Six-degree-of-freedom air-floating moving apparatus

Abstract

The present invention relates to the technical field of air-floating linear platforms. Provided is a six-degree-of-freedom air-floating moving apparatus, the apparatus comprising a base (1), a floating platform (2) being provided above the base (1), a micro-movement platform (3) being provided above the floating platform (2), the base (1) being provided with an X-axis motion assembly (4), the floating platform (2) being provided with a Y-axis motion assembly (5), the X-axis motion assembly (4) being capable of driving the floating platform (2) to move, the Y-axis motion assembly (5) being capable of driving the micro-movement platform (3) to move, a shock absorption assembly (6) for reducing shaking being connected to the bottom of the micro-movement platform (3), the X-axis motion assembly (4) comprising X-axis linear electric motors (40) and X-axis bearing platforms (41), the X-axis linear electric motors (40) being connected to two sides of the floating platform (2), the X-axis bearing platforms (41) being arranged on two sides below the floating platform (2), air bearings (7) being provided at the bottom of the floating platform (2), and the air bearings (7) fitting with the X-axis bearing platforms (41).

Description

A six-degree-of-freedom air-floating mobile device Technical Field

[0001] The invention belongs to the technical field of air-floating linear platforms, and in particular relates to an air-floating mobile device with six degrees of freedom. Background Art

[0002] High-precision positioning stages are widely used in semiconductor manufacturing and precision machining. For example, projection lithography equipment has seen increasing technological advancements, driven by increasing production efficiency requirements. As substrates grow in size and thickness, the travel of the positioning stages supporting them increases. Various types of precision positioning stages, such as wafer stages and mask stages in lithography machines, are frequently used in semiconductor equipment manufacturing, precision machining, and image alignment. To achieve ultra-precision positioning requirements, actuators supported by air and magnetic levitation are widely used as ultra-precision motion stages. Air levitation, when used as a support and guide, reduces friction and other effects caused by mechanical transmission, improving system positioning accuracy. When linear motors are used as drive units, the driving force is provided by the Lorentz force generated by energized coils in the air gap magnetic field of a permanent magnet array. Controlling the current in the coils adjusts the actuator's thrust, offering advantages such as a simple structure.

[0003] The mask stages in current lithography machines typically employ a stacked coarse and fine motion structure, consisting of two coarse motion stages that move along the Y-axis and a fine motion stage with six degrees of freedom. The two coarse motion stages are connected by a connecting beam, which is fixed to one coarse motion stage and connected to the other coarse motion stage via a flexible hinge. The fine motion stage is mounted on the connecting beam, enabling the overall motion of the positioning device. This platform is structurally complex, increasing the system's structural mass and potentially affecting its motion response. Furthermore, positional deviations between the two coarse motion stages can affect their performance, compromising the system's positioning accuracy.

[0004] US Patent Application No. US17668425 discloses a high-precision air-floating motion platform and method for wafer testing. The air-floating motion platform comprises: a base; a beam mounted on the base; a slide for mounting the wafer; a linear motor configured to drive the slide along the beam; at least three sensors configured to detect the vertical straightness of the wafer; air bearings comprising a first air bearing, a second air bearing, and a third air bearing configured to suspend the slide; and a compensation device configured to compensate for the vertical straightness of the wafer based on real-time data detected by the sensors. This invention reduces motion interference caused by platform deviation, but there is room for improvement in the following technical aspects: the reciprocating motion of the platform can easily affect the uniformity of the air film on the air-floating bearing, which is detrimental to sliding stability; and the platform can only slide in a single axis, failing to achieve precise coordinate control movement within space.

[0005] Summary of the Invention

[0006] The object of the present invention is to provide a six-degree-of-freedom air-floating mobile device that has motion stability, precision and can prevent motion interference.

