Cleaning tank and cleaning equipment

Abstract

The present invention provides a cleaning tank and cleaning equipment, wherein the cleaning tank comprises: a tank body; a rotating assembly, which is arranged in the tank body and configured to be able to rotate relative to the tank body; and a support member, which is arranged on the rotating assembly. The cleaning tank of the present invention is provided with a rotating assembly and a support member. During operation, the rotating assembly rotates a certain angle to drive the support member to rotate, so that the support member is vertical and a loading gap is configured. At this time, a graphite boat can be lowered into the tank body through the loading gap. The graphite boat will be under the transmission assembly, and then the rotating assembly is driven again to flatten the support member, and another graphite boat can be placed on the support member. In this way, two graphite boats can be cleaned at the same time, which greatly improves the cleaning efficiency and the utilization rate of the cleaning agent and the occupied space, and can reduce the input amount of the cleaning equipment and reduce the floor space of the cleaning equipment.

Description

Technical Field

[0001] The present invention relates to the field of cleaning equipment, and in particular to a cleaning tank and a cleaning equipment. Background Art

[0002] The support parts or molds of the workpieces mostly need to be cleaned after the production and processing are completed, but the existing cleaning tank structure is single, and only one support part or mold can be cleaned at a time, and the cleaning efficiency and cleaning liquid consumption utilization rate are low. Taking the production process of crystalline silicon solar cells as an example, there is a key silicon nitride anti-reflection film deposition process in the production process of crystalline silicon solar cells. In the deposition process of the silicon nitride anti-reflection film, the carrier of the crystalline silicon cell is a graphite boat or a graphite frame. Generally, during the process of production, the graphite boat will also be deposited on the silicon nitride film. After a certain thickness (generally greater than 10μm), the graphite boat needs to be cleaned. The traditional cleaning method currently commonly used in the industry is to use HF / HCL mixed liquid wet tank cleaning, that is, soak the graphite boat in a tank containing HF / HCL for 4~8 hours, then rinse with clean water, and dry it in a high-temperature oven for 4~8 hours. The existing cleaning tank can only place one graphite boat in a cleaning tank for cleaning at a time, and the cleaning efficiency is low. It cannot meet customer needs when customers need high production capacity. In order to improve efficiency, more tanks can only be added, which will inevitably increase investment costs and floor space. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art.

[0004] To this end, a first aspect of the present invention provides a cleaning tank.

[0005] A second aspect of the present invention provides a cleaning device.

[0006] In view of this, the first aspect of the present invention provides a cleaning tank, comprising: a tank body; a rotating assembly disposed in the tank body and configured to be rotatable relative to the tank body; and a support member disposed on the rotating assembly.

[0007] The cleaning tank of the present invention is provided with a rotating assembly and a supporting member. During operation, the rotating assembly is rotated at a certain angle (about 90 degrees) to drive the supporting member to rotate, so that the supporting member is vertical and a loading gap is configured. At this time, a graphite boat can be lowered into the tank body through the loading gap. The graphite boat will be at the bottom of the tank body and below the transmission assembly. Then the rotating assembly is driven again to flatten the supporting member, and another graphite boat can be placed on the supporting member. In this way, two graphite boats can be cleaned at the same time, which greatly improves the cleaning efficiency and the utilization rate of the cleaning agent and the occupied space, and can reduce the investment in the cleaning equipment and the occupied area of ​​the cleaning equipment.

[0008] In addition, the cleaning tank in the above technical solution provided by the present invention may also have the following additional technical features:

[0009] In the above technical solution, preferably, the rotating component includes: a rotating shaft, which is arranged in the slot body, one end of the rotating shaft passes through the slot body and extends out of the slot body, and a support member is arranged on the rotating shaft; a driving member, which is arranged on the slot body, and the output end of the driving member is connected to the end of the rotating shaft extending out of the slot body; and a sealing assembly, which is arranged at the connection between the rotating shaft and the slot body.

[0010] In this technical solution, the driving member drives the rotating shaft to rotate, and then drives the supporting member to rotate, so as to configure a loading gap for the graphite boat to be lowered into the tank body. At the same time, since the tank body needs to be equipped with a cleaning liquid, in order to ensure a good cleaning effect, the cleaning liquid usually has a certain acidity. Through the setting of the sealing component, the connection between the rotating shaft and the tank body is sealed to prevent the cleaning liquid from overflowing and corroding the outside of the tank body or polluting the environment.

