Valve body drive device and gate valve
The valve body driving device addresses seal member twisting by using linear motion to prevent particle generation, ensuring reliable operation in vacuum environments.
WO2026121005A1 Publication Date: 2026-06-11THK CO LTD
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Patent Information
- Application Number
- PCT/JP2025/039939
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-03
- Filing Date
- 2025-11-14
- Publication Date
- 2026-06-11
AI Technical Summary
Technical Problem
Existing valve body driving devices generate particles due to seal member twisting during rotational movement, which can lead to processing defects in vacuum environments, particularly in semiconductor manufacturing.
Method used
A valve body driving device that moves the seal member perpendicular to the opening, utilizing a mechanism with movable members that restrict movement stages to prevent twisting, ensuring linear motion without rotation.
Benefits of technology
Prevents particle generation by eliminating seal member twisting, ensuring reliable opening and closing operations without defects in vacuum processing.
✦ Generated by Eureka AI based on patent content.
Abstract
A valve body drive device 10 comprises: a first moving member 11 that is movable in a parallel direction, between a start point A1 and an end point A3 set on a virtual first straight line extending in a first direction; a second moving member 12 that is mounted to the first moving member 11 and is movable between the start point A1 and a stop point A2 together with the movement of the first moving member 11; a third moving member 13 that is mounted to the second moving member 12, is movable between the start point A1 and the stop point A2 together with the movement of the first moving member 11 and the second moving member 12 between the start point A1 and the stop point A2, and is movable in a parallel direction, between an initial point B1 and a projection point B2 set on a virtual second straight line extending in a second direction substantially orthogonal to the first direction, in response to the movement of the first moving member 11 between the stop point A2 and the end point A3; and a valve body 14 that is fixedly mounted to the third moving member 13 and is capable of opening and closing an arbitrary opening.
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