[0007] The technical solutions adopted by the present invention to achieve the above-mentioned purpose are:

[0008] A six-degree-of-freedom air-floating mobile device comprises: a base, a floating platform disposed above the base, a fine-motion platform disposed above the floating platform, an X-axis moving assembly disposed on the base, and a Y-axis moving assembly disposed on the floating platform. The X-axis moving assembly is capable of driving the floating platform to move, and the Y-axis moving assembly is capable of driving the fine-motion platform to move. A shock-absorbing assembly is connected to the bottom of the fine-motion platform. The floating platform is controlled by the X-axis moving assembly disposed on the base, causing the floating platform to move linearly along the X-axis relative to the base. The fine-motion platform is controlled by the Y-axis moving assembly connected to the floating platform, causing the fine-motion platform to move linearly along the Y-axis relative to the floating platform. The fine-motion platform itself can achieve axial rotation in the X-axis or Y-axis directions to adjust its angular position. The fine-motion platform itself has a retractable rotating platform capable of achieving elevation and axial rotation in the Z-axis direction. In conjunction with the X-axis moving assembly and the Y-axis moving assembly, six-degree-of-freedom movement is achieved. The overall structure is compact and occupies little space.

[0009] Preferably, the X-axis motion assembly includes an X-axis linear motor and an X-bearing weight. The X-axis linear motor is connected to both sides of the floating platform, and the X-bearing weight is located on both sides below the floating platform. An air bearing is provided at the bottom of the floating platform, and the air bearing and the X-bearing weight are arranged in conjunction with each other. The X-axis linear motor is used to control and drive the movement of the floating platform. The air bearing can form an air film on the upper end of the X-bearing weight after ventilation, forming an air support at the bottom of the floating platform.

[0010] Preferably, the Y-axis moving component includes a Y-axis linear motor and a slide. The Y-axis linear motor is fixed under the floating platform. The slide is arranged on the floating platform and connected to the Y-axis linear motor. The micro-motion platform is arranged above the slide through a shock-absorbing component.

[0011] Preferably, the shock-absorbing assembly includes a base plate fixed to the upper end of the slide, a first shock-absorbing member supporting the micro-motion stage is provided at the center of the base plate, a plurality of second shock-absorbing members surrounding the first shock-absorbing member are provided on the base plate, a first connecting tube is provided between the first shock-absorbing member and any second shock-absorbing member, and a second connecting tube is provided between adjacent second shock-absorbing members. The first shock-absorbing member at the center of the base plate provides central support for the micro-motion stage. The micro-motion stage vibrates during movement or at the moment of stopping movement, and the vibration is transmitted to the first shock-absorbing member below. The first shock-absorbing member disperses the interference generated by the vibration to the plurality of second shock-absorbing members dispersedly arranged around it through the first connecting tube, thereby reducing vibration interference at the inner center of the micro-motion stage. On the one hand, this improves movement precision and prevents interference during movement and sliding caused by assembly deviation caused by vibration. On the other hand, it is beneficial to protect the internal structure of the micro-motion stage and reduce maintenance costs.

[0012] Preferably, the first shock absorber includes a base fixed to the bottom plate, a sleeve is fixed in the base, a piston is slidably connected in the sleeve, a rubber head is connected above the piston, the rubber head supports the bottom of the micro-motion platform, a cylindrical spring is connected between the rubber head and the piston, a plurality of air holes are opened on the side wall of the sleeve, and a plurality of vertical slits are opened on the side wall of the base. When the fine motion table vibrates, the rubber head is pressed down, and the rubber head drives the piston connected below to rise and fall relative to the sleeve. At the same time, the cylindrical spring is compressed and deformed and then reset. The piston moves down in the sleeve and squeezes the internal gas. The gas can be slowly discharged into the base from the air holes arranged around the side wall of the sleeve and slowly discharged from multiple vertical slits, cushioning the jump of the fine motion table in the Z-axis direction and further improving the accuracy. The operating space of the fine motion table is usually a dust-free environment, but the possibility of impurities and debris on the surface of the floating table cannot be ruled out. The airflow discharged from multiple vertical slits can flow outward. On the one hand, it can promote the airflow around the bottom of the fine motion table, which is beneficial to clean the floating table of impurities and realize self-cleaning. On the other hand, the flowing airflow can dissipate heat to the fine motion table upward, optimizing the working environment of the fine motion table and increasing its service life. The setting of the sleeve and the piston forms a gap between the fine motion table and the floating table, preventing the air film formed by the air bearing from affecting the stability of the parts above the fine motion table.

