Conductive slip ring and semiconductor process device

Abstract

The present application discloses a conductive slip ring and a semiconductor process device. The disclosed conductive slip ring is applied to a process chamber of the semiconductor process device. The conductive slip ring comprises a housing, a fixed electrical connection part, and a rotating electrical connection part. The housing is provided with a housing cavity and a first mounting hole in communication with the housing cavity, and the housing is used to be sealingly connected to the process chamber, so that the housing cavity is in sealed communication with a chamber space of the process chamber. The fixed electrical connection part is in sealing fit with the first mounting hole, a first end portion of the fixed electrical connection part extends into the housing cavity and is relatively rotatably electrically connected to the rotating electrical connection part, and a second end portion of the fixed electrical connection part is located outside of the housing and is used to be electrically connected to a power supply. The rotating electrical connection part is rotatably disposed in the housing and is used to be electrically connected to an electrical device in the process chamber. According to the solution, the problem in the related art of a poor sealing effect due to use of a magnetic fluid structure in a process chamber for implementing sealing between the process chamber and the external environment of the process chamber can be solved.

Description

Conductive slip rings and semiconductor process equipment Technical Field

[0001] The present application belongs to the technical field of semiconductor process equipment, and specifically relates to a conductive slip ring and semiconductor process equipment. Background Art

[0002] During the film deposition process, the carrier supports the wafer while rotating it to produce a film with a relatively uniform thickness. In addition to its carrying function, the carrier also has other functions, such as heating and radio frequency. To achieve some of these functions, the rotating carrier needs to be powered to operate the electrical components within it. Therefore, rotary power supply technology is the core technology that enables some of the carrier's functions.

[0003] Since the support seat is located in the process space of the process chamber, and the process space needs to maintain a vacuum environment during the process, and the power supply is arranged outside the process chamber, this structure requires the electrical components to pass through the process chamber when electrically connected to the power supply. In order not to destroy the vacuum environment of the process space, the related technology uses a magnetic fluid structure to achieve a sealed isolation between the process space and the external environment of the process chamber. However, the use of a magnetic fluid structure to achieve sealed isolation has the problem of poor sealing effect, which can easily lead to communication between the process space and the external environment of the process chamber, resulting in process failure.

[0004] Of course, these problems are not limited to electrical devices within the carrier that face these problems when using rotary power supply technology. Structures in other areas within the process chamber that require power supply through rotary power supply technology will also encounter similar or identical technical problems.

[0005] Summary of the Invention

[0006] The present invention discloses a conductive slip ring and semiconductor process equipment to solve the problem of poor sealing effect in a process chamber involving related art, in which a magnetic fluid structure is used to achieve sealing between a process space and an external environment of the process chamber.

[0007] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0008] In a first aspect, embodiments of the present application disclose a conductive slip ring for use in a process chamber of a semiconductor process equipment. The conductive slip ring comprises a housing, a fixed electrical connection portion, and a rotating electrical connection portion, wherein:

[0009] The housing has a housing cavity and a first mounting hole communicating with the housing cavity, and the housing is used to be sealed and connected to the process chamber so that the housing cavity is sealed and communicated with the chamber space of the process chamber;

[0010] The fixed electrical connection portion is sealed and matched with the first mounting hole, and a first end portion of the fixed electrical connection portion extends into the housing cavity and is electrically connected to the rotating electrical connection portion for relative rotation, and a second end portion of the fixed electrical connection portion is located outside the housing and is used to be electrically connected to a power source;

[0011] The rotating electrical connection portion is rotatably disposed within the housing and is used for electrically connecting to electrical components within the process chamber.

[0012] In the second aspect, an embodiment of the present application discloses a semiconductor process equipment, which includes a process chamber, a support seat and the conductive slip ring mentioned above, wherein the support seat is rotatably disposed within the process chamber, and electrical devices are provided in the support seat, the outer shell is sealed and connected to the process chamber, and the shell cavity is connected to the chamber space of the process chamber, and the rotating electrical connection part is connected to the support seat and electrically connected to the electrical devices in the support seat.

[0013] The technical solution adopted by the present invention can achieve the following technical effects:

[0014] The conductive slip ring disclosed in the embodiment of the present application can realize the rotary power supply technology, and can also form a sealed isolation between the overall space formed after the shell cavity and the chamber space are connected and the external environment where the power supply is located through the sealing cooperation of the fixed electrical connection part and the first mounting hole, and finally maintain the vacuum environment in the chamber space. On this basis, by making the fixed electrical connection part and the rotating electrical connection part electrically rotatable relative to each other, the fixed electrical connection part and the rotating electrical connection part can maintain contact and electrical connection while the rotating electrical connection part rotates with the electrical device, thereby realizing rotary power supply. The sealing structure of this rotary power supply technology does not need to adopt a magnetic fluid structure for sealing, thereby avoiding the influence of the external magnetic field on the sealing effect, thereby overcoming the problem of poor sealing effect caused by external magnetic field interference when the magnetic fluid structure is sealed. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] FIG1 is a cross-sectional view of a semiconductor process equipment disclosed in an embodiment of the present application at one viewing angle;

[0016] FIG2 is a partial structural diagram of FIG1 ;

[0017] FIG3 is a cross-sectional view of a portion of the structure of the semiconductor process equipment disclosed in an embodiment of the present application from another perspective;

[0018] FIG4 is a cross-sectional view of a conductive slip ring disclosed in an embodiment of the present application at a certain viewing angle;

[0019] FIG5 is a cross-sectional view of the conductive slip ring disclosed in an embodiment of the present application from another perspective;

[0020] 6 and 7 are cross-sectional views of a portion of the structure of a conductive slip ring disclosed in an embodiment of the present application;

[0021] FIG8 is a schematic structural diagram of a housing of a conductive slip ring disclosed in an embodiment of the present application;

[0022] FIG9 is a schematic structural diagram of the insulating shaft of the conductive slip ring disclosed in an embodiment of the present application;

[0023] FIG10 is a schematic structural diagram of a conductive ring of a conductive slip ring disclosed in an embodiment of the present application;

[0024] FIG11 is a schematic diagram of the assembly of a partial structure of an insulating shaft, a conductive ring, and an insulating spacer in a conductive slip ring disclosed in an embodiment of the present application;

[0025] FIG12 is a schematic diagram of FIG11 from another perspective;

[0026] FIG13 is a schematic structural diagram of a power supply connector of a conductive slip ring disclosed in an embodiment of the present application;

[0027] FIG14 is a schematic structural diagram of a fixed insulating sleeve disclosed in an embodiment of the present application;

[0028] FIG15 is a schematic structural diagram of the conductive slip ring disclosed in an embodiment of the present application, wherein the brush and the mounting frame are assembled;

[0029] FIG16 is a schematic structural diagram of the assembled brushes, mounting bracket, and fixed insulating sleeve in the conductive slip ring disclosed in an embodiment of the present application.

