Straight beam buckling electrostatic type micro mechanical optical switch

A micro-mechanical and electrostatic technology, applied in the direction of optics, optical components, optical waveguide coupling, etc., can solve the problems of device stability and reliability, heat can not be effectively dissipated, shorten the service life of devices, etc., to reduce the Effect of driving voltage and deformation time, simple structure, and improved reliability

CN103033885BInactive Publication Date: 2015-02-18XIDIAN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2015-02-18
Estimated Expiration
Not applicable · inactive patent

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    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
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Abstract

The invention discloses a straight beam buckling electrostatic type micro mechanical optical switch which mainly solves the problem that the existing switch is high in driving voltage, long in switching time, high in energy consumption and the like. The straight beam buckling electrostatic type micro mechanical optical switch comprises a micro beam (307) with a diamond-shaped structure in the middle position, a fixed base (304), an outer framework (310), driving electrode pairs (305 and 306), adjusting electrode pairs (302 and 303), a micro reflecting mirror (314) and optical fibers (313), wherein the micro beam (307) is connected with the fixed base (304) together, and a span supporting structure (309) is adopted at the junction of the micro beam (307) and the fixed base (304); the fixed base (304) is fixed with the outer framework (310) through a wedge-shaped extrusion structure (301), and guide mechanisms (308) are arranged at the two ends of the fixed base (304); the adjusting electrode pairs (302 and 303) adopt comb tooth-shaped structures and are symmetrical to each other up and down; a guide groove (312) is formed in the middle position of the outer framework (310); the optical fibers (131) are perpendicularly placed in a crossed manner; and the micro reflecting mirror (314) is fixed at the front end of a micro mirror bracket (311). The straight beam buckling electrostatic type micro mechanical optical switch has the advantages of low driving voltage, short switching time, low energy consumption and expandable switch array and can be used for key optical devices of optical communication network equipment.
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Description

technical field

[0001] The invention belongs to the technical field of optoelectronic devices, and in particular relates to an electrostatic micromechanical optical switch, which can be used to realize optical path selection in optical communication, cross interconnection of multiple optical fiber lines, upper and lower optical paths, and bypass of faulty optical fiber lines. technical background

[0002] Straight beam buckling electrostatic micromachined optical switch is processed by MEMS technology. Based on the vertical and horizontal bending theory of micro-beams, it breaks through the traditional concept of one-way loading of micro-mechanical optical switches, and uses the spring characteristics of elastic energy release and stiffness changes in micro-beams during buckling deformation to transform elastic force into driving force to realize The purpose of the micromachined optical switch is low driving voltage, short switching time, and low energy consumption. It has ...

Examples

Embodiment Construction

[0036] refer to image 3 , the straight beam buckling electrostatic micromechanical optical switch of the present invention is mainly composed of micro beam 307, fixed base 304, outer frame 310, guide mechanism 308, drive electrode pair 305, 306, adjustment electrode pair 302, 303, guide groove 312, micro The mirror bracket 311, the micro mirror 314 and the optical fiber 313 are composed. Wherein the optical fiber 313 is vertically intersected to form an optical path, the middle position of the microbeam 307 is a rhombus structure, two guide mechanisms 308 are provided, which are respectively located at the upper and lower ends of the fixed base 304, and the micromirror holder 311 is a square cylinder structure.

[0037] The microbeam 307 is integrated with the fixed base 304, and a span support structure 309 is used at the connection position of the two to increase the axial load on the microbeam 307 to reduce the driving voltage and shorten the switch response. time. The mic...