[0013] Preferably, the base plate is a square plate, and the second shock absorber includes cylindrical airbags. A plurality of cylindrical airbags are respectively located at the four corners of the base plate. The cylindrical airbags are connected to the interior of the base through a first connecting tube, and adjacent cylindrical airbags are connected through a second connecting tube. The airflow discharged from the air holes of the sleeve can partially enter each cylindrical airbag through the first connecting tube. The airbags are inflated to form support at the corners of the micro-movement table to ensure the parallelism of the micro-movement table and the floating platform, and prevent the installation of parts on the micro-movement table from tilting, resulting in reduced accuracy. When the micro-movement table works at too high an intensity and causes local overheating, the heat is transferred to the cylindrical airbags, causing the gas inside to absorb heat and expand. The adjacent cylindrical airbags disperse the heated gas through the second connecting tube, preventing the micro-movement table from malfunctioning due to local overheating. Moreover, because the cylindrical airbags are restricted by the micro-movement table above and the base plate below, the expansion of the cylindrical airbags is limited, so that the gas acts on the base and is discharged from the sleeve to achieve heat dissipation.

[0014] Preferably, the air bearing comprises a base having a cylindrical recess at its bottom, a porous plate disposed within the recess, a cavity formed between the inner wall of the cylindrical recess and the outer wall of the porous plate, the cavity being connected to an air vent, a rectifier disposed within the cavity, the rectifier plate having a U-shaped cross-section and an upwardly facing opening, and a filter disposed at the center of the rectifier plate. Gas entering the vent is initially filtered by an external filter before entering the cavity. To ensure that the gas passing through the porous plate does not contain fine particles or water, a filter having a higher retention rate than the external filter is provided for secondary filtration of the gas, preventing impurities and particles in the gas from clogging the porous plate and thereby ensuring the stability of the air film formed on the porous plate. Another portion of the airflow, upon contacting the rectifier plate, is guided by its curved surface, thereby diverting impurities and particles filtered on the filter and promoting their fall into the concave space of the rectifier plate. This not only allows for particle collection, but also prevents particles from remaining on the filter, preventing subsequent gas from passing smoothly and causing an unstable air film formed on the porous plate.

[0015] Preferably, the base is provided with a guide ring at the bottom, which is sleeved on the outside of the porous plate. The guide ring has a guide groove on the inside, which is an arc-shaped groove, and multiple guide grooves are arranged in a circumferential manner. When there is no ventilation or the airflow output is unstable, the bottom end face of the guide ring contacts the X-bearing weight, reducing the possibility of wear on the porous plate, ensuring stable output of the air film, and increasing the service life to reduce maintenance costs. The guide ring guides the gas discharged from the porous plate through its inner guide groove to flow rapidly in all directions, forming a swirling airflow, which can prevent the airflow from gathering in front of the porous plate and causing air blockage, and helps prevent the displacement of the floating platform due to poor exhaust.

[0016] Since the present invention adopts a shock-absorbing component that can reduce shaking interference and dissipate heat by itself to support the micro-motion table, it has the following beneficial effects: when the micro-motion table shakes, the piston squeezes the gas in the sleeve to form consumption, which is beneficial to improving the movement accuracy; when the piston moves, the squeezed gas is slowly discharged from the air hole, which helps to clean dust, prevent jamming, and also helps to dissipate heat from the micro-motion table; the air bags arranged at each corner of the bottom plate are connected to each other, which can support the micro-motion table while being connected through the second connecting pipe to achieve heat dissipation of the micro-motion table, preventing local overheating and causing micro-motion table failure; the rectifier plate and the filter screen are arranged in the air flow input direction of the porous plate to filter the input air flow to prevent the porous plate from being blocked. At the same time, the rectifier plate guides the forward air flow, cleans and collects particulate impurities on the filter screen, and prevents the filter screen from being blocked and causing the air film formed on the porous plate to be unstable; the guide ring forms a vortex diffusion on the output air film of the porous plate to prevent the concentrated output of the air flow from causing air blockage and deviation; the bottom end of the guide ring is lower than the bottom end of the porous plate, and contacts the X-bearing weight when the air is cut off or the air supply is insufficient, preventing the porous plate from being worn. Therefore, the present invention is a six-degree-of-freedom air-floating mobile device with motion stability, precision and the ability to prevent motion interference. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of the installation of the floating platform on the base;

[0018] Figure 2 is a schematic diagram of the connection between the base and the floating platform;

[0019] Figure 3 is a schematic diagram of the connection between the shock absorbing assembly and the micro-motion stage;

[0020] Figure 4 is a schematic diagram of the structure of the shock absorbing assembly;

[0021] FIG5 is a schematic cross-sectional view of a first shock absorbing member;

[0022] Figure 6 is a schematic diagram of the internal structure of the air bearing;

[0023] Figure 7 is a schematic diagram of a guide ring;

[0024] FIG8 is a schematic diagram of the internal structure of the pipe sleeve.

