Evaporation source heating electric introduction device and vacuum evaporation coating equipment

Abstract

This invention provides an evaporation source heating and electrical introduction device and a vacuum evaporation coating equipment. The evaporation source heating and electrical introduction device includes: a heating electrode, one end of which is electrically connected to an external power source; a conductive adjusting rod, which can be disposed within the vacuum chamber of the vacuum evaporation coating equipment, one end of which is electrically connected to the other end of the heating electrode; and a conductive connector, the other end of which is electrically connected to the conductive connector, which is used to electrically connect to the power input terminal of the heating device of the evaporation source. This allows the evaporation source heating and electrical introduction device to possess good conductivity.

Description

TECHNICAL FIELD

[0001] The present application relates to vacuum coating technology, in particular to an evaporation source heating electric lead-in device for vacuum coating and a vacuum evaporation coating device. BACKGROUND

[0002] The vacuum evaporation coating is a commonly used coating process at present, and its principle is to heat the evaporation source to a certain temperature by a heating device in a high-temperature vacuum environment, so as to deposit a specific film layer on a substrate, thereby achieving the purpose of coating. The heating device needs to be connected to an external power source through the evaporation source heating electric lead-in device, so as to realize the heating of the evaporation source. Generally, the existing evaporation source heating electric lead-in device adopts a flexible line way, and the resistivity of such evaporation source heating electric lead-in device is relatively high in a high-temperature environment, resulting in a small conduction current and poor electrical conductivity. Therefore, the existing evaporation source heating electric lead-in device has poor electrical conductivity. SUMMARY

[0003] The purpose of the present application is to provide an evaporation source heating electric lead-in device and a vacuum evaporation coating device, which solves the problem of poor electrical conductivity of the existing evaporation source heating electric lead-in device.

[0004] To achieve the above purpose, the present application provides an evaporation source heating electric lead-in device, comprising:

[0005] a heating electrode, one end of the heating electrode being used for electrical connection with an external power source;

[0006] a conductive adjusting rod, the conductive adjusting rod being capable of being arranged in a vacuum cavity of a vacuum evaporation coating device, one end of the conductive adjusting rod being connected with the other end of the heating electrode; and

[0007] a conductive connector, the other end of the conductive adjusting rod being electrically connected with the conductive connector, the conductive connector being used for electrical connection with a power input end of a heating device of an evaporation source.

[0008] Optionally, the conductive connector is provided with a receiving cavity, a conductive strip mounting groove and a conductive strip, wherein:

[0009] the receiving cavity and the conductive strip mounting groove are arranged at intervals;

[0010] the receiving cavity receives the other end of the conductive adjusting rod to electrically connect with the other end of the conductive adjusting rod;

[0011] one end of the conductive strip is located in the conductive strip mounting groove and is used for electrical connection with the power input end of the heating device of the evaporation source.

[0012] Optionally, the conductive connector comprises a first pressing plate, a second pressing plate and a third pressing plate which are stacked in sequence.

[0013] A surface of the first pressing plate facing the second pressing plate is provided with a first accommodating groove.

[0014] A surface of the second pressing plate facing the first pressing plate is provided with a second accommodating groove at a position corresponding to the first accommodating groove, so that the first accommodating groove and the second accommodating groove constitute the accommodating cavity.

[0015] A surface of the second pressing plate facing the third pressing plate is formed with a groove to form the conductive strip mounting groove between the second pressing plate and the third pressing plate.

[0016] Optionally, the conductive strip comprises:

[0017] a first conductive strip, one end of the first conductive strip being arranged in the conductive strip mounting groove; and

[0018] a second conductive strip arranged on the other end of the first conductive strip, a surface of the second conductive strip facing the first conductive strip being provided with a groove to form a power input end mounting groove between the first conductive strip and the second conductive strip, the power input end mounting groove being used for electrical connection with a power input end of a heating device of the evaporation source.

[0019] Optionally, the heating electrode comprises:

[0020] a cooling structure; and

[0021] a wiring metal piece, one end of the wiring metal piece being provided with the cooling structure, the other end of the wiring metal piece being connected with one end of the conductive adjusting rod.

