Linear displacement measurement system based on alternating light field

A technology of linear displacement and measurement system, applied in the field of linear displacement measurement system based on alternating light field, can solve the problem of uncontrollable amplitude, phase, scattering angle and uniformity of four-channel alternating light source signal, and the overall volume of sensor probe Large and high-quality traveling waves are difficult to obtain, so as to achieve the effect of low installation and processing technology requirements, easy integration and processing, and reduced difficulty and

CN108895970AActive Publication Date: 2018-11-27CHONGQING UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2018-11-27

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Abstract

The invention discloses a linear displacement measurement system based on an alternating light field. The system comprises a light emitting element, a fixed scale substrate, a movable scale substrate,a photoelectric detector and an electronic signal processing circuit, wherein a row of fixed scale illuminating surfaces are arranged on the fixed scale substrate, the light emitting element comprises an alternating light source, the alternating light source is driven by an alternating excitation signal to form a single alternating light field, four rows of movable scale illuminating surfaces arranged on the movable scale substrate are completely covered by the single alternating light field in a direction perpendicular to the alternating light source, the photoelectric detector comprises four photoelectric detection heads, and the four photoelectric detection heads can receive all luminous flux of the four rows of movable scale illuminating surfaces independently at the same time. The light emitting element, the photoelectric detector and the movable scale substrate can move together relative to the fixed scale substrate, four photoelectric current signals output by the four photoelectric detection heads are input to the electronic signal processing circuit, and after processing is conducted, a linear displacement value of the movable scale substrate relative to the fixed scale substrate is obtained. By means of the linear displacement measurement system based on the alternating light field, precise linear displacement measurement can be achieved, meanwhile, the measurement system size is reduced, and integration is more facilitated.
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Description

technical field

[0001] The invention relates to a linear displacement measurement system, in particular to a linear displacement measurement system based on an alternating light field. Background technique

[0002] In the field of precision displacement measurement, the grating is restricted by advanced manufacturing technology, light wavelength and optical diffraction limit, and it is difficult to further improve the measurement accuracy. The time grating is a displacement sensor that uses clock pulses as the reference for displacement measurement. Patent CN104655023A discloses a single-row time grating linear displacement sensor based on the construction of a moving light field. It adopts a single-row half-sine transmission through four light sources The signal formed on the surface is synthesized into two standing wave signals, and then a traveling wave signal is synthesized by an adding circuit to realize the measurement of linear displacement. This time grating linear ...

Examples

Embodiment Construction

[0025] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0026] Such as figure 1 , figure 2 The linear displacement measuring system based on the alternating light field shown includes a light emitting element 1, a scale base 2, a moving scale base 3, a photodetector 4 and an electronic signal processing circuit. The scale base 2 remains fixed, and the light emitting element 1, The moving scale base 3 and the photodetector 4 can move with the measured object at the same time. The light emitting element 1 is installed in front of the fixed scale base 2. The light emitting element 1 includes a light source base 12 and a strip-shaped alternating light source installed on the light source base 12. Body 11, alternating light source Body 11 is an array of light-emitting diodes (also can be a semiconductor surface light source), driven by a sinusoidal excitation signal to form a single alternating light field.

[0027] The fix...