Sensor for self-testing self-oscillation of resonant-type tiny cantilever beam

A micro-cantilever beam and self-excited oscillation technology, which is applied to the related MEMS micro-cantilever beam self-excited oscillation self-detection resonant frequency, MEMS micro-cantilever beam sensor field, can solve the problem of increasing system loss, increasing process flow, increasing sensor difficulty and Cost and other issues, to achieve the effect of excellent performance and high sensitivity

CN101093204AActive Publication Date: 2007-12-26重庆清仪微系统技术有限公司
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2007-12-26

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Abstract

A self-detection transducer of self-excitation oscillation on resonant micro-cantilever beam is prepared for forming closed loop circuit by series-connecting frequency-selection network, filter amplification circuit, phase compensation circuit with driving circuit; forming frequency-selection network by micro-cantilever beam, compensation circuit, operation- amplification circuit, the first and the second feedback circuits; connecting bottom electrode to negative input end of operation amplification circuit and top electrode to positive input end of operation amplification circuit through compensation circuit.
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Description

technical field

[0001] The present invention relates to the field of resonant micro-electromechanical system (MicroElectroMechanical System) cantilever sensor, and specifically relates to the resonant frequency detection type MEMS micro-cantilever sensor technology, and related MEMS micro-cantilever self-excited oscillation self-detection resonance frequency technology and method . Background technique

[0002] With the development of MEMS technology, MEMS microsensors have the characteristics of small size, light weight, fast response, low power consumption, low cost, easy array integration, etc., and are more and more widely used in various fields of production and life. There is a large class of MEMS sensors that belong to the resonant sensor. The MEMS structure enters the resonance state under the excitation of the natural frequency, and the change of the physical quantity of the external environment will change the natural frequency of the system, thereby causing the re...

Examples

Embodiment Construction

[0032] A resonant MEMS micro-cantilever beam self-excited oscillation self-detection sensor is composed of a MEMS resonant structure and a corresponding closed-loop self-excited oscillation circuit. The MEMS resonant structure is a micro cantilever beam with only one set of self-excited oscillation self-detection structure. The micro-cantilever beam is a sensitive structure for the sensor to perceive changes in the external environment, and its function is to convert measured physical or chemical quantities in the environment, such as gas molecules, environmental damping, acceleration, etc., into frequency variations. The closed-loop self-excited oscillation circuit is characterized by comprising: a differential mode compensation network, a filter circuit, an amplifier circuit, a phase shift circuit and a drive limiter circuit.

[0033]When the closed-loop self-excited oscillating circuit is working, there will be some noise signals in the environment after the entire system i...