[0030] Explanation of the accompanying symbols: 10-process chamber, 11-chamber space, 20-support seat, 21-electrical device, 22-support shaft, 01-conductive slip ring, 30-housing, 31-shell cavity, 32-first mounting hole, 33-first plane, 34-second positioning groove, 35-connecting flange, 36-mounting groove, 37-second threaded connection, 38-docking port, 40-fixed electrical connection part, 41-brush, 42-power connection part, 421-battery core, 422-sealing part, 401-insulating part, 402-pressing part, 412-external threaded connection sleeve, 413-pressing body, 403-first sealing ring, 43-mounting frame, 431-groove-shaped body, 432-connecting fin, 433-electrical connection protrusion, 4331-electrical connection hole, 50-rotating electrical connection part, 51-insulating rotating shaft, 511-electrical avoidance groove, 52-conductive ring, 521-annular body, 522-electrical terminal, 53-insulating isolation piece, 501-first shaft section, 502-second shaft section, 60-power supply, 70-fixed insulating sleeve, 71-second mounting hole, 72-annular isolation protrusion, 73-second plane, 74-first curved surface, 75-insulating sealing filling part, 76-first positioning groove, 77-positioning piece, 78-first threaded connection piece, 81-driving motor, 82-rotating shaft, 83-driving wheel, 84-conveyor belt, 85-driven wheel, 86-third bearing, 91-first bearing, 92-second bearing. DETAILED DESCRIPTION

[0031] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and corresponding drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0032] In the related art, the process chamber of the semiconductor process equipment adopts a rotating power supply technology to realize the electrical connection between the electrical components inside the process chamber and the power supply outside the process chamber. In order to ensure the vacuum environment inside the process chamber, the rotating power supply technology realizes sealing through a magnetic fluid structure to isolate the external environment outside the process chamber. In the process of realizing the invention, the inventors of the present invention found that the magnetic fluid structure is very susceptible to interference from the external magnetic field, and the process chamber is provided with a structure that easily generates an external magnetic field. For example, the radio frequency coil configured in the process chamber will generate a magnetic field when working (this part of the magnetic field can be considered as an external magnetic field that affects the magnetic fluid structure). The interference of the external magnetic field will affect the magnetic fluid of the magnetic fluid structure and then affect the sealing effect, which will eventually lead to the problem of poor sealing effect between the inside of the process chamber and the external environment outside the process chamber.

[0033] Based on this, the inventors of the present invention have improved the technical solution after discovering this technical problem, thereby solving the problem of poor sealing effect. The technical solutions disclosed in various embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0034] 1 to 16 , the present invention discloses a conductive slip ring 01 . The conductive slip ring 01 is applied to a process chamber 10 of a semiconductor process equipment. The conductive slip ring 01 includes a housing 30 , a fixed electrical connection portion 40 , and a rotating electrical connection portion 50 .

[0035] The housing 30 is the outer shell of the slip ring 01 and provides a mounting base for the other components of the slip ring 01. Of course, the housing 30 can also provide peripheral protection for some components of the slip ring 01. Furthermore, the housing 30 can serve as a mounting component for the slip ring 01, enabling installation of the slip ring 01 within the process chamber 10.

[0036] As shown in Figure 8, the shell 30 has a shell cavity 31 and a first mounting hole 32, the first mounting hole 32 is connected to the shell cavity 31, and the first mounting hole 32 is used to install and fix the electrical connection part 40. In fact, the shell 30 also has a docking port 38, and the docking port 38 is connected to the shell cavity 31. The shell 30 is used to be sealed and connected to the process chamber 10, so that the shell cavity 31 is sealed and connected to the chamber space 11 of the process chamber 10. Specifically, the docking port 38 of the shell 30 is sealed and docked with the docking port of the process chamber 10, so that the shell cavity 31 is connected to the chamber space 11 of the process chamber 10. It should be noted that the process chamber 10 has a process space, and the process space can be a part of the chamber space 11 or the entire chamber space 11, which is not limited in the embodiment of the present application.

[0037] The fixed electrical connection part 40 is the fixed electrical connection part in the conductive slip ring 01. The fixed electrical connection part 40 is fixed to the first mounting hole 32, thereby realizing a fixed connection with the outer shell 30. The fixed electrical connection part 40 is sealed with the first mounting hole 32. The first end of the fixed electrical connection part 40 extends into the shell cavity 31 and is electrically connected to the rotating electrical connection part 50. The second end of the fixed electrical connection part 40 is located outside the outer shell 30. The second end of the fixed electrical connection part 40 is used to electrically connect to the power supply 60. It should be noted that the power supply 60 is located outside the process chamber 10 and also outside the outer shell 30. The first end of the fixed electrical connection part 40 and the second end of the fixed electrical connection part 40 are respectively the two opposite ends of the fixed electrical connection part 40.

[0038] The rotating electrical connector 50 is movably disposed and rotatably disposed within the housing 30, i.e., within the housing cavity 31, thereby being able to rotate relative to the fixed electrical connector 40 and the housing 30. As described above, the first end portion of the fixed electrical connector 40 is electrically connected to the rotating electrical connector 50. However, because the rotating electrical connector 50 is able to rotate relative to the fixed electrical connector 40, the first end portion of the fixed electrical connector 40 and the rotating electrical connector 50 are electrically connected through contact and in a relatively slidable manner.

[0039] In the embodiment of the present application, the rotating electrical connection portion 50 is used to electrically connect to an electrical device 21 within the process chamber 10. The electrical device 21 is a device that needs to rotate within the process chamber 10 and requires electricity. For example, a support base 20 is rotatably disposed within the chamber space 11 of the process chamber 10, and the electrical device 21 is embedded in the support base 20 and can rotate with the support base 20. The electrical device 21 can be a heating element, an electrostatic adsorption electrode, etc., and the embodiment of the present application does not limit the specific type and structure of the electrical device 21.

