like through the opening 72 on the front side, and is carried in or out by a frame front-rear movement device 64 through the opening 73 on the rear side. When the storage rack 70 is received in the exchange device 60, the frame front-rear movement device 64 uses the rack lifting device 63 to send a replacement part supported on one of the support rails 71 of the storage rack 70 that is positioned at approximately the same height as the support rails 29 of the operating device main body 11 to the operating device main body 11. The frame front-rear movement device 64 also sends a replacement part supported on the support rails 29 of the operating device main body 11 to the support rails 71 of the storage rack 70 that is positioned at approximately the same height as the support rails 29. The storage rack 70 may be transported by an operator to the receiving position of the exchange device 60, or may be loaded onto an automatic guided vehicle (AGV) and automatically transported to the receiving position of the exchange device 60 by the automatic guided vehicle.

[0029] 8 and 9 , the transport jig 80 is a jig used to load and unload the substrate support member 90, and includes a rectangular frame 81 and a pair of arm members 82 (a first arm member 82a and a second arm member 82b) that are fixed to the frame 81 with their tip ends facing each other and that hold the substrate support member 90 from both sides. In this embodiment, the transport jig 80 has two pairs of arm members 82 that hold the substrate support member 90, and is able to transport the substrate support members 90 used in the first and second substrate transport and support devices 30 and 40 at the same time.

[0030] As shown in FIG. 10 , each arm member 82 (first arm member 82 a, second arm member 82 b) has a base member 821, an arm plate 822, a holding member 823, a side plate 825, a lock plate 826, and a lock block 827. To facilitate understanding of the configuration, the side plate 825 and lock plate 826 on the near side are indicated by dashed lines in FIG. 10 . The base member 821 is fixed to the frame 81. The base end of the arm plate 822 is rotatably supported by the base member 821, and a holding member 823 is rotatably attached to the tip end of the arm plate 822. The side plates 825 are provided on both sides of the arm plate 822. The base end of the side plate 825 is rotatably supported by the base member 821, and a holding member 823 is rotatably attached to the tip end of the side plate 825. Furthermore, the side plate 825 receives the biasing force of a torsion coil spring 824 provided on the rotation shaft on the base member 821 side and biases the arm plate 822 upward. The side plate 825 is positioned in a substantially horizontal position by a stopper formed on the base member 821, thereby holding the arm plate 822 in a substantially horizontal position. The holding member 823 constitutes the tip of the arm member 82 and holds the held portion 93 of the substrate support member 90. Specifically, the holding member 823 of the first arm member 82a supports a first side 93a of the held portion 93 and engages with a pair of first pin members 93c provided on the first side 93a. The holding member 823 of the second arm member 82b supports a second side 93b of the held portion 93 and engages with a pair of second pin members 93d provided on the second side 93b. As a result, the substrate support member 90 is held from both sides by the tip ends (holding members 823) of the pair of arm members 82. The substrate support member 90 held by the pair of arm members 82 is detached from the transport jig 80 and placed on the tables 36, 46 by pressing down and spreading out the arm plates 822 of the pair of arm members 82 above the tables 36, 46.

[0031] The lock plates 826 lock the arm plate 822 so that it cannot be pressed down. The lock plates 826 are arranged on both sides of the arm plate 822, and a lock block 827 is fixed between the two lock plates 826 so as to be located below the arm plate 822. The base end of the lock plate 826 is rotatably attached to the base member 821 at a position eccentric to the rotation axis on the base end side of the arm plate 822, and is pulled toward the arm plate 822 by the biasing force of a tension spring 828 engaged with the lock plate 826 and the arm plate 822 at the tip end side of the base end. The lock block 827 engages with a notch 822c formed on the underside of the arm plate 822, thereby locking the arm plate 822 so that it cannot be pressed down. Furthermore, the tip ends of both lock plates 826 protrude above the arm plate 822 when the lock blocks 827 are engaged with the notches 822c of the arm plate 822.

[0032] In the arm member 82 configured in this manner, the arm plate 822 is locked so that it cannot be pressed down, as the lock block 827 engages with the notch 822c of the arm plate 822 due to the biasing force of the tension spring 828. Therefore, even if an unintended force acts on the substrate support member 90 or the arm plate 822, the arm member 82 (arm plate 822) will not be pressed down, preventing detachment of the substrate support member 90. The lock of the lock plate 826 can be released by pressing down the tip of the lock plate 826, which protrudes above the arm plate 822.

