A new type of rotary gate valve for vacuum

Abstract

The present invention discloses a novel rotary valve for vacuum, which relates to the technical field of valves. It includes a valve, and the valve is installed at the inlet and outlet of the chamber through an upper mounting bearing seat and a lower mounting bearing seat. The upper cylinder is drivingly connected to the valve through an upper rack, an upper gear and a coupling, and the lower cylinder is drivingly connected to the valve through a lower rack, a lower gear and a lower coupling. An upper gear limiting component and a lower gear limiting component are respectively arranged in the upper and lower parts of the chamber, and a valve shaft limiting device is arranged on the valve shaft of the valve. The valve plate is installed on the valve shaft through a connecting sleeve and a gib head key. The present invention has reliable sealing and sensitive action, ensures that the substrate quickly passes through the inlet and outlet of the vertical coating line, and improves the efficiency of the entire vacuum coating production line.

Description

Technical Field

[0001] The present invention relates to the technical field of gate valves, in particular to a novel vacuum rotary gate valve. Background Art

[0002] In vacuum coating production, the vacuum environment required for coating requires that the inlet and outlet of the production line be completely sealed. Gate valves are typically installed at each inlet and outlet, opening or closing accordingly as substrates enter or exit the production line. Vacuum coating production lines require extremely high vacuum conditions, which necessitates reliable sealing of the vacuum chamber gate valves. When the equipment receives a signal indicating a substrate has entered or exited, the gate valves must open and close promptly, sensitively, and reliably to ensure production efficiency and product quality.

[0003] The inlet and outlet rotary gate valves used in the present invention drive the cylinder to rotate 95 degrees through the rack and gear when the cylinder receives the signal of the substrate entering or exiting, and the action is smooth and fast, and the sealing is reliable. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention aims to provide a new type of vacuum rotary gate valve with reliable sealing and sensitive movement, ensuring that the substrate passes through the inlet and outlet of the vertical coating line quickly, thereby improving the efficiency of the entire vacuum coating production line.

[0005] In order to achieve the above-mentioned purpose, the present invention is implemented through the following technical solutions: a new type of vacuum rotary gate valve, including a gate valve, which is pressed at the inlet and outlet of the chamber through an upper mounting bearing seat and a lower mounting bearing seat, the upper cylinder is connected to the gate valve through an upper rack, an upper gear and an upper coupling, and the lower cylinder is connected to the gate valve through a lower rack, a lower gear and a lower coupling, and the upper and lower parts of the chamber are respectively provided with an upper gear limiting component and a lower gear limiting component, and a gate valve shaft limiting device is provided on the gate valve shaft on the gate valve, and the valve plate is installed on the gate valve shaft through a connecting sleeve and a hook key.

[0006] Preferably, an O-ring is installed on the valve plate.

[0007] Preferably, the valve plate is further arranged on the gate valve shaft via an adjusting block and a positioning screw.

[0008] The beneficial effects of the present invention include reasonable structural design, reliable sealing, and sensitive movement, which ensure that the substrate quickly passes through the inlet and outlet of the vertical coating line, thereby improving the efficiency of the entire vacuum coating production line. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments;

[0010] Figure 1 It is a schematic diagram of the overall installation structure of the present invention;

[0011] Figure 2 is Figure 1 an enlarged schematic view of part A of

[0012] Figure 3 is Figure 1 an enlarged schematic view of part B of

[0013] Figure 4 is Figure 1 an enlarged schematic view of part C of

[0014] Figure 5 is a cross-sectional view of the valve shaft limiting device of the present invention;

[0015] Figure 6 is a schematic view of the valve gate assembly of the present invention;

[0016] Figure 7 is Figure 6 an enlarged schematic view of part D of

[0017] Figure 8 is a cross-sectional view of the valve plate of the present invention. Detailed implementation manners

[0018] To make the technical means, creative features, achieved purposes and effects of the present invention easy to understand, the present invention will be further described below in conjunction with specific implementation manners.

[0019] Referring to Figures 1-8 , the following technical solutions are adopted in this specific implementation manner: a new type of rotary valve for vacuum, including a valve gate 1, the valve gate 1 is pressed at the inlet and outlet of the chamber 4 through an upper mounting bearing seat 2 and a lower mounting bearing seat 3, an upper air cylinder 5 is drivingly connected to the valve gate 1 through an upper rack 6, an upper gear 7 and an upper coupling 8, a lower air cylinder 9 is drivingly connected to the valve gate 1 through a lower rack 10, a lower gear 11 and a lower coupling 12, an upper gear limiting member 13 and a lower gear limiting member 14 are respectively arranged on the upper and lower parts of the chamber 4, a valve shaft limiting device 16 is arranged on a valve shaft 15 of the valve gate 1, and a valve plate 17 is mounted on the valve shaft 15 through a connecting sleeve 18 and a gib head key 19,

[0020] It should be noted that an O-ring 20 is installed on the valve plate 17.

[0021] In addition, the valve plate 17 is also arranged on the valve shaft 15 through an adjusting block 21, an adjusting bolt 24 and a positioning screw 22.

[0022] The valve gate of this specific implementation manner is fixed at the inlet and outlet of the chamber through upper and lower mounting bearing seats, the valve shaft is synchronously driven by upper and lower air cylinders, and the valve gate is driven to rotate through racks, gears and couplings; the valve gate and the chamber are arranged on a chassis 23.

[0023] Gear limits are installed above and below the chamber; at the same time, since the upper and lower spans of the valve shaft are relatively long, in order to reduce the deflection of the shaft, a valve shaft limit is also installed. The two limit rollers on the valve shaft limit form a three-point positioning of the shaft with the shaft seat; this makes the rotation of the valve very stable and fast.

[0024] The valve plate of this specific embodiment is installed on the valve shaft through a connecting sleeve and a gib head key. The valve plate is equipped with a sealing ring for sealing when closed, and is adjusted by an adjusting block, a positioning screw, and an adjusting bolt, so that the sealing surface can reach the optimal position. This makes the sealing very reliable.

[0025] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. A rotary valve for vacuum, characterized in that, It includes a valve gate (1), and the valve gate (1) is installed at the inlet and outlet of a chamber (4) through an upper mounting bearing block (2) and a lower mounting bearing block (3). An upper air cylinder (5) is in transmission connection with the valve gate (1) through an upper rack (6), an upper gear (7) and an upper coupling (8). A lower air cylinder (9) is in transmission connection with the valve gate (1) through a lower rack (10), a lower gear (11) and a lower coupling (12). An upper gear limiting component (13) and a lower gear limiting component (14) are respectively arranged on the upper and lower parts of the chamber (4). A valve gate shaft limiting device (16) is arranged on a valve gate shaft (15) of the valve gate (1). A valve plate (17) is installed on the valve gate shaft (15) through a connecting sleeve (18) and a gib head key (19); An O-ring seal (20) is installed on the valve plate (17); The valve plate (17) is also arranged on the valve gate shaft (15) through an adjusting block (21) and a positioning screw (22).

Images