[0040] After the conductive slip ring 01 disclosed in the embodiment of the present application is installed in the process chamber 10, the shell cavity 31 can be sealed and connected with the chamber space 11 of the process chamber 10. As shown in Figures 1 and 2, the fixed electrical connection part 40 is installed in the first mounting hole 32 and sealed with the first mounting hole 32. In this case, the overall space formed after the shell cavity 31 is connected with the chamber space 11 will be sealed and isolated from the external environment (i.e., the environment outside the process chamber 10 and the outer shell 30) due to the sealing cooperation between the fixed electrical connection part 40 and the first mounting hole 32. At the same time, the electric energy provided by the power supply 60 will be transmitted from the second end of the fixed electrical connection part 40 to the first end of the fixed electrical connection part 40, and then will be transmitted from the first end of the fixed electrical connection part 40 to the rotating electrical connection part 50, and finally transmitted from the rotating electrical connection part 50 to the electrical device 21 within the process chamber 10. On this basis, by making the fixed electrical connection part 40 and the rotating electrical connection part 50 electrically connected so as to be rotatable relative to each other, the fixed electrical connection part 40 and the rotating electrical connection part 50 can maintain contact and electrical connection while the rotating electrical connection part 50 rotates with the electrical device 21, thereby realizing rotational power supply.

[0041] Through the above power supply process, it can be seen that the conductive slip ring 01 disclosed in the embodiment of the present application can realize the rotary power supply technology while being able to seal and cooperate with the first mounting hole 32 through the fixed electrical connection portion 40, so that the overall space formed after the shell cavity 31 and the chamber space 11 are connected can be sealed and isolated from the external environment where the power supply 60 is located, and ultimately the vacuum environment in the chamber space 11 can be maintained. The sealing structure of this rotary power supply technology does not need to use a magnetic fluid structure for sealing, thereby avoiding the influence of the external magnetic field on the sealing effect, thereby overcoming the problem of poor sealing effect caused by external magnetic field interference when the magnetic fluid structure is sealed.

[0042] In the embodiment of the present application, the fixed electrical connection portion 40 is sealed against the first mounting hole 32 to isolate the external environment. There are various ways to achieve a seal between the fixed electrical connection portion 40 and the first mounting hole 32, for example, by filling the space between the fixed electrical connection portion 40 and the wall of the first mounting hole 32 with a sealant.

[0043] Of course, there are various structures of the fixed electrical connection portion 40. The fixed electrical connection portion 40 may include a conventional metal wire that passes through the first mounting hole 32 and is filled with sealant between the metal wire and the hole wall of the first mounting hole 32. The embodiments of the present application do not limit the specific structure of the fixed electrical connection portion 40.

[0044] In some embodiments, the fixed electrical connection portion 40 in the embodiments of the present application may include a brush 41, which can slide with the outer peripheral wall of the rotating electrical connection portion 50 in the rotation direction of the rotating electrical connection portion 50, thereby achieving contact electrical connection between the fixed electrical connection portion 40 and the rotating electrical connection portion 50. Of course, the sliding contact electrical connection structure between the fixed electrical connection portion 40 and the rotating electrical connection portion 50 can be brush-shaped or non-brush-shaped, and the embodiments of the present application are not limited thereto.

[0045] The fixed electrical connection portion 40 disclosed in the embodiment of the present application may further include a power connector 42, the first end of which extends into the housing cavity 31 and is electrically connected to the brush 41. The brush 41 enables sliding engagement with the rotating electrical connection portion 50. Of course, after the first end of the power connector 42 extends into the housing cavity 31, it may also directly slide with the rotating electrical connection portion 50 without passing through the brush 41, thereby achieving contact electrical connection. In this case, the fixed electrical connection portion 40 may not include the brush 41.

[0046] In the embodiments of the present application, the power connector 42 can be a common metal wire as described above, or it can be another structure. Referring to Figure 13 , in some embodiments, the power connector 42 can include a battery cell 421 and a sealing portion 422 . The battery cell 421 passes through the first mounting hole 32 . The end of the battery cell 421 located within the housing 30 serves as the first end of the power connector 42 . This means that the end of the battery cell 421 located within the housing 30 can achieve sliding electrical contact with the rotating electrical connector 50 directly or indirectly via the brush 41 . The end of the battery cell 421 located outside the housing 30 serves as the second end of the power connector 42 , which is used to electrically connect to the power source 60 . The sealing portion 422 wraps around a portion of the battery cell 421 and seals at least between the wall of the first mounting hole 32 and the battery cell 421 . The sealing portion 422 can be a sealing sleeve fitted over the battery cell 421 or a sealant applied to the battery cell 421 . The specific structure of the sealing portion 422 is not limited in the embodiments of the present application. The sealing portion 422 seals against the surface of the battery cell 421 and the wall of the first mounting hole 32, thereby achieving a sealed fit between the power connector 42 and the first mounting hole 32. In this case, the sealing portion 422 not only performs a sealing function but also at least fills the gap between the battery cell 421 and the wall of the first mounting hole 32, thereby achieving a fixed connection between the power connector 42 and the first mounting hole 32. Furthermore, in this structure, the battery cell 421 is specifically used to transmit electrical energy, and the length of the battery cell 421 can be flexibly adjusted to adaptively match the position of the rotating electrical connector 50.

[0047] As described above, the embodiment of the present application does not limit the specific structure of the sealing part 422. Please continue to refer to Figure 13. The embodiment of the present application discloses a sealing part 422 of a specific structure. The disclosed sealing part 422 includes an insulating part 401, a clamping part 402 and a first sealing ring 403. The clamping part 402 includes an external threaded connecting sleeve 412 and a clamping body 413 fixedly connected to each other. The sealing sleeve of the insulating part 401 is provided on the battery cell 421, thereby achieving sealing between the insulating part 401 and the battery cell 421. The insulating part 401 can be an insulating glue.

[0048] The compression portion 402 is sealed over the insulating portion 401. That is, the externally threaded connection sleeve 412 and the compression body 413 are both sealed over the insulating portion 401, thereby achieving a seal between the compression portion 402 and the insulating portion 401. The externally threaded connection sleeve 412 is threadedly fixedly connected to the first mounting hole 32, thereby achieving a detachable connection. The compression body 413 presses the first sealing ring 403 surrounding the outer port of the first mounting hole 32 onto the outer wall surface of the housing 30. In this case, the first sealing ring 403 can achieve a seal between the compression body 413 and the outer wall surface of the housing 30, thereby indirectly achieving a seal for the thread gap between the externally threaded connection sleeve 412 and the first mounting hole 32.