[0025] Figure 1: Base 1; floating platform 2; fine-motion platform 3; X-axis moving assembly 4; X-axis linear motor 40; X-bearing counter-balance platform 41; Y-axis moving assembly 5; Y-axis linear motor 50; slide 51; shock-absorbing assembly 6; bottom plate 60; first shock-absorbing member 61; second shock-absorbing member 62; first connecting pipe 63; second connecting pipe 64; base 610; sleeve 611; piston 612; rubber head 613; cylindrical spring 614; air hole 615; vertical slit 616; air bag 620; air bearing 7; base 70; porous plate 71; vent 72; rectifier plate 73; filter screen 74; guide ring 8; guide groove 80; auxiliary assembly 9; protective ring 90; groove body 91; sleeve 92; silicone valve 93; support ring 94; return spring 95; guide column 96. DETAILED DESCRIPTION

[0026] The technical solution of the present invention is further described in detail below with reference to the specific embodiments and the accompanying drawings:

[0027] Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] Referring to Figures 1-3, a six-degree-of-freedom air-floating mobile device includes: a base 1, a floating platform 2 is provided above the base 1, a fine-motion platform 3 is provided above the floating platform 2, the base 1 is provided with an X-axis moving component 4, the floating platform 2 is provided with a Y-axis moving component 5, the X-axis moving component 4 can drive the floating platform 2 to move, the Y-axis moving component 5 can drive the fine-motion platform 3 to move, and a shock-absorbing component 6 is connected to the bottom of the fine-motion platform 3, which is used to stabilize the fine-motion platform 3.

[0029] The fine-motion stage 3 has four degrees of freedom. The fine-motion stage 3 can rotate in the X-axis direction, the Y-axis direction, and the Z-axis direction, and can rise and fall in the Z-axis direction to achieve focusing and leveling.

[0030] The floating platform 2 is controlled by the X-axis moving component 4 set on the base 1, so that the floating platform 2 moves linearly on the X-axis relative to the base 1. The fine-motion stage 3 is controlled by the Y-axis moving component 5 connected to the floating platform 2, so that the fine-motion stage 3 moves linearly on the Y-axis relative to the floating platform 2. The fine-motion stage 3 itself can realize axial rotation in the X-axis or Y-axis direction to adjust the angular position. The fine-motion stage 3 itself has a retractable rotating platform that can realize retraction and axial rotation in the Z-axis direction. In conjunction with the X-axis moving component 4 and the Y-axis moving component 5, six-degree-of-freedom movement is realized. The overall structure is compact and occupies little space.

[0031] The X-axis moving assembly 4 includes an X-axis linear motor 40 and an X-bearing weight 41. The X-axis linear motor 40 is connected to both sides of the floating platform 2. The X-bearing weight 41 is arranged on both sides below the floating platform 2. An air bearing 7 is provided at the bottom of the floating platform 2. The air bearing 7 is arranged in coordination with the X-bearing weight 41.

[0032] The X-axis linear motor 40 is used to control and drive the floating platform 2 to move. The air bearing 7 can form an air film on the upper end of the X-bearing heavy platform 41 after ventilation, forming an air floating support at the bottom of the floating platform 2.

[0033] The Y-axis moving component 5 includes a Y-axis linear motor 50 and a slide 51. The Y-axis linear motor 50 is fixed below the floating platform 2. The slide 51 is arranged on the floating platform 2 and connected to the Y-axis linear motor 50. The fine-motion platform 3 is arranged above the slide 51 through the shock-absorbing component 60.

