Athermal arrayed waveguide grating with wavelength stability over a wide temperature range

Abstract

The present invention discloses an athermal arrayed waveguide grating (AWG) for achieving wavelength stability in a wide temperature range, comprising an arrayed waveguide grating (AWG) chip, the arrayed waveguide grating (AWG) chip comprising an input waveguide, an input plane waveguide, an arrayed waveguide, an output plane waveguide and an output waveguide, the arrayed waveguide grating (AWG) chip being divided into a first chip and a second chip by a slit, the slit passing through the input plane waveguide or the output plane waveguide; a first driving rod and a second driving rod are arranged between the first chip and the second chip, both ends of the first driving rod and the second driving rod are connected to the first chip and the second chip; within a set temperature range, the first driving rod performs linear under-compensation on the arrayed waveguide grating (AWG) chip, and the second driving rod performs linear over-compensation on the arrayed waveguide grating (AWG) chip. The first driving rod and the second driving rod respectively perform linear under-compensation and linear over-compensation on the arrayed waveguide grating (AWG) chip under a set low temperature and a set high temperature, so as to achieve a smaller overall wavelength deviation within a set temperature range.

Description

Technical Field

[0001] The present invention relates to the field of communication technology, and more particularly to an athermal array waveguide grating capable of achieving wavelength stability within a wide temperature range. Background Art

[0002] At present, the optical fiber communication technology is developing very rapidly, among which the WDM (Wavelength Division Multiplexing) system is the most common optical layer networking system, which realizes multi-channel signal transmission through multiplexing and demultiplexing. AWG (Arrayed Wavelength Grating) based on PLC (Planar Lightwave Circuit) technology is an important multiplexing / demultiplexing device in WDM system. The method is to deposit a silicon dioxide film layer on a silicon wafer, and then use photolithography and reactive ion etching to make AWG. Compared with FBG (Fiber Bragg Grating) and TFF (Thin Film Filter), AWG has the advantages of high integration, large number of wavelength channels, small channel spacing, no need to use optical isolators, and easy batch automatic production.

[0003] The waveguide refractive index of the traditional silicon-based silica waveguide AWG chip is sensitive to temperature, which causes the center wavelength of the AWG chip response spectrum to change when the working environment temperature changes. Figure 1 As shown, the relationship is basically linear, and the drift of the center wavelength with temperature is about 11pm / ℃. For DWDM systems with a wavelength interval of 100GHz or narrower, this AWG is not applicable. In order to fix the center wavelength of the AWG at the target value and not be affected by the working environment temperature, the following two methods are generally used in the prior art: one is to use a heater and a temperature control circuit to fix the chip temperature at a certain constant value, which is called a thermal AWG (Thermal AWG), but this will increase the system power consumption accordingly, and the power supply interface and monitoring interface must be reserved, which limits the flexibility of use. The other is the athermal AWG. The athermal AWG does not use a heater and a temperature control circuit, and relies on its own special material structure or mechanical structure to achieve the purpose of not changing the center wavelength of the AWG spectrum with changes in the working environment temperature.

[0004] Traditional athermal AWGs rely on mechanical structures to achieve temperature compensation, such as Figure 2As shown, the arrayed waveguide 130 grating chip 100 includes an input waveguide 110, an input planar waveguide 120, an arrayed waveguide 130, an output planar waveguide 140 and an output waveguide 150. The arrayed waveguide 130 grating chip 100 is divided into a first chip 101 and a second chip 102 by a slit 160, and the slit 160 passes through the input planar waveguide 120, and the first chip 101 and the second chip 102 are connected by a metal compensation rod 220. Driven by the thermal expansion and contraction of the metal compensation rod 220, the relative position of the first chip 101 and the second chip 102 is changed to compensate for the wavelength drift with temperature. Since the thermal expansion of the metal compensation rod is linear, this packaging method is to linearly compensate for the temperature characteristics of the wavelength, and the refractive index of the silicon-based silica waveguide has a high-order coefficient with temperature change, such as Figure 3 As shown in the figure, the actual relationship between wavelength and temperature is a parabola with an opening upward. Combined with the corresponding inconsistency of the wavelengths of each output channel, the wavelength deviation of the device at -40℃~80℃ basically reaches more than 80pm. Therefore, this compensation method can only maintain wavelength stability within a limited temperature range, and is difficult to meet the requirements of applications with a larger temperature change range such as outdoor applications. Summary of the invention