[0011] Specifically, the driving member can be a cylinder arranged on the outside of the trough body. By adjusting the telescopic length of the cylinder, the rotation angle of the rotating shaft can be controlled, and the rotation direction of the rotating shaft can be controlled by extending or contracting the cylinder, making the driving more convenient and accurate.

[0012] In any of the above technical solutions, preferably, there are multiple rotating shafts, and each rotating shaft is provided with at least one supporting member.

[0013] In this technical solution, there can be multiple rotating axes. On the one hand, the multiple rotating axes can support multiple graphite boats, and on the other hand, they can divide the tank body into upper and lower double-layer spaces. Each layer of space can accommodate a corresponding number of graphite boats. The cleaning tank can clean multiple graphite boats at the same time, which can further improve the cleaning efficiency.

[0014] More preferably, the distance between two adjacent rotation axes is greater than the width of the graphite boat.

[0015] In any of the above technical solutions, preferably, the side wall of the trough body includes an inner wall and an outer wall, and a gap is left between the outer wall and the inner wall.

[0016] In this technical solution, through the setting of the inner wall and the outer wall of the tank body, the inner wall is nested on the inner side of the outer wall, and a gap is left between the outer walls, so that the side wall of the tank body has a double-layer structure, which can further prevent the overflow of the cleaning liquid, prevent the overflow of the cleaning liquid from corroding the outside of the tank body or polluting the environment.

[0017] In any of the above technical solutions, preferably, the sealing assembly includes: a guide groove, which is opened on the rotating shaft; a sealing seat, which is sleeved on the rotating shaft, located in the groove body and arranged on the inner wall; a sealing cap, which is sleeved on the rotating shaft and used to be connected to the sealing seat; and a rotating shaft sealing plate, which is sleeved on the rotating shaft and located in the gap.

[0018] In this technical solution, by providing a guide groove on the rotating shaft, the cleaning liquid in the tank body can be prevented from penetrating to the outside of the tank body along the rotating shaft, which plays the role of the first seal; the screw passes through the inner wall of the tank body and is screwed on the sealing seat to fix the sealing seat on the inner wall, which plays the role of the second seal, and the sealing cap is screwed on the sealing seat to further seal the connection between the inner wall and the rotating shaft; the rotating shaft sealing plate is sleeved on the rotating shaft and located in the gap. When the cleaning liquid penetrates through the inner wall via the rotating shaft, the rotating shaft sealing plate can play a further shielding role to prevent the cleaning liquid from penetrating to the outer wall of the tank body, which plays the role of the third seal. The sealing assembly ensures that the cleaning liquid in the tank body cannot penetrate to the outside of the tank body through three seals, further preventing the cleaning liquid from overflowing and corroding the outside of the tank body or polluting the environment.

[0019] More preferably, it also includes a rear plate mounting plate and multiple sealing gaskets and / or sealing rings. The rear plate mounting plate is sleeved on the rotating shaft, arranged on the outside of the trough body, and fixed on the outer wall of the trough body. The sealing gasket and / or sealing ring are used to be arranged between the sealing cap and the sealing seat and between the rear plate mounting plate and the outer wall.

[0020] In any of the above technical solutions, preferably, the cleaning tank further comprises: a sub-tank, which is arranged at the bottom of the tank body and is connected to an overflow port opened on the tank body through a gap.

[0021] In this technical solution, through the setting of the auxiliary tank, on the one hand, when the cleaning liquid penetrates through the inner wall via the rotating shaft and is blocked by the rotating shaft sealing plate, the dripping cleaning liquid can flow into the auxiliary tank through the gap, preventing the cleaning liquid from overflowing and being able to recover the cleaning liquid; on the other hand, when too much cleaning liquid is added to the tank body, the cleaning liquid can be discharged through the overflow port, and the discharged cleaning liquid is recovered into the auxiliary tank through the gap, further preventing the cleaning liquid from overflowing through the top of the tank body, thereby ensuring the safety of the use of the cleaning tank.

[0022] In any of the above technical solutions, preferably, the cleaning tank further comprises: a sealing plate, which is arranged in the gap and located between the rotating shaft and the overflow port.