[0034] Referring to Figures 4 and 5, the shock-absorbing assembly 6 includes a base plate 60 fixed to the upper end of the slide 51. A first shock-absorbing member 61 supporting the fine-motion stage 3 is provided at the center of the base plate 60. A plurality of second shock-absorbing members 62 surrounding the first shock-absorbing member 61 are provided on the base plate 60. A first connecting pipe 63 is provided between the first shock-absorbing member 61 and any second shock-absorbing member 62, and a second connecting pipe 64 is provided between adjacent second shock-absorbing members 62.

[0035] The first shock absorber 61 at the center of the base plate 60 provides central support for the fine motion stage 3. The fine motion stage 3 vibrates during movement or at the moment of stopping movement, and the vibration is transmitted to the first shock absorber 61 below. The first shock absorber 61 disperses the interference generated by the vibration to the multiple second shock absorbers 62 arranged around it through the first connecting pipe 63, thereby reducing the vibration interference at the center of the fine motion stage 3. On the one hand, this improves the movement precision and prevents interference during movement slip caused by assembly deviation caused by vibration. On the other hand, it is beneficial to protect the internal structure of the fine motion stage 3 and reduce maintenance costs.

[0036] The first shock absorber 61 includes a base 610 fixed to the bottom plate 60, a sleeve 611 is fixed in the base 610, a piston 612 is slidably connected in the sleeve 611, a rubber head 613 is connected above the piston 612, the rubber head 613 supports the bottom of the micro-motion stage 3, a cylindrical spring 614 is connected between the rubber head 613 and the piston 612, a plurality of air holes 615 are provided on the side wall of the sleeve 611, and a plurality of vertical slits 616 are provided on the side wall of the base 610. Under the premise of sufficient air pressure, the vertical slits 616 can release gas from the inside to the outside.

[0037] When the fine-motion stage 3 vibrates, the rubber head 613 is pressed down. The rubber head 613 drives the piston 612 connected below to rise and fall relative to the sleeve 611. At the same time, the cylindrical spring 614 is deformed under pressure and resets. The piston 612 moves down in the sleeve 611 and squeezes the internal gas. The gas can be discharged from the air holes 615 arranged around the side wall of the sleeve 611 into the base 610, and then slowly discharged outward through the vertical slit 616, thereby buffering the jump of the fine-motion stage 3 in the Z-axis direction and further improving the accuracy. The operating space of the fine-motion stage 3 is usually a dust-free environment, but not In order to eliminate the possibility of impurities and debris on the surface of the floating platform 2, the air flow discharged from the multiple air holes 615 flows upward from the base 610. On the one hand, it can promote the air flow around the bottom of the fine-motion platform 3, which is beneficial to clean the impurities of the floating platform 2 and achieve self-cleaning. On the other hand, the flowing air flow can dissipate heat upward to the fine-motion platform 3, optimize the working environment of the fine-motion platform 3, and increase the service life. The arrangement of the sleeve 611 and the piston 612 forms a gap between the fine-motion platform 3 and the floating platform 2, preventing the air film formed by the air bearing 7 from affecting the stability of the parts above the fine-motion platform 3.

[0038] The bottom plate 60 is a square plate, and the second shock absorber 62 includes cylindrical airbags 620. Multiple cylindrical airbags 620 are respectively located at the four corners of the bottom plate 60. The cylindrical airbags 620 are connected to the inside of the base 610 through the first connecting pipe 63, and adjacent cylindrical airbags 620 are connected through the second connecting pipe 64.

[0039] The airflow discharged from the air hole 615 of the sleeve 611 can partially enter each cylindrical airbag 620 through the first connecting pipe 63. The airbag 620 is inflated to form support for the corners of the fine-motion platform 3 to ensure the parallelism of the fine-motion platform 3 and the floating platform 2, and prevent the parts on the fine-motion platform 3 from being tilted and causing a decrease in accuracy. When the working intensity of the fine-motion platform 3 is too high and its local temperature is overheated, the heat is transferred to the cylindrical airbag 620, causing the internal gas to absorb heat and expand. The adjacent cylindrical airbags 620 disperse the heated gas through the second connecting pipe 64 to prevent the fine-motion platform 3 from being locally overheated and causing malfunction. Since the cylindrical airbag 620 is restricted by the upper fine-motion platform 3 and the lower base plate 60, the expansion degree of the cylindrical airbag 620 is limited, so that the gas acts on the base 610 and the sleeve 611 and is discharged to achieve heat dissipation.