[0005] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a athermal array waveguide grating that achieves wavelength stability in a wide temperature range. Through the cooperation of a first driving rod and a second driving rod, the stability of the central wavelength of the array waveguide grating spectrum within a set temperature range is enhanced.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A athermal arrayed waveguide grating (AWG) that achieves wavelength stability in a wide temperature range comprises an AWG chip, wherein the AWG chip comprises an input waveguide, an input planar waveguide, an arrayed waveguide, an output planar waveguide and an output waveguide, wherein the AWG chip is divided into a first chip and a second chip by a slit, and the slit passes through the input planar waveguide or the output planar waveguide;

[0008] A first driving rod and a second driving rod are arranged between the first chip and the second chip, and both ends of the first driving rod and the second driving rod are respectively connected to the first chip and the second chip; within a set temperature range, the first driving rod performs linear under-compensation on the array waveguide grating chip, and the second driving rod performs linear over-compensation on the array waveguide grating chip.

[0009] By adopting the above technical scheme, under the low temperature state of the set temperature range, the first driving rod drives the first chip and the second chip to move relative to each other. Since the first driving rod performs linear under-compensation on the arrayed waveguide grating chip, the wavelength shift is small within the temperature range; under the high temperature state of the set temperature range, the second driving rod drives the first chip and the second chip to move relative to each other. Since the second driving rod performs linear over-compensation on the arrayed waveguide grating chip, the wavelength shift is small within the temperature range; the first driving rod and the second driving rod act respectively under the low temperature and high temperature states of the set temperature, so as to achieve the purpose of reducing the overall wavelength shift within the set temperature range, and enhance the stability of the central wavelength of the arrayed waveguide grating spectrum within the set temperature range.

[0010] Furthermore, the total expansion amount of the second driving rod is greater than the total expansion amount of the first driving rod, one end of the first driving rod is fixedly connected to the first chip or the second chip, and the other end abuts against the second chip or the first chip; the second driving rod is fixedly connected to the first chip and the second chip through an elastic block.

[0011] By adopting the above technical solution, under the low temperature state in the set temperature range, since the total expansion amount of the second driving rod is greater than the total expansion amount of the first driving rod, it can be known that the total contraction amount of the second driving rod is greater than the total contraction amount of the first driving rod. At this time, the abutting end of the first driving rod is still abutted against the first chip or the second chip, the elastic block is extended, and the relative displacement amount of the first chip and the second chip is the contraction amount of the first driving rod, that is, the arrayed waveguide grating chip is linearly under-compensated by the first driving rod, so that under the low temperature state in the set temperature range, the wavelength deviation is small;

[0012] Under the high temperature state within the set temperature range, since the total expansion amount of the second driving rod is greater than the total expansion amount of the first driving rod, at this time, the abutting end of the first driving rod is separated from the first chip or the second chip, the elastic block does not deform, and the relative displacement amount of the first chip and the second chip is the expansion amount of the second driving rod, that is, the arrayed waveguide grating chip is linearly overcompensated by the second driving rod, so that under the high temperature state within the set temperature range, the wavelength deviation is small;

[0013] That is, under low and high temperature conditions within a set temperature range, the first driving rod and the second driving rod respectively perform temperature compensation on the arrayed waveguide grating chip, so that the overall wavelength deviation is small.

[0014] Furthermore, first fixing blocks are provided at both ends of the first driving rod, and the first fixing blocks are fixedly connected to the first chip and the second chip respectively; the first driving rod is fixedly connected to one of the first fixing blocks and contacts with the other first fixing block.