[0023] In this technical solution, the gap between the inner wall and the outer wall at the top of the rotating shaft is sealed by setting a sealing plate to prevent the cleaning liquid discharged through the overflow port from dripping onto the rotating shaft, thereby increasing the service life of the rotating shaft. Furthermore, one end of the rotating shaft passes through one side of the tank body, and the overflow cleaning liquid can also be discharged to the auxiliary tank through the gap at other positions of the tank body.

[0024] In any of the above technical solutions, preferably, the cleaning tank also includes: a circulation pipe, which is arranged in the tank body; an output pipe, which is arranged on the auxiliary tank and connected to the circulation pipe through a circulation pump; a float sensor switch, which is arranged on the auxiliary tank and is used to detect the liquid level in the auxiliary tank and is communicatively connected to the circulation pump.

[0025] In this technical solution, by setting up a circulation pipe, an output pipe and a circulation pump, the cleaning liquid collected in the auxiliary tank can be circulated back to the tank body for recycling, or the circulation pump can be connected to the reagent supply pipeline to directly supply the cleaning liquid to the tank body, or the circulation pump can be connected to the reagent supply pipeline to directly supply the cleaning liquid to the auxiliary tank, which can improve the utilization rate of the cleaning liquid and make the supply of the cleaning liquid more flexible and convenient. Furthermore, by setting up a float sensor switch to detect the liquid level of the cleaning liquid in the auxiliary tank, when the circulation pump is used to circulate the cleaning liquid in the auxiliary tank back to the tank body, a threshold value can be set for the liquid level. When the liquid level is lower than the threshold value, the circulation pump is controlled to stop working to prevent the circulation pump from idling and increase the service life of the circulation pump.

[0026] In any of the above technical solutions, preferably, the cleaning tank further comprises: a water inlet pipe, which is arranged in the tank body; and a bubbling tube, which is arranged in the tank body.

[0027] In this technical solution, a water inlet pipe is provided to supply liquid water into the tank body, and a bubbling tube is provided to inflate the tank body through the bubbling tube. The bubbles rise in the cleaning liquid in the tank body, which can stir the cleaning liquid, making the cleaning liquid more uniform and improving the cleaning effect.

[0028] In any of the above technical solutions, preferably, the support member is a support plate.

[0029] In this technical solution, the support plate is provided to facilitate supporting the graphite boat, so that the graphite boat is more firmly fixed in the tank body, thereby ensuring the cleaning effect of the graphite boat.

[0030] According to a second aspect of the present invention, a cleaning device is also proposed, comprising: a cleaning tank proposed in any of the above technical solutions.

[0031] The cleaning device provided in the second aspect of the present invention comprises a cleaning tank as proposed in any of the above technical solutions, and therefore has all the beneficial effects of the cleaning tank.

[0032] Additional aspects and advantages of the present invention will become apparent from the following description or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0034] Figure 1 It is a schematic diagram of the structure of a cleaning tank according to an embodiment of the present invention;

[0035] Figure 2 for Figure 1 a side view of the cleaning tank of the illustrated embodiment;

[0036] Figure 3 for Figure 1 A top view of the cleaning tank of the illustrated embodiment;

[0037] Figure 4 is a structural schematic diagram of a sealing assembly according to an embodiment of the present invention;

[0038] Figure 5 is a schematic diagram of a cleaning tank in use according to an embodiment of the present invention;

[0039] Figure 6 for Figure 5 a side view of the cleaning tank of the illustrated embodiment;

[0040] Figure 7 for Figure 5 A top view of a cleaning tank of the illustrated embodiment.

[0041] in, Figures 1 to 7 The corresponding relationship between the reference numerals and the component names is as follows:

[0042] 2 tank body, 4 rotating assembly, 6 support member, 8 rotating shaft, 10 driving member, 12 sealing assembly, 14 inner wall, 16 outer wall, 18 guide groove, 20 sealing seat, 22 sealing cap, 24 rotating shaft sealing plate, 26 auxiliary groove, 28 overflow port, 30 sealing plate, 32 circulation pipe, 34 output pipe, 36 float sensor switch, 38 water inlet pipe, 39 bubbling tube, 42 first sealing ring, 44 second sealing ring, 46 sealing rubber pad, 48 rear plate mounting plate, 50 third sealing ring, 52 rear plate mounting plate sealing pad, 54 graphite boat. DETAILED DESCRIPTION

[0043] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0044] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0045] Refer to the following Figures 1 to 7 The cleaning tanks provided according to some embodiments of the present invention are described. Embodiment 1

[0046] like Figures 1 to 7 As shown, this embodiment provides a cleaning tank, including: a tank body 2, a rotating component 4 and a supporting member 6.