[0033] The unlocking of the lock plate 826 and the pressing down of the arm plate 822 are performed by a single pusher 24. As shown in FIGS. 11 and 12 , the pusher 24 includes a pair of front and rear pusher plates 241 arranged on the left and right at a distance corresponding to the distance between the pair of arm members 82, and a pusher roller 242 arranged between each pair of front and rear pusher plates 241. When the pusher 24 is lowered by the pusher lifting device 25 above the pair of arm members 82, the lower ends of the pair of pusher plates 241 abut against the tip of the lock plate 826, and the tip of the lock plate 826 is pressed down by the pusher plate 241 (see FIG. 13 ). When the tip of the lock plate 826 is pressed down, the lock block 827 descends, and the engagement between the lock block 827 and the notch 822c of the arm plate 822 is released (see FIG. 14 ). This releases the lock on the arm plate 822. As the pusher 24 further descends, the pusher roller 242 abuts against the arm plate 822, which is then pressed down by the pusher roller 242 (see FIG. 15 ). This causes the pair of arm members 82 to spread apart, and the substrate support member 90 held by the pair of arm members 82 is released from the arm members 82. In this manner, by raising and lowering the pusher 24 and operating the arm members 82 (first arm member 82 a, second arm member 82 b) of the transport jig 80, the pair of arm members 82 can switch between a holding position (a position in which the arm plate 822 is locked in a substantially horizontal position as shown in FIGS. 9 and 13 ) in which the pair of arm members 82 can hold the substrate support member 90 from both sides, and a holding release position (a position in which the pair of arm members 82 are further spread apart from the state shown in FIG. 15 , and the substrate support member 90 is released from the arm members 82). In this way, the pusher 24 holds and releases the substrate support member 90 from the transport jig 80.

[0034] The control device 100 is configured as a microprocessor centered around a CPU, and in addition to the CPU, includes ROM, RAM, a storage device 101, input / output ports, etc. The control device 100 exchanges signals with the head device 20, first and second substrate transport and support devices 30, 40, camera device 50, exchange device 60, pressure reduction device 65, etc. The control device 100 is also communicably connected to a management device 200 that manages the entire work system including the work device 10. The management device 200 manages the progress status of the line including the work device 10, etc.

[0035] The operation of the working device 10 configured in this manner will be described. In particular, the operation of the changeover for replacing the screen mask M or the substrate support member 90 will be described. The changeover is performed by executing a mask carry-out process, a support member replacement process, and a mask carry-in process in this order with the storage rack 70 set in the replacement device 60. The support member replacement process includes a support member carry-out process and a support member carry-in process, and the support member carry-in process is executed after the support member carry-out process is executed.

[0036] The mask unloading process is a process of unloading the screen mask M supported on the support rails 29 of the working device main body 11 and storing it in the storage rack 70. In this mask unloading process, the control device 100 controls the rack lifting device 63 so that the empty support rails 71 of the storage rack 70 are at approximately the same height as the support rails 29 of the working device main body 11. Next, the control device 100 controls the head moving device 26 so that the screen mask M supported on the support rails 29 is pushed forward by the pusher 24 and unloaded from the working device main body 11. Then, the control device 100 controls the frame front-rear moving device 64 so that the unloaded screen mask M is stored in the storage rack 70. Note that the mask loading process is basically performed by the reverse operations of the mask unloading process, and therefore a description thereof will be omitted.

[0037] The support member unloading process is a process of loading a transport jig 80 from the storage rack 70, holding and attaching a substrate support member 90 to be loaded that is placed on the table 36, 46 to the loaded transport jig 80, and then unloading the attached transport jig 80 and storing it in the storage rack 70. The support member loading process is a process of loading the transport jig 80 to which the substrate support member 90 to be loaded is attached from the storage rack 70, releasing the substrate support member 90 to be loaded so that it is removed from the transport jig 80 and placed on the table 36, 46, and then unloading the removed transport jig 80 and storing it in the storage rack 70. FIG. 16 is a flowchart showing an example of the support member loading process executed by the control device 100. Note that the support member unloading process is basically executed by the reverse operations of the support member loading process, and therefore a detailed description thereof will be omitted.

[0038] In the support member carry-in process, the control device 100 first controls the transport jig 80 holding the two substrate support members 90 to be replaced (carried in) to be transported above the tables 36, 46 of the first and second substrate transport and support devices 30, 40 (step S100). Specifically, the control device 100 controls the rack lifting device 63 to raise the storage rack 70 until the support rails 71 supporting the transport jig 80 to be carried in are at substantially the same height as the support rails 29 of the working device main body 11. Next, the control device 100 controls the frame front-rear moving device 64 to send the transport jig 80 from the storage rack 70 to the support rails 29. The control device 100 then controls the pusher lifting device 25 to lower the pusher 24 and the head moving device 26 to use the pusher 24 to push the transport jig 80 on the support rails 29 backward for carrying it in.

[0039] The control device 100 controls the camera device 50 so that the upper reading unit 52 of the camera body 51 reads the first and second recognition marks 99a, 99b provided on the substrate support members 90 held by the transport jig 80 that has been carried in (step S110). The control device 100 then recognizes the positions of the two substrate support members 90 held by the transport jig 80 based on the positions of the read first and second recognition marks 99a, 99b, and corrects the position of the transport jig 80 so that the two substrate support members 90 are positioned directly above each table 36, 46 (step S120). That is, the control device 100 controls the head moving device 26 to push the transport jig 80 forward or backward with the pusher 24, thereby fine-tuning the position of the transport jig 80. By performing steps S100 and S120, the control device 100 adjusts the position of the transport jig 80 so that the two substrate support members 90 are located directly above predetermined positions (e.g., within the area indicated by the dashed line frame in FIG. 6 ) on the support member mounting surfaces 36 a of the tables 36, 46. As a result, the connection ports 96 and positioning holes 97 a, 97 b of the two substrate support members 90 are located directly above the negative pressure supply ports 36 b and positioning pins 36 d, 36 e of the tables 36, 46.