[0015] By adopting the above technical solution, the first driving rod is connected to the first chip and the second chip through the first fixing block, which can avoid the first driving rod directly exerting force on the first chip and the second chip when expanding or contracting, thereby protecting the chips.

[0016] Furthermore, the first chip and the second chip are both fixedly connected with second fixing blocks, one end of the elastic block and one end of the second driving rod are respectively fixedly connected to the two second fixing blocks, and the other end of the elastic block is fixedly connected to the other end of the second driving rod.

[0017] By adopting the above technical solution, the second driving rod is connected to the first chip and the second chip through the second fixing block, which can avoid the second driving rod directly exerting force on the first chip and the second chip when expanding or contracting, thereby protecting the chips.

[0018] Furthermore, the elastic block includes a block body matched with the second driving rod, and a non-through groove provided on a side surface of the block body in the length direction of the second driving rod, and the block body and the second driving rod are integrally formed.

[0019] By adopting the above technical solution, a non-through groove is set on the side of the block, so that the entire block forms a spring-like structure with relatively stable elastic deformation force and elastic recovery force, and the block and the second driving rod are integrally formed, which can reduce parts and simplify the structure.

[0020] Furthermore, the elastic block includes a block body adapted to the second driving rod, and a non-through groove provided on a side surface of the block body in the length direction of the second driving rod. The block body is separately arranged from the second driving rod and is fixedly connected to the second driving rod.

[0021] By adopting the above technical solution, a non-through groove is set on the side of the block, so that the entire block forms a spring-like structure with relatively stable elastic deformation force and elastic recovery force. The block and the second driving rod are separately set, and blocks of different shapes can be selected, which has higher applicability.

[0022] Furthermore, the expansion coefficient of the material of the first driving rod and the second driving rod is greater than the expansion coefficient of the material of the arrayed waveguide grating chip, the first driving rod and the second driving rod are made of the same material, and the length of the second driving rod is greater than the length of the first driving rod, and the cross-sectional areas perpendicular to the length direction are equal.

[0023] By adopting the above technical solution, there is a deviation between the expansion or contraction distance of the first driving rod and the second driving rod within the set temperature range and the expansion or contraction distance of the arrayed waveguide grating chip itself, so that the first driving rod or the second driving rod can drive the first chip and the second chip to move relative to each other, thereby achieving temperature compensation and making the central wavelength of the arrayed waveguide grating spectrum more stable.

[0024] When the first driving rod and the second driving rod are made of the same material, the expansion coefficients of the first driving rod and the second driving rod are equal, but when the two have the same base but different heights, the expansion amounts of the two are different, and the expansion amount of the second driving rod is greater than the expansion amount of the first driving rod, so that within the set temperature range, the first driving rod and the second driving rod cooperate to stabilize the central wavelength of the arrayed waveguide grating spectrum.

[0025] Furthermore, the expansion coefficient of the materials of the first driving rod and the second driving rod is greater than the expansion coefficient of the material of the arrayed waveguide grating chip, the first driving rod and the second driving rod have the same shape and size, and the expansion coefficient of the material of the first driving rod is less than the expansion coefficient of the material of the second driving rod.

[0026] By adopting the above technical solution, there is a deviation between the expansion or contraction distance of the first driving rod and the second driving rod within the set temperature range and the expansion or contraction distance of the arrayed waveguide grating chip itself, so that the first driving rod or the second driving rod can drive the first chip and the second chip to move relative to each other, thereby achieving temperature compensation and making the central wavelength of the arrayed waveguide grating spectrum more stable.

[0027] When the first driving rod and the second driving rod are made of different materials and the first driving rod has the same shape and size, the expansion amount of the second driving rod is greater than the expansion amount of the first driving rod, so that within the set temperature range, the first driving rod and the second driving rod cooperate to stabilize the central wavelength of the arrayed waveguide grating spectrum.