[0040] Referring to Figures 6-7, the air bearing 7 includes a base 70, which has a cylindrical groove at the bottom. A porous plate 71 is provided in the cylindrical groove. A cavity is formed between the inner wall of the cylindrical groove and the outer wall of the porous plate 71. The cavity is connected to a vent 72. A rectifier plate 73 is provided in the cavity. The cross-section of the rectifier plate 73 is U-shaped and the opening is facing upward. A filter screen 74 is provided in the center of the rectifier plate 73.

[0041] It should be noted that the filter 74 uses an air filter 74 with a filtration accuracy of 0.2 microns to 50 microns, and the material of the filter 74 is polypropylene with heat resistance and chemical resistance.

[0042] The gas entering the air vent 72 is initially filtered by an external filtering device and then enters the cavity. In order to ensure that the gas passing through the porous plate 71 does not contain fine particles or water, a filter 74 with a retention accuracy higher than that of the external filtering device is set to perform a secondary filtration on the gas to prevent impurities and particulate matter in the gas from clogging the porous plate 71, so as to ensure the stability of the air film formed on the porous plate 71. The other part of the airflow contacts the rectifier plate 73 and is guided by its curved surface, which can drain the impurities and particulate matter filtered on the filter 74 and promote the particulate matter to fall into the concave space of the rectifier plate 73, forming particulate matter collection on the one hand, and preventing particulate matter from staying on the filter 74 for a long time, which makes the subsequent gas unable to pass smoothly, resulting in an unstable air film formed on the porous plate 71.

[0043] The base 70 is provided with a guide ring 8 at the bottom. The guide ring 8 is mounted on the outside of the porous plate 71. The bottom end surface of the guide ring 8 is lower than the bottom end surface of the porous plate 71. The guide ring 8 has a guide groove 80 on the inside. The guide groove 80 is an arc-shaped groove, and multiple guide grooves 80 are arranged in a surrounding manner. When there is no ventilation or the airflow output is unstable, the bottom end surface of the guide ring 8 contacts the X-bearing weight 41, reducing the possibility of wear on the porous plate 71, ensuring stable output of the air film, and increasing the service life to reduce maintenance costs. The guide ring 8 guides the gas discharged from the porous plate 71 through the guide groove 80 on its inside to flow rapidly in all directions, forming a spiral airflow. This can prevent the airflow from gathering in front of the porous plate 71 and causing air blockage, and helps prevent the displacement of the floating platform 2 due to poor exhaust.

[0044] Referring to Figures 7-8, an auxiliary component 9 is provided on the outer side of the bottom of the air bearing 7, and the auxiliary component 9 includes a protective ring 90. The protective ring 90 is located on the outer side of the guide ring 8 and is connected to the base 70. The protective ring 90 is provided with a plurality of longitudinally through grooves 91, and the plurality of grooves 91 are arranged around the center of the protective ring 90. A sleeve 92 is provided in the groove 91, and a silicone valve 93 is slidingly provided in the sleeve 92. The silicone valve 93 is hemispherical and the concave surface is upward. A support ring 94 is fixed in the sleeve 92, and the support ring 94 is located below the silicone valve 93 and a reset spring 95 is connected between the two. A guide column 96 is fixed in the middle of the support ring 94. The silicone valve 93 has a cross opening, and the guide column 96 can pass through the cross opening. The groove 91 and the vent 72 are connected to the same air pump.

[0045] The air pump works to output gas, and the gas enters the cavity in the air bearing 7 and the sleeve 92 respectively. When the air pressure entering the sleeve 92 is within an appropriate range, the silicone valve 93 will not be deformed. At this time, the cross opening is closed, and subsequent gas continues to flow out from the porous plate 71 of the air bearing 7 to form a uniform air film. When the air pressure of the air pump output gas is too high, the air pressure entering the sleeve 92 acting on the silicone valve 93 increases, pushing the silicone valve 93 close to the support ring 94 and squeezing the reset spring 95. At this time, the cross opening passes through the guide column 96 and is pushed open to form a silicone valve 93. The downward circulation causes the excessive atmospheric pressure to flow out from the bottom of the tube sleeve 92 to reduce the air pressure intensity at the porous plate 71 and ensure the stability of the air film output. At the same time, the airflow flowing out from the bottom of the tube sleeve 92 flows out from the outer edge of the porous plate 71, realizing the cleaning of the X-bearing weight platform 41 without affecting the air film. When the gas pressure returns to normal, the air pressure above the silicone valve 93 decreases and loses the downward pressure, causing the reset spring 95 to restore its deformation, and the cross opening of the silicone valve 93 closes after leaving the guide column 96 to ensure that the airflow is normally output from the porous plate 71 to form an air film.