[0040] Next, the control device 100 controls the support member lifting device 37 or 47 to raise the table 36 or 46 to the printing height (step S130). The control device 100 then controls the pusher lifting device 25 to lower the pusher 24 directly above the raised table (step S140). The control device 100 then determines whether the detection unit 38 or 48 has detected that the substrate support member 90 has been placed on the support member placement surface 36a of the table 36 or 46 (step S150). If not, the control device 100 waits for a predetermined time to elapse (step S160). The predetermined time is the waiting time, plus a margin, until the substrate support member 90 is detached from the transport jig 80 and placed on the table 36 or 46. As described above, when the pusher 24 descends, the pair of left and right pusher plates 241 first contact and press down the lock plates 826 of the corresponding arm members 82, unlocking the arm plates 822. As the pusher 24 further descends, the pair of left and right pusher rollers 242 abut against and press down on the corresponding arm plates 822, spreading the pair of arm members 82 apart. As a result, the substrate support member 90 is detached from the pair of arm members 82 and placed on the table. Thus, by simply lowering the pusher 24 from directly above the pair of arm members 82, the pair of arm members 82 can be switched between the holding position and the release position, and the substrate support member 90 can be detached from the transport jig 80 and placed on the table. As the pair of arm members 82 are spread apart, the substrate support member 90 descends from above the table 36 (or table 46) toward the support member placement surface 36a, as shown in FIG. 7A . When the substrate support member 90 is detached from the pair of arm members 82 and placed on the table, the state shown in FIG. 7B is reached. Therefore, when the loaded substrate support member 90 is placed on the table 36 or 46, a state is created in which negative pressure can be supplied from the negative pressure supply port 36b to the suction port 91a via the connection port 96. Furthermore, since the positioning pins 36d, 36e of the tables 36, 46 have tapered portions, the surfaces of the tapered portions are inclined in the vertical direction, and thus serve as guides when the positioning pins 36d, 36e are inserted into the positioning holes 97a, 97b.Therefore, even if the positional relationship between the table 36, 46 and the descending substrate support member 90 is slightly deviated from the correct positional relationship, the positioning pins 36d, 36e can be easily guided and inserted into the positioning holes 97a, 97b. Therefore, even if the positional relationship between the table 36, 46 and the descending substrate support member 90 is deviated, the substrate support member 90 can easily be placed in the correct position on the table 36, 46, and the state shown in FIG. 7B , i.e., the state where the negative pressure supply port 36b and the connection port 96 face each other and communicate with each other, can be easily achieved.

[0041] If the control device 100 determines in step S160 that a predetermined time has elapsed since the pusher 24 started to descend in step S140 without detecting in step S150 that the substrate support member 90 has been placed on the support member placement surface 36a of the table 36 or 46, it determines that the placement of the substrate support member 90 on the table 36 or 46 has not been performed correctly, outputs an error to the operation panel (step S170), and terminates the support member loading process.

[0042] On the other hand, if the control device 100 detects in step S150 that the substrate support member 90 has been placed on the support member placement surface 36a of the table 36 or 46 before a predetermined time has elapsed since the pusher 24 began to descend in step S140, it controls the support member lifting device 37 or 47 to lower the table 36 or 46 to its initial position (step S180). The control device 100 similarly controls the other substrate support member 90 held by the transport jig 80 to be placed on the other table. The control device 100 then transports the transport jig 80, after removing the two substrate support members 90, to the storage rack 70 (step S190), thereby completing the support member loading process. That is, the control device 100 controls the head moving device 26 and the frame front-rear moving device 64 so that the transport jig 80 supported on the support rail 29 is pushed forward by the pusher 24, removed from the working device main body 11, and stored in the storage rack 70.

[0043] As described above, the support member carry-out process is basically performed by the reverse operations of the support member carry-in process, and therefore detailed description thereof will be omitted. However, for example, when the substrate support member 90 to be carried out and placed on the table 36 is held by the transport jig 80 in the support member carry-out process, the control device 100 performs the following process. First, the control device 100 moves the pusher 24 of the transport jig 80 above the table 36 on which the substrate support member 90 is placed, and switches the pair of arm members 82 of the transport jig 80 to the release position. Next, the table 36 is raised to the printing height, and then the pusher 24 is raised to switch the pair of arm members 82 of the transport jig 80 from the release position to the hold position. As a result, the substrate support member 90 to be carried out and placed on the table 36 is held by the transport jig 80. While the pusher 24 is rising, the control device 100 uses the detection unit 38 to determine whether the substrate support member 90 has separated from the table 36 (no longer detects that the substrate support member 90 is placed). If the control device 100 determines that the substrate support member 90 has not separated from the table 36 even after a predetermined time has elapsed since the pusher 24 began to rise, it determines that the movement of the substrate support member 90 from the table 36 (e.g., the holding of the substrate support member 90 by the transport jig 80) has not been performed correctly, outputs an error to the operation panel, and terminates the support member carry-out process. On the other hand, if the control device 100 determines that the substrate support member 90 has separated from the table 36 before the predetermined time has elapsed, it determines that the substrate support member 90 is correctly held by the transport jig 80 and lowers the table 36. The control device 100 also controls the transport jig 80 to hold the substrate support member 90 to be carried out that is placed on the table 46. Then, the control device 100 carries out the transport jig 80 holding the two substrate support members 90 to the storage rack 70, and ends the support member carry-out process.