[0047] The rotating assembly 4 is disposed in the tank body 2 and is configured to be rotatable relative to the tank body 2 ; the supporting member 6 is disposed on the rotating assembly 4 .

[0048] The cleaning tank of the present invention is provided with a rotating component 4 and a supporting member 6. During operation, the rotating component 4 is rotated at a certain angle (about 90°) to drive the supporting member 6 to rotate, so that the supporting member 6 is vertical and a loading gap is configured. At this time, the graphite boat 54 can be lowered into the tank body 2 through the loading gap. The graphite boat 54 will be at the bottom of the tank body 2 and below the transmission component. Then the rotating component 4 is driven again to flatten the supporting member 6, and another graphite boat 54 can be placed on the supporting member 6. In this way, two graphite boats 54 can be cleaned at the same time, which greatly improves the cleaning efficiency and the utilization rate of the cleaning agent and the occupied space, and can reduce the investment in the cleaning equipment and the occupied area of ​​the cleaning equipment. Embodiment 2

[0049] like Figures 1 to 7 As shown, this embodiment provides a cleaning tank, including: a tank body 2; a rotating assembly 4, which is disposed in the tank body 2 and is configured to be rotatable relative to the tank body 2; and a support member 6, which is disposed on the rotating assembly 4.

[0050] Optionally, the rotating component 4 includes: a rotating shaft 8, which is arranged in the slot body 2, one end of the rotating shaft 8 passes through the slot body 2 and extends out of the slot body 2, and the support member 6 is arranged on the rotating shaft 8; a driving member 10, which is arranged on the slot body 2, and the output end of the driving member 10 is connected to the end of the rotating shaft 8 extending out of the slot body 2; a sealing component 12, which is arranged at the connection between the rotating shaft 8 and the slot body 2.

[0051] In this embodiment, the driving member 10 drives the rotating shaft 8 to rotate, and then drives the supporting member 6 to rotate, so as to configure a loading gap for the graphite boat 54 to be lowered into the tank body 2. At the same time, since a cleaning liquid needs to be configured in the tank body 2, in order to ensure a good cleaning effect, the cleaning liquid usually has a certain acidity. Through the setting of the sealing component 12, the connection between the rotating shaft 8 and the tank body 2 is sealed to prevent the cleaning liquid from overflowing and corroding the outside of the tank body 2 or polluting the environment.

[0052] Specifically, the driving member 10 can be a cylinder arranged on the outside of the trough body 2. By adjusting the telescopic length of the cylinder, the rotation angle of the rotating shaft 8 can be controlled, and the rotation direction of the rotating shaft 8 can be controlled by extending or contracting the cylinder, making the driving more convenient and accurate.

[0053] Optionally, there are multiple rotating shafts 8 , and each rotating shaft 8 is provided with at least one supporting member 6 .

[0054] In this embodiment, there can be multiple rotating shafts 8. On the one hand, the multiple rotating shafts 8 can support multiple graphite boats 54, and on the other hand, they can divide the tank body 2 into upper and lower double-layer spaces. Each layer of space can accommodate a corresponding number of graphite boats 54. The cleaning tank can clean multiple graphite boats 54 at the same time, which can further improve the cleaning efficiency.

[0055] More preferably, the distance between two adjacent rotation axes 8 is greater than the width of the graphite boat 54 . Embodiment 3

[0056] like Figures 1 to 7 As shown, this embodiment provides a cleaning tank, including: a tank body 2; a rotating assembly 4, which is disposed in the tank body 2 and is configured to be rotatable relative to the tank body 2; and a support member 6, which is disposed on the rotating assembly 4.

[0057] Optionally, the rotating component 4 includes: a rotating shaft 8, which is arranged in the slot body 2, one end of the rotating shaft 8 passes through the slot body 2 and extends out of the slot body 2, and the support member 6 is arranged on the rotating shaft 8; a driving member 10, which is arranged on the slot body 2, and the output end of the driving member 10 is connected to the end of the rotating shaft 8 extending out of the slot body 2; a sealing component 12, which is arranged at the connection between the rotating shaft 8 and the slot body 2.