[0028] Furthermore, the slit is filled with a filling material whose refractive index matches the material of the input planar waveguide or the output planar waveguide.

[0029] By adopting the above technical solution, there is generally air at the slit, and when the signal light propagates to the slit, it is easy to cause optical power loss. Filling the slit with a filling material whose refractive index matches the material of the input planar waveguide or the output planar waveguide can reduce the optical power loss and avoid signal distortion.

[0030] Furthermore, the material of the first fixing block and the second fixing block is consistent with the material of the arrayed waveguide grating chip.

[0031] By adopting the above technical solution, the stress of the first fixing block and the second fixing block on the first chip and the second chip can be reduced, thereby improving the stability of the overall structure.

[0032] Compared with the prior art, the advantages of the present invention are:

[0033] 1. The first driving rod and the second driving rod act on the first chip and the second chip respectively under the low temperature and high temperature of the set temperature, so that in the low temperature section of the set temperature range, the first driving rod is used to realize linear under-compensation of the arrayed waveguide grating chip, and in the high temperature section, the second driving rod is used to realize linear over-compensation of the arrayed waveguide grating chip, thereby enhancing the stability of the central wavelength of the arrayed waveguide grating spectrum within the set temperature range and expanding the operating temperature range of the arrayed waveguide grating;

[0034] 2. The first driving rod and the second driving rod cooperate with each other, the structure is simple, the processing precision requirement is relatively low, it is easier to manufacture the arrayed waveguide grating, and the production efficiency can be improved; at the same time, the assembly process has high repeatability and high yield;

[0035] 3. The first chip and the second chip are stably mounted on the same base plate, thereby avoiding relative displacement of the first chip and the second chip in a direction perpendicular to the base plate and reducing the risk of loss variation. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 This is the curve of the central wavelength of the arrayed waveguide grating device without temperature compensation changing with the ambient temperature;

[0037] Figure 2 Schematic diagram of the athermal array waveguide grating structure for traditional linear temperature compensation;

[0038] Figure 3 This is the curve of the central wavelength of the arrayed waveguide grating device without temperature compensation changing with the ambient temperature;

[0039] Figure 4 Schematic diagram of the athermal arrayed waveguide grating structure of an embodiment of the present invention;

[0040] Figure 5 The structural schematic diagram of the elastic block and the second driving rod of the present invention (I);

[0041] Figure 6 It is a structural schematic diagram of the elastic block and the second driving rod of the present invention (II);

[0042] Figure 7 It is a structural schematic diagram of the elastic block and the second driving rod of the present invention (III);

[0043] Figure 8 It is a structural schematic diagram of the elastic block and the second driving rod of the present invention (IV);

[0044] Fig. 9 A partial schematic diagram of the deformation of the athermal arrayed waveguide grating after cooling down according to an embodiment of the present invention;

[0045] Fig.10 A partial schematic diagram of the deformation of the athermal arrayed waveguide grating after heating according to an embodiment of the present invention;

[0046] Fig.11 This is a curve showing the change of the central wavelength of the arrayed waveguide grating device according to the present invention with the ambient temperature.

[0047] Figure numerals: 100, arrayed waveguide grating chip; 101, first chip; 102, second chip; 110, input waveguide; 120, input planar waveguide; 130, arrayed waveguide; 140, output planar waveguide; 150, output waveguide; 160, slit; 170, first driving rod; 180, second driving rod; 190, elastic block; 191, block; 192, non-through groove; 200, first fixed block; 210, second fixed block; 220, metal compensation rod. DETAILED DESCRIPTION

[0048] The present invention is described in detail below in conjunction with the accompanying drawings and embodiments.