[0044] Here, the correspondence between the main elements of the embodiment and the main elements of the present disclosure described in the claims will be described. That is, the substrate S corresponds to the substrate, the working device 10 corresponds to the working device, the substrate support member 90 corresponds to the substrate support member, the tables 36 and 46 correspond to the tables, the transport jig 80 corresponds to the transport jig, the frame forward / backward movement device 64, the head movement device 26, and the pusher 24 correspond to the jig transport unit, the pusher 24 and the pusher lifting device 25 correspond to the attachment / detachment operation unit, the control device 100 corresponds to the control device, the substrate mounting surface 91 corresponds to the substrate mounting surface, the contact surfaces 95a and 95b correspond to the contact surfaces, the suction port 91a corresponds to the suction port, the connection port 96 corresponds to the connection port, the held portion 93 corresponds to the held portion, the support member mounting surface 36a corresponds to the support member mounting surface, and the negative pressure supply port 36b corresponds to the negative pressure supply port. Furthermore, the gasket 96a corresponds to a gasket, the magnets 98a and 98b correspond to magnets, the detection units 38 and 48 correspond to detection units, the first side portion 93a corresponds to the first side portion, the second side portion 93b corresponds to the second side portion, the first arm member 82a corresponds to the first arm portion, and the second arm member 82b corresponds to the second arm portion.

[0045] According to the working device 10 of this embodiment described above in detail, the substrate support member 90 has a held portion 93 and can be held by the transport jig 80. The control device 100 controls the frame forward / backward movement device 64, the head movement device 26, the pusher 24, and the pusher lifting device 25 to perform a support member replacement process, including a support member carry-out process and a support member carry-in process, using the transport jig 80. The substrate support member 90 also has contact surfaces 95a, 95b on the side opposite the substrate placement surface 91, which contact the table 36 or 46 when placed on the table 36 or 46, and a connection port 96 that communicates with the suction port 91a for suctioning the substrate S and opens toward the side opposite the substrate placement surface 91. Meanwhile, the table 36 or 46 on which the substrate support member 90 is placed has a negative pressure supply port 36b for supplying negative pressure to the substrate support member 90. The negative pressure supply port 36b is disposed at a position that communicates with the connection port 96 of the substrate support member 90 when the substrate support member 90 is placed thereon. Therefore, when the carried-in substrate support member 90 is placed on the table 36 or 46, a state can be created in which negative pressure can be supplied from the negative pressure supply port 36b to the suction port 91a via the connection port 96. Therefore, it is not necessary to connect the negative pressure supply path to the substrate support member 90 as a separate process from the process of placing the substrate support member 90 on the table 36 or 46. As described above, in this working apparatus 10, it is easy to connect the negative pressure supply path to the substrate support member 90 when the substrate support member 90 is installed in the working apparatus 10.

[0046] The working device 10 also includes an elastic gasket 96a provided on at least one of the connection port 96 of the substrate support member 90 and the negative pressure supply port 36b of the table 36 (or table 46) (here, the connection port 96). This allows the gasket 96a to seal the space between the connection port 96 and the negative pressure supply port 36b, so that negative pressure can be reliably supplied to the suction port 91a of the substrate support member 90.

[0047] Furthermore, the working device 10 includes magnets 98a, 98b that are provided on at least one of the substrate support member 90 and the table 36 (or table 46) (here, the substrate support member 90) and that magnetically attract the other. This makes it easier for the substrate support member 90 and the table 36 (or table 46) to come into close contact with each other due to the magnetic force, thereby preventing the connection port 96 and the negative pressure supply port 36b from separating from each other. This ensures that negative pressure is reliably supplied by the suction port 91a of the substrate support member 90.

[0048] The working device 10 is equipped with detection units 38, 48 that detect when the substrate support member 90 is placed on the support member placement surface 36a of the table 36, 46. The control device 100 uses the detection units 38, 48 to perform at least one of (here, both) detecting when the substrate support member 90 is separated from the support member placement surface 36a in the support member carry-out process and detecting when the substrate support member 90 is placed on the support member placement surface 36a in the support member carry-in process. This allows the control device 100 to detect whether at least one of (here, both) the movement of the substrate support member 90 from the table 36, 46 in the support member carry-out process and the placement of the substrate support member 90 on the table 36, 46 in the support member carry-in process have been correctly performed.

[0049] Furthermore, in the support member unloading process, the control device 100 transports the transport jig 80 above the substrate support member 90 to be unloaded, and switches the first arm member 82a and the second arm member 82b of the transport jig 80 from the release position to the holding position, thereby attaching the substrate support member 90 to be unloaded to the transport jig 80. Furthermore, in the support member loading process, the control device 100 transports the transport jig 80, to which the substrate support member 90 to be loaded is attached, above the table 36 (or table 46), and switches the first arm member 82a and the second arm member 82b of the transport jig 80 from the holding position to the release position, thereby placing the substrate support member 90 to be loaded on the table 36 (or table 46). As a result, in the support member replacement process, the control device 100 can attach or detach the substrate support member 90 by using the pusher 24 to operate the first arm member 82a and the second arm member 82b of the transport jig 80.

[0050] It goes without saying that the present invention is not limited to the above-described embodiments, and can be embodied in various forms as long as they fall within the technical scope of the present disclosure.