[0022] Optionally, one end of the wiring metal piece is recessed inward to form a first cavity, and the cooling structure comprises:

[0023] a three-way joint, the three-way joint being provided with a first interface, a second interface and a third interface, the first interface being used for connection with a liquid inlet pipeline, the second interface being connected with the first cavity, the third interface being used for connection with a liquid outlet pipeline, the second interface being provided with a liquid pipe accommodating cavity which is communicated with the third interface; and

[0024] a cooling pipe, the cooling pipe being connected with the first interface, the cooling pipe passing through the liquid pipe accommodating cavity and extending into the first cavity, the cooling pipe and the cavity wall of the liquid pipe accommodating cavity having a gap therebetween, the cooling pipe and the cavity wall of the first cavity having a gap therebetween.

[0025] Optionally, one end of the cooling pipe extending into the first cavity is in the form of an inclined surface or a trumpet mouth.

[0026] Optionally, the other end of the wiring metal piece is provided with an opening, one end of the conductive adjusting rod is inwardly recessed to form a second cavity, the first cavity extends to the opening and is communicated to the second cavity through the opening;

[0027] The cooling pipe extends in the direction close to the opening, so that one end of the cooling pipe in the first cavity extends into the second cavity.

[0028] Optionally, the other end of the wiring metal piece is provided with a first blind hole, one end of the conductive adjusting rod is provided with a second blind hole, and the first blind hole is connected with the second blind hole.

[0029] Optionally, the evaporation source heating electric lead-in device further comprises:

[0030] The fastener is internally provided with a through hole, the fastener is arranged at the connection position of the first blind hole and the second blind hole through the through hole, and the fastener is connected with the outer wall of the first blind hole and the outer wall of the second blind hole respectively.

[0031] Optionally, the evaporation source heating electric lead-in device further comprises:

[0032] The fixing sleeve made of insulating material is arranged on the conductive adjusting rod, and the fixing sleeve is mounted on the shell of the evaporation source.

[0033] The application also provides a vacuum evaporation coating equipment with the evaporation source heating electric lead-in device.

[0034] According to the application, the conductivity of the conductive adjusting rod is less affected by temperature, so that the resistivity of the conductive adjusting rod is low in the high-temperature vacuum environment in the vacuum cavity, and thus the evaporation source heating electric lead-in device has good conductivity. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 A structure diagram of an evaporation source heating electric lead-in device provided by the embodiment of the application;

[0036] Figure 2 A structure diagram of a heating electrode of an evaporation source heating electric lead-in device provided by the embodiment of the application;

[0037] Figure 3 A connection diagram of a wiring metal piece and a conductive adjusting rod of an evaporation source heating electric lead-in device provided by the embodiment of the application;

[0038] Figure 4A structure diagram of a conductive joint of a heating electrode lead-in device of an evaporation source is provided for an embodiment of the present application. DETAILED DESCRIPTION

[0039] In order to make the technical problems, technical solutions and advantages of the present application clearer, specific embodiments will be described in detail below with reference to the accompanying drawings.

[0040] As shown in the drawings, Figures 1 to 4 An embodiment of the present application provides a heating electrode lead-in device of an evaporation source, comprising:

[0041] A heating electrode 1, one end of the heating electrode 1 being used for electrical connection with an external power supply;

[0042] A conductive adjusting rod 2, one end of the conductive adjusting rod 2 being electrically connected with the other end of the heating electrode 1; and

[0043] A conductive joint 3, the other end of the conductive adjusting rod 2 being connected to the conductive joint 3, the conductive joint 3 being used for electrical connection with a power input end of a heating device of the evaporation source.

[0044] In the embodiment of the present application, the vacuum evaporation coating equipment can refer to an equipment for performing evaporation coating in a vacuum environment, and according to different heating modes, the vacuum evaporation coating equipment can be an electron beam evaporation coating equipment or a resistance evaporation coating equipment, etc. The heating device of the evaporation source mentioned above can refer to a device for heating the evaporation source to achieve evaporation, which can be an electron beam heating device, a resistance heating device, etc. Preferably, the heating device can be a resistance heating device, and further can be a graphite heater. When the heating device is a resistance heating device, high current and low voltage need to be input, which is difficult to achieve if the external power supply is connected through a flexible line, but can be achieved smoothly through the conductive adjusting rod 2. Of course, the vacuum evaporation coating equipment and the heating device can also be other equipment or devices, which are not limited. In addition, the heating electrode 1 can be a copper electrode, or can also be an aluminum electrode, a zinc electrode, etc., which are not limited.