[0049] In this structure, the external threaded connection sleeve 412 is fixedly connected to the first mounting hole 32 by a thread, which is more conducive to achieving a detachable connection between the power connector 42 and the first mounting hole 32, thereby facilitating the rapid disassembly and assembly of the power connector 42. In the embodiment of the present application, the compression of the first sealing ring 403 by the clamping body 413 can be derived from the threaded fit between the external threaded connection sleeve 412 and the first mounting hole 32. That is to say, after the external threaded connection sleeve 412 is threadedly connected to the first mounting hole 32, since the external threaded connection sleeve 412 is connected to the clamping body 413, the external threaded connection sleeve 412 can pull the clamping body 413 so that it has a tendency to press against the outer wall surface of the shell 30. In this case, the clamping body 413 can press the first sealing ring 403 against the outer wall surface of the shell 30, thereby achieving the sealing of the first sealing ring 403 between the clamping body 413 and the outer wall surface of the shell 30.

[0050] In order to better compress the first sealing ring 403 , the compressing body 413 may be a sheet-like structure, thereby more easily achieving all-round compression of the first sealing ring 403 .

[0051] In order to improve the stability of the connection, in a further technical solution, the compression body 413 can be detachably connected to the housing 30 by a threaded connection (such as a screw or bolt), thereby avoiding the problem of poor compression effect on the first sealing ring 403 due to loosening of the external threaded connection sleeve 412.

[0052] In the embodiment of the present application, the outer wall surface of the housing 30 may have a first flat surface 33, and the first sealing ring 403 may be compressed between the first flat surface 33 and the compression body 413. In this case, the first flat surface 33 can provide a relatively flat compression surface, thereby facilitating relatively even compression of various areas of the first sealing ring 403, thereby ensuring a good sealing effect.

[0053] In other or further embodiments, at least one of the outer wall surface of the housing 30 and the surface of the pressing body 413 facing the housing 30 may be provided with a mounting groove 36, and the first sealing ring 403 may be positioned and installed in the mounting groove 36. In this case, the first sealing ring 403 is positioned and restricted by the mounting groove 36, thereby improving the installation stability of the first sealing ring 403. In addition, the cooperation between the first sealing ring 403 and the mounting groove 36 more easily forms a labyrinth seal structure, thereby further improving the sealing effect.

[0054] Please refer to Figures 3 to 7 again. In the embodiment of the present application, the conductive slip ring 01 may also include a fixed insulating sleeve 70. The fixed insulating sleeve 70 is disposed within the housing 30, that is, in the shell cavity 31, and is sleeved outside the rotating electrical connection part 50. The rotating electrical connection part 50 is at least partially rotatably disposed within the fixed insulating sleeve 70 and is insulated and isolated from the housing 30 by at least the fixed insulating sleeve 70, thereby preventing the rotating electrical connection part 50 from electrically contacting the housing 30. The fixed electrical connection part 40 passes through the fixed insulating sleeve 70 and is electrically connected to the rotating electrical connection part 50 so as to be relatively rotatable. Of course, to avoid static electricity on the housing 30, the housing 30 is grounded; alternatively, the housing 30 is connected to a grounded peripheral component of the process chamber 10, and the housing 30 is also grounded. In this case, the insulating isolation function of the fixed insulating sleeve 70 can prevent the rotating electrical connection part 50 from being grounded.

[0055] As described above, the fixed electrical connection portion 40 may include a power connector 42, and the first end of the power connector 42 may achieve sliding electrical contact with the rotating electrical connection portion 50 via a brush 41. The brush 41 may achieve electrical connection with the power source 60 via the power connector 42, which is sealed with the first mounting hole 32 as described above. Of course, the electrical connection with the power source 60 is not limited to being via the power connector 42. The embodiments of the present application do not exclude the possibility that the brush 41 may be directly sealed with the first mounting hole 32 and then partially extend outside the housing 30 to directly electrically connect with the power source 60.

[0056] When the fixed electrical connection portion 40 includes a brush 41, in a further technical solution, referring to FIG14 , the fixed insulating sleeve 70 may be provided with a second mounting hole 71. The brush 41 is mounted in the second mounting hole 71 and is at least partially located within the fixed insulating sleeve 70. In this case, the fixed insulating sleeve 70 not only provides insulation and isolation, but also provides an insulating mounting base for the brush 41, thereby enabling the brush 41 to be installed within the housing 30.

[0057] The brush 41 has good elasticity or flexibility, and the strength of the brush 41 is not high, which is conducive to generating a certain elastic force with the rotating electrical connection part 50, thereby achieving the purpose of stable electrical contact. In order to facilitate the fixed installation of the brush 41, the fixed electrical connection part 40 can also include a mounting bracket 43, the mounting bracket 43 is installed in the second mounting hole 71, and the brush 41 is connected to the mounting bracket 43. The first end of the power connector 42 located in the shell cavity 31 is electrically connected to the mounting bracket 43, and the mounting bracket 43 electrically connects the brush 41 and the power connector 42. The power connector 42 is sealed with the first mounting hole 32, and the second end of the power connector 42 located outside the shell 30 is used to electrically connect to the power supply 60. In this case, the mounting bracket 43 can achieve a relatively stable installation of the brush 41 on the fixed insulating sleeve 70.

[0058] In the embodiment of the present application, the structure of the mounting bracket 43 can be various, as long as it can realize the installation of the brush 41 and realize the electrical connection between the brush 41 and the power connector 42. The embodiment of the present application does not limit the specific structure of the mounting bracket 43. Please refer to Figures 15 and 16. In some embodiments, the mounting bracket 43 may include a groove-shaped body 431, two connecting fins 432 and an electrical connection protrusion 433. The two connecting fins 432 are respectively connected to the top ends of the two side walls of the groove-shaped body 431 (that is, the side walls at the end where the notch is located), and extend from the notch of the groove-shaped body 431 to the opposite sides. The electrical connection protrusion 433 is at least partially located within the groove-shaped body 431 and is electrically connected to the first end of the power connector 42. The two connecting fins 432 are both fixedly connected to the fixed insulating sleeve 70. Each mounting bracket 43 can be connected to at least one brush 41, such as the two brushes 41 shown in Figure 15. One end of each brush 41 is fixed to a third mounting hole extending through the bottom of the slot-shaped body 431 and located on either side of the electrical connection protrusion 433. The other ends of the two brushes 41 extend away from the notch of the slot-shaped body 431. Of course, each mounting bracket 43 can also be connected to one or more than three brushes 41. This embodiment of the present application does not limit the number of brushes 41 that can be connected to each mounting bracket 43.