[0051] For example, in the above-described embodiment, the held portion 93 of the substrate support member 90 includes a first side portion 93a and a second side portion 93b, which are supported by a pair of arm members 82 of the transport jig 80. However, the held portion 93 and the transport jig 80 may have any configuration as long as the transport jig 80 can hold and release the substrate support member 90. For example, a substrate support member 190 shown in FIG. 17 may be used instead of the substrate support member 90, and a transport jig 180 shown in FIG. 18 may be used instead of the transport jig 80. The substrate support member 190 includes a held portion 193 as shown in FIG. 17. Furthermore, the substrate support member 190 does not include a first pin member 93c and a second pin member 93d. Otherwise, the substrate support member 190 is similar to the substrate support member 90. The held portion 193 includes a first protrusion 193a and a second protrusion 193b protruding from opposite sides of the substrate support member 190. The first protrusion 193a and the second protrusion 193b are, for example, cylindrical protrusions protruding laterally. The held portion 193 has two first protrusions 193a and two second protrusions 193b. The transport jig 180 includes a rectangular frame 181, arm members 182 (first arm member 182a, second arm member 182b) arranged in the frame 181 with their tip ends facing each other and holding the substrate support member 190 from both sides, and arm members 183 (first arm member 183a, second arm member 183b) arranged in the frame 181 with their tip ends facing each other and holding the substrate support member 190 from both sides. Two first arm members 182a and two second arm members 182b are arranged in a row, front to back. Two first arm members 183a and two second arm members 183b are arranged in a row, front to back. The first arm members 182a, 183a and the second arm members 182b, 183b each have a recess formed on the upper surface of their tip that is slightly larger than the outer diameter of the first protrusion 193a and the second protrusion 193b. By placing the first protrusion 193a and the second protrusion 193b in this recess, the transport jig 180 can transport the substrate support member 190 while fixing its position in the front-to-rear direction. The two first arm members 182a of the arm member 182 support two first protrusions 193a, and the two second arm members 182b support two second protrusions 193b.The two first arm members 183a of the arm member 183 support two first protrusions 193a, and the two second arm members 183b support two second protrusions 193b. This allows the transport jig 180 to hold a substrate support member 190 with each of the arm members 182 and 183, and allows a total of two substrate support members 190 used in the first and second substrate transport and support devices 30, 40 to be transported at one time.

[0052] The operation of the control device 100 when performing the support member replacement process for the substrate support member 190 using this transport jig 180 will be described with reference to Fig. 19. Note that detailed description will be omitted for operations that are performed in the same manner as in the above-described embodiment, such as the transport of the transport jig 180 between the storage rack 70 and the working device 10, and the recognition and fine adjustment of the position of the substrate support member 190 using the camera device 50. When performing the support member removal process, the control device 100 transports the transport jig 180 to above the substrate support member 190 to be removed, and raises the substrate support member 190 to be removed that is placed on the table 36, 46 (Fig. 19A). When transporting the transport jig 180, the control device 100 positions the arm members 182, 183 (first arm members 182a, 183a and second arm members 182b, 183b) so that they are shifted in the front-to-rear direction (forward in FIG. 19A ) from directly above the first protrusion 193a and second protrusion 193b of the substrate support member 190. When raising the substrate support member 190, the control device 100 raises it to a height where the first protrusion 193a and second protrusion 193b of the substrate support member 190 are positioned above the arm members 182, 183 (first arm members 182a, 183a and second arm members 182b, 183b) of the transport jig 180 (see FIG. 19A ). Next, the control device 100 further transports the transport jig 180 so that the first arm members 182a, 183a and the second arm members 182b, 183b are positioned directly below the first protrusion 193a and the second protrusion 193b of the substrate support member 190 ( FIG. 19B ). In this state, the control device 100 lowers the tables 36, 46. As a result, the substrate support member 190 is lowered, causing the first arm members 182a, 183a and the second arm members 182b, 183b of the transport jig 180 to support the first protrusion 193a and the second protrusion 193b of the substrate support member 190, thereby attaching the substrate support member 190 to the transport jig 180 ( FIG. 19C ). Therefore, as the tables 36, 46 are lowered, the tables 36, 46 and the substrate support member 190 are separated from each other. The control device 100 may detect this separation using the detection units 38, 48 as in the above-described embodiment, and detect whether the movement of the substrate support member 190 from the tables 36, 46 during the support member removal process has been performed correctly.After attaching the substrate support member 190 to the transport jig 180 in this manner, the control device 100 unloads the transport jig 180 from the working device 10, thereby completing the support member unloading process.

