A method for enhancement of a signal in acoustic assisted AFM imaging

The method enhances AFM imaging by using a high-quality factor oscillator to amplify acoustic signals, overcoming cantilever resonance frequency limitations, enabling high-resolution imaging of surface and subsurface features with improved sensitivity and cost-effective instrumentation.

WO2026018229A1 Publication Date: 2026-01-22SHILPS SCI
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Patent Information

Application Number
PCT/IB2025/059182
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-07-16
Filing Date
2025-09-12
Publication Date
2026-01-22

AI Technical Summary

Technical Problem

Conventional AFM techniques face challenges in detecting subsurface features due to instability in phase-locked loops and require complex, expensive instrumentation for dual-frequency resonance tracking, making it difficult to operate at frequencies independent of the AFM cantilever's resonance frequency.

Method used

A method utilizing a first oscillator with a high quality factor to amplify acoustic signals by oscillating a second oscillator, such as an AFM cantilever, at a resonance frequency distinct from the cantilever's own resonance, enhancing signal measurement through a monochromatic source and lock-in amplifier.

Benefits of technology

Enables high-resolution acoustic assisted AFM imaging with improved sensitivity and signal-to-noise ratio, allowing for detailed visualization of surface and subsurface features without relying on cantilever resonance frequencies, thus simplifying instrumentation and reducing costs.

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Abstract

The invention provides a method for enhancement of a signal in 5 acoustic assisted AFM imaging of a sample. The method includes determining a resonance frequency of a first oscillator, generating an acoustic signal near to or at the resonance frequency of the first oscillator through an acoustic wave generator, oscillating a second oscillator having an AFM probe 10 tip in contact with a sample with the generated acoustic signal and measuring the reflected signal through a monochromatic source of radiation incident on the AFM probe tip. The enhancement in the signal is due to the amplification by the resonance of the first oscillator. The enhanced signal enables 15 obtaining a plurality of features of the sample including surface topography, subsurface features, subsurface defects and anomalies in an acoustic assisted AFM image.
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