[0049] A athermal arrayed waveguide grating that achieves wavelength stability over a wide temperature range, referring to Figure 4 , comprising an arrayed waveguide grating chip 100, the arrayed waveguide grating chip 100 comprising an input waveguide 110, an input plane waveguide 120, an arrayed waveguide 130, an output plane waveguide 140 and an output waveguide 150, the arrayed waveguide grating chip 100 is divided into a first chip 101 and a second chip 102 by a slit 160, and the slit 160 passes through the input plane waveguide 120 or the output plane waveguide 140. A first driving rod 170 and a second driving rod 180 are arranged between the first chip 101 and the second chip 102, and both ends of the first driving rod 170 and the second driving rod 180 are respectively connected to the first chip 101 and the second chip 102; within a set temperature range, the first driving rod 170 performs linear under-compensation on the arrayed waveguide grating chip 100, and the second driving rod 180 performs linear over-compensation on the arrayed waveguide grating chip 100. In this embodiment, taking the example of the slit 160 passing through the input planar waveguide 120, the slit 160 is parallel to the input planar waveguide 120 and connects one side of the input waveguide 110. The first chip 101 includes the input waveguide 110 and part of the input planar waveguide 120, and the first chip 101 is arranged in a right-angle trapezoid.

[0050] The material of the arrayed waveguide grating chip 100 may be silicon-based silicon dioxide. According to the material properties and structure of the arrayed waveguide grating chip 100, the slit 160 may be implemented in a variety of ways, such as resin blade cutting, diamond blade cutting or laser cutting. In order to ensure the optical indicators of the arrayed waveguide grating chip 100 after cutting, the material loss of the waveguide on the arrayed waveguide grating chip 100 is avoided or reduced as much as possible during the cutting process according to the process conditions, and the cut end face should be processed as smooth and flat as possible to reduce the optical power loss caused by the end face.

[0051] Since the input planar waveguide 120 is cut off at the slit 160, the optical signal is input from the input waveguide 110, passes through the input planar waveguide 120 on the first chip 101, passes through the air at the slit 160, and then enters the input planar waveguide 120 on the second chip 102. In this process, the optical signal is very likely to cause optical power loss when passing through the air. To avoid signal distortion, the distance between the two parts of the input planar waveguide 120 at both ends of the slit 160 is less than or equal to 40 microns, especially 25 microns, at which time the optical power loss is minimal. In addition, in order to eliminate the refractive index change between the air propagation section and the input planar waveguide 120, the slit 160 can be filled with an optical material with a refractive index consistent with that of the input planar waveguide 120, such as colloidal silica, so as not to hinder the relative movement of the first chip 101 and the second chip 102.

[0052] The first driving rod 170 and the second driving rod 180 are both parallel to the slit 160 passing through the input planar waveguide 120, so that the first chip 101 and the second chip 102 can move along the length direction of the first driving rod 170 and the second driving rod 180, and the distance between the first chip 101 and the second chip 102 is not easy to change with the movement of the first driving rod 170 or the second driving rod 180, thereby reducing signal loss.

[0053] In addition, the total expansion amount of the second driving rod 180 is greater than the total expansion amount of the first driving rod 170. One end of the first driving rod 170 is fixedly connected to the first chip 101 or the second chip 102, and the other end abuts against the second chip 102 or the first chip 101. The second driving rod 180 is fixedly connected to the first chip 101 and the second chip 102 through the elastic block 190. In order to prevent the first driving rod 170 from expanding or contracting and directly exerting force on the first chip 101 or the second chip 102, first fixing blocks 200 are provided at both ends of the first driving rod 170, and the first fixing blocks 200 are respectively fixedly connected to the first chip 101 and the second chip 102; the first driving rod 170 is fixedly connected to one of the first fixing blocks 200, and contacts with the other first fixing block 200. In this embodiment, one end of the first driving rod 170 is fixedly connected to the first fixing block 200 located in the second chip 102, and contacts with the first fixing block 200 located in the first chip 101, and is in a state of just contact at room temperature (or the middle value of the entire set temperature range), and does not generate mutual stress.