[0053] The support member carry-in process using the transport jig 180 can be basically performed by reversing the steps of the support member carry-out process. Specifically, the control device 100 transports the transport jig 180, to which the substrate support member 190 to be carried in is attached, to above the table 36, 46 ( FIG. 19C ). Next, the control device 100 raises the table 36, 46 to lift the first protrusion 193 a and the second protrusion 193 b of the substrate support member 190 to be carried in from the first arm members 182 a, 183 a and the second arm members 182 b, 183 b, thereby removing the substrate support member 190 from the transport jig 180 and placing it on the table 36, 46 ( FIG. 19B ). The control device 100 may detect this placement using the detectors 38, 48, as in the above-described embodiment, to determine whether the substrate support member 190 has been properly placed on the table 36, 46 during the support member carry-in process. The control device 100 may also raise the tables 36, 46 until a predetermined time has elapsed since the placement was detected. This predetermined time can be set in advance as a waiting time before removing the substrate support member 190 from the transport jig 180. This allows the control device 100 to reliably remove the substrate support member 190 from the transport jig 180 using the detectors 38, 48. Next, the control device 100 transports the transport jig 180 so that the arm members 182, 183 (first arm members 182a, 183a and second arm members 182b, 183b) are shifted in the front-to-rear direction (forward in FIG. 19A ) from directly above the first protrusion 193a and second protrusion 193b of the substrate support member 190 (see FIG. 19A ). Thereafter, the control device 100 lowers the tables 36, 46. The control device 100 then unloads the transport jig 180, completing the support member loading process. The control device 100 may use the detection units 38, 48 to determine whether the substrate support member 190 continues to be placed on the table 36, 46 when the table 36, 46 is lowered. In this way, it is possible to detect abnormalities such as when the substrate support member 190 interferes with the arm member 182 or 183 of the transport jig 180 and becomes separated from the table 36, 46 when the table 36, 46 is lowered.

[0054] When the above-described transport jig 180 and substrate support member 190 are used, there is no need to move the arm member 82 with the pusher 24 as in the above-described embodiment, and in the support member replacement process, the support member lifting devices 37, 47 raise and lower the tables 36, 46 to attach and detach the substrate support member 190 to and from the transport jig 180. Therefore, the arm members 182, 183 of the transport jig 180 do not need to have movable parts, and the transport jig 180 can be simplified in configuration. In this aspect, the support member lifting devices 37, 47 correspond to the attachment / detachment operation unit of the present disclosure.

[0055] In the above-described embodiment, the gasket 96a is provided at the connection port 96, but in addition to or instead of this, a gasket may be provided at the negative pressure supply port 36b.

[0056] In the embodiment described above, the magnets 98a, 98b are provided on the substrate support member 90, but in addition to or instead of this, magnets may be provided on the table 36 (or table 46). However, it is preferable to provide magnets on the substrate support member 90 rather than on the tables 36, 46, because this can prevent problems such as metal pieces adhering to the tables 36, 46 due to magnetic force.

[0057] In the above-described embodiment, a capacitance-type proximity sensor is used as the detector 38, 48, but this is not limiting. For example, a non-contact proximity sensor other than a capacitance-type sensor (such as an inductive proximity sensor or a magnetic proximity sensor) may be used as the detector 38 (or the detector 48), or a contact-type limit switch may be used.

[0058] In the above-described embodiment, the working device 10 is provided with two lanes for transporting and supporting the substrate S, but it may also be provided with only one lane.

[0059] In the above-described embodiment, the working device of the present disclosure has been described as being applied to a printing device, but this is not limited to this, and the working device may be applied to any working device that performs work on a substrate supported by a support member, such as a component mounting device.

[0060] The working device and substrate support member of the present disclosure may be configured as follows.

[0061] The working device of the present disclosure may further include an elastic gasket provided on at least one of the connection port of the substrate support member and the negative pressure supply port of the table, whereby the gasket can seal the gap between the connection port and the negative pressure supply port, thereby ensuring that negative pressure is supplied more reliably to the suction port of the substrate support member.

[0062] The working device of the present disclosure may include a magnet provided on at least one of the substrate support member and the table, which magnetically attracts the other. This facilitates close contact between the substrate support member and the table due to the magnetic force, thereby preventing the connection port and the negative pressure supply port from separating. This ensures that negative pressure is reliably supplied by the suction port of the substrate support member.

[0063] The working device of the present disclosure may include a detection unit that detects that the substrate support member is placed on the support member placement surface of the table, and the control device may use the detection unit to at least one of detect that the substrate support member is separated from the support member placement surface in the support member carry-out process and detect that the substrate support member is placed on the support member placement surface in the support member carry-in process. In this way, it can be detected whether at least one of the movement of the substrate support member from the table in the support member carry-out process and the placement of the substrate support member on the table in the support member carry-in process has been performed correctly.

[0064] In the working device of the present disclosure, the held portion of the substrate support member includes a first side portion that is provided on a surface opposite to the substrate mounting surface, at a position closer to the substrate mounting surface than the contact surface, and located on an outer edge of the substrate support member, and a second side portion that is provided on a surface opposite to the substrate mounting surface, at a position closer to the substrate mounting surface than the contact surface, and located on an outer edge of the substrate support member opposite to the first side portion, the transport jig has a first arm portion that supports the first side portion of the substrate support member, and a second arm portion that is disposed so that tip ends of the first arm portion face each other and supports the second side portion, and the attachment / detachment operation unit operates the first arm portion and the second arm portion to attach the first arm portion and the second arm portion to the substrate support member. and a control device for controlling the transfer of the substrate support member between a holding position where the transfer of the substrate support member can be performed and a holding release position where the transfer of the substrate support member can be performed, and the control device may, in the support member unloading process, transfer the transfer jig to above the substrate support member to be unloaded and switch the first arm portion and the second arm portion of the transfer jig from the holding position to the holding position to attach the substrate support member to the transfer jig, and in the support member loading process, transfer the transfer jig to which the substrate support member to be loaded is attached to above the table and switch the first arm portion and the second arm portion of the transfer jig from the holding position to the holding release position to place the substrate support member to be loaded on the table. In this way, in the support member replacement process, the attachment / detachment operation unit can operate the first arm portion and the second arm portion of the transfer jig to attach and detach the substrate support member.