[0045] Here, the other end of the heating electrode 1 extends into a vacuum cavity of the vacuum evaporation coating equipment, and the conductive adjusting rod connected with the other end of the heating electrode 1 is also located in the vacuum cavity of the vacuum evaporation coating equipment. The vacuum cavity is a high-temperature and high-vacuum environment, so the conductive adjusting rod 2 mentioned above can be a rigid rod structure made of conductive material, such as a conductive metal rod made of metal, specifically a conductive copper rod or a conductive zinc rod, etc. Preferably, the conductive adjusting rod 2 can be made of a metal with a high melting point, which can be more suitable for the high-temperature and high-vacuum environment of the vacuum cavity. The length of the conductive adjusting rod can be adjusted according to the position of the evaporation source. In addition, the conductive joint 3 is also a joint made of conductive material, such as a conductive copper joint, etc., which are not limited.

[0046] Specifically, the heating electrode 1 can be connected and fixed with the bottom of the vacuum cavity through the flange 13; in this way, the arrangement of the components of the vacuum evaporation coating equipment can be facilitated. The connection part or connection surface of the flange 13 and the cavity wall of the vacuum cavity forms a seal, thereby ensuring the closed vacuum environment in the vacuum cavity. Of course, in addition to the flange 13, the evaporation source heating electrode lead-in device can also be connected and fixed with the vacuum cavity through other ways; for example, the connection can be made through a clamp, a sleeve or the like. It should be noted that the environment in the vacuum cavity is a closed high-temperature and high-vacuum environment; the evaporation source heating electrode lead-in device is of a rigid structure and is not easy to be damaged in this environment, and is relatively stable and reliable.

[0047] In the embodiment of the present application, the electrically conductive performance of the electrically conductive adjusting rod 2 is less affected by temperature, so that the resistivity of the electrically conductive adjusting rod 2 is still low in the high-temperature and high-vacuum environment in the vacuum cavity; in this way, the evaporation source heating electrode lead-in device of the vacuum evaporation coating equipment can have good electrically conductive performance.

[0048] Optionally, the electrically conductive connector 3 is provided with a receiving cavity 30, an electrically conductive strip mounting groove 322 and an electrically conductive strip 34, wherein:

[0049] The receiving cavity 30 is arranged in a spaced manner with the electrically conductive strip mounting groove 322;

[0050] The receiving cavity 30 contains the other end of the electrically conductive adjusting rod 2 to electrically connect with the other end of the electrically conductive adjusting rod 2;

[0051] One end of the electrically conductive strip 34 is located in the electrically conductive strip mounting groove 322, and the other end of the electrically conductive strip 34 is used to electrically connect with the power input end of the heating device of the evaporation source.

[0052] In this embodiment, the electrically conductive connector 3 can be of an integral structure, or can be formed by combining a plurality of components; for example, it can be an electrically conductive block, which is respectively provided with the receiving cavity 30 and the electrically conductive strip mounting groove 322; or it can be a plurality of electrically conductive blocks which are sequentially clamped together, and the receiving cavity 30 and the mounting groove 322 can be formed by cooperation of any of the electrically conductive blocks.

[0053] It should be noted that the inner wall of the receiving cavity 30 is in contact with the other end of the electrically conductive adjusting rod 2, so that the two can conduct electricity and realize electrical connection; similarly, one end of the electrically conductive strip 34 is in contact with the inner wall of the electrically conductive strip mounting groove 322, and electrical connection can also be realized.

[0054] In addition, the accommodating cavity 30 and the conductive strip mounting groove 322 are spaced apart, that is, the accommodating cavity 30 and the conductive strip mounting groove 322 do not cross or overlap, and have a certain spacing. For example, when the conductive connector 3 is an integral structure in the shape of a cube, the accommodating cavity 30 can be a cavity passing through the top surface and the bottom surface, and the conductive strip mounting groove 322 can also be a groove passing through the top surface and the bottom surface, and there is a spacing between the accommodating cavity 30 and the conductive strip mounting groove 322. Alternatively, the conductive strip mounting groove 322 can also be a groove passing through any two opposite sides, and there is a spacing between the accommodating cavity 30 and the conductive strip mounting groove 322. In summary, the positions of the accommodating cavity 30 and the conductive strip mounting groove 322 can be set according to the position or structure of the external power supply, and no limitation is made thereto.