[0054] Similarly, the first chip 101 and the second chip 102 are both fixedly connected with a second fixing block 210, one end of the elastic block 190 and one end of the second driving rod 180 are respectively fixedly connected to the two second fixing blocks 210, and the other end of the elastic block 190 is fixedly connected to the other end of the second driving rod 180. The elastic block 190 may include a block body 191 adapted to the second driving rod 180, and a non-through groove 192 provided on the side of the block body 191 in the length direction of the second driving rod 180, and the block body 191 and the second driving rod 180 are integrally formed. Figure 5 As shown, the block 191 and the non-through groove 192 are arranged in a W shape as a whole; or as Figure 6 As shown, the block 191 and the non-through groove 192 are arranged in a U shape as a whole. The elastic block 190 may also include a block 191 adapted to the second driving rod 180, and a non-through groove 192 provided on the side of the block 191 in the length direction of the second driving rod 180. The block 191 is arranged separately from the second driving rod 180 and is fixedly connected to the second driving rod 180. Figure 7 As shown, the block 191 and the non-through groove 192 are arranged in a W shape as a whole; or as Figure 8 As shown, the block 191 and the non-through groove 192 are arranged in a U shape as a whole.

[0055] It should be noted that the material of the first fixing block 200 and the second fixing block 210 is consistent with the material of the arrayed waveguide grating chip 100, which can reduce stress and improve the stability of the overall structure.

[0056] The materials and dimensions of the first driving rod 170 and the second driving rod 180 should be appropriately selected so that within the set temperature range, the optical wavelength shift of the arrayed waveguide grating chip 100 caused by temperature changes and the wavelength shift caused by the relative position change of the input planar waveguides 120 on both sides of the slit 160 are offset, thereby stabilizing the optical characteristics. In one embodiment, the expansion coefficient of the materials of the first driving rod 170 and the second driving rod 180 is greater than the expansion coefficient of the material of the arrayed waveguide grating chip 100, the first driving rod 170 and the second driving rod 180 are made of the same material, and the length of the second driving rod 180 is greater than the length of the first driving rod 170, and the cross-sectional areas perpendicular to the length direction are equal. In another embodiment, the expansion coefficient of the materials of the first driving rod 170 and the second driving rod 180 is greater than the expansion coefficient of the material of the arrayed waveguide grating chip 100, the first driving rod 170 and the second driving rod 180 have the same shape and size, and the expansion coefficient of the material of the first driving rod 170 is less than the expansion coefficient of the material of the second driving rod 180. In the same temperature range, the expansion or contraction of the second driving rod 180 in the above two methods is greater than the expansion or contraction of the first driving rod 170. Preferably, the first driving rod 170 and the second driving rod 180 can be made of aluminum alloy, copper, stainless steel, etc.

[0057] The fixed connection methods described in this embodiment all adopt bonding.

[0058] The specific working mode of the present invention is as follows:

[0059] Under the low temperature condition within the set temperature range, the first driving rod 170 and the second driving rod 180 contract when cold, and the working conditions are as follows: Fig. 9 As shown. Since the contraction length of the second driving rod 180 is greater than the contraction length of the first driving rod 170, at this time, the first driving rod 170 is located at one end of the first chip 101 and contacts and interacts with the corresponding first fixed block 200, which supports the first chip 101 and prevents it from moving. At this time, the elastic block 190 connected to the second driving rod 180 is stretched due to stress. Therefore, the relative movement distance of the first chip 101 and the second chip 102 is equivalent to the contraction length of the first driving rod 170. Since the first driving rod 170 performs linear undercompensation on the array waveguide grating chip 100, the optical center wavelength offset curve that appears in the entire low-temperature working range at this time is Fig.11 Left half.

[0060] Under the high temperature condition within the set temperature range, the first driving rod 170 and the second driving rod 180 expand due to heat, and the working conditions are as follows: Fig.10As shown. Since the expansion length of the second driving rod 180 is greater than the expansion length of the first driving rod 170, the relative movement distance of the first chip 101 and the second chip 102 is equivalent to the expansion length of the second driving rod 180, and the first driving rod 170 is located at one end of the first chip 101 and is separated from the first fixing block 200 corresponding to it. Since the second driving rod 180 performs linear overcompensation on the arrayed waveguide grating chip 100, the optical center wavelength offset curve in the entire high temperature working range is Fig.11 Right half.