[0065] In the working device of the present disclosure, the held portion of the substrate support member includes a first protrusion and a second protrusion protruding from opposite sides of the substrate support member, the transport jig has a first arm portion that supports the first protrusion of the substrate support member, and a second arm portion that is disposed so that its tip end faces the first arm portion and supports the second protrusion, the attachment / detachment operation unit raises and lowers the table to raise and lower the substrate support member placed on the table, and the control device, in the support member carry-out process, transports the transport jig to above the substrate support member to be carried-out, and controls the control device to carry-out the substrate support member placed on the table. The control device may perform a process in which the control device transports the transport jig to which the substrate support member to be loaded is attached above the table, and then lifts the table to lift the first and second protrusions of the substrate support member to be loaded from the first and second arm portions, thereby removing the substrate support member from the transport jig and placing it on the table. In this way, the attachment / detachment operation unit raises and lowers the table in the support member replacement process to attach and detach the substrate support member.

[0066] The substrate support member of the present disclosure is used in a working device that performs work on a substrate, and is installed on the table of the working device to support the substrate, and comprises: a substrate mounting surface on which the substrate is placed; a contact surface opposite the substrate mounting surface that comes into contact with the table when the substrate is installed on the table; a suction port disposed on the substrate mounting surface for suctioning the substrate; a connection port that communicates with the suction port and opens toward the opposite side from the substrate mounting surface; and a held portion that is held by a transport jig for transporting the substrate support member into and out of the working device.

[0067] This substrate support member has a support portion and can be held by a transport jig. Therefore, this substrate support member can be transported into and out of a working apparatus using the transport jig. The substrate support member also has a contact surface opposite the substrate mounting surface that comes into contact with the table when placed on the table, and a connection port that opens toward the side opposite the substrate mounting surface and communicates with a suction port for suctioning the substrate. Therefore, if a negative pressure supply port is provided on the table at a position that communicates with the connection port of the substrate support member when the substrate support member is placed on the table, placing the substrate support member on the table of the working apparatus can connect the negative pressure supply port to the connection port, thereby enabling negative pressure to be supplied to the suction port. This eliminates the need to connect a negative pressure supply path to the substrate support member as a separate process from the process of placing the substrate support member on the table. For these reasons, using this substrate support member facilitates connecting a negative pressure supply path to the substrate support member when installing the substrate support member in a working apparatus. This substrate support member may employ various aspects of the substrate support member in the above-described working device, or may include additional configurations that are included in the substrate support member in the above-described working device.

[0068] This specification also discloses the technical idea of ​​changing "the work device according to claim 1 or 2" to "the work device according to any one of claims 1 to 3" in claim 4 as originally filed, the technical idea of ​​changing "the work device according to claim 1 or 2" to "the work device according to any one of claims 1 to 4" in claim 5 as originally filed, and the technical idea of ​​changing "the work device according to claim 1 or 2" to "the work device according to any one of claims 1 to 4" in claim 6 as originally filed.

[0069] The present disclosure is applicable to work devices that perform work on boards, such as mounting devices that mount components on boards and printing devices related to mounting devices.

[0070] 10 Working device, 11 Working device body, 20 Head device, 21 Head, 22 Squeegee, 23 Squeegee lifting device, 24 Pusher, 25 Pusher lifting device, 26 Head moving device, 27 Y-axis slider, 28 Guide rail, 29 Support rail, 30 First substrate transport support device, 31, 41 Conveyor device, 32, 42 Substrate guide, 33b, 43b Base frame, 33s, 43s Side frame, 34, 44 Conveyor spacing change device, 35, 45 Conveyor lifting device, 36, 46 Table, 36a Support member mounting surface, 36b Negative pressure supply port, 36c Pipe, 36d, 36e Positioning pin, 37, 47 Support member lifting device, 38, 48 Detection unit, 40 Second substrate transport support device, 50 Camera device, 51 Camera body, 52 Upper reading unit, 53 Lower reading unit, 55 Camera moving device, 56 X-axis slider, 57 X-axis guide rail, 58 Y-axis slider, 59 Y-axis guide rail, 60 Exchange device, 61a Left unit, 61b Right unit, 62 Rack support member, 63 Rack lifting device, 64 Frame front-rear moving device, 65 Pressure reducing device, 70 Storage rack, 71 Support rail, 72, 73 Opening, 80 Transport jig, 81 Frame body, 82 Arm member, 82a First arm member, 82b Second arm member, 90 Substrate support member, 91 Substrate placing surface, 91a Suction port, 92 Back surface, 93 Held portion, 93a First side portion, 93b Second side portion, 93c First pin member, 93d Second pin member, 94a First leg portion, 94b Second leg portion, 95a, 95b contact surface, 96 connection port, 96a gasket, 97a, 97b positioning hole, 98a, 98b magnet, 99a first recognition mark, 99b second recognition mark, 100 control device, 101 storage device, 180 conveying jig, 181 frame, 182, 183 arm member, 182a, 183a first arm member, 182b,183b Second arm member, 190 Substrate support member, 193 Hold portion, 193a First protrusion, 193b Second protrusion, 200 Management device, 241 Pusher plate, 242 Pusher roller, 821 Base member, 822 Arm plate, 822c Notch, 823 Holding member, 824 Torsion coil spring, 825 Side plate, 826 Lock plate, 827 Lock block, 828 Tension spring, F Frame body, M Screen mask, P1, P2 Pattern holes, S Substrate. ,