[0058] Optionally, the side wall of the tank body 2 includes an inner wall 14 and an outer wall 16 , and a gap is left between the outer wall 16 and the inner wall 14 .

[0059] In this embodiment, by setting the inner wall 14 and the outer wall 16 of the trough body 2, the inner wall 14 is nested on the inner side of the outer wall 16, and a gap is left between the outer walls 16, so that the side wall of the trough body 2 has a double-layer structure, which can further prevent the overflow of the cleaning liquid, prevent the overflow of the cleaning liquid from corroding the outside of the trough body 2 or polluting the environment.

[0060] Optionally, the sealing assembly 12 includes: a guide groove 18, which is opened on the rotating shaft 8; a sealing seat 20, which is sleeved on the rotating shaft 8, located in the groove body 2 and arranged on the inner wall 14; a sealing cap 22, which is sleeved on the rotating shaft 8 and is used to be connected to the sealing seat 20; a rotating shaft sealing plate 24, which is sleeved on the rotating shaft 8 and is located in the gap.

[0061] In this embodiment, by providing a guide groove on the rotating shaft 8, the cleaning liquid in the tank body 2 can be prevented from penetrating along the rotating shaft 8 to the outside of the tank body 2, which plays the role of the first seal; the screw passes through the inner wall 14 of the tank body 2 and is screwed on the sealing seat 20, and the sealing seat 20 is fixed on the inner wall 14, which plays the role of the second seal, and the sealing cap 22 is screwed on the sealing seat 20 to further seal the connection between the inner wall 14 and the rotating shaft 8; the rotating shaft sealing plate 24 is sleeved on the rotating shaft 8 and is located in the gap. When the cleaning liquid penetrates through the inner wall 14 via the rotating shaft 8, the rotating shaft sealing plate 24 can further block the cleaning liquid from penetrating to the outer wall 16 of the tank body 2, which plays the role of the third seal. The sealing assembly 12 ensures that the cleaning liquid in the tank body 2 cannot penetrate to the outside of the tank body 2 through three seals, and further prevents the cleaning liquid from overflowing and corroding the outside of the tank body 2 or polluting the environment.

[0062] More preferably, it also includes a rear plate mounting plate 48, multiple sealing gaskets and / or sealing rings. The rear plate mounting plate 48 is sleeved on the rotating shaft 8, arranged on the outside of the trough body 2, and fixed on the outer wall 16 of the trough body 2. The sealing gasket and / or sealing ring are used to be arranged between the sealing cap 22 and the sealing seat 20, and between the rear plate mounting plate 48 and the outer wall 16. Embodiment 4

[0063] like Figures 1 to 7 As shown, this embodiment provides a cleaning tank, including: a tank body 2; a rotating assembly 4, which is disposed in the tank body 2 and is configured to be rotatable relative to the tank body 2; and a support member 6, which is disposed on the rotating assembly 4.

[0064] Optionally, the rotating component 4 includes: a rotating shaft 8, which is arranged in the slot body 2, one end of the rotating shaft 8 passes through the slot body 2 and extends out of the slot body 2, and the support member 6 is arranged on the rotating shaft 8; a driving member 10, which is arranged on the slot body 2, and the output end of the driving member 10 is connected to the end of the rotating shaft 8 extending out of the slot body 2; a sealing component 12, which is arranged at the connection between the rotating shaft 8 and the slot body 2.

[0065] Optionally, the side wall of the tank body 2 includes an inner wall 14 and an outer wall 16 , and a gap is left between the outer wall 16 and the inner wall 14 .

[0066] Optionally, the cleaning tank further includes: a sub-tank 26, which is disposed at the bottom of the tank body 2 and is connected to an overflow port 28 opened on the tank body 2 through a gap.

[0067] In this embodiment, by setting the auxiliary groove 26, on the one hand, when the cleaning liquid penetrates through the inner wall 14 via the rotating shaft 8 and is blocked by the rotating shaft sealing plate 24, the dripping cleaning liquid can flow into the auxiliary groove 26 through the gap, thereby preventing the cleaning liquid from overflowing and being able to recover the cleaning liquid; on the other hand, when too much cleaning liquid is added to the tank body 2, the cleaning liquid can be discharged through the overflow port 28, and the discharged cleaning liquid is recovered into the auxiliary groove 26 through the gap, thereby further preventing the cleaning liquid from overflowing through the top of the tank body 2, thereby ensuring the safety of the use of the cleaning tank.