[0055] In this way, the conductive connector 3 and the conductive adjusting rod 2 can be conveniently installed or disassembled, thereby facilitating the maintenance or replacement of the components.

[0056] Optionally, the conductive connector 3 comprises a first pressing plate 31, a second pressing plate 32 and a third pressing plate 33 which are configured in the shape of a plate and are sequentially stacked, and a conductive strip 34;

[0057] The surface of the first pressing plate 31 facing the second pressing plate 32 is provided with a first accommodating groove 311;

[0058] The surface of the second pressing plate 32 facing the first pressing plate is provided with a second accommodating groove 321 at the corresponding position of the first accommodating groove 311, so that the first accommodating groove 311 and the second accommodating groove 321 form an accommodating cavity 30 for accommodating the conductive adjusting rod, and the other end of the conductive adjusting rod 2 is arranged in the accommodating cavity 30;

[0059] The surface of the second pressing plate 32 facing the third pressing plate 33 is formed with a groove, so as to form a conductive strip mounting groove 322 between the second pressing plate 32 and the third pressing plate 33;

[0060] One end of the conductive strip 34 is arranged in the conductive strip mounting groove 322, and the other end of the conductive strip 34 is used to be connected with the power input end of the heating device of the evaporation source.

[0061] In the embodiment, the first pressing plate 31, the second pressing plate 32 and the third pressing plate 33 are three plate-shaped structures arranged in sequence, and each adjacent two pressing plates are attached. The first pressing plate 31, the second pressing plate 32 and the third pressing plate 33 can be of any shape, such as circular, rectangular, etc., and are not limited in this regard. Alternatively, the first pressing plate 31, the second pressing plate 32 and the third pressing plate 33 are connected and fixed by at least two bolts 35, which is relatively convenient for installation, disassembly and maintenance. Specifically, a bolt hole can be formed at four corresponding positions of each pressing plate, for example, when each pressing plate is a rectangular plate body, a bolt hole can be formed at each corner of the pressing plate. Since each adjacent two pressing plates are attached, the bolt holes at each of the three corresponding positions are combined to form a threaded through-hole structure for threaded connection, so that four threaded through-hole structures are formed, which can be respectively screwed with four bolts 35 to connect and fix the first pressing plate 31, the second pressing plate 32 and the third pressing plate 33 together. In this way, not only is the installation, disassembly and maintenance of the conductive connector 3 facilitated, but also the conductive connector 3 has high connection strength. Of course, the first pressing plate 31, the second pressing plate 32 and the third pressing plate 33 can also be connected and fixed by adhesion, welding or clamping, and are not limited in this regard.

[0062] It should be noted that each pressing plate can be made of conductive material, so that the conductive strip 34 located in the conductive strip mounting groove 322 and the conductive adjusting rod 2 passing through the conductive adjusting rod mounting groove 30 can conduct current. The structure of the conductive adjusting rod mounting groove 30 matches the structure of the conductive adjusting rod 2, for example, when the conductive adjusting rod 2 is a round bar, the conductive adjusting rod mounting groove 30 can be a circular groove matching the structure of the conductive adjusting rod 2, i.e. the first accommodating groove 311 and the second accommodating groove 321 are each a semicircular groove. In addition, the above-mentioned conductive strip 34 can be a strip-shaped structure of any shape made of conductive material, such as square, circular, triangular or diamond, etc., and is not limited in this regard. Specifically, the conductive strip 34 can be a cubic conductive strip, one end of which is provided with an accommodating cavity for accommodating a heating device, and the other end is connected with the conductive strip mounting groove 322. It is easy to know that the structure of the conductive strip mounting groove 322 also matches the structure of the conductive strip 34; for example, when the conductive strip 34 is a square strip body, the conductive strip mounting groove 322 can be a square groove matching the structure of the conductive strip 34.

[0063] In the embodiment, the combination of the first pressing plate 31, the second pressing plate 32 and the third pressing plate 33 can facilitate the installation, disassembly and maintenance of the conductive connector 2.