[0061] In summary, the stability of the central wavelength of the arrayed waveguide grating spectrum within the set temperature range is enhanced, the operating temperature range of the arrayed waveguide grating is expanded, and the wavelength deviation of the device is basically less than 30pm at -40℃~80℃.

[0062] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A athermal arrayed waveguide grating (AWG) for achieving wavelength stability in a wide temperature range, comprising an AWG chip (100), wherein the AWG chip (100) comprises an input waveguide (110), an input planar waveguide (120), an arrayed waveguide (130), an output planar waveguide (140), and an output waveguide (150), wherein: The arrayed waveguide grating chip (100) is divided into a first chip (101) and a second chip (102) by a slit (160), and the slit (160) passes through the input planar waveguide (120) or the output planar waveguide (140); A first driving rod (170) and a second driving rod (180) are arranged between the first chip (101) and the second chip (102), and both ends of the first driving rod (170) and the second driving rod (180) are respectively connected to the first chip (101) and the second chip (102); within a set temperature range, the first driving rod (170) performs linear under-compensation on the arrayed waveguide grating chip (100), and the second driving rod (180) performs linear over-compensation on the arrayed waveguide grating chip (100); The first driving rod (170) and the second driving rod (180) are both parallel to the slit (160) passing through the input planar waveguide (120), so that the first chip (101) and the second chip (102) can move along the length direction of the first driving rod (170) and the second driving rod (180); The total expansion amount of the second driving rod (180) is greater than the total expansion amount of the first driving rod (170); one end of the first driving rod (170) is fixedly connected to the first chip (101) or the second chip (102), and the other end is abutted against the second chip (102) or the first chip (101); the second driving rod (180) is fixedly connected to the first chip (101) and the second chip (102) via an elastic block (190); The elastic block (190) comprises a block body (191) adapted to the second driving rod (180), and a non-through groove (192) provided on a side surface of the block body (191) in the length direction of the second driving rod (180); the block body (191) and the second driving rod (180) are integrally formed, or the block body (191) and the second driving rod (180) are separately provided and fixedly connected to the second driving rod (180); The expansion coefficient of the material of the first driving rod (170) and the second driving rod (180) is greater than the expansion coefficient of the material of the arrayed waveguide grating chip (100); the first driving rod (170) and the second driving rod (180) have the same shape and size, and the expansion coefficient of the material of the first driving rod (170) is less than the expansion coefficient of the material of the second driving rod (180); or the first driving rod (170) and the second driving rod (180) are made of the same material, and the length of the second driving rod (180) is greater than the length of the first driving rod (170), and the cross-sectional areas perpendicular to the length direction are equal; The slit (160) is filled with a filling material whose refractive index matches that of the material of the input planar waveguide (120) or the output planar waveguide (140).

2. The athermal arrayed waveguide grating for achieving wavelength stability in a wide temperature range according to claim 1, characterized in that: First fixing blocks (200) are provided at both ends of the first driving rod (170), and the first fixing blocks (200) are fixedly connected to the first chip (101) and the second chip (102) respectively; the first driving rod (170) is fixedly connected to one of the first fixing blocks (200) and is in contact with the other first fixing block (200).

3. The athermal arrayed waveguide grating for achieving wavelength stability in a wide temperature range according to claim 2, characterized in that: The first chip (101) and the second chip (102) are both fixedly connected with a second fixed block (210), one end of the elastic block (190) and one end of the second driving rod (180) are respectively fixedly connected to the two second fixed blocks (210), and the other end of the elastic block (190) is fixedly connected to the other end of the second driving rod (180).

4. The athermal arrayed waveguide grating for achieving wavelength stability in a wide temperature range according to claim 3, characterized in that: The material of the first fixing block (200) and the second fixing block (210) is consistent with the material of the arrayed waveguide grating chip (100).

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