[0059] In this structure, the two connecting fins 432 can extend on opposite sides of the notch of the slot-shaped body 431, thereby achieving a relatively stable connection with the fixed insulating sleeve 70. Furthermore, the mounting frame 43 is based on the slot-shaped body 431. The slot-shaped body 431 and the two connecting fins 432 can form a bow-like structure, which enables the mounting frame 43 to have a good elastic function, thereby facilitating elastic contact between the brush 41 and the rotating electrical connector 50, better avoiding rigid contact, and thus preventing the rotating electrical connector 50 from adversely affecting the brush 41 during rotation. Furthermore, the electrical connection protrusion 433 is a component provided within the slot-shaped body 431 specifically for connecting to the power connector 42, facilitating electrical connection with the power connector 42.

[0060] Referring again to Figure 15 , in some embodiments, the electrical connection protrusion 433 may be provided with an electrical connection hole 4331, and the end of the battery cell 421 located within the housing 30 may be directly connected to the electrical connection hole 4331. Specifically, the end of the battery cell 421 located within the housing 30 may be a threaded end, and the electrical connection hole 4331 may be a threaded hole, and the threaded end may be screwed directly into the threaded hole to achieve a fixed electrical connection. Of course, the electrical connection protrusion 433 and the end of the battery cell 421 located within the housing 30 may also be electrically connected by welding, conductive adhesive bonding, or other methods, which are not limited in the present embodiment.

[0061] In the embodiment of the present application, the outer wall surface of the fixed insulating sleeve 70 may include a second flat surface 73, and the two connecting fins 432 are fixedly connected to the second flat surface 73. In this case, the two connecting fins 432 can be aligned with the second flat surface 73, thereby facilitating improved stability of the connection between the two connecting fins 432 and the fixed insulating sleeve 70. In some embodiments, the connecting fins 432 and the second flat surface 73 may be fixedly connected via a first threaded connector 78.

[0062] The fixed insulating sleeve 70 can have a variety of shapes, such as a square sleeve, a circular sleeve, etc., and the embodiments of the present application are not limited thereto. Referring again to FIG. 16 , in some embodiments, the outer wall surface of the fixed insulating sleeve 70 may further include a first curved surface 74 , with various portions of the first curved surface 74 located within the first cylindrical surface. The first curved surface 74 and the second flat surface 73 are connected end-to-end. The inner wall surface of the housing 30 is a second cylindrical surface concentrically disposed with the first cylindrical surface. The gap between the second flat surface 73 and the area opposite the second cylindrical surface may be provided with an insulating sealing filler 75 , as shown in FIG. 5 . In this case, the fixed insulating sleeve 70 can be as similar in shape to the housing 30 as possible, avoiding taking up too much space while also minimizing the occurrence of large gaps. Furthermore, the gap design facilitates accommodating portions of the mounting bracket 43 . Furthermore, the insulating sealing filler 75 can fill the larger gap between the area opposite the second flat surface 73 and the second cylindrical surface, thereby ensuring greater stability for the components installed within the housing 30 .

[0063] In an embodiment of the present application, the fixed insulating sleeve 70 is fixed within the shell 30. Specifically, there are various ways to fix the fixed insulating sleeve 70 within the shell 30, which are not limited by the embodiment of the present application. In some embodiments, the end of the fixed insulating sleeve 70 adjacent to the process chamber 10 can be provided with a plurality of first positioning grooves 76, as shown in Figure 14, the notches of the plurality of first positioning grooves 76 face the inner wall of the shell 30 and pass through to the end face of the fixed insulating sleeve 70. The inner wall of the shell 30 can be provided with a plurality of second positioning grooves 34 (as shown in Figure 8), and the notches of the plurality of second positioning grooves 34 are aligned one-to-one with the notches of the plurality of first positioning grooves 76 to form a positioning space. The fixed insulating sleeve 70 can be connected to the shell 30 by a positioning member 77 installed in the positioning space. Specifically, the positioning member 77 can be a connecting key. This connection method has a simple structure and can be disassembled between the fixed insulating sleeve 70 and the shell 30 by removing the positioning member 77, and connected between the fixed insulating sleeve 70 and the shell 30 by installing the positioning member 77, thereby enabling disassembly and assembly, as shown in Figure 7.

[0064] The structure of the rotating electrical connection portion 50 can be various, and the embodiments of the present application are not limited thereto. With reference to Figures 9, 10, 11, and 12, in some embodiments, the rotating electrical connection portion 50 can include an insulating shaft 51 and a conductive ring 52 sleeved on the insulating shaft 51. Both the insulating shaft 51 and the conductive ring 52 are disposed within the fixed insulating sleeve 70, and the conductive ring 52 can rotate with the insulating shaft 51. The conductive ring 52 is electrically connected to the first end of the fixed electrical connection portion 40, which is located within the housing 31. The insulating shaft 51 is rotatably mounted within the housing 30. The conductive ring 52 is configured to electrically connect to the electrical device 21. In this structure, the conductive ring 52 is electrically connected to the fixed electrical connection portion 40, thereby forming a corresponding electrical connection relationship. This facilitates the realization of multiple sets of corresponding electrically connected conductive rings 52 and fixed electrical connection portions 40, thereby enabling the planning of more electrical connection paths within a smaller space. In addition, the rotating electrical connection part 50 of this structure is rotatably installed based on the insulating shaft 51, and the electrical connection is achieved through the conductive ring 52 installed on the insulating shaft 51, so that the insulating shaft 51 can form an isolation between the conductive ring 52 and other components that do not need to be electrically connected to the conductive ring 52, thereby avoiding short circuit.