[0064] Alternatively, the conductive strip 34 comprises:

[0065] The first conductive strip 341 has one end portion 3411 penetrating into the conductive strip mounting groove 322 and another end portion 3412 exposed outside the conductive strip mounting groove 322.

[0066] The second conductive strip 342 is arranged on the other end portion 3412 of the first conductive strip 341 and has a groove arranged on a surface thereof facing the first conductive strip 341 to form a power input mounting groove 3420 between the first conductive strip 341 and the second conductive strip 342, which is used to connect with a power input of a heating device of an evaporation source.

[0067] In the embodiment, the power input mounting groove 3420 is mainly used to accommodate the power input of the heating device, which will form contact with the first conductive strip 341 and the second conductive strip 342 respectively when the power input of the heating device is located in the power input mounting groove 3420, so as to realize electricity transmission. Optionally, one surface of the second conductive strip 342 is threadedly connected with the other end portion 3412 of the first conductive strip by means of a bolt 35, which is mainly used to facilitate the accommodation and removal of the power input of the heating device, which only needs to be simply loosened or tightened. Of course, the first conductive strip 341 can also be arranged on the second conductive strip 342 by means of adhesion, welding or the like, which is not limited. In addition, when the power input of the heating device is located in the power input mounting groove 3420, the second conductive strip 342 can be slightly deformed in a concave shape in the direction facing the power input of the heating device by tightening the bolt 35, that is, a clamping force is applied to the power input of the heating device; so that the power input of the heating device can be tightly clamped between the first conductive strip 341 and the second conductive strip 342, so that the power input is not easy to loosen, so as to avoid the surface of the power input which should be in contact with the first conductive strip 341 and / or the second conductive strip 342 from being separated from the contact, thereby improving the reliability and stability of the conductive strip 34.

[0068] In this way, the accommodation of the power input of the heating device can be more convenient and firm by the cooperation of the first conductive strip 341 and the second conductive strip 342, and the electricity transmission is reliable and stable.

[0069] Optionally, the heating electrode 1 comprises:

[0070] A cooling structure 11; and

[0071] A wiring metal piece 12, one end portion of the wiring metal piece 12 is provided with the cooling structure 11, and the other end portion of the wiring metal piece is connected with one end portion of the conductive adjusting rod 2.

[0072] The cooling structure 11 is a structure for cooling the wiring metal piece 12, which can be a wind cooling structure or a liquid cooling structure. This is not limited. For example, one end of the wiring metal piece 12 can be recessed inward to form a cavity, a cooling pipe is inserted into the cavity, a liquid inlet joint for connecting with a liquid inlet pipe is arranged at the inlet end of the cooling pipe, a through hole is formed on the cavity wall of the cavity, the through hole is connected to a liquid outlet joint for connecting with a liquid outlet pipe, thereby forming a circulating cooling liquid path to cool the wiring metal piece 12.

[0073] In this way, the wiring metal piece 12 can be cooled by the cooling structure 11.

[0074] Optionally, one end of the wiring metal piece 12 is recessed inward to form a first cavity 120, and the cooling structure 11 comprises:

[0075] The three-way joint 41 is provided with a first interface 411, a second interface 412 and a third interface 413, the first interface 411 is used for connecting with the liquid inlet pipe, the second interface 412 is connected to the first cavity 120 of the wiring metal piece 12, and the third interface 413 is used for connecting with the liquid outlet pipe, and the second interface 412 is provided with a liquid pipe containing cavity 4120 which is communicated with the third interface 413; and

[0076] The cooling pipe 42 is connected to the first interface 411, the cooling pipe 42 passes through the liquid pipe containing cavity 4120 and extends into the first cavity 120, the cooling pipe 42 has a gap between the liquid pipe containing cavity 4120 and the cavity wall, and the cooling pipe 42 has a gap between the liquid pipe containing cavity 4120 and the cavity wall; the cooling pipe 42 has at least one group, and can have two or more groups, which is not limited.