[0068] Optionally, the cleaning tank further includes: a sealing plate 30 , which is arranged in the gap and located between the rotating shaft 8 and the overflow port 28 .

[0069] In this embodiment, the sealing plate 30 is provided to seal the gap between the inner wall 14 and the outer wall 16 at the top of the rotating shaft 8, so as to prevent the cleaning liquid discharged through the overflow port 28 from dripping onto the rotating shaft 8, thereby improving the service life of the rotating shaft 8. Furthermore, one end of the rotating shaft 8 passes through one side of the tank body 2, and the overflowed cleaning liquid can also be discharged to the auxiliary tank 26 through the gaps at other positions of the tank body 2.

[0070] Optionally, the cleaning tank also includes: a circulation pipe 32, which is arranged in the tank body 2; an output pipe 34, which is arranged on the auxiliary tank 26 and connected to the circulation pipe 32 through a circulation pump; a float sensor switch 36, which is arranged on the auxiliary tank 26 and is used to detect the liquid level in the auxiliary tank 26 and is communicatively connected to the circulation pump.

[0071] In this embodiment, by setting the circulation pipe 32, the output pipe 34 and the circulation pump, the cleaning liquid collected in the auxiliary tank 26 can be circulated back to the tank body 2 for recycling, and the cleaning liquid can be directly supplied to the tank body 2 by connecting the circulation pump to the reagent supply pipeline, and the cleaning liquid can be directly supplied to the auxiliary tank 26 by connecting the circulation pump to the reagent supply pipeline, which can improve the utilization rate of the cleaning liquid and make the supply of the cleaning liquid more flexible and convenient. Further, by setting the float sensor switch 36 to detect the liquid level of the cleaning liquid in the auxiliary tank 26, when the circulation pump is used to circulate the cleaning liquid in the auxiliary tank 26 back to the tank body 2, a threshold value can be set for the liquid level. When the liquid level is lower than the threshold value, the circulation pump is controlled to stop working to prevent the circulation pump from idling and increase the service life of the circulation pump.

[0072] Optionally, the cleaning tank further includes: a water inlet pipe 38 , which is disposed in the tank body 2 ; and a bubbling tube 39 , which is disposed in the tank body 2 .

[0073] In this embodiment, the water inlet pipe 38 is provided to supply liquid water into the tank body 2. The bubbling tube 39 can be used to inflate the tank body 2. The bubbles rise in the cleaning liquid in the tank body 2, which can stir the cleaning liquid, make the cleaning liquid more uniform, and improve the cleaning effect.

[0074] Optionally, the support member 6 is a support plate.

[0075] In this embodiment, the support plate is provided to facilitate supporting the graphite boat 54 so that the graphite boat 54 is more firmly fixed in the tank body 2 , thereby ensuring the cleaning effect of the graphite boat 54 . Embodiment 5

[0076] An embodiment of the present invention further provides a cleaning device, comprising: a cleaning tank provided in any of the above embodiments.

[0077] In this embodiment, since the cleaning device includes a cleaning tank as proposed in any of the above technical solutions, it has all the beneficial effects of the cleaning tank. Specific embodiments