[0065] Please refer to Figure 10 again. In a further technical solution, the conductive ring 52 may include an annular body 521 and an electrical terminal 522 disposed within the annular body 521. The first end of the electrical terminal 522 is electrically connected to the inner annular surface of the annular body 521. Please refer to Figure 9 again. The insulating shaft 51 is provided with an electrical avoidance groove 511 extending along its axial direction. The second end of the electrical terminal 522 extends into the electrical avoidance groove 511 (as shown in Figure 12) and is used to electrically connect to the electrical device 21. The outer annular surface of the annular body 521 is in electrical contact with the fixed electrical connection part 40. During the rotation of the rotating electrical connection part 50, the outer annular surface of the annular body 521 slides in contact with the fixed electrical connection part 40, thereby realizing rotary power supply. This structure enables the electrical terminal 522 to perform the function of electrically connecting to the electrical device 21 while also being disposed within the insulating shaft 51. The insulating shaft 51 sacrifices a portion of its structure to form the electrical connection avoidance groove 511 , thereby accommodating the electrical terminal 522 , thereby facilitating a miniaturized design of the rotating electrical connection portion 50 .

[0066] Of course, the conductive ring 52 can also be electrically connected to the electrical device 21 through a conductive layer (such as a conductive plating layer, a conductive coating, etc.) provided on the outer wall of the insulating shaft 51 and extending axially along the insulating shaft 51 .

[0067] As described above, the power terminal 522 extends into the power avoidance groove 511. Specifically, the power terminal 522 can only extend into the power avoidance groove 511 without contacting the inner wall of the power avoidance groove 511 or forming a rigid fit. Of course, the power terminal 522 can also extend into the power avoidance groove 511 and contact the inner wall of the power avoidance groove 511 at the same time, thereby forming a more stable fit. Based on this, in some embodiments, the first end of the power terminal 522 is fixedly connected to the annular body 521. The annular body 521 is plugged into the power avoidance groove 511 through the second end of the power terminal 522, thereby limiting the rotation direction of the rotating electrical connection part 50 with the insulating shaft 51. In this case, the power terminal 522 not only plays an electrical connection role, but the power terminal 522 can also be plugged into and matched with the power avoidance groove 511, so that the annular body 521 and the insulating shaft 51 are limited in the rotation direction of the insulating shaft 51 (that is, the rotation direction of the rotating electrical connection part 50), thereby avoiding the annular body 521 from rotating relative to the insulating shaft 51. This will undoubtedly improve the stability of the connection between the annular body 521 and the insulating shaft 51.

[0068] Under normal circumstances, there can be one or more electrical devices 21 in the process chamber 10 (i.e., at least two). In the case where there are multiple electrical devices 21, there are multiple conductive rings 52, which are spaced apart in the axial direction of the insulating shaft 51. The insulating shaft 51 is provided with multiple power-connection avoidance grooves 511 that are spaced apart. The second end of the power terminal 522 of each conductive ring 52 extends into the corresponding power-connection avoidance groove 511. In this case, each conductive ring 52 can supply power to a corresponding electrical device 21. At the same time, in this case, there can also be multiple fixed electrical connection parts 40, and the multiple fixed electrical connection parts 40 are electrically connected to the conductive ring 52 one by one, thereby achieving the purpose of supplying power to multiple electrical devices 21. This independent power supply mode is easier to make targeted adjustments according to the power requirements of multiple electrical devices 21, and thus it is easier to meet the diverse power requirements of multiple electrical devices 21.

[0069] In a specific embodiment, there can be multiple conductive rings 52, and they are arranged at axial intervals along the insulating rotating shaft 51. There can be multiple fixed electrical connection parts 40, and they are arranged at axial intervals along the insulating rotating shaft 51. Each conductive ring 52 electrically connects the corresponding fixed electrical connection part 40 with the corresponding electrical device 21.

[0070] When the fixed electrical connection part 40 includes brushes 41 and power connectors 42, the brushes 41 can be multiple groups and are arranged at intervals along the axial direction of the insulating shaft 51. The power connectors 42 can be multiple and are arranged at intervals along the axial direction of the insulating shaft 51. Each group of brushes 41 electrically connects the corresponding conductive ring 52 and the corresponding power connector 42.

[0071] Each fixed electrical connection portion 40 may include a set of brushes 41. In the embodiment of the present application, the set of brushes 41 that cooperates with each conductive ring 52 may be one brush 41 or multiple brushes 41. The embodiment of the present application does not limit the number of brushes 41 included in a set of brushes 41. In some embodiments, each set of brushes 41 may include two brushes 41. The distance between the ends of the two brushes 41 in the same set that are away from the conductive ring 52 is smaller than the distance between the ends of the two brushes 41 in the same set that are closer to the conductive ring 52. The two brushes 41 in the same set are tangent to and in contact with different parts of the conductive ring 52. In this case, each power connector 42 achieves sliding electrical contact with the conductive ring 52 via the two brushes 41, which can improve the stability of the electrical contact.

[0072] In order to better match the positions of the multiple conductive rings 52, the first ends of the multiple power avoidance grooves 511 are located on the end face of the insulating shaft 51 adjacent to the electrical device 21. The second ends of the multiple power avoidance grooves 511 extend to the positions corresponding to the corresponding power terminals 522. In other words, the second ends of the multiple power avoidance grooves 511 extend to the positions of the corresponding conductive rings 52. The multiple power avoidance grooves 511 are at least not all through grooves. In this case, the second ends of the multiple power avoidance grooves 511 extend to the positions of the corresponding conductive rings 52 so that the power terminals 522 of the corresponding conductive rings 52 can be inserted to achieve assembly. At the same time, the multiple power avoidance grooves 511 do not need to pass through the two ends of the entire insulating shaft 51, so as not to have a significant impact on the strength of the insulating shaft 51.

[0073] As described above, the power requirements of multiple electrical devices 21 vary, requiring conductive rings 52 of varying sizes. Therefore, in some embodiments, the annular bodies 521 of the multiple conductive rings 52 have unequal lengths along the axial direction of the insulating shaft 51. That is, at least two of the annular bodies 521 of the multiple conductive rings 52 have unequal lengths along the axial direction of the insulating shaft 51. For example, among the multiple conductive rings 52, the longer conductive ring 52 can be used to input radio frequency current, while the shorter conductive ring 52 can be used to input alternating current to supply the electrical device 21 serving as a heater. The shorter conductive ring 52 can be used to input direct current to supply a thermocouple or electrostatic adsorption electrode.

[0074] If there are multiple conductive rings 52, the multiple conductive rings 52 can be spaced apart along the axial direction of the insulating shaft 51. The conductive ring 52 can be fixed to the insulating shaft 51 through a tight fit between the annular body 521 and the insulating shaft 51. Of course, the conductive ring 52 can be fixedly connected to the insulating shaft 51 through the fit between the power terminal 522 and the power avoidance groove 511. In this case, the power terminal 522 and the power avoidance groove 511 are a tight fit. The multiple conductive rings 52 are fixed to the insulating shaft 51 and spaced apart to avoid contact with each other, thereby preventing short circuits between adjacent conductive rings 52.