Claims

1. A working device for performing work on a substrate, comprising: a substrate support member for supporting the substrate; a table on which the substrate support member is placed; a jig transport section for transporting a transport jig capable of holding the substrate support member; an attachment / detachment operation section for holding and releasing the substrate support member by the transport jig; and a control device for controlling the jig transport section and the attachment / detachment operation section; wherein the substrate support member has: a substrate placement surface on which the substrate is placed; a contact surface opposite to the substrate placement surface and which comes into contact with the table when the substrate is placed on the table; a suction port disposed on the substrate placement surface for suctioning the substrate; a connection port which is in communication with the suction port and opens toward the opposite side to the substrate placement surface; and a held portion held by the transport jig; and wherein the table has: a support member placement surface on which the substrate support member is placed; and a negative pressure supply port disposed at a position in communication with the connection port with the substrate support member placed thereon and for supplying negative pressure to the substrate support member, The control device controls the jig transport unit and the attachment / detachment operation unit to perform a support member replacement process including a support member removal process in which the transport jig is brought in, the substrate support member to be removed that is placed on the table is held and attached to the brought in transport jig, and the transport jig after attachment is removed, and a support member introduction process in which the transport jig to which the substrate support member to be brought in is attached is brought in, the substrate support member to be brought in is released from its hold, removed from the transport jig and placed on the table, and the transport jig after removal is removed.

2. A working device according to claim 1, comprising an elastic gasket provided on at least one of the connection port of the substrate support member and the negative pressure supply port of the table.

3. A working device according to claim 1 or 2, comprising a magnet provided on at least one of said substrate support member and said table, and attracting the other by magnetic force.

4. A working device as claimed in claim 1 or 2, comprising: a detection unit which detects that the substrate support member has been placed on the support member placing surface of the table, and the control device uses the detection unit to at least one of detect that the substrate support member has moved away from the support member placing surface during the support member removal process, and detect that the substrate support member has been placed on the support member placing surface during the support member removal process.

5. The held portion of the substrate support member includes a first side portion that is provided on the surface opposite to the substrate mounting surface, closer to the substrate mounting surface than the contact surface, and located on an outer edge of the substrate support member, and a second side portion that is provided on the surface opposite to the substrate mounting surface, closer to the substrate mounting surface than the contact surface, and located on the outer edge of the substrate support member opposite to the first side portion; the transport jig has a first arm portion that supports the first side portion of the substrate support member, and a second arm portion that is disposed such that the tip portions of the first arm portion and the second arm portion face each other and supports the second side portion; the attachment / detachment operation unit operates the first arm portion and the second arm portion to switch between a holding position where the first arm portion and the second arm portion can hold the substrate support member from both sides and a holding release position where they release the holding position; The working device of claim 1 or 2, wherein, in the support member removal process, the control device transports the transport jig to above the substrate support member to be removed, and switches the first arm portion and the second arm portion of the transport jig from the holding position to the holding position to attach the substrate support member to the transport jig; and, in the support member removal process, the control device transports the transport jig to which the substrate support member to be brought in is attached, to above the table, and switches the first arm portion and the second arm portion of the transport jig from the holding position to the holding position to place the substrate support member to be brought in on the table.

6. The held portion of the substrate support member includes a first protrusion and a second protrusion protruding from opposite sides of the substrate support member, the transport jig has a first arm portion supporting the first protrusion of the substrate support member, and a second arm portion arranged such that the tip of the first arm portion faces the tip of the second arm portion and supports the second protrusion, the attachment / detachment operation unit raises and lowers the table to raise and lower the substrate support member placed on the table, and the control device, in the support member removal process, transports the transport jig to above the substrate support member to be removed, raises the substrate support member to be removed placed on the table, and then transports the transport jig and lowers the substrate support member, thereby supporting the first protrusion and the second protrusion on the first arm portion and the second arm portion and attaching the substrate support member to the transport jig, 3. The working device of claim 1 or 2, wherein, in the support member loading process, the control device transports the transport jig to which the substrate support member to be loaded is attached, to above the table, and lifts the table to lift the first protrusion portion and the second protrusion portion of the substrate support member to be loaded from the first arm portion and the second arm portion, thereby removing the substrate support member from the transport jig and placing it on the table.

7. A substrate support member used in a working device that performs operations on a substrate, the substrate support member being mounted on a table of the working device to support the substrate, the substrate support member comprising: a substrate mounting surface on which the substrate is placed; a contact surface opposite the substrate mounting surface that comes into contact with the table when the substrate support member is placed on the table; a suction port disposed on the substrate mounting surface for suctioning the substrate; a connection port that communicates with the suction port and opens toward the opposite side to the substrate mounting surface; and a held portion that is held by a transport jig for transporting the substrate support member in and out of the working device.

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