[0077] In the embodiment, the liquid inlet pipeline and the liquid outlet pipeline can be pipelines in a circulating liquid cooling circuit arranged outside the evaporation source heating electric lead-in device. The liquid pipe accommodating cavity 4120 is in communication with the first cavity 120. Through cooperation of the three-way joint 41 and the cooling pipe 42, a circulating cooling liquid path can be formed. The working principle can be as follows: after the liquid inlet pipeline is in communication with the first interface 411 and the liquid outlet pipeline is in communication with the third interface 413, the cooling liquid flows from the liquid inlet pipeline into the first interface 411, and then flows from the first interface 411 into the cooling pipe 42. Then, the cooling liquid flows out from the outlet of the cooling pipe 42, i.e., from the end of the cooling pipe 42 extending into the first cavity 120. Then, the cooling liquid flows out more and more, and gradually fills the entire first cavity 120 and the liquid pipe accommodating cavity 4120. At this time, the cooling liquid flows into the gap between the cooling pipe 42 and the cavity wall of the first cavity 120, and continues to flow into the gap between the cooling pipe 42 and the cavity wall of the liquid pipe accommodating cavity 4120, and then flows out from the third interface 413 to the liquid outlet pipeline. Thus, the circulating liquid cooling of the heating electrode is realized, and the cooling efficiency is relatively high.

[0078] It should be noted that the second joint 412 can be screwed with the first cavity 120, i.e. Figure 2 The black part at the connection between the second joint 412 and the first cavity 120 shown in the figure can be a thread, so that the detachable connection of the three-way joint 41 and the wiring metal piece 12 is realized.

[0079] In this way, the cooling liquid path formed by cooperation of the three-way joint 41 and the cooling pipe 42 can effectively cool the wiring metal piece 12.

[0080] Optionally, the end of the cooling pipe 42 extending into the first cavity 120 is an outlet end 420, and the outlet end 420 is in the shape of an inclined surface or a horn mouth. In the embodiment, the outlet end 420 is in the shape of an inclined surface, which can mean that the end face of the end of the cooling pipe 42 extending into the first cavity 120 is a chamfered surface, i.e., the shape of the end face of the outlet end 420 after cutting is in the shape of an inclined surface. In this way, whether the outlet end 420 is in the shape of an inclined surface or a horn mouth, the outlet cross-sectional area of the cooling pipe 42 can be increased, the liquid outlet amount can be increased, and the cooling efficiency can be improved ultimately. Of course, the outlet end 420 of the cooling pipe 42 extending into the first cavity 120 can also be in other shapes, which are not limited.

[0081] Optionally, the evaporation source heating electric lead-in device further comprises:

[0082] The fixing sleeve 5 made of insulating material is sleeved on the conductive adjusting rod 2, and the fixing sleeve 5 is installed on the shell of the evaporation source. The fixing sleeve 5 can protect the conductive adjusting rod 2 and avoid the generation of adverse factors caused by the excessive length of the conductive adjusting rod 2. On the other hand, the conductive adjusting rod 5 is insulated and fixed on the shell of the evaporation source.

[0083] In the embodiment, the shell of the evaporation source is a heat insulation shell structure of the evaporation source in a vacuum evaporation coating device, which is usually arranged at the bottom of the heating device to insulate the heat emitted by the heating device and avoid affecting the operation of other components in the vacuum device. The mounting structure can be a sleeve structure, which is mainly used for cooperation and connection with the fixing sleeve 5. For example, when the mounting structure is a flange sleeve or a flange plate, the connection can be achieved through flange connection. Of course, the mounting structure can also be other structures, such as a mounting bracket with bolt holes, and the fixing sleeve can be bolted with the mounting bracket, which is not limited. Here, since the conductive adjusting rod 2 is usually a rod or a bar with a long length, and the evaporation source heating electric lead-in device in the embodiment of the application has only one mounting fixing point of the flange 13, the long part of the conductive adjusting rod 2 can be easily inclined to a certain direction or even fall off, thereby affecting the conductive performance. Therefore, the fixing sleeve 5 can prevent the long end of the conductive adjusting rod from being inclined or falling off. Preferably, the fixing sleeve 5 can be located at a position between the midpoint and the fourth end 22 of the conductive adjusting rod. In addition, the fixing sleeve 5 is made of insulating material to form insulation between the heat insulation shell, thereby avoiding conduction between the two. Preferably, the fixing sleeve 5 can be a ceramic fixing sleeve made of ceramic material, which can have high heat resistance and insulation. Of course, the fixing sleeve 5 can also be made of other insulating materials, such as polytetrafluoroethylene or nylon.