[0075] Of course, in other embodiments, the rotating electrical connection portion 50 may further include an insulating spacer 53, with each insulating spacer 53 provided between two adjacent conductive rings 52. In this case, the insulating spacer 53 provides isolation, preventing the adjacent conductive rings 52 from moving and contacting each other, and effectively preventing short circuits.

[0076] In the embodiment of the present application, the insulating shaft 51 is rotatably disposed within the housing 30. The insulating shaft 51 can be rotatably mounted by simply fitting the shaft hole. Of course, in order to alleviate wear and improve rotational stability, as shown in FIG3 , the insulating shaft 51 can be rotatably disposed within the fixed insulating sleeve 70 via a first bearing 91. The fixed insulating sleeve 70 can be provided with an annular isolation protrusion 72, which can be fixed relative to the fixed insulating sleeve 70. The first bearing 91 is located on a first side of the annular isolation protrusion 72. The conductive ring 52 can be located on a second side of the annular isolation protrusion 72, with the first side facing away from the second side. In this case, the annular isolation protrusion 72 can isolate the first bearing 91 and the conductive ring 52, thereby alleviating the entry of particles generated by the first bearing 91 after long-term operation into the space where the conductive ring 52 is located, thereby avoiding adverse effects on the sliding electrical contact of the conductive ring 52.

[0077] In some embodiments, the first end of the insulating shaft 51 is rotatably disposed within the housing 30 via a first bearing 91, and the second end of the insulating shaft 51 is rotatably disposed within the housing 30 via a second bearing 92. Specifically, the annular isolation protrusion 72 may be disposed only between the first bearing 91 and the conductive ring 52, as shown in FIG7 .

[0078] In the embodiments of the present application, the insulating shaft 51 can be a unitary structure or a split structure. As shown in FIG9 , in some embodiments, the insulating shaft 51 is a split structure and can include a first shaft segment 501 and a second shaft segment 502 , wherein the first shaft segment 501 and the second shaft segment 502 are detachably connected. The power connection avoidance groove 511 described above can be provided on the first shaft segment 501, and the second shaft segment 502 can be provided with a avoidance hole opposite to the corresponding power connection avoidance groove 511 so as not to affect the electrical connection between the electrical device 21 and the corresponding power terminal 522.

[0079] Based on the conductive slip ring 01 disclosed in the embodiment of the present application, the embodiment of the present application discloses a semiconductor process equipment, and the disclosed semiconductor process equipment includes a process chamber 10, a carrier 20 and the conductive slip ring 01 described above.

[0080] The support base 20 is used to support the wafer and drive the wafer to rotate during the process to improve the uniformity of film formation on the wafer. The support base 20 has an electrical device 21. The electrical device 21 can be an electrostatic adsorption electrode, a heating coil, etc. built into the support base 20.

[0081] The support base 20 is disposed within the process chamber 10. The support base 20 is rotatably disposed within the process chamber 10. An electrical component 21 is disposed within the support base 20. The housing 30 is sealedly connected to the process chamber 10. The housing cavity 31 communicates with the chamber space 11 of the process chamber 10. The rotating electrical connector 50 is connected to the support base 20 and is electrically connected to the electrical component 21 within the support base 20. The rotating electrical connector 50 and the support base 20 can rotate synchronously, thereby achieving rotational power supply.

[0082] In the embodiment of the present application, the housing 30 of the conductive slip ring 01 has a connecting flange 35 , which is arranged around a docking port 38 of the housing 30 . The connecting flange 35 and the process chamber 10 can be detachably connected via a second threaded connector 37 .

[0083] The semiconductor process equipment disclosed in the embodiment of the present application may also include a drive mechanism, which may include a drive motor 81, a rotating shaft 82, a driving pulley 83, a transmission belt 84 and a driven pulley 85. The drive motor 81 is fixed outside the process chamber 10. One end of the rotating shaft 82 is connected to the drive motor 81, and the other end of the rotating shaft 82 extends into the process chamber 10. The driving pulley 83 is fixed on the part of the rotating shaft 82 located inside the process chamber 10. The transmission belt 84 connects the driving pulley 83 and the driven pulley 85. The driven pulley 85 is connected to the support shaft 22 supporting the bearing seat 20, so that the support shaft 22 can be driven to rotate during the rotation of the driven pulley 85, and finally the rotation of the entire bearing seat 20 is realized. Of course, the electrical components 21 in the bearing seat 20 will also rotate synchronously. Specifically, the support shaft 22 can be rotatably mounted at the docking interface of the process chamber 10 through a third bearing 86.

[0084] It should be noted that the structure of the driving mechanism can be various and is not limited to the structure described above, and the embodiments of the present application do not impose any restrictions thereon.

[0085] The above embodiments of the present invention focus on the differences between the various embodiments. As long as the different optimization features of the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0086] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the present invention and the claims, all of which are protected by the present invention.

Claims

1. A conductive slip ring, characterized in that: Applied to a process chamber of a semiconductor process equipment, the conductive slip ring comprises a housing, a fixed electrical connection portion and a rotating electrical connection portion, wherein: The shell has a shell cavity and a first mounting hole communicating with the shell cavity, and the shell is used to be sealed and connected with the process chamber so that the shell cavity is sealed and communicated with the chamber space of the process chamber; The fixed electrical connection part is sealed with the first mounting hole, and the first end of the fixed electrical connection part extends into the shell cavity and is electrically connected to the rotating electrical connection part so as to be relatively rotatable, and the second end of the fixed electrical connection part is located outside the shell and is used to be electrically connected to a power source; The rotating electrical connection part is rotatably arranged in the shell and is used for electrically connecting with the electrical device in the process chamber.

2. The conductive slip ring according to claim 1, characterized in that: The fixed electrical connection part includes a power connector, and the power connector includes a battery core and a sealing part. The battery core passes through a first mounting hole, and the end of the battery core located inside the outer shell is in sliding electrical contact with the rotating electrical connection part, and the end of the battery core located outside the outer shell is used to be electrically connected to the power source. The sealing part wraps a portion of the battery core and is at least sealed between the hole wall of the first mounting hole and the battery core.