[0078] The cleaning tank of this embodiment is used to clean the graphite boat 54. Figure 5 As shown, in this embodiment, a rotating shaft 8 (one on each side) that can be controlled to rotate by a cylinder is installed in the tank body 2, and a support plate for supporting the graphite boat 54 is installed on the upper part of the rotating shaft 8. When the graphite boat 54 needs to be cleaned, the rotating shaft 8 is rotated 90° by the cylinder (the horizontal angle between the support plate and the tank is 90°, and the distance between the two support plates is greater than the width of the graphite boat 54), and the manipulator places the first graphite boat 54 in the tank from the middle of the two rotating shafts 8. The manipulator extracts the second graphite boat 54 from the tank to the loading platform. During this process, the cylinder rotates the rotating shaft 8 by another 90° (the horizontal angle between the support plate and the tank is 0°) to return to the original position (the distance between the two support plates is less than the width of the graphite boat 54), and the manipulator places the second graphite boat 54 on the two support plates and then starts cleaning. In this way, a single cleaning tank can clean two graphite boats 54 at the same time, which greatly improves the cleaning efficiency and saves cleaning time. After the pickling is completed, the manipulator places the two boats from the tank body 2 in the water tank for water washing in the same way. After adding the rotating shaft 8 and the cylinder, the liquid level during cleaning will exceed the installation height of the rotating shaft 8, which may cause leakage. Figure 4As shown, a guide groove 18 is processed on the rotating shaft 8, and the rotating shaft 8 is passed through the sealing cap 22, the first sealing ring 42, the second sealing ring 44, the sealing seat 20 and the sealing pad 46 in sequence. The sealing seat 20 and the sealing pad 46 are installed on the inner wall 14 of the tank body 2 with screws, and then the first sealing ring 42 and the second sealing ring 44 (tightly matched with the rotating shaft 8) are nested into the inner hole of the sealing seat 20, and then the sealing cap 22 is connected to the sealing seat 20, and the sealing ring is squeezed. This is the first sealing structure. In case the liquid medicine leaks out later, it will also drip into the auxiliary groove 26 (the overflow port 28 of the auxiliary groove 26 will not be higher than the installation hole of the rotating shaft 8). To prevent the liquid medicine from seeping out of the groove along the shaft, a rotating shaft sealing plate 24 is added in the middle, which is the second sealing structure. When the rear plate mounting plate 48 is fixed to the rear side plate of the tank body 2, a third sealing ring 50 and a rear plate mounting plate sealing pad 52 are installed as the third sealing structure to ensure that there will be no leakage or seepage.

[0079] This embodiment increases the number of graphite boats 54 cleaned in a single time, improves the cleaning efficiency, and reduces the space occupied at the customer site.

[0080] In the description of the present invention, the term "plurality" refers to two or more than two. Unless otherwise clearly defined, the orientation or positional relationship indicated by the terms "upper" and "lower" is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present invention. The terms "connection", "installation", "fixation" and the like should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0081] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "specific embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0082] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A cleaning tank, characterized in that: include: Tank body; A rotating assembly, disposed in the slot body and configured to be rotatable relative to the slot body; A support member is arranged on the rotating assembly, and when the rotating assembly rotates, the support member is driven to rotate, so that the support member is in a vertical shape and a loading gap is configured; The rotating assembly comprises: A rotating shaft is arranged in the slot body, one end of the rotating shaft passes through the slot body and extends out of the slot body, and the supporting member is arranged on the rotating shaft; A driving member, disposed on the slot body, wherein an output end of the driving member is connected to an end of the rotating shaft extending out of the slot body; A sealing assembly, arranged at the connection between the rotating shaft and the tank body; The side wall of the trough body includes an inner wall and an outer wall, the inner wall is nested inside the outer wall, and a gap is left between the outer wall and the inner wall; The sealing assembly comprises: A flow guide groove is provided on the rotating shaft; A sealing seat, sleeved on the rotating shaft, located in the groove body and arranged on the inner wall; A sealing cap, sleeved on the rotating shaft and used to be connected to the sealing seat; A rotating shaft sealing plate, sleeved on the rotating shaft and located in the gap; The cleaning tank also includes: A secondary tank is arranged at the bottom of the tank body and is connected to an overflow port provided on the tank body through the gap; A sealing plate, arranged in the gap and located between the rotating shaft and the overflow port; The cleaning tank also includes: A rear plate mounting plate, the rear plate mounting plate is sleeved on the rotating shaft, arranged outside the tank body, and fixed on the outer wall of the tank body; There are multiple rotating shafts, each of which is provided with at least one supporting member, and the distance between two adjacent rotating shafts is greater than the width of the graphite boat; The plurality of rotating shafts can support a plurality of graphite boats on one hand, and can divide the tank body into upper and lower double-layer spaces on the other hand, and each layer of space can accommodate a corresponding number of graphite boats.

2. The cleaning tank according to claim 1, characterized in that: Also includes: A circulation pipe is arranged in the tank body; An output pipe, arranged on the auxiliary tank and connected to the circulation pipe through a circulation pump; The float induction switch is arranged on the auxiliary tank, is used for detecting the liquid level in the auxiliary tank, and is communicatively connected to the circulation pump.

3. The cleaning tank according to claim 1 or 2, characterized in that: Also includes: A water inlet pipe is arranged in the tank body; The bubbling tube is arranged in the tank body.

4. A cleaning device, characterized in that: include The cleaning tank according to any one of claims 1 to 3.

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