[0084] In this way, the connection strength of the evaporation source heating electric lead-in device can be further improved, thereby reducing the failure probability of the evaporation source heating electric lead-in device.

[0085] Alternatively, the other end of the wiring metal piece 12 is provided with an opening 1201, one end of the conductive adjusting rod 2 is inwardly recessed to form a second cavity 20, the first cavity 120 extends to the opening 1201 and is communicated to the second cavity through the opening 1201, and the cooling pipe 42 extends to the direction close to the opening 1201, so that the liquid outlet end 420 of the cooling pipe 42 in the first cavity 4120 extends into the second cavity 20. The purpose is to realize the circulation of the cooling liquid into the conductive adjusting rod 2, thereby further reducing the temperature of the heating electric lead-in device.

[0086] In the embodiment, after the first cavity 120 and the second cavity are communicated, the cooling liquid flowing out of the cooling pipe 42 will also gradually flow into the second cavity to form a long cooling liquid circuit in the heating electrode 1 and the conductive adjusting rod 2, thereby simultaneously achieving the cooling of the heating electrode 1 and the conductive adjusting rod 2. In this way, by communicating the first cavity 120 and the second cavity, the conductive adjusting rod 2 can also be cooled, thereby reducing the deformation efficiency of the conductive adjusting rod 2, so that the evaporation source heating electric lead-in device has better conductive performance.

[0087] Optionally, the other end of the connecting metal piece 12 is provided with a first blind hole 121, and one end of the conductive adjusting rod 2 is provided with a second blind hole, and the first blind hole 121 is connected with the second blind hole 21.

[0088] In the embodiment, the first blind hole 121 and the second blind hole 21 can be threaded holes; the first blind hole 121 and the second blind hole can be coaxially arranged. Optionally, the first blind hole 121 and the second blind hole 21 are threadedly connected through a stud. In this way, the connecting metal piece 12 and the conductive adjusting rod 2 can be reliably connected together and are convenient to disassemble.

[0089] Optionally, the evaporation source heating electric lead-in device further comprises:

[0090] The fastener 6 is internally provided with a through hole, the fastener 6 is sleeved on the connecting position of the first blind hole 121 and the second blind hole through the through hole, and the fastener 6 is connected with the outer wall of the first blind hole 121 and the outer wall of the second blind hole 21 respectively.

[0091] In the embodiment, the first blind hole 121 and the second blind hole 21 can be connected only through a stud, and the connection strength is low, so that the connecting metal piece 12 or the conductive adjusting rod 2 is likely to be loose or fall off; and the connecting position of the heating electrode 1 and the conductive adjusting rod 2 can be protected and strengthened through the fastener 6. Specifically, the fastener 6 can be a clamp structure, the clamp structure is tightened through a bolt, so that the clamp structure can tightly clamp the connecting position of the first blind hole 121 and the second blind hole 21, and the two are not easy to be loose or fall off. Of course, the fastener 6 can also be other structures, for example, a reinforcing block with a hollow cavity, and the reinforcing block is reinforced through interference fit between the hollow cavity and the heating electrode 1 and the conductive adjusting rod 2; and the same is not limited.

[0092] In this way, the connection strength of the first blind hole 121 and the second blind hole 21 can be improved, and the failure probability of the evaporation source heating electric lead-in device is further reduced.

[0093] The application also provides a vacuum evaporation coating equipment, which comprises the evaporation source heating electric lead-in device.

[0094] The above is the preferred embodiment of the application, and it should be pointed out that, for ordinary skilled in the art, without departing from the principles of the application, a number of improvements and refinements can be made, and these improvements and refinements should also be considered as belonging to the protection scope of the application.