[0046] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A six-degree-of-freedom air-floating mobile device, comprising: A base (1), a floating platform (2) is arranged above the base (1), and the characteristics are: a micro-motion platform (3) is arranged above the floating platform (2), the base (1) is provided with an X-axis moving component (4), the floating platform (2) is provided with a Y-axis moving component (5), the X-axis moving component (4) can drive the floating platform (2) to move, the Y-axis moving component (5) can drive the micro-motion platform (3) to move, and the bottom of the micro-motion platform (3) is connected to a shock absorbing component (6), The Y-axis moving assembly (5) comprises a Y-axis linear motor (50) and a slide table (51), wherein the Y-axis linear motor (50) is fixed below the floating table (2), the slide table (51) is arranged on the floating table (2) and connected to the Y-axis linear motor (50), and the micro-motion table (3) is arranged above the slide table (51) through the shock absorbing assembly (6). The shock absorbing assembly (6) comprises a bottom plate (60) fixed to the upper end of the slide table (51), a first shock absorbing member (61) for supporting the micro-motion table (3) is provided at the center of the bottom plate (60), a plurality of second shock absorbing members (62) surrounding the first shock absorbing member (61) are provided on the bottom plate (60), a first connecting pipe (63) is provided between the first shock absorbing member (61) and any of the second shock absorbing members (62), and a second connecting pipe (64) is provided between adjacent second shock absorbing members (62), The first shock absorbing member (61) comprises a base (610) fixed to the bottom plate (60), a sleeve (611) being fixed inside the base (610), a piston (612) being slidably connected inside the sleeve (611), a rubber head (613) being connected above the piston (612), the rubber head (613) supporting the bottom of the micro-motion platform (3), a cylindrical spring (614) being connected between the rubber head (613) and the piston (612), a plurality of air holes (615) being provided on the side wall of the sleeve (611), and a plurality of vertical slits (616) being provided on the side wall of the base (610), The bottom plate (60) is a square plate, and the second shock-absorbing component (62) includes a cylindrical airbag (620). A plurality of the cylindrical airbags (620) are respectively located at the four corners of the bottom plate (60). The cylindrical airbags (620) are connected to the interior of the base (610) via the first connecting pipe (63), and adjacent cylindrical airbags (620) are connected via the second connecting pipe (64).

2. The six-degree-of-freedom air-floating mobile device according to claim 1, characterized in that: The X-axis moving assembly (4) comprises an X-axis linear motor (40) and an X-bearing weight (41), wherein the X-axis linear motor (40) is connected to both sides of the floating platform (2), and the X-bearing weight (41) is arranged on both sides below the floating platform (2). An air bearing (7) is arranged at the bottom of the floating platform (2), and the air bearing (7) is arranged in coordination with the X-bearing weight (41).

3. The six-degree-of-freedom air-floating mobile device according to claim 2, characterized in that: The air bearing (7) comprises a base (70), the base (70) having a cylindrical groove at the bottom, a porous plate (71) being arranged in the cylindrical groove, a cavity being formed between the inner wall of the cylindrical groove and the outer wall of the porous plate (71), the cavity being connected with an air vent (72), a rectifying plate (73) being arranged in the cavity, the rectifying plate (73) having a U-shaped cross section and an opening facing upward, and a filter screen (74) being arranged in the center of the rectifying plate (73).

4. The six-degree-of-freedom air-floating mobile device according to claim 3, characterized in that: The base (70) is provided with a guide ring (8) at the bottom, the guide ring (8) is sleeved on the outside of the porous plate (71), the guide ring (8) is provided with a guide groove (80) on the inside, the guide groove (80) is an arc-shaped groove, and a plurality of the guide grooves (80) are arranged in a surrounding manner.

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