MEASURING DEVICE FOR EDGE PROFILE INSPECTION, IN PARTICULAR EDGE PROFILE DETERMINATION AND / OR EDGE INSPECTION, OF A MEASURING OBJECT, IN PARTICULAR WAFERS, AND METHOD FOR THIS
AT529019A1Pending Publication Date: 2026-08-15PRIEWALD ROBIN
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Patent Information
- Application Number
- AT2025050084
- Authority / Receiving Office
- AT · AT
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-02-10
- Publication Date
- 2026-08-15
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