Claims

1. A heating electric lead-in device of an evaporation source, comprising: a heating electrode, one end of which is configured to be electrically connected to an external power source; an electrically conductive adjusting rod, which is configured to be arranged in a vacuum chamber of a vacuum evaporation coating device, one end of the electrically conductive adjusting rod being electrically connected to the other end of the heating electrode; and an electrically conductive connector, the other end of the electrically conductive adjusting rod being electrically connected to the electrically conductive connector, the electrically conductive connector being configured to be electrically connected to a power input end of a heating device of the evaporation source; the electrically conductive connector is provided with a receiving cavity, an electrically conductive strip mounting groove and an electrically conductive strip, wherein: the receiving cavity is arranged in a spaced-apart manner with the electrically conductive strip mounting groove; the receiving cavity is configured to accommodate the other end of the electrically conductive adjusting rod to be electrically connected to the other end of the electrically conductive adjusting rod; one end of the electrically conductive strip is arranged in the electrically conductive strip mounting groove to be electrically connected to the power input end of the heating device of the evaporation source; the electrically conductive connector comprises a first pressing plate, a second pressing plate and a third pressing plate which are stacked in sequence; a surface of the first pressing plate facing the second pressing plate is provided with a first receiving groove; a surface of the second pressing plate facing the first pressing plate is provided with a second receiving groove at a position corresponding to the first receiving groove, so that the first receiving groove and the second receiving groove form the receiving cavity; a surface of the second pressing plate facing the third pressing plate is formed with a groove to form the electrically conductive strip mounting groove between the second pressing plate and the third pressing plate; the electrically conductive strip comprises: a first electrically conductive strip, one end of which is arranged in the electrically conductive strip mounting groove; and a second electrically conductive strip, which is arranged on the other end of the first electrically conductive strip, a surface of the second electrically conductive strip facing the first electrically conductive strip is provided with a groove to form a power input end mounting groove between the first electrically conductive strip and the second electrically conductive strip, the power input end mounting groove being configured to be electrically connected to the power input end of the heating device of the evaporation source; the heating electrode comprises: a cooling structure; and a wiring metal piece, the cooling structure being arranged at one end of the wiring metal piece, the other end of the wiring metal piece being electrically connected to one end of the electrically conductive adjusting rod.

2. The heating electric lead-in device of the evaporation source according to claim 1, wherein: one end of the wiring metal piece is inwardly recessed to form a first cavity, the cooling structure comprises: a tee joint, the tee joint being provided with a first interface, a second interface and a third interface, the first interface being configured to be connected to a liquid inlet pipeline, the second interface being connected to the first cavity, the third interface being configured to be connected to a liquid outlet pipeline, the second interface being provided with a liquid pipe receiving cavity which is in communication with the third interface; and a cooling pipe, the cooling pipe being connected to the first interface, the cooling pipe passing through the liquid pipe receiving cavity and extending into the first cavity, the cooling pipe having a gap between the cooling pipe and a cavity wall of the liquid pipe receiving cavity, the cooling pipe and the cavity wall of the first cavity having a gap therebetween.

3. The heating electric lead-in device of the evaporation source according to claim 2, wherein: an end of the cooling pipe extending into the first cavity is in a bevel shape or a flared shape. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 4. The evaporation source heating electric lead-in device according to claim 2, wherein the other end of the wire metal piece is provided with an opening, and the one end of the electrically conductive adjusting rod is inwardly recessed to form a second cavity, the first cavity extends to the opening and is communicated to the second cavity through the opening. The cooling pipe extends to the direction of the opening, so that the one end of the cooling pipe in the first cavity extends into the second cavity.

5. The evaporation source heating electric lead-in device according to claim 1, wherein the other end of the wire metal piece is provided with a first blind hole, and the one end of the electrically conductive adjusting rod is provided with a second blind hole, and the first blind hole is connected with the second blind hole.

6. The evaporation source heating electric lead-in device according to claim 5, wherein the evaporation source heating electric lead-in device further comprises: a fastener, the inside of the fastener is provided with a through hole, the fastener is arranged at the connection of the first blind hole and the second blind hole through the through hole, and the fastener is connected with the outer wall of the first blind hole and the outer wall of the second blind hole respectively.

7. The evaporation source heating electric lead-in device according to claim 1, wherein the evaporation source heating electric lead-in device further comprises: a fixing sleeve made of insulating material, the fixing sleeve is arranged on the electrically conductive adjusting rod, and the fixing sleeve is used for being mounted on the shell of the evaporation source.

8. A vacuum evaporation coating equipment, comprising the evaporation source heating electric lead-in device according to any one of claims 1-7. ​ ​ ​ ​ ​

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