3. The conductive slip ring according to claim 2, characterized in that: The sealing part includes an insulating part, a clamping part and a first sealing ring, the clamping part includes an external threaded connecting sleeve and a clamping body which are fixedly connected to each other, the insulating part sealing sleeve is arranged on the battery core, the external threaded connecting sleeve and the clamping body are both sealing sleeves arranged on the insulating part, the external threaded connecting sleeve is threadedly fixedly connected to the first mounting hole, and the clamping body presses the first sealing ring surrounding the outer port of the first mounting hole onto the outer wall surface of the shell.

4. The conductive slip ring according to claim 3, characterized in that: The outer wall surface of the housing has a first plane, and the first sealing ring is compressed between the first plane and the compression body; or, At least one of the outer wall surface of the shell and the surface of the pressing body facing the shell is provided with a mounting groove, and the first sealing ring is positioned and installed in the mounting groove.

5. The conductive slip ring according to claim 1, characterized in that: The conductive slip ring also includes a fixed insulating sleeve, which is arranged inside the outer shell and sleeved outside the rotating electrical connection part. The rotating electrical connection part is at least partially rotatably arranged inside the fixed insulating sleeve and is insulated and isolated from the outer shell by at least the fixed insulating sleeve. The fixed electrical connection part passes through the fixed insulating sleeve and is electrically connected to the rotating electrical connection part so as to be relatively rotatable.

6. The conductive slip ring according to claim 5, characterized in that: The fixed electrical connection part includes a brush, which is slidably matched with the outer peripheral wall of the rotating electrical connection part in the rotation direction of the rotating electrical connection part. The fixed insulating sleeve is provided with a second mounting hole, and the brush is installed in the second mounting hole and is at least partially located inside the fixed insulating sleeve.

7. The conductive slip ring according to claim 6, characterized in that: The fixed electrical connection part also includes a mounting frame and a power connector, the mounting frame is installed on the second mounting hole, the brush is connected to the mounting frame, the first end of the power connector located in the shell cavity is electrically connected to the mounting frame, the mounting frame electrically connects the brush and the power connector, the power connector is sealed with the first mounting hole, and the second end of the power connector located outside the shell is used for electrically connecting to the power supply.

8. The conductive slip ring according to claim 7, characterized in that: The mounting frame includes a groove-shaped body, two connecting fins and an electrical connection protrusion, the two connecting fins are respectively connected to the top ends of the two side walls of the groove-shaped body, and respectively extend from the groove of the groove-shaped body to opposite sides, the electrical connection protrusion is at least partially located in the groove-shaped body, and is electrically connected to the first end of the power connector, the two connecting fins are fixedly connected to the fixed insulating sleeve, each of the mounting frames is connected to at least one brush, one end of at least one brush is fixed in a third mounting hole that passes through the bottom of the groove-shaped body, and the other end of at least one brush extends in a direction away from the groove of the groove.

9. The conductive slip ring according to claim 8, characterized in that: The outer wall surface of the fixed insulating sleeve includes a second plane, and the two connecting fins are fixedly connected to the second plane.

10. The conductive slip ring according to claim 5, characterized in that: A plurality of first positioning grooves are provided at the end of the fixed insulating sleeve adjacent to the process chamber, the notches of the plurality of first positioning grooves face the inner wall of the outer shell and pass through to the end face of the fixed insulating sleeve, and a plurality of second positioning grooves are provided on the inner wall of the outer shell, the notches of the plurality of second positioning grooves are matched one by one with the notches of the plurality of first positioning grooves to form a positioning space, and the fixed insulating sleeve is connected to the outer shell via a positioning member installed in the positioning space.

11. The conductive slip ring according to claim 5, characterized in that: The rotating electrical connection part includes an insulating shaft which is arranged inside the fixed insulating sleeve and a conductive ring which is sleeved on the insulating shaft and rotates with the insulating shaft. The conductive ring is electrically connected to the first end of the fixed electrical connection part. The insulating shaft is rotatably installed in the outer shell, and the conductive ring is used to be electrically connected to the electrical device.

12. The conductive slip ring according to claim 11, characterized in that: The conductive ring includes an annular body and an electrical terminal disposed inside the annular body, the first end of the electrical terminal being electrically connected to the inner annular surface of the annular body, the insulating shaft being provided with an electrical avoidance groove extending along its axial direction, the second end of the electrical terminal extending into the electrical avoidance groove and being used to be electrically connected to the electrical device, and the outer annular surface of the annular body being in electrical contact and connection with the fixed electrical connection portion.

13. The conductive slip ring according to claim 12, characterized in that: The first end of the power terminal is fixedly connected to the annular body, and the annular body is limitedly matched with the insulating shaft in the rotation direction of the rotating electrical connection part through the plug-in cooperation of the second end of the power terminal with the power avoidance groove.

14. The conductive slip ring according to claim 12, characterized in that: There are a plurality of conductive rings, and the lengths of the annular bodies of the plurality of conductive rings in the axial direction of the insulating shaft are not all equal.

15. The conductive slip ring according to claim 12, characterized in that: There are multiple conductive rings, which are spaced apart in the axial direction of the insulating shaft. The insulating shaft is provided with multiple power connection avoidance grooves which are spaced apart. The second end of the power connection terminal of each conductive ring extends into the corresponding power connection avoidance groove. There are multiple fixed electrical connection parts, which are spaced apart in the axial direction. Each conductive ring is electrically connected to the corresponding fixed electrical connection part and the corresponding electrical device.

16. The conductive slip ring according to claim 11, characterized in that: The end of the insulating shaft is rotatably disposed in the fixed insulating sleeve via a first bearing. An annular isolation protrusion is provided in the fixed insulating sleeve. The annular isolation protrusion can be fixed relative to the fixed insulating sleeve. The first bearing is located on a first side of the annular isolation protrusion, and the conductive ring is located on a second side of the annular isolation protrusion. The first side is opposite to the second side.

17. A semiconductor process equipment, characterized in that: It comprises a process chamber, a bearing seat and a conductive slip ring according to any one of claims 1 to 16, wherein the bearing seat is rotatably arranged in the process chamber, an electrical device is arranged in the bearing seat, the outer shell is sealedly connected to the process chamber, and the shell cavity is communicated with the chamber space of the process chamber, and the rotating electrical connection part is connected to the bearing seat and electrically connected to the electrical device in the bearing seat.

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